Sand blasting treatment device for surfaces of semiconductor equipment parts

Abstract

The invention relates to the technical field of semiconductor manufacturing equipment, and discloses a semiconductor equipment part surface sand blasting treatment device which comprises a processing bin, a sand blasting assembly is arranged at the top of an inner cavity of the processing bin, guide rails are fixedly connected to the two sides of the inner cavity of the processing bin, and inner cavities of the guide rails are movably connected with push-pull plates. According to the invention, a dual purification system of'storage barrel inlet filtration 'and'sand blasting head terminal filtration' is innovatively arranged, the grinding materials are primarily screened by the filter bin below the barrel cover when being added, and all the grinding materials must forcibly pass through the high-precision filter screen in the inner cavity of the sand blasting head before being jetted. The two-stage filtration effectively intercepts harmful impurities of all sizes, such as metal scraps and dust cakes, and ensures the purity of a spraying medium, so that a high-quality surface without scratches and pits can be obtained, the surface smoothness and the treatment consistency of semiconductor parts are remarkably improved, and a reliable foundation is laid for a subsequent precision manufacturing process.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a sandblasting treatment device for the surface of semiconductor equipment components. Background Technology

[0002] As a core component of semiconductor manufacturing equipment, the surface quality of semiconductor equipment components directly affects the processing accuracy, product yield, and equipment operational stability of semiconductor chips. Sandblasting is a key process for surface modification of semiconductor equipment components. By using high-speed jets of abrasive particles to impact and cut the surface of the components, surface oxide layers, oil stains, and impurities can be removed, while forming a uniform micro-rough structure, laying the foundation for subsequent processes such as coating and welding. Currently, semiconductor equipment component sandblasting machines mainly consist of a sandblasting chamber, a spray gun, an abrasive storage tank, a delivery pump, and a control system. Their working principle is as follows: abrasive particles in the storage tank are pressurized by the delivery pump and then propelled at high speed by the spray gun onto the surface of the component placed in the sandblasting chamber, achieving surface treatment. However, existing semiconductor equipment component sandblasting machines have technical defects in practical applications: they lack an effective abrasive filtration mechanism. During storage, transportation, and recycling, impurities (such as metal shavings, dust, and large-diameter agglomerated particles) easily mix into the abrasive. When these impurities are sprayed along with the abrasive, they cause scratches, pits, and other damage to the component surface, severely affecting surface finish. To address these issues, we provide a surface sandblasting apparatus for semiconductor device components. Summary of the Invention

[0003] The purpose of this invention is to outline some aspects of the embodiments of the invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this part, as well as in the abstract and title of this application, to avoid obscuring the purpose of this part, the abstract, and the title, and such simplifications or omissions should not be used to limit the scope of the invention.

[0004] In view of the problems existing in the sandblasting technology for semiconductor equipment components, this invention is proposed.

[0005] Therefore, the problem to be solved by this invention is: how to effectively filter impurities in abrasives to prevent them from damaging the surface of precision parts during sandblasting, while improving the uniformity and automation of the process.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a surface sandblasting treatment device for semiconductor equipment components, comprising a processing chamber, a sandblasting assembly disposed at the top of the inner cavity of the processing chamber, guide rails fixedly connected to both sides of the inner cavity of the processing chamber, a push-pull plate movably connected to the inner cavity of the guide rails, a processing table disposed at the top of the push-pull plate, the sandblasting assembly comprising a storage cylinder, the bottom of the storage cylinder being fixedly connected to the top of the processing chamber, a cylinder cover disposed at the top of the storage cylinder, a filter chamber fixedly connected to the bottom of the cylinder cover, an abrasive pump disposed at the top of the processing chamber and on one side of the storage cylinder, a connecting pipe disposed at one end of the abrasive pump, a mounting frame fixedly connected to the top of the inner cavity of the processing chamber, an adjusting seat movably connected to the inner cavity of the mounting frame, a sandblasting head fixedly connected to the bottom of the adjusting seat, a filter screen disposed in the inner cavity of the sandblasting head, a positioning frame fixedly connected to one side of the sandblasting head, and an insertion rod fixedly connected to one side of the filter screen.

[0007] As a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, the positioning frame is threaded with a fastening bolt on one side, and one end of the fastening bolt is threadedly connected to a bolt hole on the surface of the insertion rod. This feature establishes a detachable mechanical connection between the positioning frame and the insertion rod on the side of the sandblasting head. Specifically, the filter screen is initially positioned by inserting the insertion rod into the corresponding slot or hole of the positioning frame. Subsequently, the fastening bolt is tightened so that its end is screwed into the pre-set bolt hole on the surface of the insertion rod. The axial tension of the bolt is used to tightly pull the insertion rod toward the positioning frame, thereby achieving rigid fixation between the filter screen and the sandblasting head.

[0008] As a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, a sealing gasket is fixedly connected to one side of the filter screen, and a cover plate is fixedly connected to the side of the sealing gasket away from the filter screen. One side of the cover plate is in contact with the surface of the sandblasting head. This feature constitutes a modular filtration unit inside the sandblasting head. The filter screen is the core filtration component, used to intercept large particles of impurities in the abrasive. The sealing gasket (usually made of elastic materials such as rubber) surrounds the edge of the filter screen and is connected to the cover plate. The cover plate covers the sandblasting head housing in a detachable manner, pressing the sealing gasket tightly, thereby forming a sealed environment around the filter screen.

[0009] As a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, a motor is fixedly connected to one side of the inner cavity of the mounting bracket, and a screw is fixedly connected to the output end of the motor. The surface of the screw is threadedly connected to the inner cavity of the adjusting seat. This feature constitutes an automatic linear drive mechanism for the sandblasting head. The motor serves as a power source, and its rotational output directly drives the screw to rotate synchronously. The adjusting seat has a thread (i.e., a nut) that matches the screw. When the screw rotates, since the adjusting seat is restricted from rotating by the mounting bracket, it will generate a precise linear motion along the axial direction of the screw under the action of the threaded pair, thereby driving the sandblasting head fixed at the bottom of the adjusting seat to move.

[0010] As a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, an electric push rod is provided at the bottom of the push-pull plate. The telescopic shaft of the electric push rod passes through the top of the push-pull plate and is fixedly connected to the bottom of the processing table. This feature constitutes a height adjustment mechanism for the processing table. The electric push rod is fixed below the push-pull plate, and its telescopic push rod (telescopic shaft) passes upward through the hole in the push-pull plate. Its end is rigidly connected to the bottom of the processing table. By controlling the extension and retraction of the electric push rod, the processing table can be directly lifted or pulled down to change its height relative to the sandblasting head.

[0011] As a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, the bottom of the processing chamber is fixedly connected to a support frame, and anti-slip pads are fixedly connected to both sides of the bottom of the support frame. The support frame provides bottom support for the processing chamber and is usually welded or assembled from sturdy profiles. The anti-slip pads (such as rubber pads) are attached to the feet of the support frame that are in contact with the ground. The stable support frame is the foundation for the stable operation of the equipment and can withstand the reaction force and vibration during sandblasting. The anti-slip pads increase the friction with the ground, prevent the equipment from slipping during operation, and absorb some vibration and reduce noise.

[0012] As a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, the bottom of the processing chamber is fixedly connected to a collection chamber, a recovery chamber is provided on one side of the bottom of the collection chamber, and a recovery pipe is provided at the bottom of one side of the recovery chamber. This feature constitutes a system for collecting and initially recovering abrasive and waste materials. After use, the abrasive, stripped impurities, and dust fall into the collection chamber at the bottom of the processing chamber under the action of gravity. The collection chamber is designed with an inclined bottom or a guide structure so that the mixture flows into the recovery chamber at a lower position. In the recovery chamber, preliminary solid-liquid (gas) separation or impurity separation may be carried out by means of sedimentation, sieving, or magnetic separation. The relatively clean abrasive can be pumped back to the storage cylinder for recycling through the recovery pipe at the bottom.

[0013] In a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, a magnetic frame is fixedly connected to the top of the storage cylinder surface, and the bottom of the cylinder cover is movably connected to the inner cavity of the magnetic frame. A magnetic frame with a magnetic material (such as a permanent magnet) is fixed around the opening of the storage cylinder, and the bottom edge of the cylinder cover is made of a material that can be attracted by magnetic force (such as iron), or has such material embedded in it. When the cylinder cover is closed, its bottom is embedded in the magnetic frame and is automatically attracted and fixed under the action of magnetic force.

[0014] In a preferred embodiment of the surface sandblasting device for semiconductor equipment components described in this invention, the processing chamber has a sealed door on its front side, and an observation window on the front side of the sealed door. The sealed door is hinged or slidably installed on the front side of the processing chamber, and has a sealing strip on its edge, allowing it to seal the chamber when closed. The observation window is constructed of a high-strength transparent material (such as tempered glass or polycarbonate sheet) embedded in the center of the sealed door. The sealed door closes during equipment operation, effectively isolating high-speed splashing abrasive and generated dust, ensuring operator safety, and meeting environmental protection requirements. Operators can monitor the sandblasting process, workpiece status, and sandblasting head operation in real time through the observation window without opening the door, facilitating timely detection and adjustment of problems.

[0015] In a preferred embodiment of the surface sandblasting treatment device for semiconductor equipment components described in this invention, limiting rods are fixedly connected to both sides of the bottom of the processing table. The bottom of the limiting rods extends through to the bottom of the push-pull plate, and limiting rods (such as optical axes or guide rods) are fixedly connected vertically downward to the bottom of the processing table. These limiting rods pass through corresponding guide holes or linear bearings on the push-pull plate and extend below them. When an asymmetrical workpiece is placed on the processing table or when it is subjected to uneven lateral force from the sandblasting flow, the limiting rods and the guide holes on the push-pull plate form a stable guide pair, which can effectively prevent the processing table from tilting, shaking, or rotating horizontally when it is raised, lowered, or stationary, ensuring the stability of the workpiece posture.

[0016] The beneficial effects of this invention are as follows: This invention innovatively sets up a dual purification system of "inlet filtration of the storage cylinder" and "terminal filtration of the blasting head." The abrasive undergoes initial screening in the filter chamber below the cylinder cover upon addition, and before blasting, all abrasive must be forced through a high-precision filter screen inside the blasting head cavity. These two stages of filtration effectively intercept harmful impurities of all sizes, such as metal shavings and dust clumps, ensuring the purity of the blasting medium. This results in a high-quality surface free of scratches and dents, significantly improving the surface finish and processing consistency of semiconductor components, and laying a reliable foundation for subsequent precision manufacturing processes. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein: Figure 1 This is a perspective view of a sandblasting device for semiconductor equipment components.

[0018] Figure 2 This is a cross-sectional schematic diagram of a sandblasting treatment device for semiconductor equipment components.

[0019] Figure 3 This is a bottom view schematic diagram of a sandblasting treatment device for semiconductor equipment components.

[0020] Figure 4 Surface sandblasting equipment for semiconductor equipment components Figure 3 A magnified view of a portion of point A in the middle.

[0021] Figure 5 This is a schematic diagram of the sandblasting head in a surface sandblasting treatment device for semiconductor equipment components.

[0022] Figure 6 This is a cross-sectional schematic diagram of the sandblasting head in a surface sandblasting treatment device for semiconductor equipment components.

[0023] Figure 7 This is a cross-sectional schematic diagram of the storage cylinder in a surface sandblasting treatment device for semiconductor equipment components. Detailed Implementation

[0024] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0025] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments. Example 1

[0027] Reference Figures 1-7This is the first embodiment of the present invention, which provides a surface sandblasting treatment device for semiconductor equipment components. The device includes a processing chamber 1, a sandblasting assembly 2 disposed at the top of the inner cavity of the processing chamber 1, guide rails 3 fixedly connected to both sides of the inner cavity of the processing chamber 1, a push-pull plate 4 movably connected to the inner cavity of the guide rails 3, a processing table 5 disposed at the top of the push-pull plate 4, and a storage cylinder 201. The bottom of the storage cylinder 201 is fixedly connected to the top of the processing chamber 1, a cylinder cover 202 is disposed at the top of the storage cylinder 201, and a bottom of the cylinder cover 202 is fixedly connected to... An abrasive pump 204 is installed at the top of the processing chamber 1 and on one side of the storage cylinder 201. A connecting pipe 205 is installed at one end of the abrasive pump 204. An installation frame 206 is fixedly connected to the top of the inner cavity of the processing chamber 1. An adjusting seat 207 is movably connected to the inner cavity of the installation frame 206. A sandblasting head 208 is fixedly connected to the bottom of the adjusting seat 207. A filter screen 209 is installed in the inner cavity of the sandblasting head 208. A positioning frame 210 is fixedly connected to one side of the sandblasting head 208. A plug rod 211 is fixedly connected to one side of the filter screen 209.

[0028] Specifically, during operation, the parts to be processed are placed on the processing table 5. The operator can monitor the internal process through the observation window on the front sealing door 12. The push-pull plate 4 can be smoothly moved in or out along the guide rails 3 fixed on both sides of the processing chamber 1 for easy loading and unloading. When the device is started, the sandblasting assembly 2 located at the top of the processing chamber 1 begins to work. The abrasive pump 204 pumps out the abrasive medium stored in the storage cylinder 201 and delivers it to the sandblasting head 208 through the connecting pipe 205. Crucially, the abrasive undergoes two filtrations along its delivery path: first, it undergoes initial filtration in the filter chamber 203 directly connected below the cylinder cover 202 at the top of the storage cylinder 201 to intercept large particles of impurities that may be mixed in during storage and addition; second, inside the sandblasting head 208, the abrasive must pass through the precision filter screen 209 set in its inner cavity before final blasting. This filtration effectively removes fine metal debris, dust, or any agglomerates that may form during the circulation process. The cleaned abrasive, after undergoing double purification, is ejected at high speed from the blasting head 208 under high pressure, impacting the surface of the parts to achieve cleaning and roughening. During the process, the blasting head 208 is mounted in the mounting bracket 206 via the adjusting seat 207, allowing for precise position adjustment. The processing table 5 can also be adjusted in height via its bottom lifting mechanism. Together, these two mechanisms ensure that the blasting flow covers the workpiece surface at the optimal angle and distance, achieving uniform treatment. After use, the abrasive, detached impurities, and dust fall into the collection chamber 10 at the bottom of the processing chamber 1 under gravity, and further flow into the recovery chamber 11 for sedimentation and separation. The cleaner abrasive can be pumped back into the system for recycling through the recovery pipe, while impurities are retained.

[0029] Specifically, the core improvement of this device lies in the construction of a highly efficient, closed sandblasting system with active purification capabilities. Its sandblasting component 2 is not a simple blasting unit, but a complete module integrating material storage, filtration, pumping, precise blasting, and recovery guidance. The filter chamber 203 at the top of the storage cylinder 201 constitutes the first level of protection; its integrated design with the cylinder cover 202 facilitates simultaneous preliminary screening when adding new abrasive. The filter screen 209 embedded in the sandblasting head 208 is the crucial second-level barrier ensuring blasting quality. It is tightly installed in the sandblasting flow channel, ensuring that all abrasive must pass through it before leaving the nozzle. These two levels of filtration are spatially separated—one in the storage cylinder 201, and the other in the sandblasting head 208—and functionally complementary, jointly solving the core defect mentioned in the background art: the easy mixing of impurities into the abrasive and damage to the workpiece surface. Meanwhile, the cooperation between the mounting bracket 206 and the adjusting seat 207 allows the position of the sandblasting head 208 to be precisely linearly adjusted by the screw 7 driven by the motor 6. This not only adapts to workpieces of different sizes but also makes programmed control of the scanning path possible, thereby improving the uniformity and automation of the processing. The processing table 5 is raised and lowered by an electric push rod 8, which, combined with the horizontally movable push-pull plate 4, allows the workpiece to be flexibly positioned to the optimal processing position. The entire system operates within a sealed processing chamber 1, and the abrasive is recycled through a collection and recovery mechanism at the bottom. This not only improves the surface treatment quality and protects precision parts but also demonstrates environmental protection and economy. Example 2

[0030] Reference Figure 1-6 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0031] Specifically, a fastening bolt is threaded on one side of the positioning bracket 210, and one end of the fastening bolt is threaded into the bolt hole on the surface of the insertion rod 211.

[0032] This feature establishes a detachable mechanical connection between the positioning frame 210 and the insertion rod 211 on one side of the sandblasting head 208. Specifically, the filter screen 209 is initially positioned by inserting the insertion rod 211 into the corresponding slot or hole of the positioning frame 210. Then, the fastening bolt is tightened so that its end is screwed into the bolt hole on the surface of the insertion rod 211. The axial tension of the bolt is used to tightly pull the insertion rod 211 toward the positioning frame 210, thereby achieving rigid fixation between the filter screen 209 and the sandblasting head 208.

[0033] Specifically, a sealing gasket is fixedly connected to one side of the filter screen 209, and a cover plate is fixedly connected to the side of the sealing gasket away from the filter screen 209. One side of the cover plate is in contact with the surface of the sandblasting head 208.

[0034] This feature constitutes a modular filtration unit inside the blasting head 208. The filter screen 209 is the core filtration component, used to intercept large particles of impurities in the abrasive. The sealing gasket (usually made of elastic materials such as rubber) surrounds the edge of the filter screen 209 and is connected to the cover plate. The cover plate covers the housing of the blasting head 208 in a removable manner, pressing the sealing gasket to form a sealed environment around the filter screen 209.

[0035] Specifically, a motor 6 is fixedly connected to one side of the inner cavity of the mounting bracket 206, and a screw 7 is fixedly connected to the output end of the motor 6. The surface of the screw 7 is threadedly connected to the inner cavity of the adjusting seat 207.

[0036] This feature constitutes the automatic linear drive mechanism of the sandblasting head 208. The motor 6 serves as the power source, and its rotational output directly drives the screw 7 to rotate synchronously. The adjusting seat 207 has a thread, i.e. a nut, that matches the screw 7. When the screw 7 rotates, the adjusting seat 207 is restricted from rotating by the mounting bracket 206. Under the action of the thread pair, it will generate a precise linear motion along the axis of the screw 7, thereby driving the sandblasting head 208 fixed at the bottom of the adjusting seat 207 to move.

[0037] Specifically, an electric push rod 8 is provided at the bottom of the push-pull plate 4. The telescopic shaft of the electric push rod 8 extends through the top of the push-pull plate 4 and is fixedly connected to the bottom of the processing table 5.

[0038] This feature constitutes the height adjustment mechanism of the processing table 5. The electric push rod 8 is fixed below the push-pull plate 4. Its telescopic push rod extends upward through the hole on the push-pull plate 4, and its end is rigidly connected to the bottom of the processing table 5. By controlling the extension and retraction of the electric push rod 8, the processing table 5 can be directly lifted or pulled down to change its height relative to the sandblasting head 208.

[0039] Specifically, a support frame 9 is fixedly connected to the bottom of the processing chamber 1, and anti-slip pads are fixedly connected to both sides of the bottom of the support frame 9.

[0040] The support frame 9 provides bottom support for the processing chamber 1. It is usually made of sturdy profiles welded or assembled. Anti-slip pads, such as rubber pads, are attached to the feet of the support frame 9 that are in contact with the ground. The stable support frame 9 is the foundation for the stable operation of the equipment and can withstand the reaction force and vibration during sandblasting. The anti-slip pads increase the friction with the ground, prevent the equipment from slipping during operation, and absorb some vibration and reduce noise. Example 3

[0041] Reference Figure 1 , Figure 2 , Figure 3 and Figure 7 This is the third embodiment of the present invention, which is based on the first two embodiments.

[0042] Specifically, a collection chamber 10 is fixedly connected to the bottom of the processing chamber 1, a recycling chamber 11 is provided on one side of the bottom of the collection chamber 10, and a recycling pipe is provided at the bottom of one side of the recycling chamber 11.

[0043] This feature constitutes the abrasive and waste collection and preliminary recycling system. After use, the abrasive, stripped impurities and dust fall into the collection chamber 10 at the bottom of the processing chamber 1 under the action of gravity. The collection chamber 10 is designed with an inclined bottom or a guide structure so that the mixture flows into the recovery chamber 11 at a lower position. In the recovery chamber 11, preliminary solid-liquid-gas separation or impurity separation may be carried out by means of sedimentation, screening or magnetic separation. The relatively clean abrasive can be pumped back to the storage cylinder 201 for recycling through the recovery pipe at the bottom.

[0044] Specifically, a magnetic frame is fixedly connected to the top of the surface of the storage cylinder 201, and the bottom of the cylinder cover 202 is movably connected to the inner cavity of the magnetic frame.

[0045] A magnetic frame with a magnetic material, such as a permanent magnet, is fixed around the opening of the storage cylinder 201. The bottom edge of the cylinder cover 202 is made of a material that can be attracted by magnetic force, such as iron, or has such a material embedded in it. When the cylinder cover 202 is closed, its bottom is embedded in the magnetic frame and is automatically attracted and fixed under the action of magnetic force.

[0046] Specifically, a sealed door 12 is provided on the front of the processing chamber 1, and an observation window is provided on the front of the sealed door 12.

[0047] The sealing door 12 is hinged or slidably installed on the front of the processing chamber 1, with a sealing strip on the edge, which can seal the chamber when closed. The observation window is made of high-strength transparent materials such as tempered glass or polycarbonate board embedded in the middle of the sealing door 12. The sealing door 12 is closed when the equipment is running, effectively isolating the high-speed splashing abrasive and generated dust, ensuring the safety of operators and meeting environmental protection requirements. Operators can monitor the sandblasting process, workpiece status, and sandblasting head 208 in real time through the observation window without opening the door, which facilitates timely detection and adjustment of problems.

[0048] Specifically, limit rods are fixedly connected to both sides of the bottom of the processing table 5, and the bottom of the limit rods extends through to the bottom of the push-pull plate 4.

[0049] The bottom of the processing table 5 is vertically and downwardly fixedly connected to limit rods, such as optical shafts or guide rods. These limit rods pass through corresponding guide holes or linear bearings on the push-pull plate 4 and extend below it. When an asymmetrical workpiece is placed on the processing table 5 or when it is subjected to uneven lateral force from the sandblasting flow, the limit rods and the guide holes on the push-pull plate 4 form a stable guide pair, which can effectively prevent the processing table 5 from tilting, shaking, or rotating horizontally when it is raised, lowered, or stationary, ensuring the stability of the workpiece posture.

[0050] When using: Step 1: Preparation and Inspection Before the Work Personal protective equipment and equipment status verification: Operators should wear necessary protective glasses, dust masks, and gloves. Check the main power supply and electrical connections of all components, such as motor 6, abrasive pump 204, and electric actuator 8, to ensure they are normal and reliable.

[0051] Abrasive preparation: Check whether the abrasive in the storage cylinder 201 is sufficient and whether the type is correct. If new abrasive needs to be added, open the cylinder cover 202. The abrasive will be initially added and filtered through the filter chamber 203 connected to its bottom. Then close the cylinder cover 202 tightly and use the magnetic frame to ensure a seal.

[0052] Filtration system inspection: Confirm that the filter screen 209 inside the sandblasting head 208, along with its cover plate and sealing gasket assembly, are properly installed and undamaged. Check whether the recovery bin 11 has been emptied of waste and impurities accumulated from the previous operation.

[0053] No-load test of equipment: Without placing any workpiece, briefly start the equipment and check whether the abrasive pump 204 is operating normally, whether the sandblasting head 208, the adjusting motor 6 driving the screw 7 to drive the adjusting seat 207 and the lifting electric push rod 8 of the processing table 5 move smoothly without any abnormal noise, and observe whether there are any leaks in each pipeline.

[0054] Step 2: Workpiece clamping and positioning Open the work chamber: Open the sealed door 12 on the front of the processing chamber 1.

[0055] Remove the workbench: Smoothly pull the push-pull plate 4 along the guide rail 3, along with the processing table 5 on it, to a convenient location outside the warehouse for operation.

[0056] Placement and securing of workpieces: Carefully place the semiconductor equipment components to be processed on the processing table 5 and secure them reliably using appropriate fixtures (not shown in the diagram) according to their shape and processing requirements, as per standard configuration, to prevent displacement during sandblasting.

[0057] Adjusting workpiece height: Based on the position of the workpiece surface to be processed, the processing table 5 is adjusted to a suitable height by controlling the electric push rod 8 to raise and lower. The limit rod ensures that the raising and lowering process is smooth and without shaking.

[0058] Send to working position: Push the workpiece-clamped processing table 5, along with the push-pull plate 4, back to the predetermined processing position in the processing chamber 1 along the guide rail 3, and ensure it is in place. Close the sealing door 12.

[0059] Step 3: Fine-tune the position of the 208 sandblasting head: The motor 6 driving the adjustment seat 207 is started by the control system, which makes the screw 7 rotate, thereby driving the sandblasting head 208 to move horizontally or vertically on the mounting bracket 206.

[0060] Using the observation window, the sandblasting head 208 is precisely adjusted to the optimal spraying distance and angle relative to the workpiece surface to be treated. The positioning bracket 210 and the insertion rod 211 are locked together by fastening bolts to ensure that the sandblasting head 208 is stable after positioning.

[0061] Step 4: Perform sandblasting treatment Start the processing cycle: After confirming that all settings are correct and the hatch is closed, start the automatic processing program on the control panel.

[0062] Abrasive circulation and purification spraying: The abrasive pump 204 is started, pumping out the abrasive that has been preliminarily filtered in the storage cylinder 201, and conveying it to the sandblasting head 208 through the connecting pipe 205.

[0063] Before entering the sandblasting channel, the abrasive must pass through the filter screen 209 inside the sandblasting head 208 for final fine filtration to remove all harmful impurities that may damage the workpiece.

[0064] A clean, high-pressure abrasive stream is ejected at high speed from the 208 nozzle of the blasting head, continuously impacting the workpiece surface to achieve process objectives such as cleaning, removing oxide layers, and roughening.

[0065] Process monitoring: Operators monitor the sandblasting process, workpiece status, and whether the sandblasting head 208 is working properly through the observation window throughout the entire process.

[0066] Step 5: Processing completed and workpiece removed Program completion and system shutdown: After the preset processing program ends, the equipment automatically stops the abrasive pump 204 and the jetting. The system can be set to delay shutdown to allow for the recovery of abrasive material within the pipeline.

[0067] Abrasive settling and recycling: After sandblasting stops, the used abrasive, debris, and dust fall into the collection chamber 10 at the bottom of the processing chamber 1 under gravity and flow into the recycling chamber 11. The heavier usable abrasive gradually settles, while fine dust and light impurities are separated.

[0068] Remove the workpiece: After the airflow inside the chamber has basically subsided, open the sealing door 12 and pull out the push-pull plate 4 and the processing table 5. Release the clamps, carefully remove the processed parts, and perform a preliminary inspection.

[0069] Clean the worktable: Remove any remaining abrasive and debris from the machining table 5 to prepare for the next round of machining.

[0070] Step 6: Subsequent Maintenance and Abrasive Management Regularly clean the filtration system: Depending on the frequency of use, periodically remove the cover plate of the sandblasting head 208, take out the filter screen 209 assembly for cleaning or replacement to ensure filtration efficiency. The filter chamber 203 below the cylinder cover 202 can also be cleaned.

[0071] Waste cleaning and abrasive replenishment: Regularly clean the waste and impurities accumulated at the bottom of the recycling bin 11. When the abrasive in the storage cylinder 201 is insufficient due to wear and tear and carryover, replenish it with new abrasive as described in step two. A pumping system can be connected via a recycling pipe to pump the clean abrasive that has settled in the recycling bin 11 back to the storage cylinder 201 for recycling.

[0072] Equipment cleaning and maintenance: Regularly clean dust from the inner and outer surfaces of the equipment and moving parts such as guide rails 3. Lubricate and maintain moving parts such as motors 6 and electric push rods 8 according to the equipment manual.

[0073] Safety inspection: After each operation or periodically check the sealing performance of the sealing door 12, the stability of the support frame 9 and the anti-slip pad to ensure the long-term safe operation of the equipment.

[0074] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A surface sandblasting device for semiconductor equipment parts, comprising a processing bin (1), characterized in that: The top of the inner cavity of the processing bin (1) is provided with a sand blasting assembly (2), both sides of the inner cavity of the processing bin (1) are fixedly connected with guide rails (3), the inner cavity of the guide rail (3) is movably connected with a push-pull plate (4), and the top of the push-pull plate (4) is provided with a processing table (5). The sand blasting assembly (2) comprises a storage cylinder (201), the bottom of the storage cylinder (201) is fixedly connected with the top of the processing bin (1), the top of the storage cylinder (201) is provided with a cylinder cover (202), the bottom of the cylinder cover (202) is fixedly connected with a filtering bin (203), one side of the top of the processing bin (1) and located at the storage cylinder (201) is provided with a grinding material pump (204), one end of the grinding material pump (204) is provided with a connecting pipe (205), the top of the inner cavity of the processing bin (1) is fixedly connected with a mounting bracket (206), the inner cavity of the mounting bracket (206) is movably connected with an adjusting seat (207), the bottom of the adjusting seat (207) is fixedly connected with a sand blasting head (208), the inner cavity of the sand blasting head (208) is provided with a filter screen (209), one side of the sand blasting head (208) is fixedly connected with a positioning bracket (210), and one side of the filter screen (209) is fixedly connected with a plug rod (211).

2. The semiconductor device parts surface sandblasting apparatus as recited in claim 1, wherein: One side of the positioning bracket (210) is threadedly connected with a fastening bolt, one end of the fastening bolt is threadedly connected with a bolt hole in the surface of the plug rod (211).

3. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: One side of the filter screen (209) is fixedly connected with a sealing gasket, one side of the sealing gasket away from the filter screen (209) is fixedly connected with a cover plate, and one side of the cover plate is in contact with the surface of the sand blasting head (208).

4. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: One side of the inner cavity of the mounting bracket (206) is fixedly connected with a motor (6), the output end of the motor (6) is fixedly connected with a screw rod (7), and the surface of the screw rod (7) is threadedly connected with the inner cavity of the adjusting seat (207).

5. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: The bottom of the push-pull plate (4) is provided with an electric push rod (8), the telescopic shaft of the electric push rod (8) penetrates through the upper portion of the push-pull plate (4) and is fixedly connected with the bottom of the processing table (5).

6. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: The bottom of the processing bin (1) is fixedly connected with a supporting frame (9), and both sides of the bottom of the supporting frame (9) are fixedly connected with anti-skid pads.

7. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: The bottom of the processing bin (1) is fixedly connected with a collecting bin (10), one side of the bottom of the collecting bin (10) is provided with a recycling bin (11), and the bottom of one side of the recycling bin (11) is provided with a recycling pipe.

8. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: The top of the surface of the storage cylinder (201) is fixedly connected with a magnetic attraction frame, and the bottom of the cylinder cover (202) is movably connected with the inner cavity of the magnetic attraction frame.

9. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: The front of the processing bin (1) is provided with a sealing door (12), and the front of the sealing door (12) is provided with an observation window.

10. The semiconductor device parts surface sandblasting apparatus as claimed in claim 1, wherein: Both sides of the bottom of the processing table (5) are fixedly connected with limiting rods, and the bottom of the limiting rod penetrates through the lower portion of the push-pull plate (4).

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