Double-sided or single-sided machine tool
By installing sensors on the base legs of the machine tool to monitor and adjust the orientation of the worktable, the problem of unstable workpiece quality in double-sided or single-sided machining tools is solved, achieving high-quality and low-cost machining results.
Patent Information
- Application Number
- CN202511344014.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2024-09-20
- Filing Date
- 2025-09-19
- Publication Date
- 2026-03-20
AI Technical Summary
Existing double-sided or single-sided machining tools have problems with workpiece quality stability and orientation adjustment, resulting in poor workpiece quality, high scrap rate and increased costs.
Sensors are installed on the legs of the machine tool base to monitor the orientation of the worktable in real time and adjust it in a timely manner to ensure workpiece quality. These sensors include weight sensors and optical sensors to detect orientation deviations, and the position of the worktable and the legs are automatically or manually adjusted by an evaluation device.
It achieves stability and reliability in workpiece quality, reduces scrap rate, lowers production costs, and enables timely identification and correction of orientation deviations.
Smart Images
Figure CN121696789A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The invention relates to a double-sided or single-sided machining tool, comprising a first work disk, preferably in the form of a lower ring, and a counter support element, preferably in the form of an upper ring, wherein the first work disk and the counter support element are drivable in rotation relative to one another by means of a rotary drive, a working gap for double-sided or single-sided machining of flat workpieces being formed between the first work disk and the counter support element, wherein the double-sided or single-sided machining tool also has a tool base with feet, which, in the installed state of the double-sided or single-sided machining, stand on the floor of the production space by means of the feet, wherein the tool base carries the first work disk and the counter support element. BACKGROUND
[0002] For example, in a double-sided machining tool, flat workpieces, such as wafers, are simultaneously machined on both sides. To this end, the double-sided machining tool has an upper work disk and a lower work disk, between which a generally ring-shaped working gap is formed, in which the workpieces to be machined are guided during machining. The upper work disk is usually fixed on an upper carrier disk, while the lower work disk is usually fixed on a lower carrier disk. For the purpose of machining, at least one of the work disks, in particular together with its carrier disk, is driven in rotation, which causes a relative rotation between the work disks. Double-sided machining tools are known, in which a so-called rotor disk is guided in the working gap. The rotor disk usually receives the workpieces to be machined in a floating manner in a circular opening. By means of suitable kinematic mechanisms, it is ensured that the rotor disk also rotates in the working gap during the relative rotation of the work disks. As a result, the workpieces move along a trochoidal trajectory in the working gap. This enables particularly uniform surface machining. The machining can take place, for example, by grinding, honing or polishing. For example, in a double-sided polishing machine, a plurality of silicon wafers, for example more than ten silicon wafers having a diameter of, for example, 300 mm, can be simultaneously machined in this way.
[0003] The machining of the workpiece in the predetermined machining steps should take place under loads that are as constant over time as possible, wherein the loads should be distributed as uniformly as possible over the entire disc surface. An ideal uniform distribution is achieved, in particular, when the lower work disc is oriented perfectly horizontally and the drive shafts of both discs are oriented parallel, in particular coaxially. The orientation of the work discs depends on a series of factors, such as the sum of the manufacturing tolerances of the individual components. Another factor is the flatness of the disc surfaces. The more uneven the disc surfaces, the poorer the quality of the workpiece obtained. A further factor is the installation location of the machine tool. For example, an uneven installation floor thus leads to a faulty orientation between the work discs, which has to be corrected in a time-consuming manner. With regard to the manufacturing tolerances, there are attempts to constantly minimize the permissible manufacturing errors of the individual components. The surface flatness of the work discs is improved by means of suitable finishing processes. In order to compensate for unevennesses of the floor at the installation location of the machine tool, height-adjustable feet of the machine tool base carrying the work discs are known. Such feet can be equipped with damping means.
[0004] The main objective in the adjustment of the feet is to orient the lower work disc horizontally. After completion of the entire, the upper work disc or the counter bearing element is oriented, in particular with its drive shaft, relative to the surface of the lower work disc. However, this orientation, which is set within the adjustment range of the machine tool for operation, is not stable over any period of time, but changes due to various factors. For example, the damping elements in the feet are not stable over time, but lose their elasticity over time, in particular with increasing age and duration of use. Furthermore, the floor of the production space carrying the machine tool is also not everywhere the same, so that the orientation has to be re-done, for example, after repositioning the machine tool. Furthermore, such a floor is also not stable over time. This is particularly true in the case of clean room floors with supports or arrangements located on higher floors. Over time, the floor surface can change and, as a result, the orientation of the work discs of the machine tool changes. The orientation of the drive shafts of the work discs is also influenced by, for example, the load of the feet, so that unknown orientation changes can result.
[0005] Such changes in the orientation of the work discs cannot be recognized from the outside, but only when the quality of the workpieces deteriorates at the end of the production process, although the process parameters remain unchanged. While an overall change in the state of the machining process can be recognized from changing process parameters, for example the working clearance. It is not possible here to distinguish how and to what extent individual factors, for example the aging of process components, such as scrapers or work pads (polishing pads), or a faulty orientation of the work discs, contribute to the change in state. As a result, deviations from the perfect process parameter window and the orientation of the work discs are recognized only late, resulting in a large amount of waste.
[0006] Not only an inclination of the work disks relative to each other but also a non-coaxial orientation of the work disks relative to each other can lead to such a false orientation. Additional problems arise in double-sided or single-sided machining machine tools in which the upper work disk is movable by means of a swing arm between a position above the lower work disk and a position after swinging away from this position. On the one hand, here during the swinging movement, when the work disks are swung again into the position arranged above the lower work disk, an undesired change in the orientation between the work disks can occur. On the other hand, due to the swing arm arrangement, such machining machine tools usually have an asymmetric weight distribution which makes the orientation between the work disks even more difficult. This is particularly true in the case of a total weight of more than 10 tons, for example of about 20 tons, of such machine tools.
[0007] A poor quality of the workpieces can result from the above-mentioned false orientation. In the process of taking countermeasures, a reduced service life of the work disk components can occur, in particular a more frequent need for reconditioning, a reduced throughput and thus an increased cost. SUMMARY
[0008] Starting from the prior art explained, the present application is based on the task of providing a double-sided or single-sided machining machine tool of the type mentioned at the outset with which workpieces can be machined in a reliable and cost-effective manner with high quality while reducing rejects.
[0009] The task is solved by the technical solution of independent claim 1. Advantageous design solutions are found in the dependent claims, the description and the drawings.
[0010] The task is solved by the present application for a double-sided or single-sided machining machine tool of the type mentioned at the outset by the fact that the leg has a sensor for monitoring the orientation of the first work disk.
[0011] The machining machine tool can be, for example, a polishing machine, a honing machine or a grinding machine. The workpieces to be machined can be, for example, wafers. A working gap is formed between the first work disk and the counter bearing element (for example, in a single-sided machining machine tool, a simple weight or a pressure cylinder, or in a double-sided machining machine tool, a second work disk), in which the workpieces to be machined are double-sided or single-sided machined. In a double-sided machining machine tool, the upper side and the lower side of the workpieces can be machined simultaneously in the working gap. Correspondingly, both work disks can have a working surface which machines the workpiece surface. In a single-sided machining machine tool, on the other hand, only one workpiece side is machined, for example the lower side by means of the lower work disk. In this case, only one work disk has a working surface which machines the workpiece surface. At this point, the counter bearing element serves only to provide a corresponding counter bearing for the machining by means of the work disk.
[0012] For the machining, the workpieces can be received in a floating manner in openings of rotor disks (Läuferscheiben) arranged in the working gap in a manner known per se. In operation, the first working disk and the counter bearing element are driven in rotation relative to one another, for example by means of the first and / or second drive shaft and at least one drive motor. Not only the counter bearing element but also the first working disk can be driven in rotation, for example in opposite rotation. However, it is also possible for only one of the counter bearing element and the first working disk to be driven in rotation. For example, in a double-sided machining machine tool, the rotor disks can also be moved in rotation through the working gap in the course of this relative rotation by means of suitable kinematic mechanisms, so that the workpieces arranged in the rotor disks describe a trochoidal trajectory in the working gap. For example, the rotor disks can have a toothing on their outer edge and / or on their inner edge, which engages into a correspondingly provided toothing of, for example, the first working disk. Machine tools of this kind with so-called planetary kinematic mechanisms are known per se.
[0013] The first working disk of the lower part can be configured annularly. The counter bearing element or the second working disk of the upper part can also be configured annularly. In this case, the first working disk and the counter bearing element, for example the second working disk, have annular working faces opposite one another, between which an annular working gap is formed. The working faces can be covered with a working pad, for example a polishing cloth. The carrier disks, which can hold the working disks, can also be configured annularly or at least have annular carrier segments on which the working disks are fixed. More than one carrier disk can also be provided for each working disk. The first working disk and / or the counter bearing element can be configured as a single layer or as multiple layers. The same applies to the carrier disks that carry the first working disk or the counter bearing element.
[0014] In the first working disk and / or the counter bearing element, and / or in the first carrier disk that carries the first working disk, and / or in the second carrier disk that carries the counter bearing element, temperature-regulating channels can be configured, through which temperature-regulating fluid, for example temperature-regulating liquid, is guided during operation in order to temperature-regulate the respective component.
[0015] The machine tool base that carries the first working disk and the counter bearing element can be configured as a housing. The machine tool base can also carry the rotary drive for rotating the first working disk and / or the counter bearing element. The machine tool base can also carry the swivel arm, if provided, for swiveling the counter bearing element. The machine tool base can also carry the first and / or second carrier disk, if provided.
[0016] According to the application, the feet, by means of which the machine bed stands on the floor of the production space, have sensors which monitor, in particular indirectly, the orientation of the lower first work disk. The feet can also comprise damping elements. As is also explained below, the sensors can be designed in different forms. The application is based on the insight that, for example, by monitoring the weight force acting on the feet and / or the vertical position of the feet, it can be inferred whether the first work disk has the correct orientation for optimum workpiece quality. The sensors of the feet are therefore able to identify early on that the first work disk is undesirably deviating from the predetermined optimum orientation and, as a result, that there is a risk of a deterioration in the workpiece quality, or to counter this risk in time by appropriate countermeasures in order to minimize rejects. Here, the feet with sensors according to the application allow a reliable differentiation between other possible causes for a deterioration in the workpiece quality. For example, the deviation of the orientation from the predetermined orientation can be indicated to an operator, so that appropriate countermeasures can be taken in time to further ensure the desired workpiece quality. According to the application, it is therefore possible in a simple and reliable manner to ensure that the workpiece quality is maintained at all times and even in the event of a change in the influencing factors mentioned above which influence the orientation of the first work disk. The orientation of the counter-bearing element is usually set in accordance with the orientation of the first work disk. For example, the upper counter-bearing element can be connected to the drive shaft by means of a flexible connecting element, such as an arc-shaped tooth coupling, so that the upper counter-bearing element is flexibly adapted to the orientation of the lower first work disk. If the correct orientation of the first work disk is ensured, the desired orientation of the counter-bearing element is thus also achieved.
[0017] According to one design variant, the counter-bearing element can be formed by a second work disk, preferably in the form of a ring, wherein a working gap for machining flat workpieces on both sides or on one side is formed between the first and second work disks. In particular in the case of correct orientation, the first and second work disks can be arranged coaxially with one another. The first work disk can be fixed on a first carrier disk which is also carried by the machine bed, and / or the second work disk can be fixed on a second carrier disk which is also carried by the machine bed.
[0018] According to another design variant, the counter-bearing element can be arranged on a swing arm arranged on the machine bed and can be swung with the swing arm relative to the first work disk. The rotary drive for the counter-bearing element arranged on the swing arm can be integrated into the swing arm. As mentioned at the outset, in particular in such machining tools with an at this time asymmetric weight distribution on the machine bed, there are particular challenges in terms of the orientation of the first work disk, in particular in reliably maintaining the correct orientation, which can be reliably solved according to the application.
[0019] According to another design, the sensors of the feet can comprise weight sensors which measure the respective weight force acting onto the feet. In this design, the distribution of the weight onto the different feet of the machine bed is taken into account. It is possible, for example, to consider scales as weight sensors. Within the scope of an adjustment process of the machine tool for a run, the distribution of the weight onto the feet can be set such that the same weight force acts onto all feet and then the final orientation of the first worktable is carried out. It is also possible to first carry out the orientation of the first worktable in the case of an arbitrary weight distribution between the weight forces acting onto the feet. In both cases, the distribution of the weight onto the feet after the end of the adjustment process can be assumed to be a predetermined weight distribution, which is then monitored by the sensors. In particular, the sensors can measure the weight distribution after the end of each production process and can compare these measurement values with the measurement values after the previous production process and / or with values which are assigned to the predetermined weight distribution, in particular with values which are measured for the predetermined weight distribution. Thus, the orientation of the lower first worktable is statically monitored after the end of one production process, in particular after the disengagement of the counter bearing element from the first worktable. If the orientation of the first worktable changes, this already leads to a change in the distribution of the weight onto the feet, which can be measured by the sensors, in the case of a minimal deviation from the initial orientation. For example, when the deviation from the initially predetermined weight distribution exceeds a limit deviation, a warning message can be output to the operating personnel and countermeasures can be taken manually or automatically in order to reset the orientation of the first worktable for optimum workpiece quality.
[0020] According to another design, the sensors can comprise optical sensors which optically measure the position of the feet, in particular the vertical position of the feet, respectively. The optical sensors can comprise, for example, laser sensors which measure the position of the feet, preferably by means of a time-of-flight measurement. In particular, an optical emitter, such as a laser, can be provided which directs optical radiation onto a reflector. From the time of flight of the radiation from the emitter to the reflector and to a receiver for the radiation, for example arranged at the position of the emitter, the distance between the emitter and the reflector can be measured and, thus, for example, the vertical position of the foot carrying the reflector. It is taken into account in this design that an incorrect orientation of the first worktable can lead to a change in the height of the individual feet relative to the other feet. This can be detected by means of the measurement technology, so that, as described before, appropriate countermeasures can be taken to maintain the predetermined orientation for optimum workpiece quality.
[0021] The double-sided or single-sided machining tool can also comprise an evaluation device which receives the measurement data of the sensors. The evaluation device can be configured to output a warning signal when a deviation of the orientation of the first work disk from the predetermined orientation is identified. On the basis of such a warning signal, the operating personnel can take measures to reestablish the optimum orientation of the first work disk. For example, for this purpose the position of the first work disk can be changed (e.g. a height movement, a lateral movement and / or a tilting movement) and / or the position of the feet (e.g. a height movement of the feet) can be changed. The change in the position of the first work disk can thus be, for example, a height adjustment and / or a lateral adjustment. A tilting of the first work disk can also be involved, for example in order to correct a non-coaxial orientation of the rotational axis of the first work disk and the counter bearing element.
[0022] According to another design, the evaluation device can be configured to control the double-sided or single-sided machining tool such that the orientation of the first work disk again corresponds to the predetermined orientation when a deviation of the orientation of the first work disk from the predetermined orientation is identified. Thus, in this design, when a deviation of the orientation from the predetermined orientation is identified, an automatic reorientation can take place in order to obtain the optimum workpiece quality at all times. For this purpose, the evaluation device can control appropriate adjustment devices by means of which the position of the first work disk and / or the feet can be adjusted in the manner described above.
[0023] According to another design, the first work disk and / or the first carrier disk which carries the first work disk and / or the feet can be provided with adjustment devices which can be controlled by the evaluation device such that the orientation of the first work disk again corresponds to the predetermined orientation.
[0024] According to a design which is particularly suitable for practice, the adjustment devices can comprise at least one adjustment element (e.g. an adjustment wedge) which can be moved in translation by means of an adjustment drive, by means of the translational movement of which the first work disk and / or the first carrier disk which carries the first work disk and / or the feet can be adjusted in height and / or laterally and / or tilted. The adjustment devices can in particular comprise a plurality of such adjustment elements which can be moved in translation by means of an adjustment drive. By means of the translational movement of the adjustment elements, the desired components can be adjusted in their position, for example in their height, in a mechanically simple manner in order to adjust the orientation of the first work disk.
[0025] According to another design, the predetermined orientation can be the orientation of the first worktable which is set within the scope of the adjustment of the double-sided or single-sided machining tool to the run. Thus, before the machining process, the first worktable is optimally oriented and this orientation is taken as the target orientation. If a change with respect to this target orientation is determined by the sensor of the foot, a reaction can be carried out in the above-described manner as a countermeasure. As described above, the sensor can detect the measurement values characterizing the orientation of the first worktable after each production process and can compare these measurement values with the measurement values after the previous production process and / or with the measurement values assigned to the predetermined orientation, in particular with the values measured for the predetermined orientation. Thus, as described, the orientation of the lower first worktable is statically monitored after each production process, in particular after the disengagement of the counter bearing element from the first worktable. BRIEF DESCRIPTION OF DRAWINGS
[0026] Embodiments of the application are explained in more detail below with the aid of the drawings. The drawings show schematically:
[0027] Figure 1 a side view of a double-sided machining tool according to the application in a first operating state;
[0028] Figure 2 a double-sided machining tool according to the application in a second operating state; Figure 1
[0029] Figure 3 a top view of a double-sided machining tool according to the application in a third operating state; Figure 2 Figure 1 a view of a double-sided machining tool according to the application in a further operating state;
[0030] Figure 4 Figure 3 a sectional view of an adjustment device of a double-sided machining tool according to the application according to a first embodiment;
[0031] Figure 5 a sectional view of an adjustment device of a double-sided machining tool according to the application according to another embodiment.
[0032] Figure 6 a sectional view of an adjustment device of a double-sided machining tool according to the application according to another embodiment. DETAILED DESCRIPTION
[0033] Identical reference signs in the drawings indicate identical objects, unless stated otherwise.
[0034] Figures 1 to 4 The double-sided machining tool shown only by way of example has a tool base 10 which stands on the floor 14 of the production space by means of a plurality of feet 12. The tool base 10, which is configured for example as a housing, carries a ring-shaped lower first carrier disk 16 which in turn carries a ring-shaped lower first work disk 18. Furthermore, the tool base 10 carries a swing arm 22 which is arranged on a swing housing 20 and which carries a ring-shaped upper second carrier disk 24 which in turn carries a ring-shaped upper second work disk 26. By means of a rotary drive arranged in the swing arm 22, the upper second carrier disk 24 together with the upper second work disk 26 can be rotated for example about a drive shaft 28. By means of a rotary drive which is not shown in detail, the lower first carrier disk 16 can also be rotatable and the lower first work disk 18 can also be rotatable together with the first carrier disk, for example in counter-rotation relative to the upper second carrier disk 24 together with the upper second work disk 26. Between the work disks 18, 26 there is formed a ring-shaped working gap in which, for example, workpieces which are floatingly supported in the rotor disk can be machined in the known manner, for example ground, honed or polished. Figure 1 In Figure 2 a state in which the work disks 18, 26 are fed toward one another is shown. By counter-rotating the work disks 18, 26, workpieces which are floatingly supported in the rotor disk can be machined in the known manner in the ring-shaped working gap, for example ground, honed or polished.
[0035] As can be seen from a comparison of Figure 1 and Figure 2 , the swing arm 22 can be moved in height in order to adjust between the operating states of Figure 1 and Figure 2 . Furthermore, it can be seen in Figure 3 and Figure 4 that, after the work disks 18, 26 have been brought out of contact, as shown in Figure 1 , the swing arm 22 can be swung together with the swing housing 20 in order to swing the upper second carrier disk 24 and, together with this, the upper second work disk 26 between a position opposite the lower first work disk 18 and a position remote from the aforementioned position, in order to load the rotor disk with workpieces to be machined, in particular.
[0036] The feet 12 each comprise a sensor 30 which can be for example a weight sensor 30 which measures the weight force acting on the foot 12. The measurement data of the sensors 30 are transmitted to an evaluation device 32 of the double-sided machining tool. For example, in Figure 1In the state shown in Fig. 1, the lower first work table 18 can be optimally oriented horizontally jointly with the lower first carrier table 16. After this orientation, the sensor 30 can measure the weight acting onto the feet 12, respectively, under the control of the evaluation device 32, for example. These measured values are stored by the evaluation device 32, inter alia, as target measured values for the predetermined orientation of the lower first work table 18. Subsequently, workpiece machining can be carried out in the state shown in Fig. 2. After the end of this production process and the disengagement of the work tables 18, 26 from one another, the sensor can measure the weight acting onto the feet 12, respectively, again under the control of the evaluation device 32, for example. These measured values can be compared by the evaluation device 32 with the previously stored target measured values. Figure 2 In the state shown in Fig. 1, the lower first work table 18 can be optimally oriented horizontally jointly with the lower first carrier table 16. After this orientation, the sensor 30 can measure the weight acting onto the feet 12, respectively, under the control of the evaluation device 32, for example. These measured values are stored by the evaluation device 32, inter alia, as target measured values for the predetermined orientation of the lower first work table 18. Subsequently, workpiece machining can be carried out in the state shown in Fig. 2. After the end of this production process and the disengagement of the work tables 18, 26 from one another, the sensor can measure the weight acting onto the feet 12, respectively, again under the control of the evaluation device 32, for example. These measured values can be compared by the evaluation device 32 with the previously stored target measured values.
[0037] If the weight distribution between the feet 12, measured by the sensor 30, for example, after the end of the production process and the movement of the work tables 18, 26 away from one another, changes compared to the weight distribution of the optimal orientation of the first work table 18 set at the beginning of this machining process or at the beginning of the previous machining process, the evaluation device 32 can output a warning signal. On the basis thereof, an operator, for example, can adjust the orientation of the first work table 18 until the weight distribution measured by the sensor 30 again corresponds to the predetermined value and, thus, the orientation again corresponds to the predetermined orientation. Alternatively or additionally thereto, the sensor 30 can also comprise an optical sensor 30 which measures the height position of the feet 12, for example, so that a deviation of the orientation from the predetermined orientation can be recognized on the basis thereof.
[0038] In the state shown in Fig. 1, the lower first work table 18 can be optimally oriented horizontally jointly with the lower first carrier table 16. After this orientation, the sensor 30 can measure the weight acting onto the feet 12, respectively, under the control of the evaluation device 32, for example. These measured values are stored by the evaluation device 32, inter alia, as target measured values for the predetermined orientation of the lower first work table 18. Subsequently, workpiece machining can be carried out in the state shown in Fig. 2. After the end of this production process and the disengagement of the work tables 18, 26 from one another, the sensor can measure the weight acting onto the feet 12, respectively, again under the control of the evaluation device 32, for example. These measured values can be compared by the evaluation device 32 with the previously stored target measured values. Figure 5 and Figure 6 Adjusting devices are shown in Figs. 3 and 4, with which the orientation of the upper second work table 26 can be adjusted, for example, by adjusting the height of the upper second carrier table 24 and the upper second work table 26. In the example shown, for this purpose, adjusting elements 34, in particular adjusting wedges 34, are provided, which can be moved in the conical adjusting receptacles 38 in the example shown in Fig. 3, for example, by means of adjusting screws 36. Figure 5 In the example shown in Fig. 3, the adjusting elements or the adjusting wedges can be moved in or out of the conical adjusting receptacles 38 translationally in the conical adjusting receptacles 38 manually by means of adjusting screws 36. By moving the adjusting wedges 34 into the conical adjusting receptacles 38 by means of a translational movement of the adjusting screws 36, for example, the second carrier table 24 and, with it, the second work table 26 are moved downward in Fig. 4, so that the orientation of the second work table 26 can be adjusted in the desired manner. Figure 5 In the example shown in Fig. 3, the adjusting elements or the adjusting wedges can be moved in or out of the conical adjusting receptacles 38 translationally in the conical adjusting receptacles 38 manually by means of adjusting screws 36. By moving the adjusting wedges 34 into the conical adjusting receptacles 38 by means of a translational movement of the adjusting screws 36, for example, the second carrier table 24 and, with it, the second work table 26 are moved downward in Fig. 4, so that the orientation of the second work table 26 can be adjusted in the desired manner.
[0039] Figure 6Another embodiment is shown, in which the adjustment screw 36 and, together with this, the adjustment wedge 34 can be adjusted in translation with respect to the adjustment receptacle 38 by means of an adjustment drive 40. In Figure 5 In the example shown in, the operator can manipulate the adjustment screw 36, for example manually, in order to adjust the orientation between the work disks 18, 26. In Figure 6 In the example shown in, when the evaluation device determines that the orientation measured by the sensor 30 deviates unallowably, the adjustment screw 36 can be manipulated automatically, for example by the evaluation device 32, via the adjustment drive 40, until the orientation again corresponds to the predetermined orientation. In a corresponding manner, the orientation of the lower first carrier disk 16 and of the lower first work disk 18 can also be adjusted.
[0040] List of reference signs
[0041] 10 machine tool base
[0042] 12 foot
[0043] 14 ground
[0044] 16 first carrier disk
[0045] 18 first work disk
[0046] 20 oscillating housing
[0047] 22 oscillating arm
[0048] 24 second carrier disk
[0049] 26 second work disk
[0050] 28 drive shaft
[0051] 30 sensor
[0052] 32 evaluation device
[0053] 34 adjustment element
[0054] 36 adjustment screw
[0055] 38 adjustment receptacle
[0056] 40 adjustment drive
Claims
1. A double-sided or single-sided machining tool, comprising a lower first working disc (18) preferably in the shape of an annular shape and an upper mating support element (26), wherein, The first working disc (18) and the paired support element (26) can be driven to rotate relative to each other by a rotation drive device. A working gap for double-sided or single-sided machining of flat workpieces is formed between the first working disc (18) and the paired support element (26). The double-sided or single-sided machining machine tool also has a machine tool base (10) with legs (12). In the installed state of the double-sided or single-sided machining machine tool, the machine tool base (10) stands on the ground (14) of the production space by means of the legs. The machine tool base (10) supports the first working disc (18) and the paired support element (26). The legs (12) are characterized by having sensors (30) for monitoring the orientation of the first working disc (18).
2. The double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, The paired support element (26) is formed by a second working disc (26) preferably in the shape of an annular ring, wherein a working gap is formed between the first and second working discs (18, 26) for double-sided or single-sided machining of flat workpieces.
3. The double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, The first working plate (18) is fixed on the first bearing plate (16) which is also supported by the machine tool base (10), and / or the second working plate (26) is fixed on the second bearing plate (24) which is also supported by the machine tool base (10).
4. The double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, The paired support element (26) is arranged on the swing arm (22) arranged on the machine tool base (10) and can swing with the swing arm (22) relative to the first work plate (18).
5. The double-sided or single-sided machining tool according to claim 4, characterized in that, The rotation drive for the mating support element (26) arranged on the swing arm (22) is integrated into the swing arm (22).
6. The double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, The sensor (30) includes a weight sensor (30) that measures the gravity acting on the foot (12).
7. The double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, The sensor (30) includes an optical sensor (30) that optically measures the position of the foot (12), especially the vertical position of the foot (12).
8. The double-sided or single-sided machining tool according to claim 7, characterized in that, The optical sensor (30) includes a laser sensor that measures the position of the foot (12), preferably by means of time-of-flight measurement.
9. The double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, An evaluation device (32) is provided, which receives measurement data from a sensor (30).
10. The double-sided or single-sided machining tool according to claim 9, characterized in that, The evaluation device (32) is configured to output a warning signal when it detects that the orientation of the first working plate (18) deviates from the predetermined orientation.
11. The double-sided or single-sided machining tool according to any one of claims 9 or 10, characterized in that, The evaluation device (32) is configured to control a double-sided or single-sided machining tool when it detects that the orientation of the first worktable (18) deviates from the predetermined orientation, so that the orientation of the first worktable (18) corresponds to the predetermined orientation again.
12. The double-sided or single-sided machining tool according to claim 11, characterized in that, The first working plate (18) and / or the first support plate (16) and / or the support leg (12) that support the first working plate (18) are provided with an adjustment device that can be controlled by the evaluation device (32) so that the orientation of the first working plate (18) corresponds to the predetermined orientation again.
13. The double-sided or single-sided machining tool according to claim 12, characterized in that, The adjustment device includes at least one adjustment element (34) that can be translated by means of an adjustment driver (40), through which the first working plate (18) and / or the first support plate (16) and / or the support leg (12) supporting the first working plate (18) can be height adjusted and / or lateral adjusted and / or tilted.
14. The double-sided or single-sided machining tool according to any one of claims 10 to 13, characterized in that, The predetermined orientation is the orientation of the first worktable (18) set within the adjustment range for operation of a double-sided or single-sided machining tool.
15. A double-sided or single-sided machining tool according to any one of the preceding claims, characterized in that, The double-sided or single-sided processing machine tool is a double-sided or single-sided polishing machine, or a double-sided or single-sided honing machine, or a double-sided or single-sided grinding machine.