Two-dimensional precise rotating mirror based on conical flexible hinge

Abstract

The invention discloses a two-dimensional precision rotating mirror based on a conical flexible hinge, and is used for the technical field of optical equipment. The rotating mirror comprises a base, a mobile platform, a flexible hinge and a reflecting mirror, the mobile platform is mounted on the base; the flexible hinge comprises a flexible part and a connecting rod; the flexible part is fixedly connected with the base, the flexible part comprises a plurality of conical cylinders, the conical cylinders are sequentially connected in a sleeving mode, and the extending planes of the outer surfaces of the conical cylinders intersect at the same rotating point; the connecting rod is fixedly connected with a conical cylinder, the connecting rod is movably connected with the moving part of the moving platform, and the axis of the connecting rod penetrates through the rotating point; the reflecting mirror is mounted on the connecting rod, and the reflecting center of the reflecting mirror coincides with the rotating point; wherein the moving platform is configured to drive the end, away from the rotating point, of the connecting rod to move, and the flexible part is configured to enable the connecting rod to rotate around the rotating point when the end, away from the rotating point, of the connecting rod moves. The rotating mirror achieves the purpose that the rotating center and the reflecting center of the reflecting mirror coincide.

Description

Technical Field

[0001] This invention relates to the field of optical equipment technology, and in particular to a two-dimensional precision rotating mirror based on a tapered flexible hinge. Background Technology

[0002] Precision rotating mirrors are core components used to control the rapid and precise deflection of light beams and achieve beam pointing adjustment. They are widely used in modern high-precision optical systems. Currently, based on their support structure, precision rotating mirrors can be mainly divided into three categories: rigid support structure, XY frame structure, and flexible support structure. Among them, the rigid support structure has disadvantages such as high frictional resistance, limited dynamic performance, and low precision. The XY frame structure has disadvantages such as angular displacement accuracy limited by the radial clearance of the bearing, as well as rotational friction, low control precision, and low bandwidth. The precision rotating mirror with flexible support structure overcomes the disadvantages of traditional bearings, achieving frictionless and clearance-free rotation, while also having high precision and fast response speed, making it the mainstream choice in current optical systems.

[0003] Although the precision rotating mirror with flexible support structure has significant advantages and wide application, its rotation center is usually located at a spatial floating point determined by the deformation of the flexible structure. It cannot be precisely and stably aligned with the reflecting surface of the mirror. In other words, it is difficult to achieve the requirement that the rotation center and the reflection center of the mirror coincide. Once the rotation center and the reflection center do not coincide, it will lead to problems such as optical path deviation, measurement error and imaging distortion, affecting the normal operation of the system.

[0004] To overcome the problem that the rotation center and reflection center of a two-dimensional precision rotating mirror cannot be accurately and stably aligned, existing technologies typically employ complex drive control strategies combined with symmetrically distributed flexible mechanisms. This not only places extremely high demands on the consistency of the actuator performance but also makes the system susceptible to control errors and inter-axis coupling interference. Summary of the Invention

[0005] This invention provides a two-dimensional precision rotating mirror based on a tapered flexible hinge, aiming to solve the problem of the rotation center and reflection center not coinciding in existing mirrors without employing complex drive control strategies.

[0006] This invention provides a two-dimensional precision rotating mirror based on a tapered flexible hinge, comprising:

[0007] Base;

[0008] A mobile platform, which is mounted on the base;

[0009] A flexible hinge comprises a flexible member and a connecting rod; the flexible member is fixedly connected with the base, and comprises a plurality of tapered cylinders which are sequentially connected, and the extension planes of the outer surfaces of the plurality of tapered cylinders all intersect at a same rotation point; the connecting rod is fixedly connected with one of the tapered cylinders, and one end of the connecting rod is movably connected with a moving part of a moving platform, and the axis of the connecting rod passes through the rotation point;

[0010] A reflecting mirror is installed on the connecting rod, and the reflecting center of the reflecting mirror is arranged to coincide with the rotation point;

[0011] The moving platform is configured to drive the end of the connecting rod away from the rotation point to move in a direction perpendicular to the axis of the connecting rod, and the flexible member is configured to make the connecting rod rotate around the rotation point when the end of the connecting rod away from the rotation point moves in the direction perpendicular to the axis of the connecting rod.

[0012] In one of the embodiments, the tapered cylinder is a multi-prism tapered cylinder, and in the two adjacent multi-prism tapered cylinders, one of the prism angles of the inner multi-prism tapered cylinder is fixedly connected with one of the prism angles of the outer multi-prism tapered cylinder, and the remaining prism angles of the inner multi-prism tapered cylinder are arranged to be separated from the inner wall or the prism angle of the outer multi-prism tapered cylinder to form a deformation gap for the deformation of the multi-prism tapered cylinder.

[0013] In one of the embodiments, the innermost multi-prism tapered cylinder is fixedly connected with the connecting rod.

[0014] In one of the embodiments, one of the prism angles of the outermost multi-prism tapered cylinder is fixedly connected with the base, and the other prism angle of the outermost multi-prism tapered cylinder is fixedly connected with one of the prism angles of the inner multi-prism tapered cylinder.

[0015] In one of the embodiments, the multi-prism tapered cylinder comprises at least three trapezoidal flexible blades which are sequentially connected in the circumferential direction of the multi-prism tapered cylinder, and the upper base of the trapezoidal flexible blade is arranged close to the rotation point.

[0016] In one of the embodiments, the tapered cylinder is a curved tapered cylinder.

[0017] In one of the embodiments, the moving platform comprises a frame assembly, a first driver and a second driver;

[0018] The frame assembly comprises a first mounting frame, a second mounting frame and a third mounting frame; the first mounting frame is vertically mounted on the base, the second mounting frame is located in the first mounting frame, the third mounting frame is located in the second mounting frame, and the connecting rod is hingedly connected with the third mounting frame;

[0019] The first driver is mounted in the first mounting frame, and a driving part of the first driver is fixedly connected with the second mounting frame;

[0020] The second driver is mounted in the second mounting frame, and a driving part of the second driver is fixedly connected with the third mounting frame;

[0021] The driving direction of the first driver is perpendicular to the driving direction of the second driver.

[0022] In one of the embodiments, the mobile platform further comprises a plurality of elastic members, which are respectively connected between the first mounting frame and the second mounting frame and between the second mounting frame and the third mounting frame.

[0023] In one of the embodiments, along the driving direction of the first driver, the plurality of elastic members are located on opposite sides of the second mounting frame.

[0024] Along the driving direction of the second driver, the plurality of elastic members are located on opposite sides of the third mounting frame.

[0025] In one of the embodiments, the connecting rod is provided with a ball head, the third mounting frame is provided with a receiving groove for accommodating the ball head, and the ball head is inserted into the receiving groove.

[0026] From the above technical solutions, the present application has the following advantages:

[0027] (1) The present application can ensure that the rotation center of the reflector coincides with the reflection center. By fixing the flexible member on the base and sequentially connecting the plurality of polygonal pyramidal cylinders of the flexible member, the extension planes of the outer surfaces of the plurality of polygonal pyramidal cylinders all intersect at the same rotation point to form a polyhedral geometric configuration. In this way, all the translational degrees of freedom are constrained, and only three-dimensional rotational degrees of freedom around the remote rotation point are reserved. After the polygonal pyramidal cylinder is elastically deformed by the driving force of the connecting rod, the connecting rod can rotate around the rotation point. The reflection center of the reflector on the connecting rod coincides with the rotation point, so that the reflector rotates around the rotation point. This ensures that the rotation center of the reflector always coincides with the reflection center of the reflector, fundamentally eliminating the problem that the rotation center of the reflector does not coincide with the reflection center. This leads to additional parasitic spatial position translation of the light beam after reflection at the reflection center, and further leads to spatial position deviation and longitudinal optical path variation along the direction of light beam transmission.

[0028] (2) The application does not need complex driving strategy, and the stability of the rotation center is ensured by the inherent mechanical properties of the flexible hinge, without relying on complex multi-driver synchronization or differential driving strategy, thereby reducing the requirements for the performance consistency and control accuracy of the driver, simplifying the system design and calibration process.

[0029] (3) The application has compact and reasonable structure, high stability, effectively uses the space by using the flexible hinge design, and the flexible hinge has high structural stability, high repeat positioning accuracy, fast response speed and other excellent properties, and is suitable for the high-frequency and high-precision deflection requirements in the precise optical system.

[0030] (4) The application has strong adjustability and adaptability, and the deflection range and stiffness distribution of the rotating mirror can be flexibly optimized by adjusting the number of the sleeve sets of the multi-pyramid cylinder of the flexible hinge, so as to meet the specific application requirements in different scenes. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0032] Figure 1 A whole structure schematic diagram of a two-dimensional precise rotating mirror based on a conical flexible hinge is provided for the embodiments of the application.

[0033] Figure 2 A whole structure side view schematic diagram of a two-dimensional precise rotating mirror based on a conical flexible hinge is provided for the embodiments of the application.

[0034] Figure 3 A whole structure top view schematic diagram of a two-dimensional precise rotating mirror based on a conical flexible hinge is provided for the embodiments of the application.

[0035] Figure 4 A whole structure schematic diagram of a flexible hinge is provided for the embodiments of the application.

[0036] REFERENCE SIGNS:

[0037] Base 1;

[0038] Moving platform 2; frame assembly 20; first mounting frame 200; second mounting frame 201; third mounting frame 202; containing groove 2020; first driver 21; second driver 22; elastic member 23;

[0039] Flexible hinge 3; flexible piece 30; polygonal cone 300; mounting seat 301; connecting rod 31; ball head 310; rotation point 32;

[0040] Mirror 4; mirror seat 40; mirror body 41. DETAILED DESCRIPTION

[0041] The embodiment of the present application provides a two-dimensional precision rotating mirror based on a conical flexible hinge, aiming at solving the problem that the rotation center and the reflection center do not coincide without using a complex driving control strategy.

[0042] In order to make the application purpose, features and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the following described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the present application.

[0043] The precision rotating mirror is a core component for controlling the rapid and accurate deflection of a light beam, and is widely used in modern high-precision optical systems. For example, in a space gravitational wave detection task, the precision rotating mirror is used to realize interstellar laser scanning capture and precision tracking, and to establish an interstellar laser interferometric measurement link; in an optoelectronic tracking and guidance system, the precision rotating mirror is used to accurately control the visual axis; in an adaptive optical system, the rotating mirror can be used to correct the overall tilt of the beam wavefront; in a high-resolution optical scanning imaging system, the rotating mirror is used to realize the scanning and positioning of the light beam; in a laser radar, the rotating mirror is used to realize large-range laser scanning and target capture and tracking. In these optical systems, in order to improve the light beam control precision and better compensate, track and control, the rotating mirror is required to have extremely high angular deflection precision, deflection range and dynamic stability.

[0044] At present, according to the support structure, the precision rotating mirror can be mainly divided into three types: rigid support structure, X-Y frame structure and flexible support structure. In the rigid support structure, the mirror is connected with the base through a spherical pair (such as ball bearing, crossed roller bearing, etc.), which serves as the rotation fulcrum. The driver (such as voice coil motor, etc.) is used to drive the rotating shaft to rotate around the fulcrum, and drive the mirror to realize deflection. The rigid support structure has simple structure, strong carrying capacity, and is suitable for supporting large-diameter heavy mirrors, but has the disadvantages of large friction resistance, limited dynamic performance, low precision, etc. The X-Y frame structure is composed of inner and outer frames. The outer frame is connected with the base through bearings, the inner frame is installed on the outer frame through bearings, the mirror is fixed on the inner frame, and the inner and outer frame shafts are perpendicular to realize two-dimensional deflection. The X-Y frame structure has the advantages of stable rotation center, strong carrying capacity and large stroke, but the angular displacement precision of the structure is limited by the radial clearance of the bearing, and has the disadvantages of rotation friction, low control precision and bandwidth, etc. The precision rotating mirror of the flexible support structure realizes movement by using the elastic deformation of the flexible element. Its typical structure is to connect the base installed with the mirror through multiple flexible struts or flexible hinges. The driver (such as piezoelectric ceramic, voice coil motor, etc.) acts on the base directly or through a lever amplification mechanism, so that the flexible support structure produces a small elastic deformation to drive the mirror to deflect. The precision rotating mirror of the flexible support structure overcomes the shortcomings of traditional bearings, realizes friction-free and gap-free rotation, and has high precision and fast response speed, so it has become the mainstream choice in current ultra-precision optical systems (Wang Zhen, Cheng Xuemin. Research status and future development of fast mirrors [J]. Applied Optics, 2019, 40 (03): 373-379.).

[0045] Although the flexible support structure has significant advantages and is widely used, the rotation center is usually located at a floating point in space determined by the deformation of the flexible structure, and cannot be accurately and stably coincided with the reflecting surface of the mirror. In an ultra-precise optical system, when the rotation center and the reflecting center of the rotating mirror do not coincide, after the reflected light beam passes through the reflecting center, the reflected light beam will produce an additional parasitic spatial position translation when the angle is deflected, resulting in a spatial position deviation of the reflected light beam and a longitudinal optical path change along the direction of the light beam transmission. For example, in the laser interferometric measurement system of the space gravitational wave detection task, when the rotation center and the reflecting center of the mirror do not coincide, the laser reflected by the rotating mirror will produce an additional non-ideal optical path deviation, which is one of the key noise sources limiting the sensitivity of gravitational wave detection; in the laser tracking measurement system, if the rotation center of the tracking rotating mirror deviates from the reflecting surface, when the rotating mirror deflects to track the moving target, the laser reflection base point on the reflecting surface will change in space, directly introducing ranging and angular error; in optical tomography, the ideal mathematical model of the system requires that the projection data be acquired around a fixed rotation center, and the deviation of the rotation center and the reflecting center of the scanning rotating mirror will cause the edge of the reconstructed image to be blurred and geometrically distorted, which seriously reduces the imaging quality.

[0046] In order to overcome the problem of the flexible support rotating mirror, the existing research attempts to design a rotating mirror with the center of rotation coinciding with the center of reflection. Xi'an Jiaotong University proposes a scheme of laterally symmetrical driving mirror, using four completely same driving mechanisms, two by two are arranged symmetrically about the X axis and the Y axis, the X axis and the Y axis are designed in the mirror plane of the mirror, and the mirror is fixed on the side through the mirror support mechanism. The driving mechanisms arranged symmetrically are driven synchronously and in the same direction, ensuring that the mirror rotates around the center of the mirror, thereby realizing the coincidence of the center of rotation and the center of reflection. This method requires that the paired drivers must be strictly synchronized, and any slight asynchronization will introduce errors, which puts high requirements on the control of the driving device. At the same time, the driving mechanism also needs to be completely consistent to provide the same driving force, which also puts high requirements on the consistency and the position accuracy of the symmetrical arrangement. (Jing ZJ, Xu ML, Zhu JY, et al. Control mechanism and method of fast deflection mirror with center of rotation in mirror plane: CN201510254501.7[P]. CN104849858A); Xi'an Jiaotong University proposes a scheme of using a non-symmetrical polygon group flexible mechanism as a rotating mirror support structure. The non-symmetrical polygon structure with different stiffness on the inside and outside is arranged in pairs in the X axis and Y axis directions. The polygon contains a piezoelectric ceramic driver inside. When the piezoelectric ceramic driver is driven to linear displacement, the polygon structure will also have a deflection in addition to the linear displacement. Differential driving of the paired polygon structures can make the mirror plane only have a deflection, thereby realizing the coincidence of the mirror rotation center and the reflection center. This method requires that the paired drivers are controlled in opposite directions, which also puts high requirements on the control of the driving device. In addition, there may be coupling interference between different axes, which complicates the control. (Song SY, Shao SB, Xu ML, et al. Deflection mirror device and method with center of rotation coinciding with center of mirror plane: CN201611230843.6[P]. CN201611230843.6[2025-11-21]).

[0047] It can be seen that, in order to overcome the problem that the center of rotation and the center of reflection of the two-dimensional precision rotating mirror cannot be accurately and stably coincided, the existing technology usually adopts a complex driving control strategy to cooperate with the symmetrical distribution of the flexible mechanism, which not only requires high consistency of the performance of the driver, but also makes the system vulnerable to control errors and axis coupling interference. Therefore, the present application provides a flexible precision rotating mirror scheme with the center of rotation and the center of reflection coinciding from the mechanical structure, which can greatly reduce the complexity of the system in control and improve the stability.

[0048] Embodiment one

[0049] Please refer to Figures 1 to 4 The two-dimensional precision rotating mirror based on the conical flexible hinge provided by the embodiment one of the present application comprises:

[0050] a base 1;

[0051] a moving platform 2, the moving platform 2 being mounted on the base 1;

[0052] a flexible hinge 3, the flexible hinge 3 comprising a flexible piece 30 and a connecting rod 31; the flexible piece 30 is fixedly connected with the base 1, the flexible piece 30 comprises a plurality of multi-prism cylinders 300, the plurality of multi-prism cylinders 300 are sequentially sleeved and connected, and the extension planes of the outer surfaces of the plurality of multi-prism cylinders 300 all intersect at a same rotation point 32, see Figure 1 and Figure 2 shown; the connecting rod 31 is fixedly connected with one of the multi-prism cylinders 300, one end of the connecting rod 31 is movably connected with a moving part of the moving platform 2, and the axis of the connecting rod 31 passes through the rotation point 32;

[0053] a reflecting mirror 4, the reflecting mirror 4 being mounted on the connecting rod 31, and the reflecting center of the reflecting mirror 4 is arranged to coincide with the rotation point 32;

[0054] wherein the moving platform 2 is configured to drive the end of the connecting rod 31 away from the rotation point 32 to move in a direction perpendicular to the axis of the connecting rod 31, and the flexible piece 30 is configured to make the connecting rod 31 rotate around the rotation point 32 when the end of the connecting rod 31 away from the rotation point 32 moves in the direction perpendicular to the axis of the connecting rod 31, see Figure 4 shown.

[0055] Regarding the technical feature of the multi-prism cylinder 300, it is pointed out that the number of the multi-prism cylinder 300 can be adjusted according to the deflection range and rigidity requirement, two multi-prism cylinders 300 are connected to obtain complete three-dimensional rotation freedom, increasing the number of the multi-prism cylinder 300 (such as three or more) can further increase the deflection angle range, that is, each multi-prism cylinder 300 includes a fixed prism connected to the outer side and a movable actuating prism, the blades where the fixed prism and the movable actuating prism of the multi-prism cylinder 300 are located are called main blades, when the main blades of the two multi-prism cylinders 300 after connection do not coincide, the movement freedom degrees of the two multi-prism cylinders 300 are superimposed, three rotation freedom degrees around the rotation point 32 can be obtained, and the use of the multi-prism cylinder 300 for connection can effectively increase the stroke range of the three rotation freedom degrees; when the number of prisms of the multi-prism cylinder increases, the multi-prism cylinder will be over-constrained, which mainly manifests in significantly increasing the rigidity in the translational direction and partially increasing the rigidity in the rotational direction. This also achieves the function as intended by the present application, only a greater driving force needs to be applied when the same angle of deflection occurs; the multi-prism cylinder 300 is a multi-prism-shaped cylinder structure with both ends open, the surfaces of the multi-prism cylinder 300 meet at the same rotation point 32 to form a polyhedral geometric configuration, the rotation point 32 serves as the remote rotation center of each multi-prism cylinder 300, thereby constraining all translational freedom degrees and only retaining three-dimensional rotational freedom degrees around the remote rotation point 32, forming a stable polyhedral structure with the common rotation point 32, when the reflection center of the reflector 4 is coincidentally installed at the rotation point 32, the design of the coincidence of the reflection center of the reflector 4 and the rotation center of the reflector 4 can be achieved; when the transverse driving force of the connecting rod 31 is transmitted to each multi-prism cylinder 300, the transverse driving force forces each multi-prism cylinder 300 to produce elastic bending deformation around the rotation point 32, this elastic bending deformation is not arbitrary bending, but a small relative deflection of each outer surface around the theoretical center point, since each multi-prism cylinder 300 rotates around the same rotation point, the small rotation around the point of the multiple multi-prism cylinders 300 accumulates into large-angle rotation around the point of the whole, thereby driving the connecting rod 31 and the reflector 4 on it to rotate accurately around the fixed rotation point.

[0056] Regarding the mobile platform 2, it is pointed out that the mobile platform 2 is used to drive the end of the connecting rod 31 to move vertically to the direction of the connecting rod 31, the end of the connecting rod 31 is movably connected with the moving part of the mobile platform 2, so that this end of the connecting rod 31 is not over-constrained by the plane, and this end of the connecting rod 31 can move around the rotation point 32.

[0057] During the operation of this embodiment, when the moving platform 2 drives the end of the connecting rod 31 away from the rotation point 32 to move in a direction perpendicular to the axis of the connecting rod 31, the driving force of the connecting rod 31 will be transmitted to multiple polygonal cones 300 and undergo corresponding elastic deformation. The entire flexible hinge 3 will rotate around the remote rotation center. Therefore, the entire moving platform 2 can drive the reflector 4 on the connecting rod 31 to produce deflection in both pitch and yaw directions.

[0058] As can be seen from the above working process, during the entire deflection process of the reflector 4, since the reflection center of the reflector 4 is stably coincided with the rotation point 32 (i.e., the rotation center) of the flexible hinge 3, the rotation center of the reflector 4 is always kept on the reflection center of the reflector 4, thereby realizing the two-dimensional precision steering function and meeting the various application requirements for high-precision steering.

[0059] Compared with the prior art, the advantages of this embodiment are:

[0060] (1) The present invention ensures that the rotation center of the reflector 4 coincides with the reflection center. By constraining the translational degree of freedom of the flexible hinge 3, only the three-dimensional rotational degree of freedom around the remote rotation point 32 is retained. This allows the polygonal cone 300 to elastically deform after being driven by the connecting rod 31, and the connecting rod 31 to rotate around the rotation point 32. With the reflection center of the reflector 4 on the connecting rod 31 coinciding with the rotation point 32, the reflector 4 rotates around the rotation point 32, ensuring that the rotation center of the reflector 4 always coincides with the reflection center of the reflector 4. This fundamentally eliminates the problem that the rotation center of the reflector 4 does not coincide with the reflection center, which would cause the light beam to generate additional parasitic spatial position translation after being reflected by the reflection center, and thus lead to spatial position deviation and longitudinal optical path change along the beam transmission direction.

[0061] (2) The present invention utilizes the inherent mechanical properties of the flexible hinge 3 to ensure the stability of the rotation center, without relying on complex multi-driver synchronous or differential drive strategies, reducing the requirements for driver performance consistency and control accuracy, and simplifying system design and calibration process.

[0062] (3) The present invention has a compact and reasonable structure with high stability. The use of flexible hinge 3 effectively utilizes space, and the flexible hinge 3 has high structural stability, high repeatability positioning accuracy, fast response speed and other excellent properties, which are suitable for the high frequency and high precision deflection requirements of precision optical systems.

[0063] (4) The present invention has strong adjustability and adaptability. By adjusting the number of flexible hinge 3 multi-faceted cones 300, the deflection range and stiffness distribution of the rotating mirror can be flexibly optimized to meet the specific application requirements in different scenarios.

[0064] In one specific embodiment, such as Figure 1 , Figure 3 and Figure 4 As shown, in order to optimize the deflection range and stiffness distribution of the polygonal pyramid 300, a feasible connection structure for the polygonal pyramid 300 is further provided. The connection between two adjacent polygonal pyramids 300 is configured such that one corner of the inner polygonal pyramid 300 is connected and fixed to one corner of the outer polygonal pyramid 300. The remaining corners of the inner polygonal pyramid 300 are separately arranged from the inner wall or corners of the outer polygonal pyramid 300 to form deformation gaps for deformation of the polygonal pyramid 300. That is, each polygonal pyramid 300 has one and only one corner connected to the outer polygonal pyramid 300. Apart from the connected corner, the other surfaces or corners of the polygonal pyramid 300 are not connected to the outer polygonal pyramid 300. Under the premise of being able to transmit driving force, it is ensured that the inner polygonal pyramid 300 has enough space to deform around the point.

[0065] Understandably, by adopting this connection method, the polygonal pyramid 300 can, on the one hand, increase the deformation space of the inner polygonal pyramid 300, thereby effectively expanding the overall deflection range and meeting the needs of larger angle deflection; on the other hand, this connection method reduces the mutual constraints between the polygonal pyramids 300, reduces stress concentration and mechanical interference caused by the connection, and improves the stability of the structure.

[0066] In one embodiment, such as Figure 1 , Figure 3 and Figure 4 As shown, in order to optimize the transmission of driving force, the innermost polygonal pyramid 300 is fixedly connected to the connecting rod 31. Specifically, each polygonal pyramid 300 includes a fixed edge connected to the outer side and a movable actuating edge. The connecting rod 31 can be fixedly connected to the actuating edge. In specific implementation, when the moving platform 2 drives the end of the connecting rod 31 close to the moving platform 2 to move, the driving force of the connecting rod 31 will be transmitted from the inside to the outside in sequence, thereby causing each polygonal pyramid 300 to deflect in sequence, realizing the precise angle adjustment of the two-dimensional precision rotating mirror. Therefore, this method of transmitting driving force enables each polygonal pyramid 300 to move in an orderly manner under the drive of the connecting rod 31, ensuring the stability and accuracy of the rotating mirror during the deflection process.

[0067] It should be noted that one corner of the outermost polygonal pyramid 300 is connected and fixed to the base 1 via the mounting seat 301, and the other corner of the outermost polygonal pyramid 300 is connected and fixed to one of the corners of the inner polygonal pyramid 300. That is, in the outermost polygonal pyramid 300, the corner connecting to the base 1 and the corner connecting to the inner polygonal pyramid 300 are not the same corner. These two corners are staggered. In specific implementation, when the moving platform 2 drives the connecting rod 31 to move, and the driving force is transmitted from the inside to the outside to deflect each polygonal pyramid 300, the outermost polygonal pyramid 300 can better distribute and transmit the driving force because one corner is connected and fixed to the base 1, and the other corner is connected and fixed to the inner polygonal pyramid 300 and the two corners are staggered.

[0068] Based on the above embodiments, such as Figure 1 , Figure 3 and Figure 4 As shown, in one embodiment, the number of polygonal pyramidal tubes 300 is at least three. Within any three polygonal pyramidal tubes 300, the connection points of two adjacent inner polygonal pyramidal tubes 300 are staggered from the connection points of two adjacent outer polygonal pyramidal tubes 300. That is, the connection points between the middle polygonal pyramidal tube 300 and the outer polygonal pyramidal tube 300 are staggered from the connection points between the middle polygonal pyramidal tube 300 and the inner polygonal pyramidal tube 300. Specifically, as mentioned above, each polygonal pyramidal tube 300 includes a fixed edge connected to the outer side and a movable actuating edge. When the number of polygonal pyramidal tubes 300 in this embodiment is three, the dimensions of the three polygonal pyramidal tubes 300 gradually increase from the inside to the outside, with the outermost polygonal pyramidal tube 300 having a larger dimension than the middle polygonal pyramidal tube 300. The dimensions of the three polygonal pyramids 300 are as follows: the middle polygonal pyramid 300 is larger than the innermost polygonal pyramid 300. The fixed edge of the outermost polygonal pyramid 300 is fixedly mounted on the mounting base 301 connected to the base 1, while the fixed edge of the middle polygonal pyramid 300 is fixedly mounted on the actuating edge of the outermost polygonal pyramid 300. The fixed edge of the innermost polygonal pyramid 300 is fixedly mounted on the actuating edge of the middle polygonal pyramid 300, and the actuating edge of the innermost polygonal pyramid 300 is connected and fixed to the connecting rod 31, thus forming a three-level nested series structure. The three polygonal pyramids 300 are arranged at a certain angle. The certain angle is mainly set according to how to make the extended planes of each outer surface of the three polygonal pyramids 300 converge at the same rotation point 32.

[0069] In the specific implementation of this embodiment, when the moving platform 2 drives the connecting rod 31 to move, the driving force is transmitted from the innermost polygonal pyramid 300. Since the connection points of the three polygonal pyramids 300 are staggered, the driving force can be more evenly distributed to each polygonal pyramid 300 during the transmission process. Therefore, this arrangement allows each polygonal pyramid 300 to maintain a relatively independent yet cooperative state when subjected to force, avoiding uneven deflection or jamming caused by excessive local force.

[0070] Based on the above embodiments, in this embodiment, as Figure 1 , Figure 3 and Figure 4 As shown, the polygonal pyramid 300 includes at least three trapezoidal flexible blades, which are connected sequentially along the circumference of the polygonal pyramid 300. The upper base of the trapezoidal flexible blades is arranged close to the rotation point 32. In specific implementation, when the polygonal pyramid 300 is deflected by the driving force, the three trapezoidal flexible blades will deform accordingly according to the force. Since the upper base of the trapezoidal flexible blades is arranged close to the rotation point 32, the deformation near the upper base is relatively small during the deflection process, maintaining the stability of the connecting rod 31 near the rotation point 32, while the lower base will deform more significantly, thus better adapting to the change in the deflection angle of the polygonal pyramid 300.

[0071] In one specific embodiment, such as Figure 1As shown, a feasible structure for the mobile platform 2 is further provided. The mobile platform 2 includes a frame assembly 20, a first driver 21, and a second driver 22. The frame assembly 20 is vertically mounted on the base 1, with its front side aligned with the flexible member 30. The frame assembly 20 includes a first mounting frame 200, a second mounting frame 201, and a third mounting frame 202. The first mounting frame 200 is vertically mounted on the base 1, the second mounting frame 201 is located within the first mounting frame 200, and the third mounting frame 202 is located within the second mounting frame 201. The connecting rod 31 is hinged to the third mounting frame 202. The first driver 21 is mounted within the first mounting frame 200, and its driving portion is connected and fixed to the second mounting frame 201. The second driver 22 is mounted within the second mounting frame 201, and its driving portion is connected and fixed to the third mounting frame 202. The driving direction of the first driver 21 is the same as that of the second driver 22. The driving directions are perpendicular to each other so that the end of the connecting rod 31 can move in two dimensions. In specific implementation, when the first driver 21 is used for driving, it produces a yaw deflection, and when the second driver 22 is used for driving, it produces a pitch deflection. The entire moving platform can produce two deflections: pitch and yaw. That is, when the first driver 21 is started, its driving part pushes the second mounting frame 201 and the third mounting frame 202 inside it and the connecting rod 31 to move linearly in the horizontal direction, so that the reflector 4 produces a yaw deflection. When the second driver 22 is started, its driving part pushes the third mounting frame 202 and the connecting rod 31 inside it to move linearly in the vertical direction, thereby driving this end of the connecting rod 31 to move. The movement of this end of the connecting rod 31 will drive the flexible member 30 to deform, constraining the entire flexible hinge 3 to rotate around the rotation point 32, so that the reflector 4 produces a pitch deflection.

[0072] It is understood that the mobile platform 2 in this embodiment, through the cooperation of the frame component 20, the first driver 21 and the second driver 22, constitutes a stacked two-dimensional motion platform. This stacked structure reduces interference and errors during the motion process, improves the stability and reliability of the entire system, and provides a strong guarantee for the high-performance operation of the two-dimensional precision rotating mirror.

[0073] In this embodiment, the first driver 21 and the second driver 22 can be piezoelectric ceramics, voice coil motors, stepper motors, or inchworm drivers, without further restrictions.

[0074] In one embodiment, such as Figure 3As shown, in order to improve the movement stability of the mobile platform 2, the mobile platform 2 also includes multiple elastic elements 23. The multiple elastic elements 23 are respectively connected between the first mounting frame 200 and the second mounting frame 201, and between the second mounting frame 201 and the third mounting frame 202. In specific implementation, when the first driver 21 drives the second mounting frame 201 to move, the elastic element 23 connected between the first mounting frame 200 and the second mounting frame 201 will undergo elastic deformation to absorb and buffer the impact force generated during the movement, thereby ensuring the smooth movement of the second mounting frame 201. Similarly, when the second driver 22 drives the third mounting frame 202 to move, the elastic element 23 connected between the second mounting frame 201 and the third mounting frame 202 will also play the same role, ensuring the stability of the movement of the third mounting frame 202, thereby effectively improving the stability and reliability of the entire mobile platform 2 in the two-dimensional movement process, and ensuring that the reflector 4 will not be deflected unstably due to excessive movement of the mobile platform 2 during the deflection process.

[0075] In this embodiment, as Figure 4 As shown, along the driving direction of the first driver 21, multiple elastic elements 23 are located on opposite sides of the second mounting frame 201; along the driving direction of the second driver 22, multiple elastic elements 23 are located on opposite sides of the third mounting frame 202. Specifically, the elastic elements 23 can be springs, and are provided at the four corners of the second mounting frame 201 and the four corners of the third mounting frame 202. In specific implementation, when the first driver 21 drives the second mounting frame 201 to move away from the first driver 21, the elastic elements 23 closer to the first driver 21 will be stretched, and the elastic elements 23 farther away from the first driver 21 will be stretched. The third mounting frame 202 will be compressed, and the elastic elements 23 at the four corners will exert a force that moves towards the first driver 21. This force can counteract some of the inertial force generated by the second mounting frame 201 during movement, thereby further reducing the vibration and impact of the second mounting frame 201 during movement and improving the smoothness of movement. The first driver 21 drives the second mounting frame 201 to move towards the first driver 21 in a similar way, so I won't go into details. The second driver 22 can also play a similar role, which can further reduce the vibration and impact of the third mounting frame 202 during movement and improve the smoothness of movement.

[0076] In one embodiment, such as Figure 1As shown, a movable connection method between the connecting rod 31 and the mobile platform 2 is further provided. The connecting rod 31 is provided with a ball head 310. The center of the third mounting frame 202 is provided with a receiving groove 2020 for accommodating the ball head 310. The ball head 310 is inserted into the receiving groove 2020. In specific implementation, the ball head 310 can slide in the slotting direction of the receiving groove 2020 to achieve a decoupled movable connection. The two-dimensional translation drive output by the mobile platform 2 can be converted into the spherical rotation motion of the flexible hinge 3 around the rotation point 32. It can be understood that after adopting this setting, the connecting rod 31 and the mobile platform 2 are connected by a decoupled connection mechanism to convert the two-dimensional translation motion output by the mobile platform 2 into a driving force perpendicular to the connecting rod 31, preventing additional bending moment in the connecting rod 31 due to mismatch in motion modes.

[0077] In one specific embodiment, such as Figure 1 Figure 1 Figure 1 Figure 1 As shown, a structure for the reflector 4 is further provided. The reflector 4 includes a mirror base 40 and a mirror body 41. The mirror base 40 is fixedly mounted on one end of the connecting rod 31 near the rotation point 32. The mirror body 41 is mounted inside the mirror base 40, and the reflection center of the mirror body 41 is precisely aligned with the rotation point 32 of the flexible hinge 3.

[0078] Example 2

[0079] The second embodiment of this application provides a two-dimensional precision rotating mirror based on a flexible hinge, which is basically the same as the first embodiment. The difference is that the cone is no longer a multi-faceted cone 300, but a curved cone. That is, the curved cone is similar to the case of increasing the number of edges of a multi-faceted cone, which will produce over-constraint. However, this over-constraint is mainly reflected in a significant increase in stiffness in the translational direction and a partial increase in stiffness in the rotational direction. This can also achieve our expected function, only requiring the application of a larger driving force.

[0080] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0081] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

[0082] Finally, it should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

Claims

1. A two-dimensional precision rotating mirror based on a tapered flexible hinge, characterized in that, include: Base; A mobile platform, which is mounted on the base; A flexible hinge includes a flexible element and a connecting rod; the flexible element is fixedly connected to the base, and the flexible element includes multiple cones that are sequentially nested together, with the extended planes of the outer surfaces of the multiple cones converging at the same rotation point; the connecting rod is fixedly connected to one of the cones, one end of the connecting rod is movably connected to the moving part of the moving platform, and the axis of the connecting rod passes through the rotation point; A reflector is mounted on the connecting rod, and the reflection center of the reflector is arranged to coincide with the rotation point; The mobile platform is configured to move one end of the connecting rod away from the rotation point along an axis perpendicular to the connecting rod, and the flexible member is configured to cause the connecting rod to rotate around the rotation point when the end of the connecting rod away from the rotation point moves along an axis perpendicular to the connecting rod.

2. The two-dimensional precision rotating mirror according to claim 1, characterized in that, The cone is a multi-faceted cone. In two adjacent multi-faceted cones, one of the edges of the inner multi-faceted cone is connected and fixed to one of the edges of the outer multi-faceted cone. The remaining edges of the inner multi-faceted cone are arranged separately from the inner wall or edges of the outer multi-faceted cone to form a deformation gap for deformation of the multi-faceted cone.

3. The two-dimensional precision rotating mirror according to claim 2, characterized in that, The innermost polygonal cone is fixedly connected to the connecting rod.

4. The two-dimensional precision rotating mirror according to claim 2, characterized in that, One corner of the outermost polygonal pyramid is connected and fixed to the base, and the other corner of the outermost polygonal pyramid is connected and fixed to one of the corners of the inner polygonal pyramid.

5. The two-dimensional precision rotating mirror according to any one of claims 2 to 4, characterized in that, The polygonal cone includes at least three trapezoidal flexible blades, which are connected sequentially along the circumference of the polygonal cone, with the upper base of the trapezoidal flexible blades arranged close to the rotation point.

6. The two-dimensional precision rotating mirror according to claim 1, characterized in that, The cone is a curved cone.

7. The two-dimensional precision rotating mirror according to claim 1, characterized in that, The mobile platform includes a frame assembly, a first driver, and a second driver; The frame assembly includes a first mounting frame, a second mounting frame, and a third mounting frame; the first mounting frame is vertically mounted on the base, the second mounting frame is located inside the first mounting frame, the third mounting frame is located inside the second mounting frame, and the connecting rod is hinged to the third mounting frame; The first driver is installed in the first mounting frame, and the driving part of the first driver is connected and fixed to the second mounting frame; The second driver is installed in the second mounting frame, and the driving part of the second driver is connected and fixed to the third mounting frame; The driving direction of the first driver is perpendicular to the driving direction of the second driver.

8. The two-dimensional precision rotating mirror according to claim 7, characterized in that, The mobile platform also includes multiple elastic elements, which are respectively connected between the first mounting frame and the second mounting frame, and between the second mounting frame and the third mounting frame.

9. The two-dimensional precision rotating mirror according to claim 8, characterized in that: Along the driving direction of the first driver, a plurality of the elastic elements are located on opposite sides of the second mounting frame; Along the driving direction of the second driver, a plurality of the elastic elements are located on opposite sides of the third mounting frame.

10. The two-dimensional precision rotating mirror according to claim 7, characterized in that, The connecting rod is provided with a ball head, and the third mounting frame is provided with a receiving groove for accommodating the ball head, and the ball head is inserted into the receiving groove.

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