Tension control method, system and equipment and slicing machine

Abstract

The invention provides a tension control method, system and equipment and a slicing machine, and relates to the silicon wafer cutting technology. The method comprises the steps that the linear speed difference between a first target motor and a main roller is obtained; the first target motor is a winding motor or an unwinding motor; according to the linear speed difference, the tension deviation and the tension deviation change rate, target control quantity is generated through feed-forward control and fuzzy PID control with nonlinear amplitude limiting; controlling a second target motor corresponding to the first target motor according to the target control quantity; the second target motor is a winding side tension motor or an unwinding side tension motor. According to the invention, the tension control precision can be effectively improved.

Description

Technical Field

[0001] This application relates to silicon wafer cutting technology, and more particularly to a tension control method, system, device and slicing machine. Background Technology

[0002] In the silicon wafer dicing process, the slicing machine uses high-speed diamond wire cutting to form silicon wafers. The tension stability of the diamond wire directly determines the dicing quality of the silicon wafer and is a core factor in ensuring the yield of finished products. Therefore, developing a high-precision, high-stability diamond wire tension control method has become a key step in meeting the dicing requirements of large-size thin silicon wafers.

[0003] Currently, the diamond wire tension control of silicon wafer slicing machines mostly adopts the traditional PID control method. This method collects real-time tension data through a tension sensor, calculates the tension deviation, and outputs a control signal to drive the winding motor and unwinding motor to adjust their speed, thereby maintaining the diamond wire tension within the set range. Some improved solutions introduce a simple feedforward compensation stage, which performs fixed coefficient compensation based on preset roller radius parameters to help improve the control response speed.

[0004] However, in the above process, traditional control methods cannot adapt to dynamic changes in working conditions, resulting in insufficient tension control accuracy. Summary of the Invention

[0005] This application provides a tension control method, system, device, and slicer to improve tension control accuracy.

[0006] In a first aspect, this application provides a tension control method, the method comprising:

[0007] Obtain the linear speed difference between the first target motor and the main roller; the first target motor is a take-up motor or an unwind motor;

[0008] Based on the linear velocity difference, tension deviation, and tension deviation change rate, the target control quantity is generated through feedforward control and fuzzy PID control with nonlinear amplitude limiting.

[0009] The second target motor corresponding to the first target motor is controlled according to the target control quantity; the second target motor is a take-up tension motor or an unwinding tension motor.

[0010] In one possible implementation, the step of generating the target control quantity based on the linear velocity difference, tension deviation, and rate of change of tension deviation through feedforward control and fuzzy PID control with nonlinear amplitude limiting includes:

[0011] The feedforward control is performed based on the linear velocity difference to generate a feedforward compensation amount; the fuzzy PID control with nonlinear amplitude limiting is performed based on the tension deviation and the rate of change of the tension deviation to generate a PID adjustment amount.

[0012] The target control quantity is generated by combining the feedforward compensation quantity and the PID adjustment quantity.

[0013] In one possible implementation, the step of performing the feedforward control based on the linear velocity difference to generate a feedforward compensation amount includes:

[0014] The linear velocity difference is input into a preset feedforward compensation model to obtain the feedforward compensation amount; wherein, the feedforward compensation model is based on the system operation mechanism, and is obtained by establishing a mathematical relationship between tension and velocity difference and deriving a compensation function. The feedforward compensation model dynamically adjusts the compensation coefficient in conjunction with the real-time roller radius of the first target motor.

[0015] In one possible implementation, the step of generating a PID control with nonlinear limiting based on the tension deviation and the rate of change of the tension deviation includes:

[0016] The tension deviation and the rate of change of tension deviation are fuzzified to obtain the corresponding fuzzy linguistic variables;

[0017] Based on a preset fuzzy rule base, fuzzy inference is performed on the fuzzy linguistic variables to obtain a fuzzy set of PID parameter adjustment amounts;

[0018] The fuzzy set is defuzzified using a preset defuzzification algorithm to obtain the initial adjustment amount of the PID parameters;

[0019] The initial adjustment amount is limited by a nonlinear limiting rule to obtain the final PID adjustment amount; the nonlinear limiting rule is used to avoid tension overshoot caused by sudden changes in PID parameters.

[0020] In one possible implementation, obtaining the linear velocity difference between the first target motor and the main roller includes:

[0021] Real-time monitoring of the difference in winding side linear speed between the winding motor and the main roller, and the difference in unwinding side linear speed between the unwinding motor and the main roller;

[0022] If only the winding side line speed difference exceeds the preset threshold, then the winding motor is used as the first target motor, and the winding side line speed difference is obtained.

[0023] If only the unwinding side line speed difference exceeds the preset threshold, then the unwinding motor is used as the first target motor, and the unwinding side line speed difference is obtained.

[0024] If both the winding side speed difference and the unwinding side speed difference exceed a preset threshold, then the winding motor and the unwinding motor are respectively regarded as independent first target motors, and the winding side speed difference and the unwinding side speed difference are obtained accordingly.

[0025] In one possible implementation, the method further includes:

[0026] The motor speed is obtained by the encoder signal of the first target motor, and the first linear speed of the first target motor is obtained based on the motor speed and the real-time roller radius of the first target motor.

[0027] The main roller speed is obtained by the encoder signal of the main roller motor, and the second linear velocity of the main roller is obtained based on the main roller speed and the main roller radius;

[0028] The difference between the second linear velocity and the first linear velocity is obtained.

[0029] In one possible implementation, the method further includes:

[0030] The current tension value is obtained through the tension sensor corresponding to the first target motor;

[0031] The tension deviation is obtained by subtracting the target tension value from the current tension value;

[0032] The rate of change of tension deviation is calculated based on the amount of change of the tension deviation within a preset time interval.

[0033] Secondly, this application provides a tension control device, the device comprising:

[0034] The acquisition module is used to acquire the linear speed difference between the first target motor and the main roller; the first target motor is a winding motor or an unwinding motor.

[0035] The generation module is used to generate a target control quantity based on the linear velocity difference, tension deviation, and tension deviation change rate through feedforward control and fuzzy PID control with nonlinear amplitude limiting.

[0036] The control module is used to control a second target motor corresponding to the first target motor according to the target control quantity; the second target motor is a take-up tension motor or an unwinding tension motor.

[0037] Thirdly, this application provides an electronic device, including at least one processor and a memory communicatively connected to the processor;

[0038] The memory stores computer-executed instructions;

[0039] The processor executes computer execution instructions stored in the memory to implement the method as described in any of the first aspects.

[0040] Fourthly, this application provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, are used to implement the method as described in any of the first aspects.

[0041] Fifthly, this application provides a computer program product, including a computer program that, when executed by a processor, implements the method as described in any of the first aspects.

[0042] Sixthly, this application provides a tension control system, the system including a take-up motor, an unwinding motor, a main roller, a take-up-side tension motor, an unwinding-side tension motor, and electronic equipment; wherein the electronic equipment is configured to:

[0043] Obtain the linear speed difference between the first target motor and the main roller; the first target motor is either the winding motor or the unwinding motor;

[0044] Based on the linear velocity difference, tension deviation, and tension deviation change rate, the target control quantity is generated through feedforward control and fuzzy PID control with nonlinear amplitude limiting.

[0045] The second target motor corresponding to the first target motor is controlled according to the target control quantity; the second target motor is the take-up side tension motor or the unwind side tension motor.

[0046] In a seventh aspect, this application provides a slicing machine, which includes a tension control system as described in the sixth aspect above, and also includes a diamond wire; the two ends of the diamond wire are respectively wound on the winding rollers of the winding motor and the unwinding motor of the tension control system, and pass over the guide roller assembly and the main roller with a specific wrap angle, for completing the silicon wafer slicing operation in high-speed operation.

[0047] This application provides a tension control method, system, device, and slicing machine. The tension control method first obtains the linear speed difference between a first target motor and the main roller. Then, based on the linear speed difference, tension deviation, and the rate of change of tension deviation, a target control quantity is generated through feedforward control and fuzzy PID control with nonlinear limiting, thereby controlling a second target motor corresponding to the first target motor. In this process, the combination of feedforward control and fuzzy PID control with nonlinear limiting allows for targeted and coordinated adjustment based on the linear speed difference, tension deviation, and rate of change, adapting to dynamic changes in working conditions and effectively improving tension control accuracy. Furthermore, the independent control on one side during winding or unwinding, as well as the separate control on both sides, enables precise response to tension under different working conditions, ensuring stable diamond wire tension and meeting the requirements of high-precision cutting. Attached Figure Description

[0048] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0049] Figure 1 This is a schematic diagram illustrating an application scenario of a tension control method provided in an embodiment of this application.

[0050] Figure 2A A flowchart illustrating a tension control method provided in this application embodiment. Figure 1 ;

[0051] Figure 2B A schematic diagram illustrating the principle of a tension control method provided in this application embodiment;

[0052] Figure 3A A schematic flowchart of a tension control method provided in an embodiment of this application is shown below;

[0053] Figure 3B A schematic diagram of a PID structure provided in an embodiment of this application;

[0054] Figure 4 This is a schematic diagram of the structure of a tension control device provided in an embodiment of this application;

[0055] Figure 5 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application.

[0056] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0057] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0058] With the rapid development of the photovoltaic industry, the market has become increasingly demanding in terms of the size and thickness of silicon wafers. Large-size (such as 182mm, 210mm, etc.) and thinner (mainstream thickness reduced to below 160μm) silicon wafers have become the industry trend, which has put forward higher standards for the processing accuracy and stability of silicon wafer cutting equipment.

[0059] In the silicon wafer dicing process, the slicing machine uses high-speed diamond wire cutting to form silicon wafers. The tension stability of the diamond wire directly determines the dicing quality of the silicon wafer and is a core factor in ensuring the yield of finished products. Therefore, developing a high-precision, high-stability diamond wire tension control method has become a key step in meeting the dicing requirements of large-size thin silicon wafers.

[0060] Currently, the tension control of diamond wire in silicon wafer slicing machines mostly adopts the traditional PID control method. This method collects real-time tension data of the diamond wire through a tension sensor, compares the collected data with a preset tension threshold to calculate the tension deviation, and then outputs the corresponding control signal to drive the winding motor and unwinding motor to adjust their speed, thereby maintaining the diamond wire tension within the set range. Some improved solutions introduce a simple feedforward compensation stage, which configures a fixed compensation coefficient based on the preset roller radius parameters to perform basic tension compensation at the beginning of winding and unwinding, helping to improve the response speed of tension adjustment.

[0061] However, in the above process, the traditional control method cannot adapt to the dynamic changes in working conditions, especially the complex working conditions such as the continuous change of the diameter of the wire roller, real-time fluctuation of the load, and occasional sudden changes in speed during the winding and unwinding process. As a result, there is a defect of insufficient tension control accuracy, which makes it difficult to meet the stringent requirements for tension stability in the cutting of large-size thin silicon wafers.

[0062] Therefore, embodiments of this application provide a tension control method, system, device, and slicing machine to solve the above-mentioned problems. Specifically, the method of this application proposes to capture the difference in operating speed between the winding motor or unwinding motor and the main roller, combine the real-time tension deviation and deviation change trend, and integrate feedforward control and fuzzy PID control strategy with nonlinear amplitude limiting to generate control commands, thereby accurately driving the tension motor on the corresponding side to perform tension adjustment actions.

[0063] It is understood that the tension control method of this application is applicable to any tension adjustment scenario where the wire is running at high speed. For example, Figure 1 This is a schematic diagram illustrating an application scenario of a tension control method provided in an embodiment of this application, such as... Figure 1 As shown, the tension control method of this application can be used in the diamond wire tension control scenario of silicon wafer cutting equipment slicing machine in the photovoltaic industry: the two ends of the diamond wire are respectively wound on the rollers of the winding motor and the unwinding motor, and the wire wraps around the main roller with a specific wrap angle to form a cutting area. The tension motors on the winding side and the unwinding side act on the diamond wire on the corresponding sides, and the tension control is achieved in conjunction with the tension adjustment component, so as to complete the cutting operation of the silicon rod (generally square). The method of this application is used to stabilize and regulate the tension of the diamond wire in this process, so as to ensure the cutting quality of silicon wafers.

[0064] Currently, in the scenario of diamond wire cutting of silicon wafers, with the increasing demand for large-size and thin silicon wafers in the photovoltaic industry, diamond wires are also showing a trend towards thinner wires. During the cutting process, the diameter of the wire roller changes continuously with the winding and unwinding actions, and complex working conditions such as load fluctuations and sudden speed changes are prone to occur. Traditional tension control methods are difficult to adapt to such dynamic changes, often resulting in tension adjustment lag and overshoot problems, which in turn lead to defects such as wire breakage, uneven silicon wafer thickness, and edge cracking, seriously restricting product yield.

[0065] When applying the method of this application to silicon rod cutting, the linear speed difference between the winding motor or unwinding motor and the main roller is first captured, and the real-time tension deviation and deviation change rate of the diamond wire are collected at the same time. Based on these data, feedforward control and fuzzy PID control with nonlinear amplitude limiting are integrated to generate control commands, and then the corresponding tension motors on the winding side or unwinding side are driven to perform actions to realize the dynamic adjustment of the diamond wire tension.

[0066] In the above process, feedforward control can adapt to the dynamic changes in the diameter of the wire roller during the winding and unwinding process in advance, and fuzzy PID control with nonlinear amplitude limiting can quickly respond to tension deviation and change trend, effectively avoiding tension adjustment lag or overshoot; the synergistic effect of the two greatly improves the accuracy and stability of diamond wire tension control, reduces the occurrence of defects such as wire breakage and uneven silicon wafer thickness, meets the high-precision cutting requirements of large-size thin silicon wafers, and effectively improves product yield.

[0067] It should be understood that, in the above process, the executing entity of the method of this application can be the electronic control unit of the slicing machine, or any electronic device with data processing and instruction output functions such as an industrial controller or a programmable logic controller. This embodiment does not limit this. In addition, the application scenarios of the method of this application can also be any scenario that requires stable tension control of high-speed running wires or rolls, such as metal wire drawing, textile fiber winding, and film production. This embodiment does not limit this.

[0068] The following detailed description, with reference to the accompanying drawings and using any electronic device as the executing entity, outlines some embodiments of the tension control method of this application. Where the embodiments do not conflict, the following embodiments and features thereof can be combined with each other.

[0069] This application provides a tension control method. Figure 2A A flowchart illustrating a tension control method provided in this application embodiment. Figure 1 ,like Figure 2A As shown, the method in this application embodiment includes:

[0070] S201. Obtain the linear velocity difference between the first target motor and the main roller.

[0071] The first target motor is either a winding motor or an unwinding motor.

[0072] In this embodiment, the electronic device first obtains the motor speed through the encoder signal of the first target motor, and obtains the first linear speed of the first target motor based on the motor speed and the real-time roller radius of the first target motor; then obtains the main roller speed through the encoder signal of the main roller motor, and obtains the second linear speed of the main roller based on the main roller speed and the main roller radius; finally, the difference between the second linear speed and the first linear speed is obtained.

[0073] Specifically, the electronic device establishes a communication connection with the encoder that is matched with the first target motor, reads the pulse signal output by the encoder in real time, and then converts the pulse signal into the real-time speed of the first target motor according to the encoder's resolution and the preset calculation logic.

[0074] For the real-time roll radius of the first target motor, in this embodiment, the electronic device dynamically calculates it based on the initial roll radius of the take-up and unwinding motors, the wire diameter parameters, and the cumulative number of rotations of the take-up and unwinding motors. Specifically, let the initial roll radius be R_0 (equipment factory calibration parameter), the wire diameter be d (process adaptation parameter), and the cumulative number of rotations of the take-up and unwinding motors be N (calculated from encoder pulse signals). Then, the formula for calculating the real-time roll radius is: R_wind = R_0 + (d·N / 2), where N is positive in the take-up motor scenario and negative in the unwinding motor scenario.

[0075] Subsequently, the electronic device calculates the first linear velocity of the first target motor according to the linear velocity calculation formula v_wind=w_wind×R_wind. In this formula, v_wind represents the first linear velocity, w_wind represents the real-time rotational speed of the first target motor in rad / s, and R_wind represents its real-time roller radius in meters.

[0076] Specifically, the electronic equipment obtains pulse signals through the encoder matched with the main roller motor, and obtains the real-time speed of the main roller motor according to the same pulse-speed conversion logic. Since the main roller is a rigid structure, its radius will not change during the cutting process. The radius of the main roller is a fixed parameter calibrated at the factory and can be directly retrieved from the preset parameter library of the electronic equipment.

[0077] Subsequently, the electronic equipment calculates the second linear velocity of the main roller according to the linear velocity calculation formula v_main=w_main×R_main. In this formula, v_main represents the second linear velocity, w_main represents the real-time rotational speed of the main roller motor in rad / s, and R_main represents the fixed radius of the main roller in meters.

[0078] Furthermore, after obtaining the first and second linear velocities, the electronic device performs a difference calculation using its built-in computing module, according to the formula... The difference in linear velocity is obtained, and the positive or negative attribute of the difference is recorded. This is used to confirm whether the linear velocity of the first target motor is too fast or too slow relative to the linear velocity of the main roller, providing a directional basis for subsequent tension control.

[0079] In practical applications, the motor speed can be obtained by acquiring the speed signal through a Hall sensor installed on the motor shaft instead of an encoder; the real-time roller radius can be obtained by directly measuring the real-time outer diameter of the roller through a laser rangefinder instead of calculating it based on initial parameters and cumulative revolutions; the calculation of the linear speed difference can also only obtain the absolute value, and this embodiment does not limit this.

[0080] It should be understood that, in the above process, if the first target motor is a take-up motor, the linear speed difference calculated above is the difference in linear speed between the take-up motor and the main roll on the take-up side; if the first target motor is an unwinding motor, the calculated linear speed difference is the difference in linear speed between the unwinding motor and the main roll on the unwinding side.

[0081] In this embodiment, the electronic device obtains the linear speed difference in the following manner: real-time monitoring of the linear speed difference between the winding motor and the main roller on the winding side, and the linear speed difference between the unwinding motor and the main roller on the unwinding side; if only the linear speed difference on the winding side exceeds a preset threshold, the winding motor is used as the first target motor to obtain the linear speed difference on the winding side; if only the linear speed difference on the unwinding side exceeds a preset threshold, the unwinding motor is used as the first target motor to obtain the linear speed difference on the unwinding side; if both the linear speed difference on the winding side and the linear speed difference on the unwinding side exceed the preset threshold, the winding motor and the unwinding motor are used as independent first target motors respectively, and the linear speed difference on the winding side and the linear speed difference on the unwinding side are obtained accordingly.

[0082] Specifically, the electronic equipment monitors the real-time rotational speed and real-time roll radius of the first target motor, and calculates the first linear speed based on the aforementioned logic. Similarly, the electronic equipment monitors the real-time rotational speed of the main roll motor, and calculates the second linear speed based on the aforementioned logic, thereby achieving real-time monitoring of the difference in linear speed between the winding and unwinding sides.

[0083] It should be understood that the preset threshold is determined based on the allowable fluctuation range of diamond wire tension in the silicon wafer cutting process. In this embodiment, the preset threshold is set to 0, that is, any deviation between the linear speed of the winding motor or the unwinding motor and the linear speed of the main roller is judged as exceeding the threshold range.

[0084] More specifically, when it is detected that only the winding side linear speed difference exceeds the preset threshold of 0, the winding motor is used as the first target motor, and only the winding side linear speed difference is acquired for subsequent calculations; when it is detected that only the unwinding side linear speed difference exceeds the preset threshold of 0, the unwinding motor is used as the first target motor, and only the unwinding side linear speed difference is acquired for subsequent calculations; when it is detected that both the winding and unwinding side linear speed differences exceed the preset threshold of 0, the winding motor and the unwinding motor are used as independent first target motors, and the corresponding winding side linear speed differences and unwinding side linear speed differences are acquired respectively, and subsequent calculations and control logic are executed respectively.

[0085] In practical applications, the monitoring method can be replaced by directly collecting the real-time linear speed of the diamond wire at the winding end, unwinding end, and main roller using photoelectric speed sensors installed on the diamond wire running path, and then obtaining the linear speed difference through difference calculation; the preset threshold can be replaced by a non-zero small threshold range optimized based on historical process data to avoid triggering frequent data acquisition actions due to small deviations; for cases where the linear speed difference on both sides exceeds the threshold, it can be replaced by prioritizing the acquisition of the linear speed difference on the side with the larger absolute value of the deviation, and then acquiring the linear speed difference on the other side after the deviation on that side returns to within the threshold. This embodiment does not limit this.

[0086] In the above process, the linear speed difference is obtained by dynamically calculating the roller radius using an encoder, which ensures the accuracy and real-time nature of data acquisition and adapts to the dynamic changes in the roller radius during winding and unwinding. Setting the preset threshold to 0 enables zero-delay perception of linear speed deviation, ensuring timely acquisition of deviation data. Differentiated data acquisition strategies for single-sided and double-sided threshold exceedances improve the targeting and effectiveness of data acquisition, avoid invalid data redundancy, and ensure accurate and reliable input data for subsequent steps.

[0087] Furthermore, it should be understood that the above calculation logic can be executed by other electronic devices that interact with the electronic device. The electronic device directly obtains the linear speed difference between the first target motor and the main roller by interacting with the other electronic device. This embodiment does not limit this.

[0088] S202. Based on the linear velocity difference, tension deviation, and the rate of change of tension deviation, the target control quantity is generated through feedforward control and fuzzy PID control with nonlinear amplitude limiting.

[0089] In this embodiment, both the winding motor and the unwinding motor are equipped with tension sensors. Based on this, the electronic device obtains the current tension value through the tension sensor corresponding to the first target motor; the difference between the target tension value and the current tension value is calculated to obtain the tension deviation; finally, the tension deviation change rate is calculated based on the amount of change of the tension deviation within a preset time interval.

[0090] Specifically, the tension sensor, which is matched with the first target motor, is installed at the tension detection point of the diamond wire. The tension sensor collects the tension signal of the diamond wire in real time and converts it into an electrical signal, which is then transmitted to the electronic device through the communication interface. The electronic device filters and performs analog-to-digital conversion on the received electrical signal to eliminate interference noise in the signal and obtains the value corresponding to the current tension, i.e., the current tension value.

[0091] It should be understood that the target tension value is a fixed value preset based on the silicon wafer dicing process requirements, stored in the parameter configuration library of the electronic device, and can be manually or automatically adjusted according to the dicing requirements of silicon wafers of different specifications. In this embodiment, the electronic device is based on the formula e=F target -F current Calculate the tension deviation, where F target Used to represent the target tension value, F current Used to indicate the current tension value.

[0092] It should be understood that the preset time interval is a fixed sampling period set by the electronic device. In this embodiment, it is set to 10ms. The electronic device continuously collects at least two sets of tension deviation data according to this time interval.

[0093] Based on this, electronic devices are based on formula e c = (e2-e1) / (t2-t1) Calculate the rate of change of tension deviation, where e c Used to represent the rate of change of tension deviation, e1 and e2 are the tension deviations of two adjacent sampling periods, t1 and t2 are the corresponding sampling times, and t2-t1 is equal to the preset time interval.

[0094] In practical applications, the current tension value can be obtained indirectly by using a pressure sensor located at the end of the guide wheel shaft to detect the pressure of the diamond wire on the guide wheel and convert it into a tension value, instead of directly using a tension sensor; the target tension value can be replaced by a variable value dynamically generated based on the real-time cutting conditions, such as adjusting it in real time according to the silicon wafer cutting depth; the preset time interval can be replaced by an adaptive adjustment mode, that is, dynamically shortening or extending the sampling period according to the tension fluctuation amplitude; the calculation of the tension deviation change rate can also use the moving average method, calculating the mean based on multiple sets of continuous sampling data to reduce the impact of single sampling error, but this embodiment does not limit this.

[0095] In this embodiment, the current tension value is directly acquired by a tension sensor, ensuring the real-time nature and accuracy of the tension data and reducing errors caused by indirect conversion. The target tension value is a fixed value adapted to the process, ensuring the stability of the tension reference during the cutting process. The tension deviation change rate is calculated at preset fixed time intervals, which can accurately capture the dynamic change trend of tension and provide reliable parameter input for subsequent fuzzy PID control. The entire data acquisition process is simple in logic and fast in response, adapting to the dynamic working conditions during the winding and unwinding process, laying a data foundation for improving the accuracy of tension control.

[0096] Based on this, the electronic device generates the target control quantity through feedforward control and fuzzy PID control with nonlinear amplitude limiting, based on the linear velocity difference, tension deviation and tension deviation change rate obtained from the aforementioned process.

[0097] Feedforward control is a disturbance compensation-based control method that generates a compensation signal in advance based on the linear velocity difference as a disturbance factor to counteract the impact of linear velocity deviation on the tension of the diamond wire. Fuzzy PID control with nonlinear limiting is a composite control method combining fuzzy control and PID control. It dynamically adjusts the PID parameters through fuzzy rules and uses a nonlinear limiting element to restrict the output range of the control quantity, avoiding overshoot problems caused by excessive control quantity.

[0098] It should be understood that the target control quantity is a quantitative instruction that can drive the adjustment action of the second target motor, and its magnitude and direction correspond to the speed adjustment range and direction of the motor.

[0099] As an example, Figure 2B This is a schematic diagram illustrating the principle of a tension control method provided in an embodiment of this application, as shown below. Figure 2BAs shown, in this embodiment, the tension deviation is first obtained by subtracting the input (corresponding to the target tension, linear velocity reference, etc.) from the system feedback (corresponding to the real-time tension of the diamond wire). This deviation is then input to the fuzzy PID module. Simultaneously, a feedforward compensation quantity is generated based on the linear velocity difference as a feedforward input to offset the disturbance caused by the linear velocity deviation in advance. Other disturbances during the cutting process are directly applied to the controlled object (i.e., the diamond wire tension adjustment system) in the form of disturbance input N(s), and a closed-loop monitoring is formed through system feedback. Finally, the fuzzy PID module dynamically adjusts the PID parameters based on the tension deviation and the rate of change of the deviation and outputs the PID adjustment quantity. This adjustment quantity is then fused with the feedforward compensation quantity to generate the target control quantity, which drives the controlled object (including the second target motor and the tension swing arm) to perform tension adjustment. The adjusted real-time tension is then fed back to the input end through the tension sensor to form system feedback, completing the entire closed-loop control process.

[0100] S203. Control the second target motor corresponding to the first target motor according to the target control quantity; the second target motor is a winding-side tension motor or an unwinding-side tension motor.

[0101] It should be understood that the first target motor and the second target motor have a one-to-one matching relationship: when the first target motor is a take-up motor, the corresponding second target motor is a take-up side tension motor, and the action of the take-up side tension motor directly affects the diamond wire tension adjustment at the take-up end; when the first target motor is an unwinding motor, the corresponding second target motor is an unwinding side tension motor, and the action of the unwinding side tension motor directly affects the diamond wire tension adjustment at the unwinding end.

[0102] It should be understood that when both the winding and unwinding linear speed deviations exist, the electronic equipment treats the winding and unwinding motors as independent primary target motors. For the winding side, based on the winding linear speed difference, winding tension deviation, and deviation change rate, a target control quantity for the winding side is generated through feedforward control and fuzzy PID control with nonlinear limiting, driving the winding tension motor to perform adjustment. For the unwinding side, based on the unwinding linear speed difference, unwinding tension deviation, and deviation change rate, the same target control quantity for the unwinding side is generated through feedforward control and fuzzy PID control with nonlinear limiting, driving the unwinding tension motor to perform adjustment. The control processes on both sides do not interfere with each other, achieving synchronous tension control at both ends of winding and unwinding.

[0103] In the method provided in this embodiment, by acquiring the linear speed difference and combining it with the tension deviation and the rate of change of the deviation, a target control quantity is generated by combining feedforward control with fuzzy PID control with nonlinear amplitude limiting. Then, the corresponding tension motor is driven to perform adjustment. This method can adapt to the working conditions of dynamic changes in the radius of the wire roller during the winding and unwinding process, effectively avoid the lag and overshoot problems of tension adjustment, improve the accuracy and stability of tension control, and thus ensure the stability of the diamond wire cutting process, meeting the high-precision cutting requirements of large-size thin silicon wafers.

[0104] This application also provides an embodiment of a tension control method to further illustrate the manner in which the target control quantity is generated. Figure 3A A second flowchart illustrating a tension control method provided in this application embodiment is shown below. Figure 3A As shown, the method in this embodiment includes:

[0105] S301. Perform feedforward control based on the linear velocity difference to generate feedforward compensation; perform fuzzy PID control with nonlinear amplitude limiting based on tension deviation and tension deviation change rate to generate PID adjustment.

[0106] In this embodiment, the generation of the feedforward compensation amount and the generation of the PID adjustment amount are independent operations executed in parallel, without interference and proceeding synchronously. The feedforward compensation amount is a quantitative control parameter used to offset the effect of linear velocity deviation on tension. Its specific form can be determined according to the control requirements of the second target motor. For example, it can be the torque compensation value driving the second target motor, with its magnitude corresponding to the torque adjustment range and its positive or negative attribute corresponding to the direction of torque increase or decrease; a positive value indicates an increase in motor torque, and a negative value indicates a decrease in motor torque. The PID adjustment amount is a quantitative control parameter used to correct tension deviation. Its specific form can be matched with the feedforward compensation amount. For example, it can be the speed correction value driving the second target motor, with its magnitude corresponding to the speed adjustment range and its positive or negative attribute corresponding to the direction of speed increase or decrease; a positive value indicates an increase in motor speed, and a negative value indicates a decrease in motor speed.

[0107] In this embodiment, the electronic device specifically obtains the feedforward compensation amount by inputting the linear velocity difference into a preset feedforward compensation model. The feedforward compensation model is based on the system's operating mechanism, established by creating a mathematical relationship between tension and velocity difference and deriving a compensation function. The feedforward compensation model dynamically adjusts the compensation coefficient in conjunction with the real-time roller radius of the first target motor.

[0108] Specifically, in this embodiment, the feedforward compensation model is obtained based on the following process: First, based on the dynamic characteristics of the diamond wire cutting system, a mathematical model is established between tension and linear velocity difference and roller radius. The influence law of linear velocity difference change on tension fluctuation is clarified, and the correlation formula between feedforward compensation amount and linear velocity difference and roller radius is derived. Taking torque compensation value as an example, the correlation formula is F_ff=K_f×△v×R_wind (where F_ff= is the feedforward torque compensation amount, K_f is the compensation coefficient, △v is the linear velocity difference, and R_wind is the real-time roller radius of the first target motor). Subsequently, through a large number of simulation experiments and field tests, the initial compensation coefficient K_f0 is calibrated to form the initial feedforward compensation model.

[0109] During the model application process, the electronic device uses the real-time roller radius R_wind of the first target motor as one of the input variables of the model. The compensation coefficient is dynamically corrected by the preset coefficient adjustment formula K_f=K_f0×(R_wind / R_0) (where R_0 is the initial roller radius), so as to obtain a feedforward compensation model that adapts to the current working condition.

[0110] Based on this, the electronic device inputs the linear velocity difference into the feedforward compensation model. At this time, the feedforward compensation model first reads the real-time roller radius of the first target motor calculated at the moment, and then calculates the real-time compensation coefficient K_f according to the above coefficient adjustment formula. Subsequently, the linear velocity difference Δv, the real-time compensation coefficient K_f and the real-time roller radius R_wind are substituted into the correlation formula to calculate and output the final feedforward compensation amount.

[0111] It should be understood that in practical applications, the feedforward compensation model can be obtained by training a machine learning algorithm based on historical process data, rather than by deducing the system mechanism; the adjustment of the compensation coefficient can also be replaced by a coupled adjustment method that combines multiple parameters such as real-time load and cutting speed, or the compensation coefficient can be left unchanged according to the actual working conditions. This embodiment does not limit these aspects.

[0112] In addition, in practical applications, the feedforward compensation amount can also be generated by looking up a table. That is, a corresponding data table of linear speed difference, roller radius and feedforward compensation amount is established in advance. The electronic device directly looks up the table to obtain the compensation amount based on the parameters collected in real time. This embodiment does not limit this.

[0113] In this embodiment, a feedforward compensation model based on the system operation mechanism is adopted, which can accurately predict the impact of linear speed difference on tension and generate compensation amount in advance to offset disturbances, effectively reducing the lag of tension adjustment. Combined with the real-time dynamic adjustment compensation coefficient of the first target motor's roller radius, it can adapt to the dynamic working condition of continuous change of roller radius during winding and unwinding, avoiding the problem of inaccurate compensation amount due to roller radius change, greatly improving the accuracy of feedforward control, and laying a reliable foundation for the implementation of subsequent composite control strategies.

[0114] As an example, assuming a silicon wafer cutting operation, the initial radius of the roller is R_0 = 0.15m, the initial compensation coefficient is K_f0 = 2.5N·m·s / m, and the real-time roller radius of the first target motor is acquired as R_wind = 0.12m, and the linear velocity difference is Δv = 0.03m / s. First, the real-time compensation coefficient K_f is calculated according to the coefficient adjustment formula: K_f = K_f0 × (R_wind / R_0) = 2.5 × (0.12 / 0.15) = 2.0N·m·s / m. Then, K_f, Δv, and R_wind are substituted into the correlation formula to obtain the feedforward torque compensation amount F_ff = K_f × Δv × R_wind = 2.0 × 0.03 × 0.12 = 0.0072N·m. This torque compensation amount is positive, indicating that the output torque of the second target motor needs to be increased to offset the tension fluctuation caused by the linear velocity difference and ensure the stability of the diamond wire tension.

[0115] In this embodiment, the electronic device first fuzzifies the tension deviation and the rate of change of tension deviation to obtain corresponding fuzzy linguistic variables. Then, based on a preset fuzzy rule base, fuzzy inference is performed on the fuzzy linguistic variables to obtain a fuzzy set of PID parameter adjustment values. Subsequently, a preset defuzzification algorithm is used to defuzzify the fuzzy set to obtain the initial adjustment value of the PID parameters. Finally, a nonlinear limiting rule is used to limit the gain of the initial adjustment value to obtain the final PID adjustment value. The nonlinear limiting rule is used to avoid tension overshoot caused by sudden changes in PID parameters.

[0116] Specifically, fuzzification is the process of converting the two precise numerical quantities, tension deviation and tension deviation change rate, into fuzzy linguistic variables. Its purpose is to map continuous physical quantities to fuzzy logic-recognizable linguistic categories, adapting them to the operational logic of fuzzy inference. In practice, the basic domain of the tension deviation is first determined as [-5, 5]N, and the basic domain of the tension deviation change rate is determined as [-2, 2]N / s. Then, these two basic domains are mapped to the fuzzy domain {-3, -2, -1, 0, 1, 2, 3}, and the corresponding fuzzy linguistic variables are defined as {negative large, negative medium, negative small, zero, positive small, positive medium, positive large}. Subsequently, a preset membership function (a triangular membership function is used in this embodiment) is configured for each fuzzy linguistic variable. The membership degree of each fuzzy linguistic variable corresponding to the precise input value is calculated using the membership function, ultimately obtaining the fuzzy linguistic variables and their membership degree distributions corresponding to the tension deviation and tension deviation change rate.

[0117] Specifically, the fuzzy rule base is a set of inference rules pre-established based on the process experience and system characteristics of silicon wafer cutting tension control. The rule form is "IF tension deviation is A and tension deviation change rate is B, THEN PID parameter adjustment amount is C", where A and B are fuzzy linguistic variables, and C is the fuzzy linguistic variable corresponding to the adjustment amount of PID parameters (proportional coefficient K_p, integral coefficient K_i, derivative coefficient K_d).

[0118] In this embodiment, fuzzy inference is based on a fuzzy rule base and uses the Mamdani inference algorithm. The fuzzy linguistic variables of tension deviation and tension deviation change rate are used as input. The rules in the rule base are matched one by one and the activation intensity of each rule is calculated. Then, the fuzzy set of PID parameter adjustment is obtained by weighting the activation intensity. This fuzzy set is a set containing multiple fuzzy linguistic variables and their corresponding membership degrees, which represents the fuzzy value range of the PID parameter adjustment.

[0119] Furthermore, in this embodiment, the preset defuzzification algorithm adopts the centroid method. Its core principle is to calculate the centroid position of the fuzzy set of PID parameter adjustment amounts, and convert the fuzzy set into a precise numerical value. The specific processing is as follows: First, the fuzzy universe of discourse for the PID parameter adjustment amount is determined and mapped to the actual parameter adjustment amount universe of discourse. Then, using the universe elements corresponding to each fuzzy linguistic variable as the abscissa and the membership degree as the ordinate, the centroid coordinate of the fuzzy set is calculated. The value corresponding to this coordinate is the initial adjustment amount of the PID parameter, which directly reflects the magnitude and direction of the PID parameter adjustment.

[0120] Finally, the electronic device uses a nonlinear limiting rule to set differentiated limiting thresholds based on the magnitude of the initial adjustment of the PID parameters. The larger the initial adjustment, the higher the degree of compression of the limiting threshold, thereby achieving nonlinear gain limiting.

[0121] It should be understood that since the abrupt change in the proportional gain K_p has the most direct and significant impact on tension fluctuations, simply limiting it can effectively avoid tension overshoot, while simplifying the control logic and improving response speed. Therefore, in this embodiment, the nonlinear limiting rule only adjusts the proportional gain K_p in the PID parameters; the initial adjustments of the integral coefficient K_i and the derivative coefficient K_d are not limited and are directly retained as the final adjustments.

[0122] Specifically, the nonlinear limiting rule is implemented through a dynamic linear gain mechanism. For the proportional gain K_p, which has the most direct impact on tension fluctuations among the PID parameters, a sigmoid-type maximum gain upper limit and a direction-sensitive minimum gain lower limit are set respectively. The initial adjustment amount of K_p obtained by defuzzification is constrained within the upper and lower limit ranges to obtain the final proportional gain adjustment amount.

[0123] More specifically, the sigmoid maximum gain calculation process is as follows: the fuzzy quantity output by fuzzy inference is defuzzified using the centroid method and converted into a precise PID parameter adjustment quantity to obtain the original fuzzy adjustment output; based on the absolute value of the current tension deviation, the upper limit K_pMax of the proportional gain K_p is dynamically estimated. When the absolute value of the tension deviation exceeds the set threshold, K_pMax is smoothly increased from the base value to near the maximum value through the sigmoid function to ensure the system's response speed under large deviation conditions.

[0124] More specifically, the direction-sensitive minimum gain calculation process is as follows: Based on the sign and magnitude of the current tension deviation change rate e_c, the lower limit K_pMin of the proportional gain is dynamically calculated to achieve direction sensitivity adjustment; when e_c is positive (error increases), an exponential decay strategy is adopted to reduce the minimum gain K_pMin to avoid the system response being too aggressive and causing overshoot; when e_c is negative (error decreases), a linear conservative adjustment strategy is adopted, and the minimum gain decreases more gradually to maintain system stability.

[0125] It should be understood that, in practical applications, the membership function for fuzzification can be replaced with a Gaussian membership function or a trapezoidal membership function; the fuzzy rule base can be optimized using intelligent algorithms such as genetic algorithms, rather than relying solely on process experience; the defuzzification algorithm can be replaced with the maximum membership method or the weighted average method; the nonlinear limiting rule can be replaced with a piecewise linear limiting rule, and in addition to adjusting only the proportional gain K_p, any one or more of the integral coefficient K_i and the derivative coefficient K_d can also be limited according to the system control requirements. This embodiment does not impose any limitations on this.

[0126] In addition, in practical applications, the integral gain of the PID controller can be directly adjusted through the nonlinear limiting element to suppress integral saturation, or the PID regulation can be generated by adjusting the combination of proportional gain and derivative gain. This embodiment does not limit this.

[0127] In this embodiment, by fuzzifying the tension deviation and the rate of change of deviation, process experience can be transformed into quantified control rules, improving the adaptability of the control strategy to complex working conditions. Based on the reasoning process of the fuzzy rule base, dynamic adjustment of PID parameters can be realized, solving the problem of insufficient control accuracy caused by fixed PID parameters in traditional PID systems. The centroid method for fuzzy resolution ensures a smooth transition of parameter adjustment and avoids abrupt changes in control quantity. The nonlinear amplitude limiting rule effectively suppresses tension overshoot caused by excessive adjustment of PID parameters, ensuring the stability of diamond wire tension. The entire process combines the flexibility of fuzzy control with the precision of PID control, effectively improving the response speed and control accuracy of tension control.

[0128] As an explanation, Figure 3BA schematic diagram of a PID structure provided in an embodiment of this application is shown below. Figure 3B As shown, in this embodiment, the tension deviation e (i.e., the difference between the target tension and the current tension) is first input into the differential module to calculate the tension deviation change rate e_c=dE / dt; then e and e_c are input into the fuzzy inference module, and the adjustment amount of the PID parameters (k_p, k_i, k_d) is obtained through the preset fuzzy rule base; finally, the adjusted PID parameters are input into the PID controller, and combined with the feedback signal of the controlled object (i.e., the diamond wire tension adjustment system), the closed-loop control of the tension is completed.

[0129] Furthermore, based on the above structure, this embodiment adds a nonlinear limiting element to constrain the proportional gain K_p, which not only preserves the closed-loop accuracy of PID control, but also improves the system's adaptability to complex operating conditions through fuzzy logic.

[0130] As an example, suppose the preset fuzzy rule base contains the following typical rule entries: "IF tension deviation is positive and the rate of change of tension deviation is negative, THENK_p adjustment is positive, K_i adjustment is positive, and K_d adjustment is negative"; "IF tension deviation is positive and the rate of change of tension deviation is positive, THENK_p adjustment is positive, K_i adjustment is zero, and K_d adjustment is positive"; "IF tension deviation is zero and the rate of change of tension deviation is zero, THENK_p adjustment is zero, K_i adjustment is zero, and K_d adjustment is zero"; "IF tension deviation is negative and the rate of change of tension deviation is negative, THENK_p adjustment is negative, K_i adjustment is zero, and K_d adjustment is negative"; "IF tension deviation is negative and the rate of change of tension deviation is positive, THENK_p adjustment is negative, K_i adjustment is positive, and K_d adjustment is negative".

[0131] Based on this, when the tension deviation is 3N (corresponding to a positive fuzzy linguistic variable) and the tension deviation change rate is -1.5N / s (corresponding to a negative fuzzy linguistic variable), the electronic device matches the first rule mentioned above to obtain the fuzzy sets corresponding to the adjustment values ​​of K_p, Ki, and K_d. After defuzzification using the centroid method and nonlinear amplitude limiting processing, the final PID adjustment values ​​are output as follows: the initial adjustment value of K_p is +0.8, the initial adjustment value of Ki is +0.2, and the initial adjustment value of K_d is -0.1.

[0132] At this point, if the nonlinear limiting rule is set as follows: when the absolute value of the initial adjustment of K_p is ≤0.3, no limiting is performed; when 0.3 < absolute value ≤0.6, compression is performed by a factor of 0.8; when the absolute value >0.6, compression is performed by a factor of 0.5.

[0133] Based on this rule, the above initial adjustment amount is further adjusted as follows: for the initial adjustment amount of \(K_p\) which is \(+0.8\) and the absolute value is \(\gt0.6\), it is compressed by a factor of \(0.5\) to obtain the final adjustment amount of \(K_p\) as \(+0.4\); for the initial adjustment amount of \(K_i\) which is \(+0.2\) and the initial adjustment amount of \(K_d\) which is \(-0.1\), no clipping operation is performed and the initial values are kept unchanged. The adjusted \(K_p\), \(K_i\), and \(K_d\) parameters are integrated to obtain the final PID adjustment amount, which not only achieves precise correction of the tension deviation but also avoids the tension overshoot problem caused by sudden changes in the proportional gain by clipping \(K_p\).

[0134] S302. Integrate the feedforward compensation amount and the PID adjustment amount to generate the target control amount.

[0135] Specifically, in this embodiment, a linear weighted fusion method is adopted to achieve the fusion of the feedforward compensation amount and the PID adjustment amount. The core logic is to assign preset weight coefficients according to the control priorities and working condition adaptabilities of the two control amounts, and then obtain the target control amount through weighted summation operation. Specifically, first, it is clear that the weight coefficient of the feedforward compensation amount (taking the torque compensation amount \(T_f\) as an example) is \(a\), and the weight coefficient of the PID adjustment amount (taking the rotational speed correction value \(n_p\) as an example) is \(b\), where \(a + b = 1\). It should be understood that the weight coefficients are pre-calibrated based on the requirements of the silicon wafer cutting process and the system control characteristics. In this embodiment, \(a = 0.3\) and \(b = 0.7\) are set to give priority to ensuring the correction effect of the PID adjustment amount on the real-time tension deviation.

[0136] Subsequently, substitute into the fusion formula \(U = a×T_f + b×n_p\) for calculation. It should be understood that if the physical quantity dimensions of the feedforward compensation amount and the PID adjustment amount are inconsistent, they need to be unified to the same dimension through a preset dimension conversion coefficient first, and then the weighted summation is performed. The final calculation result is the target control amount \(U\), which has both the disturbance suppression ability of feedforward compensation and the deviation correction ability of PID adjustment.

[0137] Furthermore, the electronic device converts the target control amount \(U\) into a drive command recognizable by the second target motor and sends it to the servo driver supporting the tension motor. After receiving this command, the servo driver drives the tension motor to generate a corresponding torque, and this torque is transmitted to the tension swing rod through the mechanical structure, thereby adjusting the tension of the diamond wire.

[0138] It should be understood that the tension motor is the active actuator for tension adjustment, and the magnitude of its torque output is positively correlated with the value of the target control amount \(U\): when the control system detects that the tension of the diamond wire is too small and needs to increase the tension, the target control amount \(U\) output by the algorithm will increase accordingly, and the servo driver will immediately drive the tension motor to output a larger torque; conversely, when it is detected that the tension is too large, the target control amount \(U\) will decrease, and the output torque of the tension motor will also decrease.

[0139] The tension lever is the core actuator for tension adjustment. Its guide wheel is wound with diamond wire at a specific wrap angle. When the actual tension of the diamond wire matches the target tension, the tension lever is in a balanced position and does not swing. When the tension of the diamond wire fluctuates, the tension will pull or push the tension lever to swing slightly left and right. The swinging motion of the lever will cooperate with the torque output of the tension motor to quickly offset the tension disturbance caused by the difference in linear velocity and correct the deviation between the current tension and the target tension.

[0140] Ultimately, through the coordinated action of the tension motor and the tension lever, the tension of the diamond wire is stabilized within the target tension range, ensuring the stability and precision of the silicon wafer cutting process. Simultaneously, the electronic equipment collects real-time feedback signals from the second target motor (such as actual speed and output torque) and the real-time tension value of the diamond wire, performing closed-loop monitoring of the execution effect of the target control quantity U to ensure that the tension adjustment achieves the expected results.

[0141] It should be understood that in practical applications, after the tension motor completes the initial tension adjustment, the speed of the winding motor or the unwinding motor can be further fine-tuned based on the real-time monitoring of the tension stability, in order to help maintain the long-term stability of the diamond wire tension. This embodiment does not limit this.

[0142] Furthermore, it should be understood that in practical applications, fusion can also be achieved through other methods, such as adaptive weight fusion, which does not use fixed weight coefficients, but dynamically adjusts the values ​​of a and b according to the magnitude of the real-time linear velocity difference and the fluctuation range of the tension deviation (e.g., increasing the proportion of a when the linear velocity difference is large, and increasing the proportion of b when the tension deviation fluctuates violently); or a series fusion method is used, where the feedforward compensation is used as the input feedforward term of the PID controller, and is substituted into the PID control formula to be directly superimposed with the PID adjustment to generate the target control quantity; or a fuzzy fusion method is used, which uses fuzzy linguistic variables such as linear velocity difference and tension deviation to dynamically decide the fusion strategy through preset fuzzy rules. This embodiment does not limit this method.

[0143] The aforementioned embodiments not only generate feedforward compensation based on the linear velocity difference in advance, predicting and offsetting the disturbance of linear velocity fluctuations on diamond wire tension, thus solving the adjustment lag problem of traditional feedback control and adapting to the working conditions of dynamic changes in the radius of the wire roller during winding and unwinding, but also dynamically adjust parameters through fuzzy PID control and perform nonlinear limiting on the proportional gain, balancing the accuracy of tension deviation correction with the stability of the adjustment process, avoiding tension overshoot caused by parameter mutations, and reducing the risk of edge chipping during thin silicon wafer cutting. At the same time, through dual-quantity weighted fusion, the target control quantity has both disturbance suppression and deviation correction functions, achieving high-precision and high-stability control of diamond wire tension. Moreover, each step can be independently optimized and adjusted, improving the practicality and scalability of the control method and adapting to the cutting process requirements of silicon wafers of different specifications.

[0144] It should be noted that, for the sake of simplicity, the foregoing method embodiments are all described as a series of actions. However, those skilled in the art should understand that this application is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to this application. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are all optional embodiments, and the actions and modules involved are not necessarily essential to this application.

[0145] It should be further noted that although the steps in the flowchart are shown sequentially according to the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowchart may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the sub-steps or stages of other steps.

[0146] The above embodiments introduce a tension control method from the perspective of process flow. The following embodiments introduce a tension control device from the perspective of virtual module or virtual unit. For details, please refer to the following embodiments.

[0147] This application also provides a tension control device for implementing the method described in the above method embodiments. Figure 4 This is a schematic diagram of the structure of a tension control device provided in an embodiment of this application, as shown below. Figure 4 As shown, in this embodiment, the tension control device may include:

[0148] The acquisition module 41 is used to acquire the linear speed difference between the first target motor and the main roller; the first target motor is a winding motor or an unwinding motor.

[0149] The generation module 42 is used to generate the target control quantity based on the linear velocity difference, tension deviation and the rate of change of tension deviation through feedforward control and fuzzy PID control with nonlinear amplitude limiting.

[0150] The control module 43 is used to control the second target motor corresponding to the first target motor according to the target control quantity; the second target motor is a winding-side tension motor or an unwinding-side tension motor.

[0151] In one possible implementation of this application embodiment, the generation module 42 is specifically used for:

[0152] Feedforward control is performed based on the linear velocity difference to generate feedforward compensation; fuzzy PID control with nonlinear amplitude limiting is performed based on the tension deviation and the rate of change of tension deviation to generate PID adjustment.

[0153] The target control quantity is generated by integrating the feedforward compensation quantity and the PID regulation quantity.

[0154] In one possible implementation of this application embodiment, the generation module 42 is specifically used for:

[0155] The linear velocity difference is input into the preset feedforward compensation model to obtain the feedforward compensation amount. The feedforward compensation model is based on the system operation mechanism and is obtained by establishing the mathematical relationship between tension and velocity difference and deriving the compensation function. The feedforward compensation model dynamically adjusts the compensation coefficient in combination with the real-time roller radius of the first target motor.

[0156] In one possible implementation of this application embodiment, the generation module 42 is specifically used for:

[0157] The tension deviation and the rate of change of tension deviation are fuzzified to obtain the corresponding fuzzy linguistic variables.

[0158] Based on the preset fuzzy rule base, fuzzy inference is performed on the fuzzy linguistic variables to obtain a fuzzy set of PID parameter adjustment quantities;

[0159] A preset defuzzing algorithm is used to defuzzify the fuzzy set to obtain the initial adjustment amount of the PID parameters;

[0160] The initial adjustment amount is limited by a nonlinear limiting rule to obtain the final PID adjustment amount; the nonlinear limiting rule is used to avoid tension overshoot caused by sudden changes in PID parameters.

[0161] In one possible implementation of this application embodiment, the acquisition module 41 is specifically used for:

[0162] Real-time monitoring of the difference in winding side line speed between the winding motor and the main roll, and the difference in unwinding side line speed between the unwinding motor and the main roll;

[0163] If only the winding side line speed difference exceeds the preset threshold, then the winding motor is used as the first target motor to obtain the winding side line speed difference;

[0164] If only the unwinding side line speed difference exceeds the preset threshold, then the unwinding motor is used as the first target motor to obtain the unwinding side line speed difference;

[0165] If both the winding side speed difference and the unwinding side speed difference exceed the preset threshold, then the winding motor and the unwinding motor are respectively regarded as independent first target motors, and the winding side speed difference and the unwinding side speed difference are obtained accordingly.

[0166] In one possible implementation of this application embodiment, the acquisition module 41 is further configured to:

[0167] The motor speed is obtained by the encoder signal of the first target motor, and the first linear speed of the first target motor is obtained based on the motor speed and the real-time roller radius of the first target motor.

[0168] The main roller speed is obtained by the encoder signal of the main roller motor, and the second linear velocity of the main roller is obtained based on the main roller speed and the main roller radius;

[0169] The difference between the second linear velocity and the first linear velocity is obtained.

[0170] In one possible implementation of this application embodiment, the acquisition module 41 is further configured to:

[0171] The current tension value is obtained through the tension sensor corresponding to the first target motor;

[0172] The tension deviation is obtained by subtracting the target tension value from the current tension value.

[0173] The rate of change of tension deviation is calculated based on the amount of change of tension deviation within a preset time interval.

[0174] It should be understood that the above-described device embodiments are merely illustrative, and the device of this application can also be implemented in other ways. For example, the division of units / modules in the above embodiments is only a logical functional division, and there may be other division methods in actual implementation. For example, multiple units, modules, or components may be combined, or integrated into another system, or some features may be ignored or not executed.

[0175] This application provides an electronic device. Figure 5 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application, such as... Figure 5 As shown, Figure 5 The illustrated electronic device includes at least one processor 51 and a memory 52. ​​The processor 51 and the memory 52 are connected, for example, via a bus 53. Optionally, the electronic device may also include a transceiver 54. It should be noted that in practical applications, the transceiver 54 is not limited to one, and the structure of this electronic device does not constitute a limitation on the embodiments of this application.

[0176] Processor 51 may be a central processing unit (CPU), a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It may implement or execute the various exemplary logic blocks, modules, and circuits described in conjunction with the disclosure of this application. Processor 51 may also be a combination that implements computational functions, such as a combination of one or more microprocessors, a combination of a DSP and a microprocessor, etc.

[0177] Bus 53 may include a pathway for transmitting information between the aforementioned components. Bus 53 may be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. Bus 53 may be divided into address bus, data bus, control bus, etc. For ease of representation, Figure 5 The bus is represented by a single thick line, but this does not mean that there is only one bus or one type of bus.

[0178] The memory 52 may be a read-only memory (ROM) or other type of static storage device capable of storing static information and instructions, random access memory (RAM) or other type of dynamic storage device capable of storing information and instructions, or electrically erasable programmable read-only memory (EEPROM), compact disc read-only memory (CD-ROM) or other optical disc storage, optical disc storage (including compressed optical discs, laser discs, optical discs, digital universal optical discs, Blu-ray discs, etc.), magnetic disk storage media or other magnetic storage devices, or any other medium capable of carrying or storing desired program code in the form of instructions or data structures and accessible by a computer, but not limited thereto.

[0179] The memory 52 is used to store computer execution instructions for implementing the scheme of this application, and the execution is controlled by the processor 51. The processor 51 is used to execute the computer execution instructions stored in the memory 52 to implement the content shown in the foregoing method embodiments.

[0180] This application also provides a computer-readable storage medium, which may include various media capable of storing program code, such as a USB flash drive, a portable hard drive, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk. Specifically, the computer-readable storage medium stores computer-executable instructions, which are used to implement the methods in the above embodiments.

[0181] This application also provides a computer program product, including a computer program that, when executed by a processor, implements the technical solution of the above method embodiments. Its implementation principle and technical effects are similar, and will not be repeated here.

[0182] This application also provides a tension control system, which includes a take-up motor, an unwinding motor, a main roller, a take-up side tension motor, an unwinding side tension motor, and electronic equipment; wherein the electronic equipment is configured as follows:

[0183] Obtain the linear speed difference between the first target motor and the main roller; the first target motor is either a take-up motor or an unwind motor;

[0184] Based on the linear velocity difference, tension deviation, and the rate of change of tension deviation, the target control quantity is generated through feedforward control and fuzzy PID control with nonlinear amplitude limiting.

[0185] The second target motor corresponding to the first target motor is controlled according to the target control quantity; the second target motor is either a take-up tension motor or an unwinding tension motor.

[0186] As a further design feature, the system also includes a main roller motor, tension sensors, a tension lever, a guide wheel assembly, a servo controller, and a wire-laying motor. The main roller motor is connected to the main roller drive and drives its rotation to propel the diamond wire at high speed. Tension sensors are configured on both the take-up and unwind sides, installed at tension detection points on the diamond wire to collect the current tension value in real time and transmit the signal to the electronic equipment. The tension lever is connected to the tension motor drive, and its guide wheel is wound with diamond wire at a specific wrap angle to coordinate with the torque output of the tension motor for tension balancing and adjustment. The guide wheel assembly includes multiple wire-laying guide wheels to guide the diamond wire along a preset path. The servo controller is electrically connected to the take-up motor, unwind motor, main roller motor, take-up side tension motor, unwind side tension motor, and wire-laying motor, respectively, to receive control commands from the electronic equipment and drive each servo motor to perform corresponding speed or torque adjustment actions. The wire-laying motor works with the take-up and unwind motors to neatly lay the diamond wire, preventing skipped or overlapping wires during take-up and unwinding.

[0187] The tension control system described in this application can, on the one hand, specifically eliminate the core measurable disturbance of asynchronous linear speeds between the main roller motor and the take-up and unwinding motors. By relying on the feedforward control loop to output compensation signals in advance, tension fluctuations are suppressed from the source, solving the technical pain point of lag in traditional feedback control and ensuring the basic stability of diamond wire tension. On the other hand, through the synergistic effect of feedforward control and fuzzy PID control with nonlinear amplitude limiting, the target control quantity has the dual characteristics of disturbance prediction compensation and real-time deviation correction. At the same time, the nonlinear amplitude limiting rule can effectively avoid tension overshoot caused by sudden changes in PID parameters, improving the system's adaptability to the complex working conditions of high-speed cutting of photovoltaic slicing machines.

[0188] In addition, under the unified scheduling of the servo controller, multiple components such as the main roller motor, tension motor, and wire guide motor, together with the real-time feedback of the tension sensor and the mechanical adjustment of the tension swing arm, form a closed-loop control link of command output - execution adjustment - data feedback. This ensures that the tension adjustment action is accurate and the response is fast, effectively reducing the risk of edge breakage during thin silicon wafer cutting and improving the yield and production efficiency of photovoltaic slicing process.

[0189] This application also provides a slicing machine, which includes a tension control system as described in the foregoing embodiments, and also includes a diamond wire; the two ends of the diamond wire are respectively wound on the winding rollers of the winding motor and the unwinding motor of the tension control system, and pass around the guide roller assembly and the main roller with a specific wrap angle, for completing the silicon wafer slicing operation in high-speed operation.

[0190] In the above embodiments, the descriptions of each embodiment have their own emphasis. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments. The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification.

[0191] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0192] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A tension control method, characterized in that, The method includes: Obtain the linear speed difference between the first target motor and the main roller; the first target motor is a take-up motor or an unwind motor; Based on the linear velocity difference, tension deviation, and tension deviation change rate, the target control quantity is generated through feedforward control and fuzzy PID control with nonlinear amplitude limiting. The second target motor corresponding to the first target motor is controlled according to the target control quantity; the second target motor is a take-up tension motor or an unwinding tension motor.

2. The method according to claim 1, characterized in that, The step of generating the target control quantity based on the linear velocity difference, tension deviation, and tension deviation change rate through feedforward control and fuzzy PID control with nonlinear amplitude limiting includes: The feedforward control is performed based on the linear velocity difference to generate a feedforward compensation amount; the fuzzy PID control with nonlinear amplitude limiting is performed based on the tension deviation and the rate of change of the tension deviation to generate a PID adjustment amount. The target control quantity is generated by combining the feedforward compensation quantity and the PID adjustment quantity.

3. The method according to claim 2, characterized in that, The step of performing feedforward control based on the linear velocity difference to generate feedforward compensation includes: The linear velocity difference is input into a preset feedforward compensation model to obtain the feedforward compensation amount; wherein, the feedforward compensation model is based on the system operation mechanism, and is obtained by establishing a mathematical relationship between tension and velocity difference and deriving a compensation function. The feedforward compensation model dynamically adjusts the compensation coefficient in conjunction with the real-time roller radius of the first target motor.

4. The method according to claim 2 or 3, characterized in that, The step of performing fuzzy PID control with nonlinear amplitude limiting based on the tension deviation and the rate of change of the tension deviation to generate the PID adjustment quantity includes: The tension deviation and the rate of change of tension deviation are fuzzified to obtain the corresponding fuzzy linguistic variables; Based on a preset fuzzy rule base, fuzzy inference is performed on the fuzzy linguistic variables to obtain a fuzzy set of PID parameter adjustment amounts; The fuzzy set is defuzzified using a preset defuzzification algorithm to obtain the initial adjustment amount of the PID parameters; The initial adjustment amount is limited by a nonlinear limiting rule to obtain the final PID adjustment amount; the nonlinear limiting rule is used to avoid tension overshoot caused by sudden changes in PID parameters.

5. The method according to any one of claims 1-3, characterized in that, The step of obtaining the linear velocity difference between the first target motor and the main roller includes: Real-time monitoring of the difference in winding side linear speed between the winding motor and the main roller, and the difference in unwinding side linear speed between the unwinding motor and the main roller; If only the winding side line speed difference exceeds the preset threshold, then the winding motor is used as the first target motor, and the winding side line speed difference is obtained. If only the unwinding side line speed difference exceeds the preset threshold, then the unwinding motor is used as the first target motor, and the unwinding side line speed difference is obtained. If both the winding side speed difference and the unwinding side speed difference exceed a preset threshold, then the winding motor and the unwinding motor are respectively regarded as independent first target motors, and the winding side speed difference and the unwinding side speed difference are obtained accordingly.

6. The method according to any one of claims 1-3, characterized in that, The method further includes: The motor speed is obtained by the encoder signal of the first target motor, and the first linear speed of the first target motor is obtained based on the motor speed and the real-time roller radius of the first target motor. The main roller speed is obtained by the encoder signal of the main roller motor, and the second linear velocity of the main roller is obtained based on the main roller speed and the main roller radius; The difference between the second linear velocity and the first linear velocity is obtained.

7. The method according to any one of claims 1-3, characterized in that, The method further includes: The current tension value is obtained through the tension sensor corresponding to the first target motor; The tension deviation is obtained by subtracting the target tension value from the current tension value; The rate of change of tension deviation is calculated based on the amount of change of the tension deviation within a preset time interval.

8. A tension control system, characterized in that, The system includes a take-up motor, an unwinding motor, a main roller, a take-up side tension motor, an unwinding side tension motor, and electronic equipment; wherein, the electronic equipment is configured as follows: Obtain the linear speed difference between the first target motor and the main roller; the first target motor is either the winding motor or the unwinding motor; Based on the linear velocity difference, tension deviation, and tension deviation change rate, the target control quantity is generated through feedforward control and fuzzy PID control with nonlinear amplitude limiting. The second target motor corresponding to the first target motor is controlled according to the target control quantity; the second target motor is the take-up side tension motor or the unwind side tension motor.

9. A slicer, characterized in that, The slicing machine includes the tension control system as described in claim 8, and also includes diamond wire; the two ends of the diamond wire are respectively wound on the winding rollers of the winding motor and the unwinding motor of the tension control system, and pass around the guide roller assembly and the main roller with a specific wrap angle, so as to complete the silicon wafer slicing operation in high-speed operation.

10. An electronic device, characterized in that, It includes at least one processor and a memory communicatively connected to the processor; The memory stores computer-executed instructions; The processor executes computer execution instructions stored in the memory to implement the method as described in any one of claims 1-7.

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