Clean room system capable of switching airflow modes and control method thereof

Abstract

The invention provides a clean room system capable of switching airflow modes and a control method thereof, and the clean room system comprises a clean room main body, an air supply unit array consisting of a plurality of air supply units for independently adjusting the air speed and the opening and closing states, a raised floor air return structure, and an airflow control module comprising a plurality of airflow adjusting parts for independently adjusting the opening degree, the controller is in communication connection with the two; the controller generates a control instruction and adjusts the operation states of the air supply unit and the air flow adjusting component by acquiring the air flow operation mode and the environment monitoring parameters of the clean room, so that the clean room system which flexibly switches various air flow organizations and accurately controls the environment parameters is realized, and the adaptability, the energy efficiency and the operation stability of the clean room are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of clean rooms, in particular to a clean room system capable of switching air flow modes and a control method thereof. BACKGROUND

[0002] Traditional clean rooms generally adopt a fixed air flow organization form, and the air flow parameters (such as wind speed, flow direction, air exchange frequency, etc.) cannot be flexibly adjusted according to the dynamic needs of the production process. There are many technical defects: on the one hand, in the face of the frequent iterative process requirements of high-end manufacturing industries such as semiconductor chip manufacturing and biopharmaceuticals, the fixed air flow mode is difficult to adapt to the differentiated requirements of cleanliness, temperature and humidity at different process stages, resulting in the need for large-scale modification of the clean room, which is costly and time-consuming; on the other hand, in the fixed air volume operation mode, even if the clean room is in a low-load production or non-production period, the fan will still run at full load, causing serious energy waste. According to statistics, the energy consumption of clean rooms accounts for 30%-50% of the total energy consumption of the factory, and the energy consumption of the air conditioning system accounts for more than 60%; in addition, the fixed air flow mode is prone to air flow turbulence, vortex or dead zones when switching, resulting in fluctuations in cleanliness and affecting product yield.

[0003] Therefore, the existing traditional clean room cannot meet the needs of high-end manufacturing industries for dynamic, efficient and energy-saving clean environments, and there is an urgent need for a clean room system that can flexibly switch air flow modes and accurately control environmental parameters to improve the adaptability, energy efficiency and operational stability of the clean room. SUMMARY

[0004] The present application provides a clean room system capable of switching air flow modes and a control method thereof to solve the technical problems of fixed air flow mode, poor adaptability, high energy consumption and unstable cleanliness of clean rooms.

[0005] In one aspect, the present application provides a clean room system capable of switching air flow modes, which includes a clean room main body, an array of air supply units, a raised floor air return structure, an air flow control module and a controller; The array of air supply units is located on the side of the clean room main body away from the ground, and includes a plurality of air supply units capable of independently adjusting the wind speed and the on-off state; The raised floor air return structure is located on the side of the clean room main body close to the ground; The air flow control module is located on the side wall of the clean room main body close to the ground and the side of the raised floor air return structure close to the ground, and the air flow control module includes a plurality of air flow adjusting components capable of independently adjusting the opening degree; The controller is in communication connection with the array of air supply units and the air flow control module; The controller is configured to: acquire a flow operation mode of the clean room body and an environmental monitoring parameter in the clean room body; generate a control instruction based on the environmental monitoring parameter and the flow operation mode; adjust an operation state of the air supply unit and / or an opening degree of the air flow adjustment component according to the control instruction, so as to form an air flow organization corresponding to the operation mode in the clean room.

[0006] In another aspect, the application also provides a clean room method for switching air flow modes, which is applied to the clean room system for switching air flow modes as described in any one of the above aspects, and the method comprises: acquire a flow operation mode of the clean room body and an environmental monitoring parameter in the clean room body; generate a control instruction based on the environmental monitoring parameter and the flow operation mode; adjust an operation state of the air supply unit and / or an opening degree of the air flow adjustment component according to the control instruction, so as to form an air flow organization corresponding to the operation mode in the clean room.

[0007] The clean room system for switching air flow modes and the control method thereof provided by the application realize dynamic adjustment of the operation state of the air supply unit and the opening degree of the air flow adjustment component according to the flow operation mode and the environmental monitoring parameter, so as to form an air flow organization corresponding to the operation mode in the clean room, by integrating the array of air supply units, the raised floor air return structure, the air flow control module and the intelligent controller. The system supports flexible switching of multiple air flow modes (such as unidirectional flow, up-supply and side-return, up-supply and double-side-return, etc.), has real-time monitoring and intelligent control capabilities of environmental parameters, and improves the process adaptability, energy efficiency and operation reliability of the clean room. BRIEF DESCRIPTION OF DRAWINGS

[0008] In order to more clearly illustrate the technical solutions in the application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the application, and for those skilled in the art, other drawings can also be obtained without creative labor based on these drawings.

[0009] Figure 1 is a structural schematic diagram of the clean room system for switching air flow modes provided by the embodiments of the application; Figure 2 is a sectional schematic diagram of the clean room system for switching air flow modes provided by the embodiments of the application; Figure 3 is a flow schematic diagram of the clean room method for switching air flow modes provided by the embodiments of the application. DETAILED DESCRIPTION

[0010] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0011] Figure 1 This is a schematic diagram of the structure of a cleanroom system for switching airflow modes provided in an embodiment of the present invention. Figure 2 This is a cross-sectional schematic diagram of a cleanroom system for switching airflow modes provided in an embodiment of the present invention.

[0012] like Figures 1 to 2 As shown, the cleanroom system for switching airflow modes provided in this embodiment of the invention may include a cleanroom body, an air supply unit array 11, a raised floor return air structure 12, an airflow control module 13, and a controller. Those skilled in the art will understand that the system may also include an observation window 14, a return air duct 15, and a plenum chamber 16, etc.

[0013] In one specific implementation, the air supply unit array 11 is located on the side of the cleanroom body away from the ground, and includes multiple air supply units that can independently adjust the wind speed and open / close state. The raised floor return air structure 12 is located on the ground side of the main body of the cleanroom. The airflow control module 13 is located on the side wall of the main body of the clean room and on the side of the raised floor return air structure 12 that is close to the ground. The airflow control module 13 includes multiple airflow adjustment components that can independently adjust their opening. The controller is communicatively connected to the air supply unit array 11 and the airflow control module 13; The controller is configured to: The airflow operation mode of the cleanroom body and the environmental monitoring parameters inside the cleanroom body are obtained; Based on the environmental monitoring parameters and the airflow operation mode, control commands are generated; According to the control command, the operating state of the air supply unit and / or the opening degree of the airflow regulating component are adjusted to form an airflow organization corresponding to the operating mode in the clean room.

[0014] Specifically, such as Figure 1As shown, the clean room body serves as a core space for carrying various production processes, and an air supply unit array 11 is arranged on the top (away from the ground side) of the clean room body, which is composed of multiple small fan filter units (FFUs). Each FFU has stepless speed regulation function and independent start-stop control capability, and can accurately adjust the air supply intensity and start-stop state according to the requirements. The clean room body is provided with a raised floor return air structure 12 on the side close to the ground. The raised floor has a 2% or 15% porosity design to form a lower return air channel and provide a basic path for air circulation.

[0015] The air flow control module 13 is composed of two parts: one is a plurality of side wall louvers installed on the side wall (close to the ground side) of the clean room body, and the other is a plurality of floor louvers installed below the raised floor return air structure 12. These louvers are all door hinge type structures, which can independently adjust the opening degree (0~100%) or completely open and close, and serve as key control components of the air flow path.

[0016] The controller establishes stable communication connection (which can adopt wired or wireless communication mode) with the air supply unit array 11 and the air flow control module 13, and simultaneously obtains real-time environmental monitoring parameters (including cleanliness, temperature and humidity, pressure difference with adjacent areas, etc.) through temperature and humidity probes, dust particle counters, pressure difference sensors and other devices arranged in the clean room.

[0017] When the environmental monitoring parameters do not meet the target requirements, the controller generates targeted control instructions: for example, if the cleanliness is lower than the target value, the air speed of the core area air supply unit can be increased, and the corresponding area louvers can be adjusted to enhance the air flow replacement efficiency; if the temperature is too high, the air supply unit air speed can be adjusted, and the subsequent heating system can be linked to assist in temperature control. Through the above adjustment, the flow path, speed and distribution state of the air flow are changed, and finally the air flow organization that accurately matches the current running mode is formed in the clean room, ensuring that the environmental parameters meet the process requirements.

[0018] Through the cooperative regulation of the air supply unit and the air flow control module 13, the embodiment realizes dynamic switching and accurate control of air flow organization, significantly improves the adaptability of the clean room to different process scenes. The system can automatically adjust the running state according to the real-time environmental parameters, optimize the energy consumption performance while ensuring the stability of the environment, and solve the problems of difficult transformation, high energy consumption and control lag of the traditional system.

[0019] In some embodiments, the controller can include an acquisition module and a matching module.

[0020] The acquisition module is configured to acquire a current process scene identifier. The matching module is configured to match a corresponding airflow operation mode corresponding to the process scene identifier from a preset mode library; the mode library at least includes a one-way flow mode suitable for photolithography and / or aseptic process, an up-sending side-return mode suitable for assembly and / or heat dissipation process, and an up-sending double-side-return mode suitable for large-span space.

[0021] Specifically, the acquisition module can acquire the current process scene identifier in two ways: one is to communicate with the production management system matched with the clean room to automatically read the process name currently being executed (such as "semiconductor 3nm photolithography process", "biopharmaceutical aseptic filling process", "electronic component assembly process"); the second is to receive the process scene instruction input by the user through the central control console or the mobile terminal to generate the corresponding process scene identifier.

[0022] The preset mode library is constructed based on a large amount of experimental data and industry process standards, and stores a one-to-one correspondence relationship between the process scene identifier and the airflow operation mode. Among them, the one-way flow mode is for processes with extremely high cleanliness requirements such as photolithography and aseptic filling, which quickly discharges pollutants through vertical directional airflow to avoid particle deposition and cross contamination; the up-sending side-return mode is suitable for electronic component assembly and equipment heat dissipation processes with high heat dissipation requirements, which ensures thousand-level cleanliness while improving heat dissipation efficiency through side return air; the up-sending double-side-return mode is for large-span clean room space (such as large precision manufacturing workshops), which optimizes airflow distribution uniformity through double-side return air to avoid local airflow dead angles.

[0023] After acquiring the process scene identifier, the matching module quickly traverses the corresponding relationship in the mode library, accurately matches the adaptive airflow operation mode, and sends the mode as the current target operation mode to the instruction generation unit of the controller, providing a basis for subsequent airflow parameter adjustment, without the need for manual mode switching, improving operation convenience.

[0024] The embodiment realizes "one-key switching" of the clean room operation mode through intelligent matching of the process scene identifier and the airflow mode, greatly simplifies the operation process, improves the rapid response capability of the system to different production stages, and enhances the intelligent level of the clean room and user experience.

[0025] In some embodiments, the environmental monitoring parameters specifically include current cleanliness (such as ISO level corresponding to dust particle concentration), current temperature, current humidity, and current pressure difference (pressure difference between the clean room and the adjacent area) collected in real time by the sensor.

[0026] The controller comprises: The determination module is configured to determine a corresponding target environmental parameter set according to the selected airflow operation mode; the target environmental parameter set includes at least one of target cleanliness, target temperature range, target humidity range, and target pressure difference range. a calculation module configured to calculate a first deviation of the current cleanliness from the target cleanliness, a second deviation of the current temperature from the target temperature range, a third deviation of the current humidity from the target humidity range, and a fourth deviation of the current pressure difference from the target pressure difference range; a generation module configured to generate the control instruction based on at least one of the first deviation, the second deviation, the third deviation, and the fourth deviation, and in accordance with a preset cooperative control strategy.

[0027] Specifically, after receiving the selected airflow operation mode (such as the unidirectional flow mode matched by claim 2), the determination module retrieves the target environmental parameter set corresponding to the mode from the system-built parameter database: for example, the target cleanliness corresponding to the unidirectional flow mode is ISO 5 (hundred level), the target temperature range is 22-24℃, the target humidity range is 45%-55%, and the target pressure difference is 10-15Pa; the target cleanliness corresponding to the up-side-back mode is ISO 6 (thousand level), the target temperature range is 24-26℃, the target humidity range is 45%-55%, and the target pressure difference is 5-10Pa.

[0028] The calculation module compares and calculates the real-time collected current environmental parameters with the target environmental parameter set: the first deviation is the difference between the particle concentration corresponding to the current cleanliness and the particle concentration corresponding to the target cleanliness (for example, when the current particle concentration is 300 / m³ and the target is 100 / m³, the first deviation is 200 / m³); the second deviation is the value by which the current temperature exceeds the target temperature range (for example, when the current temperature is 25℃ and the target range is 22-24℃, the second deviation is +1℃); the third deviation is the value by which the current humidity exceeds the target humidity range; and the fourth deviation is the value by which the current pressure difference exceeds the target pressure difference range.

[0029] The generation module, based on one or more of the above deviations, in combination with the preset cooperative control strategy (which comprehensively considers the sensitivity of the process to each parameter and the response speed of the equipment adjustment), prioritizes and weights the deviations, for example, the cleanliness deviation has the highest priority in the photolithography process, and the temperature and humidity deviations have higher priority in the assembly process, and then generates control instructions that can eliminate or reduce the deviations, such as cleanliness improvement instructions for the first deviation and temperature adjustment instructions for the second deviation.

[0030] Specifically, the preset cooperative control strategy includes a control rule library associated with different airflow operation modes, and control weights preset for the first deviation, the second deviation, the third deviation, and the fourth deviation, respectively. The controller is configured to perform the following steps to generate the control instruction: According to the selected airflow operation mode, the corresponding control rule library is called and the control weight of each deviation is obtained; According to the control rule library, the first deviation, the second deviation, the third deviation and the fourth deviation are comprehensively analyzed to determine the target area to be controlled and the comprehensive control target required by the target area; Based on the comprehensive control target and the control weight of each deviation, the target air speed adjustment amount and / or target on-off state of at least one target air supply unit in the target area, and the target opening adjustment amount of at least one target airflow adjusting component are calculated; The control instruction containing the target air speed adjustment amount, the target on-off state and the target opening adjustment amount is generated to synchronously drive the target air supply unit and the target airflow adjusting component to perform actions.

[0031] In detail, the control rule library formulates deviation processing logic for each airflow mode, for example, in the unidirectional flow mode, it is stipulated that "cleanliness deviation is given priority, and the air supply unit speed adjustment amplitude does not exceed 20% of the rated value", and in the up-sending side return mode, it is stipulated that "temperature and humidity deviations are treated equally with cleanliness deviation, and the louver opening adjustment step is 10%"; the control weight is set according to the process sensitivity, such as in the lithography process, the first deviation (cleanliness) weight is 0.6, the second deviation (temperature) is 0.2, the third deviation (humidity) is 0.1, and the fourth deviation (pressure difference) is 0.1; in the assembly process, the second and third deviation weights are each 0.3, the first deviation is 0.3, and the fourth deviation is 0.1.

[0032] When the controller generates the control instruction, first, according to the current airflow operation mode, the corresponding control rule library and deviation weight are called; then, according to the rule library logic, each deviation is comprehensively analyzed to determine whether the global parameter is not up to standard or the local area problem, and the target area to be controlled (such as the core process area, the peripheral auxiliary area) and the comprehensive control target (such as increasing the cleanliness of the core area to the hundred level and the temperature to 23℃) are determined; then, combined with the comprehensive control target and the deviation weight, the air speed adjustment amount (such as increasing by 15%) of the target air supply unit in the target area, the on-off state (such as starting 2 idle FFUs), and the opening adjustment amount (such as from 40% to 60%) of the target airflow adjusting component (such as the corresponding area louver) are calculated; finally, the control instruction containing the above adjustment information is generated and synchronously sent to the target device to ensure that the air supply unit and the airflow adjusting component act in coordination to quickly achieve the control target.

[0033] This embodiment realizes quantitative analysis and accurate control of multi-parameter deviation through weight allocation and rule library calling, improves the decision-making ability and response efficiency of the system under complex working conditions, and ensures the rapid stability and energy efficiency optimization of airflow organization.

[0034] In some embodiments, the airflow control module 13 comprises a plurality of sidewall louvers installed on the sidewall of the cleanroom body and a plurality of floor louvers installed below the raised floor return structure 12; The controller is configured to switch the cleanroom between the vertical unidirectional flow mode, the upsend side return mode and the upsend double side return mode by independently adjusting the opening and closing combination of the sidewall louvers and the floor louvers when generating the control instructions according to the cooperative control strategy.

[0035] In detail, the controller controls all the sidewall louvers to be closed while all the floor louvers are opened, and the clean air sent by the top air supply unit flows vertically downward under the action of gravity, enters the return air channel through the raised floor aperture, and is discharged by the floor louvers, forming a “piston type” airflow replacement to ensure the hundred-level cleanliness and adapt to the photolithography and sterile filling process. The upsend side return mode: the controller controls the floor louvers to be closed and the single side or double side sidewall louvers to be opened, and the air sent by the top air supply unit flows into the return air channel 15 from the sidewall louvers after flowing in the room, which takes into account the equipment heat dissipation while ensuring the cleanliness, and is suitable for electronic component assembly process. The upsend double side return mode: the controller controls the floor louvers to be closed and the two side sidewall louvers to be opened and adjusted to a suitable opening degree, so that the airflow returns uniformly from both sides, optimizing the airflow distribution uniformity of large-span space, and being suitable for large-scale precision manufacturing workshop.

[0036] The opening and closing combination of the louvers and the air speed adjustment of the air supply unit are cooperated to ensure smooth transition of the airflow during mode switching and avoid cleanliness fluctuation.

[0037] In some embodiments, the air supply unit array 11 is an array composed of a plurality of independent small fan filter units, and the air speed of each small fan filter unit can be steplessly adjusted; The controller is configured to independently control the opening and closing and air speed of one or more small fan filter units above the corresponding area in the cleanroom body for different process areas in the cleanroom body to form local reinforced airflow or mixed airflow organization.

[0038] In detail, the air supply unit array 11 is composed of a plurality of small fan filter units (FFUs) with a specification of 600*600mm, each FFU is internally provided with a stepless speed regulation motor, the air speed can be continuously adjusted within the range of 0.2~0.5m / s, and the independent opening and closing control is supported.

[0039] The controller adopts a zoning control logic to divide the cleanroom body into different process areas such as core process area, auxiliary operation area, logistics channel area, etc., and 1 or more FFUs are arranged above each area. According to the needs of different areas, the controller implements differentiated control: Local airflow strengthening: For core process areas such as semiconductor lithography stations and precision detection areas, the controller independently increases the wind speed of the FFUs in the corresponding areas (e.g., to 0.4-0.5 m / s) to form a local high-cleanness microenvironment (hundreds of levels and above), quickly expel local pollutants, and avoid energy waste caused by global high wind speed operation; Mixed airflow organization: For the combination scene of the core assembly area of precision manufacturing and the peripheral logistics channel group, the controller controls the core assembly area FFU to run at a high wind speed to form a unidirectional flow, and the peripheral logistics channel FFU to run at a low wind speed to form a turbulent flow, thereby isolating different clean level areas through airflow gradient, preventing the spread of pollutants, and reducing overall energy consumption; Idle area shutdown: For temporarily unused areas, the controller turns off the FFUs in the corresponding areas to reduce invalid energy consumption.

[0040] This embodiment realizes fine partition management of clean room airflow through independent control of FFUs, which can maintain high cleanliness in key areas and reduce energy consumption overall, thereby improving the flexibility and energy efficiency of the system.

[0041] In some embodiments, the environmental monitoring parameters are obtained by sensors arranged in the clean room body, including temperature and humidity probes, dust particle counters, and differential pressure sensors; The controller is further configured to continuously compare the obtained environmental monitoring parameters with preset thresholds, and trigger a warning signal when any parameter continuously exceeds the preset threshold for a preset duration.

[0042] Specifically, the environmental monitoring parameters are collected by sensors arranged in each key area of the clean room: temperature and humidity probes are uniformly arranged at different heights and areas in the room, with a measurement accuracy of ±0.5°C and ±3% RH, and real-time collection of temperature and humidity data; dust particle counters are arranged in core process areas, return air channels, and other positions to monitor particle concentrations of 0.1 μm, 0.5 μm, and other key particle sizes to determine the cleanliness level; differential pressure sensors are installed on the partition walls between the clean room and adjacent areas (corridors, buffer rooms) to collect differential pressure data in real time.

[0043] After receiving the real-time data transmitted by the sensors, the controller continuously compares the data with preset threshold values (set according to the target parameter range of the current air flow operation mode). The preset time period is set to 30 seconds to 1 minute according to the process sensitivity. When any parameter (such as the cleanliness particle concentration exceeding the threshold value or the temperature exceeding the target range) continuously exceeds the threshold value for the preset time period, the controller determines that the environment is abnormal and immediately triggers a warning signal: on the one hand, the on-site alarm is sounded through the audible and visual alarm of the central monitoring system, and on the other hand, the warning information is sent to the terminal device of the operation and maintenance personnel in the form of a short message or an email, and the abnormal parameter, the abnormal area position and other information are displayed on the monitoring platform, so that the operation and maintenance personnel can quickly locate the problem and troubleshoot.

[0044] In some embodiments, the clean room system further comprises a dry coil 17 and a total heat recovery fresh air unit connected with the air conditioning system; The water pipe of the dry coil 17 is provided with an electric regulating valve controlled by the controller, which is used to adjust the water quantity according to the temperature information in the environmental monitoring parameters; The total heat recovery fresh air unit is used to recover the exhaust air energy when the system is running.

[0045] In detail, the dry coil 17 and the total heat recovery fresh air unit are added to form a coordinated energy-saving heating and ventilation system. The dry coil 17 is installed in the return air aisle 15 of the clean room, and an electric regulating valve is installed on the water pipe of the dry coil 17. The valve is in communication connection with the controller and receives temperature regulating instructions. The controller compares the temperature data in the environmental monitoring parameters with the target temperature: when the current temperature is higher than the target temperature, the electric regulating valve is controlled to increase the opening degree to increase the water quantity passing through the dry coil 17, improve the heat exchange efficiency, and reduce the return air temperature; when the current temperature is lower than the target temperature, the valve opening degree is reduced to reduce the water quantity, avoid excessively low temperature, and realize accurate temperature control (control accuracy ±1℃).

[0046] The total heat recovery fresh air unit connects the fresh air duct and the exhaust air duct of the clean room, and realizes the energy exchange between the fresh air and the exhaust air through the internal heat exchange core: in summer, the high-temperature fresh air exchanges heat with the low-temperature exhaust air, the fresh air is cooled and then sent into the room, reducing the air conditioning cooling load; in winter, the low-temperature fresh air exchanges heat with the high-temperature exhaust air, the fresh air is heated and then sent into the room, reducing the air conditioning heating energy consumption, and realizing efficient recovery of exhaust air energy.

[0047] The heating and ventilation system works cooperatively with the air flow control system. The controller synchronously controls the running states of the electric regulating valve and the total heat recovery fresh air unit while adjusting the air flow parameters, to ensure that the temperature and humidity control and the air flow organization optimization are realized synchronously.

[0048] The embodiment further reduces the operation energy consumption of the clean room, improves the energy efficiency and economy of the system, and meets the requirements of green building and sustainable development, by precise temperature control of the dry coil 17 and energy reuse of the total heat recovery unit.

[0049] In some embodiments, the controller is further configured to automatically generate and execute a backup control instruction when a failure of any of the air supply units in the array 11 is monitored; The backup control instruction is configured to shut down the failed air supply unit and increase the air speed of the adjacent air supply units and / or adjust the opening of the air flow adjusting components in the air flow control module 13 to maintain the original air flow organization effect of the failed area.

[0050] In detail, the controller monitors the operating state parameters (such as current, voltage, speed, air pressure, etc.) of each FFU in the array 11 in real time, and determines whether the FFU has failed (such as abnormal speed, stop running, insufficient air pressure, etc.) by these parameters.

[0051] When any FFU is monitored to have failed, the controller immediately starts the backup control logic: first generates an instruction to shut down the failed FFU to avoid energy waste or air flow disturbance caused by the continued operation of the failed unit; then calculates the required air flow compensation according to the installation position of the failed FFU, the size of the covered area, and the process requirements of the area; based on the compensation, the controller generates subsequent backup control instructions: first, increase the air speed of 1-2 FFUs adjacent to the failed FFU (such as 20%-30%), to compensate for the air flow gap of the failed unit by the intensified air supply of the adjacent FFUs; second, adjust the opening of the air flow adjusting components (such as the lower floor louvers and the peripheral side wall louvers) corresponding to the failed area to optimize the air flow path and enhance the air flow circulation efficiency.

[0052] Through the coordinated compensation of the intensified air supply of the adjacent FFUs and the air flow adjusting components, the original air flow organization form and cleanliness level of the failed area are maintained, ensuring that the process in the area is not affected until the maintenance personnel complete the failure repair.

[0053] The embodiment improves the robustness and operation continuity of the system, reduces the risk of production interruption caused by equipment failure, and enhances the reliability and maintenance convenience of the clean room.

[0054] Based on the same overall inventive concept, the present application also protects a clean room method for switching air flow modes, which will be described below. The clean room method for switching air flow modes described below can be mutually referred to the clean room system for switching air flow modes described above.

[0055] Figure 3is a flowchart of a clean room method for switching air flow modes provided by an embodiment of the present application, wherein the method is applied to a control device in a clean room system for switching air flow modes. As shown in Figure 3 The clean room method for switching air flow modes provided by the embodiment includes the following steps: 301. Obtain an air flow operation mode of the clean room body and an environmental monitoring parameter in the clean room body; 302. Generate a control instruction based on the environmental monitoring parameter and the air flow operation mode; 303. Adjust an operation state of the air supply unit and / or an opening degree of the air flow adjusting component according to the control instruction, so as to form an air flow organization corresponding to the operation mode in the clean room.

[0056] It should be noted that the related information involved in each embodiment of the present application is strictly in accordance with the requirements of laws and regulations, and follows the principles of legality, legitimacy and necessity, and is based on the reasonable purpose of the business scene, and processes the information provided by the user in the process of using the product / service or generated due to the use of the product / service, and the information authorized by the user.

[0057] The related information processed by the present application may vary depending on the specific product / service scene, and should be based on the specific scene of the user using the product / service. It may involve the user's account information, device information or other related information. The present application will treat the related information and its processing with a high sense of diligence and obligation.

[0058] The present application attaches great importance to the security of related information, and has taken security protection measures in accordance with industry standards, which are reasonable and feasible to protect the user's information and prevent unauthorized access, public disclosure, use, modification, damage or loss of related information.

[0059] The device embodiments described above are only schematic, wherein the units described as separate components can or can not be physically separated, and the components displayed as units can or can not be physical units, i.e. they can be located in one place, or distributed on multiple network units. Part or all of the modules can be selected to achieve the purpose of the present embodiment scheme according to actual needs. Those skilled in the art can understand and implement it without creative labor.

[0060] It should be pointed out finally that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit the same; and although the present application has been described in detail with reference to the foregoing embodiments, it should be appreciated by those skilled in the art that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features thereof can be replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A cleanroom system for switching airflow modes, characterized in that, Includes the main body of the cleanroom, air supply unit array, raised floor return air structure, airflow control module and controller; The air supply unit array is located on the side of the cleanroom body away from the ground, and includes multiple air supply units that can independently adjust the wind speed and open / close status. The raised floor return air structure is located on the ground side of the main body of the cleanroom. The airflow control module is located on the side wall of the main body of the cleanroom and on the side of the raised floor return air structure that is close to the ground, and the airflow control module includes multiple airflow adjustment components that can independently adjust their opening degree. The controller is communicatively connected to the air supply unit array and the airflow control module; The controller is configured to: The airflow operation mode of the cleanroom body and the environmental monitoring parameters inside the cleanroom body are obtained; Based on the environmental monitoring parameters and the airflow operation mode, control commands are generated; According to the control command, the operating state of the air supply unit and / or the opening degree of the airflow regulating component are adjusted to form an airflow organization corresponding to the operating mode in the clean room.

2. The cleanroom system for switching airflow modes according to claim 1, characterized in that, The controller includes: The acquisition module is used to acquire the current process scenario identifier; The matching module is used to match the airflow operation mode corresponding to the process scenario identifier from a preset mode library; the mode library includes at least a unidirectional flow mode suitable for lithography and / or aseptic processes, an upward flow and side return mode suitable for assembly and / or heat dissipation processes, and an upward flow and side return mode suitable for large-span spaces.

3. The cleanroom system for switching airflow modes according to claim 1, characterized in that, The environmental monitoring parameters include at least one of the following: current cleanliness level, current temperature, current humidity, and current pressure difference; The controller includes: The determination module is used to determine the corresponding set of target environmental parameters based on the selected airflow operation mode; the set of target environmental parameters includes at least one of target cleanliness, target temperature range, target humidity range, and target pressure difference range. The calculation module is used to calculate the first deviation between the current cleanliness and the target cleanliness, the second deviation between the current temperature and the target temperature range, the third deviation between the current humidity and the target humidity range, and the fourth deviation between the current pressure difference and the target pressure difference range; The generation module is used to generate the control command based on at least one of the first deviation, the second deviation, the third deviation, and the fourth deviation, and in accordance with a preset collaborative control strategy.

4. The cleanroom system for switching airflow modes according to claim 3, characterized in that, The preset collaborative control strategy includes a control rule base associated with different airflow operation modes, and preset control weights for the first deviation, the second deviation, the third deviation, and the fourth deviation, respectively. The controller is configured to perform the following steps to generate the control instructions: Based on the selected airflow operation mode, the corresponding control rule base is invoked and the control weights of each deviation are obtained; Based on the control rule base, the first deviation, the second deviation, the third deviation, and the fourth deviation are comprehensively analyzed to determine the target area to be regulated and the comprehensive regulation target required for the target area. Based on the comprehensive control target and the control weights of each deviation, the target wind speed adjustment amount and / or target opening and closing state of at least one target air supply unit in the target area, as well as the target opening adjustment amount of at least one target airflow regulating component, are calculated. The control command, which includes the target wind speed adjustment amount, the target opening / closing state, and the target opening degree adjustment amount, is generated to synchronously drive the target air supply unit and the target airflow regulating component to perform actions.

5. The cleanroom system for switching airflow modes according to claim 3, characterized in that, The airflow control module includes multiple side wall louvers installed on the side wall of the main body of the cleanroom and multiple floor louvers installed below the raised floor return air structure. The controller is configured to, when generating control commands based on the collaborative control strategy, independently adjust the opening and closing combination of the side wall louvers and the floor louvers to switch the cleanroom between vertical unidirectional flow mode, top-feed side-return mode, and top-feed dual-return mode.

6. The cleanroom system for switching airflow modes according to claim 1, characterized in that, The air supply unit array is an array composed of multiple independent small fan filter units, and the wind speed of each small fan filter unit can be infinitely adjusted. The controller is configured to independently control the opening and closing and wind speed of one or more small fan filter units above different process areas within the cleanroom body, in order to form a locally enhanced airflow or mixed airflow organization.

7. The cleanroom system for switching airflow modes according to claim 1, characterized in that, The environmental monitoring parameters are acquired by sensors arranged in the main body of the cleanroom, including temperature and humidity probes, dust particle counters and differential pressure sensors. The controller is also configured to continuously compare the acquired environmental monitoring parameters with preset thresholds, and to trigger an early warning signal when any parameter continuously exceeds the preset threshold for a preset duration.

8. The cleanroom system for switching airflow modes according to claim 1, characterized in that, It also includes dry coils and total heat recovery fresh air handling units connected to the air conditioning system; The water pipe of the dry coil is equipped with an electric regulating valve controlled by the controller, which is used to adjust the water volume according to the temperature information in the environmental monitoring parameters. The total heat recovery fresh air unit is used to recover exhaust air energy during system operation.

9. The cleanroom system for switching airflow modes according to claim 1, characterized in that, The controller is also configured to automatically generate and execute backup control commands when a failure is detected in any air supply unit in the air supply unit array. The backup control command is configured to shut down the faulty air supply unit and increase the wind speed of the adjacent air supply unit and / or adjust the opening of the airflow adjustment component in the airflow control module.

10. A control method for a cleanroom that switches airflow modes, characterized in that, The method, applied to the cleanroom system for switching airflow modes according to any one of claims 1-9, comprises: The airflow operation mode of the cleanroom body and the environmental monitoring parameters inside the cleanroom body are obtained; Based on the environmental monitoring parameters and the airflow operation mode, control commands are generated; According to the control command, the operating state of the air supply unit and / or the opening degree of the airflow regulating component are adjusted to form an airflow organization corresponding to the operating mode in the clean room.

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