Microscope system and method for driving electric converter

Abstract

The invention provides a microscope system and an electric converter driving method. Provided is a technique for preventing interference between an objective lens and a sample on an objective table in a microscope provided with an electric converter. A microscope system that observes a sample by means of a microscope, the microscope system comprising: an electric converter that holds a plurality of objective lenses and is capable of switching, by rotation, the objective lenses disposed on an observation optical path; and a control device that controls the driving of the electric converter in accordance with an input driving instruction, the control device having, as switchable modes for controlling the driving of the electric converter: a first mode in which the electric converter is rotated by a first rotation amount corresponding to the driving instruction in accordance with the driving instruction, and a second mode in which the electric converter is rotated by a second rotation amount corresponding to the driving instruction in accordance with the driving instruction; thus, the objective lens arranged on the observation optical path is switched. And a second mode in which the electric converter is rotated by a second rotation amount, which is smaller than the first rotation amount, in accordance with the driving instruction.

Description

Technical Field

[0001] The disclosure of this specification relates to microscope systems and methods for driving electric converters. Background Technology

[0002] In recent years, microscopes have been widely used in biological research and industrial inspection processes.

[0003] In routine industrial operations such as inspection processes, switching magnification using microscopes is essential. To minimize processing time, efficient magnification switching is crucial in these routine tasks.

[0004] Therefore, the introduction of an electrically operated transducer for switching observation magnification (objectives) has reduced operating time. While the introduction of the transducer shortens operating time, interference (or collision) sometimes occurs between the objective lens and the sample (or stage) on the stage during magnification switching, increasing the need to prevent such interference. Based on this reality, various techniques have been developed for microscopes equipped with electrically operated transducers to prevent interference between the objective lens and the sample on the stage during magnification switching.

[0005] For example, Patent Document 1 discloses a microscope in which an emergency switch is activated during the rotation of the electric converter (during the switching of observation magnification) to stop the rotation of the electric converter. Thus, if interference between the objective lens and the sample on the stage is predicted during the rotation of the electric converter, the rotation of the electric converter can be quickly stopped by operating the emergency switch, thereby avoiding interference between the objective lens and the sample on the stage.

[0006] Existing technical documents

[0007] Patent documents

[0008] Patent Document 1: Japanese Patent Application Publication No. 3-296707 Summary of the Invention

[0009] The problem that the invention aims to solve

[0010] In the microscope described in Patent Document 1, during the rotation of the electric converter, when it is possible to predict that the moment when the objective lens will interfere with the sample on the stage is just before the interference occurs, sometimes there is not enough time to operate the emergency switch, thus making it impossible to avoid interference.

[0011] Furthermore, during the switching to objectives with shorter working distances (WD), it can be difficult to determine whether interference will occur between the objective and the sample on the stage just before it happens. Depending on the shape of the sample on the stage (shapes with height differences, complex shapes, etc.), it can also be difficult to determine whether interference will occur before it happens.

[0012] One aspect of the present invention is to provide a technique for preventing interference between the objective lens and the sample on the stage in a microscope with an electric converter.

[0013] Methods for solving problems

[0014] One aspect of the present invention provides a microscope system for observing a sample using a microscope. The microscope system includes: a motorized converter that holds a plurality of objectives and is capable of switching the objectives arranged in the observation optical path by rotation; and a control device that controls the drive of the motorized converter according to an input drive instruction. The control device has, as a switchable mode for controlling the drive of the motorized converter, a first mode in which the motorized converter is rotated by a first rotation amount corresponding to the drive instruction, thereby switching the objectives arranged in the observation optical path; and a second mode in which the motorized converter is rotated by a second rotation amount, less than the first rotation amount, according to the drive instruction.

[0015] In one aspect of the electric converter driving method of the present invention, a computer performs the following processing: receiving input of a driving instruction for an electric converter, the electric converter holding a plurality of objectives which are switchable by rotation in the observation optical path; when switched to a first mode, rotating the electric converter by a first rotation amount corresponding to the input driving instruction, thereby switching the objectives in the observation optical path; and when switched to a second mode, rotating the electric converter by a second rotation amount, wherein the second rotation amount is less than the first rotation amount, according to the input driving instruction.

[0016] Invention Effects

[0017] According to the above method, interference between the objective lens and the sample on the stage can be prevented in a microscope with an electric converter. Attached Figure Description

[0018] Figure 1 This is a diagram illustrating the structure of the microscope system according to the first embodiment.

[0019] Figure 2 This is an example of the front view of the operating section.

[0020] Figure 3 This is a diagram that illustrates the operating section and the electric converter unit in more detail.

[0021] Figure 4 This is a diagram illustrating the positional relationship between the objective lens held in the electric converter and the sample placed on the stage.

[0022] Figure 5 This is a flowchart illustrating the JOG mode processing flow of the first embodiment.

[0023] Figure 6 This is a flowchart illustrating the JOG mode processing flow of the second embodiment.

[0024] Figure 7 This diagram illustrates the state in which the optical axis of the objective lens positioned in the observation optical path is tilted relative to an axis perpendicular to the sample placement surface by means of a tilting mechanism.

[0025] Figure 8 This is another illustration showing the front of the operating section.

[0026] Figure 9 This is a diagram illustrating the hardware structure of a computer that implements the control device.

[0027] Figure 10 This is a diagram illustrating a motorized converter with four mounting holes for mounting objectives.

[0028] Figure 11 This is a diagram showing an example of screen transitions when the converter position screen changes.

[0029] Figure 12 This is a diagram showing an example of a screen transition in another converter's position.

[0030] Figure 13 This is another illustration showing the front of the operating section.

[0031] Figure 14 This is a flowchart illustrating the control processing performed by the control device.

[0032] Figure 15 This is a diagram illustrating an example of the interval between adjacent objectives.

[0033] Figure 16 This is a diagram illustrating a table that stores information.

[0034] Figure 17 This is a diagram illustrating an example of rotation of an electric converter.

[0035] Figure 18 This is a diagram representing an example of table updates.

[0036] Figure 19This is a flowchart illustrating the control processing performed by the control device.

[0037] Label Explanation

[0038] 1: Microscope system;

[0039] 10: Microscope;

[0040] 20: Control device;

[0041] 30: Operations Department;

[0042] 40: Input device;

[0043] 50: Display device;

[0044] 51, 51a, 51b, 51c, 51d, 51e: Converter location screen;

[0045] 52: Mark;

[0046] 53: Object;

[0047] 53a, 53b, 53c: Regions;

[0048] 56, 56a, 56b, 56c, 56d, 56e: Converter location screen;

[0049] 61: Mark;

[0050] 62: Dashed box;

[0051] 101: Microscope head;

[0052] 102: Electric converter unit;

[0053] 103: Stage;

[0054] 104: Microscope stand;

[0055] 105: Electric converter;

[0056] 106: Objective lens;

[0057] 107: Stepper motor;

[0058] 108: Motor driver;

[0059] 109: Hole position detection sensor;

[0060] 110: Position sensor;

[0061] 200: Computer;

[0062] 201: Processor;

[0063] 202: Memory;

[0064] 203: Storage device;

[0065] 204: Reading device;

[0066] 205: Pluggable storage media;

[0067] 206: Communication interface;

[0068] 207: Input / output interface;

[0069] 208: Bus;

[0070] 301: Observation mode LED;

[0071] 302: JOG mode LED;

[0072] 303: Mode switch button;

[0073] 304: JOG dial;

[0074] 305: Rate reduction button switch;

[0075] 306: Multiplier increase button switch;

[0076] 307: Z-axis retreat failure LED;

[0077] 308: Z-axis retreat effective LED;

[0078] 309: Z-backoff mode switch button. Detailed Implementation

[0079] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0080] [First Implementation Method]

[0081] Figure 1 This is a diagram illustrating the structure of the microscope system according to the first embodiment.

[0082] Figure 1 The illustrated microscope system 1 is, for example, a system used in inspection processes in the industrial field. The microscope system 1 includes a microscope 10, a control device 20, an operation unit 30, an input device 40, and a display device 50.

[0083] The microscope 10 is, for example, a digital microscope, which includes a microscope head 101, an electric converter unit 102, a stage 103, and a microscope frame 104.

[0084] The microscope head 101 includes a light source that emits illumination light to illuminate the sample S, and an imaging unit that captures an image of the sample S. The light source may be, for example, a white LED (Light Emitting Diode), a halogen lamp, or a xenon lamp. The imaging unit may be, for example, a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor.

[0085] The motorized converter unit 102 is mounted on the microscope head 101. The motorized converter unit 102 includes a motorized converter 105. The motorized converter 105 holds multiple objectives 106 and can switch the objectives 106 arranged in the observation optical path by rotation. The motorized converter 105 is rotated by a stepper motor 107 for the motorized converter (described later) driven by the control device 20.

[0086] The stage 103 holds the sample S. The stage 103 moves in a direction perpendicular to the optical axis of the objective lens 106 disposed in the observation optical path. Furthermore, the stage 103 can also move in the direction of the optical axis of the objective lens 106 disposed in the observation optical path. The stage 103 is, for example, an electrically driven stage, which is moved by a stepper motor driven by the control device 20.

[0087] The microscope frame 104 is equipped with a stage 103 and holds the microscope head 101 so that it can move along the optical axis of the objective lens 106 positioned in the observation optical path. The microscope head 101 can be moved electrically, for example, by a stepper motor driven by a control device 20. Alternatively, when the stage 103 can move along the optical axis of the objective lens 106 positioned in the observation optical path, the microscope head 101 can also be fixedly held in the microscope frame 104.

[0088] The control device 20 is, for example, a computer, which controls the various parts of the microscope system 1. For example, the control device 20 controls the drive (rotation) of the electric converter 105, the movement of the microscope head 101, the movement of the stage 103, or the display of the display device 50, etc., based on the instructions received by the operation unit 30 or the input device 40.

[0089] Furthermore, the control device 20 has switchable modes for controlling the drive of the motorized converter 105: an observation mode and a JOG mode. The observation mode, an example of the first mode, is a mode in which the objective lenses 106 positioned on the observation optical path are switched according to the input drive instruction. The JOG mode, an example of the second mode, is a mode in which the motorized converter 105 is rotated according to the input drive instruction. Thus, in the observation mode, any one of the objective lenses 106 can be quickly positioned on the observation optical path, and in the JOG mode, the motorized converter 105 can be rotated freely.

[0090] The operation unit 30 receives input from the user, such as drive instructions for the electric converter 105. Details of the operation unit 30 will be described later. The input device 40 receives various inputs from the user. The input device 40 includes, for example, a mouse and a keyboard.

[0091] The display device 50 displays various images and observation images of the sample S. The observation images of the sample S are obtained by capturing images of the sample S through the camera unit provided with the microscope head 101. The display device 50 is, for example, a liquid crystal display or an organic EL (electroluminescence) display. In addition, the display device 50 can be a touch panel display, or it can also serve as an input device 40.

[0092] Figure 2 This is an example of the front view of the operating section.

[0093] Figure 2 The illustrated operating unit 30 has a viewing mode LED (Light Emitting Diode) 301, a JOG mode LED 302, a mode switch 303, a JOG dial 304, a magnification reduction switch 305, and a magnification increase switch 306 on the front.

[0094] The observation mode LED 301 is an LED that illuminates only when the control device 20 is switched to observation mode. The JOG mode LED 302 is an LED that illuminates only when the control device 20 is switched to JOG mode.

[0095] The mode switch 303 is a push-button switch that accepts a mode switch instruction input. The JOG dial 304 is an example of a dial-type operating component that accepts a drive instruction input to the electric converter 105 only when the control device 20 is switched to JOG mode. The magnification reduction push-button switch 305 is a push-button switch that accepts a magnification reduction instruction input as a drive instruction to the electric converter 105 only when the control device 20 is switched to observation mode. The magnification increase push-button switch 306 is a push-button switch that accepts a magnification increase instruction input as a drive instruction to the electric converter 105 only when the control device 20 is switched to observation mode. Furthermore, the magnification reduction push-button switch 305 and the magnification increase push-button switch 306 are examples of two magnification change direction indicator components.

[0096] Figure 3 This is a diagram that illustrates the operating section and the electric converter unit in more detail.

[0097] In the operation unit 30, the lighting and extinguishing of the observation mode LED 301 and the lighting and extinguishing of the JOG mode LED 302 are controlled by the control device 20.

[0098] When the mode switch button 303 is pressed, the on signal of the button switch is input to the control device 20 as a mode switching instruction. When the control device 20 receives the mode switching instruction, it switches the mode switched to at that time to another mode. For example, if the mode switched to at that time was observation mode, it switches to JOG mode.

[0099] The JOG dial 304, for example, is equipped with a two-phase rotary encoder. When the JOG dial 304 is rotated while the control device 20 is switched to JOG mode, an operation signal corresponding to the rotation operation is input to the control device 20 as a drive instruction for the electric converter 105. When this drive instruction is input, the control device 20 outputs a drive signal to the motor driver 108 of the stepper motor 107 that drives the electric converter 105 to rotate, so that the electric converter 105 rotates by a predetermined amount in the rotation direction and speed corresponding to the drive instruction. Thus, when the JOG dial 304 is rotated slowly, the electric converter 105 also rotates slowly, and when the JOG dial 304 is rotated rapidly, the electric converter 105 also rotates rapidly. Furthermore, an upper limit can be set on the rotation speed of the electric converter 105 at this time. For example, if the rotation speed of the JOG dial 304 is higher than a predetermined value, a drive signal can be output to the motor driver 108 to limit the rotation speed of the electric converter 105 to the upper limit value. Stepper motor 107 and motor driver 108 are disposed in electric converter unit 102.

[0100] When the magnification reduction button switch (magnification DOWN switch) 305 is pressed while the control device 20 is switched to observation mode, the on signal of the button switch is input to the control device 20 as a magnification reduction indication. When the control device 20 receives the magnification reduction indication, the control device 20 outputs a drive signal to the motor driver 108 that drives the stepper motor 107 to rotate the electric converter 105, so as to switch the objective lens 106 configured in the observation optical path at that moment to a lower magnification objective lens 106. However, if there is no lower magnification objective lens 106 held in the electric converter 105, the switching of the objective lens 106 is not performed.

[0101] When the magnification increase button switch (magnification UP switch) 306 is pressed while the control device 20 is switched to observation mode, the on signal of the button switch is input to the control device 20 as a magnification increase indication. When the control device 20 receives the magnification increase indication, the control device 20 outputs a drive signal to the motor driver 108 that drives the stepper motor 107 to rotate the electric converter 105, so as to switch the objective lens 106 configured in the observation optical path at that moment to a higher magnification objective lens 106. However, if there is no higher magnification objective lens 106 held by the electric converter 105, the switching of the objective lens 106 is not performed.

[0102] Additionally, the motorized converter unit 102 includes a hole position detection sensor 109, which detects the position of the mounting hole of the motorized converter 105, on which the objective lens 106 is mounted and arranged in the observation optical path, and outputs the detection result to the control device 20. Furthermore, the control device 20 stores information in advance related to the magnification of the objective lens 106 mounted in each mounting hole of the motorized converter 105, and information related to the amount of rotation of the motorized converter 105 required to switch to the objective lens 106 mounted in each mounting hole. Therefore, when the magnification reduction button switch 305 or the magnification increase button switch 306 is pressed, the control device 20 can determine which direction and how much the motorized converter 105 should be rotated, or whether a lower or higher magnification objective lens 106 is held in the motorized converter 105.

[0103] Additionally, the motorized converter unit 102 includes a position sensor 110. The position sensor 110 is a sensor that detects whether any of the objectives 106 held in the motorized converter 105 is positioned in the observation optical path, and outputs the detection result to the control device 20.

[0104] Next, the operation of microscope system 1 will be explained.

[0105] When the user connects the power to the microscope system 1, the control device 20 switches to observation mode and illuminates the observation mode LED 301, while turning off the JOG mode LED 302.

[0106] Next, the user places the sample S, which is the object of observation, on the stage 103. Then, after reviewing the observation image of sample S displayed on the display device 50 and determining whether magnification or reduction is required, the user presses the magnification increase button switch 306 or the magnification decrease button switch 305. The control device 20 then switches the objective lens 106 positioned in the observation optical path at that moment to a higher or lower magnification objective lens 106, depending on the pressed button switch. Thus, when switched to observation mode, the objective lens 106 positioned in the observation optical path can be quickly switched by pressing the magnification increase button switch 306 or the magnification decrease button switch 305.

[0107] On the other hand, users sometimes want to confirm whether objective lens 106 will interfere with the sample S placed on stage 103 before switching objectives. For example, the positional relationship between objective lens 106 held in motorized converter 105 and sample S placed on stage 103 is... Figure 4 The illustrated positional relationship is for the case where the 3x objective lens 106, which is positioned in the observation optical path, is to be switched to a 10x objective lens 106. At the moment before the objective lens 106 is switched, it is difficult to determine whether the 10x objective lens 106 will interfere with the sample S during the switching process.

[0108] Therefore, the user presses the mode switch button 303 to determine in advance whether interference will occur. The control device 20 then switches from observation mode to JOG mode, turning off the observation mode LED 301 and illuminating the JOG mode LED 302. The control device 20 then begins JOG mode processing. This JOG mode processing occurs during the switch to JOG mode and ends when the user switches back to observation mode by pressing the mode switch button 303 again.

[0109] Figure 5 This is a flowchart illustrating the process of JOG mode processing.

[0110] like Figure 5 As shown, when JOG mode processing begins, the control device 20 determines in step S11 whether there is an operation (rotation operation) of the JOG dial 304. This determination also determines whether a drive instruction (operation signal corresponding to the rotation operation of the JOG dial 304) has been input from the JOG dial 304.

[0111] The decision process in S11 is repeated until the decision result of S11 is "yes". Then, when the decision result of S11 is "yes", the control device 20, in S12, provides a drive instruction to the electric converter 105 according to the drive instruction input from the JOG dial 304. More specifically, the control device 20 outputs a drive signal corresponding to the drive instruction input from the JOG dial 304 to the motor driver 108. As a result, the stepper motor 107 is driven, and the electric converter 105 rotates. In addition, the drive signal output to the motor driver 108 is a signal that causes the electric converter 105 to rotate by a predetermined amount in the rotation direction and rotation speed corresponding to the drive instruction input from the JOG dial 304. Of course, this predetermined amount is smaller than the amount of rotation of the electric converter 105 when switching the objective lens 106 by pressing the magnification increase button switch 306 or the magnification decrease button switch 305 in the observation mode. Here, the predetermined amount is an example of a second rotation amount. When switching to observation mode, the rotation amount of the motorized converter 105 when switching the objective lens 106 according to the pressing of the magnification increase button switch 306 or the magnification decrease button switch 305 is an example of the first rotation amount.

[0112] Next, in S13, the control device 20 determines whether the drive of the electric converter 105 corresponding to the drive instruction performed in S12 has been completed. This determination also determines whether a drive completion signal has been input from the motor driver 108. Furthermore, when the drive corresponding to the drive signal input from the control device 20 has been completed, the motor driver 108 outputs a drive completion signal to the control device 20.

[0113] Repeat the S13 judgment process until the S13 judgment result is "yes". Then, when the S13 judgment result is "yes", the process returns to S11 and the judgment of whether there is an operation of JOG dial 304 is performed again.

[0114] According to this JOG mode processing, for example, when the user slowly rotates the JOG dial 304 in the CW (clockwise) or CCW (counterclockwise) direction, the motorized converter 105 also slowly rotates in the CW or CCW direction. Furthermore, when the user stops rotating, the rotation of the motorized converter 105 also stops. Therefore, by slowly rotating the JOG dial 304, the user can determine in advance whether the objective lens 106 will interfere with the sample S on the stage 103. Assuming that it is determined that the objective lens 106 will interfere with the sample S on the stage 103, interference between the objective lens 106 and the sample S can be prevented by raising the microscope head 101 or lowering the stage 103 before switching the objective lens 106.

[0115] In addition, when switching from JOG mode to observation mode in a state where it is determined that the objective lens 106 will not interfere with the sample S on the stage 103 and the objective lens 106 is not configured in the observation optical path, the control device 20 can also rotate the electric converter 105 based on the detection result of the position sensor 110 until any objective lens 106 is configured in the observation optical path.

[0116] [Second Implementation]

[0117] Compared to the first implementation, the second implementation handles different content in the JOG mode.

[0118] Figure 6 This is a flowchart illustrating the JOG mode processing flow of the second embodiment.

[0119] exist Figure 6 In the JOG mode processing shown, the processing of steps S11 to S13 is similar to... Figure 5 The JOG mode shown is processed the same way, but with... Figure 5 The difference in the illustrated JOG mode processing is that, if the determination result in step S13 is "no", further processing is performed after step S14.

[0120] In detail, if the determination result of S13 is "no", the control device 20 determines in S14 whether it is in position. This determination also determines whether the position sensor 110 detects that any of the objectives 106 held by the electric converter 105 is positioned in the observation optical path.

[0121] If the determination result of S14 is "No", the process returns to S13, and the determination of whether the drive of the electric converter 105 has been completed is performed again. On the other hand, if the determination result of S14 is "Yes", the control device 20 issues a drive stop instruction to the electric converter 105 in S15. More specifically, the control device 20 outputs a drive stop signal to the motor driver 108. As a result, the drive of the stepper motor 107 stops, and the rotation of the electric converter 105 stops.

[0122] Next, in S16, the control device 20 switches from JOG mode to observation mode, and then in S17, it lights up the observation mode LED 301 and turns off the JOG mode LED 302. When the processing in S17 ends, the JOG mode processing ends.

[0123] In addition to the effects described in the first embodiment, the following effects can be obtained according to this JOG mode processing. For example, consider the case where the objective lens 106 positioned in the observation optical path is switched to the desired objective lens 106. The user rotates the motorized converter 105 by rotating the JOG dial 304. If it can be determined that the desired objective lens 106 will not interfere with the sample S, the rotation of the JOG dial 304 can be continued directly, thereby positioning the desired objective lens 106 in the observation optical path. Thus, the desired objective lens 106 can be switched without pressing the mode switch 303 and the magnification reduction switch 305 or the magnification increase switch 306, thus enabling a smooth transition to the observation operation.

[0124] [Third Implementation Method]

[0125] The difference between the third embodiment and the first embodiment is that the microscope 10 also has a tilting mechanism.

[0126] The tilting mechanism is a mechanism that tilts the optical axis of the objective lens 106 disposed in the observation optical path relative to an axis perpendicular to the sample placement surface of the stage 103, so as to enable oblique observation of the sample S. The tilting mechanism tilts, for example, by tilting a portion of the microscope frame 104 that holds the microscope head 101, thereby tilting the optical axis of the objective lens 106 disposed in the observation optical path relative to an axis perpendicular to the sample placement surface. The tilting mechanism is driven, for example, electrically, by a stepper motor driven by the control device 20 for tilting. Furthermore, the tilting mechanism includes a tilt sensor that detects the tilt (presence or absence of tilt and / or tilt angle) achieved by the tilting mechanism and outputs the detection result to the control device 20.

[0127] Figure 7 This diagram illustrates the state in which the optical axis of the objective lens positioned in the observation optical path is tilted relative to an axis perpendicular to the sample placement surface by means of a tilting mechanism.

[0128] like Figure 7 As illustrated, in the objective lens 106 positioned in the observation optical path (in Figure 7 When the optical axis of the 3x objective lens 106 is tilted relative to the axis perpendicular to the sample placement surface of the stage 103 (hereinafter also referred to as the "tilted state"), the possibility of interference between the objective lens 106 and the sample S (or stage 103) on the stage 103 increases when switching the objective lens 106 configured in the observation optical path.

[0129] Therefore, when the control device 20 detects a tilt (tilt or tilt angle other than 0 degrees) achieved by the tilting mechanism, it switches to JOG mode, turns off the observation mode LED 301, and turns on the JOG mode LED 302.

[0130] Thus, when in the tilted state, it automatically switches to JOG mode, and therefore does not accept input based on the pressing of the magnification reduction button switch 305 or the magnification increase button switch 306 for magnification reduction or magnification increase indication. Therefore, even if the magnification reduction button switch 305 or the magnification increase button switch 306 is pressed due to misoperation, the objective lens 106 will not be switched, thus avoiding interference between the objective lens 106 and the sample S (or the stage 103) that may occur during the switching.

[0131] The specific examples shown in the above embodiments are for ease of understanding of the invention, and the present invention is not limited to these embodiments. It may include variations derived from the above embodiments, as well as alternatives to the above embodiments. That is, the above embodiments can be modified in terms of the constituent elements without departing from their spirit and scope. Furthermore, new embodiments can be implemented by appropriately combining the multiple constituent elements disclosed in the embodiments. Additionally, several constituent elements may be deleted from the constituent elements shown in the embodiments, or several constituent elements may be added to the constituent elements shown in the embodiments. Moreover, the processing steps shown in the embodiments can be performed in different orders as long as they are not contradictory. In other words, the system and method of the present invention can be modified and altered in various ways without departing from the scope of the claims.

[0132] For example, in the first embodiment, the operation unit 30 may not have a magnification reduction button switch 305 and a magnification increase button switch 306, but instead the JOG dial 304 can be used to further accept the input of the magnification reduction instruction and the input of the magnification increase instruction.

[0133] Figure 8 This is another illustration showing the front of the operating section.

[0134] Figure 8 The illustrated operating unit 30 is relative to Figure 2 The difference in the illustrated operating unit 30 is that it does not have a magnification reduction button switch 305 and a magnification increase button switch 306. Figure 8 In the illustrated operation unit 30, when switched to observation mode, the input of magnification increase indication or magnification decrease indication is received according to the rotation operation direction (CW direction or CCW direction) of JOG dial 304.

[0135] According to this modified example, the operation of the JOG dial 304 alone can drive the motorized converter 105 for determining whether the objective lens 106 will interfere with the sample S, and for switching the objective lens 106 positioned in the observation optical path. Therefore, operability is improved when repeatedly determining whether the objective lens 106 will interfere with the sample S and switching the objective lens 106 positioned in the observation optical path. In routine operations such as inspection procedures using the microscope system 1, it is important to quickly perform magnification changes to shorten operation time; therefore, this modified example is effective.

[0136] Additionally, for example, in the second embodiment, the motorized converter 105 is driven by the operation of the JOG dial 304 when switching to JOG mode, but it can also be driven by the operation of the magnification reduction button switch 305 or the magnification increase button switch 306. More specifically, during the pressing of the magnification reduction button switch 305 or the magnification increase button switch 306, the motorized converter 105 rotates at a fixed low speed in the CW or CCW direction, and the rotation of the motorized converter 105 stops when the pressing is stopped. Here, low speed means a speed at least lower than the rotation speed of the motorized converter 105 when switching the objective lens 106 in the observation mode.

[0137] Additionally, for example, in various embodiments, the microscope system 1 can also be used in the biological field. In this case, for example, after switching to JOG mode by pressing the mode switching button switch 303, the electric converter 105 can be rotated alternately in small amounts in the CW and CCW directions by operating the JOG dial 304, thereby performing the venting operation inside the immersion when using the immersion objective.

[0138] Alternatively, in various embodiments, the operation unit 30 may also include push-button switches corresponding to the mounting holes of the motorized converter 105 instead of the magnification reduction push-button switch 305 and the magnification increase push-button switch 306. For example, if the motorized converter 105 has four mounting holes, it may also include four push-button switches corresponding to each mounting hole. Furthermore, when switching to observation mode, if any of these push-button switches is pressed, the control device 20 controls the drive of the motorized converter 105, causing the objective lens 106 disposed in the observation optical path to be switched to the objective lens 106 mounted in the mounting hole corresponding to the pressed push-button switch.

[0139] Additionally, for example, in various embodiments, the control device 20 can also be controlled by... Figure 9 The computer shown is used to implement this.

[0140] Figure 9This is a diagram illustrating the hardware structure of a computer that implements the control device.

[0141] Figure 9 The illustrated computer 200 includes a processor 201, a memory 202, a storage device 203, a reading device 204, a communication interface 206, and an input / output interface 207 as hardware. Furthermore, the processor 201, memory 202, storage device 203, reading device 204, communication interface 206, and input / output interface 207 are interconnected, for example, via a bus 208.

[0142] The processor 201 can be a single processor, a multi-processor, or a multi-core processor. The processor 201 performs various control processes, including the JOG mode processing described above, by reading and executing programs stored in the storage device 203, thus providing the function of a control device 20 for the microscope system 1.

[0143] The memory 202 is, for example, a semiconductor memory, and may also include RAM and ROM regions. Furthermore, "RAM" is short for Random Access Memory, and "ROM" is short for Read Only Memory.

[0144] Storage device 203 may be a semiconductor memory such as a hard disk or flash memory, or an external storage device. Storage device 203 may store information related to the magnification of the objective lens 106 mounted in each mounting hole of the electric converter 105, information related to the amount of rotation of the electric converter 105 required to switch to the objective lens 106 mounted in each mounting hole, etc.

[0145] The reading device 204 accesses the pluggable storage medium 205, for example, according to the instructions of the processor 201. The pluggable storage medium 205 is implemented, for example, a semiconductor device, a medium for inputting and outputting information via magnetic action, or a medium for inputting and outputting information via optical action. Furthermore, the semiconductor device is, for example, a USB (Universal Serial Bus) memory. Furthermore, the medium for inputting and outputting information via magnetic action is, for example, a magnetic disk. The medium for inputting and outputting information via optical action is, for example, a CD (Compact Disc)-ROM, a DVD (Digital Versatile Disk), or a Blu-ray disc.

[0146] The communication interface 206 is connected to a communication network, for example, to communicate with other devices (such as servers) as instructed by the processor 201. The input / output interface 207 is, for example, an interface between the microscope 10, the operation unit 30, the input device 40, and the display device 50.

[0147] The program executed by the processor 201 is provided to the computer 200, for example, in the following manner.

[0148] (1) Pre-installed in storage device 203.

[0149] (2) Provided by pluggable storage medium 205.

[0150] (3) Provided by servers such as program servers.

[0151] In addition, refer to Figure 9 The hardware structure of the computer 200 used to implement the control device 20 described herein is illustrative and not limited thereto. For example, a part of the above structure may be deleted, and new structures may be added. Additionally, for example, some or all of the functions of the control device 20 may be installed as hardware. FPGA (Field Programmable Gate Array), SoC (System-on-a-Chip), ASIC (Application Specific Integrated Circuit), and PLD (Programmable Logic Device) are examples of hardware capable of installing the control device 20.

[0152] Additionally, in each embodiment, when switched to JOG mode, the display device 50 can also display a converter position screen showing the current rotational position of the electric converter 105. Figure 10 and Figure 11 Explain such variations.

[0153] Figure 10 This is a diagram illustrating a motorized converter with four mounting holes for mounting objectives. Figure 11 This is a diagram showing an example of screen transitions when the converter position screen changes.

[0154] For example, such as Figure 10 As illustrated, the motorized converter 105 has four mounting holes, "OB1", "OB2", "OB3", and "OB4", for mounting the objective lens 106. In this case, when switching to JOG mode, the control device 20 causes the display device 50 to display (e.g., a pop-up display). Figure 11The converter position screen 51 (e.g., 51a) is illustrated. The converter position screen 51 displays a marker 52 indicating the position of the observation optical path and an object 53 simulating the electric converter 105. The object 53 consists of multiple regions. These regions include areas corresponding to the positions of the four mounting holes (regions “OB1”, “OB2”, “OB3”, “OB4”) and areas corresponding to the intervals that divide the adjacent mounting holes in the rotational direction into three equal sections (e.g., regions 53a, 53b, 53c). This object 53 is displayed such that the region corresponding to the position of the electric converter 105 in the observation optical path is indicated by the marker 52 and can be distinguished from other regions by color, etc.

[0155] For example, when the objective lens 106, mounted in the mounting hole of "OB1," is positioned in the observation optical path, the converter position screen 51a is displayed. In the converter position screen 51a, the area corresponding to the position of the mounting hole of "OB1" (the area of ​​"OB1") is indicated by a mark 52 and can be distinguished from other areas by color. Then, for example, when the user rotates the JOG dial 304 until the objective lens 106, mounted in the mounting hole of "OB2," is positioned in the observation optical path, the converter position screen 51 changes from converter position screen 51a in the order of converter position screens 51b, 51c, 51d, and 51e. That is, in the converter position screen 51, as the motorized converter 105 rotates based on the rotation of the JOG dial 304, the object 53 is rotated and displayed, and the area of ​​the object 53 corresponding to the position of the motorized converter 105 in the observation optical path is sequentially displayed so as to be distinguishable from other areas.

[0156] According to this variation, when switching to JOG mode, the user can confirm the rotational position of the electric converter 105 in real time.

[0157] Furthermore, in this modified example, the control device 20 can detect the position of the mounting hole of the objective lens 106 disposed in the observation optical path via the hole position detection sensor 109. Additionally, the control device 20 identifies, for example... Figure 5 The illustrated JOG mode processing demonstrates the rotation direction and amount of the motorized converter 105 based on a single drive instruction (S12). Therefore, the control device 20 can identify the current rotational position of the motorized converter 105 based on the position of the mounting hole of the objective lens 106 configured in the observation optical path and the subsequent drive instruction (S12).

[0158] The converter position screen, which indicates the current rotational position of the electric converter 105, is not limited to using... Figure 11 The converter location screen 51 can be described in the form of, for example, the converter location screen 51. Figure 12 The converter location is shown in the form of screen 56.

[0159] Figure 12 This is a diagram showing an example of a screen transition in another converter's position.

[0160] Figure 12 The illustrated converter position screen 56 is relative to Figure 11 The converter position screen 51 shown is similar in that the area of ​​object 53 corresponding to the position of the electric converter 105 arranged in the observation optical path is displayed in a way that can be distinguished from other areas by color, etc., but the difference is that object 53 is not rotated but fixedly displayed, and the mark 52 is not displayed.

[0161] Thus, for example, when the objective lens 106, mounted in the mounting hole of "OB1," is positioned in the observation optical path, a converter position screen 56a is displayed. In converter position screen 56a, the area corresponding to the position of the mounting hole of "OB1" (the area of ​​"OB1") is displayed so that it can be distinguished from other areas by color. Subsequently, for example, when the user rotates the JOG dial 304 until the objective lens 106, mounted in the mounting hole of "OB2," is positioned in the observation optical path, the converter position screen 56 changes from converter position screen 56a in the order of converter position screens 56b, 56c, 56d, and 56e. That is, in converter position screen 56, as the motorized converter 105, based on the rotation operation of the JOG dial 304, rotates, the area of ​​the object 53 corresponding to the position of the motorized converter 105 positioned in the observation optical path is sequentially displayed so that it can be distinguished from other areas.

[0162] Through this converter position screen 56, users can also confirm the rotational position of the electric converter 105 in real time.

[0163] Alternatively, a converter position display panel can be provided on the front of the operation unit 30 instead of the converter position screen 56 displayed on the display device 50. The converter position display panel may have multiple areas, for example, shaped like the object 53 in the converter position screen 56, and each area is configured to be illuminated by an LED. Furthermore, for example, when the objective lens 106, mounted in the mounting hole of "OB1," is arranged in the observation optical path, such as... Figure 12 As shown for object 53 in converter position display screen 56a, the corresponding area in the converter position display panel is illuminated by an LED. Then, for example, when the user rotates the JOG dial 304 until the objective lens 106, mounted in the mounting hole "OB2," is positioned in the observation optical path, as... Figure 12As the converter position screen 56 sequentially changes from converter position screen 56a to converter position screens 56b, 56c, 56d, and 56e, the corresponding areas in the converter position display panel are illuminated sequentially by LEDs. That is, in the converter position display panel, as the motorized converter 105, operated by rotating the JOG dial 304, rotates, the areas corresponding to the positions of the motorized converter 105 in the observation optical path are illuminated sequentially.

[0164] With this converter position display panel, users can also confirm the rotational position of the electric converter 105 in real time.

[0165] Next, other variations will be explained.

[0166] The above can also be used as a basis for further discussion. Figure 8 The illustrated operating unit 30 is further modified so that, based on the operation of this operating unit 30, the control device 20 performs control processing on the electric converter 105. Figure 13 as well as Figure 14 This variation will be explained.

[0167] Figure 13 This is another illustration showing the front of the operating section.

[0168] Figure 13 The illustrated operating unit 30 is relative to Figure 8 The illustrated operating unit 30 also includes a Z-backoff invalid LED 307, a Z-backoff valid LED 308, and a Z-backoff mode switching button switch 309. The Z-backoff invalid LED 307 is an LED that illuminates only when the Z-backoff mode is invalid. The Z-backoff valid LED 308 is an LED that illuminates only when the Z-backoff mode is valid. The Z-backoff mode switching button switch 309 is a button that accepts input indicating whether the Z-backoff mode is valid or invalid.

[0169] The microscope system 1 has Figure 13 In the case of the illustrated operation unit 30, when the microscope system 1 is powered on, the control device 20 switches the Z-back mode to active, turns off the Z-back inactive LED 307, and illuminates the Z-back active LED 308. Subsequently, each time the Z-back mode switching button 309 is pressed, the Z-back mode is alternately switched between active and inactive. When the Z-back mode is inactive, the Z-back inactive LED 307 illuminates, and the Z-back active LED 308 turns off. When the Z-back mode is active, the Z-back inactive LED 307 turns off, and the Z-back active LED 308 illuminates.

[0170] Furthermore, when the Z-backoff mode is enabled, the control device 20 switches to observation mode, illuminates the observation mode LED 301, and turns off the JOG mode LED 302. When the Z-backoff mode is disabled, it switches to JOG mode, turns off the observation mode LED 301, and illuminates the JOG mode LED 302. Thus, the control device 20 switches between observation mode and JOG mode based on whether the Z-backoff mode is enabled or disabled.

[0171] Furthermore, the control device 20 performs operations based on whether the Z-retreat mode is active or inactive and the operation of the JOG dial 304. Figure 14 The control process is illustrated.

[0172] Figure 14 This is a flowchart illustrating the control processing performed by the control device.

[0173] when Figure 14 When the illustrated control process begins, the control device 20 determines in S21 whether there is operation (rotation operation) of the JOG dial 304. Furthermore, the process in S21 is related to that in S11 (e.g., Figure 6 The processing of S11 is the same as that of S11.

[0174] If the determination result in S21 is "yes", the control device 20 determines in S22 whether the Z-backoff mode is effective. In addition, this determination also determines whether it is observation mode (whether it is observation mode or JOG mode).

[0175] If the determination result of S22 is "yes" (when the Z-retraction mode is effective), the control device 20 provides a Z-retraction instruction for the microscope head 101 and / or the stage 103 in S23. Z-retraction means that before the electric converter 105 rotates, the microscope head 101 and / or the stage 103 are moved so that the microscope head 101 and the stage 103 are separated in the optical axis direction (Z direction) of the objective lens 106 arranged in the observation optical path to such an extent that the objective lens 106 of the electric converter 105 does not interfere with the stage 103 or the sample S placed on the stage 103.

[0176] Following S23, in S24, the control device 20, based on the operation (rotation operation) of the JOG dial 304 determined in S21, gives a drive instruction to the motorized converter 105. This drive instruction is used to rotate the motorized converter 105 in the direction corresponding to the rotation direction (CW or CCW direction) of the JOG dial 304, switching the objective lens 106 positioned in the observation optical path to the adjacent objective lens 106.

[0177] Following S24, in S25, the control device 20 provides a Z-recovery instruction to the microscope head 101 and / or the stage 103. Z-recovery refers to moving the microscope head 101 and / or the stage 103 so that the positional relationship between the microscope head 101 and the stage 103 returns to the state before the Z-retreat.

[0178] When the Z-retreat mode is effective, the operation of the JOG dial 304 involves Z-retreat, switching of objective lens 106, and Z-recovery. Therefore, during the switching of objective lens 106, objective lens 106 will not interfere with stage 103 or sample S.

[0179] After S25, the processing returns to S21.

[0180] On the other hand, if the decision result of S22 is "No" (when Z-backoff mode is invalid), the process proceeds to S27. The processing of S26 to S30, including S27, is related to... Figure 6 The processing of S11 to S15 is the same, therefore its explanation is omitted here. Additionally, Figure 6 The processing of steps S11 to S15 is part of the JOG mode processing described in the second embodiment.

[0181] In cases where the Z-backoff mode is ineffective, the JOG mode processing described in the second embodiment is performed, thus achieving the same effect as the second embodiment.

[0182] After S30, the processing returns to S21.

[0183] Next, other variations will be explained.

[0184] The microscope system 1 has Figure 8 In the case of the illustrated operation unit 30, the control device 20 can also perform control processing of the electric converter 105 based on information stored in a table (lookup table). The table stores information such as whether the observation optical path passes through the interval between adjacent objectives when the electric converter 105 is driven in JOG mode. Figures 15 to 19 Such variations will be explained in detail.

[0185] Figure 15 This is a diagram illustrating an example of the interval between adjacent objectives.

[0186] exist Figure 15 In the example shown, with Figure 10Similarly, the illustrated motorized converter 105 has four mounting holes: “OB1”, “OB2”, “OB3”, and “OB4”, ​​each housing an objective lens 106. “Interval A” represents the interval between the objective lens 106 mounted at “OB1” and the objective lens 106 mounted at “OB2” (also the interval between “OB1” and “OB2”). “Interval B” represents the interval between the objective lens 106 mounted at “OB2” and the objective lens 106 mounted at “OB3” (also the interval between “OB2” and “OB3”). “Interval C” represents the interval between the objective lens 106 mounted at “OB3” and the objective lens 106 mounted at “OB4” (also the interval between “OB3” and “OB4”). “Interval D” represents the interval between the objective lens 106 mounted at “OB4” and the objective lens 106 mounted at “OB1” (also the interval between “OB4” and “OB1”).

[0187] Figure 16 This is a diagram illustrating a table that stores information.

[0188] exist Figure 16 The table shown contains the target OB position, the interval passed through, and the JOG through Y / N ​​for each "current OB position" when "CCW" is present, and the target OB position, the interval passed through, and the JOG through Y / N ​​for "CW" are present.

[0189] "Current OB position" indicates the mounting hole of the objective lens 106 currently configured in the observation optical path. For example, if the "Current OB position" is "OB1", it means that the mounting hole of the objective lens 106 currently configured in the observation optical path is "OB1".

[0190] In the case of "CCW", the "target OB position" refers to the mounting hole of the objective lens 106 that is next positioned in the observation optical path when the motorized converter 105 is rotated in the CCW direction. In the case of "CW", the "target OB position" refers to the mounting hole of the objective lens 106 that is next positioned in the observation optical path when the motorized converter 105 is rotated in the CW direction. For example, when the "current OB position" is "OB1", the "target OB position" is "OB2" in the case of "CCW" and "target OB position" is "OB4" in the case of "CW".

[0191] In the case of "CCW", the "passage interval" refers to the interval between the "current OB position" and the "target OB position" in the case of "CCW" (which is also the interval through which the observed light path passes). In the case of "CW", the "passage interval" refers to the interval between the "current OB position" and the "target OB position" in the case of "CW" (which is also the interval through which the observed light path passes). For example, when the "current OB position" is "OB1", the "passage interval" in the case of "CCW" is interval "A" between the "current OB position" (OB1) and the "target OB position" (OB2), and the "passage interval" in the case of "CW" is interval "D" between the "current OB position" (OB1) and the "target OB position" (OB4).

[0192] In the "CCW" case, "JOG Pass Y / N" indicates the "passage interval" when the optical path has passed through "CCW" in JOG mode. In the "CW" case, "JOG Pass Y / N" indicates the "passage interval" when the optical path has passed through "CW" in JOG mode. "Y" indicates passing through, and "N" indicates not passing through. For example, if the "current OB position" is "OB1", "JOG Pass Y / N" in "CCW" mode is "N", indicating the "passage interval" (interval "A") when the optical path has not passed through "CCW" in JOG mode. Similarly, if the "current OB position" is "OB1", "JOG Pass Y / N" in "CW" mode is "N", indicating the "passage interval" (interval "D") when the optical path has not passed through "CW" in JOG mode.

[0193] Furthermore, such a table is stored, for example, in the control device 20. Figure 9 The storage device 203 of the illustrated computer 200.

[0194] Here, use Figure 17 and Figure 18 This section explains an example of updating "JOG via Y / N" stored in the table. Figure 17 This is a diagram illustrating an example of rotation of an electric converter. Figure 18 This is a diagram representing an example of table updates.

[0195] For example, in JOG mode, such as Figure 17 As illustrated, the motorized converter 105 rotates in the CCW direction, changing the position of the objective lens 106 positioned in the observation optical path from "OB1" to "OB2". Additionally, Figure 17 Marker 61 indicates the observation optical path.

[0196] In this case, "OB1" becomes the "current OB position," and "OB2" becomes the "target OB position" when "CCW" is active. The interval "A" in between becomes the "passing interval." Therefore, as... Figure 18 As illustrated, in the case where the "current OB position" is "OB1" and in the case of "CCW", the "JOG through Y / N" is updated from "N" to "Y" (see dashed box 62). Similarly, in the case of "CW", the "JOG through Y / N" with the same "through interval" is also updated from "N" to "Y" (see dashed box 63). Thus, in the table, when the "JOG through Y / N" is updated in either the "CCW" or "CW" case, the "JOG through Y / N" with the same "through interval" in the other case is also updated. This means that as long as there is no subsequent movement of the stage 103 in the XY direction, or movement of the microscope head 101 and / or the stage 103 in the Z direction, during the switching of the objective 106 involving that "through interval" ("interval A" in the above example), there will be no interference between the objective 106 and the stage 103 or the sample S. In addition, the XY direction is also perpendicular to the optical axis of the objective lens 106 arranged in the observation optical path, and the Z direction is also the direction of the optical axis of the objective lens 106 arranged in the observation optical path.

[0197] Next, use Figure 19 The control processing of the electric converter 105 by the control device 20 based on the information stored in the table will be described.

[0198] Figure 19 This is a flowchart illustrating the control processing performed by the control device.

[0199] when Figure 19 At the start of the illustrated control process, the control device 20 determines in S41 whether there is an XY operation or a Z operation. An XY operation refers to an operation that moves the stage 103 in the XY direction. A Z operation refers to an operation that moves the microscope head 101 and / or the stage 103 in the Z direction.

[0200] If the determination result in S41 is "yes", the control device 20 resets all "JOG through Y / N" entries stored in the table in S42. Furthermore, resetting all "JOG through Y / N" entries also means setting all "JOG through Y / N" entries to "N". After S42, the process returns to S41.

[0201] On the other hand, if the determination result of S41 is "no", the control device 20 determines in S43 whether there is an operation (rotation operation) of the JOG dial 304. Furthermore, the processing in S43 is related to that in S11 (e.g., Figure 6 The processing of S11 is the same as that of S11.

[0202] If the determination result of S43 is "yes", the control device 20 obtains the position of the objective lens 106 currently positioned in the observation optical path in S44, and obtains the direction of operation (rotation direction of rotation operation) determined in S43 in S45. In addition, in this example, when the JOG dial 304 is rotated in the CCW direction, the electric converter 105 also rotates in the CCW direction, and when the JOG dial 304 is rotated in the CW direction, the electric converter 105 also rotates in the CW direction.

[0203] Next, in S46, the control device 20 refers to a table to determine whether the "JOG operation Y / N" corresponding to the position of the objective lens 106 obtained in S44 and the direction of the operation obtained in S45 is "Y". For example, in Figure 18 In the table shown, if the position of the objective lens 106 (also the "current OB position") obtained in S44 is "OB1" and the rotation direction of the electric converter 105 corresponding to the operation direction obtained in S45 is "CCW", the corresponding "JOG operation Y / N" is "Y", so the determination result of S46 is "Yes".

[0204] If the determination result of S46 is "yes", the control device 20 switches to observation mode. In S47, a drive instruction is given to the motorized converter 105 according to the operation direction obtained in S45. This drive instruction is used to rotate the motorized converter 105 in the direction corresponding to the operation direction obtained in S45, thereby switching the objective lens 106 arranged in the observation optical path to the adjacent objective lens 106. After S47, the process returns to S41.

[0205] If the determination result of S46 is "yes", it can be known that during the switching process of objective lens 106, objective lens 106 will not interfere with stage 103 or sample S, so objective lens 106 can be switched quickly.

[0206] On the other hand, if the determination result of S46 is "No" (the corresponding "JOG operation Y / N" is "N"), the control device 20 switches to JOG mode, and processing proceeds to S49. The processing of S48 to S52, including S49, is related to... Figure 6 The processing of S11 to S15 is the same, therefore its explanation is omitted here. Additionally, Figure 6 The processing of steps S11 to S15 is part of the JOG mode processing described in the second embodiment.

[0207] If the determination result of S46 is "no", the JOG mode processing described in the second embodiment is performed, and thus the same effect as the second embodiment can be obtained.

[0208] Then, after S52, the control device 20 determines in S53 whether the position of the objective lens 106 currently positioned on the observation optical path is the "target OB position" in the table. The "target OB position" at this time is the "target OB position" when the position obtained in S44 is set as the "current OB position". For example, in... Figure 16 In the illustrated table, if the position obtained in S44 is "OB1", the "target OB position" is either "OB2" or "OB4".

[0209] If the determination result of S53 is "yes", the control device 20 sets "Y" to the corresponding "JOG pass Y / N" in the table in S54. The corresponding "JOG pass Y / N" in the table refers to the "JOG pass Y / N" regarding the "passing interval" when the position obtained in S44 is set as the "current OB position" and the position of the objective lens 106 currently positioned on the observation optical path is set as the "target OB position". For example, in Figure 16 In the illustrated table, when the position obtained in S44 is "OB1" and the position of the objective lens 106 currently positioned in the observation optical path is "OB2", the "passage interval" is interval "A". In this case, as... Figure 18 As illustrated, the corresponding "JOG through Y / N" setting for the interval "A" is set to "Y". Therefore, as long as no XY or Z operation is performed, switching of the objective lens 106 involving this "through interval" can be performed quickly.

[0210] After S54, or if the determination result of S53 is "no", the process returns to S41. In addition, the case where the determination result of S53 is "no" means, for example, after the switching of objective lens 106 begins but before switching to an adjacent objective lens 106, the process returns to the original objective lens 106.

Claims

1. A microscope system for observing samples using a microscope, characterized in that, The microscope system includes: An electrically operated converter that holds multiple objectives and is capable of switching the objectives configured in the observation optical path by rotation; and A control device that controls the drive of the electric converter based on the input drive instruction. The control device includes a switchable mode for controlling the drive of the electric converter, comprising: In the first mode, according to the drive instruction, the electric converter is rotated by a first rotation amount corresponding to the drive instruction, thereby switching the objective lens configured in the observation optical path; as well as In the second mode, according to the drive instruction, the electric converter is rotated by a second amount of rotation, which is less than the first amount of rotation.

2. The microscope system according to claim 1, characterized in that, The control device switches between the first mode and the second mode according to the input mode switching instruction.

3. The microscope system according to claim 1, characterized in that, The microscope system has a dial-type operating component that accepts input from the drive instructions. When switched to the second mode, the control device rotates the electric converter according to the rotation operation of the dial-type operating component.

4. The microscope system according to claim 1, characterized in that, The microscope system has two magnification change direction indicating components that accept the input of the drive instruction. When switched to the first mode, the control device switches the objective lens arranged in the observation optical path according to the operation of either of the two magnification change direction indicator components.

5. The microscope system according to claim 1, characterized in that, The microscope system includes a sensor to detect whether the objective lens is positioned in the observation optical path. When switched to the second mode, the control device stops the drive of the electric converter when the sensor detects that the objective lens is arranged in the observation optical path during the rotation of the electric converter.

6. The microscope system according to claim 1, characterized in that, The microscope system has a dial-type operating component that accepts input from the drive instructions. When switched to the first mode, the control device switches the objective lens configured on the observation optical path according to the rotation direction of the dial-type operating component. When switched to the second mode, the control device rotates the electric converter according to the rotation operation of the dial-type operating component.

7. The microscope system according to claim 1, characterized in that, The microscope has a tilting mechanism that allows the optical axis of the objective lens disposed in the observation optical path to be tilted relative to an axis perpendicular to the sample mounting surface. In the presence of the tilt, the control device switches to the second mode.

8. The microscope system according to any one of claims 1 to 7, characterized in that, The electric converter is driven by a stepper motor.

9. A method for driving an electric converter, characterized in that, The computer performs the following processing: It accepts input of a drive instruction for a motorized converter, which holds multiple objectives and is capable of switching the objectives configured in the observation optical path by rotation. When switched to the first mode, the motorized converter rotates by a first rotation amount corresponding to the input drive instruction, thereby switching the objective lens configured in the observation optical path. When switched to the second mode, the electric converter rotates by a second amount of rotation according to the input drive instruction. Wherein, the second rotation amount is less than the first rotation amount.

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