IPOS microsecond pulse output optimization method based on primary side short circuit control

Abstract

The invention relates to a high-voltage microsecond pulse power supply, and provides an IPOS microsecond pulse output optimization method based on primary side short circuit control, which is characterized in that a short circuit switch is connected in parallel with the primary side of each transformer, during normal working, the short circuit switch is switched off, high-frequency pulse current is introduced into the primary side, induced voltage is generated on the secondary side through electromagnetic induction, and the primary side is switched off; energy is transmitted to a load; and when the short-circuit switch is closed, the primary side is clamped to a low potential and is approximate to a short-circuit state, the primary side current only flows through the short-circuit switch, the induced voltage is approximately equal to 0, and the module stops outputting energy to the load. According to the invention, the primary side of the transformer, which does not participate in energy output at a specific moment, is short-circuited by using power devices such as an IGBT, and coupling paths of stray parameters such as leakage inductance and distributed capacitance are cut off from an energy transfer source, so that the problem of voltage oscillation caused by LC resonance formed by leakage inductance accumulation and load capacitance in an IPOS architecture can be more thoroughly solved, and the stability of output voltage is improved.

Description

Technical Field

[0001] This invention relates to high-voltage microsecond pulse power supplies, and more particularly to an IPOS microsecond pulse output optimization method based on primary-side short-circuit control. Background Technology

[0002] The IPOS architecture is an important component of high-voltage microsecond pulse power supplies. Its input side has multiple modules connected in parallel to the DC voltage after AC-DC rectification, and the output side modules are connected in series to increase the voltage level, providing high-voltage pulse power for plasma loads.

[0003] The core components of the IPOS architecture include: an AC-DC rectifier module (providing adjustable DC voltage), a PWM signal generation unit (controlling the switching timing of the modules), multiple microsecond pulse power modules (including high-voltage transformers and switching transistors), and an output series connection unit. The PWM signal controls the operation of the switching transistors within the module, causing the transformer to store and discharge energy. After being connected in series on the output side, the pulse power duration is N times that of a single module (where N is the number of modules), which can reduce the size and increase the power density for the same power.

[0004] While the IPOS architecture breaks through traditional limitations, current power supplies of this type still face numerous unresolved issues regarding output voltage performance, severely restricting their further application in scenarios requiring high precision and reliability. When the number of modules changes or the load fluctuates, the stability of the power supply's output voltage is poor, often exhibiting significant fluctuations. These fluctuations directly affect the stable generation of plasma, leading to instability in key parameters such as plasma density and active particle concentration, thus impacting the consistency of processing results. Furthermore, when multiple modules work collaboratively, insufficient consistency in the output voltage of each module results in poor overall output voltage uniformity. In scenarios such as large-area material processing or batch sterilization, this can easily lead to localized over- or under-processing, reducing the reliability of the application.

[0005] In-depth analysis reveals that parasitic parameters of the IPOS system significantly impact output voltage quality. Leakage inductance and parasitic capacitance cause voltage waveform distortion, leading to phenomena such as overshoot and oscillation, resulting in a substantial reduction in voltage accuracy and making it difficult to meet the stringent requirements of precision machining and other applications. Under complex operating conditions, such as in industrial environments with strong electromagnetic interference, the output voltage lacks robustness and is susceptible to abnormal fluctuations due to external interference, potentially even causing discharge interruptions. Furthermore, in special application scenarios such as module bending, changes in the electric field distribution caused by electrode deformation further complicate the stability and reliability of the output voltage. Different degrees of bending can further amplify voltage fluctuations, posing significant challenges to practical applications.

[0006] During long-term operation, uneven voltage distribution among modules may lead to local overvoltage phenomena. This not only accelerates the aging of insulation materials and the wear and tear of devices, shortening the service life of the equipment, but may also bring safety hazards, such as insulation breakdown and spark discharge, threatening the safety of operators and equipment. At the same time, these voltage problems also make it difficult for IPOS power supplies to fully utilize their power advantages in some fields with extremely high requirements for voltage accuracy and stability, such as precision sterilization in biomedicine and fine etching of microelectronic materials. Summary of the Invention

[0007] 1. The technical problem to be solved:

[0008] How to optimize from the perspective of IPOS system architecture design to solve core issues such as output voltage stability, consistency, accuracy, robustness, and equipment safety, so as to ensure that the power supply output voltage remains stable, consistent, and accurate under various conditions such as changes in the number of modules, load fluctuations, complex operating conditions, and long-term operation, and that the equipment can operate safely and reliably.

[0009] 2. Technical Solution:

[0010] To address the above issues, this invention provides an IPOS microsecond pulse output optimization method based on primary-side short-circuit control. The IPOS high-voltage microsecond pulse power supply includes multiple power modules and a series output connection unit. A short-circuit switch Q is connected in parallel on the primary side of each transformer. Active control of energy transfer is achieved by opening and closing the short-circuit switch Q. Under normal operation, the short-circuit switch Q is open, and a high-frequency pulse current flows through the primary side. An induced voltage is generated on the secondary side through electromagnetic induction, and energy is transferred to the load. When the short-circuit switch Q is closed, the primary side is clamped to a low potential, approximating a short-circuit state. At this time, the primary current only flows through Q, the induced voltage is approximately 0, and the module stops outputting energy to the load.

[0011] Multiple power modules output sequentially and individually, with only one power module working at a time, while the short-circuit switch Q on the primary side of the transformer of the other power modules is closed.

[0012] The IGBT switching module is connected in parallel to the primary winding of the transformer, and the short-circuit switch Q is opened / closed by the gate signal.

[0013] The IGBT switching module is a high-frequency withstand voltage type IGBT.

[0014] It also includes a pump-up circuit unit, an optocoupler isolation unit, and a drive circuit module. The optocoupler isolation unit receives a low-voltage control signal at its input and drives subsequent circuits at its output. The drive circuit module integrates a dedicated IGBT driver chip to amplify the weak signal output by the optocoupler. The pump-up circuit unit consists of a high-voltage capacitor and an ultra-fast recovery diode, which utilizes the high-frequency characteristics of the pulse signal to store instantaneous energy and provide additional drive current at the moment when the IGBT is turned on at high frequency.

[0015] The optocoupler isolation unit uses a high-speed optocoupler.

[0016] The drive circuit module amplifies the weak signal output by the optocoupler into a drive signal with ±15V and a peak current ≥2A.

[0017] The high-voltage capacitor of the pumping circuit unit is rated at 10nF / 50V.

[0018] The reverse withstand voltage of the fast recovery diode is ≥100V.

[0019] 3. Beneficial effects:

[0020] This invention addresses the problems of voltage oscillation, voltage attenuation, and poor consistency in pulse power supplies during practical applications. It optimizes the output voltage of high-voltage microsecond pulse power supplies in IPOS system architectures, precisely controlling the primary-side short-circuit timing and duration to meet the high-frequency, fast-response requirements of microsecond-level pulse power supplies. By actively short-circuiting the primary side of the transformer, stray parameter coupling paths are severed at the energy transfer source. Through a phase-short-circuit coordinated control strategy, multiple modules operate at staggered times, with only one module in an effective output state at a time, while other modules are "isolated" through primary-side short-circuiting, thus avoiding interference caused by phase differences. Simultaneously, stray parameters are decoupled by short-circuiting the primary side of stray parameter-sensitive modules, cutting off stray parameter coupling paths and suppressing high-frequency resonance and waveform distortion. Timing coordination ensures that IPOS modules output sequentially and individually, avoiding phase difference energy cancellation, fundamentally solving the voltage amplitude and efficiency problems of series architectures. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of a short circuit on the primary side of the transformer of the present invention.

[0022] Figure 2 This is a schematic diagram of the control principle when the short-circuit switch is open.

[0023] Figure 3 This is a schematic diagram of the control principle when the short-circuit switch is closed.

[0024] Figure 4 This is the equivalent diagram of the three-module IPOS module.

[0025] Figure 5This is a timing diagram for short-circuit optimization of the three-module IPOS.

[0026] Figure 6 This is a flowchart of the transformer primary-side short-circuit control strategy.

[0027] Figure 7 It is the topology of the transformer primary-side short-circuit control strategy.

[0028] Figure 8 This is the output waveform diagram of the primary-side short-circuit control.

[0029] Figure 9 This is the output waveform diagram of the dual-module microsecond primary-side short-circuit control.

[0030] Figure 10 This is a schematic diagram of the microsecond output voltage of a traditional IPOS three-module circuit. Detailed Implementation

[0031] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0032] In IPOS architecture high-voltage microsecond pulse power supplies, parasitic parameter coupling during multi-module collaborative operation is the core bottleneck restricting output performance. In the IPOS architecture, output series connection leads to leakage inductance accumulation, forming LC resonance with the load capacitor, resulting in severe energy loss. The output voltage amplitude is only 70%~80% of the theoretical value, and the phase difference at high frequencies exacerbates energy cancellation. Traditional solutions suppress parasitic parameters through passive filtering (such as adding buffer capacitors), but this cannot completely eliminate the coupling problem and introduces new energy losses. Therefore, this invention proposes an active transformer primary-side short-circuit control strategy to cut off the parasitic parameter coupling path at the energy transfer source. The specific method is as follows: Figure 1 As shown, the IPOS high-voltage microsecond pulse power supply includes multiple power modules and series output connection units. A short-circuit switch Q is connected in parallel on the primary side of each transformer. Active control of energy transmission is achieved by switching the short-circuit switch Q on and off.

[0033] During normal operation, the short-circuit switch Q is open, such as... Figure 2 As shown, a high-frequency pulse current I is applied to the primary side. p An induced voltage is generated on the secondary side through electromagnetic induction. Energy is successfully transferred to the load; and when the short-circuit switch Q is closed, as... Figure 3 As shown, the primary side is clamped to a low potential, approximately in a short-circuit state. At this time, the primary side current I... p When only Q flows through, the magnetomotive force balance on the secondary side is disrupted, inducing a voltage. When the value is approximately 0, the module stops outputting energy to the load. This process allows the module's parasitic parameters, such as the primary-side leakage inductance Lleak_pri and the secondary-side distributed capacitance Cpa_sec, to disconnect from the main circuit and no longer interfere with other modules. The innovation of this strategy lies in breaking through the traditional passive filtering approach, shifting from "passive suppression" to "active cut-off," directly blocking the energy coupling path of parasitic parameters by short-circuiting the primary side.

[0034] In one embodiment, there are three power modules, such as Figure 4 As shown, when the short-circuit switch Q of one power module is open, an induced voltage is generated on the secondary side. When the short-circuit switches Q of the other two power modules are closed, an induced voltage is generated on the secondary side. ≈0, the module stops outputting energy to the load.

[0035] In one embodiment, time-sharing short-circuit control is employed, with multiple modules outputting sequentially and individually, one module operating at a time, while the remaining modules are "isolated" through primary-side short circuits. For example... Figure 5 As shown, with three modules, the first power module operates during the t0-t1 period, while the second and third power modules are short-circuited; during the t1-t2 period, the second power module operates, while the first and third power modules are short-circuited, and so on. Voltage superposition is achieved through the load energy storage effect, avoiding energy cancellation caused by phase differences.

[0036] In one embodiment, the IGBT switching module is connected in parallel to the primary winding of the transformer, and the short-circuit switch Q is opened / closed by the gate signal.

[0037] In one embodiment, the primary-side short-circuit topology proposed in this invention is specifically designed for optimizing the output voltage of high-voltage microsecond pulse power supplies in IPOS system architectures. Through modular integration of core functional units, it forms a hardware carrier that balances high efficiency and high reliability. The topology is as follows: Figure 6 The topology includes a pump-up circuit unit, an optocoupler isolation unit, a drive circuit module, and an IGBT switching module. The topology uses the IGBT switching module as the execution core, the optocoupler as the isolation barrier, and the pump-up circuit as the drive guarantee.

[0038] like Figure 7As shown, the IGBT switching module, acting as the primary-side short-circuit actuator, is connected in parallel to the primary winding of the transformer. It controls the on / off state via gate signals, enabling rapid short-circuiting and release of the primary circuit, directly responding to the timing requirements of the short-circuit control strategy. The optocoupler isolation unit employs a high-speed optocoupler. Its input receives the low-voltage control signal, and its output drives subsequent circuits, completely blocking the electrical connection between the high-voltage power side (primary / secondary) and the low-voltage control side. This prevents high-voltage spikes or electromagnetic interference from entering the control circuit, providing a safety barrier for the accurate transmission of short-circuit commands. The drive circuit module integrates a dedicated IGBT driver chip, amplifying the weak signal output from the optocoupler to ensure rapid charging and discharging of the IGBT's gate charge during high-frequency switching, reducing switching losses. The pump-up circuit unit, composed of a high-voltage capacitor and an ultra-fast recovery diode, utilizes the high-frequency characteristics of the pulse signal to store instantaneous energy, providing additional drive current at the moment of IGBT high-frequency turn-on. This solves the problem of insufficient drive capability of the low-voltage control power supply at high frequencies, ensuring consistent short-circuit operation.

[0039] In one embodiment, the IGBT switching module is a high-frequency withstand voltage type IGBT.

[0040] In one embodiment, the optocoupler isolation unit employs a high-speed optocoupler.

[0041] In one embodiment, the drive circuit module amplifies the weak signal output by the optocoupler into a drive signal with ±15V and a peak current ≥2A.

[0042] In one embodiment, the high-voltage capacitor of the pumping circuit unit is rated at 10nF / 50V.

[0043] In one embodiment, the reverse withstand voltage of the fast recovery diode is ≥100V.

[0044] By integrating isolation, driving, and execution functions into a modular unit, the complex wiring and signal delays caused by decentralized design are avoided. The circuit size is reduced by 30% compared to traditional solutions, making it suitable for the compact layout requirements of high-voltage power supplies.

[0045] The feasibility of this invention will be analyzed and simulated below.

[0046] By short-circuiting the primary side of the IGBT module that does not participate in the output, the magnetic coupling between its leakage inductance and other modules, as well as the shunt path between the distributed capacitance and the load, can be cut off, suppressing resonance at its source. Theoretically, the induced voltage on the secondary side of the module approaches zero under short-circuit conditions, and its impact on the series circuit is negligible. The three power modules operate in a time-sharing manner, avoiding energy superposition conflicts caused by phase differences. According to the law of electromagnetic induction, the total voltage of the series circuit is the output voltage of the currently operating module, and the superposition effect is stable without reverse cancellation. The selected SiC IGBT has a switching speed much smaller than the microsecond-level pulse period (1~10μs), which can accurately match the timing requirements of the time-sharing control, ensuring that the short-circuit action is synchronized with the pulse period.

[0047] In Saber software, a comparison was made between single-module and dual-module IPOS structures. The input side consists of two modules connected in parallel to a DC power supply Ubus (Ubus = 10V). In each module, Vg1 and Vg2 are the drive pulse sources controlling two ideal MOSFETs. The parameters of v_pulse1 and v_pulse2 are set as follows: initial = 0V, pulse amplitude = 15V, rise time tr = 10ns, fall time tf = 10ns, pulse width = 85us, and period = 1kHz. v_pulse2 is also set with a 500us delay. This drive pulse delay causes the output voltages of the two modules to interleave in the time domain, achieving equivalent frequency superposition on the load side. The transformer section consists of two transformers, xfrnl2, with a primary winding turn count of np=50 and a secondary winding turn count of ns=1500. The primary inductance is rp=250uH, and the secondary inductance is rs=110mH. The core cross-sectional area is area=6e-5m², and the core magnetic circuit length is len_fe=3e-2m. A 100pF capacitor is connected in series on the secondary windings of the two transformers on the output side as the load.

[0048] Run a transient simulation and set appropriate simulation time and step size. Observe the output voltage Uo. You will find that due to the accumulation of transformer leakage inductance, LC resonance is formed with the load capacitance, causing the output voltage to oscillate and the voltage amplitude to be unstable, making it difficult to reach the theoretically expected output value.

[0049] Comparing the outputs of single-module and dual-module IPOS, the dual-module IPOS structure has twice the output voltage frequency of the single-module microsecond structure, but the output voltage amplitude is lower, differing by approximately 300V. The total leakage inductance (L) of the dual-module IPOS is also shown. tot =2×L k ) and the load capacitance C form an LC resonance ( This leads to energy loss and voltage drop; parasitic parameters such as transformer distributed capacitance and MOSFET on-state voltage drop further weaken the output amplitude. To solve this problem, a dedicated primary-side short-circuit topology for IPOS is added to the traditional IPOS architecture. Using power devices such as IGBTs, the primary side of the transformer, which does not participate in energy output at certain times, is actively short-circuited. This prevents the secondary side from properly sensing electrical energy due to magnetomotive force imbalance, thus cutting off the coupling path of stray parameters (leakage inductance, distributed capacitance, etc.) at the source and optimizing the output voltage of the microsecond pulse power supply.

[0050] To achieve primary-side short-circuit control, IGBTs and diodes are connected in parallel on the primary side of each transformer. Drive isolation is constructed through optocoupler + pump-up circuit. A new pulse source is added to define the short-circuit trigger timing (out of phase with the main drive by 500μs, pulse width 300ns, such as when module 1 is working, the primary side of module 2 is short-circuited).

[0051] In the Saber simulation, the primary side of the second power module is first short-circuited: when the first power module is working and the primary side of the second power module is short-circuited, the induced voltage on the secondary side of the second power module approaches zero due to the short circuit, and will not interfere with the output voltage. At this time, the output voltage Uo should be mainly determined by the output of the first power module, and the output waveform is relatively stable, such as... Figure 8 As shown, there will be no voltage oscillations or energy cancellation caused by resonance between the leakage inductance of the second power module and the load capacitor, or by phase differences between modules. The primary voltage Upri1 and secondary voltage Usec1 of the first power module should exhibit normal operating waveforms, while the primary voltage Upri2 of the second power module should be close to 0V during short circuits.

[0052] The optimized first power module output voltage (5354V) differs from the single module output voltage (5377V) by about 20V; the optimized first power module output voltage (5354V) is about 260V higher than the unimproved (5089V), which is a significant improvement.

[0053] In a dual-module IPOS circuit, when the first power module is operating and the primary side of the second power module is short-circuited, the induced voltage on the secondary side of the second power module approaches zero due to the short circuit. The output voltage U0 is then output independently by the first power module. Ideally, the output amplitude is equal to the microseconds of a single module. However, in reality, due to leakage inductance, distributed capacitance, and device voltage drops, there will be small oscillations (resonance between leakage inductance and load capacitance), leading-edge / tail-edge distortion, and a slight DC bias. For example... Figure 9 As shown, the waveform verifies that a primary-side short circuit can cut off the energy interference of the second power module, allowing the output to be dominated by a single module. Single-module resonance is easier to optimize, providing a basic support for the time-sharing short-circuit strategy.

[0054] To further verify feasibility, both the first and second power modules were short-circuited on their primary sides in the Saber simulation, with the circuit parameters and drive pulses set accordingly. In the Saber simulation, the dual-module IPOS was controlled by shorting the second power module while the first power module was operating, and vice versa. The core principle was to use time-sharing short circuits to allow the two modules to operate alternately. When the first power module was operating, it triggered a primary-side short circuit in the second power module; conversely, when the second power module was operating, it triggered a primary-side short circuit in the first power module. This made the output voltage U0 a superimposed high-frequency pulse from the time-sharing outputs of the two modules, while simultaneously avoiding leakage inductance resonance and energy cancellation.

[0055] The improved dual-drive topology (5333V) differs from the single-module output voltage (5377V) by about 50V; it is about 240V higher than the unimproved one (5089V).

[0056] In summary, the transformer primary-side short-circuit control strategy demonstrates clear feasibility for IPOS architecture. Theoretically, this strategy actively short-circuits the transformer primary side (which does not participate in energy output) using power devices such as IGBTs, fundamentally cutting off the coupling paths of stray parameters such as leakage inductance and distributed capacitance. This resolves the LC resonance caused by leakage inductance accumulation and the energy cancellation problem caused by phase differences between modules. The time-division short-circuit control allows modules to output sequentially and individually, achieving stable voltage superposition through load energy storage effects. Furthermore, the fast switching characteristics of SiC IGBTs can precisely match microsecond-level pulse timing requirements.

[0057] Saber simulation results further validated its effectiveness: when a single module is working, short-circuiting the primary side of the other module results in the output voltage being mainly determined by the working module, with stable waveform and significantly reduced oscillation and energy cancellation phenomena. The optimized output voltage has a small difference from the single-module output (approximately 20V), which is significantly higher than the unimproved solution (approximately 260V). By implementing primary-side short-circuit control for both modules and alternating their operation in a time-sharing manner, the output voltage is a superimposed high-frequency pulse of the time-sharing outputs of the two modules, effectively avoiding resonance and energy cancellation. The improved dual-drive topology output voltage is approximately 240V higher than the unimproved solution, and the difference from the single-module output is controllable (approximately 50V).

[0058] In summary, the transformer primary-side short-circuit control strategy can effectively optimize the output voltage performance and efficiency of the IPOS architecture high-voltage microsecond pulse power supply in both theoretical logic and simulation verification, providing reliable support for its promotion in high-precision plasma applications and other scenarios.

[0059] The effectiveness of the transformer primary-side short-circuit control strategy is verified using the following IPOS system consisting of three modules (inputs in parallel, outputs in series).

[0060] In the experiment of a three-module IPOS (input parallel - output series) architecture with a "hardware topology without primary-side short circuit", the measured output voltage results are as follows: Figure 10 The figure shows key benchmark comparison data when subsequently connecting a short-circuit protection topology. The experimental conditions included a three-module IPOS architecture (parallel input, series output), without introducing any primary-side short-circuit protection hardware. All modules operated in normal mode, with a 100pF capacitor as the load and a 10V DC input. Under these conditions, the steady-state output voltage exhibited a certain range. In terms of dynamic response, due to the fixed 100pF load (no sudden changes), the output voltage remained stable without significant overshoot or drop. This output voltage represents the benchmark value for normal operation of the IPOS architecture. When subsequently connecting a primary-side short-circuit hardware topology (or simulating a primary-side short circuit), comparing the changes in output voltage can verify the impact of the short-circuit control strategy on system output stability and determine whether the protection topology will interfere with normal operation.

[0061] In an IPOS architecture, a three-module system without primary-side short-circuit hardware topology exhibits a significant output voltage consistency issue. Experimental data shows that without short-circuit optimization, the output voltages of each module are unbalanced, specifically exhibiting a pattern of "second power module >> first power module > third power module." This means the output voltage of the second power module is significantly higher than that of the first power module, which in turn is higher than the third power module, and the voltage difference between the second power module and the other modules is substantial.

[0062] In terms of total output voltage, the total output voltage of the system in this state is between 1.30kV and 1.5kV. However, due to the imbalance in voltage distribution among the modules, this unbalanced output will affect the overall stability of the system and the uniformity of power supply to the load, which may lead to voltage fluctuations or local overvoltage at the load end, which is not conducive to the reliable operation of the system.

[0063] After incorporating a primary-side short-circuit hardware topology into the three-module IPOS architecture, the experiment focused on the interaction of short-circuit drive signals between modules and the output voltage characteristics.

[0064] When the first power module or other power modules are working, interference from transformer stray parameters can be avoided. Since the first power module will short-circuit the transformers of the second and third power modules by the corresponding signals when it is working, the first power module is taken as the main object of observation.

[0065] After connecting the primary-side short-circuit hardware topology (i.e., short-circuit optimization), the output voltage of the IPOS system exhibits specific changes: the output voltage of the first power module increases significantly, by about 300V compared to when it was not connected; the output voltages of the second and third power modules also increase; and the total output voltage rises accordingly.

[0066] Furthermore, through comparative experiments on short-circuit topology switching, the first power module is not affected by the second and third power modules when it is working; however, since the first power module is not connected to the primary side short-circuit hardware topology, the second power module is only unaffected by the third power module when it is working, and the electric power module is only unaffected by the second power module when it is working. That is, the stray parameters of the first power module will affect the working state of the second and third power modules.

[0067] Overall, the output voltage level of the three-module IPOS was improved after the primary-side short-circuit hardware topology was adopted.

Claims

1. A method for optimizing the output of IPOS microsecond pulses based on primary-side short-circuit control, wherein the IPOS high-voltage microsecond pulse power supply includes multiple power modules and a series output connection unit, characterized in that; A short-circuit switch Q is connected in parallel with the primary side of each transformer. The active control of energy transfer is achieved by opening and closing the short-circuit switch Q. Under normal operation, the short-circuit switch Q is open, and a high-frequency pulse current is passed through the primary side. An induced voltage is generated on the secondary side through electromagnetic induction, and energy is transferred to the load. When the short-circuit switch Q is closed, the primary side is clamped to a low potential, which is close to a short circuit. At this time, the primary side current only flows through Q, the induced voltage is ≈0, and the module stops outputting energy to the load.

2. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 1, characterized in that; Multiple power modules output sequentially and individually, with only one power module working at a time, while the short-circuit switch Q on the primary side of the transformer of the remaining power modules is closed.

3. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 1, characterized in that; The IGBT switching module is connected in parallel to the primary winding of the transformer, and the short-circuit switch Q is opened / closed by the gate signal.

4. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 3, characterized in that; The IGBT switching module is a high-frequency withstand voltage type IGBT.

5. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 3 or 4, characterized in that; It also includes a pump-up circuit unit, an optocoupler isolation unit, and a drive circuit module. The optocoupler isolation unit receives a low-voltage control signal at its input and drives subsequent circuits at its output. The drive circuit module integrates a dedicated IGBT driver chip to amplify the weak signal output by the optocoupler. The pump-up circuit unit consists of a high-voltage capacitor and an ultra-fast recovery diode, which utilizes the high-frequency characteristics of the pulse signal to store instantaneous energy and provide additional drive current at the moment when the IGBT is turned on at high frequency.

6. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 5, characterized in that; The optocoupler isolation unit uses a high-speed optocoupler.

7. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 5, characterized in that; The drive circuit module amplifies the weak signal output by the optocoupler into a drive signal with ±15V and a peak current ≥2A.

8. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 5, characterized in that; The high-voltage capacitor of the pumping circuit unit is rated at 10nF / 50V.

9. The IPOS microsecond pulse output optimization method based on primary-side short-circuit control as described in claim 5, characterized in that; The reverse withstand voltage of the fast recovery diode is ≥100V.

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