Lead frame storage box

Abstract

The invention provides a lead frame storage material box which is not easy to accumulate foreign matters. The lead frame storage cartridge includes a cartridge body, a groove, a plurality of air outlets, an air supply port, and an air pipe. The grooves extend in the depth direction of the material box body, and a plurality of layers of grooves are formed in the two side faces of the material box body respectively. The grooves of each layer hold both ends of the lead frame, so that the lead frame is accommodated in the inner space of the magazine main body. A plurality of air outlets are provided along the groove inside the groove and eject air toward the inside of the cartridge body. The air supply port is provided on the outer surface of the cartridge main body and supplies air to the plurality of air outlets. The air pipe connects the air supply port and the plurality of air outlets.

Description

Technical Field

[0001] This disclosure relates to a lead frame storage box. Background Technology

[0002] In semiconductor devices, lead frames are provided as terminals that can be connected to external devices (see, for example, Patent Document 1). During the manufacturing process of the semiconductor device, the lead frames are housed in a cassette and exchanged between the cassette and a transport device. For example, the lead frames are loaded from the cassette to the transport device, or unloaded from the transport device to the cassette.

[0003] Existing technical documents Patent documents Patent Document 1: Japanese Patent Application Publication No. 05-109961 Summary of the Invention

[0004] The material box has a slot for storing lead frames, but foreign objects easily accumulate in this slot. When lead frames are loaded or unloaded with such foreign objects adhering to the slot, various defects such as reduced yield in the semiconductor device manufacturing process can occur.

[0005] The purpose of this disclosure is to solve the above-mentioned technical problems and to provide a lead frame storage box that makes it difficult for foreign objects to accumulate.

[0006] The lead frame receiving box disclosed herein includes a box body, a groove, multiple air outlets, an air supply port, and an air pipe. The groove extends along the depth of the box body and has multiple layers on both sides of the box body. Each layer of the groove holds both ends of the lead frame and houses the lead frame within the inner space of the box body. Multiple air outlets are located along the groove at its inner edge and spray air towards the inner side of the box body. The air supply port is located on the outer surface of the box body and supplies air to the multiple air outlets. The air pipe connects the air supply port to the multiple air outlets.

[0007] According to this disclosure, a lead frame storage box is provided that prevents foreign objects from accumulating.

[0008] The purpose, features, situation, and advantages of this disclosure will become clearer from the following detailed description and accompanying drawings. Attached Figure Description

[0009] Figure 1 This is a diagram showing the structure of the lead frame storage box according to Embodiment 1.

[0010] Figure 2 This is a cross-sectional view showing the internal structure of the lead frame storage box.

[0011] Figure 3This is a cross-sectional view showing the internal structure of the lead frame storage box.

[0012] Figure 4 This is an enlarged view showing the structure of the air outlet.

[0013] Figure 5 This is a cross-sectional view showing the structure of the lead frame storage box of a modified embodiment 1.

[0014] Figure 6 This is a diagram showing the structure of the lead frame storage box according to Embodiment 2.

[0015] Figure 7 This is a cross-sectional view showing the internal structure of the lead frame storage box.

[0016] Figure 8 This is a diagram showing the structure of the lead frame storage box according to embodiment 3.

[0017] Figure 9 This is a cross-sectional view showing the internal structure of the lead frame storage box.

[0018] Figure 10 This is an enlarged view showing the structure of the air outlet.

[0019] Figure 11 This diagram shows the structure of a clamp that can be attached to and detached from the storage section of the main body of the material box.

[0020] Figure 12 This is a front view showing the structure of a lead frame storage box with clamps installed.

[0021] Figure 13 This is a cross-sectional view showing the internal structure of the lead frame storage box with clamps installed.

[0022] Figure 14 This is a cross-sectional view showing the internal structure of the lead frame storage box in a modified embodiment 3. Detailed Implementation

[0023] <Implementation Method 1> Figure 1 This is a diagram showing the structure of the lead frame storage box 101 according to Embodiment 1. Figure 1 of (a) Figure 1 (b) and Figure 1 (c) shows the top view, front view and side view of the lead frame storage box 101, respectively. Figure 2 This is a cross-sectional view showing the internal structure of the lead frame storage box 101, and showing along... Figure 1 The cross-sectional structure of A-A' shown in (b). Figure 3This is a cross-sectional view showing the internal structure of the lead frame storage box 101, and showing along... Figure 1 The cross-sectional structure of B-B' shown in (b).

[0024] The lead frame storage box 101 consists of a box body 1, a groove 2, multiple air outlets 3, an air jet insertion port 4 as an air supply port, an air pipe 5, and a partition groove 6.

[0025] The cartridge body 1 has a generally rectangular shape formed by a top surface, a bottom surface, and two side surfaces, and has an opening on the front surface in the depth direction. The two side surfaces of the cartridge body 1 are formed by side panels 1A. The cartridge body 1 can house a lead frame (not shown) in a storage section 1B inside the cartridge body 1, which is the space enclosed by the top surface, bottom surface, and two side surfaces of the cartridge body 1. The lead frame can be housed in the storage section 1B or removed from the storage section 1B via an opening on the front of the cartridge body 1. In other words, the opening of the cartridge body 1 is the entrance and exit point for the lead frame.

[0026] The groove 2 has multiple layers on both sides of the material box body 1 and extends along the depth direction of the material box body 1. The lead frame slides along the groove 2 and is inserted into the storage part 1B. That is, each layer of the groove 2 holds both ends of the lead frame, so that the lead frame is stored in the storage part 1B of the material box body 1. In the lead frame storage box 101 of Embodiment 1, multiple layers of groove 2 are formed, and the lead frame is held in each layer of groove 2.

[0027] like Figure 2 As shown, multiple air outlets 3 are arranged at fixed intervals along the inside of the groove 2. The air outlets 3 spray air towards the inside of the material box body 1. Figure 4 This is an enlarged view showing the structure of the air outlet 3. Figure 4 (a) shows along Figure 2 The C-C' cut shown is the structure of the end face. Figure 4 (b) shows the structure of the side of the air outlet 3. In Embodiment 1, the air outlet 3 faces the inside of the material box body 1 along the width direction of the material box body 1, which is orthogonal to the depth direction of the material box body 1.

[0028] The air injection inlet 4, serving as an air supply port, is the starting point for air supply to the material box body 1 and supplies air to the air outlet 3. The air injection inlet 4 is also a connection port for connecting an air jetting machine, which injects compressed air into the air injection inlet 4. However, any machine capable of supplying air is acceptable, and the air injection inlet 4 is not limited to one. The air injection inlet 4 is located on the outer surface of the material box body 1. In Embodiment 1, two air injection inlets 4 are located on the upper surface of the material box body 1.

[0029] Air pipe 5 connects air jet inlet 4 to air outlet 3. For example... Figure 3 As shown, in Embodiment 1, the air pipe 5 is disposed inside the side panel 1A of the material box body 1. Air injected into the air jet insertion port 4 is delivered to the air outlet 3 via the air pipe 5.

[0030] The dividing groove 6 extends along the depth direction of the material box body 1 and is disposed at the center of the upper and lower surfaces of the material box body 1, respectively. The dividing plate 7 is a plate extending parallel to the depth direction and can be inserted into the dividing groove 6. In other words, the dividing plate 7 can be installed and removed relative to the dividing groove 6.

[0031] Next, the air cleaning method for the lead frame storage box 101 will be described. This air cleaning is performed before the lead frame storage box 101 is used in the semiconductor device manufacturing process.

[0032] First, an air jet generator is installed at the air jet inlet 4 of the material box body 1. Compressed air injected from the air jet generator into the air jet inlet 4 passes through the air pipe 5 and is delivered to each air outlet 3. Air is blown out from the air outlet 3 toward the inside of the material box body 1. The air shower impacts the entire tank 2, blowing away metal shavings and other foreign objects accumulated in the tank 2, thereby cleaning the tank 2 of the material box body 1.

[0033] Furthermore, during this air cleaning process, a separator plate 7 can also be installed in the separator groove 6. The separator plate 7 prevents foreign objects blown away from the groove 2 by the air from re-adhering to the groove 2 located on the opposite side. After air cleaning, with the separator plate 7 removed, the lead frame is stored in the groove 2, and the semiconductor device manufacturing process is performed.

[0034] In summary, the lead frame storage box 101 of Embodiment 1 includes a box body 1, a groove 2, multiple air outlets 3, an air injection inlet 4 serving as an air supply port, and an air pipe 5. The groove 2 extends along the depth of the box body 1 and has multiple layers on both sides of the box body 1. Each layer of the groove 2 holds both ends of the lead frame and stores the lead frame in the space inside the box body 1. Multiple air outlets 3 are provided along the groove 2 inside the groove 2 and spray air toward the inside of the box body 1. The air injection inlet 4 serving as an air supply port is provided on the outer surface of the box body 1 and supplies air to the multiple air outlets 3. The air pipe 5 connects the air injection inlet 4 serving as an air supply port to the air outlets 3.

[0035] In such a lead frame storage box 101, foreign matter is less likely to accumulate in the slot 2. Therefore, the yield of semiconductor devices manufactured using this lead frame storage box 101 is improved, and defects in the manufacturing process are less likely to occur, thereby improving productivity.

[0036] (A variation of Implementation Method 1) Figure 5 This is a cross-sectional view showing the structure of the lead frame receiving box 101A according to a modified embodiment 1. Multiple air outlets 3 are inclined towards the inside of the box body 1 in a direction perpendicular to the width direction orthogonal to the depth direction of the box body 1. In this modified embodiment, the air outlets 3 are inclined at 45 degrees relative to the width direction of the box body 1 within a plane defined by grooves 2 at the same height provided on both sides. Therefore, air is ejected from the air outlets 3 in this inclined direction.

[0037] Even with such a structure, the metal shavings and other foreign objects accumulated in the tank 2 are blown away by air, thereby cleaning the tank 2 of the material box body 1.

[0038] <Implementation Method 2> Figure 6 This is a diagram showing the structure of the lead frame storage box 102 according to Embodiment 2. Figure 6 of (a) Figure 6 (b) and Figure 6 (c) shows the top view, front view and side view of the lead frame storage box 102. Figure 7 This is a cross-sectional view showing the internal structure of the lead frame storage box 102, and showing along... Figure 6 (b) shows the cross section of D-D'.

[0039] like Figure 6 As shown in (c), the air injection inlet 4, which serves as an air supply port, is located at the center of the side of the material box body 1. Figure 7 As shown, the air pipe 5 is disposed inside the side panel 1A of the material box body 1. Similar to Embodiment 1, the air pipe 5 connects the air injection inlet 4 to the air outlet 3. The air pipe 5 has a piping structure corresponding to the position of the air injection inlet 4. Other structures are the same as those of the lead frame material box 101 in Embodiment 1.

[0040] In this lead frame storage box 102, compared to the lead frame storage box 101 of Embodiment 1, the longest distance between the air jet insertion port 4 and the air outlet 3 is reduced. Therefore, the air pressure at the air outlet 3 located at the end of the air pipe 5 is maintained. In other words, air pressure drop is prevented. As a result, foreign matter such as metal shavings accumulated in the groove 2 is efficiently blown away by the air jet.

[0041] <Implementation Method 3> Figure 8 This is a diagram showing the structure of the lead frame storage box 103 according to embodiment 3. Figure 8 of (a) Figure 8 (b) and Figure 8 (c) shows the top view, front view and side view of the lead frame storage box 103, respectively. Figure 9 This is a cross-sectional view showing the internal structure of the lead frame storage box 103, and showing along... Figure 8 (b) shows the E-E' section.

[0042] The lead frame storage box 103 consists of a box body 1, a groove 2, multiple air outlets 3, an air jet insertion port 4 as an air supply port, and an air pipe 5, but does not have a partition groove 6.

[0043] like Figure 9 As shown, air outlets 3 are arranged at fixed intervals along the groove 2. The air outlets 3 are positioned facing the inside of the material box body 1. Figure 10 This is an enlarged view showing the structure of the air outlet 3. Figure 10 (a) shows along Figure 9 The cut F-F' shown is the structure of the end face. Figure 10 (b) shows the structure of the side of the air outlet 3. In embodiment 3, the air outlet 3 is oriented at a 45-degree angle downward relative to the width direction of the material box body 1.

[0044] Figure 11 This is a diagram showing the structure of the clamp 10 that can be attached to and detached from the storage section 1B of the main body 1 of the material box. Figure 11 of (a) Figure 11 (b) and Figure 11 (c) shows the top view, front view and side view of the fixture 10, respectively.

[0045] The clamp 10 includes a frame 11, a guide 12, and a wall 13. The guide 12 is disposed on the side of the frame 11 and is a plate-shaped member extending in the depth direction. The guide 12 is configured to protrude inwards and downwards from the frame 11. When the clamp 10 is inserted into and installed into the receiving portion 1B of the cassette body 1, the guide 12 guides the air ejected from the multiple air outlets 3 in the downward direction. The guide 12 is positioned corresponding to each layer groove 2; details will be described later. The wall 13 is disposed at the center of the frame 11 in the width direction of the cassette body 1. The wall 13 extends in the depth direction.

[0046] Next, the air cleaning method for the lead frame storage box 103 will be described. This air cleaning is performed before the lead frame storage box 103 is used in the semiconductor device manufacturing process.

[0047] First, the clamp 10 slides toward the depth of the material box body 1 and is inserted into the storage section 1B. Thus, the clamp 10 is installed onto the material box body 1. Figure 12 This is a front view showing the structure of the lead frame storage box 103 with the clamp 10 installed. Figure 13 This is a cross-sectional view showing the internal structure of the lead frame storage box 103 with the clamp 10 mounted, and showing along... Figure 12 The structure of the cross-section G-G' shown.

[0048] An air jet generator is installed at the air jet inlet 4 of the material box body 1. Compressed air injected from the air jet generator into the air jet inlet 4 passes through the air pipe 5 and is delivered to each air outlet 3. The air is blown out from the air outlet 3 toward the inside of the material box body 1. In embodiment 3, the air is blown out at a downward angle of 45 degrees. The air jet impacts the entire tank 2, blowing away metal shavings and other foreign objects accumulated in the tank 2, thereby cleaning the tank 2.

[0049] At this time, air is guided downward by guide 12, thus blowing foreign objects downward as well. Furthermore, wall 13 prevents foreign objects blown away from groove 2 from re-adhering to the groove 2 on the opposite side. After cleaning, with clamp 10 removed, the lead frame is stored in groove 2, and the semiconductor device manufacturing process is performed.

[0050] In the lead frame storage box 103 described above, the air outlet 3 faces downwards at a 45-degree angle, thus facilitating air contact with foreign objects. The guide 12 promotes the downward blowing of foreign objects, and the blown-away foreign objects are unlikely to re-adhere to the groove 2. Furthermore, the wall 13 prevents foreign objects from re-adhering to the groove 2.

[0051] (A variation of Implementation Method 3) Figure 14 This is a cross-sectional view showing the internal structure of the lead frame storage box 103A, a modified example of embodiment 3. The air outlet 3 faces obliquely rearward relative to the direction from the front of the box body 1, where the lead frame inlet / outlet is located, to the back of the box body 1. In this modified example, the air outlet 3 is inclined at 45 degrees to the obliquely rearward.

[0052] With this structure, air is directed at a 45-degree angle to the rear and blown downwards. The airflow impacts the entire tank 2, easily blowing away metal shavings and other foreign objects accumulated in the tank. Therefore, the cleaning effect of tank 2 is improved.

[0053] This disclosure allows for free combination of various embodiments or appropriate modification or omission of various embodiments.

[0054] Hereinafter, various embodiments of this disclosure will be summarized in appendices and described.

[0055] (Note 1) A lead frame storage box, comprising: Material box body; The groove extends along the depth of the material box body and has multiple layers on both sides of the material box body. Each layer of groove holds both ends of the lead frame, thereby storing the lead frame in the space inside the material box body. An air outlet is provided along the groove, and multiple air outlets are provided inside the groove, which spray air toward the inner side of the material box body; An air supply port, wherein the air supply port is disposed on the outer surface of the material box body, and supplies air to the plurality of air outlets; and An air pipe that connects the air supply port to the plurality of air outlets.

[0056] (Note 2) According to Appendix 1, the lead frame storage box has multiple air outlets facing the inside of the box body along the width direction of the box body, which is orthogonal to the depth direction of the box body.

[0057] (Note 3) According to Appendix 1, the lead frame receiving box has multiple air outlets that are inclined toward the inside of the box body in a direction that is orthogonal to the width direction of the box body relative to the depth direction of the box body.

[0058] (Note 4) According to Appendix 1, the lead frame storage box includes, as described, the main body of the box comprising: A dividing groove, wherein the dividing groove is disposed at the center of the upper surface and the lower surface of the material box body respectively; and A partition plate that can be attached to or detached from the partition groove.

[0059] (Note 5) According to Appendix 1, the lead frame storage box further includes a clamp having a frame and being detachable from the space inside the main body of the box that houses the lead frame. The clamp includes: A guide member, disposed on the side of the frame, guides the air jetting direction from the plurality of air outlets to a downward direction; and A wall is disposed at the center of the frame in the width direction of the material box body, which is orthogonal to the depth direction of the material box body.

[0060] (Note 6) According to Appendix 5, the lead frame storage box is oriented obliquely rearward relative to the direction from the front of the box body where the lead frame inlet / outlet is located to the back of the box body.

[0061] (Note 7) According to Appendix 1, the lead frame storage box has an air supply port located at the center of the side of the box body.

[0062] Symbol Explanation 1. Material box body; 1A. Side panel; 1B. Storage section; 2. Slot; 3. Air outlet; 4. Air jet inlet; 5. Air pipe; 6. Divider slot; 7. Divider plate; 10. Fixture; 11. Frame; 12. Guide; 13. Wall; 101-103A. Lead frame for storing material box.

Claims

1. A lead frame storage box, characterized in that, include: Material box body; The groove extends along the depth of the material box body and has multiple layers on both sides of the material box body. Each layer of groove holds both ends of the lead frame, thereby storing the lead frame in the space inside the material box body. An air outlet is provided along the groove, and multiple air outlets are provided inside the groove, which spray air toward the inner side of the material box body; An air supply port is provided on the outer surface of the material box body and supplies air to the plurality of air outlets; as well as An air pipe that connects the air supply port to the plurality of air outlets.

2. The lead frame storage box according to claim 1, characterized in that, The plurality of air outlets are directed toward the inner side of the material box body along the width direction of the material box body, which is orthogonal to the depth direction of the material box body.

3. The lead frame storage box according to claim 1, characterized in that, The plurality of air outlets are inclined toward the inner side of the material box body in a direction that is orthogonal to the width direction of the material box body relative to the depth direction of the material box body.

4. The lead frame storage box according to claim 1, characterized in that, The main body of the material box includes: A dividing groove, wherein the dividing groove is disposed at the center of the upper surface and the lower surface of the material box body respectively; and A partition plate that can be attached to or detached from the partition groove.

5. The lead frame storage box according to claim 1, characterized in that, It also includes a clamp having a frame and being detachable relative to the space inside the hopper body that accommodates the lead frame. The clamp includes: A guide member, disposed on the side of the frame, guides the air jetting direction from the plurality of air outlets to a downward direction; and A wall is disposed at the center of the frame in the width direction of the material box body, which is orthogonal to the depth direction of the material box body.

6. The lead frame storage box according to claim 5, characterized in that, The plurality of air outlets are oriented obliquely rearward relative to the direction from the front of the cassette body, where the inlet and outlet of the lead frame is located, to the back of the cassette body.

7. The lead frame storage box according to claim 1, characterized in that, The air supply port is located at the center of the side of the material box body.

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