Conveying equipment and conveying system

Abstract

The invention discloses conveying equipment and a conveying system, and mainly relates to the technical field of conveying equipment. The conveying system comprises a plurality of conveying devices, each conveying device comprises a fixing mechanism, a transmission component, a conveying mechanism and a rotating mechanism, the conveying mechanisms are used for bearing target objects and conveying the target objects in the preset direction, and the rotating mechanisms are used for adjusting the conveying direction of the target objects. According to the conveying equipment and the conveying system, the wafer boxes can be conveyed in the fixed direction, the conveying direction of the wafer boxes can be adjusted according to actual requirements, and after multiple conveying equipment are combined to form the conveying system, the requirements for reversing, returning and turning needed by wafer box carrying can be met, so that the conveying equipment and the conveying system can be adapted to wider application scenes, and the conveying efficiency is improved. And the work of the conveying devices is not influenced, any one conveying device can temporarily store the wafer box, and the normal conveying work of other conveying devices is not influenced, so that the continuous conveying of the wafer box is realized, and the conveying efficiency is effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of conveying equipment, in particular to a conveying equipment and a conveying system. BACKGROUND

[0002] In a semiconductor wafer production factory, in order to complete various processing procedures of wafer upstream and downstream, the wafer box needs to be frequently transported and conveyed between different machines and even different factory areas, so the semiconductor wafer production factory has a strong demand for the transportation and conveying system.

[0003] At present, the transportation and conveying of wafer boxes in semiconductor factories mainly rely on the overhead crane transportation system, which uses the overhead crane running on the overhead rail to transport the wafer box. However, the overhead crane transportation system can only transport a single wafer box per overhead crane, and the overhead crane needs to be taken together with the wafer box to the next process after grabbing the wafer box, that is, it cannot realize continuous conveying. At the same time, due to the mismatch of working hours between the upstream and downstream processes, the overhead crane is prone to "traffic jam", which greatly affects the transportation efficiency. In addition, the cost of the overhead crane is relatively high, and the production debugging period is long, and it is difficult to repair after failure. SUMMARY

[0004] In view of the deficiencies in the prior art, the purpose of the present application is to provide a conveying equipment and a conveying system for continuously conveying target objects such as wafer boxes and improving the wafer box conveying efficiency.

[0005] The purpose of the present application is achieved by the following technical solutions:

[0006] A conveying equipment, comprising:

[0007] A fixing mechanism;

[0008] A transmission member, which is arranged on the fixing mechanism;

[0009] A conveying mechanism, which is used for carrying target objects and conveying the target objects in a predetermined direction;

[0010] A rotating mechanism, which is arranged on the conveying mechanism, at least a part of the rotating mechanism is rotatably arranged on the fixing mechanism, the rotating mechanism is in transmission connection with the transmission member and is used for driving the conveying mechanism to rotate, so as to adjust the conveying direction of the target objects.

[0011] Further, the rotating mechanism comprises:

[0012] A support shaft core and a rotating bottom plate, the rotating bottom plate is arranged above the fixing mechanism, one end of the support shaft core is fixedly connected with the lower surface of the rotating bottom plate, the opposite end of the support shaft core is rotatably arranged on the fixing mechanism, and the transmission member is coaxial with the support shaft core.

[0013] a first connecting plate and a second connecting plate, the first connecting plate and the second connecting plate are respectively arranged on opposite sides of the rotating base plate;

[0014] a rotation driving assembly, at least a part of the rotation driving assembly is arranged on the first connecting plate, and the rotation driving assembly is in transmission connection with the transmission member and drives the rotating base plate and the conveying mechanism to rotate, so as to adjust the conveying direction of the target object.

[0015] Further, the rotation driving assembly comprises:

[0016] a rotation driving motor, the rotation driving motor is arranged on a side of the first connecting plate away from the rotating base plate;

[0017] a synchronous belt, the synchronous belt is arranged between an output end of the rotation driving motor and the transmission member, and when the rotation driving motor works, the synchronous belt is used to drive the rotating base plate and the conveying mechanism to rotate around the axis of the transmission member as the center.

[0018] Further, the transmission member is sleeved on the surface of the support shaft core and is in rotary connection with the support shaft core through a bearing.

[0019] Further, the conveying mechanism comprises:

[0020] at least two first pulley groups, at least one first pulley group is arranged on a side of the first connecting plate and the second connecting plate away from each other, and each first pulley group comprises two first pulleys, and the two first pulleys are arranged on the first connecting plate or the second connecting plate in a spaced manner;

[0021] two annular conveying belts, one of the conveying belts is arranged on the first pulley group on the first connecting plate or the second connecting plate, and the conveying belt is used to rotate in a circulating manner and is used to carry and convey the target object.

[0022] Further, the conveying mechanism further comprises:

[0023] a transmission driving assembly, the transmission driving assembly is arranged on a side of the second connecting plate away from the rotating base plate;

[0024] a driving shaft, one end of the driving shaft is rotatably connected to a side of the first connecting plate facing the rotating base plate, and the other end of the driving shaft is connected to an output end of the transmission driving assembly;

[0025] two second pulleys, one of the second pulleys is fixedly arranged on each end of the driving shaft, and the second pulley is attached to the outer circumferential surface of the annular conveying belt to drive the conveying belt to rotate in a circulating manner.

[0026] Further, the first connecting plate and the second connecting plate are provided with a plurality of supporting pulleys and a plurality of adjusting pulleys, the plurality of supporting pulleys are used for supporting the part of the conveying belt contacting the target object so as to make the part of the conveying belt contacting the target object flat, and the plurality of adjusting pulleys are arranged at intervals on the first connecting plate and the second connecting plate, the conveying belt is arranged on the plurality of supporting pulleys and the conveying belt is tensioned by the adjusting pulleys.

[0027] Further, the fixing mechanism comprises:

[0028] a fixed bottom plate, the transmission member is fixedly connected with the upper surface of the fixed bottom plate, and the other end of the supporting shaft core is rotatably connected with the fixed bottom plate through a bearing; and / or,

[0029] the rotary driving assembly is used for driving the rotary bottom plate and the conveying mechanism to rotate in a range less than or equal to 270°; and / or,

[0030] the transmission member is a synchronous pulley.

[0031] A conveying system comprises:

[0032] a plurality of conveying devices as described above, the plurality of conveying devices are arranged adjacently so as to convey the target object from the conveying mechanism of one conveying device to the conveying mechanism of the adjacent another conveying device.

[0033] Further, the plurality of conveying devices are arranged adjacently in sequence at the head and tail to combine to form a single-line conveying system; or,

[0034] part of the conveying devices are arranged adjacently in sequence at the head and tail to combine to form a single-line conveying system, and part of the conveying devices are arranged at one side and / or both sides of the single-line conveying system to form a mixed conveying system; or,

[0035] the conveying system further comprises a controller, the controller is communicatively connected with the conveying mechanism and the rotary mechanism of each conveying device to control the operation of the conveying mechanism and the rotary mechanism of each conveying device.

[0036] Compared with the prior art, the present application has at least the following beneficial effects:

[0037] The conveying device and the conveying system can not only convey the wafer box and other target objects in a fixed direction, but also adjust the conveying direction of the wafer box according to actual needs, and when a plurality of conveying devices are combined to form a conveying system, the reversing and returning and turning requirements of wafer box handling can be realized, so that the conveying device can be adapted to a wider application scenario, and the work of each conveying device does not affect each other, any one conveying device can temporarily store the wafer box, and does not affect the normal conveying work of other conveying devices, so as to realize the continuous conveying of the wafer box, avoid the "traffic jam" phenomenon, and effectively improve the conveying efficiency.

[0038] In addition, compared with the traditional overhead crane conveying system, the wafer box conveying system combined by the conveying device has low cost, and the independent conveying device is convenient to replace and maintain, and has good practicability. BRIEF DESCRIPTION OF DRAWINGS

[0039] Figure 1 is a structure schematic view of a conveying device according to an embodiment of the present application;

[0040] Figure 2 is a partial structure schematic view of a conveying device according to an embodiment of the present application;

[0041] Figure 3 is a bottom view structure schematic view of a conveying device according to an embodiment of the present application at a first angle;

[0042] Figure 4 is a bottom view structure schematic view of a conveying device according to an embodiment of the present application at a second angle;

[0043] Figure 5 is a structure schematic view of a single-line conveying system according to an embodiment of the present application;

[0044] Figure 6 is a structure schematic view of a mixed conveying system according to an embodiment of the present application;

[0045] Figure 7 is another structure schematic view of a mixed conveying system according to an embodiment of the present application.

[0046] In the figure: 1, transmission member; 201, support shaft core; 202, rotating bottom plate; 203, first connecting plate; 204, second connecting plate; 205, rotary drive motor; 206, synchronous belt; 301, first pulley; 302, conveying belt; 303, transmission drive assembly; 304, drive shaft; 305, second pulley; 4, supporting pulley; 5, adjusting pulley; 601, fixed bottom plate. DETAILED DESCRIPTION

[0047] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations can be implemented in any numerous ways, and example implementations should not be construed as limited to having been set forth in the description herein; rather, descriptions are provided so that this disclosure will be thorough and complete, and will fully convey the scope of example implementations to those skilled in the art. Identical reference numerals may have been used, where appropriate, to designate identical elements that are found in one or more of the several figures.

[0048] The words expressing position and direction described in the present application are described by taking the drawings as an example, but changes can be made according to needs, and the changes are included in the protection scope of the present application.

[0049] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "fixed" should be understood broadly, for example, can be fixedly connected, can be detachably connected or integrated; can be mechanically connected, can be electrically connected; can be directly connected, can be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0050] In the present application, unless otherwise explicitly specified and limited, "on" or "under" of the first feature to the second feature can include that the first and second features are in direct contact, or can include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, "on", "above" and "above" of the first feature to the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. "Below", "below" and "below" of the first feature to the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0051] Reference Figures 1 to 7 The embodiment provides a conveying system, which comprises a plurality of conveying devices and can further comprise a controller.

[0052] Reference Figures 5 to 7 The plurality of conveying devices are arranged adjacent to each other so that the target objects are conveyed from the conveying mechanism of one conveying device to the conveying mechanism of another adjacent conveying device. The target objects in the embodiment can be wafer boxes, and the conveying devices in the embodiment can be used for conveying wafer boxes in a semiconductor wafer production factory.

[0053] The conveying device comprises a fixing mechanism, a transmission member 1, a conveying mechanism and a rotating mechanism.

[0054] As a preferred embodiment, the fixing mechanism comprises a fixing base plate 601, and can further comprise an accessory part (not shown) for fixing the fixing base plate 601 on the conveying line. The fixing base plate 601 can be made of metal and can have a flat square structure.

[0055] The transmission member 1 is arranged on the fixing mechanism, and can be a synchronous pulley. The transmission member 1 can be fixed on the fixing base plate 601 by fasteners such as screws or bolts.

[0056] The conveying mechanism is used for carrying the target objects and conveying the target objects in a preset direction. The conveying mechanism can comprise at least two annular conveyors 302. The target objects are carried on the conveyors 302, and the conveyors 302 rotate to convey the target objects.

[0057] The conveying mechanism is arranged on the rotating mechanism. The rotating mechanism can comprise at least a support shaft core 201, a rotating base plate 202, a first connecting plate 203 and a second connecting plate 204, and a rotating drive assembly. At least a part of the rotating mechanism is rotatably arranged on the fixing mechanism, for example, the support shaft core 201 of the rotating mechanism is rotatably arranged on the fixing mechanism by a bearing. The rotating mechanism is in transmission connection with the transmission member 1 and is used for driving the conveying mechanism to rotate, so as to adjust the conveying direction of the target objects. The rotating drive assembly is in transmission connection with the transmission member 1, for example, by a belt.

[0058] Since the transmission member 1 is arranged on the fixing mechanism, at least a part of the rotating mechanism is rotatably arranged on the fixing mechanism. Under the transmission connection between the rotating mechanism and the transmission member 1, the rotating mechanism can drive the conveying mechanism to rotate, so as to adjust the conveying direction of the target objects.

[0059] The controller is in communication connection with the conveying mechanism and the rotating mechanism of each conveying device, so as to control the operation of the conveying mechanism and the rotating mechanism of each conveying device. The controller can be any applicable computing device, such as a personal computer, a server, a programmable logic controller (PLC controller), a single-chip microcomputer, or an integrated computer device. The controller has the functions of receiving information and sending control commands. The controller can control the conveying mechanism and the rotating mechanism to perform corresponding actions by wired communication or wireless communication, so as to complete the conveying of the target objects.

[0060] The conveying device and the conveying system provided by the embodiment can convey the wafer box in a fixed direction, and can also adjust the conveying direction of the wafer box according to actual needs. When a plurality of conveying devices are combined to form a conveying system, the reversing and returning and turning requirements of wafer box handling can be realized, so that the conveying device can be adapted to a wider range of application scenarios. The working of each conveying device does not affect each other, and any conveying device can temporarily store the wafer box without affecting the normal conveying work of other conveying devices, so that the continuous conveying of the wafer box is realized, the "traffic jam" phenomenon is avoided, and the conveying efficiency is effectively improved. In addition, compared with the traditional overhead crane handling system, the wafer box conveying system formed by the conveying device has low cost, and the independent conveying device is convenient to replace and maintain, and has good practicability.

[0061] As a preferred embodiment, the rotating mechanism comprises a support shaft core 201 and a rotating bottom plate 202, a first connecting plate 203 and a second connecting plate 204, and a rotating drive assembly.

[0062] The rotating bottom plate 202 is arranged above the fixed mechanism. The rotating bottom plate 202 can be made of metal and has a flat rectangular structure. Part of the rotating bottom plate 202 can be hollow. One end of the support shaft core 201 is fixedly connected to the lower surface of the rotating bottom plate 202, and the opposite end of the support shaft core 201 is rotatably arranged on the fixed mechanism. The transmission member 1 is coaxial with the support shaft core 201. The transmission member 1 can be sleeved on the surface of the support shaft core 201 and is rotatably connected to the support shaft core 201 through a bearing. The rotating mechanism has a centering mechanism, which can ensure the long-term stable operation of the rotating center of the rotating mechanism and prevent the position of the rotating mechanism from deviating after repeated operation, thereby prolonging the service life of the device.

[0063] The first connecting plate 203 and the second connecting plate 204 are arranged on opposite sides of the rotating bottom plate 202. The first connecting plate 203 and the second connecting plate 204 can be made of metal and have a flat rectangular structure. The first connecting plate 203 and the second connecting plate 204 can be fixed on opposite sides of the rotating bottom plate 202 by fasteners such as bolts and screws. The first connecting plate 203 and the second connecting plate 204 are preferably arranged in parallel.

[0064] At least a portion of the rotary drive assembly is disposed on the first connecting plate 203 for transmission connection with the transmission component 1 and for driving the rotating base plate 202 and the conveying mechanism to rotate, so as to adjust the conveying direction of the target item. Preferably, the rotary drive assembly is used to drive the rotating base plate 202 and the conveying mechanism to rotate within a range of less than or equal to 270°. For example, with the rotating base plate 202 and the conveying mechanism not rotating (0°) as a reference, the rotation angle of the rotating base plate 202 and the conveying mechanism can be switched between 0°, 90°, 180° and 270°. By limiting the driving rotation range of the rotary drive assembly, the wiring work of the equipment can be conveniently carried out.

[0065] The rotary drive assembly preferably includes a rotary drive motor 205 and a synchronous belt 206.

[0066] The rotary drive motor 205 is located on the side of the first connecting plate 203 facing away from the rotating base plate 202. The output end of the rotary drive motor 205 (e.g., the reducer of the rotary drive motor 205) can be equipped with a synchronous pulley to adapt to the synchronous belt 206. The rotary drive motor 205 drives the transmission synchronous pulley to rotate, which in turn drives the synchronous belt 206 to drive the transmission on the tooth surface of the transmission component 1, thereby driving the entire rotary mechanism to rotate around the axis of the transmission component 1. The rotary drive motor 205 can be a servo motor, which can rotate in both directions to adjust the rotation direction of the rotary mechanism. For example, when the rotary drive motor 205 rotates in the forward direction, it can drive the rotary mechanism to rotate clockwise, and when the drive motor rotates in the reverse direction, it can drive the rotary mechanism to rotate counterclockwise.

[0067] The synchronous belt 206 is disposed between the output end of the rotary drive motor 205 and the transmission component 1. When the rotary drive motor 205 is working, the synchronous belt 206 drives the rotating base plate 202 and the conveying mechanism to rotate around the axis of the transmission component 1. The synchronous belt 206 has a toothed structure on the contact surface with the synchronous pulley at the output end of the transmission component 1 or the rotary drive motor 205 so that the synchronous belt 206 rotates cyclically under the drive of the rotary drive motor 205.

[0068] As a preferred implementation method, refer to Figure 1 The conveying mechanism includes at least two first pulley sets and two annular conveyor belts 302, and may also include a transmission drive assembly 303, a drive shaft 304 and two second pulleys 305.

[0069] At least one first pulley set is provided on the opposite side of the first connecting plate 203 and the second connecting plate 204. Each first pulley set includes two first pulleys 301. The two first pulleys 301 are spaced apart on the first connecting plate 203 or the second connecting plate 204. The line connecting the two first pulleys 301 can be aligned with the preset movement direction of the target item in the conveying mechanism. The first pulleys 301 can be rotatably connected to the first connecting plate 203 or the second connecting plate 204 through a connecting shaft.

[0070] A conveyor belt 302 is wound around the first pulley assembly on the first connecting plate 203 or the second connecting plate 204. The conveyor belt 302 rotates cyclically and is used to carry and transport the target item. The target item can be placed on the two conveyor belts 302 between the first connecting plate 203 and the second connecting plate 204. The target item is transported by the cyclic rotation of the conveyor belt. Preferably, the top of the first connecting plate 203 and the second connecting plate 204 can be set at a position higher than the height of the conveyor belt 302 so that the first connecting plate 203 and the second connecting plate 204 can limit the transported target item and prevent the target item from falling during the transport process.

[0071] The transmission drive assembly 303 is located on the side of the second connecting plate 204 facing away from the rotating base plate 202. The transmission drive assembly 303 can be driven by a servo motor. Specifically, the servo motor drives the drive shaft 304 to rotate.

[0072] One end of the drive shaft 304 is rotatably connected to the side of the first connecting plate 203 facing the rotating base plate 202, and the other end of the drive shaft 304 is connected to the output end of the transmission drive assembly 303 (e.g., the reducer of the transmission drive assembly 303). The drive shaft 304 can rotate under the drive of the transmission drive assembly 303.

[0073] A second pulley 305 is fixedly installed at each end of the drive shaft 304. The second pulley 305 fits against the outer circumferential surface of the annular conveyor belt 302 to drive the conveyor belt 302 to rotate cyclically. The second pulley 305 can be rotatably connected to the first connecting plate 203 or the second connecting plate 204 through the connecting shaft.

[0074] The conveyor belt 302 is a consumable part and needs to be replaced periodically. In the conveying mechanism of the conveying equipment in this embodiment, after the conveyor belt 302 is wound around the first pulley 301, the second pulley 305 of the drive shaft 304 is in contact with the outer circumferential surface of the conveyor belt 302. That is, the second pulley 305 of the drive shaft 304 does not pass through the inner ring structure of the conveyor belt 302. When the conveyor belt 302 ages or is damaged, the conveyor belt 302 can be removed without removing the fixedly assembled drive shaft 304 and the second pulley 305. This means that the conveyor belt can be quickly replaced without disassembling the drive shaft 304 and other parts. Compared with the existing conveying equipment, which requires 20 minutes to replace the belt, the conveying equipment in this embodiment only requires 5 minutes to replace the belt, which greatly saves the replacement time of the conveyor belt 302 and avoids the accuracy error before and after the replacement of the conveyor belt 302.

[0075] In a preferred embodiment, both the first connecting plate 203 and the second connecting plate 204 are provided with a plurality of support pulleys 4 and a plurality of adjusting pulleys 5. The support pulleys 4 are used to support the portion of the conveyor belt 302 that contacts the target item, ensuring that the portion of the conveyor belt 302 in contact with the target item is flat, preventing the conveyor belt 302 from being compressed and sagging, and ensuring conveying quality and efficiency. The adjusting pulleys 5 are spaced apart on the first connecting plate 203 and the second connecting plate 204. The conveyor belt 302 is wound around the support pulleys 4 and tensioned by the adjusting pulleys 5, which helps to increase the friction between the conveyor belt 302 and the second pulley 305 and prevents the conveyor belt 302 from detaching from the first pulley 301 or the second pulley 305, thereby improving the conveying effect of the conveyor belt 302.

[0076] By rationally arranging the conveying and rotating mechanisms, and integrating the fixed mechanism, transmission component 1, conveying mechanism, and rotating mechanism into a single design, the overall size of the conveying equipment is reduced, saving rotation space. As a result, the overall size of the conveying system formed by combining multiple conveying devices is smaller, making it easier to install in semiconductor wafer manufacturing plants.

[0077] The transmission component 1 is fixedly connected to the upper surface of the fixed base plate 601, and the other end of the support shaft core 201 is rotatably connected to the fixed base plate 601 through a bearing. It can be connected to the ground frame or the hanging frame through the fixed base plate 601, so that the conveying system of this embodiment can interact with other equipment such as overhead cranes and automated storage systems.

[0078] As a preferred implementation method, refer to Figure 5 Several conveying devices are arranged end to end to form a single-line conveying system. The conveying direction can be straight, in which case the target item is conveyed along the single-line conveying line, or the direction can be turned 180° during the conveying process for return.

[0079] refer to Figure 6 and Figure 7In a conveying system, some conveying devices are arranged one after another to form a single-line conveying system, while some conveying devices are arranged on one side and / or both sides of the single-line conveying system to form a hybrid conveying system. In this case, the target item can be rotated 90° during the conveying process, thus adapting to a wider range of application scenarios.

[0080] In use, wafer cassettes or other target items are placed on the conveyor belt 302 between the first connecting plate 203 and the second connecting plate 204. The controller controls the transmission drive assembly 303 to operate, driving the second pulley 305 to rotate via the drive shaft 304. This further drives the conveyor belt 302 to rotate cyclically on the surfaces of the first pulley 301 and the second pulley 305, thereby conveying the target item in a preset direction. When it is necessary to adjust the conveying direction of the target item, the controller controls the rotary drive motor 205 to operate, further driving the synchronous belt 206 to rotate on the surface of the transmission component 1. This causes the rotary mechanism, carrying the conveying mechanism, to rotate together around the axis of the transmission component 1, thus adjusting the conveying direction of the target item on the conveying mechanism. The controller can also pre-input or plan the conveying route according to the different wafer cassettes, and then control the designated conveying equipment on the conveying route to adjust the conveying direction according to the planned conveying route, realizing automated conveying.

[0081] In the description herein, it should be understood that the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings, and are used only for ease of description and simplification of operation. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used merely for descriptive distinction and have no special meaning.

[0082] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the invention without departing from the principles and spirit of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A delivery apparatus, characterized by, The utility model relates to a kind of rotating mechanism and rotating drive mechanism of rotating mechanism, including: Fixed mechanism; Transmission member (1), the transmission member (1) is arranged on the fixed mechanism; Conveying mechanism, the conveying mechanism is used to carry target article and conveys target article along preset direction; Rotary mechanism, the conveying mechanism is arranged on the rotary mechanism, at least a part of the rotary mechanism is rotatably arranged on the fixed mechanism, the rotary mechanism is driven connection with the transmission member (1) and is used to drive the conveying mechanism rotation, to adjust the conveying direction of target article.

2. A delivery device as in claim 1, wherein, The rotary mechanism includes: Supporting shaft core (201) and rotating base plate (202), the rotating base plate (202) is arranged above the fixed mechanism, one end of the supporting shaft core (201) is fixedly connected with the lower surface of the rotating base plate (202), the opposite end of the supporting shaft core (201) is rotatably arranged on the fixed mechanism, the transmission member (1) is coaxial with supporting shaft core (201); First connecting plate (203) and second connecting plate (204), the first connecting plate (203) and the second connecting plate (204) are arranged on the opposite sides of the rotating base plate (202) respectively; Rotary drive assembly, at least a part of the rotary drive assembly is arranged on the first connecting plate (203), is driven connection with the transmission member (1) and is used to drive the rotating base plate (202) and conveying mechanism rotation, to adjust the conveying direction of target article.

3. A delivery device as in claim 2, wherein, The rotary drive assembly includes: Rotary drive motor (205), the rotary drive motor (205) is arranged on the side of the first connecting plate (203) away from the rotating base plate (202); Synchronous belt (206), the synchronous belt (206) is arranged between the output end of the rotary drive motor (205) and the transmission member (1), is used to drive the rotating base plate (202) and conveying mechanism to rotate around the axis of the transmission member (1) center when the rotary drive motor (205) works through the synchronous belt (206) circulation rotation.

4. A delivery device as in claim 3, wherein, The transmission member (1) is set on the surface of the supporting shaft core (201), and is rotatably connected with the supporting shaft core (201) by bearing.

5. A delivery apparatus as defined in claim 2, wherein, The conveying mechanism includes: At least two first pulley groups, at least one first pulley group is arranged on the opposite side of the first connecting plate (203) and the second connecting plate (204), each first pulley group includes two first pulleys (301), the two first pulleys (301) are arranged on the first connecting plate (203) or the second connecting plate (204) with interval; Two annular conveyors (302), one of the conveyors (302) is arranged on the first pulley group on the first connecting plate (203) or the second connecting plate (204), the conveyor (302) is circulated and is used to carry and convey target article.

6. A delivery device as in claim 5, wherein, The conveying mechanism further includes: Transmission drive assembly (303), the transmission drive assembly (303) is arranged on the side of the second connecting plate (204) away from the rotating base plate (202); a driving shaft (304) rotatably connected to one side of the first connecting plate (203) towards the rotating base plate (202), and the other end of the driving shaft (304) is connected to the output end of the transmission driving assembly (303); two second pulleys (305) are respectively arranged at the two ends of the driving shaft (304), and the second pulleys (305) are arranged on the outer circumferential surface of the annular transmission belt (302) to drive the transmission belt (302) to rotate circularly.

7. A delivery apparatus as in claim 5, wherein, The first connecting plate (203) and the second connecting plate (204) are provided with a plurality of supporting pulleys (4) and a plurality of adjusting pulleys (5), the plurality of supporting pulleys (4) are used to support the part of the transmission belt (302) contacting the target object to make the part of the transmission belt (302) contacting the target object flat, and the plurality of adjusting pulleys (5) are arranged on the first connecting plate (203) and the second connecting plate (204) at intervals, the transmission belt (302) is arranged on the plurality of supporting pulleys (4) and is tensioned by the adjusting pulleys (5).

8. A delivery apparatus as in claim 2, wherein, The fixing mechanism comprises: a fixed base plate (601), the transmission member (1) is fixedly connected to the upper surface of the fixed base plate (601), and the other end of the support shaft core (201) is rotatably connected to the fixed base plate (601) through a bearing; and / or The rotary driving assembly is used to drive the rotating base plate (202) and the conveying mechanism to rotate in a range less than or equal to 270°; and / or The transmission member is a synchronous pulley.

9. A delivery system characterized by, Comprise: a plurality of conveying devices as claimed in any one of claims 1-8, the plurality of conveying devices are arranged adjacent to each other to convey the target object from the conveying mechanism of one conveying device to the conveying mechanism of another adjacent conveying device.

10. A delivery system as in claim 9, wherein, The plurality of conveying devices are sequentially arranged adjacent to each other to form a single-line conveying system; or Part of the conveying devices are sequentially arranged adjacent to each other to form a single-line conveying system, and part of the conveying devices are arranged on one side and / or both sides of the single-line conveying system to form a mixed conveying system; or The conveying system further comprises a controller, the controller is communicatively connected to the conveying mechanism and the rotary mechanism of each conveying device to control the operation of the conveying mechanism and the rotary mechanism of each conveying device.

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