Linear motor and component mounting machine

Abstract

The linear motor includes: a linear stator extending in a predetermined direction and provided with permanent magnets on both front and back surfaces; a first linear mover provided on the surface side of the linear stator; a second linear mover provided on the rear surface side of the linear stator; a first cooling member provided on a surface of the first linear mover opposite to a surface facing the linear stator, the first cooling member cooling the first linear mover by heat exchange with the first linear mover; and a second cooling member provided on a surface of the second linear mover opposite to the surface facing the linear stator, the second cooling member cooling the second linear mover by heat exchange with the second linear mover.

Description

Technical Field

[0001] This specification discloses a linear motor and a component mounting machine. Background Technology

[0002] Previously, a linear motor was known, which included: a linear stator consisting of a surface containing magnetic components; and two linear movers consisting of built-in coils and arranged in a manner that sandwiched the linear stator. For example, Patent Document 1 disclosed a technique of cooling the coils that generate heat due to driving by blowing air from the front and side of the two linear movers through a cooling fan.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2017-34817 Summary of the Invention

[0006] The problem that the invention aims to solve

[0007] However, there is room for improvement in cooling the coils that generate heat during operation.

[0008] The main objective of this invention is to efficiently cool the first and second linear movers.

[0009] Methods for solving problems

[0010] The following means are employed in this disclosure to achieve the aforementioned principal objectives.

[0011] The main feature of this disclosed linear motor is that it comprises: a linear stator extending in a predetermined direction and having permanent magnets on both its front and back sides; a first linear mover disposed on the front side of the linear stator; a second linear mover disposed on the back side of the linear stator; a first cooling member disposed on the side of the first linear mover opposite to the side facing the linear stator, cooling the first linear mover by heat exchange with the first linear mover; and a second cooling member disposed on the side of the second linear mover opposite to the side facing the linear stator, cooling the second linear mover by heat exchange with the second linear mover.

[0012] In the linear motor disclosed herein, the first and second linear movers can be cooled efficiently.

[0013] The present invention discloses a component mounting machine comprising: a head capable of picking up components; a head moving device for moving the head in a horizontal direction; and a linear motor serving as a drive source for the head moving device, comprising: a linear stator extending in a predetermined direction and having permanent magnets on both its front and back sides; a first linear mover disposed on the front side of the linear stator; a second linear mover disposed on the back side of the linear stator; a first cooling member disposed on the side of the first linear mover opposite to the side facing the linear stator, cooling the first linear mover by heat exchange with the first linear mover; and a second cooling member disposed on the side of the second linear mover opposite to the side facing the linear stator, cooling the second linear mover by heat exchange with the second linear mover.

[0014] The component mounting machine achieves the same effect as the linear motor disclosed herein. Attached Figure Description

[0015] Figure 1 This is a perspective view of the component mounting machine 10.

[0016] Figure 2 This is a top view of the component mounting machine 10.

[0017] Figure 3 This is a YZ sectional view of the X-axis moving device 30.

[0018] Figure 4 This is a perspective view of the X-axis linear motor 32 and the head 20.

[0019] Figure 5 This is a perspective view of the X-axis linear motor 32 and head 20, excluding the X-axis linear stator 34. Detailed Implementation

[0020] Next, the manner in which this disclosure is carried out will be described with reference to the accompanying drawings.

[0021] Figure 1 This is a perspective view of the component mounting machine 10. Figure 2 This is a top view of the component mounting machine 10. Figure 3 This is an oblique view of the head 20 and the X-axis moving device 30. Figure 3 This is a YZ sectional view of the X-axis moving device 30. Figure 4 This is a perspective view of the X-axis linear motor 32 and the head 20. Figure 5 This is a perspective view of the X-axis linear motor 32 and head 20, excluding the X-axis linear stator 34. Furthermore, the left-right direction (X-axis direction), front-back direction (Y-axis direction), and up-down direction (Z-axis direction) are shown in the respective figures.

[0022] like Figure 1 , Figure 2As shown, the component mounting machine 10 of this embodiment picks up components supplied from the feeder F and mounts them onto the substrate S. The component mounting machine 10 includes a base 12, a substrate conveying device (not shown), a first head 20a and a second head 20b, a first beam member 21a and a second beam member 21b, a first X-axis moving device 30a and a second X-axis moving device 30b, a first Y-axis moving device 50a and a second Y-axis moving device 50b, and a control device (not shown). These are housed within a housing 11. Strip-shaped support platforms 13 extending front-to-back are provided on the left and right sides of the upper layer of the base 12. Additionally, an operation panel 14, operated by the operator and capable of displaying various information, is provided on the front surface of the housing 11. The first head 20a and the second head 20b are sometimes simply referred to as head 20. The first beam member 21a and the second beam member 21b are sometimes simply referred to as beam member 21. The first X-axis moving device 30a and the second X-axis moving device 30b are sometimes simply referred to as X-axis moving device 30. The first Y-axis moving device 50a and the second Y-axis moving device 50b are sometimes simply referred to as the Y-axis moving device 50.

[0023] The substrate transport device has a pair of conveyor belts at the front and rear and a motor that drives the conveyor belts to rotate. The substrate transport device transports substrates S on the conveyor belts from left to right by using the motor to drive the conveyor belts. Furthermore, the substrate transport device may also have multiple channels for transporting substrates S in a width direction orthogonal to the substrate transport direction. Additionally, the substrate transport device may transport substrates S in a manner in which multiple substrates are arranged along the substrate transport direction.

[0024] The head 20 has a suction nozzle for adsorbing components. For example... Figure 1 and Figure 2 As shown, the head 20 is mounted on the head mounting surface 37a of the support member 37. The support member 37 is a flat plate. The support member 37 is supported so that it can move relative to the beam member 21 in the left-right direction (X-axis direction).

[0025] Beam component 21 is a long strip component extending in the left-right direction (X-axis direction), such as... Figure 3 As shown, the beam member 21 has an upper wall 23, a lower wall 24 arranged parallel to the upper wall 23 at a distance below it, and a side wall 25 connecting the side portions of the upper wall 23 and the side portions of the lower wall 24. Thus, the cross-section of the beam member 21, cut by a plane perpendicular to the X-axis (YZ plane), is approximately C-shaped. The beam member 21 is mounted between Y-axis linear guides 51 (rails) and Y-axis linear guides 52 arranged on the left and right sides of the base 12, allowing it to move in the front-back direction (Y-axis direction). Figure 3As shown, X-axis linear guides 31 (rails) extending in the left-right direction are respectively joined to the side portions of the upper wall 23 opposite to the side wall 25 and the side portions of the lower wall 24 opposite to the side wall 25. The X-axis linear guides 31 are a pair of upper and lower rails, which are joined to the beam member 21, for example, by a combination of adhesive bonding, threaded engagement, and pin engagement. In addition, Y-axis blocks 22 are fixed at both ends of the beam member 21. The beam member 21 moves in the front-back direction (Y-axis direction) at both ends by moving on the corresponding Y-axis linear guides 51 and Y-axis linear guides 52 via the Y-axis blocks 22.

[0026] The X-axis moving device 30 moves the head 20 relative to the beam component 21 in the left-right direction (X-axis direction). For example... Figures 3-5 As shown, in addition to the X-axis linear guide 31 described above, the X-axis moving device 30 also has an X-axis linear motor 32 and multiple (four in this embodiment) X-axis guide nuts 33.

[0027] like Figure 1 As shown, the X-axis linear motor 32 includes a support member 37, an X-axis linear stator 34 supported on the side wall 25 of the beam member 21, a first X-axis linear mover 35 and a second X-axis linear mover 36 supported on the support member 37, a block 38, a first cooling member 39, and a second cooling member 40. Figure 3 As shown, the X-axis linear stator 34, the first X-axis linear mover 35, and the second X-axis linear mover 36 are housed within a space R surrounded by an upper wall 23, a lower wall 24, a side wall 25, and a support member 37. The X-axis linear motor 32 (first X-axis linear mover 35, second X-axis linear mover, first cooling member 39, and second cooling member 40) of the first X-axis moving device 30a is powered by a first X-axis power cable supported on a first X-axis cable carrier (cable carrier is a registered trademark) 16a. Furthermore, the X-axis linear motor 32 (first X-axis linear mover 35, second X-axis linear mover, first cooling member 39, and second cooling member 40) of the second X-axis moving device 30b is powered by a second X-axis power cable supported on a second X-axis cable carrier 16b.

[0028] The support member 37 has a mover mounting surface 37b on the side opposite to the head mounting surface 37a. The mover mounting surface 37b is arranged parallel to the stator mounting surface 25a of the side wall 25. Figures 3-5 As shown, the support member 37 is supported by X-axis guide nuts 33 respectively disposed on the upper and lower pairs of X-axis linear guides 31. In this embodiment, as... Figure 4 , Figure 5 As shown, two X-axis guide nuts 33 are arranged on each of the upper and lower X-axis linear guides 31, and the support component 37 is supported by a total of four X-axis guide nuts 33.

[0029] like Figure 3 As shown, the X-axis linear stator 34 includes a magnet mounting plate 34a, permanent magnets 34b and 34c. The magnet mounting plate 34a is a flat, rectangular component with the same length as the beam member 21 in the left-right direction (X-axis direction). Multiple permanent magnets 34b are arranged on the upper surface of the magnet mounting plate 34a in a manner alternating between N and S poles in the left-right direction. Multiple permanent magnets 34c are arranged on the lower surface of the magnet mounting plate 34a in a manner alternating between N and S poles in the left-right direction. The X-axis linear stator 34 (magnet mounting plate 34a) is arranged parallel to the upper wall 23 and lower wall 24 of the beam member 21. One end of the X-axis linear stator 34 in the short-side direction (front-back direction (Y-axis direction)) is separated from the mover mounting surface 37b of the support member 37 in the front-back direction, and the other end in the short-side direction (front-back direction) is fixed to the stator mounting surface 25a of the side wall 25.

[0030] like Figure 3 As shown, the first X-axis linear mover 35 contains multiple cores 70 formed by stacked electromagnetic steel plates and multiple coils 60 wound around the cores 70. The first X-axis linear mover 35 is disposed between the upper wall 23 of the beam member 21 and the X-axis linear stator 34 supported by the side wall 25. One end of the first X-axis linear mover 35 in the front-rear direction (Y-axis direction) is separated from the stator mounting surface 25a of the side wall 25 in the front-rear direction, and the other end in the front-rear direction is fixed to the mover mounting surface 37b of the support member 37.

[0031] The second X-axis linear mover 36 contains multiple cores 70 formed by stacking electromagnetic steel plates, similar to the first X-axis linear mover 35, and multiple coils 60 wound around the cores 70. The second X-axis linear mover 36 is disposed between the lower wall 24 of the beam member 21 and the X-axis linear stator 34 supported on the stator mounting surface 25a of the side wall 25. One end of the second X-axis linear mover 36 in the front-rear direction (Y-axis direction) is separated from the stator mounting surface 25a of the side wall 25 of the beam member 21 in the front-rear direction, and the other end in the front-rear direction is fixed to the mover mounting surface 37b of the support member 37.

[0032] Three-phase AC voltages (not shown) are applied to the coils 60 of the first X-axis linear mover 35 and the second X-axis linear mover 36, respectively, via drive circuits. This results in repulsive or attractive forces acting between the permanent magnet 34b and the first X-axis linear mover 35, and between the permanent magnet 34c and the second X-axis linear mover 36, through the magnetic field generated in the coils 60. This generates thrust in the left-right direction (X-axis direction) of the first X-axis linear mover 35 and the second X-axis linear mover 36. The control device of the component mounting machine 10 controls the drive circuits of each linear mover to synchronize the movement of the first X-axis linear mover 35 and the second X-axis linear mover 36. The head 20 is mounted on the first X-axis linear mover 35 and the second X-axis linear mover 36 via a support member 37, and therefore moves together with the first X-axis linear mover 35 and the second X-axis linear mover 36 in the left-right direction.

[0033] Block 38 is a rectangular block. Block 38 is as follows: Figure 4 , Figure 5 As shown, the first X-axis linear mover 35 and the second X-axis linear mover 36 are separated from the X-axis linear stator 34 and abut against the mover mounting surface 37b of the support member 37. The block 38 has the same length in the left-right direction (X-axis direction) as the first X-axis linear mover 35 and the second X-axis linear mover 36. The block 38 has a length in the up-down direction (Z-axis direction) equal to (strictly speaking, slightly shorter) the distance from the surface of the first X-axis linear mover 35 facing the X-axis linear stator 34 to the surface of the second X-axis linear mover 36 facing the X-axis linear stator 34. Therefore, the block 38 abuts against the surfaces of the first X-axis linear mover 35 and the second X-axis linear mover 36 facing the X-axis linear stator 34, supporting the first X-axis linear mover 35 and the second X-axis linear mover 36. The surface 38a of block 38 facing the X-axis linear stator 34 is arranged parallel to the surface 34d of the X-axis linear stator 34 (magnet mounting plate 34a) facing block 38.

[0034] The first X-axis linear mover 35 and the second X-axis linear mover 36 are required to maintain a certain clearance relative to the X-axis linear stator 34. However, in the X-axis linear motor 32, due to the attractive force of the permanent magnets 34b and 34c, the first X-axis linear mover 35 and the second X-axis linear mover 36 exert a force that causes them to flex towards the X-axis linear stator 34. In this embodiment, a block 38 is provided between the first X-axis linear mover 35 and the second X-axis linear mover 36. Therefore, it is possible to prevent the first X-axis linear mover 35 and the second X-axis linear mover 36 from flexing.

[0035] Furthermore, the X-axis linear motor 32 has a block 38 whose length in the left-right direction (X-axis direction) is equal to that of the first X-axis linear mover 35 and the second X-axis linear mover 36. Therefore, the first X-axis linear mover 35 and the second X-axis linear mover 36 are supported by the block 38 along their entire length in the left-right direction. Thus, in the X-axis linear motor 32, the deflection of the first X-axis linear mover 35 and the second X-axis linear mover 36 caused by the attractive forces of the permanent magnets 34b and 34c can be sufficiently suppressed.

[0036] Furthermore, the surface 38a of block 38 facing the X-axis linear stator 34 is arranged parallel to the surface 34d of the X-axis linear stator 34 facing block 38. Therefore, by making the width of block 38 in the front-rear direction (Y-axis direction) as close as possible to the X-axis linear stator without interfering with the X-axis linear stator 34, the first X-axis linear mover 35 and the second X-axis linear mover 36 can be adequately supported in the front-rear direction (Y-axis direction), thus more reliably suppressing deflection.

[0037] The first cooling component 39 cools the first X-axis linear mover 35. The first cooling component 39 has a first heat sink 39a and a first fan 39b. The first heat sink 39a is disposed on the side of the outer surface of the first X-axis linear mover 35 opposite to the surface facing the X-axis linear stator 34, in a manner capable of heat transfer to the heat-generating part (coil 60) of the first X-axis linear mover 35. The first heat sink 39a dissipates heat generated by the coil 60 of the first X-axis linear mover 35. The first heat sink 39a has a plurality of fins 39c. The fins 39c are configured to extend in the front-back direction (Y-axis direction) and be arranged in the left-right direction (X-axis direction) (see reference). Figure 4 , Figure 5 A first heat sink 39a is mounted on the surface of the first X-axis linear mover 35 opposite to the surface facing the X-axis linear stator 34. A first fan 39b blows air onto the first heat sink 39a. The first fan 39b is mounted on the surface of the first heat sink 39a opposite to the surface connected to the first X-axis linear mover 35. The first fan 39b blows cooling air onto the fins 39c of the first heat sink 39a. The cooling air flows in the slots between the fins 39c, exchanging heat with the heat transferred to the fins 39c.

[0038] The second cooling component 40 cools the second X-axis linear mover 36. The second cooling component 40 includes a second heat sink 40a and a second fan 40b. The second heat sink 40a is disposed on the side of the outer surface of the second X-axis linear mover 36 opposite to the surface facing the X-axis linear stator 34, in a manner that allows heat transfer to the heat-generating part (coil 60) of the second X-axis linear mover 36. The second heat sink 40a dissipates heat generated by the coil 60 of the second X-axis linear mover 36. The second heat sink 40a has a plurality of fins 40c. The fins 40c are arranged in a manner that extends in the front-back direction (Y-axis direction) and is arranged in the left-right direction (X-axis direction) (see reference). Figure 4 , Figure 5 The second heat sink 40a is mounted on the side of the second X-axis linear mover 36 opposite to the side facing the X-axis linear stator 34. The second fan 40b blows air onto the second heat sink 40a. The second fan 40b is mounted on the side of the second heat sink 40a opposite to the side connected to the second X-axis linear mover 36. The second fan 40b blows cooling air onto the fins 40c of the second heat sink 40a. The cooling air flows in the slots between the fins 40c and exchanges heat with the heat transferred to the fins 40c.

[0039] The first X-axis linear mover 35 and the second X-axis linear mover 36 are connected to a head 20, so the X-axis linear motor 32 can achieve the desired output by using only the first X-axis linear mover 35 and the second X-axis linear mover 36 as a whole. Therefore, compared with the case where the X-axis linear motor 32 has only one X-axis linear mover, the heat generation of each X-axis linear mover can be suppressed. In addition, since the heat generation of each X-axis linear mover can be suppressed, the heat sink required for cooling the first X-axis linear mover 35 and the second X-axis linear mover 36 can be reduced compared with the case where the X-axis linear motor has only one linear mover. Therefore, the first X-axis linear mover 35 and the second X-axis linear mover 36 can be cooled effectively.

[0040] Furthermore, in this embodiment, the X-axis linear stator 34 is supported on the side wall 25 of the beam member 21, the first X-axis linear mover 35 is disposed between the X-axis linear stator 34 and the upper wall 23, and the second X-axis linear mover 36 is disposed between the X-axis linear stator 34 and the lower wall 24. This is particularly preferable when there are spatial constraints regarding the arrangement of the cooling components.

[0041] Furthermore, the first fan 39b and the second fan 40b respectively circulate cooling air through the slots between the fins 39c and 40c. Therefore, compared to the case without the first fan 39b and the second fan 40b, the first heat sink 39a and the second heat sink 40a are more easily cooled. Thus, the heat generated by the coils 60 of the first X-axis linear mover 35 and the second X-axis linear mover 36 is easily dissipated through the first heat sink 39a and the second heat sink 40a.

[0042] The Y-axis moving device 50 moves each beam component 21 in the front-to-back direction (Y-axis direction). For example... Figure 2 As shown, the Y-axis moving device 50 includes: a pair of left and right Y-axis linear guides 51, arranged on the upper surface of the left support platform 13 extending in the front-back direction (Y-axis direction); a pair of left and right Y-axis linear guides 52, arranged on the upper surface of the right support platform 13 extending in the front-back direction; Y-axis linear motors 53, respectively disposed on the left and right; Y-axis guide nuts (not shown), slidably mounted on the left and right pair of Y-axis linear guides 51 and supporting the Y-axis block 22; and Y-axis guide nuts (not shown), slidably mounted on the left and right pair of Y-axis linear guides 52 and supporting the Y-axis block 22. The left and right Y-axis linear motors 53 of the first Y-axis moving device 50a are operated by receiving power from a first Y-axis power cable supported by a first Y-axis cable drag chain 17a disposed above the Y-axis linear guides 51. In addition, the left and right Y-axis linear motors 53 of the second Y-axis moving device 50b are powered by a second Y-axis power cable supported by a second Y-axis cable drag chain 17b disposed above the Y-axis linear guide 52.

[0043] The Y-axis linear motor 53 includes: a Y-axis linear stator 54 fixed to the support platform 13; a first Y-axis linear mover 55 and a second Y-axis linear mover 56 fixed to the bottom surface of the Y-axis block 22 (support member). Additionally, the Y-axis linear motor 53 also includes a first cooling component, a second cooling component, and a block (not shown). The Y-axis linear stator 54 has the same structure as the X-axis linear stator 34 described above, but differs in the following aspects: It is fixed to the support platform 13 with the long side of the magnet mounting plate facing the front-back direction (Y-axis direction) and the short side facing the up-down direction (Z-axis direction). Multiple permanent magnets of the Y-axis linear stator 54 are arranged on the left and right sides of the magnet mounting plate, with alternating N and S pole polarities in the front-back direction. The first Y-axis linear mover 55 and the second Y-axis linear mover 56 have the same structure as the first X-axis linear mover 35 and the second X-axis linear mover 36, but differ in the following aspects. That is, the first Y-axis linear mover 55 and the second Y-axis linear mover 56 are respectively fixed to the bottom surface of the Y-axis block 22 at a predetermined interval from the Y-axis linear stator 54 in the left-right direction (X-axis direction). The block is arranged such that it is separated from the Y-axis linear stator 54 between the first Y-axis linear mover 55 and the second Y-axis linear mover 56 and abuts against the bottom surface of the Y-axis block 22. The first and second cooling components are respectively installed on the side of the first Y-axis linear mover 55 opposite to the side facing the Y-axis linear stator 54 and on the side of the second Y-axis linear mover 56 opposite to the side facing the Y-axis linear stator 54. In this way, the Y-axis linear motor 53 is Figure 4 The structure of the X-axis linear motor 32, which rotates 90 degrees around the X-axis and 90 degrees around the Z-axis.

[0044] The beam component 21 moves in the front-to-back direction (Y-axis direction) via the Y-axis moving device 50. Additionally, the head 20, supported by the beam component 21, moves in the left-to-right direction (X-axis direction) relative to the beam component 21 via the X-axis moving device 30. Therefore, the combination of the front-to-back movement of the beam component 21 via the Y-axis moving device 50 and the left-to-right movement of the head 20 relative to the beam component 21 via the X-axis moving device 30 allows the head 20 to move horizontally within the component mounting machine 10.

[0045] Fins 39c and 40c are arranged to extend in the front-to-back direction (Y-axis direction) and to be arranged in the left-to-right direction (X-axis direction). That is, the slots between fins 39c and 40c extend along the direction of movement when the beam member 21 is moved in the front-to-back direction (Y-axis direction) by the Y-axis moving device 50. Therefore, when the beam member 21 is moved in the front-to-back direction (Y-axis direction) by the Y-axis moving device 50, airflow passes through the slots between fins 39c and 40c. This facilitates the cooling of the first heat sink 39a and the second heat sink 40a. Consequently, the heat generated by the coils 60 of the first X-axis linear mover 35 and the second X-axis linear mover 36 is easily dissipated through the first heat sink 39a and the second heat sink 40a.

[0046] Here, the correspondence between the constituent elements of the embodiment and the constituent elements of this disclosure is clearly defined. In this embodiment, the X-axis linear motor 32 corresponds to the linear motor of this disclosure, the X-axis linear stator 34 corresponds to the linear stator, the first X-axis linear mover 35 corresponds to the first linear mover, the second X-axis linear mover 36 corresponds to the second linear mover, the first cooling component 39 corresponds to the first cooling component, and the second cooling component 40 corresponds to the second cooling component. Furthermore, the first heat sink 39a corresponds to the first heat sink, and the second heat sink 40a corresponds to the second heat sink. Additionally, the first head 20a and the second head 20b of this disclosure correspond to the head in the component mounting machine of this disclosure, and the first X-axis moving device 30a, the second X-axis moving device 30b, the first Y-axis moving device 50a, and the second Y-axis moving device 50b correspond to the head moving device. Furthermore, the first X-axis moving device 30a and the second X-axis moving device 30b correspond to the first head moving part, and the first Y-axis moving device 50a and the second Y-axis moving device 50b correspond to the second head moving part.

[0047] Furthermore, this disclosure is not limited to any of the above-described embodiments. As long as it falls within the technical scope of this disclosure, it can of course be implemented in various ways.

[0048] For example, in the above embodiment, the component mounting machine 10 has two heads 20 (a first head 20a and a second head 20b), but it may also have a single head 20. In this case, the component mounting machine 10 may have a set of beam components 21, an X-axis moving device 30, and a Y-axis moving device 50, respectively.

[0049] In the above embodiments, the linear motor of this disclosure is applied to both the X-axis linear motor 32 and the Y-axis linear motor 53. However, the linear motor of this disclosure may also be applied to either the X-axis linear motor 32 or the Y-axis linear motor 53.

[0050] In the above embodiment, a first cooling component 39 and a second cooling component 40 are provided on the X-axis linear motor 32. However, it is also possible to provide only either the first cooling component 39 or the second cooling component 40.

[0051] In the above embodiments, the first cooling component 39 and the second cooling component 40 respectively include a first fan 39b and a second fan 40b that blow cooling air onto the fins 39c and 40c of the first heat sink 39a. However, at least one of the first cooling component 39 and the second cooling component 40 may also include a fan for supplying air and a fan for exhausting air.

[0052] In the above embodiment, the first cooling component 39 has a first heat sink 39a and a first fan 39b. However, the first cooling component 39 may also lack the first fan 39b. Similarly, the second cooling component 40 has a second heat sink 40a and a second fan 40b. However, the second cooling component 40 may also lack the second fan 40b.

[0053] In the above embodiments, the first cooling component 39 and the second cooling component 40 are air-cooled cooling components, but at least one of them can also be a water-cooled cooling component.

[0054] In the above embodiment, fins 39c and 40c are configured to extend in the front-to-back direction (Y-axis direction) and be arranged in the left-to-right direction (X-axis direction). However, at least one of fins 39c and 40c may also be configured to extend in the left-to-right direction and be arranged in the front-to-back direction (Y-axis direction). In this case, when the X-axis linear motor 32 moves in the left-to-right direction, the moving air flows in the slots between fins 39c and between fins 40c.

[0055] In the linear motor of this disclosure described above, the desired output can be obtained by using only two linear actuators in the overall linear motor. Therefore, compared to the case where the linear motor has only one linear actuator, the heat generation of each linear actuator can be suppressed. Furthermore, since the heat generation of each linear actuator can be suppressed, the cooling components required for cooling the first and second linear actuators can be reduced compared to the case where the linear motor has only one linear actuator. Therefore, the first and second linear actuators can be cooled effectively.

[0056] Alternatively, in the linear motor disclosed herein, the first cooling component may have a first heat sink that abuts against the first linear rotor to dissipate heat from the first linear rotor, and the second cooling component may have a second heat sink that abuts against the second linear rotor to dissipate heat from the second linear rotor. This effectively cools both the first and second linear rotors. In this case, the first cooling component may have a first fan that blows air onto the first heat sink, and the second cooling component may have a second fan that blows air onto the second heat sink. This also allows for sufficiently effective cooling of both the first and second linear rotors.

[0057] Alternatively, in the linear motor disclosed herein, the surface of the block facing the linear stator and the surface of the linear stator facing the block may be arranged parallel to each other. This effectively suppresses the deflection of the first and second linear movers.

[0058] Alternatively, this disclosure can also be configured as a component mounting machine.

[0059] Alternatively, in the component mounting machine disclosed herein, the head moving device may include: a first head moving part for moving the head in a first direction; and a second head moving part for moving the head together with the first moving part in a second direction orthogonal to the first direction. The linear motor is used as the drive source for the first head moving part, and the first cooling component has heat sinks with fins extending along either the first or second direction. Thus, when the first or second head moving part is operated, airflow circulates around the fins within the heat sink, facilitating cooling of the heat sink. This allows for more effective cooling of the first linear actuator.

[0060] Alternatively, in the component mounting machine disclosed herein, the head moving device may include: a first head moving part for moving the head in a first direction; and a second head moving part for moving the head together with the first moving part in a second direction orthogonal to the first direction. The second cooling component has heat sinks with fins extending along the second direction. Thus, when the second head moving part is operated, airflow circulates around the fins, facilitating cooling of the heat sinks. This allows for more effective cooling of the second linear mover.

[0061] Industrial applicability

[0062] This disclosure can be applied to industries such as the manufacturing of component mounting machines.

[0063] Explanation of reference numerals in the attached figures

[0064] 10 Component mounting machine, 11 Housing, 12 Base, 13 Support platform, 14 Operation panel, 20 Head, 20a First head, 20b Second head, 21 Beam assembly, 21a First beam assembly, 21b Second beam assembly, 22 Beam assembly mounting assembly, 30 X-axis moving device, 30a First X-axis moving device, 30b Second X-axis moving device, 31 X-axis linear guide, 32 X-axis linear motor, 33 X-axis guide nut, 34 X-axis stator, 34a Stator body, 34b Permanent magnet, 35 First X-axis mover, 36 Second X-axis 37. Moving element, 38. Support component, 39. Block, 39. First cooling component, 39a. First heat sink, 39b. First fan, 40. Second cooling component, 40a. Second heat sink, 40b. Second fan, 41b. Second fan, 50. Y-axis moving device, 50a. First Y-axis moving device, 50b. Second Y-axis moving device, 51. Y-axis linear guide, 52. Y-axis linear guide, 53. Y-axis linear motor, 54. Y-axis linear stator, 55. First Y-axis linear moving element, 56. Second Y-axis linear moving element, 60. Coil, 70. Core, F. Feeder, S. Substrate.

Claims

1. A linear motor comprising: a linear stator extending in a predetermined direction and provided with permanent magnets on both surfaces; a first linear mover provided on a surface side of the linear stator; a second linear mover provided on a back surface side of the linear stator; a first cooling member provided on a surface on an opposite side of the first linear mover from a surface facing the linear stator, and cooling the first linear mover by heat exchange with the first linear mover; and a second cooling member provided on a surface on an opposite side of the second linear mover from a surface facing the linear stator, and cooling the second linear mover by heat exchange with the second linear mover.

2. The linear motor according to claim 1, wherein the first cooling member has a first heat sink abutting against the first linear mover and dissipating heat from the first linear mover, and the second cooling member has a second heat sink abutting against the second linear mover and dissipating heat from the second linear mover.

3. The linear motor according to claim 2, wherein the first cooling member has a first fan blowing air to the first heat sink, and the second cooling member has a second fan blowing air to the second heat sink.

4. A component mounting machine comprising: a head capable of picking up components; a head moving device moving the head in a horizontal direction; and a linear motor as a drive source of the head moving device, having a linear stator extending in a predetermined direction and provided with permanent magnets on both surfaces, a first linear mover provided on a surface side of the linear stator, a second linear mover provided on a back surface side of the linear stator, a first cooling member provided on a surface on an opposite side of the first linear mover from a surface facing the linear stator, and cooling the first linear mover by heat exchange with the first linear mover, and a second cooling member provided on a surface on an opposite side of the second linear mover from a surface facing the linear stator, and cooling the second linear mover by heat exchange with the second linear mover.

5. The component mounting machine according to claim 4, wherein the head moving device has a first head moving section moving the head in a first direction, and a second head moving section moving the head together with the first moving section in a second direction orthogonal to the first direction, the linear motor is applied to a drive source of the first head moving section, and the first cooling member has a heat sink formed with fins extending in the first direction or the second direction.

6. The component mounting machine according to claim 4 or 5, wherein the head moving device has a first head moving section moving the head in a first direction, and a second head moving section moving the head together with the first moving section in a second direction orthogonal to the first direction, the linear motor is applied to a drive source of the second head moving section, and the first cooling member has a heat sink formed with fins extending in the first direction or the second direction. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ The second cooling member has a fin formed with fins extending in the second direction. The second cooling member has a fin formed with fins extending in the second direction.

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