Automatic sample feeding device, processing equipment and automatic processing method

Abstract

The invention belongs to the technical field of vacuum machining, and discloses an automatic sample feeding device, machining equipment and an automatic machining method. The automatic sample feeding equipment comprises a pipeline, a track, a conveying assembly, a magnetic coupling system and a transfer mechanism. The pipeline is connected with the vacuum generator, and the vacuum generator can maintain the vacuum environment of the pipeline; the track is arranged in the pipeline, and the output direction is the same as the axis direction of the pipeline; the conveying assembly is arranged on the track, a bearing piece is arranged on the conveying assembly, and the bearing piece is used for bearing a sample; the magnetic coupling system is used for driving the conveying assembly to move in the output direction of the track. The transfer mechanism comprises a transfer cavity communicated with the pipeline, a transfer assembly is arranged in the transfer cavity, and the transfer assembly can extend into the pipeline and take down the bearing piece, so that the sample can be transferred to a processing station. The device can quickly and accurately complete automatic sample feeding. The machining equipment can improve the automation degree and reduce the labor cost. According to the method, the overall feeding and machining speed can be increased.

Description

Technical Field

[0001] This invention relates to the field of vacuum machining technology, and in particular to an automatic sample feeding device, machining equipment, and automatic machining method. Background Technology

[0002] Artificial vacuum can achieve a localized ultra-clean vacuum environment, which is of great significance for the preparation of specific materials and scientific research. To better utilize the high cleanliness characteristics of vacuum for continuous research device fabrication and performance testing, vacuum interconnection systems are typically used to ensure that research samples are not exposed to atmospheric contamination during transfer from one device to another. However, most existing technologies use magnetic coupling for transfer, which cannot accurately transfer samples into the processing chamber. Currently, domestic vacuum interconnection systems use manual or semi-automatic methods, meaning that sample transfer within the vacuum interconnection is achieved through manual adjustment. This inevitably requires a large amount of manpower during the preparation and testing process. While manual operation can mitigate the aforementioned problems, it requires a significant amount of time for adjustments. Transferring samples under vacuum conditions is extremely inconvenient, and when manpower is insufficient, it is impossible to manage multiple devices simultaneously, resulting in some devices being idle and reducing the effective utilization rate of the equipment.

[0003] Therefore, there is an urgent need for an automatic sample feeding device, processing equipment, and automatic processing method to accurately and quickly complete automatic sample feeding without manual operation. Summary of the Invention

[0004] The purpose of this invention is to provide an automatic sample feeding device that can solve the problems of inconvenience in taking materials from vacuum pipelines and the inability to feed materials quickly and accurately.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] An automatic sample feeding device, comprising:

[0007] A pipe is connected to a vacuum generator, which is capable of maintaining a vacuum environment in the pipe;

[0008] The track is installed inside the pipe, and the output direction is the same as the axial direction of the pipe;

[0009] A conveying assembly is disposed on the track, and a support member is provided on the conveying assembly for supporting the sample.

[0010] A magnetic coupling system is used to drive the transmission component to move along the output direction of the track;

[0011] The transfer mechanism includes a transfer chamber communicating with the pipeline, and a transfer component is provided in the transfer chamber. The transfer component can extend into the pipeline and remove the support member so that the sample can be transferred to the processing station.

[0012] Preferably, the conveying assembly further includes a conveying vehicle and a support bracket. The conveying vehicle is connected to the support bracket. The support bracket is provided with a first limiting member and the support member is provided with a first limiting hole. The first limiting member can be correspondingly engaged into the first limiting hole to limit the support member. The support member is also provided with a receiving groove for accommodating the sample.

[0013] Preferably, the support member is provided with at least two first limiting holes along its circumference, and the first limiting member is provided corresponding to the first limiting holes.

[0014] Preferably, at least two of the first limiting holes are symmetrically distributed on the support member.

[0015] Preferably, the diameter of the first limiting member shown gradually decreases in the direction away from the support bracket, and forms a first guide slope.

[0016] Preferably, the support bracket is further provided with a support member, and the first limiting member is provided on the support member. When the first limiting member extends into the first limiting hole, a reserved gap is formed between the bottom end of the support member and the support bracket.

[0017] Preferably, the transfer end of the transfer component is provided with a second limiting member, and the support member is provided with a second limiting hole, so that the transfer end can enter the reserved gap, and the second limiting member can extend into the second limiting hole.

[0018] Preferably, the support member is provided with at least two second limiting holes along its circumference, and the second limiting member is provided corresponding to the second limiting holes; and the diameter of the second limiting member gradually decreases in the direction away from the transfer end, forming a second guide slope.

[0019] Another object of the present invention is to provide a processing device that enables automated feeding and processing, thereby reducing labor costs.

[0020] To achieve this objective, the present invention adopts the following technical solution:

[0021] A processing apparatus includes a processing chamber and an automatic sample feeding device, the processing chamber being connected to a transfer chamber, and the transfer assembly being capable of transferring the support member along with the sample into the processing chamber.

[0022] Another object of the present invention is to provide an automated processing method that enables rapid and accurate feeding, thereby improving processing efficiency.

[0023] To achieve this objective, the present invention adopts the following technical solution:

[0024] An automated processing method, based on the processing equipment, includes the following steps:

[0025] S100, The magnetic coupling system drives the transmission component to move to the position where the pipe communicates with the transfer cavity;

[0026] S200, The transfer assembly extends into the pipe and removes the support;

[0027] S300: The support is transferred from the transfer chamber to the processing chamber so that the sample is processed.

[0028] S400, The transfer assembly removes the support from the processing cavity and transfers it to the conveying assembly.

[0029] The beneficial effects of this invention are:

[0030] This invention discloses an automatic sample feeding device. The automatic sample feeding device includes a pipe, a track, a conveying component, a magnetic coupling system, and a transfer mechanism. The pipe is connected to a vacuum generator, which maintains a vacuum environment within the pipe. The track is located inside the pipe, with its output direction aligned with the pipe's axis. The conveying component is mounted on the track and has a support member for supporting the sample. The magnetic coupling system drives the conveying component to move along the track's output direction. The transfer mechanism includes a transfer chamber connected to the pipe, within which a transfer component is installed. The transfer component extends into the pipe and removes the support member, allowing the sample to be transferred to a processing station. This device not only enables sample feeding and transfer under vacuum conditions but also solves the problem of inconvenience in manually removing samples from the pipe. It also provides fast and accurate sample feeding and is easy to operate.

[0031] The present invention also discloses a processing device that, by applying the above-mentioned sample feeding device, can realize automated feeding and processing, improve the degree of automation, and reduce labor costs.

[0032] The present invention also discloses an automatic processing method. Based on the above-mentioned processing equipment, the method can improve the speed of automated feeding and processing, thereby improving work efficiency. Attached Figure Description

[0033] Figure 1 This is a front view of the processing equipment provided by the present invention;

[0034] Figure 2 This is a schematic diagram of the processing equipment provided by the present invention;

[0035] Figure 3 This is a schematic diagram of the structure of the transmission component and transfer component provided by the present invention. Figure 1 ;

[0036] Figure 4 This is a schematic diagram of the structure of the transmission component and transfer component provided by the present invention. Figure 2 ;

[0037] Figure 5 This is a schematic diagram of the structure of the transfer support provided by the present invention.

[0038] In the picture:

[0039] 10. Pipeline; 11. Observation port;

[0040] 20. Track;

[0041] 30. Conveying assembly; 31. Support member; 311. First limiting hole; 312. Second limiting hole; 313. Receiving groove; 32. Conveying carriage; 33. Support bracket; 331. First limiting member; 332. Support member; 333. Positioning groove; 34. Reserved gap;

[0042] 40. Magnetic coupling system;

[0043] 50. Transfer mechanism; 51. Transfer cavity; 52. Transfer assembly; 521. Transfer end; 522. Second limiting element; 53. Transfer channel;

[0044] 60. Processing cavity. Detailed Implementation

[0045] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0046] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0047] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0048] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0049] This embodiment provides an automatic sample delivery device, such as... Figures 1-5 As shown, the device includes a pipe 10, a track 20, a conveying assembly 30, a magnetic coupling system 40, and a transfer mechanism 50. The pipe 10 is connected to a vacuum generator, which maintains a vacuum environment within the pipe 10. The track 20 is located within the pipe 10, with its output direction aligned with the axis of the pipe 10. The conveying assembly 30 is mounted on the track 20 and includes a support member 31 for supporting the sample. The magnetic coupling system 40 drives the conveying assembly 30 to move along the output direction of the track 20. The transfer mechanism 50 includes a transfer chamber 51 communicating with the pipe 10. A transfer assembly 52 is located within the transfer chamber 51, extending into the pipe 10 and removing the support member 31 to allow the sample to be transferred to a processing station.

[0050] In this device, pipe 10 is connected to a vacuum generator, and transfer chamber 51 is connected to pipe 10, so that feeding and transferring samples are carried out under vacuum conditions, thereby ensuring that the samples are not exposed to the atmosphere and introduced into the environment during the transfer process. In addition, transfer component 52 can remove the support 31 and the sample through the connection between transfer chamber 51 and pipe 10, and transfer it to the processing station to complete the processing of the sample. This solves the problem of inconvenience in manually taking materials from pipe 10, and can also quickly and accurately feed samples. It is easy to operate, highly automated, and enables continuous operation of the equipment.

[0051] It is worth noting that in this embodiment, the transfer component 52 is a crank-rocker mechanism, which is common, simple in structure, easy to install and use, and highly practical. In other embodiments, the transfer component 52 can be a mechanical gripper or other mechanism; any structure capable of removing the support 31 and transferring it to a suitable processing station is within the scope of protection disclosed in this embodiment. Furthermore, the device also includes a control system. The transfer component 30 includes a transfer cart 32 and a support bracket 33. The transfer cart 32 is connected to the support bracket 33, which is mounted on the track 20. The magnetic coupling system 40 is communicatively connected to the control system, and the control system is communicatively connected to the transfer cart 32. The magnetic coupling system 40 can drive the transfer cart 32 to move the support bracket 33 on the track 20 via the control system. Additionally, multiple observation ports 11 are provided along the axial direction of the pipe 10, allowing real-time observation of the internal condition of the pipe 10 and the specific position of the transfer component 30.

[0052] Furthermore, considering that when the magnetic coupling system 40 drives the support 31 to the position where the pipe 10 and the transfer cavity 51 are connected (the pipe 10 and the transfer cavity 51 are connected through the transfer channel 53), it cannot guarantee that the support 31 and the transfer cavity 51 are aligned (i.e., they cannot be aligned with the transfer channel 53). To solve this problem, such as... Figures 3-5 As shown, the support bracket 33 is provided with a positioning groove 333, and a positioning element is provided below the track 20. The positioning element and the projection of the transfer channel 53 in the vertical direction are on the same straight line. The end of the positioning element is conical (the diameter gradually decreases along the direction close to the track 20). After the support member 31 moves to the transfer channel 53, the positioning element extends vertically upward, and its conical end can first enter the positioning groove 333. As the positioning element gradually enters the positioning groove 333, it can drive the support bracket 33 to a preset position. Since the projection of the positioning element and the transfer channel 53 in the vertical direction are on the same straight line, when the positioning element is fully entered into the positioning groove 333, the support bracket 33 can move exactly to the position where the support member 31 and the transfer channel 53 are directly opposite, thereby improving the transfer speed and accuracy of the transfer assembly 52 in transferring the support member 31, and thus improving the overall working efficiency. Furthermore, to improve positioning accuracy, multiple positioning grooves 333 can be provided.

[0053] like Figures 2-5As shown, the support bracket 33 is provided with a first limiting member 331, and the support member 31 is provided with a first limiting hole 311. The first limiting hole 311 can be correspondingly engaged with the support member 311 to limit the support member 31. The support member 31 is also provided with a receiving groove 313 for accommodating the sample. This arrangement can ensure the stability of the support member 31 during the feeding process, ensuring that the support member 31 will not shake during the conveying process, thereby preventing the sample from falling off during the feeding process. In addition, the support member 31 is also provided with a receiving groove 313. Placing the sample in the receiving groove 313 can prevent the sample from falling off the support member 31 during the feeding process, thereby ensuring a good feeding effect. It should be noted that in this embodiment, the support member 31 accommodates and fixes the sample through the receiving groove 313. In other embodiments, clamping members, fixing plates, and other structures can also be used to fix the sample. Structures that can fix the sample are all within the scope of protection disclosed in this example.

[0054] To further ensure the stability of the support component 31, such as Figures 3-5 As shown, the support member 31 has at least two first limiting holes 311 arranged along its circumference, and first limiting members 331 are correspondingly arranged with the first limiting holes 311. The multiple first limiting holes 311 and multiple first limiting members 331 further ensure the fixation of the support member 31, thereby making the support member 31 more stable during the feeding process. It should be noted that in this embodiment, there are two first limiting holes 311, and the two first limiting holes 311 are symmetrically distributed on the support member 31. This arrangement ensures the uniformity of force on the support member 31, thus producing a good fixing effect. In other embodiments, more first limiting holes 311 can also be provided, as long as the multiple first limiting holes 311 are evenly and symmetrically distributed along the circumference of the support member 31; no other limitations are made in this embodiment.

[0055] To make it easier to place the support component 31, such as Figures 3-5 As shown, the diameter of the first limiting member 331 gradually decreases in the direction away from the support bracket 33, forming a first guide slope. When the support member 31 is placed on the support bracket 33, the first limiting member 331 needs to be inserted into the first limiting hole 311. This arrangement facilitates the insertion of the first limiting member 331 into the first limiting hole 311, effectively avoiding the inconvenience of the first limiting member 331 being directly aligned with the first limiting hole 311, and the problem of excessive friction between the first limiting member 331 and the first limiting hole 311 making it difficult to enter.

[0056] In addition, such as Figures 3-5As shown, the support bracket 33 is also provided with a support member 332, and a first limiting member 331 is provided on the support member 332. When the first limiting member 331 extends into the first limiting hole 311, a reserved gap 34 is formed between the bottom end of the support member 31 and the support bracket 33. The support member 31 is supported by the support member 332, and the reserved gap 34 is formed between the bottom end of the support member 31 and the top end of the support bracket 33. This allows the transfer component 52 to easily extend into the reserved gap 34, thereby enabling the support member 31 to be quickly and accurately removed from the first limiting member 331. This simplifies the operation, overcomes the shortcomings of mechanical operation in handling complex processes, and improves feeding efficiency.

[0057] To ensure the stability of the transfer support 31 during the process, such as Figures 3-5 As shown, the transfer end 521 of the transfer assembly 52 is provided with a second limiting member 522, and the support member 31 is provided with a second limiting hole 312. The transfer end 521 can extend into the reserved gap 34 so that the second limiting member 522 can extend into the second limiting hole 312. After the transfer end 521 extends into the reserved gap 34, by adjusting its position, the second limiting member 522 is aligned with the first limiting hole 311. At this time, the transfer assembly 52 can drive the transfer end 521 upward in the vertical direction so that the second limiting member 522 can correspondingly extend into the second limiting hole 312. Continuing to move upward, the transfer end 521 can abut against the bottom of the support member 31 and support the support member 31 upward, thereby removing the support member 31 from the support member 332 and transferring it to the processing station. In this structure, when the support 31 is transferred, the transfer end 521 can not only provide upward support force, but the second limiting member 522 can also limit the support 31, thereby ensuring stability and reliability during the transfer process; at the same time, the simple and convenient operation method can also ensure the high efficiency of feeding.

[0058] It should be noted that in this embodiment, the support member 31 is provided with at least two second limiting holes 312 along its circumference, and the second limiting member 522 is correspondingly provided with the second limiting holes 312; and the diameter of the second limiting member 522 gradually decreases in the direction away from the transfer end 521, forming a second guide slope. Through multiple second limiting holes 312 and multiple second limiting members 522, the fixing effect of the support member 31 during the transfer of the support member 31 can be further ensured, thereby ensuring the stability of the support member 31 during the transfer process. The gradually decreasing diameter of the second limiting member 522 in the direction away from the transfer end 521 facilitates the insertion of the second limiting member 522 into the second limiting hole 312, effectively avoiding the inconvenience of the second limiting member 522 and the second limiting hole 312 being directly aligned, and the problem of excessive friction between the second limiting member 522 and the second limiting hole 312 making it difficult to enter, thereby improving the transfer efficiency.

[0059] It should be noted here that, as Figures 3-5 As shown, in this embodiment, two second limiting holes 312 are provided, and the two second limiting holes 312 are symmetrically distributed on the support member 31. This arrangement can ensure the uniformity of force when transferring the support member 31. In other embodiments, multiple second limiting holes 312 can also be provided, as long as the multiple second limiting holes 312 can be evenly and symmetrically distributed along the circumference of the support member 31. No other limitations are made in this embodiment. Furthermore, the transfer cavity 51 is perpendicularly connected to the transfer channel 53 of the pipe 10. The two first limiting holes 311 and the two second limiting holes 312 are all set on the outer periphery of the receiving groove 313. The line connecting the two first limiting holes 311 is in the same direction as the axis of the pipe 10, and the line connecting the two second limiting holes 312 is perpendicular to the axis of the pipe 10 (that is, the axis of the transfer channel 53). This allows the two second limiting members 522 to be directly aligned with the two second limiting holes 312 after the transfer end 521 extends into the reserved gap 34 along the axis of the transfer channel 53. No angle adjustment is required, thereby improving the transfer speed of the support member 31.

[0060] Based on the aforementioned automatic feeding device, this embodiment also provides a processing equipment, such as... Figures 1-2 As shown, the device includes a processing chamber 60 and the aforementioned automatic sample feeding device. The processing chamber 60 is connected to the transfer chamber 51, and the transfer assembly 52 can transfer the sample connected to the support 31 into the processing chamber 60. This device not only ensures that the feeding, transfer, and processing processes are all carried out in a vacuum environment, but also improves the overall automation level and work efficiency, greatly reducing labor costs.

[0061] Based on the above-mentioned processing equipment, this embodiment also provides an automatic processing method, which includes the following steps:

[0062] S100, the magnetic coupling system 40 drives the transmission assembly 30 to move along the output direction of the track 20 to the position where the pipe 10 and the transfer cavity 51 are connected (at the position of the transfer channel 53);

[0063] S200, the transfer assembly 52 passes through the transfer channel 53 and extends into the pipe 10, placing the transfer end 521 at the reserved gap 34, so that the transfer end 521 moves upward in the vertical direction to remove the support 31.

[0064] S300, the support 31 is transferred into the processing chamber 60 through the transfer chamber 51 so that the sample can be processed.

[0065] S400 After processing is completed, the transfer assembly 52 removes the support 31 from the processing chamber 60 and transfers it back to the conveying assembly 30 for subsequent feeding, and so on.

[0066] In summary, the automatic feeding device provided in this embodiment can solve the problems of inconvenience in picking up materials from vacuum pipelines and the inability to feed materials quickly and accurately; the processing equipment using the above device can realize automated feeding and processing, reducing labor costs; finally, based on the above processing equipment, the use of automatic processing methods can further improve processing efficiency and processing speed.

[0067] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. An automatic sample delivery device characterized by, The application relates to a sample transfer device. The device comprises a pipeline (10) connected with a vacuum generator capable of maintaining a vacuum environment of the pipeline (10); a track (20) arranged in the pipeline (10) and having an output direction same as the axial direction of the pipeline (10); a conveying assembly (30) arranged in the track (20), the conveying assembly (30) being provided with a supporting piece (31) for supporting a sample; a magnetic coupling system (40) for driving the conveying assembly (30) to move along the output direction of the track (20); and a transfer mechanism (50) comprising a transfer cavity (51) in communication with the pipeline (10), the transfer cavity (51) being provided with a transfer assembly (52) capable of extending into the pipeline (10) and removing the supporting piece (31) so that the sample can be transferred to a processing station. The conveying assembly (30) further comprises a conveying trolley (32) and a supporting bracket (33), the conveying trolley (32) being connected with the supporting bracket (33), the supporting bracket (33) being provided with a first limiting piece (331), the supporting piece (31) being provided with a first limiting hole (311), the first limiting piece (331) being capable of being correspondingly clamped into the first limiting hole (311) to limit the supporting piece (31), and the supporting piece (31) being further provided with a containing groove (313) for containing the sample. The supporting piece (31) is provided with at least two first limiting holes (311) along the circumferential direction, and the first limiting piece (331) is correspondingly arranged in the first limiting hole (311). The at least two first limiting holes (311) are symmetrically distributed on the supporting piece (31). The diameter of the first limiting piece (311) gradually decreases in a direction away from the supporting bracket (33) and forms a first guide inclined surface.

2. The automatic sample delivery device of claim 1, wherein, The supporting bracket (33) is further provided with a supporting piece (332), the first limiting piece (331) is arranged on the supporting piece (332), and when the first limiting piece (331) extends into the first limiting hole (311), a reserved gap (34) is formed between the bottom end of the supporting piece (31) and the supporting bracket (33).

3. The automatic sample delivery device of claim 2, wherein, The transfer end (521) of the transfer assembly (52) is provided with a second limiting piece (522), the supporting piece (31) is provided with a second limiting hole (312), the transfer end (521) can enter the reserved gap (34), and the second limiting piece (522) can extend into the second limiting hole (312).

4. The automatic sample delivery device of claim 3, wherein, The supporting piece (31) is provided with at least two second limiting holes (312) along the circumferential direction, the second limiting piece (522) is correspondingly arranged in the second limiting hole (312), and the diameter of the second limiting piece (522) gradually decreases in a direction away from the transfer end (521) and forms a second guide inclined surface.

5. The automatic sample delivery device of any one of claims 2-4, wherein, ​ 6. The automatic sample delivery device of any one of claims 2-4, wherein, ​ 7. The automatic sample delivery device of claim 6, wherein ​ 8. The automatic sample delivery device of claim 7, wherein, ​ 9. A processing apparatus characterized by comprising: The processing cavity (60) is in communication with the transfer cavity (51), and the transfer assembly (52) is capable of transferring the support (31) together with the sample into the processing cavity (60).

10. An automated processing method, characterized by, The processing equipment according to claim 9, wherein the automatic processing method comprises the following steps: S100, the magnetic coupling system (40) drives the transfer assembly (30) to move to a position where the pipeline (10) is in communication with the transfer cavity (51); S200, the transfer assembly (52) extends into the pipeline (10) and takes off the support (31); S300, the support (31) is transferred into the processing cavity (60) through the transfer cavity (51) so that the sample is processed; S400, the transfer assembly (52) takes out the support (31) from the processing cavity (60) and transfers it to the transfer assembly (30).

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