Cavity cover opening and closing device and semiconductor process equipment

Abstract

The invention provides an opening and closing device of a cavity cover and a semiconductor process chamber, the opening and closing device is used for opening and closing the cavity cover of the semiconductor process chamber, and the opening and closing device comprises a driving assembly, a locking assembly and a control system; the driving assembly comprises a driving air cylinder and is used for driving the cavity cover to move, so that the cavity cover is switched between an opening state and a closing state; the locking assembly is used for limiting the driving assembly when the cavity cover is in an open state; the control system comprises a driving control system, and the driving control system is used for controlling the driving assembly to drive the cavity cover to move and is further used for keeping the cavity cover in the locking state when the cavity cover is in the opening state. The locking component can mechanically lock the driving control system, and meanwhile, the driving control system is maintained in a locking state, so that the control system is locked. And the opening and closing device performs double locking, so that the locking reliability of the cavity cover is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing, and more specifically, to a cavity cover opening and closing device and semiconductor process equipment. Background Technology

[0002] In recent years, with the continuous development of science and technology, the market demand for integrated circuit-related fabrication technologies has been constantly increasing. Etching technology is one of the main technologies for integrated circuit fabrication, and the etching reaction chamber is one of the main pieces of equipment for the process. The opening methods of the reaction chamber cover include flip-top and lift-up types. Among them, the flip-top type is mostly used in non-plasma physical or chemical etching processes.

[0003] As a moving part, the top cover has a certain weight. When the flip-top cover is open, it may tip over due to external force or failure of the original limit switch. Therefore, it is necessary to reduce the possibility of the top cover falling or tipping over when the operator is performing chamber maintenance because it is not locked. Similarly, when closing the top cover, if manual unlocking is required, there is also the possibility of improper operation by the operator, resulting in failure to unlock and forced closure.

[0004] In addition, most existing top covers use a contact handle design. If there is insufficient space reserved at the top, there is a safety hazard of burns to the operator when opening and closing the top cover. Summary of the Invention

[0005] This application aims to solve at least one of the technical problems existing in the prior art, and proposes a cavity cover opening and closing device and semiconductor process equipment, which can improve the reliability of the opening and locking.

[0006] To achieve the purpose of this application, a cavity cover opening and closing device is provided for opening and closing the cavity cover of a semiconductor process cavity, including a driving component, a locking component, and a control system;

[0007] The drive assembly includes a drive cylinder, which drives the cavity cover to move, so that the cavity cover switches between an open state and a closed state.

[0008] The locking component is used to limit the drive component when the cavity cover is in the open state;

[0009] The control system includes a drive control system, which controls the drive assembly to drive the cavity cover to move, and also maintains the cavity cover in a locked state when it is in an open state.

[0010] In some embodiments, an unlocking component is also included, the unlocking component including an unlocking cylinder;

[0011] The unlocking component is used to move away from the locking component when the cavity cover is in the open state; it is also used to contact the locking component to release the locking component from the driving component when the cavity cover is to be switched to the closed state.

[0012] The control system further includes an unlocking control system, which controls the movement of the unlocking component to contact or move away from the locking component.

[0013] In some embodiments, the drive control system includes a locking component connected to the unlocking control system;

[0014] The unlocking control system is further configured to control the locking component to lock the drive control system when the cavity cover is in the open state, so that the drive control system remains in the locked state; and to control the locking component to unlock the drive control system when the cavity cover is to be switched to the closed state.

[0015] In some embodiments, the unlocking control system includes an unlocking air passage connected to the second chamber of the unlocking cylinder;

[0016] The drive control system includes a cover-closing air passage connected to the first chamber of the drive cylinder;

[0017] The locking component includes a first isolation valve, the control port of which is connected to the unlocking air passage. In response to the unlocking air passage being closed, the first isolation valve keeps the closing air passage normally closed; in response to the unlocking air passage being ventilated, the first isolation valve opens the closing air passage.

[0018] In some embodiments, the unlocking control system further includes a reset air passage connected to the first chamber of the unlocking cylinder, and the drive control system further includes a cover discharge air passage connected to the second chamber of the drive cylinder.

[0019] The locking component includes a second isolation valve, the control port of which is connected to the exhaust pipe of the reset air circuit. In response to the exhaust pipe of the reset air circuit being closed, the second isolation valve keeps the cover-closing exhaust air circuit in a normally closed state; in response to the exhaust pipe of the reset air circuit being vented, the second isolation valve opens the cover-closing exhaust air circuit.

[0020] In some embodiments, the drive control system further includes an open-cover air passage for inflating the second chamber of the drive cylinder;

[0021] The opening air passage is equipped with a one-way valve and an opening tee. The opening tee is located between the one-way valve and the drive cylinder. The three ports of the opening tee are respectively connected to the one-way valve, the drive cylinder, and the closing exhaust air passage.

[0022] In some embodiments, the unlocking air path is provided with an unlocking tee, the three ports of which are respectively connected to an air source, the second chamber of the unlocking cylinder, and the control port of the first isolation valve.

[0023] In some embodiments, the control system further includes a valve island connected to an air source, the valve island including a first intake valve, a second intake valve, a third intake valve and a fourth intake valve;

[0024] The unlocking air path connects the first intake valve and the first chamber of the unlocking cylinder; the reset air path connects the second intake valve and the second chamber of the unlocking cylinder; the opening air path connects the third intake valve and the first chamber of the driving cylinder; and the closing air path includes a connection between the fourth intake valve and the second chamber of the driving cylinder.

[0025] In some embodiments, the lid-closing air passage is provided with a lid-closing exhaust valve, which is located between the first isolation valve and the drive cylinder. The lid-closing exhaust valve allows airflow flowing towards the drive cylinder to pass through and discharges airflow from the drive cylinder into the lid-closing air passage; and / or,

[0026] The reset air circuit is provided with a reset exhaust valve, which is located between the second isolation valve and the unlocking cylinder. The reset exhaust valve allows airflow to flow to the unlocking cylinder and discharges airflow from the unlocking cylinder through the exhaust pipe of the reset air circuit; and / or, the unlocking air circuit is provided with an unlocking exhaust valve, which is located between the unlocking tee and the unlocking cylinder. The unlocking exhaust valve allows airflow to flow to the unlocking cylinder and discharges airflow from the unlocking cylinder through the unlocking air circuit.

[0027] In some embodiments, the drive assembly further includes a transmission assembly, which includes a push rod, a transmission element, and a mounting base;

[0028] The mounting base has a moving channel, the transmission component is movably disposed in the moving channel, the driving cylinder is connected to the first end of the push rod through the transmission component, the second end of the push rod is connected to one of the cavity cover and the cavity body, and the driving cylinder is connected to the other. The driving cylinder is used to push the push rod to drive the cavity cover to switch between an open state and a closed state.

[0029] In some embodiments, the transmission element includes a transmission rod and a slider;

[0030] The slider is disposed in the moving channel and is hinged to the first end of the push rod. One end of the transmission rod is connected to the slider and the other end is connected to the drive cylinder.

[0031] The locking component is mounted on the slider, and the side wall of the moving channel is provided with a locking mechanism. The locking mechanism is used to cooperate with the locking component to limit the slider when the cavity cover is in the open state, and fix the slider in the moving channel.

[0032] In some embodiments, the locking component includes a locking pin and an elastic element, and the locking mechanism includes a locking hole;

[0033] When the cavity cover is in the closed state, the locking pin is pressed by the side wall of the moving channel and is at least partially located inside the slider; the elastic element is used to restore its deformation when the slider drives the push rod to move until the cavity cover is in the open state, so as to push the locking pin into the locking hole.

[0034] In some embodiments, the locking assembly further includes a mounting sleeve, the elastic element and the locking pin are both disposed within the mounting sleeve, the slider is provided with a threaded hole, and the outer surface of the mounting sleeve is provided with an external thread for connecting with the threaded hole.

[0035] In some embodiments, the unlocking assembly further includes an unlocking member and a fixedly disposed hinge shaft, wherein the unlocking cylinder is used to push the unlocking member to rotate about the hinge shaft and push the locking assembly to unlock through the end of the unlocking member away from the unlocking cylinder.

[0036] In some embodiments, the center of gravity of the unlocking element is located between the unlocking cylinder and the hinge shaft.

[0037] In some embodiments, the cap-opening air path is provided with a cap-opening control valve, which is used to control the inflation speed of the second chamber of the drive cylinder, and / or

[0038] The cover-closing exhaust air path is equipped with a cover-closing control valve, which is used to control the exhaust speed of the first chamber of the drive cylinder.

[0039] This application also provides a semiconductor process apparatus, including a cavity cover, a cavity body, and an opening and closing device for the cavity cover as described above, wherein the opening and closing device is used to open and close the cavity cover.

[0040] This application has the following beneficial effects:

[0041] The cavity cover opening and closing device provided in this application uses a drive assembly to open and close the cavity cover, eliminating the need for manual operation and thus preventing burns. The drive control system drives the drive assembly to perform the opening and closing operations and maintains the drive assembly in the open or closed position. The control system locks the open or closed state, preventing the cavity cover from flipping, falling, or being manually closed. After the cavity cover is opened, a locking assembly mechanically locks the drive assembly, preventing the cavity cover from closing due to external force. The drive control system maintains the locked state after the cavity cover is opened, preventing accidental contact or misoperation that could cause the cavity cover to close, thus improving the reliability of the cavity cover locking. Attached Figure Description

[0042] Figure 1 A schematic diagram of the cavity cover opening and closing device provided in a specific embodiment of this application when it is used in conjunction with semiconductor process equipment to close the cavity cover;

[0043] Figure 2 A schematic diagram of the cavity cover opening and closing device provided in a specific embodiment of this application when it is used in conjunction with semiconductor process equipment to open the cavity cover;

[0044] Figure 3 A schematic diagram of the opening and closing device of the cavity cover provided in a specific embodiment of this application;

[0045] Figure 4 This is a schematic diagram of a pneumatic system.

[0046] Figure 5 for Figure 3 Schematic diagram of the middle transmission assembly;

[0047] Figure 6 for Figure 5 Cross-sectional view of the transmission assembly;

[0048] Figure 7 for Figure 3 A schematic diagram of the structure of the drive cylinder and pneumatic components;

[0049] Figure 8 for Figure 3 A cross-sectional view of the connection point between the drive cylinder and the transmission assembly;

[0050] Figure 9 for Figure 8 Enlarged view of point I in the middle;

[0051] Figure 10 for Figure 3 A schematic diagram of the structure of the unlocking component and the transmission component working together;

[0052] Figure 11 for Figure 10 Cross-sectional view of the unlocking component and the transmission component;

[0053] Figure 12 This is a schematic diagram of the overall structure of the semiconductor process equipment in the closed state.

[0054] Figure 13 This is a schematic diagram of the overall structure of the semiconductor process equipment in the open state.

[0055] in, Figures 1 to 13 The attached figures are labeled as follows:

[0056] 1. Cavity cover; 2. Cavity body; 3. Opening and closing device; 4. Drive cylinder; 5. Cylinder seat; 6. Transmission assembly; 7. Push rod; 8. Mounting seat; 9. Moving channel; 10. Transmission rod; 11. Slider; 12. Stainless steel pin; 13. Bushing; 14. Cylindrical pin; 15. Slider set screw; 16. Unlocking assembly; 17. Unlocking cylinder; 18. Fixed seat; 19. Connecting piece; 200. Pressure rod push shaft; 201. Pressure rod; 202. Control system; 203. Reset air passage; 204. First intake valve; 205. Reset exhaust valve; 206. First overflow valve; 207. Exhaust pipe; 208. Unlocking air passage; 209. Second intake valve; 200. Air valve 421, unlocking tee 422, unlocking exhaust valve 423, first silencer 424, cover-closing air passage 430, third intake valve 431, first isolation valve 432, second overflow valve 433, cover-closing exhaust valve 434, second silencer 435, cover-opening air passage 440, fourth intake valve 441, cover-opening control valve 442, one-way valve 443, cover-opening tee 444, cover-closing exhaust air passage 445, cover-closing control valve 446, second isolation valve 447, third silencer 448, adjusting assembly 500, adjusting screw 501, adjusting nut 502, adjusting washer 503, stop screw 504, locking assembly 600. Detailed Implementation

[0057] To enable those skilled in the art to better understand the technical solutions of this application, the opening and closing device for the cavity cover and the semiconductor process equipment provided in this application will be described in detail below with reference to the accompanying drawings.

[0058] The semiconductor process equipment provided in this application includes a cavity cover 1 and a cavity body 2. The cavity cover 1 is movable relative to the cavity body 2 to expose / close the cavity body 2. Specifically, when the cavity cover 1 is in a closed state (e.g., Figure 1 As shown), the cavity cover 1 is placed on the cavity body 2, and the cavity body 2 is in a closed state; when the cavity cover 1 is in the open state (as shown), Figure 2 As shown, the cavity cover 1 can no longer move further away from the cavity body 2, and the cavity body 2 is exposed.

[0059] The opening and closing device 3 of the cavity cover 1 provided in this application includes a drive assembly, a locking assembly 600, and a control system. The drive assembly includes a drive cylinder, which drives the cavity cover 1 to move, switching the cavity cover 1 between an open state and a closed state to expose or close the cavity body 2; the locking assembly 600 limits the drive assembly when the cavity cover 1 is in the open state; the control system includes a drive control system, which controls the drive assembly to drive the cavity cover 1 to move, and also maintains the cavity cover 1 in the locked state when it is in the open state.

[0060] In this embodiment, the cavity cover 1 can adopt a flip-top structure, that is, one side of the cavity cover 1 is hinged to the cavity body 2. The driving component can drive the cavity cover 1 to flip relative to the cavity body 2 to realize the opening and closing of the cavity cover 1, that is, to realize the state switching between the open state and the closed state of the cavity cover 1. The locking component 600 can limit the driving component through pin positioning or support positioning to keep the cavity cover 1 in the open state.

[0061] Figure 3 In the specific embodiment shown, the drive component can push the cavity cover 1 to flip up 95° relative to the cavity body 2, thereby opening the cavity cover 1. The user can set the flipping angle of the cavity cover 1 as needed, which is not limited here.

[0062] Figure 3 In the specific embodiment shown, the drive cylinder 100 is the power source for the drive assembly. The drive control system can control the extension and retraction of the drive cylinder 100, thereby driving the cavity cover 1 to move and switching the cavity cover 1 between an open state and a closed state. Furthermore, when the cavity cover is in the open state, the drive control system maintains it in a locked state. At this time, the drive control system cannot control the operation of the drive cylinder 100, thus preventing accidental closing of the cover due to misoperation of the drive control system.

[0063] In this embodiment, the opening and closing device 3 is equipped with a locking component to mechanically lock the driving component, thereby preventing accidental closing of the semiconductor process chamber. The opening and closing device 3 also controls the opening and closing of the chamber cover 1 through the drive control system. When the chamber cover 1 is in the open state, the drive control system is in the locked state, thereby preventing accidental closing caused by misoperation of the control system and improving the safety of the semiconductor process equipment.

[0064] In some embodiments, the opening and closing assembly 3 further includes an unlocking component 300, which includes an unlocking cylinder 301. The unlocking component 300 is used to move away from the locking component 600 when the cavity cover 1 is in the open state, and is also used to contact the locking component 600 to release the locking component 600 from limiting the drive component when the cavity cover 1 is to be switched to the closed state.

[0065] The control system 400 includes an unlocking control system for controlling the movement of the unlocking component 300 to contact or move away from the locking component 600.

[0066] Figure 3 In the specific embodiment shown, the unlocking component 300 is pneumatically driven. Of course, the unlocking component 300 can also be electrically driven or driven by other means. This application uses pneumatic drive as an example for explanation; other driving methods can be referred to pneumatic drive and will not be elaborated here.

[0067] In the semiconductor process chamber, the unlocking component 300 must first unlock the locking component 600 before the drive component can actuate and close the chamber cover 1. The unlocking cylinder 301 is the power source for the unlocking component 300, and the unlocking control system can control the action of the unlocking cylinder 301, thereby enabling the unlocking component 300 to complete the unlocking operation. The unlocking process is completed under pneumatic control, reducing personnel contact with the semiconductor process chamber and lowering the risk of burns and other injuries.

[0068] In some embodiments, the drive control system includes a locking component connected to an unlocking control system; the unlocking control system is further configured to control the locking component to lock the drive control system when the cavity cover 1 is in the open state, so that the drive control system remains in the locked state; and is further configured to control the locking component to unlock the drive control system when the cavity cover 1 is to be switched to the closed state.

[0069] When the locking component locks the drive control system under the control of the unlocking control system, the drive component will not perform a corresponding action even if the drive control system makes a control action. Specifically, when the locking component locks the drive control system, the drive control system intends to control the drive component to perform a lid-closing action, but since the drive control system is locked, the drive component cannot perform the lid-closing action. After the unlocking control system controls the unlocking component 300 to perform an unlocking action (i.e., controls the unlocking component to move towards the locking component 600 until it contacts the locking component), the locking component 600 releases its restriction on the drive component, and the locking component releases its lock on the drive control system under the control of the unlocking control system. At this time, the drive component can drive the cavity cover 1 to move towards the cavity body 2 under the control of the drive control system to perform a lid-closing action, ultimately achieving the closure of the cavity cover 1 and the cavity body 2.

[0070] In this embodiment, driven by the drive assembly, the cavity cover 1 can automatically open and close relative to the cavity body 2. Operators no longer need to manually operate it, avoiding direct contact with the high-temperature cavity cover 1 and reducing the risk of burns. Furthermore, after the drive assembly pushes the cavity cover 1 fully open, the locking component 600 limits its movement, providing support for the open cavity cover 1 and preventing accidental closure due to drive assembly failure, thus improving machine safety. In addition, the opening and closing device 3 of the cavity cover 1 also achieves control locking by locking the drive control system through a locking component. The opening and closing device 3 uses both mechanical locking and control locking to maintain the cavity cover 1 in the open state, improving the reliability of the cavity cover 1 locking. Mechanical unlocking constitutes a prerequisite for control unlocking. Before the unlocking control system issues an unlocking action to the locking component, the drive control system locked by the locking component cannot control the drive assembly to close the cover, further reducing the risk of accidental closure due to misoperation and improving machine safety.

[0071] like Figure 3 As shown, in some embodiments, the unlocking cylinder 301 includes at least two chambers and a piston. Air intake in one chamber drives the piston to move, increasing the volume of that chamber while decreasing the volume of the other chamber. The drive assembly includes a drive cylinder 100, which includes at least two chambers and a piston. Air intake in the first chamber of the drive cylinder 100 drives the power output of the drive cylinder 100 to the chamber cover until the chamber cover is pushed to the closed position. At this time, the piston of the drive cylinder 100 moves to the beginning of its stroke, and the volume of the second chamber is approximately zero. Air intake in the second chamber of the drive cylinder 100 drives the power output of the drive cylinder 100 to the chamber cover until the chamber cover is pushed to the open position. At this time, the piston of the drive cylinder 100 moves to the end of its stroke, and the volume of the first chamber is approximately zero. The unlocking control system includes an unlocking air passage 420 connected to the second chamber of the unlocking cylinder 301; the drive control system includes a closing air passage 430 connected to the first chamber of the drive cylinder 100; the locking component includes a first isolation valve 432, the control port of which is connected to the unlocking air passage 420. In response to the unlocking air passage 420 being closed, the first isolation valve 432 keeps the closing air passage 430 normally closed; in response to the unlocking air passage 420 being ventilated, the first isolation valve 432 opens the closing air passage 430.

[0072] In this embodiment, the opening and closing device 3 uses a pneumatic method to control the opening and closing of the cavity cover 1. Specifically, the drive cylinder 100 provides power for the opening and closing of the cavity cover 1. When the drive assembly is not limited, when the first chamber of the drive cylinder 100 is inflated, the piston inside the drive cylinder 100 moves towards the second chamber under the action of air pressure, increasing the volume of the first chamber and deflating the second chamber, thus reducing its volume and causing the cavity cover 1 to close. When the second chamber of the drive cylinder 100 is inflated, the piston inside the drive cylinder 100 moves towards the first chamber under the action of air pressure, increasing the volume of the second chamber and deflating the first chamber, thus reducing its volume and causing the cavity cover 1 to open. The locking assembly 600 can limit the drive assembly after the cavity cover 1 is fully opened, keeping the drive assembly in the position that supports the cavity cover 1 in the open state, thus achieving mechanical locking of the drive assembly.

[0073] The unlocking cylinder 301 provides power for the unlocking and locking assembly 600 to lock the drive assembly. Specifically, the second chamber of the unlocking cylinder 301 is inflated, and under the action of air pressure, the piston inside the unlocking cylinder 301 moves towards the first chamber, increasing the volume of the second chamber. Meanwhile, the first chamber is deflated, reducing its volume, and the unlocking assembly 300 moves closer to the locking assembly 600, eventually contacting it to release the locking assembly 600 from locking the drive assembly. Conversely, the first chamber of the unlocking cylinder 301 is inflated, and under the action of air pressure, the piston inside the unlocking cylinder 301 moves towards the second chamber, increasing its volume. Meanwhile, the second chamber is deflated, reducing its volume, and the unlocking assembly 300 moves away from the locking assembly 600.

[0074] The control port of the first isolation valve 432 is connected to the unlocking air passage 420. When there is no air in the unlocking air passage 420, the first isolation valve 432 keeps the closing air passage 430 in a normally closed state. At this time, the first chamber of the drive cylinder 100 cannot be filled with gas (i.e., the drive control system remains in a locked state), so the chamber cover 1 cannot be closed. When the unlocking air passage 420 is filled with air, on the one hand, the second chamber of the unlocking cylinder 301 can be filled with air through the unlocking air passage 420, and the unlocking cylinder 301 can release the restriction of the locking component 600 on the drive component. On the other hand, the valve position of the first isolation valve 432 changes to open the closing air passage 430 (i.e., the drive control system is in an unlocked state). At this time, the first chamber of the drive cylinder 100 can be filled with air through the closing air passage 430, so that the drive cylinder 100 drives the chamber cover 1 to close.

[0075] Figure 4In the specific embodiment shown, the first isolation valve 432 can be a two-position two-way valve. Under normal conditions, the two-position two-way valve is in the closed position supported by an internal spring, keeping the cover-closing air passage 430 normally closed. After air enters the unlocking air passage 420, the two-position two-way valve switches to the open position under air pressure, creating a passage in the cover-closing air passage 430, making it possible to fill the first chamber of the drive cylinder 100 with gas. After the unlocking air passage 420 stops entering air, the control port of the two-position two-way valve loses pressure, and the two-position two-way valve returns to the closed position under the push of the internal spring, and the cover-closing air passage 430 returns to the normally closed state again. Of course, the first isolation valve 432 can also be other types of valves, which are not limited here.

[0076] Optionally, a cover-closing exhaust valve 434 is provided in the cover-closing air passage 430. The cover-closing exhaust valve 434 is located between the first isolation valve 432 and the drive cylinder 100. The cover-closing exhaust valve 434 allows airflow flowing towards the drive cylinder 100 to pass through and discharges airflow from the drive cylinder 100 from the cover-closing air passage 430.

[0077] like Figure 4 As shown, specifically, during the closing of the control chamber cover 1, control gas passes through the cover-closing exhaust valve 434 and enters the first chamber of the drive cylinder 100; during the opening of the control chamber cover 1, the gas discharged from the first chamber of the drive cylinder 100 enters the cover-closing exhaust valve 434 and is discharged from the exhaust port of the cover-closing exhaust valve 434. In addition, to reduce exhaust noise, the exhaust port of the cover-closing exhaust valve 434 is connected to a second muffler 435, and the gas flowing out through the exhaust port of the cover-closing exhaust valve 434 is finally discharged from the cover-closing air passage 430 via the second muffler 435.

[0078] Optionally, a second relief valve 433 is provided between the cover-closing exhaust valve 434 and the drive cylinder 100. The second relief valve 433 can prevent excessive pressure in the cover-closing air passage 430. Furthermore, the second relief valve 433 can be an adjustable relief valve, which can be pre-configured to adjust the intake pressure of the drive cylinder 100. Of course, other types of relief valves can also be used for the second relief valve 433, and this is not limited here.

[0079] In this embodiment, the first isolation valve 432 blocks the air passage 430 for closing the cover, preventing air from being supplied to the first cavity of the drive cylinder 100 to lock the drive component, thereby reducing the possibility of the cover in the open state closing unexpectedly and improving the reliability of the machine.

[0080] In some embodiments, the unlocking control system further includes a reset air passage 410 connected to the first chamber of the unlocking cylinder 301, and the drive control system further includes a cover-closing exhaust air passage 445 connected to the second chamber of the drive cylinder 100; the locking component includes a second isolation valve 447, the control port of the second isolation valve 447 being connected to the reset air passage 410; in response to the exhaust pipe 414 of the reset air passage 410 being closed, the second isolation valve 447 keeps the cover-closing exhaust air passage 445 in a normally closed state; in response to the exhaust pipe 414 of the reset air passage 410 being open, the second isolation valve 447 opens the cover-closing exhaust air passage 445.

[0081] The reset air passage 410 is connected to the first chamber of the unlocking cylinder 301. Air can be supplied to the first chamber of the unlocking cylinder 301 through the reset air passage 410. Under the pressure of the air, the piston inside the unlocking cylinder 301 moves towards the second chamber, increasing the volume of the first chamber. Exhaust is then released from the second chamber, causing its volume to decrease. This allows the unlocking assembly 300 to move away from the locking assembly 600, thus resetting the unlocking assembly 300. Additionally, the exhaust pipe 414 is connected to the reset air passage 410. During the unlocking process, the gas discharged from the first chamber can enter the exhaust pipe 414 through the reset air passage 410, completing the gas discharge.

[0082] While the first chamber of the drive cylinder 100 is being inflated, the second chamber is being vented. The vented gas enters the cover-closing venting passage 445. If the gas cannot be vented smoothly due to a blockage in the cover-closing venting passage 445, the drive cylinder 100 will also be unable to close the cover 1. Figure 4 As shown, the second isolation valve 447 is installed in the cover exhaust air passage 445. The second isolation valve 447 keeps the cover exhaust air passage 445 in a normally closed state. At this time, the second chamber of the drive cylinder 100 cannot exhaust air, so the chamber cover 1 cannot be closed.

[0083] While the second chamber of the unlocking cylinder 301 is being inflated, the first chamber is being vented. The reset air passage 410 is connected to the control port of the second isolation valve 447 via the exhaust pipe 414. The gas vented from the first chamber enters the reset air passage 410 and flows along the exhaust pipe to the control port of the second isolation valve 447, causing the second isolation valve 447 to switch to the open position. At this time, the cover-closing exhaust air passage 445 is open, allowing the gas in the second chamber of the driving cylinder 100 to be smoothly vented, thus actuating the driving cylinder 100 and closing the cover 1. Furthermore, to reduce exhaust noise, the cover-closing exhaust air passage 445 is connected to a third muffler 448. The gas flowing out of the exhaust port of the second isolation valve 447 is finally discharged from the cover-closing exhaust air passage 445 via the third muffler 448, thereby reducing exhaust noise.

[0084] Figure 4In the specific embodiment shown, the second isolation valve 447 can also be a two-position two-way valve, and the operation mode of the second isolation valve 447 can refer to that of the first isolation valve 432. Other types of valves can also be used for the second isolation valve 447, which are not limited here.

[0085] Optional, such as Figure 4 As shown, a reset exhaust valve 412 is provided in the reset air passage 410. The reset exhaust valve 412 allows airflow to flow to the unlocking cylinder 301 and discharges airflow from the unlocking cylinder 301 out of the reset air passage 410. The exhaust port of the reset exhaust valve 412 is connected to the control port of the second isolation valve 447 through the exhaust pipe 414.

[0086] During the reset process, airflow enters the first chamber of the unlocking cylinder 301 through the reset exhaust valve 412, completing the reset of the unlocking component 300. During the unlocking process, the gas discharged from the first chamber of the unlocking cylinder 301 flows along the reset air passage 410 to the reset exhaust valve 412, and is discharged into the atmosphere by the reset exhaust valve 412, allowing the piston of the unlocking cylinder 301 to move smoothly, achieving contact between the unlocking component 300 and the locking component 600 to release the limitation of the locking component 600 on the driving component.

[0087] Optionally, a first relief valve 413 is provided between the reset exhaust valve 412 and the unlocking cylinder 301. The first relief valve 413 can prevent excessive pressure in the reset air circuit 410. Furthermore, the first relief valve 413 can be an adjustable relief valve, which can be pre-configured to adjust the intake pressure of the unlocking cylinder 301. Of course, other types of relief valves can also be used for the first relief valve 413, and this is not limited here.

[0088] In some embodiments, the drive control system further includes an opening air passage 440 for inflating the second chamber of the drive cylinder 100; the opening air passage 440 is provided with a one-way valve 443 and an opening three-way valve 444, the opening three-way valve 444 is located between the one-way valve 443 and the drive cylinder 100, and the three ports of the opening three-way valve 444 are respectively connected to the one-way valve 443, the drive cylinder 100 and the closing exhaust air passage 445.

[0089] like Figure 4As shown, air can be supplied to the second chamber of the drive cylinder 100 through the opening air passage 440, causing the drive cylinder 100 to open the chamber cover 1. The opening air passage 440 is equipped with a one-way valve 443, allowing only gas flowing towards the drive cylinder 100 to pass through it. The three ports of the opening three-way valve 444 are connected to the one-way valve 443, the drive cylinder 100, and the closing exhaust air passage 445, respectively. Due to the presence of the second isolation valve 447 in the closing exhaust air passage 445, the closing exhaust air passage 445 is normally closed, and the gas flowing from the one-way valve 443 into the opening three-way valve 444 can only flow towards the drive cylinder 100. When air is supplied to the first chamber of the drive cylinder 100 through the closing air passage 430, the gas in the second chamber of the drive cylinder 100 flows into the closing exhaust air passage 445 through the opening three-way valve 444. If the second isolation valve 447 is in the open position at this time, gas can be discharged through the cover-closing exhaust gas passage 445, thereby causing the drive cylinder 100 to close the chamber cover 1. Of course, the cover-closing exhaust gas passage 445 can also be connected to the cover-opening gas passage 440 in other ways, which is not limited here.

[0090] Optionally, the unlocking air path 420 includes an unlocking tee 422, whose three ports are respectively connected to an air source, the second chamber of the unlocking cylinder 301, and the control port of the first isolation valve 432. Control gas is supplied from the air source to the unlocking tee 422, which distributes the control gas to the unlocking cylinder 301 and the first isolation valve 432. The control gas enters the second chamber of the unlocking cylinder 301, causing it to actuate and unlock the locking assembly 600. The control gas also enters the control port of the first isolation valve 432, pushing it from a closed position to an open position, thus creating a passage in the closing air path 430, which in turn enables the drive cylinder 100 to actuate and complete the closing operation.

[0091] Optionally, an unlocking exhaust valve 423 is also provided between the unlocking three-way valve 422 and the unlocking cylinder 301. For example... Figure 4 As shown, the unlocking exhaust valve 423 allows airflow to pass through the unlocking cylinder 301 and discharges airflow from the unlocking cylinder 301. Specifically, during the unlocking and locking assembly 600 process, control gas passes through the unlocking exhaust valve 423 and enters the second chamber of the unlocking cylinder 301; during the resetting process of the unlocking assembly 300, the gas discharged from the second chamber of the unlocking cylinder 301 enters the unlocking exhaust valve 423 and is discharged from the exhaust port of the unlocking exhaust valve 423. In addition, to reduce exhaust noise, the exhaust port of the unlocking exhaust valve 423 is connected to a first muffler 424.

[0092] In some embodiments, the opening air passage 440 is provided with an opening control valve 442, which is used to control the air intake speed of the second chamber of the drive cylinder 100, and / or the closing exhaust air passage 445 is provided with a closing control valve 446, which is used to control the exhaust speed of the first chamber of the drive cylinder 100.

[0093] like Figure 4 As shown, the cover opening control valve 442 is located near the air source. During the process of filling the second chamber of the drive cylinder 100 with air, the gas enters the cover opening air passage 440 and passes sequentially through the cover opening control valve 442, the one-way valve 443, and the cover opening three-way valve 444 before finally entering the drive cylinder 100. The cover opening control valve 442 can be used to control the movement speed of the piston of the drive cylinder 100 by controlling the airflow rate, thereby controlling the opening speed of the chamber cover 1. Specifically, the cover opening control valve 442 can be a one-way throttle valve, which has a simple structure and is easy to maintain. Of course, the cover opening control valve 442 can also be other types of flow regulating valves, which are not limited here.

[0094] Optional, such as Figure 4 As shown, a cover-closing control valve 446 is provided in the cover-closing exhaust air passage 445, and the cover-closing control valve 446 can be located near the cover-opening tee 444. During the closing process of the cover 1, the gas discharged from the first chamber of the drive cylinder 100 passes sequentially through the cover-opening tee 444, the cover-closing control valve 446, the second isolation valve 447, and the third silencer 448 before being discharged into the atmosphere. The cover-closing control valve 446 can be used to control the flow rate of the airflow to control the movement speed of the piston of the drive cylinder 100, thereby controlling the closing speed of the cover 1. Figure 4 In the specific embodiment shown, the cover control valve 446 is a one-way throttle valve. Of course, the cover control valve 446 can also be other types of flow regulating valves, which are not limited here.

[0095] In some embodiments, the control system 400 further includes a valve island connected to an air source. The valve island is used to connect the unlocking air passage 420, the reset air passage 410, the opening air passage 440, and the closing air passage 430 to the control air source.

[0096] like Figure 4As shown, the valve island includes a first intake valve 411, a second intake valve 421, a third intake valve 431, and a fourth intake valve 441. The unlocking air passage 420 connects the first intake valve 411 and the first chamber of the unlocking cylinder 301. After the first intake valve 411 is opened, air can be supplied to the second chamber of the unlocking cylinder 301 through the unlocking air passage 420. The reset air passage 410 connects the second intake valve 421 and the second chamber of the unlocking cylinder 301. After the second intake valve 421 is opened, air can be supplied to the first chamber of the unlocking cylinder 301 through the reset air passage 410. The cover-opening air passage 440 connects the third intake valve 431 and the first chamber of the drive cylinder 100. After the third intake valve 431 is opened, air can be supplied to the second chamber of the unlocking cylinder 301 through the cover-opening air passage 440. The cover-closing air passage 430 connects the fourth intake valve 441 and the second chamber of the drive cylinder 100. After the fourth intake valve 441 is opened, the air source can charge the first chamber of the unlocking cylinder 301 through the cover-closing air passage 430.

[0097] During operation, the operator can unlock, reset, open and close the cover by operating the switches of the first intake valve 411, the second intake valve 421, the third intake valve 431 and the fourth intake valve 441.

[0098] In this embodiment, the valve island integrates the first intake valve 411, the second intake valve 421, the third intake valve 431, and the fourth intake valve 441, which simplifies the structure of the opening and closing device 3 and facilitates the daily management of each intake valve.

[0099] In some embodiments, the drive assembly includes a transmission assembly 200, which includes a push rod 201, a transmission element, and a mounting base 202. For example... Figure 5 As shown, the mounting base 202 has a moving channel 203, and the transmission component is movably disposed in the moving channel 203. The drive cylinder 100 is connected to the first end of the push rod 201 through the transmission component. The second end of the push rod 201 is connected to one of the cavity cover 1 and the cavity body 2. The drive cylinder 100 is connected to the other one. The drive cylinder 100 is used to push the push rod 201 to drive the cavity cover to switch between the open state and the closed state.

[0100] The second end of the push rod 201 is connected to one of the cavity cover 1 and the cavity body 2, and the drive cylinder 100 and the mounting base 202 are connected to the other. Figure 2 and Figure 3In the specific embodiment shown, the mounting base 202 is fixedly connected to the chamber body 2, and the drive cylinder 100 and the unlocking assembly 300 are both connected to the mounting base 202. The first end of the push rod 201 is hinged to the transmission component, and the second end of the push rod 201 is hinged to the chamber cover 1. The chamber cover 1, the chamber body 2, the push rod 201, and the transmission component form a linkage mechanism. The power output by the drive cylinder 100 pushes the first end of the push rod 201 to move along the extension direction of the moving channel 203 through the transmission component, thereby pushing the chamber cover 1 to open and close.

[0101] Optional, such as Figure 5 and Figure 6 As shown, the moving channel 203 extends horizontally within the mounting base 202, with one end close to the connecting shaft between the cavity cover 1 and the cavity body 2, and the other end away from the connecting shaft. The transmission component is at least partially located within the moving channel 203 and can move along the moving channel 203 under external force, thereby driving the first end of the push rod 201 to move along the extending direction of the moving channel 203. When the first end of the push rod 201 moves towards the connecting shaft, the second end of the push rod 201 pushes the cavity cover 1 to open; when the first end of the push rod 201 moves away from the connecting shaft, the second end of the push rod 201 drives the cavity cover 1 to close. Of course, the mounting base 202 and the moving channel 203 can also be arranged in other directions, for example, the moving channel 203 can be arranged vertically, which is not limited here.

[0102] Optionally, the transmission components include a transmission rod 204 and a slider 205; at least a portion of the slider 205 is disposed in the moving channel 203 and hinged to the first end of the push rod 201; one end of the transmission rod 204 is connected to the slider 205, and the other end is connected to the power output end of the drive cylinder 100; a locking assembly 600 is mounted on the slider 205, and the side wall of the moving channel 203 is provided with a locking mechanism, such as a locking hole or a locking groove. This embodiment uses a locking hole as an example for description. The locking hole is used to cooperate with the locking assembly 600 to limit the slider 205 when the cavity cover 1 is in the open state, thereby fixing the slider 205 in the moving channel 203.

[0103] like Figure 5 and Figure 6As shown, the slider 205 can be adapted to the shape of the moving channel 203, thereby achieving a limiting engagement with the moving channel 203. At least a portion of the transmission rod 204 can pass through the moving channel 203 and is fixedly connected to the slider 205 via a stainless steel pin 206. Optionally, a bushing 207 is fitted around at least a portion of the outer periphery of the transmission rod 204 near the slider 205. The bushing 207 is connected to the inner wall of the moving channel 203 via a flat key, preventing relative displacement between the bushing 207 and the mounting base 202. The bushing 207 restricts the radial displacement of the transmission rod 204 in the moving channel 203, reducing the wobble of the transmission rod 204. Furthermore, a ball spline engagement can be used between the bushing 207 and the transmission rod 204 to reduce friction between them.

[0104] Optional, such as Figure 2 and Figure 5 As shown, the mounting base 202 has a connection port on the side away from the chamber body 2. At least part of the slider 205 is located in the moving channel 203 within the connection port. Raised stepped surfaces can be provided on both sides of the connection port to limit the slider 205 and prevent the slider 205 from falling off the connection port.

[0105] At least a portion of the push rod 201 is disposed outside the connection port. The push rod 201 and the slider 205 can be connected by means of screws or other methods. For example, the push rod 201 and the slider 205 can be connected by a mounting component, which can specifically be a semi-threaded screw, comprising a spool portion and a threaded portion; of course, the mounting component can also be a bolt, etc. The threaded portion is used to connect with a threaded hole on the slider 205, and the first end of the push rod 201 has a through hole for engaging with the spool portion. When the slider 205 slides, the push rod 201 can rotate around the spool while translating with it. The second end of the push rod 201 can be connected to the cavity cover 1 via a connector 303. Figure 5 In the specific embodiment shown, the second end of the push rod 201 is connected to the cavity cover 1 via a grooved cylindrical pin 208 and a slider set screw 209. The slider set screw 209 is fitted inside the cavity cover 1 to tighten and fix the cylindrical pin 208. Of course, other connection methods can also be used between the transmission rod 204, slider 205, push rod 201, and cavity cover 1, which are not limited here.

[0106] Optionally, a schematic diagram of the drive cylinder 100 and its cooperating pneumatic components is shown below. Figure 7 As shown. The connection relationship between the pneumatic components and the drive cylinder 100 can be referred to. Figure 4 The drive element and the drive cylinder 100 can be connected through sheet metal parts and air lines.

[0107] The drive cylinder 100 and the mounting base 202 can be connected via the cylinder seat 101. For example... Figure 8As shown, the cylinder seat 101 may be cylindrical, with one end of the transmission rod 204 inserted into the cylinder seat 101. The end of the cylinder seat 101 away from the drive cylinder 100 is used to connect to the mounting base 202. Specifically, the cylinder seat 101 can be connected to the mounting base 202 by eight screws, thereby fixing the drive cylinder 100 and the mounting base 202 together.

[0108] The drive cylinder 100 can be connected to the transmission rod 204 via the adjusting assembly 500. There are usually some assembly and machining errors between the drive cylinder 100 and the transmission rod 204. The adjusting assembly 500 can absorb these errors, allowing the drive cylinder 100 to smoothly move the slider 205 to push the transmission rod 201 to the open position, and enabling the locking assembly 600 to engage the slider 205. Figure 9 As shown, the adjusting assembly 500 includes an adjusting stud, an adjusting washer 503, and an adjusting nut 502. The two ends of the adjusting stud are threaded to the drive cylinder 100 and the transmission rod 204, respectively. The transmission rod 204 and the adjusting stud are also fixed by a locking screw 504 to prevent relative rotation between the adjusting screw 501 and the transmission rod 204. An annular boss is provided in the middle of the adjusting stud. The adjusting washer 503 and the adjusting nut 502 are placed between the annular boss and the drive cylinder 100. The axial position of the adjusting nut 502 and the adjusting washer 503 on the adjusting stud can absorb errors during machining and assembly. Of course, the transmission rod 204 and the drive cylinder 100 can also be connected in other ways, which are not limited here.

[0109] Optionally, the locking hole is located at one end of the mounting base 202 near the connecting shaft. Figure 5 In the specific embodiment shown, the locking hole is located on the upper surface of the mounting base 202 and extends through the moving channel 203. The locking component 600 can be inserted into the locking hole for positioning. For example, it is installed on the slider 205 at a position corresponding to the locking hole. When the slider 205 is in other positions in the moving channel 203, the locking component is compressed inside the slider 205 due to the space limitation of the moving channel; when the slider 205 pushes the transmission rod 201 to the open position, the locking component 600 aligns with the locking hole, and the locking component 600, due to the loss of restriction, extends upward into the locking hole, thereby fixing the slider 205 to the mounting base 202 and achieving positioning of the drive component.

[0110] In some embodiments, the locking assembly 600 includes a locking pin and an elastic element, and the locking mechanism includes a locking hole. When the cavity cover 1 is in the non-open state, the locking pin is pressed by the side wall of the moving channel 203 and is at least partially located within the slider 205. The elastic element is used to apply an elastic force to the locking pin. When the slider 205 drives the push rod 201 to move until the cavity cover 1 is in the open state, it recovers its deformation to push the locking pin into the locking hole.

[0111] Before being aligned with the locking hole, the inner wall of the moving channel 203 can limit the locking pin; after being aligned with the locking hole, the locking pin loses its limit and is pushed into the locking hole by the elastic force of the elastic element, thereby fixing the slider 205 and the mounting base 202.

[0112] In some embodiments, the locking assembly 600 further includes a mounting sleeve, an elastic element and a locking pin are disposed within the mounting sleeve, the slider 205 is provided with a threaded hole, and the outer surface of the mounting sleeve is provided with an external thread for engaging with the threaded hole.

[0113] The locking assembly 600 is connected to the threaded hole of the sliding block via a mounting sleeve, which improves the reliability of the connection. The mounting sleeve also has an anti-loosening coating covering the external threads, which reduces the risk of the mounting sleeve coming loose from the threaded hole.

[0114] In some embodiments, the unlocking component 300 further includes an unlocking member and a fixedly mounted hinge shaft. The unlocking cylinder 301 is used to push the unlocking member to rotate around the hinge shaft and push the locking component 600 to unlock through the end of the unlocking member away from the unlocking cylinder 301.

[0115] For example, such as Figure 10 As shown, the unlocking component includes a pressure rod 305. The first end of the mounting base 202 has a mounting platform with a mounting groove for mounting the pressure rod 305. A hinge shaft passes through the side wall of the mounting groove and is hinged to the pressure rod 305. The hinge shaft limits the rotation direction of the pressure rod 305, while the side wall of the mounting groove limits the movement direction of the pressure rod 305, ensuring that the pressure rod 305 can unlock. The first end of the pressure rod 305 cooperates with an unlocking cylinder 301, which pushes the first end of the pressure rod 305, causing the pressure rod 305 to rotate around the hinge shaft. The rotation of the pressure rod 305 causes its second end to push the locking pin out of the locking hole, thereby releasing the restriction on the drive assembly. Of course, the pressure rod 305 can also adopt other structures, which are not limited here.

[0116] Optionally, the center of gravity of the unlocking component is located between the unlocking cylinder 301 and the hinge shaft. Specifically, the center of gravity of the pressure rod 305 is located between the first end of the pressure rod 305 and the hinge shaft, and the locking assembly 600 is located below the second end of the pressure rod 305. When the unlocking cylinder 301 does not push the pressure rod 305, the second end of the pressure rod 305 tilts up under the action of gravity, and does not contact the locking assembly 600, thus avoiding applying pressure to the locking assembly 600 and ensuring the reliability of the lock. Only when the unlocking cylinder 301 pushes the first end of the pressure rod 305 upward will the second end of the pressure rod 305 descend and push the locking pin, causing the locking pin to disengage from the locking hole and releasing the limit on the drive assembly. The hinge shaft can adopt a semi-threaded stud structure, with a smooth shaft in the middle and threads at both ends. The hinge shaft is fixedly connected to the two side walls of the mounting groove through threads, and the pressure rod 305 is sleeved at the smooth shaft position. When the pressure rod 305 is pushed, it can rotate around the smooth shaft portion of this hinge shaft.

[0117] Figure 10 and Figure 11 As shown, the unlocking assembly 300 also includes a fixed base 302, a connector 303, a pressure rod push shaft 304, and an adjustment assembly 500. The fixed base 302 is fixedly connected to the mounting base 202 via the connector 303. The pressure rod push shaft 304 is connected to the unlocking cylinder 301 via the adjustment assembly 500. The unlocking cylinder 301 drives the pressure rod push shaft 304 downwards. When the pressure rod push shaft 304 moves upwards, it pushes the first end of the pressure rod 305 upwards. The first end of the pressure rod 305 rises, and the second end falls, thereby pushing the locking pin out of the locking hole and releasing the restriction on the drive assembly. To cooperate with the pressure rod push shaft 304, the pressure rod 305 can be provided with a mating groove, into which the upper end of the pressure rod push shaft 304 can pass. The mating groove can limit the pressure rod push shaft 304, reducing the relative movement between them, thereby ensuring the stability of the pressure rod 305's movement and improving the unlocking success rate. The end of the push rod 304 that enters the mating groove can be made of a spherical structure to reduce the friction between the push rod 304 and the mating groove and avoid jamming.

[0118] exist Figure 10 and Figure 11 In the specific embodiment shown, the connector 303 may be L-shaped, the fixing seat 302 may be connected to one side of the connector 303 by screws, and the mounting seat 202 may be connected to the other side of the connector 303 by screws. The unlocking cylinder 301 is connected to the fixing seat 302, and the power output direction of the unlocking cylinder 301 may be perpendicular to the length direction of the mounting seat 202. The extension direction of the pressure rod push shaft 304 is parallel to the power output direction of the unlocking cylinder 301. The pressure rod 305 extends along the length direction of the mounting seat 202. The unlocking cylinder 301 drives the pressure rod push shaft 304 to move in a direction approximately perpendicular to the extension direction of the pressure rod 305, thereby causing the second end of the pressure rod 305 to descend or rise.

[0119] The connection between the unlocking cylinder 301 and the pressure rod push shaft 304 via the adjusting component 500 is similar to the connection between the drive cylinder 100 and the transmission rod 204, and will not be repeated here. The adjusting component 500 can adjust the position of the pressure rod push shaft 304 to ensure that the pressure rod push shaft 304 can push the pressure rod 305 to complete the unlocking.

[0120] The operation and principle of the opening and closing device 3 of the cavity cover 1 are explained as follows. Figure 12 This is a schematic diagram of the overall structure of the semiconductor process equipment in the closed state. The push rod 201 in the transmission component 200 is omitted here to facilitate observation of the position of the slider 205. At this time, the upper end of the locking pin is compressed by the moving channel 203. When it is necessary to open the chamber cover 1, the second air inlet valve 421 opens, and the control gas flows along the opening air passage 440 through the opening control valve 442, the one-way valve 443, and the opening three-way valve 444 to the second chamber of the drive cylinder 100, pushing the piston of the drive cylinder 100 to move. The gas in the first chamber of the drive cylinder 100 passes through the closing exhaust valve 434 and is finally discharged through the second muffler 435. During this process, the opening control valve 442 can control the speed at which the piston of the drive cylinder 100 rises, which can play a role in smoothly propelling the piston movement. At this time, the unlocking cylinder 301 is in a state of no air inlet and no air outlet. Due to gravity, the end of the pressure rod 305 near the locking component 600 is tilted up, and the locking pin of the locking component 600 can be in the extended state. After the cylinder completes its operation, the maximum opening angle of 95° is reached, and the semiconductor process equipment is in the following state: Figure 13 As shown. At this time, slider 205 is located at the position corresponding to the maximum stroke of drive cylinder 100, and the locking pin of locking component 600 is in the pop-up state. Unlocking cylinder 301 connected to lever 305 is not activated, so lever 305 is in its natural state. Figure 12 and Figure 13 The right end is tilted up as shown. At this time, even if the cavity cover 1 tends to fall downward after receiving external force, or if the operator does not notice that someone is maintaining it and accidentally triggers the cavity cover 1 to close, the locking pin is in a high position, the slider 205 cannot move along the moving channel 203, and the cavity cover 1 cannot close, reducing the potential risk of the cavity cover 1 falling.

[0121] When the cover 1 needs to be closed, the unlocking cylinder 301 pushes the pressure rod 305, which in turn presses down the locking pin, allowing the slider 205 to move along the moving channel 203. Simultaneously, the first chamber of the driving cylinder 100 needs to be filled with air, and the second chamber needs to be filled with air, causing the piston rod of the driving cylinder 100 to move downwards. At this time, the second intake valve 421 receives air, and the control gas flows along the unlocking air passage 420, passing sequentially through the unlocking tee 422 and the unlocking exhaust valve 423 into the second chamber of the unlocking cylinder 301. This pushes the pressure rod 305 upwards at the end away from the positioning pin, while the end near the positioning pin presses down, allowing the slider 205 with the positioning pin to slide. Simultaneously, the control gas also flows from the other end of the unlocking tee 422 to the second isolation valve 447 on the cover-closing air passage 430, acting as a pilot gas to first release the second isolation valve 447 from locking the cover-closing air passage 430, making the cover-closing air passage 430 open. Simultaneously, the gas in the first chamber of the unlocking cylinder 301 is discharged through the first relief valve 413 and the reset exhaust valve 412. The gas discharged by the reset exhaust valve 412 leads to the pilot end of the second isolation valve 447, and only after this connection is established can the piston of the driving cylinder 100 have the possibility of downward exhaust. The first relief valve 413 can unlock the pressure difference between the upper and lower parts of the piston of the cylinder 301, ensuring that the pressure rod 305 has sufficient thrust when pressing down the locking pin. Figure 13 As shown, when the unlocking cylinder 301 rises to its maximum stroke, the adjusting screw 501 pushes the pressure rod 305 to the position shown in the figure, and the pressure rod 305 presses down the locking pin to release the mechanical limit.

[0122] After the locking pin is pressed down, air enters through the third intake valve 431, while the second intake valve 421 continues to intake air. The control gas passes through the first isolation valve 432, the second overflow valve 433, and the cover-closing exhaust valve 434 before entering the first chamber of the drive cylinder 100, pushing the piston of the drive cylinder 100 downward. Simultaneously, the gas in the second chamber of the drive cylinder 100 is discharged through one end outlet of the cover-opening three-way valve 444, the cover-closing control valve 446, and the second isolation valve 447, and finally exits through the third muffler 448, causing the piston to move downward, thereby driving the slider 205 and the transmission system to close the cover 1. At this time, the second overflow valve 433 can drive the piston of the cylinder 100 to move up and down due to the pressure difference, and the second isolation valve 447 can control the downward speed of the piston of the drive cylinder 100. By adjusting these two valves, the cover 1 is smoothly pushed to close.

[0123] After the lid is closed, the first air inlet valve 411 releases air, controlling the gas to pass through the reset exhaust valve 412 and the first overflow valve 413 before entering the unlocking cylinder 301. This causes the piston of the unlocking cylinder 301 to move the pressure rod 305 downward, facilitating the locking pin to rise again when the lid is opened next, thus positioning the slider 205. Simultaneously, the gas in the second chamber of the unlocking cylinder 301 is discharged through the unlocking exhaust valve 423 and the first muffler 424.

[0124] The opening and closing process of cavity cover 1 is as described above. Once cavity cover 1 is opened, all locking is completed automatically without additional operation, eliminating the impact of human error on system safety. During maintenance after locking, the unlocking air passage 420 of the locking cylinder needs to be vented, and the reset air passage 410 needs to be vented. Only then can the pilot air from these two passages reach the opening air passage 440 and closing air passage 430 where the drive cylinder 100 is located, and activate the corresponding isolation valves. Simultaneously, the unlocking cylinder 301 needs to rise and press down the locking pin to release the mechanical limit of the slider 205. Therefore, the closing action of cavity cover 1, through these three locking methods, avoids safety risks caused by human error or accidental failure of a mechanism. Finally, when cavity closure is required, since the semiconductor process equipment uses pneumatic opening and closing, personnel will not forcibly close the cover due to it not being unlocked. Instead, air needs to be supplied sequentially to the first cavity of the unlocking cylinder 301 and the second cavity of the drive cylinder 100 before closing the cover, avoiding potential damage to the equipment.

[0125] This application also provides a semiconductor process apparatus, including a cavity cover 1, a cavity body 2, and an opening / closing device 3 for the cavity cover 1 according to any of the above embodiments. The opening / closing device 3 is used to open and close the cavity cover 1. The opening / closing device 3 can be installed on the cavity body 2 or on the cavity cover 1, for example, as shown in the example. Figure 12 and Figure 13 As shown, the opening and closing device 3 is mounted on the chamber body 2, and the second end of the push rod 201 is hinged to the chamber cover 1. The structure of other parts of the semiconductor process equipment can be referred to the prior art, and will not be described in detail here.

[0126] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of this application, and this application is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this application, and these modifications and improvements are also considered to be within the scope of protection of this application.

Claims

1. A cavity cover opening and closing device for opening and closing the cavity cover of a semiconductor process chamber, characterized in that, Includes drive components, locking components, and control systems; The drive assembly includes a drive cylinder, which drives the cavity cover to move, so that the cavity cover switches between an open state and a closed state. The locking component is used to limit the drive component when the cavity cover is in the open state; The control system includes a drive control system, which controls the drive assembly to drive the cavity cover to move, and also maintains the cavity cover in a locked state when it is in an open state.

2. The opening and closing device according to claim 1, characterized in that, It also includes an unlocking component, which includes an unlocking cylinder; The unlocking component is used to move away from the locking component when the cavity cover is in the open state; it is also used to contact the locking component to release the locking component from the driving component when the cavity cover is to be switched to the closed state. The control system further includes an unlocking control system, which controls the movement of the unlocking component to contact or move away from the locking component.

3. The opening and closing device according to claim 2, characterized in that, The drive control system includes a locking component, which is connected to the unlocking control system. The unlocking control system is further configured to control the locking component to lock the drive control system when the cavity cover is in the open state, so that the drive control system remains in the locked state; and to control the locking component to unlock the drive control system when the cavity cover is to be switched to the closed state.

4. The opening and closing device according to claim 3, characterized in that, The unlocking control system includes an unlocking air passage connected to the second chamber of the unlocking cylinder; The drive control system includes a cover-closing air passage connected to the first chamber of the drive cylinder; The locking component includes a first isolation valve, the control port of which is connected to the unlocking air passage. In response to the unlocking air passage being blocked, the first isolation valve keeps the closing air passage normally closed. In response to the opening of the unlocking air passage, the first isolation valve opens the closing air passage.

5. The opening and closing device according to claim 4, characterized in that, The unlocking control system further includes a reset air passage connected to the first chamber of the unlocking cylinder, and the drive control system further includes a cover discharge air passage connected to the second chamber of the drive cylinder. The locking component includes a second isolation valve, the control port of which is connected to the exhaust pipe of the reset air circuit. In response to the exhaust pipe of the reset air circuit being closed, the second isolation valve keeps the cover-closing exhaust air circuit in a normally closed state; in response to the exhaust pipe of the reset air circuit being vented, the second isolation valve opens the cover-closing exhaust air circuit.

6. The opening and closing device according to claim 5, characterized in that, The drive control system also includes an open-cover air passage for inflating the second chamber of the drive cylinder. The opening air passage is equipped with a one-way valve and an opening tee. The opening tee is located between the one-way valve and the drive cylinder. The three ports of the opening tee are respectively connected to the one-way valve, the drive cylinder, and the closing exhaust air passage.

7. The opening and closing device according to claim 6, characterized in that, The unlocking air circuit is equipped with an unlocking three-way valve, the three ports of which are respectively connected to the air source, the second chamber of the unlocking cylinder, and the control port of the first isolation valve.

8. The opening and closing device according to claim 7, characterized in that, The control system also includes a valve island, which is connected to the air source. The valve island includes a first intake valve, a second intake valve, a third intake valve, and a fourth intake valve. The unlocking air path connects the first intake valve and the first chamber of the unlocking cylinder; the reset air path connects the second intake valve and the second chamber of the unlocking cylinder; the opening air path connects the third intake valve and the first chamber of the driving cylinder; and the closing air path includes a connection between the fourth intake valve and the second chamber of the driving cylinder.

9. The opening and closing device according to claim 7, characterized in that, The lid-closing air passage is equipped with a lid-closing exhaust valve, which is located between the first isolation valve and the drive cylinder. The lid-closing exhaust valve allows airflow towards the drive cylinder to pass through and discharges airflow from the drive cylinder into the lid-closing air passage; and / or, The reset air circuit is provided with a reset exhaust valve, which is located between the second isolation valve and the unlocking cylinder. The reset exhaust valve allows the airflow to flow to the unlocking cylinder to pass through and discharges the airflow from the unlocking cylinder through the exhaust pipe of the reset air circuit. And / or, the unlocking air passage is provided with an unlocking exhaust valve, which is located between the unlocking tee and the unlocking cylinder. The unlocking exhaust valve allows airflow to flow squarely to the unlocking cylinder and discharges airflow from the unlocking cylinder into the unlocking air passage.

10. The opening and closing device according to claim 1, characterized in that, The drive assembly further includes a transmission assembly, which includes a push rod, a transmission component, and a mounting base. The mounting base has a moving channel, the transmission component is movably disposed in the moving channel, the driving cylinder is connected to the first end of the push rod through the transmission component, the second end of the push rod is connected to one of the cavity cover and the cavity body, and the driving cylinder is connected to the other. The driving cylinder is used to push the push rod to drive the cavity cover to switch between an open state and a closed state.

11. The opening and closing device according to claim 10, characterized in that, The transmission component includes a transmission rod and a slider; The slider is disposed in the moving channel and is hinged to the first end of the push rod. One end of the transmission rod is connected to the slider and the other end is connected to the drive cylinder. The locking component is mounted on the slider, and the side wall of the moving channel is provided with a locking mechanism. The locking mechanism is used to cooperate with the locking component to limit the slider when the cavity cover is in the open state, and fix the slider in the moving channel.

12. The opening and closing device according to claim 11, characterized in that, The locking component includes a locking pin and an elastic element, and the locking mechanism includes a locking hole; When the cavity cover is in the closed state, the locking pin is pressed by the side wall of the moving channel and is at least partially located inside the slider; the elastic element is used to restore its deformation when the slider drives the push rod to move until the cavity cover is in the open state, so as to push the locking pin into the locking hole.

13. The opening and closing device according to claim 12, characterized in that, The locking assembly further includes a mounting sleeve, the elastic element and the locking pin are both disposed within the mounting sleeve, the slider is provided with a threaded hole, and the outer surface of the mounting sleeve is provided with an external thread for connecting with the threaded hole.

14. The opening and closing device according to claim 2, characterized in that, The unlocking assembly further includes an unlocking element and a fixedly mounted hinge shaft. The unlocking cylinder is used to push the unlocking element to rotate around the hinge shaft and push the locking assembly to unlock through the end of the unlocking element away from the unlocking cylinder.

15. The opening and closing device according to claim 14, characterized in that, The center of gravity of the unlocking component is located between the unlocking cylinder and the hinge shaft.

16. The opening and closing device according to claim 6, characterized in that, The opening air path is equipped with an opening control valve, which is used to control the inflation speed of the second chamber of the drive cylinder, and / or The cover-closing exhaust air path is equipped with a cover-closing control valve, which is used to control the exhaust speed of the first chamber of the drive cylinder.

17. A semiconductor process apparatus, characterized in that, The invention includes a cavity cover, a cavity body, and an opening and closing device for the cavity cover as described in any one of claims 1 to 16, the opening and closing device being used to open and close the cavity cover.

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