Air cushion type precise vibration isolation optical platform

Abstract

The invention discloses an air cushion type precise vibration isolation optical platform which comprises four supporting columns and a platform body, and horizontal height sensors are fixedly installed between the upper ends of the outer surfaces of the supporting columns and the bottom of the platform body. Through the cooperation of the base, the rubber air bag, the gland and the stand column, an efficient buffering and vibration reduction effect can be formed between the base and the gland under the action of the rubber air bag while the stand body is supported in the stand column, and transmission of environmental vibration to the stand body can be effectively restrained; and internal air can enter the buffer cavity through the air holes in the blanking cap under the action of compression and synchronously push the piston disc to move along the surface of the buffer cavity so as to compress and stretch the buffer springs on the two sides, so that vibration energy is further absorbed and attenuated, the influence of vibration on the optical instrument on the table body is remarkably reduced, and the overall vibration isolation performance is improved.

Description

Technical Field

[0001] This invention relates to the field of optical platform technology, specifically to an air-cushion type precision vibration isolation optical platform. Background Technology

[0002] Optical platforms are widely used in high-end industrial and scientific research fields such as precision optical measurement, semiconductor manufacturing, laser processing, and micro-nano manipulation. Their vibration isolation performance and horizontal accuracy are among the core indicators to ensure the stable operation of related equipment, the reliability of experimental data, and the qualified processing quality. In practical application scenarios, environmental vibration and initial installation deviation of the platform can easily cause the platform to vibrate slightly or tilt, which seriously affects the alignment accuracy of optical components, the stability of laser transmission, and the accuracy of precision measurement results.

[0003] Currently, traditional optical platforms typically employ only a single buffer structure, such as rubber pads or ordinary springs. This results in a narrow vibration isolation frequency band, making it difficult to effectively isolate external vibration interference across multiple frequency bands. Consequently, the buffering and vibration reduction effects are limited. Furthermore, the leveling operation largely relies on manual adjustment, requiring repeated measurement and adjustment of support components using a level. This cumbersome and time-consuming operation causes significant inconvenience for users. Summary of the Invention

[0004] The purpose of this invention is to provide an air-cushion type precision vibration isolation optical platform, which has the advantages of good vibration isolation effect and automatic leveling operation, bringing great convenience to the user.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an air-cushion type precision vibration isolation optical platform, comprising pillars and a platform body, wherein the number of pillars is four, a level sensor is fixedly installed between the upper end of the outer surface of each pillar and the bottom of the platform body, a fixed frame plate is fixedly installed at the upper end of the inner cavity of each pillar, a servo motor is fixedly installed at the bottom of the inner cavity of the fixed frame plate, a first circular gear is fixedly installed at the output end of the servo motor, a threaded sleeve is movably connected to the middle end of the bottom of the fixed frame plate via a bearing, a second circular gear is fixedly installed at the lower end of the threaded sleeve, and the second circular gear meshes with the first circular gear. The inner cavity of the threaded sleeve is threadedly connected to a leveling screw. A base is fixedly installed on the top of the leveling screw. A microcontroller is fixedly installed at the middle of the bottom of the platform. Columns are fixedly installed around the bottom of the platform. A pressure cap is fixedly installed at the bottom of the column. A rubber airbag is fixedly installed between the bottom of the pressure cap and the top of the base. A buffer cavity is provided at the lower end of the column. A plug is fixedly installed at the bottom of the column and below the buffer cavity. The surface of the plug is provided with air holes. A piston disc is slidably connected to the middle of the buffer cavity. Buffer springs are fixedly installed between the two sides of the piston disc and the two sides of the buffer cavity.

[0006] As a preferred embodiment, the middle end of the support column is movably connected to a rotating shaft via a bearing. A first bevel gear is fixedly mounted on the surface of the rotating shaft. A hexagonal recess is provided on the surface of the rotating shaft away from the first bevel gear. A horizontal plate is fixedly mounted at the middle end of the inner cavity of the support column and below the rotating shaft. A support plate is fixedly mounted at the lower end of the inner cavity of the support column. An adjusting screw is movably connected between the middle end of the top of the support plate and the middle end of the horizontal plate via a bearing. A second bevel gear is fixedly mounted on the top of the adjusting screw, and the second bevel gear meshes with the first bevel gear.

[0007] As a preferred embodiment, a lifting frame is slidably connected between the two ends of the support plate, the middle of the top of the lifting frame is threadedly connected to the upper end of the adjusting screw, and the bottom of the lifting frame is movably connected to a moving wheel via a bearing.

[0008] As a preferred embodiment, an annular seat is fixedly installed on the top of the support column, a rubber buffer sleeve is fixedly installed in the inner cavity of the annular seat, a guide sleeve is fixedly installed in the inner cavity of the rubber buffer sleeve, and the inner cavity of the guide sleeve is slidably connected to the surface of the support column.

[0009] As a preferred embodiment, the rubber buffer sleeve has an annular air chamber at its middle end, a rubber partition is fixedly connected to the surface of the annular air chamber, and a through hole is provided at the middle end of the rubber partition.

[0010] As a preferred embodiment, a vent is provided at the upper end of the column and above the buffer chamber, and a filter shell is fixedly installed at the upper end of the vent, with the inner cavity of the filter shell filled with dust filter cotton.

[0011] As a preferred embodiment, both ends of the fixed frame plate are slidably connected to guide rods, and the top of the guide rods is fixedly installed on the bottom of the base.

[0012] As a preferred embodiment, a rubber sealing gasket is fixedly installed at the bottom of the column, the bottom of the rubber sealing gasket contacts the top of the gland, and rubber sealing rings are fixedly installed at both ends of the piston disc, with the surface of the rubber sealing rings slidably connected to the surface of the buffer cavity.

[0013] As a preferred embodiment, a mounting plate is fixedly installed at the middle of the outer surface of the support column, and a reinforcing frame is fixedly installed on the surface of the mounting plate.

[0014] As a preferred embodiment, the microcontroller is electrically connected to both the horizontal height sensor and the servo motor.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. This invention, through the cooperation of the base, rubber airbag, pressure cap, and column, can provide support for the platform inside the column while forming a highly efficient buffering and vibration reduction effect between the base and the pressure cap under the action of the rubber airbag. It can effectively suppress the transmission of environmental vibration to the platform. When the rubber airbag is compressed due to vibration, the air inside can enter the buffer chamber through the air hole on the plug under the action of compression, and simultaneously push the piston disc to move along the surface of the buffer chamber, thereby compressing and stretching the buffer springs on both sides, thereby further absorbing and attenuating vibration energy, significantly reducing the impact of vibration on the optical instruments on the platform, and improving the overall vibration isolation performance.

[0016] 2. This invention uses level sensors to monitor the level of the four corners of the platform in real time and feeds the data back to the microcontroller. When the difference in data between the level sensors in different areas exceeds a set threshold due to load changes or installation tilt, the microcontroller controls the servo motor at the corresponding position to start. The servo motor drives the first circular gear to rotate, which in turn drives the threaded sleeve to rotate through the meshing second circular gear. This causes the leveling screw to move axially. The leveling screw precisely adjusts the height of the corresponding position on the platform through the base, rubber airbag, pressure cap, and column until the data from each level sensor returns to consistency. This achieves automatic leveling of the platform. The leveling operation requires no manual intervention, is simple and quick to operate, and greatly improves the convenience of use. Attached Figure Description

[0017] Figure 1 This is a perspective view of the present invention; Figure 2 This is a schematic cross-sectional view of the support structure of the present invention. Figure 3 This is a bottom view of the fixed frame structure of the present invention; Figure 4 This is a schematic diagram of the side cross-sectional structure of the fixed frame plate of the present invention; Figure 5 This is a schematic diagram of the side cross-sectional structure of the column of the present invention; Figure 6 This is a top view cross-sectional structural diagram of the rubber buffer sleeve of the present invention.

[0018] In the diagram: 1. Support column; 2. Platform; 3. Mounting plate; 4. Reinforcing frame; 5. Microcontroller; 6. Level sensor; 7. Support plate; 8. Horizontal plate; 9. Rotating shaft; 10. First bevel gear; 11. Second bevel gear; 12. Adjusting screw; 13. Lifting frame; 14. Casters; 15. Fixed frame plate; 16. Base; 17. Rubber airbag; 18. Annular seat; 19. Column; 20. Rubber buffer sleeve; 21. Guide sleeve; 2. Pressure cap; 23. Servo motor; 24. First circular gear; 25. Guide rod; 26. Leveling screw; 27. Second circular gear; 28. Rubber sealing gasket; 29. ​​Threaded sleeve; 30. Buffer chamber; 31. Buffer spring; 32. Piston disc; 33. Rubber sealing ring; 34. Plug; 35. Air hole; 36. Breathing hole; 37. Filter shell; 38. Dust filter cotton; 39. Annular air chamber; 40. Rubber partition; 41. Through hole. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0021] Example 1: Please see Figures 1-5As shown, this invention provides an air-cushion type precision vibration isolation optical platform, including four support columns 1 and a platform 2. A horizontal height sensor 6 is fixedly installed between the upper end of the outer surface of each support column 1 and the bottom of the platform 2. A fixed frame plate 15 is fixedly installed at the upper end of the inner cavity of each support column 1. A servo motor 23 is fixedly installed at the bottom of the inner cavity of the fixed frame plate 15. A first circular gear 24 is fixedly installed at the output end of the servo motor 23. A threaded sleeve 29 is movably connected to the middle end of the bottom of the fixed frame plate 15 via a bearing. A second circular gear 27 is fixedly installed at the lower end of the threaded sleeve 29, meshing with the first circular gear 24. The inner cavity of the threaded sleeve 29 is threadedly connected... There is a leveling screw 26, and a base 16 is fixedly installed on the top of the leveling screw 26. A microcontroller 5 is fixedly installed at the middle of the bottom of the platform 2. Columns 19 are fixedly installed around the bottom of the platform 2. A pressure cover 22 is fixedly installed at the bottom of the column 19. A rubber airbag 17 is fixedly installed between the bottom of the pressure cover 22 and the top of the base 16. A buffer chamber 30 is provided at the lower end of the column 19. A plug 34 is fixedly installed at the bottom of the column 19 and below the buffer chamber 30. The surface of the plug 34 is provided with air holes 35. A piston disc 32 is slidably connected to the middle of the buffer chamber 30. Buffer springs 31 are fixedly installed between the two sides of the piston disc 32 and the two sides of the buffer chamber 30.

[0022] In this technical solution, through the cooperation of the base 16, rubber airbag 17, pressure cap 22, and column 19, the support for the platform 2 can be provided inside the column 1. Simultaneously, under the action of the rubber airbag 17, a highly efficient buffering and vibration reduction effect can be formed between the base 16 and pressure cap 22, effectively suppressing the transmission of environmental vibrations to the platform 2. When the rubber airbag 17 is compressed due to vibration, the internal air, under compression, can enter the buffer chamber 30 through the air hole 35 on the plug 34, and simultaneously push the piston disc 32 to move along the surface of the buffer chamber 30, compressing and stretching the buffer springs 31 on both sides, thereby further absorbing and attenuating vibration energy, significantly reducing the impact of vibration on the optical instruments on the platform 2, and improving the overall vibration isolation performance; at the same time, the horizontal height sensor 6 provides real-time... The system monitors the horizontal height of the four corners of the platform 2 and feeds the data back to the microcontroller 5. When the data difference of the horizontal height sensors 6 in each area of ​​the platform 2 exceeds the set threshold due to load changes or installation tilt, the microcontroller 5 controls the servo motor 23 at the corresponding position to start. The servo motor 23 drives the first circular gear 24 to rotate, which in turn drives the threaded sleeve 29 to rotate through the meshing second circular gear 27, causing the leveling screw 26 to move axially. The leveling screw 26 precisely adjusts the height of the corresponding position of the platform 2 through the base 16, rubber airbag 17, pressure cover 22 and column 19 until the data of each horizontal height sensor 6 returns to consistency, thus realizing the automatic leveling adjustment of the platform 2. The leveling operation does not require manual intervention, and the operation is simple and quick, greatly improving the convenience of use.

[0023] Example 2: Based on Embodiment 1, the present invention is as follows: Figure 2 As shown, a rotating shaft 9 is movably connected to the middle end of the support column 1 via a bearing. A first bevel gear 10 is fixedly mounted on the surface of the rotating shaft 9. A hexagonal recess is provided on the surface of the rotating shaft 9 away from the first bevel gear 10. A horizontal plate 8 is fixedly mounted at the middle end of the inner cavity of the support column 1, below the rotating shaft 9. A support plate 7 is fixedly mounted at the lower end of the inner cavity of the support column 1. An adjusting screw 12 is movably connected between the middle end of the top of the support plate 7 and the middle end of the horizontal plate 8 via a bearing. A second bevel gear 11 is fixedly mounted on the top of the adjusting screw 12, and the second bevel gear 11 meshes with the first bevel gear 10. A lifting frame 13 is slidably connected between the two ends of the support plate 7. The middle end of the top of the lifting frame 13 is threadedly connected to the upper end of the adjusting screw 12. A moving wheel 14 is movably connected to the bottom of the lifting frame 13 via a bearing.

[0024] In this technical solution, when personnel need to move the whole unit, an Allen wrench can be inserted into the hexagonal recess of the rotating shaft 9. By manipulating the rotating shaft 9 and the first bevel gear 10 to rotate, the second bevel gear 11 and the adjusting screw 12 can be driven to rotate. While the adjusting screw 12 is rotating, it can drive the lifting frame 13 and the moving wheel 14 to move downward, so that the bottom of the moving wheel 14 can contact the ground and lift the support column 1 from the ground, thereby greatly facilitating the movement of the whole unit by personnel.

[0025] Example 3: Based on Embodiment 1, the present invention is as follows: Figure 2 , Figure 3 , Figure 4 and Figure 6 As shown, an annular seat 18 is fixedly installed on the top of the support column 1. A rubber buffer sleeve 20 is fixedly installed in the inner cavity of the annular seat 18. A guide sleeve 21 is fixedly installed in the inner cavity of the rubber buffer sleeve 20. The inner cavity of the guide sleeve 21 is slidably connected to the surface of the column 19. An annular air chamber 39 is provided at the middle end of the rubber buffer sleeve 20. A rubber partition 40 is fixedly connected to the surface of the annular air chamber 39. A through hole 41 is provided at the middle end of the rubber partition 40.

[0026] In this technical solution, by setting up the annular seat 18, the rubber buffer sleeve 20 and the guide sleeve 21, the column 19 can be supported and guided at the top of the support column 1. At the same time, the rubber buffer sleeve 20, the annular air chamber 39, the rubber partition 40 and the through hole 41 can drive the guide sleeve 21 to compress the rubber buffer sleeve 20 when the platform 2 and the column 19 are subjected to horizontal vibration. This allows the air in the annular air chamber 39 on the compressed side to flow to the other side through the rubber partition 40 and the through hole 41. This effectively buffers the horizontal vibration of the platform 2 and the column 19, thereby improving the safety of the optical instrument on the top of the platform 2.

[0027] Example 4: Based on Embodiment 1, the present invention is as follows: Figure 1 , Figure 3 , Figure 4 and Figure 5 As shown, a vent 36 is provided at the upper end of the column 19 and above the buffer chamber 30. A filter shell 37 is fixedly installed at the upper end of the vent 36. The inner cavity of the filter shell 37 is filled with dust filter cotton 38. Guide rods 25 are slidably connected to both ends of the fixed frame plate 15. The top of the guide rods 25 is fixedly installed at the bottom of the base 16. A rubber sealing gasket 28 is fixedly installed at the bottom of the column 19. The bottom of the rubber sealing gasket 28 contacts the top of the pressure cover 22. Rubber sealing rings 33 are fixedly installed at both ends of the piston disc 32. The surface of the rubber sealing rings 33 is slidably connected to the surface of the buffer chamber 30. An mounting plate 3 is fixedly installed at the middle of the outer surface of the support column 1. A reinforcing frame 4 is fixedly installed on the surface of the mounting plate 3. The microcontroller 5 is electrically connected to the horizontal height sensor 6 and the servo motor 23, respectively.

[0028] In this technical solution, the vent 36 allows the buffer chamber 30 to communicate with the external environment, enabling air intake and exhaust during the movement of the piston disc 32. The filter shell 37 and dust filter cotton 38 filter the dust in the air flowing through the vent 36. The guide rod 25 guides the base 16, preventing it from shifting due to force during adjustment. The rubber sealing gasket 28 and rubber sealing ring 33 improve the sealing between the column 19 and the pressure cap 22, and between the piston disc 32 and the buffer chamber 30. The mounting plate 3 and the reinforcing frame 4 reinforce the support between the surrounding columns 1.

[0029] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the essence and scope of the technical solutions of the present invention.

Claims

1. An air-cushion type precision vibration isolation optical platform, comprising a support column (1) and a platform body (2), characterized in that: The number of pillars (1) is four. A level height sensor (6) is fixedly installed between the upper end of the outer surface of the pillar (1) and the bottom of the platform (2). A fixed frame plate (15) is fixedly installed at the upper end of the inner cavity of the pillar (1). A servo motor (23) is fixedly installed at the bottom of the inner cavity of the fixed frame plate (15). A first circular gear (24) is fixedly installed at the output end of the servo motor (23). A threaded sleeve (29) is movably connected to the middle end of the bottom of the fixed frame plate (15) through a bearing. A second circular gear (27) is fixedly installed at the lower end of the threaded sleeve (29). The second circular gear (27) meshes with the first circular gear (24). A leveling screw (26) is threadedly connected to the inner cavity of the threaded sleeve (29). The top of the leveling screw (26) is fixedly installed. A base (16) is fixedly installed. A microcontroller (5) is fixedly installed at the middle of the bottom of the platform (2). Columns (19) are fixedly installed around the bottom of the platform (2). A pressure cap (22) is fixedly installed at the bottom of the column (19). A rubber airbag (17) is fixedly installed between the bottom of the pressure cap (22) and the top of the base (16). A buffer cavity (30) is provided at the lower end of the column (19). A plug (34) is fixedly installed at the bottom of the column (19) and below the buffer cavity (30). An air hole (35) is provided on the surface of the plug (34). A piston disc (32) is slidably connected to the middle of the buffer cavity (30). Buffer springs (31) are fixedly installed between the two sides of the piston disc (32) and the two sides of the buffer cavity (30).

2. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: The middle end of the support column (1) is movably connected to a rotating shaft (9) via a bearing. A first bevel gear (10) is fixedly installed on the surface of the rotating shaft (9). A hexagonal recess is provided on the surface of the rotating shaft (9) away from the first bevel gear (10). A horizontal plate (8) is fixedly installed at the middle end of the inner cavity of the support column (1) and below the rotating shaft (9). A support plate (7) is fixedly installed at the lower end of the inner cavity of the support column (1). An adjusting screw (12) is movably connected between the middle end of the top of the support plate (7) and the middle end of the horizontal plate (8) via a bearing. A second bevel gear (11) is fixedly installed on the top of the adjusting screw (12). The second bevel gear (11) meshes with the first bevel gear (10).

3. The air-cushion type precision vibration isolation optical platform according to claim 2, characterized in that: A lifting frame (13) is slidably connected between the two ends of the support plate (7). The middle end of the top of the lifting frame (13) is threaded to the upper end of the adjusting screw (12). The bottom of the lifting frame (13) is movably connected to a moving wheel (14) through a bearing.

4. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: A ring seat (18) is fixedly installed on the top of the support column (1). A rubber buffer sleeve (20) is fixedly installed in the inner cavity of the ring seat (18). A guide sleeve (21) is fixedly installed in the inner cavity of the rubber buffer sleeve (20). The inner cavity of the guide sleeve (21) is slidably connected to the surface of the column (19).

5. The air-cushion type precision vibration isolation optical platform according to claim 4, characterized in that: The rubber buffer sleeve (20) has an annular air chamber (39) at its middle end, and a rubber partition (40) is fixedly connected to the surface of the annular air chamber (39). The rubber partition (40) has a through hole (41) at its middle end.

6. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: A breathing hole (36) is provided at the upper end of the column (19) and above the buffer cavity (30). A filter shell (37) is fixedly installed at the upper end of the breathing hole (36). The inner cavity of the filter shell (37) is filled with dust filter cotton (38).

7. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: Both ends of the fixed frame plate (15) are slidably connected with guide rods (25), and the top of the guide rods (25) is fixedly installed on the bottom of the base (16).

8. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: A rubber sealing gasket (28) is fixedly installed at the bottom of the column (19). The bottom of the rubber sealing gasket (28) contacts the top of the pressure cap (22). Both ends of the piston disc (32) are fixedly installed with rubber sealing rings (33). The surface of the rubber sealing rings (33) is slidably connected to the surface of the buffer cavity (30).

9. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: A mounting plate (3) is fixedly installed at the middle of the outer surface of the support column (1), and a reinforcing frame (4) is fixedly installed on the surface of the mounting plate (3).

10. The air-cushion type precision vibration isolation optical platform according to claim 1, characterized in that: The microcontroller (5) is electrically connected to the horizontal height sensor (6) and the servo motor (23), respectively.

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