Coating film thickness optical scanning detection mechanism based on multi-axis motion platform

Abstract

The invention discloses a coating film thickness optical scanning detection mechanism based on a multi-axis motion platform, and relates to the technical field of film thickness detection, and the coating film thickness optical scanning detection mechanism comprises a film thickness detection head and a mounting part thereof; the film thickness detection head adopts an optical thickness measurement mode, and the mounting part is used for connecting the film thickness detection head with a coating tool bit of the coating equipment and driving the film thickness detection head to move in the length direction of the coating tool bit. In the prior art, during coating, a film thickness detection head is directly mounted on a moving coating cutter head for synchronous measurement, so that a scanning path of the detection head becomes an inclined track due to superposition of longitudinal feeding and transverse movement; this makes it difficult for the acquired thickness data to accurately correspond to the real position on the substrate for improvement. The method has the advantages that the film thickness detection head is kept longitudinally static in each transverse scanning period, so that a scanning path is changed from inclination to straightness, and the problem of misalignment of space coordinate mapping of detection points is fundamentally solved.

Description

Technical Field

[0001] This invention relates to the field of film thickness detection technology, and in particular to an optical scanning detection mechanism for coated film thickness based on a multi-axis motion platform. Background Technology

[0002] In the field of precision coating manufacturing, accurate measurement of coating thickness is a core element in ensuring product functionality and consistency. Traditional film thickness measurement is usually performed in the later stages of the production process or offline, such as after the substrate to be coated has undergone vacuum drying and pre-baking processes, and then measured using a dedicated platform. This method has significant lag, failing to provide real-time feedback on film thickness anomalies during the coating process. This not only affects the timeliness of process adjustments but may also lead to material waste and decreased yield due to the continuous production of defective products. Furthermore, it requires removing the substrate from the equipment and using an external platform for measurement, reducing inspection efficiency and causing external contamination problems caused by substrate handling.

[0003] In existing technologies, to improve the real-time performance of detection, a common practice is to directly mount the film thickness detection head onto the coating blade, enabling simultaneous coating and detection. However, this simple integration method has inherent drawbacks: during coating, the blade typically feeds continuously along the length of the substrate, while the detection head, during its lateral scanning, follows an inclined path formed by the superposition of the blade's longitudinal feed and the detection head's own lateral scan. This non-linear scanning trajectory makes it difficult to accurately correlate the acquired film thickness data points with the actual coordinates on the substrate, affecting not only the accuracy of coating uniformity assessment but also posing challenges to the subsequent precise location of anomalies and the closed-loop adjustment of process parameters.

[0004] To address the above technical problems, this invention discloses a coating film thickness optical scanning detection mechanism based on a multi-axis motion platform. This invention has the advantages of keeping the film thickness detection head longitudinally stationary in each transverse scanning cycle, thereby changing the scanning path from inclined to straight, and fundamentally solving the problem of inaccurate spatial coordinate mapping of detection points. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a coating film thickness optical scanning detection mechanism based on a multi-axis motion platform. This addresses the problem in the prior art where, during coating, the film thickness detection head is directly mounted on a moving coating blade for synchronous measurement. This causes the scanning path of the detection head to become an inclined trajectory due to the superposition of longitudinal feed and lateral movement. This makes it difficult for the collected thickness data to accurately correspond to the actual position on the substrate, severely affecting the evaluation of coating uniformity and the accurate location of production anomalies. This invention has the advantage of keeping the film thickness detection head longitudinally stationary in each lateral scanning cycle, thereby changing the scanning path from inclined to straight, fundamentally solving the problem of inaccurate spatial coordinate mapping of detection points.

[0006] The present invention is achieved through the following technical solution: The present invention discloses a coating film thickness optical scanning detection mechanism based on a multi-axis motion platform, including a film thickness detection head and its mounting part; the mounting part is used to connect the film thickness detection head and the coating blade head on the coating equipment, and drive the film thickness detection head to move along the length direction of the coating blade head;

[0007] The mounting section also includes an intermittent feed mechanism, which keeps the film thickness detection head stationary in the coating feed direction while scanning along the length of the coating blade; and drives the mounting section and the film thickness detection head to perform one feed along the coating feed direction at the end of the scanning cycle.

[0008] Furthermore, the intermittent feed mechanism includes a trigger element disposed on the coating blade head and a transmission element disposed on the mounting part and cooperating with the trigger element; when the film thickness detection head moves to the end of the scanning stroke, the transmission element contacts the trigger element and drives the mounting part to move along the coating feed direction.

[0009] Furthermore, the triggering element is a wedge, and the transmission element is a guide block; the wedge has an inclined surface, and when the guide block moves with the film thickness detection head to contact the inclined surface of the wedge, the continued lateral movement is converted into the power to push the mounting part to move along the feed direction through the inclined surface guidance.

[0010] Furthermore, the wedges are detachably configured, allowing adjustment of the distance of a single intermittent feed by replacing wedges with different slope angles.

[0011] Furthermore, the mounting section also includes a mounting plate, a guide rail assembly, and a linear motor module. The mounting plate is used to support the film thickness detection head; the guide rail assembly is mounted on the mounting plate, and its guide rail slider is connected to the film thickness detection head; the linear motor module is mounted on the mounting plate, and its moving part is connected to the guide rail slider, used to drive the film thickness detection head to move along the length direction of the coating blade.

[0012] Furthermore, it also includes a movable plate, which is mounted on the coating equipment via a feed guide rail, and its sliding direction is consistent with the feed direction of the coating blade; the mounting plate is fixed to the movable plate.

[0013] Furthermore, the wedge is fixed to the end of the fixing rod, which passes through the mounting plate and has a limiting plate at its end;

[0014] The distance between the limiting plate and the outer wall of the mounting plate corresponds to the maximum allowable distance between the coating blade and the film thickness detection head.

[0015] Furthermore, a position sensor is installed between the limiting plate and the mounting plate to monitor the distance between the coating blade and the film thickness detection head in real time, and automatically increases the scanning speed of the film thickness detection head when the distance reaches a preset threshold.

[0016] Furthermore, the film thickness detection head is located behind the coating blade in the coating feed direction, and is used to perform real-time detection of the coated area.

[0017] Furthermore, the length of the wedge in the coating feed direction is greater than the length of the guide block to ensure that the guide block can still effectively contact the inclined surface of the wedge when there is a gap deviation between the moving plate and the coating head.

[0018] The present invention has the following advantages:

[0019] (1) This invention solves the path error problem in online detection during continuous coating by setting intermittent feed. This setting keeps the film thickness detection head vertically stationary during transverse scanning, ensuring that each scanning trajectory is a straight line perpendicular to the feed direction, thereby improving the accuracy of the substrate position coordinates corresponding to each detection point. This lays the foundation for quickly and accurately locating areas with abnormal thickness and realizing reliable closed-loop process control, fundamentally avoiding mapping errors and positioning inaccuracies caused by scanning path tilt.

[0020] (2) By directly integrating the film thickness detection head into the coating equipment, this invention enables real-time, in-situ detection after coating. This not only significantly improves detection efficiency but also completely eliminates the risk of secondary contamination that may occur when removing the substrate from the equipment for offline measurement. Simultaneously, the system can automatically adjust the scanning speed of the detection head by monitoring the change in the distance between the cutter head and the detection head, ensuring real-time matching with the coating feed speed. This guarantees full-range coverage detection while also considering the stability and lifespan of the equipment.

[0021] (3) This invention achieves intermittent feeding through the inclined surface cooperation of the wedge and guide block, which achieves reliability, timing control, and self-locking through a purely mechanical structure. The inclined surface of the wedge converts the linear motor driving force of the detection head's lateral scanning into the longitudinal feeding force of the moving plate, eliminating the need for additional motors or servo systems, resulting in a compact structure and direct response. Furthermore, the rigid contact transmission avoids elastic deformation, ensuring a constant feed amount each time. Simultaneously, the mechanism has a self-locking characteristic; when the guide block and wedge separate, the moving plate can reliably remain stationary during the reverse scanning of the detection head, ensuring the straightness of the lateral scanning path and the accuracy of the detection point coordinates. In addition, the detachable and replaceable design of the wedge allows for flexible adjustment of the single feed amount by replacing wedges with different inclined surface angles, thereby adapting to different production cycles and detection coverage requirements. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 This is a schematic diagram of the film thickness detection head and mounting plate structure of the present invention;

[0024] Figure 3 For the present invention Figure 1 A magnified schematic diagram of the structure at point A;

[0025] Figure 4 For the present invention Figure 3 A magnified schematic diagram of the structure at point B;

[0026] Figure 5 This is a schematic diagram of the wedge block structure at different angles according to the present invention.

[0027] In the diagram: 1. Film thickness detection head; 2. Mounting part; 3. Stage; 4. Coating blade; 5. Support frame; 6. Linear drive module; 7. Connecting plate; 8. Connecting frame; 9. Feed guide rail; 10. Connecting rod; 11. Limiting plate; 12. Position sensor; 201. Mounting plate; 202. Guide rail assembly; 203. Linear motor module; 204. Connecting assembly; 2041. Moving plate; 2042. Intermittent feed mechanism; 2421. Fixed rod; 2422. Wedge block; 2423. Guide block; 2001. Guide rail slider; 2022. Slide rail. Detailed Implementation

[0028] The embodiments of the present invention are described in detail below. These embodiments are implemented based on the technical solution of the present invention, and provide detailed implementation methods and specific operation processes. However, the scope of protection of the present invention is not limited to the following embodiments. In the description of the present invention, words such as "front", "rear", "left", and "right" that indicate orientation or positional relationship are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0029] The embodiments disclose a coating film thickness optical scanning detection mechanism based on a multi-axis motion platform, such as... Figures 1-5 As shown, it mainly consists of a film thickness detection head 1 and its mounting part 2. The film thickness detection head 1 adopts an optical detection method and is directly connected to the coating blade head 4 through the mounting part 2. The mounting part 2 not only realizes the linkage between the two, but also drives the detection head to move along the length direction of the coating blade head 4, thereby flexibly adjusting the detection position and effectively expanding the scanning coverage of the coating area.

[0030] It should be noted that, in this embodiment, as Figures 1-2 As shown, this testing mechanism is suitable for coating equipment with a movable coating head 4. The equipment includes a stage 3 for supporting the substrate, a coating head 4, and a portal frame 5 supporting the coating head. The support frame 5 is driven by a linear drive module 6 to move along the length of the stage 3, achieving uniform coating. The length direction of the coating head 4 is perpendicular to the length direction of the stage 3. The mounting part 2 drives the film thickness detection head 1 to move laterally, while the linear drive module 6 achieves longitudinal feeding, enabling the detection head to cover any point on the substrate surface and complete comprehensive film thickness detection.

[0031] Specifically, the mounting section 2 includes a mounting plate 201, a guide rail assembly 202, a linear motor module 203, and a connecting assembly 204. The slide rail 2022 of the guide rail assembly 202 is directly mounted on the mounting plate 201 with bolts. The outer side of the slider of the guide rail assembly 202 is fixed to the film thickness detection head 1 via a connecting plate 7, ensuring smooth and precise movement. The linear motor module 203 is located above the guide rail assembly 202 and is also fixed to the outer wall of the mounting plate 201. Its moving part is connected to the guide rail slider 2001 via a connecting bracket 8. Driven by the linear motor module 203, the slider drives the detection head to move precisely along the length of the cutter head, achieving controllable transverse scanning detection. Simultaneously, the mounting plate 201 is linked with the coating cutter head 4 via the connecting assembly 204, allowing the film thickness detection head 1 to move along the feed direction when the coating cutter head 4 is fed, thereby achieving longitudinal scanning detection. This allows for detection of any point on the substrate through transverse and longitudinal scanning.

[0032] Based on the above configuration, this embodiment realizes online in-situ detection of coating thickness without removing the substrate from the equipment and using an external platform for measurement, thereby significantly improving detection efficiency and completely avoiding the problem of external contamination caused by substrate relocation.

[0033] In actual coating operations, the support frame 5 is typically driven by a linear drive module 6, continuously and uniformly feeding longitudinally along the length of the substrate. To achieve comprehensive coverage detection of the coated film, the film thickness detection head 1, while moving longitudinally synchronously with the coating cutter head 4, also needs to be driven by the linear motor module 203 at its connection point to perform high-frequency lateral reciprocating scanning along the length of the coating cutter head 4. However, due to the continuity of the longitudinal feed, the actual movement trajectory of the film thickness detection head 1 during lateral scanning is an inclined path formed by the superposition of longitudinal and lateral displacements, rather than a straight path relative to the substrate coordinate system. This inclined scanning trajectory complicates the calculation of the actual substrate position coordinates corresponding to each detection point, introducing additional mapping errors. This affects the accurate judgment and location of abnormal film thickness points, hindering the accurate display of abnormal areas in the back-end system and introducing uncertainty for subsequent process traceability and closed-loop adjustment based on position data.

[0034] In this embodiment, the film thickness detection head 1 operates in a continuous feed mode independent of the coating cutter head 4. The detection head moves as a whole with the coating cutter head 4 via the connecting assembly 204, but its movement along the feed direction is intermittent. Crucially, each time the film thickness detection head 1 performs a reciprocating scan along the length of the cutter head, its position along the feed direction remains stationary. This intermittent stationary scanning mechanism ensures that each scanning trajectory is a straight line perpendicular to the feed direction, thereby significantly improving the accuracy of the detection point coordinates and laying a reliable foundation for subsequent rapid and accurate location of thickness anomaly areas, process analysis, and closed-loop control.

[0035] Specifically, such as Figures 1-4 As shown, the connecting assembly 204 mainly includes a moving plate 2041 and an intermittent feeding mechanism 2042. The moving plate 2041 is located behind the coating head 4 in the feeding direction, and its two ends are slidably mounted via feed guide rails 9, with the sliding direction consistent with the feeding direction of the coating head 4. The mounting plate 201 is fixed below the moving plate 2041 and is used to support the film thickness detection head 1, so that the detection head is always behind the coated area, allowing for real-time scanning and detection of the coated film layer. The intermittent feeding mechanism 2042 is responsible for driving the moving plate 2041 to move intermittently, thereby realizing the step-by-step advancement of the film thickness detection head 1 along the feeding direction, ensuring that the detection area can continuously and without omission cover the entire substrate surface.

[0036] It should be noted that in the intermittent feeding mode adopted in this embodiment, when the moving plate 2041 is stationary, the film thickness detection head 1 will perform high-speed reciprocating scanning along the length direction of the coating head 4. Its reciprocating speed is one of the key factors that determines whether the detection system can keep up with the continuous advance of the coating head 4.

[0037] Furthermore, the distance between the film thickness detection head 1 and the coating blade head 4 in the feed direction is also an important parameter. This distance directly affects the system's response efficiency when an anomaly is detected: if the distance is too large, the substrate will have already advanced a considerable distance between the film thickness detection head 1 detecting the anomaly and the coating blade head 4 performing an adjustment action, resulting in the coating of the abnormal section not being corrected in time, thus causing significant material waste. Therefore, the distance between the coating blade head 4 and the film thickness detection head 1 in the feed direction must be maintained within a reasonable and stable range to balance detection timeliness and material loss.

[0038] In actual production, the coating feed speed often changes dynamically due to material properties and other process requirements. The faster the feed speed, the higher the reciprocating scanning speed of the film thickness detection head 1 needs to be to maintain sufficient detection coverage. However, if the speed of the film thickness detection head 1 is simply fixed at the highest level to adapt to various speed conditions, although the tracking requirements can be met, it will bring several negative effects: for example, long-term high-speed reciprocating motion will aggravate the wear of mechanical structures such as guide rails and shorten the service life of the equipment; continuous high-frequency operation is also prone to causing a decrease in the stability of the measurement signal, affecting the data quality; at the same time, the vibration caused by high-speed motion will also interfere with the stability of the detection process, thus adversely affecting the accuracy of the scanning results.

[0039] To resolve the aforementioned contradictions and avoid the detection head being in an unnecessarily high-speed state for extended periods, this embodiment sets the reciprocating speed of the film thickness detection head 1 to a real-time adjustable mode, enabling it to adaptively adjust according to changes in the coating feed speed. This ensures tracking capability while also considering equipment lifespan and measurement accuracy.

[0040] In this embodiment, as Figures 1-4As shown, the intermittent feed mechanism 2042 is configured to operate without an external motor. It includes a trigger element mounted on the coating head 4 and a transmission element mounted on the mounting plate 201 and cooperating with the trigger element. Its core components include a fixing rod 2421, a wedge block 2422, and a guide block 2423. The fixing rod 2421 and wedge block 2422 are the trigger elements, while the guide block 2423 is the transmission element. Specifically, the fixing rod 2421 is securely mounted on the outer wall of the coating head 4 facing the moving plate 2041 and extends rearward, its end sliding through the mounting plate 201 that carries the film thickness detection head 1. A wedge block 2422 is fixedly mounted on the end side wall of the fixing rod 2421 located on the rear side of the mounting plate 201. The wedge 2422 is specifically designed as a right-angled trapezoidal structure, with one right-angled side fixedly connected to the side wall of the fixing rod 2421. The upper and lower sides correspond to the feed forward and backward directions respectively, while the inclined side faces the direction of the linear motor module 203 that controls the transverse scanning of the detection head.

[0041] It should be noted that the wedge 2422 is precisely positioned at the end limit of the transverse scanning stroke of the linear motor module 203, and this position is outside the actual length range of the coating head 4, while ensuring that the complete stroke of the linear motor module 203 can cover the area where the wedge 2422 is located. The guide block 2423 is fixedly mounted on the connecting frame 8 between the linear motor module 203 and the guide rail slider 2001 via the connecting rod 10, with its front end pointing towards the wedge 2422, and the guide block 2423 and the wedge 2422 are kept on the same axis in the height direction of the mounting plate 201. In particular, the mounting orientation of the wedge 2422 is configured such that its shorter straight edge faces the coating head 4, and its longer straight edge faces the rear end in the feed direction, thus forming a slope that is higher at the front and lower at the back (along the feed direction of the head).

[0042] When the film thickness detection head 1 completes the lateral scan and moves to the end of its stroke, the guide block 2423 approaches the wedge block 2422. Since the moving plate 2041 is movable, and the coating head 4 can only move in the feed direction, after the guide block 2423 contacts the inclined surface of the wedge block 2422, the continued lateral movement of the linear motor 203 will force the guide block 2423 to slide from the lower to the higher along the inclined surface of the wedge block 2422. This process converts the horizontal thrust into a force that propels the moving plate 2041 and the entire detection unit on it forward in the feed direction, thereby achieving a precise, mechanically triggered intermittent feed.

[0043] Furthermore, it is crucial that the lateral scanning stroke of the film thickness detection head 1 is greater than the actual length of the coating head 4 to ensure a complete, comprehensive scan of the coating across the entire width of the area below the coating head. Additionally, it should be noted that in this embodiment, the contact point between the guide block 2423 and the wedge block 2422 (i.e., the mechanical action that triggers intermittent feeding) is specifically positioned outside the physical length of the coating head 4. This arrangement ensures that the intermittent feeding action is only triggered after the detection head has completely completed scanning the entire length of the coating head, thus strictly guaranteeing the integrity of the detection work and the timing of the feeding action, and avoiding unnecessary disruptive movement during the scanning process.

[0044] In this embodiment, the above-described configuration enables the transverse scanning of the film thickness detection head 1 and the longitudinal feeding of the moving plate 2041. Specifically, when the linear motor module 203 drives the film thickness detection head 1 to perform a transverse scan along the length of the coating blade 4 and move to an end position outside the actual length range of the blade, the guide block 2423 fixed on the moving part of the detection head will contact the inclined surface of the wedge block 2422 installed at the end of the fixed rod 2421. With the guidance of the inclined surface, the force of transverse movement is converted into the power to push the moving plate 2041 forward along the coating feed direction, thereby completing one active intermittent feed. When the film thickness detection head 1 moves in the reverse direction, the guide block 2423 separates from the wedge block 2422. At this time, since the fixed rod 2421 and the mounting plate 201 are in a movable fit relationship, the reverse movement will not cause the mounting plate 201 and the moving plate 2041 to retract, ensuring that the moving plate 2041 remains stationary during the transverse scanning process of the detection head, thereby ensuring that each transverse detection path is a straight line. Subsequently, when the film thickness detection head 1 scans back to this side, the continuous advance of the coating head 4 has moved the wedge 2422 to a new position, and its slope low point corresponds to the guide block 2423 again. When the two come into contact, the next feed is triggered, and so on to form a stable intermittent feed.

[0045] Considering that in actual operation, if the feed speed of the coating head 4 is increased unilaterally, the reciprocating scanning speed of the film thickness detection head 1 may not be able to keep up, causing the gap between the moving plate 2041 and the coating head 4 to gradually increase. This will not only waste the material of the abnormally coated section, but may also cause the relative contact position of the wedge block 2422 and the guide block 2423 to deviate from the design range.

[0046] To solve this problem, such as Figures 3-4As shown, in this embodiment, the length of the wedge block 2422 in the feed direction is designed to be greater than the length of the guide block 2423. This ensures that even with slight gap deviations, the guide block 2423 remains within the effective range of the wedge block 2422's inclined surface, thus guaranteeing the reliability of the contact drive function. Furthermore, a limiting plate 11 is fixedly sleeved at the end of the fixing rod 2421 located behind the mounting plate 201. Under normal operating conditions, the limiting plate 11 maintains a certain distance from the outer wall of the mounting plate 201; when this distance disappears, i.e., when the limiting plate 11 contacts the mounting plate 201, it means that the distance between the moving plate 2041 and the coating head 4 has reached the preset maximum safety value. At this time, the guide block 2423 is still ensured to be within the length range of the wedge block 2422's inclined surface, effectively preventing the guide block 2423 from moving behind the wedge block 2422 and failing to make contact due to excessive gap. The setting of the limit plate 11 realizes the mechanical limit of the maximum distance between the coating blade head 4 and the moving plate 2041, ensuring the safe operating range of the mechanism.

[0047] Furthermore, to address the potential lag in the movement of the moving plate 2041 due to increased feed speed, this embodiment adds a position sensor 12 to the limiting plate 11 to monitor the distance between the limiting plate 11 and the mounting plate 201 in real time. When this distance shrinks to a preset threshold, it indicates that the actual distance between the moving plate 2041 and the coating head 4 is close to the allowable upper limit. The system then automatically increases the reciprocating scanning speed of the linear motor module 203 to match the feed speed of the coating head 4. As the speed of the linear motor module 203 increases, the contact and sliding speed of the guide block 2423 and the inclined surface of the wedge block 2422 also accelerates synchronously. This allows for faster advancement of the moving plate 2041 with each trigger, thereby increasing the average feed speed of the moving plate 2041 per unit time. This achieves adaptive adjustment of the feed speed, ensuring the synchronization and stability of the detection system under various working conditions.

[0048] like Figure 4 and Figure 5 As shown, the wedge 2422 is detachably mounted to the side wall of the fixing rod 2421 by bolts. This configuration allows users to quickly replace the wedge 2422 with different slope angles according to actual process requirements. By adjusting the slope angle, the feed amount generated by a single trigger can be changed, thereby achieving flexible adjustment of the intermittent feed distance. Without changing the travel of the linear motor module 203, it can accurately adapt to different production cycles and inspection coverage requirements, improving process adaptability and ease of operation while ensuring a compact system structure.

[0049] In this embodiment, during operation: After system startup, the coating head 4 is fed at a constant speed along the length of the substrate under the drive of the linear drive module 6. Simultaneously, the film thickness detection head 1 is linked with the head through its mounting part 2. At the start of detection, the linear motor module 203 drives the film thickness detection head 1 to perform high-speed, continuous transverse reciprocating scans along the length of the coating head 4. During this scanning process, the intermittent feed mechanism 2042 in the mounting part 2 ensures that the continuous longitudinal feed does not cause the detection path to tilt. Specifically, when the film thickness detection head 1 completes each transverse scan and moves to the end of its stroke, the guide block 2423 on it contacts the inclined surface of the wedge block 2422 fixed to the side of the head, converting the transverse motion of the scan into a force that propels the entire detection unit to move one step along the feed direction. Subsequently, the guide block 2423 separates from the wedge block 2422, and the detection head scans in the reverse direction. At this time, the moving plate 2041 is stationary, thereby ensuring that each transverse scan trajectory is a straight line perpendicular to the feed direction. During the scanning process, the film thickness detection head 1 uses its built-in optical sensor (such as one based on spectral reflection or interference principles) to perform non-contact measurement of the coated film layer, acquiring thickness data in real time. This thickness data is synchronously transmitted to the signal processing system, which calculates the actual film thickness through comparative analysis. If an abnormal thickness is detected, the processing system can immediately feed back to the actuator (such as a pump valve or height adjustment device) of the coating head 4, achieving real-time closed-loop adjustment of coating parameters. Through the cycle of "lateral scanning → intermittent stepping → data acquisition → real-time feedback," online, full-coverage detection of the substrate surface coating is achieved, effectively avoiding the lag and secondary contamination risks of traditional offline detection.

[0050] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A coating film thickness optical scanning detection mechanism based on a multi-axis motion platform, characterized in that, It includes a film thickness detection head (1) and its mounting part (2); the mounting part (2) is used to connect the film thickness detection head (1) to the coating blade head (4) on the coating equipment, and to drive the film thickness detection head (1) to move along the length direction of the coating blade head (4); The mounting part (2) also includes an intermittent feeding mechanism (2042) for keeping the film thickness detection head (1) stationary in the coating feeding direction when scanning and detecting along the length direction of the coating blade head (4); and driving the mounting part (2) and the film thickness detection head (1) to perform one feed along the coating feeding direction at the end of the scanning cycle.

2. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 1, characterized in that, The intermittent feed mechanism (2042) includes a trigger on the coating head (4) and a transmission component on the mounting part (2) that cooperates with the trigger. When the film thickness detection head (1) moves to the end of the scanning stroke, the transmission component contacts the trigger and drives the mounting part (2) to move along the coating feed direction.

3. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 2, characterized in that, The trigger is a wedge (2422), and the transmission component is a guide block (2423). The wedge (2422) has an inclined surface. When the guide block (2423) moves with the film thickness detection head (1) to contact the inclined surface of the wedge (2422), the continued lateral movement is converted into a power to push the mounting part (2) to move along the feed direction through the inclined surface guidance.

4. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 3, characterized in that, The wedge (2422) is detachably provided, and the distance of a single intermittent feed can be adjusted by replacing the wedge (2422) with different slope angles.

5. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 1, characterized in that, The mounting part (2) further includes a mounting plate (201), a guide rail assembly (202), and a linear motor module (203). The mounting plate (201) is used to support the film thickness detection head (1). The guide rail assembly (202) is mounted on the mounting plate (201), and its guide rail slider (2001) is connected to the film thickness detection head (1). The linear motor module (203) is mounted on the mounting plate (201), and its moving part is connected to the guide rail slider (2001) to drive the film thickness detection head (1) to move along the length direction of the coating blade head (4).

6. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 5, characterized in that, It also includes a movable plate (2041), which is mounted on the coating equipment via a feed guide rail (9) and its sliding direction is consistent with the feed direction of the coating blade (4); the mounting plate (201) is fixed to the movable plate (2041).

7. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 3, characterized in that, The wedge (2422) is fixed to the end of the fixing rod (2421), the fixing rod (2421) passes through the mounting plate (201), and a limiting plate (11) is provided at its end; The distance between the limiting plate (11) and the outer wall of the mounting plate (201) corresponds to the maximum allowable distance between the coating blade (4) and the film thickness detection head (1).

8. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 7, characterized in that, A position sensor (12) is provided between the limiting plate (11) and the mounting plate (201) to monitor the distance between the coating blade (4) and the film thickness detection head (1) in real time, and automatically increase the scanning speed of the film thickness detection head (1) when the distance reaches a preset threshold.

9. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 1, characterized in that, The film thickness detection head (1) is located behind the coating blade head (4) in the coating feed direction and is used to perform real-time detection of the coated area.

10. The coating film thickness optical scanning detection mechanism based on a multi-axis motion platform as described in claim 3, characterized in that, The length of the wedge (2422) in the coating feed direction is greater than the length of the guide block (2423) to ensure that the guide block (2423) can still effectively contact the inclined surface of the wedge (2422) when there is a gap deviation between the moving plate (2041) and the coating head (4).

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