Micro-hemispherical harmonic oscillator test excitation device and test method
By using a vacuum chamber system and frequency sweeping method, and by using piezoelectric ceramic sheets and bonding modules to excite a micro-hemispherical resonator, the problems of insufficient excitation force and damage in the prior art are solved, and efficient measurement of frequency difference and Q value is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-31
- Publication Date
- 2026-04-03
AI Technical Summary
Existing technologies cannot effectively excite micro-hemispherical resonators, especially in a vacuum environment where vibration excitation cannot be applied, and commonly used methods are prone to damaging the resonator or providing insufficient excitation force.
A vacuum chamber system, a long cylindrical fixture, piezoelectric ceramic sheets, and bonding modules are used to excite the resonator by a frequency sweeping method, avoiding direct contact and insufficient electrostatic discharge, and finding the resonator's eigenfrequency for fixed-frequency excitation.
This method efficiently measures the frequency difference and Q value of a micro-hemispherical resonator without damaging it, avoiding problems such as insufficient clamping force due to its small size.
Smart Images
Figure CN121783200A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of micro-hemispherical resonant gyroscope technology, and in particular to a micro-hemispherical resonator testing excitation device and testing method. Background Technology
[0002] Hemispherical resonant gyroscopes (BRGs) offer advantages such as high stability, high precision, long lifespan, miniaturization, and low cost, and have been applied in aerospace, aviation, and marine fields, demonstrating excellent performance in various application scenarios. Micro-hemispherical resonant gyroscopes, based on BRGs, further emphasize miniaturization and low cost. While their precision is slightly lower than that of BRGs, they have achieved stable navigation-level accuracy in domestic and international applications, making them suitable for various application areas, particularly in automotive, digital electronics, and drone applications where precision requirements are lower but cost and size constraints are high.
[0003] The core component of a microhemispherical resonant gyroscope is the microhemispherical resonator. Common fabrication processes include high-temperature glass softening and fused silica rotary blowing. The high-temperature glass softening method softens the glass material at high temperatures, utilizing the pressure difference across the glass surface to create the hemispherical structure. The fused silica rotary blowing method involves rotating and blowing heated fused silica microshell structures onto a corresponding fixture. Common microhemispherical resonators have diameters below 10mm, mostly in the 5mm and 2mm range.
[0004] The frequency difference of a micro-hemispherical resonator is typically in the tens of mHz range, with a Q value ranging from tens to millions. The testing environment requires a vacuum state, and its extremely small size increases the difficulty of testing. During testing, the micro-hemispherical resonator needs to maintain a vibrating state. Currently, commonly used methods for excitation include acoustic excitation, physical impact excitation, and electrical excitation. However, acoustic excitation cannot be used in a vacuum environment; physical impact excitation suffers from uncontrollable impact force, and given the small size and thin sidewalls of the micro-hemispherical resonator, impact excitation can easily damage it; electrical excitation requires a certain electrostatic surface area to ensure a sufficiently large electrical signal to drive the oscillator, but the lip surface of a micro-hemispherical resonator is extremely small, making it impossible to excite the oscillator with a suitable electrical signal. Therefore, currently used hemispherical resonator excitation methods are not suitable for micro-hemispherical resonators, necessitating a vibration excitation method applicable to them. Summary of the Invention
[0005] This invention provides a testing excitation device and method for micro-hemispherical resonators, which can solve the technical problem that existing technologies cannot apply vibration excitation to micro-hemispherical resonators.
[0006] According to one aspect of the present invention, a micro-hemispherical resonator testing excitation device is provided, the device comprising:
[0007] The vacuum chamber system includes a sealed vacuum chamber, a mechanical pump-molecular pump vacuum pump unit, and a pre-evacuation valve-forestage valve combination valve. The mechanical pump-molecular pump vacuum pump unit is connected to the sealed vacuum chamber through the pre-evacuation valve-forestage valve combination valve and is used to evacuate the environment inside the sealed vacuum chamber to a preset vacuum level.
[0008] The resonator clamping and fixing structure is a long cylindrical clamp.
[0009] The resonator excitation unit includes an adhesive module, a piezoelectric ceramic sheet, and a frequency-controllable electrical signal generator. The piezoelectric ceramic sheet is adhered to the adhesive module to excite the vibration of the adhesive module. The adhesive module is clamped on a long cylindrical fixture and adhered to the resonator to drive the resonator to vibrate. The electrical signal generator applies electrical signals at fixed intervals to the piezoelectric ceramic sheet to sweep the frequency of the resonator, find the frequency resonance peak of the resonator, and set the frequency corresponding to the resonance peak as the excitation frequency to excite the resonator.
[0010] The vibration testing unit is used to test the vibration signal of the micro-hemispherical harmonic oscillator and calculate the frequency difference and Q value.
[0011] Furthermore, the vibration testing unit includes a Doppler laser vibration measurement system.
[0012] Furthermore, the adhesive module is made of insulating material.
[0013] Furthermore, the quality of the adhesive module is determined using the following formula:
[0014]
[0015] In the above formula, f n Let represent the nth modal frequency of the adhesive module, k represent the stiffness of the adhesive module, and m represent the mass of the adhesive module.
[0016] According to another aspect of the present invention, a method for testing using the aforementioned micro-hemispherical resonator test excitation device is provided, the method comprising:
[0017] S1. After the resonator is fixed by the resonator clamping structure and the resonator excitation unit, the sealed vacuum cavity where the resonator is located is closed and the vacuum is evacuated to the preset vacuum level.
[0018] S2, apply an electrical signal with a fixed interval frequency to the piezoelectric ceramic sheet, sweep the frequency of the resonator, find the resonator frequency resonance peak, set the frequency corresponding to the resonance peak as the excitation frequency, and excite the resonator.
[0019] S3, the vibration signal of the harmonic oscillator is measured by the vibration test unit, and the frequency difference and Q value of the harmonic oscillator are calculated.
[0020] Furthermore, the Q value of the harmonic oscillator is calculated using the following formula:
[0021] Q = πτf,
[0022] In the above formula, Q represents the Q value of the harmonic oscillator, τ represents the decay time parameter, and f represents the vibration frequency of the harmonic oscillator.
[0023] This invention provides a testing excitation device and method for micro-hemispherical resonators. The device, through a long cylindrical clamp and an adhesive module, avoids the situation where the small size of the oscillator prevents it from being clamped in traditional oscillator clamping fixtures. Compared to common excitation methods for hemispherical resonators such as impact excitation and electrical excitation, the device, using a piezoelectric ceramic sheet and adhesive module, does not require direct contact with the oscillator, thus avoiding damage and insufficient excitation force due to insufficient electrostatic interaction area. By finding the oscillator's intrinsic frequency through frequency sweeping and performing fixed-frequency excitation, the influence of other vibration mode signals on the calculation of oscillator vibration signal parameters can be avoided. In other words, based on a piezoelectric ceramic sheet, adhesive module, and long cylindrical clamp, this invention, through a frequency sweeping method, can efficiently measure the frequency difference and Q value of a micro-hemispherical resonator without damaging it. Attached Figure Description
[0024] The accompanying drawings, which form part of this specification, are provided to further illustrate embodiments of the invention and, together with the textual description, explain the principles of the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any creative effort.
[0025] Figure 1 A schematic diagram of the structure of a micro-hemispherical resonator test excitation device provided according to a specific embodiment of the present invention is shown. Detailed Implementation
[0026] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0027] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0028] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values of the components and steps set forth in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.
[0029] like Figure 1 As shown, a micro-hemispherical resonator test excitation device is provided according to a specific embodiment of the present invention, the device comprising:
[0030] The vacuum chamber system includes a sealed vacuum chamber, a mechanical pump-molecular pump vacuum pump unit, and a pre-evacuation valve-forestage valve combination valve. The mechanical pump-molecular pump vacuum pump unit is connected to the sealed vacuum chamber through the pre-evacuation valve-forestage valve combination valve and is used to evacuate the environment inside the sealed vacuum chamber to a preset vacuum level.
[0031] The resonator 1 is clamped and fixed by a long cylindrical clamp 4.
[0032] The resonator 1 excitation unit includes an adhesive module 2, a piezoelectric ceramic sheet 3, and a frequency-controllable electrical signal generator. The piezoelectric ceramic sheet 3 is adhered to the adhesive module 2 to excite the adhesive module 2 to vibrate. The adhesive module 2 is clamped on a long cylindrical clamp 4 and adhered to the resonator 1 to drive the resonator 1 to vibrate. The electrical signal generator applies an electrical signal with a fixed interval frequency to the piezoelectric ceramic sheet 3 to sweep the frequency of the resonator 1, find the frequency resonance peak of the resonator 1, and set the frequency corresponding to the resonance peak as the excitation frequency to excite the resonator 1.
[0033] The vibration testing unit is used to test the vibration signal of the micro-hemispherical resonator 1 and calculate the frequency difference and Q value.
[0034] This configuration provides a testing and excitation device for micro-hemispherical resonators. This device, through a long cylindrical clamp and adhesive module, avoids the situation where the small size of the oscillator prevents its clamping in traditional oscillator clamping fixtures. Compared to common excitation methods for hemispherical resonators such as impact excitation and electrical excitation, the device, using a piezoelectric ceramic sheet and adhesive module, does not require direct contact with the oscillator, thus preventing damage and avoiding insufficient excitation force due to insufficient electrostatic interaction area. By finding the oscillator's intrinsic frequency through frequency sweeping and applying fixed-frequency excitation, the influence of other vibration mode signals on the calculation of oscillator vibration signal parameters can be avoided. In other words, based on a piezoelectric ceramic sheet, adhesive module, and long cylindrical clamp, this invention, through frequency sweeping, can efficiently measure the frequency difference and Q value of a micro-hemispherical resonator without damaging it. Compared with existing technologies, the technical solution of this invention solves the technical problem of not being able to apply vibration excitation to micro-hemispherical resonators.
[0035] Furthermore, such as Figure 1 As shown in the embodiment of the invention, the resonator clamping and fixing structure has a relatively long length and a small diameter, which can avoid the situation where the oscillator collides with the clamp due to its small size and the signal detection laser cannot irradiate the outer edge of the oscillator; the vibration testing unit includes a Doppler laser vibration measurement system. Figure 1 5 represents the laser beam emitted by the Doppler laser vibrometer. The vibration signal of the oscillator is measured by the Doppler laser vibrometer, and the property parameters of the oscillator are calculated by the signal calculation method. In addition, the vacuum chamber system can make the vacuum degree in the sealed vacuum chamber reach the level of 1e-3 Pa, thereby reducing the influence of air damping on the vibration attenuation of the oscillator. The bonding module 2 is made of insulating material to ensure that no current crosstalk will be generated when the piezoelectric ceramic sheet is energized.
[0036] Furthermore, in this embodiment of the invention, a material with suitable stiffness is selected, the mass of the bonding module 2 is designed according to the formula below, and the intrinsic frequency of the bonding module 2 is made close to the resonant frequency of the resonator through finite element modal simulation, so that the piezoelectric ceramic sheet can excite the resonator to vibrate more efficiently.
[0037]
[0038] In the above formula, f n Let represent the nth modal frequency of the adhesive module, k represent the stiffness of the adhesive module, and m represent the mass of the adhesive module.
[0039] According to another aspect of the present invention, a method for testing using the aforementioned micro-hemispherical resonator test excitation device is provided, the method comprising:
[0040] S1. After the resonator is fixed by the resonator clamping structure and the resonator excitation unit, the sealed vacuum cavity where the resonator is located is closed and the vacuum is evacuated to the preset vacuum level.
[0041] S2, apply an electrical signal with a fixed interval frequency to the piezoelectric ceramic sheet, sweep the frequency of the resonator, find the resonator frequency resonance peak, set the frequency (center frequency) corresponding to the resonance peak as the excitation frequency, and excite the resonator.
[0042] S3, the vibration signal of the harmonic oscillator is measured by the vibration test unit, and the frequency difference and Q value of the harmonic oscillator are calculated.
[0043] Furthermore, in this embodiment of the invention, the Q value of the harmonic oscillator is calculated using the following formula:
[0044] Q = πτf,
[0045] In the above formula, Q represents the Q value of the harmonic oscillator, τ represents the decay time parameter, and f represents the vibration frequency of the harmonic oscillator.
[0046] To gain a further understanding of the present invention, the following description is provided in conjunction with... Figure 1 The micro-hemispherical resonator test excitation device and test method of the present invention will be described in detail.
[0047] like Figure 1 As shown, a micro-hemispherical resonator testing excitation device is provided according to a specific embodiment of the present invention, and the testing steps mainly include:
[0048] 1. Oscillator clamping
[0049] 1.1 Attach the piezoelectric ceramic sheet to the bonding module, and then attach the oscillator and the bonding module together;
[0050] 1.2 After the oscillator and the bonding module are fixed together, clamp the bonding module onto the long cylindrical clamp;
[0051] 1.3 Turn on the combined pump system, including mechanical pumps and molecular pumps, to evacuate the vacuum chamber containing the oscillator to a high vacuum state.
[0052] 2. Frequency sweep test
[0053] 2.1 A frequency sweep test was performed at 100 MHz intervals, and the vibration signal of the oscillator was received by a Doppler laser vibrometer;
[0054] 2.2 Perform Fourier transform on the vibration signal to find the frequency range corresponding to the amplitude extrema, and then sweep the frequency at 10mHz intervals to find the frequency range corresponding to the amplitude peak of the oscillator.
[0055] 2.3 Finally, the frequency interval of the sweep frequency is set to 1 mHz to find the precise resonance frequency point of the four antinode vibration mode of the oscillator, and this frequency is used as the excitation frequency.
[0056] 3. Vibration signal testing and calculation
[0057] 3.1 The frequency difference of the oscillator is obtained by measuring the vibration signal of the oscillator with a Doppler laser vibrometer and calculating the time interval between adjacent peaks of the vibration signal envelope.
[0058] 3.2 Calculation of Q value using the time decay method
[0059] The Q value of the harmonic oscillator and its vibration frequency f, as well as the time decay parameter τ, satisfy the following relationship:
[0060] Q = πτf,
[0061] The measured vibration signal of the micro-hemispherical harmonic oscillator is a graph of the oscillator amplitude continuously decaying. By fitting the vibration curve of the amplitude, the decay time parameter τ can be obtained, and the oscillator vibration frequency can also be calculated by Fourier transform. From the above formula, the Q value of the oscillator can be calculated.
[0062] In summary, this invention provides a testing excitation device and method for micro-hemispherical resonators. This device, through a long cylindrical clamp and an adhesive module, avoids the situation where the small size of the oscillator prevents its clamping in traditional oscillator clamping fixtures. Compared to common excitation methods for hemispherical resonators such as impact excitation and electrical excitation, the device, using a piezoelectric ceramic sheet and adhesive module, does not require direct contact with the oscillator, thus avoiding damage and insufficient excitation force due to insufficient electrostatic interaction area. By finding the oscillator's intrinsic frequency through frequency sweeping and applying fixed-frequency excitation, the influence of other vibration mode signals on the calculation of oscillator vibration signal parameters can be avoided. In other words, based on a piezoelectric ceramic sheet, adhesive module, and long cylindrical clamp, this invention, through a frequency sweeping method, can efficiently measure the frequency difference and Q value of a micro-hemispherical resonator without damaging it. Compared with existing technologies, the technical solution of this invention solves the technical problem of being unable to apply vibration excitation to micro-hemispherical resonators.
[0063] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.
[0064] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.
[0065] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A test excitation device for a micro-hemispherical resonator, characterized in that, The device includes: A vacuum chamber system, comprising a sealed vacuum chamber, a mechanical pump-molecular pump vacuum pump assembly, and a pre-evacuation valve-forestage valve combination valve, wherein the mechanical pump-molecular pump vacuum pump assembly is connected to the sealed vacuum chamber via the pre-evacuation valve-forestage valve combination valve, and is used to evacuate the environment within the sealed vacuum chamber to a preset vacuum level; The resonator (1) clamping and fixing structure is a long cylindrical clamp (4); The resonator (1) excitation unit includes an adhesive module (2), a piezoelectric ceramic sheet (3), and a frequency controllable electrical signal generator. The piezoelectric ceramic sheet (3) is attached to the adhesive module (2) to excite the adhesive module (2) to vibrate. The adhesive module (2) is clamped on the long cylindrical clamp (4) and attached to the resonator (1) to drive the resonator (1) to vibrate. The electrical signal generator applies an electrical signal with a fixed interval frequency to the piezoelectric ceramic sheet (3) to sweep the frequency of the resonator (1), find the frequency resonance peak of the resonator (1), set the frequency corresponding to the frequency resonance peak as the excitation frequency, and excite the resonator (1). Vibration testing unit, which is used to test the vibration signal of the micro-hemispherical harmonic oscillator (1) and calculate the frequency difference and Q value.
2. The apparatus according to claim 1, characterized in that, The vibration testing unit includes a Doppler laser vibration measurement system.
3. The apparatus according to claim 2, characterized in that, The adhesive module (2) is made of insulating material.
4. The apparatus according to claim 3, characterized in that, The adhesive module (2) is determined by the following formula. Quality: In the above formula, f n Let represent the nth modal frequency of the adhesive module, k represent the stiffness of the adhesive module, and m represent the mass of the adhesive module.
5. A method for testing a micro-hemispherical resonator using any one of claims 1 to 4, characterized in that, The method includes: S1, After the resonator is fixed by the resonator clamping and fixing structure and the resonator excitation unit, the sealed vacuum cavity where the resonator is located is closed and the vacuum is evacuated to a preset degree. S2, apply an electrical signal with a fixed interval frequency to the piezoelectric ceramic sheet, sweep the frequency of the resonator, find the resonator frequency resonance peak, set the frequency corresponding to the resonance peak as the excitation frequency, and excite the resonator. S3, the vibration signal of the harmonic oscillator is measured by the vibration test unit, and the frequency difference and Q value of the harmonic oscillator are calculated.
6. The method according to claim 5, characterized in that, The Q value of the harmonic oscillator can be calculated using the following formula: Q = πτf, In the above formula, Q represents the Q value of the harmonic oscillator, τ represents the decay time parameter, and f represents the vibration frequency of the harmonic oscillator.