Self-supporting peelable multilayer ceramic film capacitor

Abstract

The invention discloses a self-supporting peelable multilayer ceramic thin film capacitor, and relates to the technical field of ceramic thin film capacitors, and the self-supporting peelable multilayer ceramic thin film capacitor is prepared by a preparation method comprising the following steps: S1, selecting a substrate; step S2, preparing a Sr3Al2O6 sacrificial layer; step S3, preparation of an MLFC precursor solution; step S4, preparing an MLFC (mixed liquid fuel cell); step S5, preparing the multi-layer MLFC; and step S6, stripping the multi-layer MLFC. The self-supporting peelable multilayer ceramic film capacitor disclosed by the invention is low in dielectric loss and large in capacitance, and can realize peeling of an MLFC (Multilayer Ceramic Film Capacitor) to form an independent discrete device.

Description

Technical Field

[0001] This invention relates to the field of ceramic film capacitor technology, and more particularly to a self-supporting, peelable multilayer ceramic film capacitor. Background Technology

[0002] With the rapid development of emerging industries such as new energy, intelligent manufacturing, the Internet of Things, and smart homes, the government has continuously introduced relevant policies to promote the development of electronic components and related industries, while also providing a broad market space and policy support for the multilayer ceramic film capacitor industry. With the rapid development of emerging industries such as 5G, the Internet of Things, and new energy vehicles, the application scope of multilayer ceramic film capacitors will continue to expand, and the market size is expected to continue its growth trend.

[0003] Multilayer ceramic film capacitors are electronic components used to store charge and regulate capacitance in circuits. They consist of multiple ceramic layers, each sandwiched with metal electrodes, stacked together and connected to conductor leads at both ends to form a single integrated structure. The composite capacitance of a multilayer ceramic film capacitor is the sum of the capacitances of its individual layers. Currently, multilayer film capacitors are attached to a substrate and cannot be used as discrete devices, limiting their applications. In addition, commercially available ceramic film capacitors suffer from technical drawbacks such as low dielectric constant and capacitance, high dielectric loss, complex manufacturing processes, and high production costs.

[0004] To address the aforementioned issues, Chinese invention patent CN114373630A discloses a multilayer high-stability inorganic dielectric amorphous thin-film capacitor and its fabrication method. The capacitor comprises a substrate, an intermediate layer, and a top electrode layer; wherein the intermediate layer is composed of n layers of amorphous ceramic thin film and (n-1) layers of electrode layers stacked alternately. The fabrication process involves preparing the amorphous ceramic thin film using a sol-gel method, preparing the electrode layers using magnetron sputtering to form a multilayer structure, and then annealing the multilayer structure to obtain the amorphous thin-film capacitor. This inorganic dielectric amorphous thin-film capacitor possesses advantages such as high dielectric constant, energy density, and high temperature stability. It exhibits excellent dielectric and temperature stability over a wide temperature range and effectively improves the volumetric efficiency of the thin-film capacitor, meeting the requirements for device miniaturization and integration. However, its dielectric loss still needs further reduction, and its capacitance value needs further improvement. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a self-supporting peelable multilayer ceramic film capacitor with low dielectric loss, large capacitance, and the ability to peel off MLFCs to form independent discrete devices.

[0006] To achieve the above objectives, the technical solution adopted by the present invention is: a self-supporting, peelable multilayer ceramic film capacitor, which is prepared by a method comprising the following steps: Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5 TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and heated and stirred at 75-160℃ for 2-4 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 1-3 hours to obtain an MLFC precursor solution with a concentration of 0.1-0.4M. Step S4, MLFC preparation: The MLFC precursor solution aged for 1-3 days is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 190-220℃ for 3-5 minutes to obtain a dry film, and then pyrolyzed at 390-420℃ for 9-13 minutes to evaporate the residual organic matter. The deposited film is crystallized by a rapid thermal annealing process to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5: Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC Peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; to facilitate testing by transferring the independent MLFC to other substrates, it can be attached to PET, etched in water, and then the support with the independent film is placed on the substrate and heated at 68-72℃ for 8-12 minutes to separate the support; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

[0007] Preferably, the single-crystal substrate material in step S1 is selected from any one of SrTiO3, Si, DyScO3, TbScO3, and LaAlO3.

[0008] Preferably, the strontium source in step S2 is strontium carbonate; and the aluminum source is aluminum oxide.

[0009] Preferably, the calcination temperature in step S2 is 780-820℃ and the time is 2-4h.

[0010] Preferably, the sintering temperature in step S2 is 1330-1370℃ and the time is 9-12h.

[0011] Preferably, the specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2 × 10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm -2 .

[0012] Preferably, the mass ratio of the strontium source, PVA, and PVB adhesive is 100:(1-3):2.

[0013] Preferably, the calcium source is calcium nitrate; and the titanium source is titanium nitrate.

[0014] Preferably, the organic solvent is one or more of 2-methoxyethanol, propionic acid, ethylene glycol, and acetic acid.

[0015] Preferably, the number of layers in step S5 is 15-20 layers, and the thickness of a single layer is 200-300 nm.

[0016] Preferably, the baking temperature in step S6 is 400-500℃ and the baking time is 5-10 minutes.

[0017] Due to the application of the above technical solution, the present invention has the following beneficial effects: The present invention first deposits a sacrificial layer on a single crystal substrate, then adds a protective layer, and then deposits MLFC, which can realize the stripping of MLFC and form an independent discrete device; by reasonably selecting the preparation process parameters, the multilayer ceramic thin film capacitor made by this method has low dielectric loss and large capacitance. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the multilayer ceramic thin-film capacitor of the present invention; The labels in the diagram are as follows: 1. MLFC; 2. Silver electrode; 3. End cap. Detailed Implementation

[0019] The following description is intended to disclose the invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0020] Example 1 A self-supporting, peelable multilayer ceramic film capacitor, such as Figure 1 It is prepared by a method including the following steps: Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5 TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and heated and stirred at 75°C for 2 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 1 hour to obtain a 0.1M MLFC precursor solution. Step S4, MLFC preparation: The MLFC precursor solution aged for 1 day is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 190°C for 3 minutes to obtain a dry film, and then pyrolyzed at 390°C for 9 minutes to evaporate the residual organic matter. The deposited film is crystallized by a rapid thermal annealing process to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5, Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC Peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; to facilitate testing by transferring the independent MLFC to other substrates, it can be attached to PET, etched in water, and then the support with the independent film is placed on the substrate and heated at 69°C for 9 minutes to separate the support; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

[0021] The single-crystal substrate material in step S1 is selected from SrTiO3; the strontium source in step S2 is strontium carbonate; the aluminum source is alumina; the calcination temperature in step S2 is 780℃ and the time is 2h; the sintering temperature in step S2 is 1330℃ and the time is 9h.

[0022] The specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2 × 10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm -2The mass ratio of the strontium source, PVA, and PVB adhesive is 100:1:2; the calcium source is calcium nitrate; the titanium source is titanium nitrate; the organic solvent is 2-methoxyethanol; the number of layers in step S5 is 20 layers, and the thickness of a single layer is 300 nm; the baking temperature in step S6 is 400 °C, and the time is 5 min.

[0023] After testing, the multilayer ceramic film capacitor was found to have a lateral dimension of 5mm × 5mm, a capacitance of 9.5uF, and a loss of 1.8%.

[0024] Example 2 Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5 TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and then heated and stirred at 90°C for 2.5 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 1.5 hours to obtain a 0.2 M MLFC precursor solution. Step S4, MLFC preparation: The MLFC precursor solution aged for 1.5 days is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 200°C for 3.5 minutes to obtain a dry film, and then pyrolyzed at 400°C for 10 minutes to evaporate the residual organic matter. The deposited film is crystallized by a rapid thermal annealing process to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5: Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC Peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; to facilitate testing by transferring the independent MLFC to other substrates, it can be attached to PET, etched in water, and then the support with the independent film is placed on the substrate and heated at 69°C for 9 minutes to separate the support; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

[0025] The single-crystal substrate material in step S1 is selected from Si; the strontium source in step S2 is strontium carbonate; the aluminum source is alumina; the calcination temperature in step S2 is 790℃, and the time is 2.5h; the sintering temperature in step S2 is 1340℃, and the time is 10h; the specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2×10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm -2 The mass ratio of the strontium source, PVA, and PVB adhesive is 100:1.5:2.

[0026] The calcium source is calcium nitrate; the titanium source is titanium nitrate; the organic solvent is propionic acid; the number of layers in step S5 is 20 layers, and the thickness of a single layer is 300 nm; the baking temperature in step S6 is 430°C and the time is 6 min.

[0027] After testing, the multilayer ceramic film capacitor has a lateral dimension of 5mm × 5mm, a capacitance of 10.3uF, and a loss of 1.4%.

[0028] Example 3 A self-supporting, peelable multilayer ceramic thin-film capacitor is prepared by a method comprising the following steps: Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5 TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and heated and stirred at 110°C for 3 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 2 hours to obtain a 0.25M MLFC precursor solution. Step S4, MLFC preparation: The MLFC precursor solution aged for 2 days is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 205°C for 4 minutes to obtain a dry film, and then pyrolyzed at 405°C for 11 minutes to evaporate the residual organic matter. The deposited film is crystallized by rapid thermal annealing to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5, Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC Peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; to facilitate testing by transferring the independent MLFC to other substrates, it can be attached to PET, etched in water, and then the support with the independent film is placed on the substrate and heated at 70°C for 10 minutes to separate the support; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

[0029] The single-crystal substrate material in step S1 is selected from DyScO3; the strontium source in step S2 is strontium carbonate; the aluminum source is alumina; the calcination temperature in step S2 is 800℃, and the time is 3h; the sintering temperature in step S2 is 1350℃, and the time is 10.5h; the specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2×10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm -2 The mass ratio of the strontium source, PVA, and PVB adhesive is 100:2:2.

[0030] The calcium source is calcium nitrate; the titanium source is titanium nitrate; the organic solvent is ethylene glycol; the number of layers in step S5 is 20 layers, and the thickness of a single layer is 300 nm; the baking temperature in step S6 is 450°C and the time is 7 min.

[0031] After testing, the multilayer ceramic film capacitor was found to have a lateral dimension of 5mm × 5mm, a capacitance of 10.9uF, and a loss of 1.0%.

[0032] Example 4 Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and heated and stirred at 140°C for 3.5 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 2.5 hours to obtain a 0.35M MLFC precursor solution. Step S4, MLFC preparation: The MLFC precursor solution aged for 1-3 days is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 215℃ for 4.5 minutes to obtain a dry film, and then pyrolyzed at 410℃ for 12 minutes to evaporate the residual organic matter. The deposited film is crystallized by a rapid thermal annealing process to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5: Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC Peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; to facilitate testing by transferring the independent MLFC to other substrates, it can be attached to PET, etched in water, and then the support with the independent film is placed on the substrate and heated at 71°C for 11 minutes to separate the support; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

[0033] The single-crystal substrate material in step S1 is selected from TbScO3; the strontium source in step S2 is strontium carbonate; the aluminum source is alumina; the calcination temperature in step S2 is 810℃, and the time is 3.5h; the sintering temperature in step S2 is 1360℃, and the time is 11h; the specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2×10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm -2 The mass ratio of the strontium source, PVA, and PVB adhesive is 100:2.5:2.

[0034] The calcium source is calcium nitrate; the titanium source is titanium nitrate; the organic solvent is acetic acid; the number of layers in step S5 is 20 layers, and the thickness of a single layer is 300 nm; the baking temperature in step S6 is 480 °C and the time is 9 min.

[0035] After testing, the multilayer ceramic film capacitor was found to have a lateral dimension of 5mm × 5mm, a capacitance of 11.2uF, and a loss of 0.8%.

[0036] Example 5 A self-supporting, peelable multilayer ceramic thin-film capacitor is prepared by a method comprising the following steps: Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5 TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and heated and stirred at 160°C for 4 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 3 hours to obtain an MLFC precursor solution with a concentration of 0.1-0.4M. Step S4, MLFC preparation: The MLFC precursor solution aged for 3 days is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 220°C for 5 minutes to obtain a dry film, and then pyrolyzed at 420°C for 13 minutes to evaporate the residual organic matter. The deposited film is crystallized by a rapid thermal annealing process to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5, Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC Peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; to facilitate testing by transferring the independent MLFC to other substrates, it can be attached to PET, etched in water, and then the support with the independent film is placed on the substrate and heated at 72°C for 12 minutes to separate the support; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

[0037] The single-crystal substrate material in step S1 is selected from LaAlO3; the strontium source in step S2 is strontium carbonate; the aluminum source is alumina; the calcination temperature in step S2 is 820℃ and the time is 4h; the sintering temperature in step S2 is 1370℃ and the time is 12h; the specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2×10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm-2 The mass ratio of the strontium source, PVA, and PVB adhesive is 100:3:2.

[0038] The calcium source is calcium nitrate; the titanium source is titanium nitrate; the organic solvent is 2-methoxyethanol; the number of layers in step S5 is 20 layers, and the thickness of a single layer is 300 nm; the baking temperature in step S6 is 500 °C and the time is 10 min.

[0039] After testing, the multilayer ceramic film capacitor has a lateral dimension of 5mm × 5mm, a capacitance of 11.8uF, and a loss of 0.7%.

[0040] The above embodiments are only for illustrating the technical concept and features of the present invention. Their purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. They should not be used to limit the scope of protection of the present invention. All equivalent changes or modifications made in accordance with the spirit and essence of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A self-supporting, peelable multilayer ceramic film capacitor, characterized in that, It is prepared by a method including the following steps: Step S1, Substrate Selection: Select a single-crystal substrate material as the substrate; Step S2, Preparation of Sr3Al2O6 sacrificial layer: Strontium source and aluminum source are mixed according to stoichiometric ratio, ball-milled, dried and calcined; after calcination, ball-milled again, PVA and PVB glue are added to granulate and press into tablets, the pressed tablets are sintered to form a target material; Sr3Al2O6 sacrificial layer is deposited on the substrate surface using pulsed laser deposition. Step S3, Preparation of MLFC precursor solution: According to the following general chemical formula Sr 0.5 Ca 0.5 TiO3 was used to dissolve strontium nitrate, calcium source, and titanium source in an organic solvent, and heated and stirred at 75-160℃ for 2-4 hours. Subsequently, the resulting mixture was stirred continuously under ambient conditions for 1-3 hours to obtain an MLFC precursor solution with a concentration of 0.1-0.4M. Step S4, MLFC preparation: The MLFC precursor solution aged for 1-3 days is deposited on the surface of the sacrificial layer by spin coating. The coated wet film is baked at 190-220℃ for 3-5 minutes to obtain a dry film, and then pyrolyzed at 390-420℃ for 9-13 minutes to evaporate the residual organic matter. The deposited film is crystallized by a rapid thermal annealing process to prepare a monolayer MLFC. A silver electrode is coated on one end of the monolayer MLFC. Step S5: Preparation of multilayer MLFC: Repeat step S4 on the obtained single-layer MLFC until a certain number of MLFC layers are obtained; wherein, the silver electrode should be applied alternately along the two ends of the long axis of the MLFC on the upper and lower MLFC layers. Step S6, Multilayer MLFC peeling: A 0.1 mm thick PDMS layer is laid on a clean silicon wafer to form a flat PDMS sheet; the multilayer MLFC surface is adhered to the PDMS surface; the structure is immersed in room temperature filtered deionized water to dissolve the Sr3Al2O6 layer; the end caps are removed, and after baking, a self-supporting peelable multilayer ceramic film capacitor is obtained.

2. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The single-crystal substrate material mentioned in step S1 is selected from any one of SrTiO3, Si, DyScO3, TbScO3, and LaAlO3.

3. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, In step S2, the strontium source is strontium carbonate; the aluminum source is aluminum oxide.

4. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The calcination temperature in step S2 is 780-820℃, and the time is 2-4h.

5. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The sintering temperature in step S2 is 1330-1370℃, and the time is 9-12h.

6. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The specific parameters for pulsed laser deposition in step S2 are: oxygen pressure 2 × 10⁻⁶. -6 mbar, temperature 700℃, laser energy 1.5 J·cm -2 .

7. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The mass ratio of the strontium source, PVA, and PVB adhesive is 100:(1-3):

2.

8. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The calcium source is calcium nitrate; the titanium source is titanium nitrate; and the organic solvent is one or more of 2-methoxyethanol, propionic acid, ethylene glycol, and acetic acid.

9. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The number of layers mentioned in step S5 is 15-20 layers, and the thickness of a single layer is 200-300nm.

10. The self-supporting peelable multilayer ceramic film capacitor according to claim 1, characterized in that, The baking temperature in step S6 is 400-500℃, and the baking time is 5-10 minutes.

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