Air floatation system and coating equipment

Abstract

The invention discloses an air flotation system and coating equipment, the air flotation system comprises an adsorption device arranged on the periphery of an air flotation supporting platform, the adsorption device and the air flotation supporting platform are jointly used for supporting a substrate, the adsorption device comprises an adsorption surface used for adsorbing the substrate, and a plurality of adsorption openings are formed in the adsorption surface; the adsorption device further comprises a main channel and a plurality of branch channels connected with the main channel, the main channel is connected with a vacuum generating device, the branch channels are correspondingly connected with the adsorption openings, the adsorption openings correspond to the branch channels, and the main channel is connected with the vacuum generating device and generates adsorption force. The air floatation system and the coating equipment are used for improving the supporting stability of the air floatation supporting platform and ensuring the coating quality of the functional film layer on the substrate.

Description

Technical Field

[0001] This invention relates to the field of coating equipment technology, and more particularly to an air flotation system and coating equipment. Background Technology

[0002] In fields such as flat panel displays, chip packaging, and lithium-ion batteries, slot coating equipment is used to apply slurry to a substrate to prepare the desired functional film layer. When coating the substrate using this equipment, a support platform is needed to stably support the substrate before the equipment coats the substrate surface to form the required functional film layer. Some existing substrates require functional film layers to be coated separately on two opposing surfaces.

[0003] When supporting a substrate, if a vacuum adsorption platform is used to hold the substrate in place, it is necessary to ensure that the side of the substrate being adsorbed does not have a functional film layer. This is to prevent the functional film layer from being directly adsorbed and affecting its quality. Therefore, vacuum adsorption platforms are generally used to support substrates with a single-sided functional film layer. To expand the application scenarios, when processing functional films on substrates, an air-floating support platform is used as the core component for supporting the substrate. The air-floating support prevents the vacuum adsorption port from directly contacting the functional film layer. The air-floating support platform can be used to support substrates that require double-sided functional film layer coating.

[0004] When an air-float support platform supports a substrate, the stability of the air cushion generated by the platform is one of the key indicators of the platform's overall support stability. The stability of the air cushion affects the uniformity of the functional film coated on the substrate and the quality of the final functional film. Because the edges of the air cushion generated by the air-float support platform are in contact with the external atmosphere, the support effect at the edges differs from that at the center, thus affecting the platform's overall support stability. Summary of the Invention

[0005] The purpose of this invention is to provide an air flotation system and coating equipment to improve the support stability of the air flotation support platform and ensure the quality of functional film coating on the substrate.

[0006] The objective of this invention is achieved through the following technical solution:

[0007] An air flotation system includes an adsorption device disposed on the outer periphery of an air flotation support platform. The adsorption device and the air flotation support platform are used together to support a substrate. The adsorption device includes an adsorption surface for adsorbing the substrate, and the adsorption surface is provided with a plurality of adsorption ports.

[0008] The adsorption device further includes a main channel and multiple branch channels connected to the main channel. The main channel is connected to a vacuum generator, and the branch channels are connected to the adsorption ports. The adsorption ports are connected to the vacuum generator through the corresponding branch channels and the main channel to generate adsorption force.

[0009] Preferably, the branch passage includes a suction cup, a vacuum interface, and a first connecting tube connecting the suction cup and the vacuum interface; one end of the suction cup extends to the adsorption surface, and the other end of the suction cup is sealed to the first connecting tube; one end of the vacuum interface is connected to the main channel, and the other end of the vacuum interface is sealed to the first connecting tube.

[0010] Preferably, the adsorption device is provided with a gas guiding section, the gas guiding section is provided with a through flow channel extending along the length direction of the gas guiding section, the through flow channel is connected to the vacuum generating device through a second connecting pipe, and the through flow channel and the second connecting pipe connected to the through flow channel constitute the main channel;

[0011] The gas guide section is also provided with multiple connecting holes that connect to the through flow channel, and the vacuum interface is installed in the connecting holes and connected to the through flow channel through the connecting holes.

[0012] Preferably, it further includes a main body block, on one side of which the air guide portion is provided, and on the other side of which the adsorption port is provided. The main body block is provided with a recessed space formed by recessing along the width direction of the main body block. The recessed space is located between the air guide portion and the adsorption port. The suction cup component and the vacuum interface extend into the recessed space and are connected by a first connecting pipe.

[0013] Preferably, a bearing portion is provided at one end of the main block away from the air guide portion, and a support block is fixedly connected to the bearing portion. The bearing portion is used to support the support block. The surface of the support block away from the air guide portion is an adsorption surface for supporting the substrate. The suction cup passes through the bearing portion and the support block and forms an adsorption port extending to the adsorption surface.

[0014] Preferably, the adsorption device includes a main block and a leveling component for leveling the main block. A support block forming an adsorption surface is connected to one side of the main block, and the leveling component is used to level the adsorption surface of the adsorption device.

[0015] The main body block and the support block are integral structures, or the main body block and the support block are fixedly connected.

[0016] Preferably, the leveling component includes multiple leveling units, which are arranged sequentially.

[0017] The leveling unit includes a leveling base and an adjusting rod. The leveling base is mounted on a base by multiple fasteners. One end of the adjusting rod is fixed to the adjusting rod, and the other end of the adjusting rod is a telescopic end used to move the main block.

[0018] Preferably, the end of the adjusting rod facing the main body block is provided with a ball head, the main body block is provided with a spherical groove that mates with the ball head, and the ball head of the adjusting rod is housed in the spherical groove of the main body block and abuts against the wall surrounding the spherical groove.

[0019] Preferably, the leveling unit further includes a limiting seat fixedly connected to the main block and used to limit the ball head, the limiting seat being located on the side of the ball head away from the main block, and the limiting seat surrounding the corresponding outer periphery of the ball head; wherein, the minimum inner diameter of the limiting seat is smaller than the diameter of the ball head.

[0020] A coating apparatus comprising an air flotation system as described above, wherein the adsorption device comprises a plurality of main blocks, each of the main blocks having a support block forming an adsorption surface connected to one side, the adsorption port of the adsorption surface being used to support a substrate, and the plurality of main blocks being arranged around the outside of the air flotation support platform.

[0021] Compared with the prior art, the beneficial effects of the present invention include at least the following:

[0022] By placing the adsorption device on the outer periphery of the air flotation support platform, the adsorption device is positioned around the air cushion generated by the platform. This device prevents the edge of the air cushion from contacting the outside atmosphere, thus reducing the impact of the outside atmosphere on the edge position of the air cushion. This improves the consistency of the support effect between the edge and center positions of the air cushion, thereby enhancing the support stability of the air flotation support platform and ensuring the quality of the functional film layer on the substrate. The combination of the adsorption port, branch paths, and main channel generates suction at the adsorption port to fix the substrate. Once the substrate is fixed, the risk of outside air seeping from the interface between the substrate and the adsorption device to the edge of the air cushion is reduced, further minimizing the impact of the outside atmosphere on the edge position of the air cushion. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the air flotation system according to an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the adsorption device according to an embodiment of the present invention;

[0025] Figure 3 This is a cross-sectional view of the adsorption device according to an embodiment of the present invention;

[0026] Figure 4 This is a cross-sectional view of the adsorption device according to another embodiment of the present invention.

[0027] In the diagram: 100, substrate; 1, adsorption device; 11, main block; 111, adsorption surface; 1111, adsorption port; 112, air guide; 1121, through flow channel; 1122, connecting hole; 113, recessed space; 114, bearing part; 115, spherical groove; 12, support block; 13, main channel; 14, branch channel; 141, suction cup component; 142, vacuum interface; 15, leveling assembly; 151, leveling unit; 1511, leveling seat; 1513, adjusting rod; 1514, ball head; 1515, limiting seat; 2, air flotation support platform; 3, base. Detailed Implementation

[0028] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided to make the invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0029] The terms used to express position and direction in this invention are illustrated with reference to the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this invention.

[0030] like Figures 1 to 4As shown, this invention discloses an air flotation system, which includes an air flotation support platform 2 and an adsorption device 1. The adsorption device 1 is disposed on the outer periphery of the air flotation support platform 2, and both the adsorption device 1 and the air flotation support platform 2 are used to support a substrate 100. Furthermore, the adsorption device 1 may have an adsorption surface 111 for adsorbing the substrate 100. When the adsorption device 1 and the air flotation support platform 2 are used to support the substrate 100, the air flotation support platform 2 generates an air cushion of a certain thickness. The adsorption surface 111 of the adsorption device 1 is flush with the upper surface of the air cushion. At this time, the substrate 100 can be simultaneously supported by the air cushion generated by the air flotation support platform 2 and the adsorption device 1. By disposing of the adsorption device 1 on the outer periphery of the air flotation support platform 2, the adsorption device 1 is located on the outer periphery of the air cushion generated by the air flotation support platform 2. The adsorption device 1 can prevent the edge of the air cushion from contacting the outside atmosphere, thereby reducing the influence of the outside atmosphere on the edge position of the air cushion, improving the consistency of the support effect between the edge position and the center position of the air cushion, and thus improving the support stability of the air flotation support platform 2, ensuring the quality of the functional film layer on the substrate 100. The air-floating support platform 2 can be applied to flat panel displays, chip packaging, lithium-ion batteries and other fields. When the substrate 100 is coated with a functional film layer using a slit coating equipment, the air-floating support platform 2 can serve as the core part supporting the substrate 100. The air-floating support platform 2 generates an air cushion to support the substrate 100. After the air-floating support platform 2 supports the substrate 100, a coating equipment can be used to coat the surface of the substrate 100 with a functional film layer.

[0031] Reference Figure 2 and Figure 3 The adsorption device 1 may include a main block 11, a main channel 13, a branch channel 14, a support block 12, a connecting pipe, and a leveling unit 151. The support block 12 is fixedly connected to the main block 11, and the upper surface of the support block 12 can serve as an adsorption surface 111 to adsorb and support the edge of the substrate 100. The adsorption surface 111 of the support block 12 may be provided with multiple adsorption ports 1111, which can generate suction to adsorb and fix the substrate 100.

[0032] The support block 12 can protrude from the air cushion support platform 2 along the thickness direction of the air cushion, and the height of the support block 12 protruding from the air cushion support platform 2 along the thickness direction of the air cushion is the same as the thickness of the air cushion. Therefore, the adsorption surface 111 on the support block 12 can be flush with the end of the air cushion away from the air cushion support platform 2. At this time, the substrate 100 can contact the adsorption surface 111 and the air cushion at the same time, so that the edge of the substrate 100 can be supported by the adsorption surface 111, the middle area of ​​the substrate 100 is supported by the air cushion, and the substrate 100 can be in a flat state. By using the adsorption surface 111 with adsorption port 1111 to adsorb and support the edge of the substrate 100, on the one hand, external air can be prevented from affecting the edge of the air pad, and on the other hand, the adsorption surface 111 can position the edge of the substrate 100. That is, when the substrate 100 abuts against the adsorption surface 111, the edge of the lower surface of the substrate 100 can be on the same plane as the upper surface of the air pad. Therefore, by adsorbing the substrate 100 with the adsorption surface 111, the edge of the substrate 100 and the center position are at the same height, thereby ensuring the flatness of the substrate 100 when it is supported.

[0033] Multiple adsorption devices 1 can be provided, distributed around the air flotation support platform 2. When the substrate 100 is supported by the air cushion, the edges of the substrate 100 can be adsorbed and fixed by the corresponding adsorption devices 1. Each adsorption device 1 can be provided with multiple adsorption ports 1111, which are evenly distributed so that each adsorption device 1 can apply a uniform adsorption force to the substrate 100.

[0034] The main body block 11 may include a first end and a second end, with the first end of the main body block 11 being the end adjacent to the adsorption surface 111 and the second end being the end away from the adsorption surface 111. The first end of the main body block 11 may be provided with a supporting portion 114, which is used to fixably connect to and support the support block 12. The other end of the main body block 11 may be provided with an air guide portion 112. A concave recessed space 113 may be provided on one side of the main body block 11, with the concave direction of the space perpendicular to the thickness direction of the air cushion, for example, the concave direction of the space 113 being the width direction of the main body block 11; the recessed space 113 is located between the supporting portion 114 and the air guide portion 112. The length directions of the supporting portion 114 and the air guide portion 112 may be parallel to the length direction of the main body block 11. The main body block 11 may be fixedly connected to the support block 12; in other embodiments, the main body block 11 may also form an integral structure with the support block 12.

[0035] To generate suction at the adsorption port 1111, an external vacuum pump or other vacuum generating device can be connected to the adsorption port 1111 through the main channel 13 and branch passages 14, allowing the adsorption port 1111 to generate suction under the action of the external vacuum generating device. Specifically, the main channel 13 can be connected to the vacuum generating device, and the main channel 13 can be connected to multiple branch passages 14, with each branch passage 14 corresponding to a specific adsorption port 1111, so that each adsorption port 1111 can be connected to the main channel 13 through its corresponding branch passage 14. At this time, the suction generated by the vacuum generating device can act on the corresponding adsorption port 1111 through the main channel 13 and the corresponding branch passage 14, causing the corresponding adsorption port 1111 to generate suction.

[0036] The main channel 13 includes a through-flow channel 1121 disposed in the gas guide section 112 and a second connecting pipe connecting the through-flow channel 1121 and the vacuum generator. The through-flow channel 1121 extends through the gas guide section 112 of the main body block 11 along its length. The two opposite ends of the through-flow channel 1121 can be connected to the vacuum generator respectively through the second connecting pipe; or, one end of the through-flow channel 1121 can be connected to the vacuum generator through the second connecting pipe, and the other end can be sealed by a sealing element.

[0037] The branch passage 14 may include a suction cup 141, a vacuum interface 142, a first connecting pipe, and a connecting hole 1122 disposed on the air guide section 112. Multiple suction cups 141, vacuum interfaces 142, first connecting pipes, and connecting holes 1122 may be provided, and each suction cup 141, vacuum interface 142, first connecting pipe, and connecting hole 1122 may correspond one-to-one, with one suction cup 141, one vacuum interface 142, one first connecting pipe, and one connecting hole 1122 constituting one branch passage 14.

[0038] One end of the connecting hole 1122 extends to communicate with the through flow channel 1121, and the other end of the connecting hole 1122 is connected to the vacuum interface 142, so that the vacuum interface 142 can be connected to the through flow channel 1121 of the main channel 13 through the connecting hole 1122. Specifically, the other end of the connecting hole 1122 can extend to communicate with the recessed space 113, and the vacuum interface 142 is partially inserted into the connecting hole 1122 from the recessed space 113, with another part of the vacuum interface 142 exposed in the recessed space 113.

[0039] One end of the suction cup 141 can pass through the support portion 114 and the support block 12, so that one end of the suction cup 141 extends to be flush with or approximately flush with the adsorption surface 111 on the support block 12. The end of the suction cup 141 extending to the adsorption surface 111 can serve as an adsorption port 1111 for adsorbing and fixing the edge position of the substrate 100. The other end of the suction cup 141 is exposed in the recessed space 113.

[0040] The first connecting tube is disposed in the recessed space 113 and is used to connect the corresponding suction cup 141 and vacuum interface 142. That is, one end of the first connecting tube can be connected to the end of the suction cup 141 exposed in the recessed space 113, and the other end of the first connecting tube is connected to the end of the vacuum interface 142 exposed in the recessed space 113, so that the corresponding suction cup 141, vacuum interface 142, first connecting tube and connecting hole 1122 form a complete branch passage 14.

[0041] Reference Figure 2 and Figure 4 When the adsorption device 1 adsorbs and fixes the edge of the substrate 100, it is necessary to ensure that the adsorption surface 111 of the adsorption device 1 in contact with the substrate 100 is horizontal, and that the adsorption surfaces 111 of multiple adsorption devices 1 in contact with the substrate 100 are at the same height. To ensure that the adsorption surfaces 111 of multiple adsorption devices 1 in contact with the substrate 100 are at the same height and are all horizontal, a leveling component 15 is provided on the side of the adsorption device 1 away from the substrate 100. The leveling component 15 is used to level the adsorption surfaces 111 of the adsorption device 1, so that the adsorption surfaces 111 of the adsorption device 1 in contact with the substrate 100 are horizontal and at the same height. When multiple adsorption devices 1 are provided, each adsorption device 1 can be provided with a corresponding leveling component 15, so that each adsorption device 1 can be leveled individually.

[0042] The leveling assembly 15 can be connected to the main body block 11 of the adsorption device 1 and used to level the main body block 11 so that the adsorption surface 111 of the support block 12 connected to the main body block 11 is adjusted to a horizontal plane. Each leveling assembly 15 includes multiple leveling units 151, which are distributed at multiple positions of the adsorption device 1. For example, multiple leveling units 151 are arranged sequentially along the length of the main body block 11. By adjusting the leveling unit 151 at the corresponding position, the corresponding position of the adsorption device 1 can be adjusted. The leveling unit 151 may include a leveling seat 1511, an adjusting rod 1513, and a limiting seat 1515. The leveling seat 1511 serves as the mounting seat in the leveling unit 151. The leveling seat 1511 can be installed on the base 3 of the air flotation support platform 2 or on other bases that maintain a fixed position; for example, the leveling seat 1511 is fixed to the base 3 by multiple screws. The adjusting rod 1513 is connected to the leveling seat 1511, and the height of the adjusting rod 1513 is adjustable. One end of the adjusting rod 1513 serves as a connecting end and is connected to the leveling seat 1511, while the other end serves as a telescopic end and can drive the main block 11 to extend or retract. For example, the adjusting rod 1513 is threadedly connected to the leveling seat 1511, and its height is adjusted by adjusting the depth to which it is screwed into the leveling seat 1511; alternatively, the adjusting rod 1513 can be a telescopic rod, and its height is adjusted by its own extension or retraction; or, the adjusting rod 1513 can be fixed to the leveling seat 1511 by a fastener. When the fastener is released, the adjusting rod 1513 can move relative to the leveling seat 1511, thereby adjusting its height. After the height of the adjusting rod 1513 is adjusted, it can be fixed by the fastener to keep the leveling seat 1511 fixed.

[0043] The adjusting rod 1513 has a ball head 1514 at one end facing the adsorption device 1 and used to support the adsorption device 1. The main body block 11 of the adsorption device 1 has a spherical groove 115 corresponding to the ball head 1514. The ball head 1514 of the adjusting rod 1513 is housed in the spherical groove 115 of the main body block 11 and abuts against the wall surrounding the spherical groove 115, so that the adjusting rod 1513 can support the adsorption device 1. To ensure the stability of the adsorption device 1, each main body block 11 of the adsorption device 1 has multiple spherical grooves 115. Each main body block 11 of the adsorption device 1 cooperates with multiple leveling units 151, so that each spherical groove 115 of the main body block 11 cooperates with the ball head 1514 in the corresponding leveling unit 151. The stability of the main body block 11 is ensured by the multi-point spherical cooperation structure.

[0044] By using a ball head 1514 in conjunction with a spherical groove 115, the spherical structure provides guidance when the adjusting rod 1513 is assembled with the main body block 11, facilitating the installation of the adjusting rod 1513 and the main body block 11. Furthermore, the combination of the ball head 1514 and the spherical groove 115 allows the supporting force of the adjusting rod 1513 on the main body block 11 to be evenly distributed in all directions, thereby achieving multi-angle support for the main body block 11 and ensuring the stability of the main body block 11 when multiple adjusting rods 1513 support it.

[0045] To ensure the stability of the adjustment rod 1513 when connected to the main body block 11, the main body block 11 can be connected to a limiting seat 1515. The number of limiting seats 1515 connected to each main body block 11 is the same as the number of adjustment rods 1513 corresponding to that main body block 11. The limiting seats 1515 correspond one-to-one with the adjustment rods 1513, and the limiting seats 1515 are used to limit the relative movement between the corresponding adjustment rods 1513 and the main body block 11, thereby ensuring the stability of the adjustment rods 1513 when connected to the main body block 11. Specifically, when the ball head 1514 of the adjusting rod 1513 engages with the spherical groove 115 of the main body block 11, the limiting seat 1515 is installed on the side of the main body block 11 facing the adjusting rod 1513, and the limiting seat 1515 surrounds the outer periphery of the corresponding ball head 1514. At this time, the ball head 1514 is located on the side of the limiting seat 1515 away from the limiting seat 1515, for example, the ball head 1514 is located on the upper side of the limiting seat 1515. The minimum inner diameter of the limiting seat 1515 is smaller than the diameter of the ball head 1514, so that the ball head 1514 cannot pass through the limiting seat 1515 and separate from the main body block 11, thereby limiting the relative movement between the adjusting rod 1513 and the main body block 11. By adjusting the minimum size of the limiting seat 1515, the relative movement between the adjusting rod 1513 and the main body block 11 can be adjusted. When the ball head 1514 of the adjusting rod 1513 comes into contact with the adsorption device 1, a small gap can be maintained between the ball head 1514 and the corresponding limiting seat 1515, so that the ball head 1514 can be slightly adjusted to facilitate the position adjustment of the main block 11.

[0046] When the adsorption device 1 needs to be leveled, the adjusting rod 1513 in the multiple leveling units 151 connected to the main body block 11 of the adsorption device 1 can be adjusted. By adjusting the height of the adjusting rod 1513, the position in the main body block 11 corresponding to the adjusting rod 1513 can be adjusted, so that the adsorption surface 111 of the support block 12 connected to the main body block 11 can tend to be flat. After adjusting multiple adjusting rods 1513, the adsorption surface 111 can be in or basically in a flat state. If the adsorption surface 111 is basically in a flat state after adjusting multiple adjusting rods 1513, but there is still a slight deviation, the leveling seat 1511 can be adjusted. Specifically, by adjusting multiple screws connected to the leveling seat 1511, the locking force between the leveling seat 1511 and the base 3 will change. By adjusting the locking force of the screws at the corresponding positions of the leveling seat 1511, the relative position between the leveling seat 1511 and the base 3 can be slightly adjusted. The slight change between the leveling seat 1511 and the base 3 will be transmitted to the adsorption surface 111, thereby achieving a slight adjustment of the adsorption surface 111 so that the adsorption surface 111 is finely adjusted to a flat state.

[0047] Reference Figure 1 The present invention also provides a coating apparatus, including the aforementioned air flotation support platform 2 and the aforementioned adsorption device 1. Multiple adsorption devices 1 are provided, arranged around the outside of the air flotation support platform 2, i.e., the multiple adsorption devices 1 are sequentially arranged along the outer contour of the air flotation support platform 2, so that the inner contour of the entire assembly of the multiple adsorption devices 1 matches the outer contour of the air flotation support platform 2. Specifically, the main body block 11 of the adsorption device 1 is disposed on the outer periphery of the air flotation support platform 2, and the multiple main body blocks 11 of the multiple adsorption devices 1 are arranged around the outside of the air flotation support platform 2, with the inner contour of the entire assembly of the multiple main body blocks 11 matching the outer contour of the air flotation support platform 2. When the air flotation support platform 2 generates an air cushion, the air cushion is blocked by the multiple adsorption devices 1 around its perimeter, thereby effectively reducing the influence of the external atmosphere on the edge position of the air cushion. Furthermore, the coating apparatus also includes a coating head. After the substrate 100 is stably supported by the air flotation support platform 2 and the adsorption device 1, the coating head can apply a slurry to the surface of the substrate 100, so that the required functional film layer is formed on the surface of the substrate 100.

[0048] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the invention without departing from the principles and spirit of the invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. An air flotation system, characterized in that, It includes an adsorption device (1) disposed on the outer periphery of the air flotation support platform (2). The adsorption device (1) and the air flotation support platform (2) are used together to support the substrate (100). The adsorption device (1) includes an adsorption surface (111) for adsorbing the substrate (100). The adsorption surface (111) is provided with a plurality of adsorption ports (1111). The adsorption device (1) further includes a main channel (13) and a plurality of branch channels (14) connected to the main channel (13). The main channel (13) is connected to a vacuum generator, and the branch channels (14) are connected to the adsorption port (1111). The adsorption port (1111) is connected to the vacuum generator through the corresponding branch channels (14) and the main channel (13) and generates adsorption force.

2. The air flotation system according to claim 1, characterized in that, The branch passage (14) includes a suction cup (141), a vacuum interface (142), and a first connecting tube connecting the suction cup (141) and the vacuum interface (142); one end of the suction cup (141) extends to the adsorption surface (111), and the other end of the suction cup (141) is sealed to the first connecting tube; one end of the vacuum interface (142) is connected to the main channel (13), and the other end of the vacuum interface (142) is sealed to the first connecting tube.

3. The air flotation system according to claim 2, characterized in that, The adsorption device is provided with a gas guide section (112), and the gas guide section (112) is provided with a through flow channel (1121) extending along the length direction of the gas guide section (112). The through flow channel (1121) is connected to the vacuum generating device through a second connecting pipe. The through flow channel (1121) and the second connecting pipe connecting the through flow channel (1121) constitute the main channel (13). The air guide (112) is also provided with a plurality of connecting holes (1122) that connect to the through flow channel (1121). The vacuum interface (142) is installed in the connecting hole (1122) and connected to the through flow channel (1121) through the connecting hole (1122).

4. The air flotation system according to claim 3, characterized in that, It also includes a main body block (11), on one side of the main body block (11) is the air guide part (112), and on the other side of the main body block (11) is the suction port (1111). The main body block (11) is provided with a recessed space (113) formed by recessing along the width direction of the main body block (11). The recessed space (113) is located between the air guide part (112) and the suction port (1111). The suction cup (141) and the vacuum interface (142) extend into the recessed space (113) and are connected by a first connecting pipe.

5. The air flotation system according to claim 4, characterized in that, The main body block (11) has a support part (114) at one end away from the air guide part (112). The support part (114) is fixedly connected to the support block (12). The support part (114) is used to support the support block (12). The surface of the support block (12) away from the air guide part (112) is an adsorption surface (111) for supporting the substrate (100). The suction cup (141) passes through the support part (114) and the support block (12) and forms an adsorption port (1111) extending to the adsorption surface (111).

6. The air flotation system according to claim 1, characterized in that, The adsorption device includes a main block (11) and a leveling component (15) for leveling the main block (11). A support block (12) forming an adsorption surface (111) is connected to one side of the main block (11). The leveling component (15) is used to level the adsorption surface (111) of the adsorption device. The main body block (11) and the support block (12) are an integral structure, or the main body block (11) and the support block (12) are fixedly connected.

7. The air flotation system according to claim 6, characterized in that, The leveling component (15) includes a plurality of leveling units (151), which are arranged sequentially. The leveling unit (151) includes a leveling seat (1511) and an adjusting rod (1513). The leveling seat (1511) is installed on a base by a plurality of fasteners. One end of the adjusting rod (1513) is fixed to the adjusting rod (1513), and the other end of the adjusting rod (1513) is a telescopic end and is used to drive the main block (11) to move.

8. The air flotation system according to claim 7, characterized in that, The adjusting rod (1513) has a ball head (1514) at one end facing the main body block (11). The main body block (11) has a spherical groove (115) that mates with the ball head (1514). The ball head (1514) of the adjusting rod (1513) is housed in the spherical groove (115) of the main body block (11) and abuts against the wall surrounding the spherical groove (115).

9. The air flotation system according to claim 8, characterized in that, The leveling unit (151) further includes a limiting seat (1515) fixedly connected to the main body block (11) and used to limit the ball head (1514). The limiting seat (1515) is located on the side of the ball head (1514) away from the main body block (11), and the limiting seat (1515) surrounds the outer periphery of the corresponding ball head (1514). The minimum inner diameter of the limiting seat (1515) is smaller than the diameter of the ball head (1514).

10. A coating apparatus, characterized in that, The air flotation system as described in any one of claims 1 to 9 includes an adsorption device comprising a plurality of main blocks (11), each of the main blocks (11) having a support block (12) forming an adsorption surface (111) connected to one side, the adsorption surface (111) having an adsorption port (1111) and being used to support a substrate (100), the plurality of main blocks (11) being arranged around the outside of the air flotation support platform (2).

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