Field installation calibration device and debugging method for high-precision grinding equipment

Abstract

The invention is applicable to the technical field of precision machinery manufacturing and mounting, and provides a field mounting calibration device and debugging method for high-precision grinding equipment, and the device comprises a multi-degree-of-freedom dynamic leveling mechanism, a spherical surface concurrent interference detection module and a central processing and closed-loop control unit. The multi-degree-of-freedom dynamic leveling mechanism adopts a piezoelectric ceramic actuator array and a spherical surface-damping composite joint, so that nanoscale fine adjustment and vibration damping of an equipment base are realized. The spherical surface concurrent interference detection module integrates a laser interferometer and a position sensitive detector, and adopts a concurrent measurement principle to simultaneously obtain the height of a working table and in-plane offset information. And the central processing and closed-loop control unit receives measurement data, establishes a dynamic error model and controls the leveling mechanism to perform active pre-compensation. According to the method, rapid and accurate installation and calibration of the high-precision grinding equipment under the dynamic working condition are achieved, and the installation efficiency and the final machining precision are remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of precision machinery manufacturing and installation, and particularly relates to a field installation calibration device and debugging method for high-precision grinding equipment. BACKGROUND

[0002] The final machining precision (such as flatness and parallelism) of high-precision grinding equipment (such as wafer grinding machines and precision guide rail planar grinding machines) depends largely on the installation quality thereof at the user site, i.e., the geometric precision of the equipment bed, such as the levelness and straightness. The traditional field installation calibration method mainly relies on general tools such as high-precision levels, electronic levels, dial gauges and laser collimators. These methods have inherent technical defects: The process is complicated and highly dependent on experience: the installation personnel need to repeatedly measure and manually adjust the equipment foot bolts, which takes a long time of several days, and the precision is strongly related to the skills and experience of the operator, with poor consistency.

[0003] Static measurement, which is detached from actual working conditions: all measurements are performed under the condition that the equipment is static and cold, and the precision change of the equipment under real working conditions such as load, motor heating and spindle rotation vibration cannot be reflected, resulting in "static adjustment and dynamic oversize".

[0004] Non-uniform reference, introducing Abbe error: the measurement reference surface (such as the equipment bed guide rail surface) of the level does not coincide with the real working plane of the grinding disc, and there is a certain distance, which will introduce measurement error according to the Abbe principle, limiting the further improvement of calibration precision.

[0005] Open-loop operation, lack of intelligent compensation: measurement and adjustment are two completely independent processes, which cannot form a closed loop of "measurement-decision-execution", and cannot realize prediction and compensation for future working condition changes.

[0006] In the prior art, although high-end measuring equipment such as laser trackers and laser interferometers are used for installation, they are usually used for post-detection rather than guiding the installation process, and the equipment has high cost, harsh requirements for the use environment and complex data analysis, which is difficult to popularize and apply as an efficient and integrated installation calibration tool in typical industrial workshop environments.

[0007] Therefore, there is an urgent need in the art for a field installation calibration solution specifically for high-precision grinding equipment, which can realize dynamic working condition simulation, automation, intelligentization and active error compensation. SUMMARY

[0008] The present application provides a field installation calibration device and debugging method for high-precision grinding equipment, which aims to solve the above problems.

[0009] The present application is implemented in a high-precision grinding equipment field installation calibration device, a multi-degree-of-freedom dynamic leveling mechanism, a spherical common point interference detection module, and a central processing and closed-loop control unit. The multi-degree-of-freedom dynamic leveling mechanism is integrated between the equipment base and the foundation. The spherical common point interference detection module is temporarily installed at the end of the equipment spindle. The central processing and closed-loop control unit is connected with the above two modules.

[0010] The multi-degree-of-freedom dynamic leveling mechanism serves as an execution unit, replacing the traditional pad iron and bolts. It is composed of multiple (preferably four, distributed at the four corners of the equipment) leveling units distributed under the equipment base. The core of each unit is a piezoelectric ceramic actuator, which has nanoscale resolution and extremely fast response speed, and an embedded high-resolution grating ruler provides closed-loop displacement feedback. The top of the piezoelectric ceramic actuator is connected to the equipment base through a spherical-damping composite joint, which integrates a spherical hinge (allowing the base to freely deflect during leveling, releasing internal forces) and a viscous damper (absorbing and isolating vibrations during equipment operation, ensuring the purity of measurement signals). This mechanism is the physical basis for high-precision, dynamic adjustment.

[0011] The spherical common point interference detection module serves as a sensing unit and is a breakthrough in measurement technology. It is an integrated spherical interference head that is temporarily and quickly attached to the end face of the equipment spindle through a lockable universal support, making its optical center approximately coincide with the spindle rotation center. The laser interferometer optical path and the position sensitive detector optical path are fused through special optical design (e.g., using a combination of polarization beam splitter prism and corner cube prism) inside, ensuring that the measurement reference of the two light paths strictly coincides in space at a physical point (i.e., "common point"). The laser interferometer accurately measures the absolute distance (Z direction) from the "common point" to the workbench surface, while the PSD simultaneously detects the small deviation in the horizontal plane (X, Y direction) caused by spindle jumping and workbench surface flatness errors. This "common point" design fundamentally avoids Abbe error caused by inconsistent measurement reference, achieving high-precision synchronous measurement of three-degree-of-freedom displacement.

[0012] The central processing and closed-loop control unit serves as the decision-making center and is the "brain" of the system. It receives real-time and dynamic three-dimensional data from the interference module. Its strength lies in that it not only performs simple data acquisition and feedback control, but also collects multi-dimensional data such as temperature, speed and vibration under different working conditions such as empty running of the device, simulated load (such as applying force through a hydraulic device) running, etc., and uses algorithms such as least squares method for plane fitting, Fourier transform for frequency spectrum analysis, and multiple linear regression for model fitting to construct a dynamic error model of the grinding device. The model can predict the precision deviation of the device under certain processing conditions (such as full load, high speed, and thermal equilibrium). Subsequently, the unit issues instructions to the multi-degree-of-freedom dynamic leveling mechanism based on the prediction results, performs active and forward-looking pre-compensation adjustment, thereby eliminating potential dynamic errors before the device is put into production.

[0013] The application also provides a debugging method for a field installation calibration device based on the high-precision grinding device, comprising the following steps: Initial installation and coarse adjustment: The grinding device is placed on the already installed multi-degree-of-freedom dynamic leveling mechanism for preliminary horizontal coarse adjustment.

[0014] Detection module installation and adjustment: The spherical common point interference detection module is installed on the spindle end through a universal support, and is roughly adjusted so that the laser beam is approximately perpendicular to the workbench surface. To improve the measurement stability in a vibrating environment, the entire detection module can be placed on a temporary air floating isolation platform.

[0015] Static reference establishment: The device is powered on but the spindle is not rotating. The central processing unit controls the detection module to perform multi-point scanning on the workbench surface, establishes a high-precision initial flatness and levelness model through plane fitting algorithm, and automatically drives the leveling mechanism to perform the first accurate leveling.

[0016] Dynamic data acquisition and modeling: a. Empty running: Start the spindle and run it from low speed to rated speed in steps. The central unit synchronously records the vibration spectrum and drift data of the "common point" in X, Y and Z directions at different speeds.

[0017] b. Simulated load running: A constant load simulating the actual grinding force is applied to the spindle through a hydraulic actuator or a servo motor. At the same time, the temperature changes of the key parts of the device are monitored. The central unit continuously collects data until the system reaches a thermal equilibrium state.

[0018] c. Model fitting: The central unit uses all the collected data to fit the dynamic error model. For example, a simplified linear model can be: Main shaft bearing temperature Spindle speed Load force.

[0019] Active compensation calibration: According to the mature model established in step 4, the central unit calculates the pre-adjustment amount required to compensate for the error that may occur during future full-load processing (may be a small, reverse pre-deformation of the bed), and drives the piezoelectric ceramic actuator array to accurately perform the adjustment.

[0020] Verification and iteration: Start the device again, run under simulated load, and verify the dynamic accuracy of the work plane. If the accuracy does not fully meet the requirements, return to step 4 to further optimize the parameters of the dynamic error model and fine-tune until the design specifications are met.

[0021] Locking and completion: After the calibration is completed, the spherical joint of the leveling mechanism is locked mechanically to prevent subsequent movement. At the same time, the final calibration parameters are saved in the control unit and can be used as a reference for software error compensation during subsequent processing.

[0022] Compared with the prior art, the embodiments of the present application have the following beneficial effects: Achieve the leap from "static calibration" to "dynamic pre-compensation": Through dynamic error modeling and active pre-compensation, the long-standing problems of thermal deformation and force deformation that have plagued high-precision equipment installation are fundamentally solved, ensuring the accuracy of the device in actual work.

[0023] Significant improvement in measurement accuracy and efficiency: "Spherical common point" design eliminates Abbe error, integrated measurement avoids errors caused by multiple clamping, and automated process greatly shortens installation time and reduces dependence on operator experience.

[0024] High system integration and strong intelligence: measurement, analysis, and execution are integrated into one, forming an intelligent calibration system that can learn and adapt to specific device characteristics. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a structural schematic diagram of a high-precision grinding equipment on-site installation calibration device provided by the present application.

[0026] Figure 2 is a structural schematic diagram of a multi-degree-of-freedom dynamic leveling mechanism in a high-precision grinding equipment on-site installation calibration device provided by the present application.

[0027] Figure 3 is a structural schematic diagram of a spherical common point interference detection module in a high-precision grinding equipment on-site installation calibration device provided by the present application.

[0028] Figure 4 is a schematic diagram of the internal optical path of the spherical common point interference detection module.

[0029] Figure 5 is a flow chart of the software algorithm of the central processing and closed loop control unit.

[0030] Figure 6 is a flow chart of the steps of the commissioning method of the present application.

[0031] Figure 1 is a schematic diagram of a high-precision grinding device according to an embodiment of the present application. Figure 2 is a schematic diagram of a multi-degree-of-freedom dynamic leveling mechanism according to an embodiment of the present application. Figure 3 is a schematic diagram of a spherical co-point interference detection module according to an embodiment of the present application. Figure 4 is a schematic diagram of a central processing and closed loop control unit according to an embodiment of the present application. DETAILED DESCRIPTION

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application; the present application will be described with reference to the drawings and specific embodiments described herein are intended to be illustrative only and are not intended to be limiting of the application. The terms "comprising," "including," "containing," "have" and "has" as used herein, are meant to be interpreted in their broadest and most liberal sense. The terms "first," "second," and the like, as used herein do not denote any order, quantity, or importance, but rather are used to nomenclature different elements.

[0033] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase "in an embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily all directed to the same embodiment, or to a single alternative embodiment. It is expressly understood that any of the

[0034] Embodiment 1

[0035] The embodiment of the present application provides a high-precision grinding device on-site installation calibration device, such as Figures 1-5The device 1, the multi-degree-of-freedom dynamic leveling mechanism 2, the spherical common point interference detection module 3 and the central processing and closed loop control unit 4 are shown. The multi-degree-of-freedom dynamic leveling mechanism 2 is installed between the base of the device 1 and the workshop foundation. The spherical common point interference detection module 3 is temporarily adsorbed and fixed to the end face center of the device main shaft 6 through a lockable universal support 39, so that the optical center is approximately coincident with the theoretical rotation center of the main shaft. The central processing and closed loop control unit 4 is electrically connected with the multi-degree-of-freedom dynamic leveling mechanism 2 and the spherical common point interference detection module 3 through a cable, and constitutes a closed loop control system.

[0036] One leveling unit of the multi-degree-of-freedom dynamic leveling mechanism 2 comprises a piezoelectric ceramic actuator 21 (optional model PZT-100, stroke 0-100 μm, resolution 1 nm) which is internally packaged with a high-resolution grating ruler. The top end of the actuator 21 is connected with the device base through a spherical-damping composite joint 23. The spherical-damping composite joint 23 is composed of a spherical hinge 24 made of tungsten carbide and a damper 25 filled with silicon-based viscous fluid.

[0037] Specifically, the base of the device 1 and the bearing plate 22 are fixed by bolts. The lower surface of the bearing plate 22 is processed with a ball socket, which cooperates with the ball head of the spherical hinge 24. The ball head can rotate in any direction in the ball socket. The lower part of the ball head is connected with a shaft, which extends into the cavity 251 of the viscous damper 25. The shaft and the cavity are filled with viscous fluid and sealed by a sealing ring, so that the shaft can make a small rotation and movement in the cavity, but is subject to the damping action of the fluid. The bottom of the viscous damper 25 is connected with the top end of the piezoelectric ceramic actuator 21 by threads or flange. The bottom of the piezoelectric ceramic actuator 21 is fixed to the foundation by anchor bolts. The piezoelectric ceramic actuator 21 is internally provided with a high-resolution grating ruler. The ruler body is connected with the mover of the actuator, and the reading head is connected with the stator, which is used for real-time measurement of the expansion and contraction displacement of the actuator.

[0038] The core of the spherical common point interference detection module 3 is the optical system integrated therein based on the common point measurement principle. A high-precision optical substrate is fixed in the spherical shell 31 of the module through a vibration isolator. All optical elements are precisely installed on the substrate to ensure the long-term stability of the optical path. The optical path system is composed of a laser interferometer optical path and a position sensitive detector (PSD) optical path. Through ingenious optical design, the measurement references of the two light paths are strictly coincident at one point in the external working space.

[0039] The specific optical path working principle is as follows: 1. Laser interferometer optical path (for accurate ranging): A linearly polarized laser is emitted by a helium-neon laser 32 with a wavelength of 632.8 nanometers.

[0040] The light beam first reaches the core optical hub, the main dichroic beamsplitter 33. This prism splits the light beam into two: one part is reflected, forming the reference light, and is directed to the fixed reference mirror 34; the other part is transmitted, forming the measurement light.

[0041] The transmitted measurement light continues to propagate to the polarizing beamsplitter 335. Since its polarization direction is consistent with the transmission axis of the prism, the measurement light is completely transmitted through the polarizing beamsplitter 335, and then is directed to the corner cube prism 336.

[0042] The corner cube prism 336 reflects the incident light back parallelly. The returned measurement light enters the polarizing beamsplitter 335 again. Since it passes through the 1 / 4 waveplate (not shown in the figure, usually placed between the polarizing beamsplitter and the corner cube prism) twice in the round trip, its polarization direction is rotated by 90 degrees, and thus is now reflected by the polarizing beamsplitter 335.

[0043] The reflected measurement light returns to the main dichroic beamsplitter 33, and is combined with the reference light returned from the reference mirror 34, and interference occurs.

[0044] The formed interference signal is received by the laser interferometer detector 35. By solving the phase change of the interference fringes, the optical path difference of the measurement light path can be accurately calculated, and thus the absolute distance change of the "common point" to the worktable surface in the vertical direction (Z axis) can be obtained.

[0045] 2. Position sensitive detector (PSD) light path (for measuring horizontal offset): The PSD infrared laser 36 emits infrared laser with a wavelength of 850 nanometers.

[0046] The light beam is also directed to the main dichroic beamsplitter 33. For this specific wavelength, the main dichroic beamsplitter 33 is designed to be highly reflective, so that the PSD light path and the above-mentioned interferometer measurement light path are completely combined after the prism 33, realizing light path coincidence.

[0047] The combined light (containing 632.8nm interference measurement light and 850nm PSD light) passes through the polarizing beamsplitter 335 together. The film of the polarizing beamsplitter 335 is designed for 632.8nm, and for 850nm PSD light, it mainly behaves as an ordinary beamsplitter, allowing most of it to be transmitted. Therefore, the PSD light follows the interference measurement light and is directed to the corner cube prism 336.

[0048] After returning through the corner cube prism 336, the PSD light enters the polarizing beamsplitter 335 again. Similarly, it is mainly transmitted through the prism again.

[0049] The transmitted PSD return light continues to propagate, and when it reaches the main dichroic beam splitter prism 33 again, the dichroic film on the prism 33 reflects the 850 nm light to the PSD detector 37.

[0050] If there is a spindle radial runout or a worktable plane flatness error during the operation of the device, the position of the returned PSD light spot on the photosensitive surface of the PSD detector 37 will move. The PSD detector 37 can accurately measure the offset of the "common point" in the direction parallel to the worktable plane (X and Y axes) by detecting the coordinate change of the light spot center.

[0051] 3. Realization and cooperation of the common point: The above two light paths are completely the same from the polarization beam splitter prism 335 to the external corner prism 336 and back. The physical vertex of the corner prism 336 is equivalent to a unique spatial measurement reference point, i.e., the common point measurement reference 38. This enables the laser interferometer and the PSD detector to measure the three-dimensional displacement information (Z direction distance, X and Y direction offsets) of the worktable at the same point synchronously and with the same reference, fundamentally eliminating the Abbe error caused by the non-uniform measurement reference, and realizing high-precision three-dimensional dynamic measurement.

[0052] The central processing and closed-loop control unit 4 receives real-time and synchronous three-degree-of-freedom data from the laser interferometer detector 35 and the PSD detector 37, and performs subsequent signal processing, dynamic error modeling and active compensation control.

[0053] Based on these prediction results, the central processing and closed-loop control unit 4 sends accurate adjustment instructions to the multi-degree-of-freedom dynamic leveling mechanism 2. The piezoelectric ceramic actuator 21 adjusts the position and attitude of the device base according to the instructions through its nanometer-level resolution and extremely fast response speed, realizes active and forward-looking pre-compensation adjustment. This adjustment is dynamic and continuous, and can be adjusted in real time as the device operating state changes, ensuring that the device always maintains the best working precision state.

[0054] The entire calibration process is highly automated and intelligent, greatly reducing manual intervention and operation difficulty, and improving calibration efficiency and accuracy. At the same time, due to the use of the "spherical common point" design, Abbe error is fundamentally eliminated, making the measurement result more accurate and reliable. In addition, the device also has good system integration and scalability, and can be easily integrated into existing grinding equipment production lines, providing a new solution for the on-site installation and calibration of high-precision grinding equipment.

[0055] The software flow of the central processing and closed-loop control unit 4 includes a data acquisition module 41, a static plane fitting module 42, a dynamic spectrum analysis module 43, an error model fitting module 44 (performing calculations such as ), a pre-compensation calculation module 45, and a control instruction output module 46.

[0056] As shown in Figure 6 , the debugging method includes the following steps: S1: Initial installation and coarse adjustment step, hoist the grinding equipment onto the installed multi-degree-of-freedom dynamic leveling mechanism, and perform preliminary horizontal adjustment; S2: Detection module installation and adjustment step, install the spherical common point interference detection module on the equipment spindle end, and adjust its pointing; S3: Static reference establishment step, in the equipment static state, control the detection module to scan the workbench by the central processing and closed-loop control unit, establish an initial geometric accuracy model, and drive the leveling mechanism to complete the first automatic fine adjustment; S4: Dynamic data acquisition and modeling step, start the equipment, make it run under no-load and simulated load conditions, simultaneously collect dynamic data by the central processing and closed-loop control unit, and establish the dynamic error model; S5: Active compensation calibration step, the central processing and closed-loop control unit calculates the pre-adjustment amount according to the dynamic error model, and drives the multi-degree-of-freedom dynamic leveling mechanism to perform pre-compensation adjustment; S6: Verification and iteration step, run the equipment again to verify the dynamic accuracy, if not up to standard, return to step S4 to optimize the model and adjustment; S7: Locking and completion step, lock the leveling mechanism, and save the final calibration parameters.

[0057] Example 2

[0058] In another embodiment, the simulated load is realized by a servo motor coupled with the main shaft to apply a reverse torque. The dynamic error model is fitted by a more complex neural network algorithm to handle the stronger nonlinear temperature-deformation relationship.

[0059] The device and method described in the present application are not only suitable for planar grinding equipment, but also can be used for installation and calibration of other high-precision machine tools, such as coordinate boring machines, ultra-precision lathes, etc. after adaptive modification.

[0060] It should be noted that, for the foregoing embodiments, for the sake of simple description, they are all expressed as a series of action combinations, but those skilled in the art should know that the present application is not limited by the order of the described actions, because according to the present application, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily necessary for the present application.

[0061] In the embodiments provided in the present application, it should be understood that the disclosed device can be implemented in other ways. For example, the device embodiments described above are only schematic. The division of the above units is only a logical function division. There can be another division during actual implementation. For example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed coupling or communication connection between each other can be indirect coupling or communication connection through some interface, device or unit, and can be electrical, mechanical or in other forms.

[0062] The units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, that is, they can be located in one place, or can be distributed on a plurality of network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the present embodiment.

[0063] The above embodiments are only used to illustrate the technical solutions of the present application, and not to limit the protection scope of the application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on these embodiments, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art can still make some modifications to the features of the embodiments of the present application according to the circumstances without creative labor, such as mutual combination, addition or deletion or other adjustment, so as to obtain different other technical solutions which do not deviate from the concept of the present application in essence. These technical solutions also belong to the scope of the present application.

Claims

1. A field installation and calibration device for high-precision grinding equipment, characterized in that, include: A multi-degree-of-freedom dynamic leveling mechanism is integrated between the grinding equipment base and the foundation to achieve nanometer-level precision posture adjustment and vibration damping of the equipment base in three-dimensional space. The spherical co-point interference detection module is used to temporarily install on the spindle end of the grinding equipment to provide a measurement reference point that is approximately coincident with the spindle rotation center, and to synchronously and with the same reference measure the dynamic changes of the worktable surface in the vertical and horizontal directions. The central processing and closed-loop control unit is connected to the multi-degree-of-freedom dynamic leveling mechanism and the spherical co-point interference detection module, respectively. It is used to process measurement data, establish a dynamic error model of the equipment, and drive the multi-degree-of-freedom dynamic leveling mechanism to perform active pre-compensation adjustment based on the model.

2. The on-site installation and calibration device for high-precision grinding equipment as described in claim 1, characterized in that, The multi-degree-of-freedom dynamic leveling mechanism includes at least three leveling units distributed circumferentially along the equipment base, each leveling unit comprising: The piezoelectric ceramic actuator, with its bottom fixed to the foundation, is used to output micro-displacement with nanometer-level precision. It has a high-resolution grating ruler installed inside to provide real-time feedback on its displacement. A spherical-damped composite joint is connected between the top of the piezoelectric ceramic actuator and the equipment base. The spherical-damped composite joint includes a spherical hinge that allows omnidirectional rotation and a viscous damper for absorbing vibrations during equipment operation.

3. The on-site installation and calibration device for high-precision grinding equipment as described in claim 1, characterized in that, The spherical concurrent interference detection module includes: An integrated spherical interferometer head, which internally integrates the optical path of a laser interferometer and the optical path of a position-sensitive detector; A lockable universal bracket is used to adsorb and fix the spherical interference head to the end face of the spindle of the grinding equipment, and to initially align its optical center with the theoretical rotation center of the spindle; The optical path of the laser interferometer and the optical path of the position-sensitive detector are optically designed to ensure that their measurement reference points in the workspace are strictly coincident, thus forming a common measurement reference. The laser interferometer is used to measure the absolute distance from the co-point measurement reference to the reference plane of the worktable; The position-sensitive detector is used to detect the offset of the common point measurement reference in the direction parallel to the worktable plane when the equipment is running.

4. The on-site installation and calibration device for high-precision grinding equipment as described in claim 1, characterized in that, The central processing and closed-loop control unit is configured to perform the following functions: Receive three-degree-of-freedom dynamic measurement data from the spherical co-point interference detection module, which originates from the co-point measurement reference; Data was collected under various operating conditions, including static operation, no-load operation, and simulated load operation. Based on the least squares method, Fourier spectrum analysis, and multiple linear regression algorithm, a dynamic error model of the grinding equipment was fitted. Based on the dynamic error model, the accuracy deviation of the equipment under actual processing conditions is predicted, and pre-adjustment instructions for active compensation are generated. The pre-adjustment command is sent to the multi-degree-of-freedom dynamic leveling mechanism to drive it to complete nanometer-level pose adjustment.

5. The on-site installation and calibration device for high-precision grinding equipment as described in claim 4, characterized in that, The dynamic error model is a mathematical model that describes the relationship between the deformation of the working plane of the equipment and at least one of the variables: temperature, spindle speed, and load force.

6. A debugging method for an on-site installation and calibration device based on a high-precision grinding equipment as described in any one of claims 1-5, characterized in that, Includes the following steps: S1: Initial installation and rough adjustment steps: hoist the grinding equipment onto the pre-installed multi-degree-of-freedom dynamic leveling mechanism and perform preliminary horizontal adjustment; S2: Installation and adjustment steps for the detection module: Install the spherical concurrent interference detection module on the spindle end of the equipment and adjust its orientation; S3: Static reference establishment step: When the equipment is stationary, the detection module is controlled by the central processing and closed-loop control unit to scan the worktable, establish an initial geometric accuracy model, and drive the leveling mechanism to complete the first automatic fine adjustment. S4: Dynamic data acquisition and modeling steps: Start the equipment and run it under no-load and simulated load conditions. At the same time, the central processing and closed-loop control unit acquire dynamic data and establish the dynamic error model. S5: Active compensation calibration step, the central processing and closed-loop control unit calculates the pre-adjustment amount according to the dynamic error model, and drives the multi-degree-of-freedom dynamic leveling mechanism to perform pre-compensation adjustment; S6: Verification and iteration step. Run the device again to verify the dynamic accuracy. If it does not meet the standard, return to step S4 to optimize and adjust the model. S7: Lock and complete the steps, lock the leveling mechanism, and save the final calibration parameters.

7. The debugging method as described in claim 6, characterized in that, In the S4 dynamic data acquisition and modeling step, the simulated load is achieved by applying a constant simulated grinding force to the spindle of the equipment through a hydraulic actuator or a servo motor.

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