Test tool for testing deformation of cover plate
By designing a test fixture that includes a base, a fixed frame, and a fixed plate, the problem of low efficiency in detecting cover plate deformation in semiconductor manufacturing was solved, and efficient and accurate deformation detection was achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-04
- Publication Date
- 2026-04-10
AI Technical Summary
Existing technologies lack effective testing fixtures for detecting the deformation of lifting cover plates in semiconductor manufacturing, resulting in low testing efficiency and inaccurate results.
A test fixture including a base, a fixed frame, a fixed plate, and a fixed tooling was designed. It can be equipped with a dial indicator for accurate detection of the deformation of the cover plate. The fixed frame is a double-layer rectangular structure with a hollow design to facilitate the insertion of the cover plate for testing, and is easy to move with rollers.
It improves the efficiency and accuracy of cover plate deformation detection, has a simple and lightweight structure, is flexible in operation, and is suitable for the testing needs of semiconductor equipment.
Smart Images
Figure CN121829280A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor equipment testing fixture technology, and specifically to a testing fixture for testing the deformation of a cover plate. Background Technology
[0002] In the semiconductor manufacturing field, there is a lifting cover device used to seal reaction chambers. This device includes a lifting mechanism, a cover plate, and an L-shaped steel arm connected to the cover plate. The cover plate needs to be monitored for deformation over time to prevent deterioration of the sealing effect due to deformation after prolonged use. Currently, there is no commercially available testing fixture for this, and manual inspection is mainly used, resulting in low efficiency and inaccurate results. Therefore, a new technical solution is urgently needed to address at least one of these technical problems. Summary of the Invention
[0003] The purpose of this invention is to provide a testing fixture for testing the deformation of a cover plate, which can be equipped with a dial indicator for testing the deformation of the cover plate, thereby improving the testing efficiency.
[0004] To achieve the above-mentioned technical objectives and requirements, the technical solution adopted by the present invention is: a testing fixture for testing the deformation of a cover plate, characterized in that it includes a base, at least one fixed frame disposed on the base, a fixed plate disposed on the fixed frame for mounting a dial indicator, and a fixing fixture disposed on the base.
[0005] As a preferred technical solution, the fixed frame is a double-layer rectangular frame structure.
[0006] As a preferred technical solution, the fixed frame includes a first corner post, a second corner post, a third corner post, and a fourth corner post arranged symmetrically in pairs. A first upright post is provided between the first and second corner posts, and a second upright post is provided between the third and fourth corner posts. A first top rod, a first intermediate rod, and a first bottom rod are provided between the first corner post and the first upright post. A second top rod, a second intermediate rod, and a second bottom rod are provided between the second upright post and the first corner post. A third top rod, a third intermediate rod, and a third bottom rod are provided between the third corner post and the second upright post. A fourth top rod is provided between the fourth corner post and the second upright post. The fourth intermediate pole and the fourth bottom pole are provided. A first top beam, a first intermediate beam and a first bottom beam are provided between the first corner post and the third corner post. A second top beam, a second intermediate beam and a second bottom beam are provided between the second corner post and the fourth corner post. A third top beam, a third intermediate beam and a third bottom beam are provided between the first upright post and the second upright post. A first reinforcing rod is vertically provided between the first top beam and the third top beam. A second reinforcing rod is vertically provided between the third top beam and the second top beam. A third reinforcing rod is provided between the first intermediate beam and the third intermediate beam. A fourth reinforcing rod is provided between the second intermediate beam and the third intermediate beam.
[0007] As a preferred technical solution, the fixing fixture includes a fixing vertical plate, two detachable support plates disposed on one side of the fixing vertical plate, and the base is provided with an assembly area.
[0008] As a preferred technical solution, the assembly area is provided with at least one first pad and one second pad, and the first pad and the second pad are connected to the base.
[0009] As a preferred technical solution, the assembly area is provided with a third pad, which is connected to the base.
[0010] As a preferred technical solution, a fixed platform is provided on the upper side of the base.
[0011] As a preferred technical solution, corner brackets are detachably provided at the corners of the fixed frame.
[0012] As a preferred technical solution, one corner bracket is provided on each side of the first bottom beam, the second bottom beam, and the third bottom beam.
[0013] As a preferred technical solution, the base is detachably provided with multiple rollers on its lower side.
[0014] The beneficial effects of this invention are: 1) After the dial indicator is installed on the fixed plate, the cover plate extends into the fixed frame and is located below the fixed plate, thereby detecting the deformation of the cover plate and improving the detection efficiency. 2) The fixed frame structure is simple, lightweight, and has a hollow structure, which makes it easy for the cover plate to be inserted to detect the amount of deformation; 3) The assembly area facilitates the entry of the arm steel beam for assembly. One end of the arm steel beam is connected to the fixed vertical plate to fix the arm steel beam, so as to facilitate the assembly by the staff. 4) The first and second pads raise and support the arm beam; 5) The fixed platform is used to fix and connect the lifting device; 6) Corner brackets strengthen the frame; 7) The rollers facilitate the movement of the testing fixtures, providing good operational flexibility. Attached Figure Description
[0015] Figure 1 This is a structural diagram of a test fixture provided in one embodiment of the present invention; Figure 2 This is a working diagram of a test fixture provided in one embodiment of the present invention; Figure 3 yes Figure 2 A view from another direction; Figure 4 This is a working diagram of a test fixture provided in one embodiment of the present invention.
[0016] exist Figures 1-4 In the middle, 1. Base; 2. Fixed frame; 201. First corner post; 202. Second corner post; 203. Third corner post; 204. Fourth corner post; 205. First upright post; 206. Second upright post; 207. First top rod; 208. First intermediate rod; 209. First bottom rod; 210. Second top rod; 211. Second intermediate rod; 212. Second bottom rod; 213. Third top rod; 214. Third intermediate rod; 215. Third bottom rod; 216. Fourth top rod; 217. Fourth intermediate rod; 218. Fourth bottom rod; 219. First top beam; 220. First intermediate beam; 22 1. First bottom beam; 222. Second top beam; 223. Second intermediate beam; 224. Second bottom beam; 225. Third top beam; 226. Third intermediate beam; 227. Third bottom beam; 228. First reinforcing rod; 229. Second reinforcing rod; 230. Third reinforcing rod; 231. Fourth reinforcing rod; 232. Angle bracket; 3. Fixing plate; 301. Weight reduction hole; 4. Fixing fixture; 401. Fixing vertical plate; 402. Support plate; 5. First pad; 6. Second pad; 7. Third pad; 8. Fixing platform; 9. Roller; 10. Lifting device; 11. Cover plate; 12. Arm steel beam. Detailed Implementation
[0017] The invention will now be further described with reference to the accompanying drawings.
[0018] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "head", "tail", "top", "bottom", "left", "right", "front", "rear", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.
[0019] Please see Figures 1-4 One embodiment of the present invention provides a testing fixture for testing the deformation of a cover plate 11, including a base 1, at least one fixing frame 2 disposed on the base 1, a fixing plate 3 disposed on the fixing frame 2 for mounting a dial indicator, and a fixing fixture 4 disposed on the base 1. After the dial indicator is mounted on the fixing plate 3, the cover plate 11 extends into the fixing frame 2 and is located below the fixing plate 3, thereby detecting the deformation of the cover plate 11 and improving the detection efficiency.
[0020] like Figures 1-4 As shown, furthermore, there are two fixed frames 2, which are arranged in parallel at intervals.
[0021] The dial indicator is selected with magnetic attraction function. Multiple dial indicators are directly attached to the fixed plate 3, so that multiple detection points can be formed to detect the deformation of the cover plate 11.
[0022] like Figures 1-4 As shown, as a preferred technical solution, the fixed frame 2 is a double-layer rectangular frame structure. Specifically, multiple dial indicators are installed on each layer to detect the deformation of the cover plate 11 from all directions.
[0023] like Figures 1-4As shown, the fixed frame 2 includes a first corner post 201, a second corner post 202, a third corner post 203, and a fourth corner post 204 arranged symmetrically in pairs. A first upright post 205 is arranged between the first corner post 201 and the second corner post 202. A second upright post 206 is arranged between the third corner post 203 and the fourth corner post 204. A first top rod 207, a first intermediate rod 208, and a first bottom rod 209 are arranged between the first corner post 201 and the first upright post 205. The second upright post 206... A second top rod 210, a second intermediate rod 211, and a second bottom rod 212 are provided between the third corner post 206 and the first corner post 201. A third top rod 213, a third intermediate rod 214, and a third bottom rod 215 are provided between the third corner post 203 and the second upright post 206. A fourth top rod 216, a fourth intermediate rod 217, and a fourth bottom rod 218 are provided between the fourth corner post 204 and the second upright post 206. A first top beam is provided between the first corner post 201 and the third corner post 203. 219. A first intermediate beam 220 and a first bottom beam 221 are provided. A second top beam 222, a second intermediate beam 223, and a second bottom beam 224 are provided between the second corner column 202 and the fourth corner column 204. A third top beam 225, a third intermediate beam 226, and a third bottom beam 227 are provided between the first column 205 and the second column 206. A first reinforcing rod 228 is perpendicularly provided between the first top beam 219 and the third top beam 225. The third top beam 225 and the second top beam 226 are connected. A second reinforcing rod 229 is vertically arranged between beams 222, a third reinforcing rod 230 is arranged between the first intermediate beam 220 and the third intermediate beam 226, and a fourth reinforcing rod 231 is arranged between the second intermediate beam 223 and the third intermediate beam 226. The first corner post 201 and the second corner post 202 are located on one side of the base 1, and the third corner post 203 and the fourth corner post 204 are located on the other side of the base 1. The structure is simple and stable, lightweight, and forms a hollow structure, which facilitates the insertion of the cover plate 11 to detect the amount of deformation.
[0024] like Figures 1-4 As shown, the fixing plate 3 is further provided with four symmetrical weight-reducing holes 301 to reduce the overall weight.
[0025] like Figures 1-4 As shown, the fixed fixture 4 includes a fixed vertical plate 401 and two detachable support plates 402 disposed on one side of the fixed vertical plate 401. The base 1 is provided with an assembly area. The fixed vertical plate 401 is provided with multiple threaded holes. The arm steel beam 12 is placed in the assembly area. One end of the arm steel beam 12 is fixed to the fixed vertical plate 401 by bolts. Then, the workers assemble the arm steel beam 12.
[0026] like Figures 1-4As shown, the assembly area is provided with at least one first pad 5 and one second pad 6. The first pad 5 and the second pad 6 are connected to the base 1. The first pad 5 and the second pad 6 raise the arm steel beam 12 and support the arm steel beam 12.
[0027] like Figures 1-4 As shown, the assembly area is provided with a third pad 7, which is connected to the base 1 and is used to support the tail end of the arm steel beam 12.
[0028] like Figures 1-4 As shown, specifically, the first pad 5, the second pad 6, and the third pad 7 are made of POM, which will not damage the arm steel beam 12.
[0029] like Figures 1-4 As shown, specifically, the first corner post 201 to the fourth corner post 204, the first top rod 207 to the fourth top rod 216, the first intermediate rod 208 to the fourth intermediate rod 217, the first bottom rod 209 to the fourth bottom rod 218, the first top beam 219 to the third top beam 225, the first intermediate beam 220 to the third intermediate beam 226, the first bottom beam 221 to the third bottom beam 227, and the first reinforcing rod 228 to the fourth reinforcing rod 231 are made of aluminum profiles.
[0030] like Figures 1-4 As shown, a fixed platform 8 is provided on the upper side of the base 1, and multiple threaded holes are provided on one side of the fixed platform 8. The lifting device 10 is fixedly connected to one side of the fixed platform 8 by bolts.
[0031] like Figures 1-4 As shown, corner brackets 232 are detachably provided at the corners of the fixed frame 2 to connect and form the fixed frame 2 and strengthen the fixed frame 2.
[0032] like Figures 1-4 As shown, a corner bracket 232 is provided on both sides of the first bottom beam 221, the second bottom beam 224 and the third bottom beam 227. The corner brackets 232 on the first bottom beam 221, the second bottom beam 224 and the third bottom beam 227 are detachably connected to the upper side of the base 1. A corner bracket 232 is provided on the upper side of the first bottom rod 209 to the fourth bottom rod 218. The corner brackets 232 on the first bottom rod 209 to the fourth bottom rod 218 are connected to the base 1, which serves to strengthen and stabilize the fixed frame 2.
[0033] like Figures 1-4 As shown, the base 1 has multiple detachable rollers 9 with braking function on its lower side, which facilitates the movement of the testing fixture and provides good operational flexibility.
[0034] The above embodiments are merely descriptions for clearly illustrating the present invention and are not intended to limit the implementation. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all implementations here, and any obvious variations or modifications derived therefrom are still within the protection scope of the present invention.
Claims
1. A testing fixture for testing the deformation of a cover plate, characterized in that, It includes a base, at least one fixed frame disposed on the base, a fixed plate disposed on the fixed frame for mounting a dial indicator, and a fixed fixture disposed on the base.
2. The testing fixture for testing the deformation of the cover plate according to claim 1, characterized in that, The fixed frame is a double-layer rectangular frame structure.
3. The testing fixture for testing the deformation of the cover plate according to claim 2, characterized in that, The fixed frame includes four symmetrically arranged corner posts: a first corner post, a second corner post, a third corner post, and a fourth corner post. A first upright post is positioned between the first and second corner posts, and a second upright post is positioned between the third and fourth corner posts. A first top post, a first intermediate post, and a first bottom post are positioned between the first corner posts and the first upright post. A second top post, a second intermediate post, and a second bottom post are positioned between the second upright post and the first corner post. A third top post, a third intermediate post, and a third bottom post are positioned between the third corner post and the second upright post. A fourth top post and a fourth intermediate post are positioned between the fourth corner post and the second upright post. The first corner post and the third corner post are provided with a first top beam, a first intermediate beam and a first bottom beam; the second corner post and the fourth corner post are provided with a second top beam, a second intermediate beam and a second bottom beam; the first column and the second column are provided with a third top beam, a third intermediate beam and a third bottom beam; a first reinforcing rod is vertically provided between the first top beam and the third top beam; a second reinforcing rod is vertically provided between the third top beam and the second top beam; a third reinforcing rod is provided between the first intermediate beam and the third intermediate beam; and a fourth reinforcing rod is provided between the second intermediate beam and the third intermediate beam.
4. The testing fixture for testing the deformation of the cover plate according to claim 1, characterized in that, The fixing fixture includes a fixed vertical plate and two detachable support plates disposed on one side of the fixed vertical plate. The base is provided with an assembly area.
5. The testing fixture for testing the deformation of the cover plate according to claim 1, characterized in that, The assembly area is provided with at least one first pad and one second pad, which are connected to the base.
6. The testing fixture for testing the deformation of the cover plate according to claim 5, characterized in that, The assembly area is provided with a third pad, which is connected to the base.
7. The testing fixture for testing the deformation of the cover plate according to claim 1, characterized in that, A fixed platform is provided on the upper side of the base.
8. The testing fixture for testing the deformation of the cover plate according to claim 3, characterized in that, Corner brackets are detachably installed at the corners of the fixed frame.
9. The testing fixture for testing the deformation of the cover plate according to claim 3, characterized in that, Each of the first, second, and third bottom beams has a corner bracket on both sides.
10. The testing fixture for testing the deformation of a cover plate according to claim 1, characterized in that, The base is detachably equipped with multiple casters on its underside.