Three-component near-field probe and detection system for simultaneously measuring vertical electric field and two horizontal electric fields

Abstract

The invention discloses a three-component near-field probe for simultaneously measuring a vertical electric field and two horizontal electric fields, and belongs to the technical field of electromagnetic near-field measurement. The three-component near-field probe comprises a detection end and a transmission end which are cascaded; each of the detection end and the transmission end comprises three dielectric layers, two metal layers arranged in the three dielectric layers and two metal layers arranged on the upper surface and the lower surface; according to the four symmetrical three-dimensional L-shaped monopoles at the detection end, a pair of symmetrical L-shaped monopoles in the same metal layer are coupled with a horizontal electric field to generate differential mode signals, a pair of symmetrical L-shaped monopoles between different metal layers are coupled with another horizontal electric field to generate differential mode signals, and the four three-dimensional L-shaped monopoles all induce vertical electric field energy to generate differential mode signals. Generating a common-mode signal; the transmission end provides good impedance matching and is used for transmitting an output signal of the detection end. All near-field electric field components can be measured at the same time, the measurement efficiency is high, multiple measurement errors are avoided, and the spatial resolution can be improved.

Description

Technical Field

[0001] This invention belongs to the field of electromagnetic near-field measurement technology, and particularly relates to a three-component near-field probe and detection system that can simultaneously measure a vertical electric field and two horizontal electric fields. Background Technology

[0002] With the development trend of high-density, high-frequency, and highly integrated integrated circuits, electromagnetic compatibility (EMC) issues are becoming increasingly serious. Locating radiation sources within high-density integrated circuits through electromagnetic near-field measurement is an effective method for solving electromagnetic interference (EMI) problems, and electromagnetic near-field probes are key components in electromagnetic near-field measurement. Electromagnetic near-field probes can be classified into single-component electromagnetic near-field probes and multi-component electromagnetic near-field probes based on the number of measurement components.

[0003] Single-component electromagnetic near-field probes have focused on improving performance indicators such as bandwidth, spatial resolution, and sensitivity, and there has been a great deal of research on this topic. However, in actual near-field measurement tests, it is generally necessary to measure multiple near-field electromagnetic components. Single-component electromagnetic near-field probes require multiple scans to measure multiple electromagnetic components, which takes several times longer and several hours. Furthermore, positional deviations are difficult to avoid during multiple measurements, leading to inaccurate measurements.

[0004] Multi-component electromagnetic near-field probes not only significantly improve measurement efficiency but also avoid errors caused by positional shifts during multiple measurements with single-component probes. Journal articles (IEEE Transactions on Microwave Theory and Techniques: A dual-component electric probe embedded with a 0° / 180° hybrid coupler for near-field scanning) and (IEEE Sensors Journal: A wideband dual-component electric probe for near-field measurement) respectively propose an active and a broadband dual-component near-field probe for simultaneously measuring horizontal and vertical electric field components. However, simultaneous measurement of two electric fields in the horizontal and vertical directions has not yet been studied. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a three-component near-field probe and detection system that can simultaneously measure a vertical electric field and two horizontal electric fields, so as to improve measurement efficiency and reduce errors.

[0006] The first objective of this invention can be achieved through the following technical solution: a three-component near-field probe that simultaneously measures one vertical electric field and two horizontal electric fields, comprising, from top to bottom, a first outer conductor layer, an upper dielectric layer, a first inner conductor layer, an intermediate dielectric layer, a second inner conductor layer, a lower dielectric layer, and a second outer conductor layer. One end of the probe is a detection end, and the other end is a transmission end. The detection end includes four three-dimensional L-shaped monopoles. The first and second monopoles are symmetrically arranged and laid flat on the first inner conductor layer, and the third and fourth monopoles are symmetrically arranged and laid flat on the second inner conductor layer. A pair of monopoles in the same inner conductor layer couples with a horizontal electric field to generate a first differential-mode signal, and monopoles in different inner conductor layers couple with another horizontal electric field to generate a second differential-mode signal. All four monopoles sense vertical electric field energy to generate a common-mode signal. The transmission end is used to transmit the signal generated by the detection end to the outside.

[0007] Preferably, the upper dielectric layer has a first conductor blind via and a second conductor blind via at the detection end, each of which penetrates the upper dielectric layer and is perpendicularly connected to the first inner conductor and the second inner conductor, respectively; the lower dielectric layer has a third conductor blind via and a fourth conductor blind via at the detection end, each of which penetrates the lower dielectric layer and is perpendicularly connected to the third inner conductor and the fourth inner conductor, respectively; the upper dielectric layer also has a fifth conductor blind via at the detection end, which penetrates the upper dielectric layer and connects the first outer conductor layer to the second monopole.

[0008] Preferably, the transmission end includes three sets of transmission components; the first transmission component is disposed in the first inner conductor layer, with one end connected to one end of the first monopole and the other end serving as the output end; the second transmission component is disposed in the second inner conductor layer, with one end connected to one end of the third monopole and the other end serving as the output end; the third transmission component is disposed in the second inner conductor layer, with one end connected to one end of the fourth monopole and the other end serving as the output end.

[0009] Preferably, the transmission component includes a tapered stripline, a stripline, a stripline-to-coplanar waveguide adapter, and a coplanar waveguide. The thin end of the tapered stripline is connected to a corresponding monopole, and the thick end is connected to one end of the stripline. The other end of the stripline is connected via the stripline-to-coplanar waveguide adapter and the coplanar waveguide.

[0010] Preferably, both the upper and lower dielectric layers are made of Rogers RT / duroid 4350 material; the thickness of both the upper and lower dielectric layers is t1, the dielectric constant is 3.48, and the dielectric loss tangent is 0.0037; the intermediate dielectric layer is supported by FR4 material, the thickness of the intermediate dielectric layer is t2, the dielectric constant is 4.4, and the dielectric loss tangent is 0.02. Preferably, the first outer conductor layer, the first inner conductor layer, the second inner conductor layer, and the second outer conductor layer are all made of copper.

[0011] Preferably, the conductivity of the first outer conductor layer, the first inner conductor layer, the second inner conductor layer, and the second outer conductor layer is all 5.96 × 10⁷ S / m, and the thickness of each is 18 μm.

[0012] According to another aspect of the present invention, a three-component near-field detection system for simultaneously measuring a vertical electric field and two horizontal electric fields is provided, comprising a vector network analyzer, a calibration device, and the aforementioned three-component near-field probe. The vector network analyzer serves as a receiving device to receive the output signal of the aforementioned three-component near-field probe. One end of the calibration device is connected to Port 1 of the vector network analyzer, and the other end is connected to a 50Ω load. The three output terminals of the aforementioned three-component near-field probe are respectively connected to Port 2, Port 3, and Port 4 of the network analyzer. The three-component near-field probe is located 0.8 mm above the center of the calibration device.

[0013] Preferably, the calibration element is a microstrip line, and the length and width of the microstrip line are 60 mm and 0.52 mm, respectively.

[0014] Preferably, the calibration element is a groove line, the length of which is 30 mm and the width of which is 0.2 mm.

[0015] Compared with the prior art, the beneficial effects of the present invention are: the present invention realizes the measurement of all near-field electric field components of a vertical electric field and two horizontal electric fields, which greatly improves the measurement efficiency, avoids the errors caused by multiple measurements by traditional single-component probes, and also improves the spatial resolution. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the unfolded structure of a three-component near-field probe that simultaneously measures one vertical electric field and two horizontal electric fields, as shown in Embodiment 1.

[0017] Figure 2 This is a schematic diagram of the three electric field component coupled pole structure shown in Embodiment 1 (vertical downward view of the probe).

[0018] Figure 3This is a schematic diagram showing the relative positions of the dielectric substrate, outer conductor, and inner conductor as illustrated in Embodiment 1.

[0019] Figure 4 This is a schematic diagram of the layered flat structure of each conductor layer of the three-component near-field probe shown in Example 1;

[0020] Figure 5 This is a schematic diagram of the system structure when using a microstrip line as a calibration device for the vertical electric field in Example 2.

[0021] Figure 6 This is a schematic diagram of the system structure when using a slotted wire as a calibration device for a horizontal electric field in Example 2;

[0022] Figure 7 This is a schematic diagram of the system structure when using a slotted wire as a calibration element for another horizontal electric field in Example 2.

[0023] Figure 8 This is the simulation and test results of the spatial resolution of the vertical electric field using microstrip lines as calibration components in Example 2;

[0024] Figure 9 This is the simulation and test results of the spatial resolution of a horizontal electric field using a slotted wire as a calibration element in Example 2.

[0025] Figure 10 This is the simulation and test results of the spatial resolution of another horizontal electric field using the slotted line as a calibration element in Example 2.

[0026] In the figure, 1. First outer conductor layer; 2. Upper dielectric layer; 3. First inner conductor layer; 4. Intermediate dielectric layer; 5. Second inner conductor layer; 6. Lower dielectric layer; 7. Second outer conductor layer; 8. Probe end; 9. Transmit end; 10. First monopole; 11. Second monopole; 12. Third monopole; 13. Fourth monopole; 14. First conductor blind via; 15. Second conductor blind via; 16. Third conductor blind via; 17. Fourth conductor blind via; 18. Fifth conductor blind via; 19. Gradient stripline; 20. Stripline; 21. Stripline to coplanar waveguide transition; 22. Coplanar waveguide; 23. Vector network analyzer; 24. Three-component near-field probe; 25. Microstrip line; 26. Slot line. Detailed Implementation

[0027] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0028] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0029] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0030] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0031] Example 1:

[0032] See Figures 1-4This embodiment provides a three-component near-field probe that simultaneously measures one vertical electric field and two horizontal electric fields. It includes, from top to bottom, a first outer conductor layer 1, an upper dielectric layer 2, a first inner conductor layer 3, an intermediate dielectric layer 4, a second inner conductor layer 5, a lower dielectric layer 6, and a second outer conductor layer 7. One end of the probe is a detection end 8, and the other end is a transmission end 9. The detection end 8 includes four three-dimensional L-shaped monopoles. The first monopole 10 and the second monopole 11 are symmetrically arranged and laid flat on the first inner conductor layer 3. The third monopole 12 and the fourth monopole 13 are symmetrically arranged and laid flat on the second inner conductor layer 5. A pair of monopoles in the same inner conductor layer couples to a horizontal electric field, generating a first differential-mode signal. Monopoles in different inner conductor layers couple to another horizontal electric field, generating a second differential-mode signal. All four monopoles sense vertical electric field energy, generating a common-mode signal. The transmission end 9 is used to transmit the signal generated by the detection end 8 externally.

[0033] The upper dielectric layer 2 has a first conductor blind hole 14 and a second conductor blind hole 15 at the detector end 8. The first conductor blind hole 14 and the second conductor blind hole 15 each penetrate the upper dielectric layer and are correspondingly vertically connected to the first inner conductor and the second inner conductor. The lower dielectric layer 6 has a third conductor blind hole 16 and a fourth conductor blind hole 17 at the detector end 8. The third conductor blind hole 16 and the fourth conductor blind hole 17 each penetrate the lower dielectric layer and are correspondingly vertically connected to the third inner conductor and the fourth inner conductor. The upper dielectric layer 2 also has a fifth conductor blind hole 18 at the detector end 8. The fifth conductor blind hole 18 penetrates the upper dielectric layer and connects the first outer conductor layer 1 to the second monopole 11.

[0034] Specifically, such as Figure 4 As shown, the transmission end 9 includes three sets of transmission components; the first transmission component is disposed in the first inner conductor layer 3, with one end connected to one end of the first monopole 10 and the other end serving as the output end; the second transmission component is disposed in the second inner conductor layer 5, with one end connected to one end of the third monopole 12 and the other end serving as the output end; the third transmission component is disposed in the second inner conductor layer 5, with one end connected to one end of the fourth monopole 13 and the other end serving as the output end. Each transmission component includes a tapered stripline 19, a stripline 20, a stripline-to-coplanar waveguide adapter 21, and a coplanar waveguide 22. The thinner end of the tapered stripline 19 is connected to the corresponding monopole, and the thicker end is connected to one end of the stripline 20. The other end of the stripline 20 is connected via the stripline-to-coplanar waveguide adapter 21 and the coplanar waveguide 22.

[0035] In one embodiment of the present invention, both the upper dielectric layer 2 and the lower dielectric layer 6 are made of Rogers RT / duroid 4350 material; the thickness of both the upper dielectric layer 2 and the lower dielectric layer 6 is t1, the dielectric constant is 3.48, and the dielectric loss tangent is 0.0037; the intermediate dielectric layer 4 is supported by FR4 material, the thickness of the intermediate dielectric layer 4 is t2, the dielectric constant is 4.4, and the dielectric loss tangent is 0.02. The first outer conductor layer 1, the first inner conductor layer 3, the second inner conductor layer 5, and the second outer conductor layer 7 are all made of copper, with a conductivity of 5.96 × 10⁷ S / m and a thickness of 18 μm. The three-component near-field probe 24 for simultaneously measuring one vertical electric field and two horizontal electric fields in this embodiment is manufactured using PCB technology. Table 1 shows its specific dimensional parameters. Figure 3-7 In the middle annotation:

[0036]

[0037] The transmission end 9 of the present invention has good impedance matching, which can transmit the sensing signal of the detection end 8 to the receiving device, thereby realizing the synchronous detection of two horizontal electric fields and one vertical electric field, which greatly improves the detection efficiency and eliminates the position offset error caused by repeated detection, resulting in more accurate detection results.

[0038] Example 2:

[0039] This invention provides a three-component near-field detection system for simultaneously measuring one vertical electric field and two horizontal electric fields. The system includes a vector network analyzer 23, a calibration device, and the aforementioned three-component near-field probe 24. The vector network analyzer 23 acts as a receiving device to receive the output signal of the three-component near-field probe 24. One end of the calibration device is connected to Port 1 of the vector network analyzer 23, and the other end is connected to a 50Ω load. The three output terminals of the three-component near-field probe 24 are respectively connected to Port 2, Port 3, and Port 4 of the network analyzer. The three-component near-field probe 24 is located 0.8 mm above the center of the calibration device.

[0040] See Figure 5 In this embodiment, a microstrip line 25 is used as the calibration element for the vertical electric field. The length and width of the microstrip line 25 are 60 mm and 0.52 mm, respectively. See [link / reference] Figure 8 The simulation results and actual processing test results are in good agreement, showing that the proposed three-component near-field probe, which simultaneously measures one vertical electric field and two horizontal electric fields, has a spatial resolution of 0.8 mm for measuring the vertical electric field.

[0041] refer to Figure 6In this embodiment, slot wire 26 is used as a calibration element for a horizontal electric field. The length and width of slot wire 26 are 30 mm and 0.2 mm, respectively. See [link / reference] Figure 9 The simulation results and actual processing test results are in good agreement, showing that the proposed three-component near-field probe, which simultaneously measures one vertical electric field and two horizontal electric fields, has a spatial resolution of 0.7 mm for measuring a horizontal electric field.

[0042] refer to Figure 7 In this embodiment, slot wire 26 is used as another calibration element for the horizontal electric field. The length and width of slot wire 26 are 30 mm and 0.2 mm, respectively. See [link / reference] Figure 10 The simulation results and actual processing test results are in good agreement, showing that the proposed three-component near-field probe, which simultaneously measures one vertical electric field and two horizontal electric fields, has a spatial resolution of 0.9 mm for measuring a horizontal electric field.

[0043] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A three-component near-field probe for simultaneously measuring a vertical electric field and two horizontal electric fields, comprising, from top to bottom, a first outer conductor layer (1), an upper dielectric layer (2), a first inner conductor layer (3), an intermediate dielectric layer (4), a second inner conductor layer (5), a lower dielectric layer (6), and a second outer conductor layer (7), wherein one end of the probe is a detection end (8) and the other end is a transmission end (9); the detection end (8) comprises four three-dimensional L-shaped monopoles, wherein the first monopole (10) and the second monopole (11) are symmetrically arranged and laid flat on the first inner conductor layer (3), and the third monopole (12) and the fourth monopole (13) are symmetrically arranged and laid flat on the second inner conductor layer (5), wherein a pair of monopoles in the same inner conductor layer couples a horizontal electric field to generate a first differential mode signal, and monopoles in different inner conductor layers couple another horizontal electric field to generate a second differential mode signal, and all four monopoles sense vertical electric field energy to generate a common mode signal; the transmission end (9) is used to transmit the signal generated by the detection end (8) to the outside.

2. The three-component near-field probe for simultaneously measuring one vertical electric field and two horizontal electric fields according to claim 1, characterized in that, The upper dielectric layer (2) is provided with a first conductor blind hole (14) and a second conductor blind hole (15) at the probe end (8). The first conductor blind hole (14) and the second conductor blind hole (15) each penetrate the upper dielectric layer and are vertically connected to the first inner conductor and the second inner conductor, respectively. The lower dielectric layer (6) is provided with a third conductor blind hole (16) and a fourth conductor blind hole (17) at the probe end (8). The third conductor blind hole (16) and the fourth conductor blind hole (17) each penetrate the lower dielectric layer and are vertically connected to the third inner conductor and the fourth inner conductor, respectively. The upper dielectric layer (2) is also provided with a fifth conductor blind hole (18) at the probe end (8). The fifth conductor blind hole (18) penetrates the upper dielectric layer and connects the first outer conductor layer (1) to the second monopole (11).

3. A three-component near-field probe for simultaneously measuring one vertical electric field and two horizontal electric fields according to claim 1 or 2, characterized in that, The transmission end (9) includes three sets of transmission components; the first transmission component is disposed in the first inner conductor layer (3), one end of which is connected to one end of the first monopole (10), and the other end serves as the output end; The second transmission component is disposed in the second inner conductor layer (5), one end of which is connected to one end of the third monopole (12), and the other end serves as the output end; The third transmission component is disposed in the second inner conductor layer (5), one end of which is connected to one end of the fourth monopole (13), and the other end serves as the output end.

4. A three-component near-field probe for simultaneously measuring one vertical electric field and two horizontal electric fields according to claim 3, characterized in that, The transmission component includes a tapered stripline (19), a stripline (20), a stripline-to-coplanar waveguide adapter (21), and a coplanar waveguide (22). The thin end of the tapered stripline (19) is connected to the corresponding monopole, and the thick end is connected to one end of the stripline (20). The other end of the stripline (20) is connected via the stripline-to-coplanar waveguide adapter (21) and the coplanar waveguide (22).

5. A three-component near-field probe for simultaneously measuring one vertical electric field and two horizontal electric fields according to claim 1 or 2, characterized in that, The upper dielectric layer (2) and the lower dielectric layer (6) are both made of Rogers RT / duroid 4350 material; the thickness of the upper dielectric layer (2) and the lower dielectric layer (6) is t1, the dielectric constant is 3.48, and the dielectric loss tangent is 0.0037; the intermediate dielectric layer (4) is supported by FR4 material, the thickness of the intermediate dielectric layer (4) is t2, the dielectric constant is 4.4, and the dielectric loss tangent is 0.

02.

6. A three-component near-field probe for simultaneously measuring one vertical electric field and two horizontal electric fields according to claim 1 or 2, characterized in that, The first outer conductor layer (1), the first inner conductor layer (3), the second inner conductor layer (5), and the second outer conductor layer (7) are all made of copper.

7. A three-component near-field probe for simultaneously measuring one vertical electric field and two horizontal electric fields according to claim 1 or 2, characterized in that, The conductivity of the first outer conductor layer (1), the first inner conductor layer (3), the second inner conductor layer (5), and the second outer conductor layer (7) is 5.96 × 10⁷ S / m, and the thickness is 18 μm.

8. A three-component near-field detection system for simultaneously measuring a vertical electric field and two horizontal electric fields, comprising a vector network analyzer (23), a calibration device, and a three-component near-field probe (24) for simultaneously measuring a vertical electric field and two horizontal electric fields as described in any one of claims 1-7, wherein the vector network analyzer (23) serves as a receiving device to receive the output signal of the three-component near-field probe (24), one end of the calibration device is connected to Port 1 of the vector network analyzer (23), and the other end is connected to a 50Ω load; the three output terminals of the three-component near-field probe (24) are respectively connected to Port 2, Port 3, and Port 4 of the network analyzer, and the three-component near-field probe (24) is located 0.8 mm above the center of the calibration device.

9. A three-component near-field detection system for simultaneously measuring a vertical electric field and two horizontal electric fields according to claim 8, characterized in that, The calibration component is a microstrip line (25), and the length and width of the microstrip line (25) are 60 mm and 0.52 mm, respectively.

10. A three-component near-field detection system for simultaneously measuring a vertical electric field and two horizontal electric fields according to claim 8, characterized in that, The calibration component is a groove (26), the length and width of which are 30 mm and 0.2 mm, respectively.

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