Compact focal spot observation microscopic device

Abstract

The invention belongs to the technical field of light spot observation equipment, and mainly provides a compact focal spot observation microscopic device which comprises a mounting frame, a three-dimensional adjusting mechanism arranged on the mounting frame and a microscopic optical mechanism driven by the three-dimensional adjusting mechanism to move. The microscopic optical mechanism comprises a driving assembly, an observation unit and a beam splitter are arranged on the driving assembly, the observation unit is connected with a shielding total cylinder, a microscope objective is arranged in the shielding total cylinder, the beam splitter is used for extending into a light path to reflect part of laser into the shielding total cylinder, and part of laser is imaged on the observation unit after passing through the microscope objective; the driving assembly is used for driving the beam splitter to extend into or out of a light path. According to the invention, in a limited space, the driving assembly drives the beam splitter to move along the vertical direction, so that the beam splitter can extend into or out of the light path, the microscope objective can be quickly added into and removed from the focusing light path, and the observation of the microscope objective on focal spots is realized.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of light spot observation equipment, in particular to a compact focal spot observation microscope device. BACKGROUND

[0002] In laser application, in order to obtain a small size light spot of micron level, it is necessary to focus laser by using focusing element. Since the light spot size is too small, it is necessary to use microscopy to observe the light spot in order to adjust the focusing element and evaluate the focal spot state to obtain the focal spot parameters. The light spot can be magnified by tens of times by using a microscope objective to observe the focal spot morphology. The focal spot plane needs to be coincided with the working plane of the microscope objective during operation. The working distance of the microscope objective is usually in millimeter level, which means that the microscope objective needs to be placed at a position of millimeter level behind the focal point in the optical path, which is impossible in most application cases. There are two methods to observe the focal spot at other positions: The first method is to sample the light spot in the optical path before focusing; the second method is to collect the laser after focusing and re-collecting the laser in the divergent optical path, and then analyze the laser after processing.

[0003] The first method can maximize the information of the focal spot, but the operation space of the focal length is extremely limited, especially when the focusing element is located outside the vacuum chamber, the focal point of the laser passing through the window is located in the vacuum chamber, or the optical path is arranged compactly, and in some cases, all optical elements including the sampling element in the focusing optical path must be removed during formal use; The second method can greatly increase the operation space of the optical path, but it is easy to lose the information of the focal spot itself. SUMMARY

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a compact focal spot observation microscope device to solve the problem that the prior art cannot quickly add and remove the microscope objective in the focusing optical path in a limited space.

[0005] To achieve the above-mentioned purpose and other related purposes, the present application provides a compact focal spot observation microscope device, which comprises a mounting frame, a three-dimensional adjusting mechanism arranged on the mounting frame, and a microscopic optical mechanism driven to move by the three-dimensional adjusting mechanism, the three-dimensional adjusting mechanism being used to drive the microscopic optical mechanism to move to image the focal spot; The microscopic optical mechanism comprises a driving assembly driven by the three-dimensional adjusting mechanism, an observation unit and a beam splitter mirror being arranged on the driving assembly, the observation unit being connected with a shielding barrel, a microscope objective being arranged in the shielding barrel, the beam splitter mirror being used to extend into the optical path to reflect part of the laser into the shielding barrel, and part of the laser being imaged on the observation unit after passing through the microscope objective; The driving assembly is used to drive the beam splitter to extend into or out of the light path.

[0006] In some embodiments of the present application, the driving assembly comprises a plurality of cage rods, a sliding block slidingly assembled on the cage rods, and a fastening screw threaded on the sliding block, one end of the plurality of cage rods is fixed on the observation unit, the other end of the plurality of cage rods is fixed with a connecting block, the connecting block is provided with a mounting hole, and the shielding barrel is assembled in the mounting hole of the connecting block. The sliding block is fixedly assembled on the three-dimensional adjusting mechanism, the sliding block is threaded with a fastening screw, and the fastening screw is used to thread through the sliding block and press on the cage rod to lock the microscopic optical mechanism.

[0007] In some embodiments of the present application, the shielding barrel comprises an imaging shielding barrel and a sampling shielding barrel, one end of the imaging shielding barrel is connected to the observation unit, the other end is connected to the mounting hole in the connecting block, the microscopic objective and the sampling shielding barrel are both assembled in the mounting hole of the connecting block, the microscopic objective is located in the sampling shielding barrel, and the beam splitter is located at the barrel mouth of the sampling shielding barrel.

[0008] In some embodiments of the present application, the connecting block is provided with a connecting rod, one end of the connecting rod is fixed on the connecting block, and the other end of the connecting rod is provided with a support for placing the beam splitter, and the support is located at the barrel mouth of the sampling shielding barrel.

[0009] In some embodiments of the present application, the support comprises a mounting portion for placing the beam splitter and a connecting portion fixed on the connecting rod, and the beam splitter is obliquely arranged on the mounting portion.

[0010] In some embodiments of the present application, the mounting portion and the connecting portion are integrally formed.

[0011] In some embodiments of the present application, the connecting block comprises a first mounting base and a second mounting base connected to each other, the mounting hole penetrates through the first mounting base and the second mounting base, the plurality of cage rods are fixedly assembled with the first mounting base, the imaging shielding barrel and the microscopic objective are arranged in the mounting hole of the first mounting base, and the sampling shielding barrel is arranged in the mounting hole of the second mounting base.

[0012] In some embodiments of the present application, the imaging shielding barrel is divided into a first section barrel and a second section barrel, one end of the first section barrel is threadedly connected with one end of the second section barrel, the other end of the first section barrel is connected with the observation unit, and the other end of the second section barrel is fixedly connected in the mounting hole of the first mounting base.

[0013] In some embodiments of the present application, the observation unit is threadedly connected with an articulated joint, and the articulated joint is threadedly connected with the first section cylinder and the observation unit.

[0014] As described above, the present application has the following beneficial effects: The present application integrates the beam splitter, the microscope objective, the observation unit and the shielding total cylinder on the same driving assembly to form an independent microscopic optical mechanism. The microscopic optical mechanism has no spatial disorder and interference of scattered components. In the limited space, the driving assembly drives the beam splitter to move along the up-down direction, so as to realize the insertion or extraction of the beam splitter in the optical path, and then quickly add and remove the microscope objective in the focusing optical path, so as to realize the observation of the focusing spot by the microscope objective, and avoid the problems of insufficient space and complicated operation caused by the separate operation of multiple scattered components. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 A state diagram when the present application is inserted into the optical path is shown; Figure 2 A state diagram when the present application is extracted from the optical path is shown; Figure 3 A structural schematic diagram of the microscopic optical mechanism is shown; Figure 4 An enlarged view of A in FIG. 4 is shown; Figure 3 An enlarged view of A in FIG. 4 is shown; Figure 5 A top view of the microscopic optical mechanism is shown; Figure 6 A sectional view of B-B in FIG. 4 is shown; Figure 5 A sectional view of B-B in FIG. 4 is shown; Figure 7 A structural schematic diagram of the connecting block is shown; Figure 8 A top view of the connecting block is shown; Figure 9 A sectional view of C-C in FIG. 4 is shown; Figure 8 A sectional view of C-C in FIG. 4 is shown.

[0016] BRIEF DESCRIPTION OF DRAWINGS 1, mounting frame; 2, three-dimensional adjusting mechanism; 3, microscopic optical mechanism; 4, focusing optical element; 5, optical path; 31, observation unit; 32, cage rod; 33, shielding total cylinder; 331, imaging shielding cylinder; 332, sampling shielding cylinder; 3311, first section cylinder; 3312, second section cylinder; 34, beam splitter; 35, connecting block; 351, first mounting base; 352, second mounting base; 36, slider; 37, joint; 38, connecting rod; 39, support; 391, connecting portion; 392, mounting portion; 40, microscope objective; 41, mounting hole; 411, first hole; 412, second hole. DETAILED DESCRIPTION

[0017] Other advantages and effects of the present application can be easily understood by those skilled in the art from the above description. The present application can also be implemented or applied in other different embodiments, and the details in the description can be modified or changed based on different views and applications without departing from the spirit of the present application.

[0018] Reference will now be made to the drawings, wherein Figures 1-9 It is to be noted that the drawings provided in the embodiments only schematically illustrate the basic concept of the present application, and thus the drawings only show the components related to the present application, rather than the number, shape and size of the components in actual implementation. The shape, number and ratio of the components in actual implementation can be arbitrarily changed, and the layout of the components can be more complicated.

[0019] As shown in Figure 1 and Figure 2 The present application provides a compact focal spot observation microscope device, which comprises a mounting frame 1, a three-dimensional adjustment mechanism 2 arranged on the mounting frame 1, and a microscope optical mechanism 3 driven by the three-dimensional adjustment mechanism 2 to move, and the three-dimensional adjustment mechanism 2 can drive the microscope optical mechanism 3 to move in three-dimensional directions, so as to realize the imaging of the focal spot. The structure of the three-dimensional adjustment mechanism 2 is common in the prior art, and thus the present embodiment will not be described in detail.

[0020] The specific form of the mounting frame 1 can be flexibly adjusted in different application environments, and the present embodiment adopts three hexagonal support columns for support.

[0021] In other embodiments of the present application, a single or double thick support column can be used for support, or three or more support columns can be used in combination for support.

[0022] As shown in Figures 3-6As shown, the microscopic optical mechanism 3 comprises a driving assembly driven by the three-dimensional adjusting mechanism 2, the driving assembly is provided with an observation unit 31 and a beam splitter 34, the observation unit 31 is an observation camera which is a CMOS camera with a C-mount interface, and the beam splitter 34 is a 1:9 thin film beam splitter. The observation camera is threadedly connected with a shielding drum 33, the shielding drum 33 is provided with a microscopic objective lens 40, and the microscopic objective lens 40 is a metallographic 195 objective lens. In the embodiment, the 1:9 thin film beam splitter is an optical device which can divide an incident light into reflected light and transmitted light according to a light intensity ratio of 1:9.

[0023] In operation, the driving assembly works to drive the beam splitter 34 to move up and down so as to extend into the light path 5, thereby reflecting part of the laser in the light path 5 into the shielding drum 33, and the microscopic objective lens 40 can image the focal spot on the CMOS chip of the observation camera after the laser passes through the microscopic objective lens 40. Subsequently, the internal components of the driving assembly are locked, i.e. the driving assembly no longer drives the beam splitter 34 to move. The three-dimensional adjusting mechanism 2 works to drive the driving assembly to move as a whole so as to make the focal spot fall on the working plane of the microscopic objective lens, and with the continuous adjustment of the movement, the microscopic objective lens 40 can image the focal spot on the CMOS chip of the observation camera after the laser passes through the microscopic objective lens 40, thereby achieving the effect of observing a clear focal spot on the observation camera. After the observation is completed, the driving assembly moves reversely to move the beam splitter 34 out of the light path 5.

[0024] As shown in the figure, Figures 3-6 In the embodiment, the beam splitter 34, the microscopic objective lens 40, the observation camera and the shielding drum 33 are all integrated on the same driving assembly to form an independent microscopic optical mechanism 3. The microscopic optical mechanism 3 has no space disorder and interference of scattered components, and in the limited space, the driving assembly drives the beam splitter 34 to move along the up-down direction, i.e. the beam splitter 34 can extend into or move out of the light path 5, thereby quickly adding and removing the microscopic objective lens 40 in the focusing light path 5 to realize the observation of the focal spot by the microscopic objective lens 40, and meanwhile, the problems of insufficient space and complicated operation caused by the separate operation of multiple scattered components are avoided.

[0025] As shown in the figure, Figures 3-6As shown, in some embodiments of the present invention, the driving assembly includes multiple cage rods 32, sliders 36 slidably mounted on the cage rods 32, and fastening screws threaded onto the sliders 36. Each cage rod 32 extends vertically, and the axial direction of the shielding cylinder 33 is consistent with the extension direction of the cage rod 32. A CMOS camera using a C-mount interface can be directly fixedly connected to one end of the multiple cage rods 32, and a connecting block 35 is fixed to the other end of the multiple cage rods 32. The cage rods 32 extend vertically, and the axial direction of the shielding cylinder 33 is consistent with the extension direction of the cage rods 32, resulting in a compact axial layout of the driving assembly, shielding cylinder 33, observation camera, and microscope objective 40 in the vertical direction, without any unnecessary horizontal radial extensions. This reduces the radial space occupied by the microscope optical mechanism 3, and when the microscope optical mechanism 3 extends into or exits the optical path 5, it can avoid spatial interference with the surrounding equipment of the focusing optical path 5 due to excessive radial dimensions.

[0026] like Figures 3-6 As shown, in some embodiments of the present invention, the slider 36 is fixedly mounted on the three-dimensional adjustment mechanism 2. Through the sliding engagement of the slider 36 and the cage rod 32, when controlling the extension and retraction of the beam splitter 34 in the optical path 5, the sliding of the cage rod 32 on the slider 36 can be manually controlled, thereby determining whether the beam splitter 34 extends into or out of the optical path 5. The sliding engagement of the slider 36 and the cage rod 32 allows the beam splitter 34 to extend into or retract from the optical path 5 as a wide-range linear sliding operation. Simultaneously, the cage rod 32 provides linear guidance, preventing the beam splitter 34 from swaying or jamming during its movement, and preventing collisions or interference between the beam splitter 34, the observation camera, and the shielding tube 33 with the surrounding equipment of the optical path 5, thus adapting to the confined operating space around the focusing optical path 5.

[0027] The fastening screw can pass through the side wall of the slider 36 and press against the cage rod 32 to lock the cage rod 32. When the beam splitter 34 has been inserted into or removed from the optical path 5, the fastening screw can be manually tightened. The fastening screw presses against the cage rod 32, preventing relative sliding between the slider 36 and the cage rod 32. The fastening screw on the slider 36 locks and positions the cage rod 32 by pressing against it with its thread. The compressive force of the thread can generate sufficient static friction to limit the relative sliding between the slider 36 and the cage rod 32, thereby ensuring that the beam splitter 34 is always in the preset inserted or removed position.

[0028] In some embodiments of the present application, a cylinder is used instead of the slider 36 and the fastening screw, the cylinder is fixed on the three-dimensional adjusting mechanism 2, and the telescopic end of the cylinder is fixedly connected to the cage rod 32. By controlling the movement of the telescopic end of the cylinder, the insertion and removal of the beam splitter 34 into and out of the optical path 5 are controlled, thereby quickly adding and removing the microscope objective 40 in the focusing optical path 5 to achieve the observation of the focus spot by the microscope objective 40. In addition, a hydraulic cylinder or an electric push rod can also be used instead of the slider 36 and the fastening screw.

[0029] The barrel opening of the shielding barrel 33 is directly opposite to the beam splitter 34, and the beam splitter 34 reflects part of the laser into the shielding barrel 33. After the laser passes through the microscope objective 40, an image is formed on the observation camera. The laser reflected by the beam splitter 34 can directly enter the shielding barrel 33 along a straight line without multiple reflections or refractions, which not only avoids energy loss of the laser during transmission, but also prevents stray reflected light from entering the barrel to form interference, allowing more effective laser to accurately reach the microscope objective 40, and ultimately forming a clearer and more accurate focus spot image on the observation camera.

[0030] As shown in Figures 3-6 some embodiments of the present application, the shielding barrel 33 includes an imaging shielding barrel 331 and a sampling shielding barrel 332, which are coaxially arranged. The imaging shielding barrel 331, the sampling shielding barrel 332, and the microscope objective 40 are coaxial. When the laser is reflected from the beam splitter 34 into the shielding barrel 33, it can pass through the sampling shielding barrel 332, the microscope objective 40, and the imaging shielding barrel 331 in sequence along a single axis in a straight line to reach the observation camera, which ensures the coaxiality of the optical path.

[0031] As shown in Figures 3-7 the mounting hole 41 is provided on the connecting block 35, one end of the imaging shielding barrel 331 is threadedly connected to the observation camera, the other end of the imaging shielding barrel 331 is threadedly connected to the mounting hole 41 in the connecting block 35, and the microscope objective 40 is threadedly assembled in the mounting hole 41 in the connecting block 35. One end of the sampling shielding barrel 332 is also threadedly assembled in the mounting hole 41 in the connecting block 35, and the other end of the sampling shielding barrel 332 is directly opposite to the beam splitter 34, with the microscope objective 40 located in the sampling shielding barrel 332. The sampling shielding barrel 332 is directly opposite to the beam splitter 34, and the microscope objective 40 is directly built-in in the sampling shielding barrel 332, so that the sampling shielding barrel 332 can isolate external stray light from entering the microscope objective 40, avoiding the interference of stray light with the contrast and clarity of the focus spot imaging, and preventing stray light from escaping from the imaging system to cause safety hazards.

[0032] The mounting hole 41 is a two-stage stepped hole, and the imaging shielding barrel 331, the sampling shielding barrel 332, and the microscope objective 40 are fixedly connected to different stages of the stepped hole of the mounting hole 41, so that each element is fixed in the circumferential direction and does not interfere with each other.

[0033] In this embodiment, the fixed connection is achieved by screwing the imaging shielding cylinder 331, the sampling shielding cylinder 332 and the microscope objective 40 into the mounting hole 41 through the screws on the connecting block 35.

[0034] In other embodiments, the fixed connection can also be achieved by screwing the imaging shielding cylinder 331, the sampling shielding cylinder 332 and the microscope objective 40 into the mounting hole 41 through the screws on the connecting block 35.

[0035] The stepped hole is arranged so that the imaging shielding cylinder 331, the sampling shielding cylinder 332 and the microscope objective 40 are fixed in layers along the axial direction without radial extension and spatial interference, avoiding the increase of the axial or radial size of the device for installing the imaging shielding cylinder 331, the sampling shielding cylinder 332 and the microscope objective 40, reducing the overall volume of the microscopic optical mechanism 3, and making the device more mobile and interference-free in the limited focusing light path 5 space.

[0036] In some embodiments of the present application, the connecting block 35 is provided with a connecting rod 38, one end of which is fixed to the connecting block 35, and the other end of which is provided with a bracket 39 for placing the beam splitter 34, the beam splitter 34 being fixed to the bracket 39, and the bracket 39 being located at the cylinder opening of the sampling shielding cylinder 332. The beam splitter 34 is fixedly connected with the connecting block 35 through the connecting rod 38 and the bracket 39, and the connecting block 35 is an integrated rigid structure with the cage rod 32, the shielding total cylinder 33 and the observation camera. Therefore, the beam splitter 34 is a component of the entire microscopic optical mechanism 3, rather than a scattered element independent of the microscopic optical mechanism 3. When the cage rod 32 moves, the beam splitter 34 will move synchronously with the microscope objective 40, the observation camera and the shielding total cylinder 33 without relative displacement, and the position of the beam splitter 34 does not need to be adjusted separately to ensure that it always faces the cylinder opening of the sampling shielding cylinder 332. In this embodiment, the laser reflected by the beam splitter 34 enters the microscope objective 40 through the cylinder opening of the sampling shielding cylinder 332.

[0037] In some embodiments of the present application, the bracket 39 includes a mounting portion 392 for placing the beam splitter 34 and a connecting portion 391 fixed to the connecting rod 38, and the mounting portion 392 and the connecting portion 391 are connected together. The beam splitter 34 is arranged obliquely on the mounting portion 392, and the obliquely arranged beam splitter 34 can reflect the laser on the light path 5 into the sampling shielding cylinder 332. The mounting portion 392 is also obliquely arranged, and the size and obliquity of the mounting portion 392 are adaptively arranged according to the actual size and obliquity of the beam splitter 34, so that the mounting portion 392 and the beam splitter 34 can be closely fitted and reliably fixed, avoiding displacement and shaking of the beam splitter 34 due to mismatching of the structure. In this embodiment, the beam splitter 34 placed on the mounting portion 392 is inclined at an angle of 45°.

[0038] In some embodiments of the present application, the mounting portion 392 and the connecting portion 391 are integrally formed, which enhances the structural strength of the bracket 39. Moreover, the integrally formed bracket 39 can be formed by precision injection molding, numerical control machining or other processes at one time, without the need for machining the mounting portion 392 and the connecting portion 391 separately, thereby simplifying the machining process and reducing the machining cost. Meanwhile, the integrally formed bracket 39 only needs to be fixed with the connecting rod 38 directly to complete the installation, thereby improving the overall assembly efficiency.

[0039] As shown in Figures 6-9 In some embodiments of the present application, the connecting block 35 comprises a first mounting base 351 and a second mounting base 352 connected with each other, and the mounting hole 41 penetrates through the first mounting base 351 and the second mounting base 352. Specifically, the mounting hole 41 comprises a first hole 411 and a second hole 412, the first hole 411 is located on the first mounting base 351, the second hole 412 is located on the second mounting base 352, and the diameter of the second hole 412 is greater than that of the first hole 411. The plurality of cage rods 32 are fixedly assembled with the first mounting base 351, the imaging shielding cylinder 331 is fixedly connected with one side of the first hole 411, the microscopic objective lens 40 is fixedly connected with the other side of the first hole 411, and the sampling shielding cylinder 332 is arranged in the second hole 412 of the second mounting base 352. The connecting rod 38 is assembled on the second mounting base 352. The first mounting base 351 and the second mounting base 352 can be machined separately, and only the first hole 411 and the second hole 412 adapted to the elements thereof need to be machined respectively. When the first mounting base 351 and the second mounting base 352 are combined together, the first hole 411 and the second hole 412 naturally form a stepped hole, thereby avoiding the machining of a complex multi-stage stepped hole on one component. The machining process of the present application is simple, the tolerance control difficulty is reduced, and the overall machining precision is improved. During assembly, the assembly between the first mounting base 351, the cage rod 32, the imaging shielding cylinder 331, the observation camera and the microscopic objective lens 40, and the assembly between the second mounting base 351, the sampling shielding cylinder 332, the connecting rod 38, the bracket 39 and the beam splitter 34 can be completed respectively, and then the above two parts are spliced into a complete microscopic optical mechanism 3. This step-by-step assembly method reduces the complexity of assembly, improves the assembly efficiency and assembly precision.

[0040] As shown in Figures 3-6As shown, in some embodiments of the present invention, the imaging shielding cylinder 331 is divided into a first section cylinder 3311 and a second section cylinder 3312. One end of the first section cylinder 3311 is threadedly connected to one end of the second section cylinder 3312, and the other end of the first section cylinder 3311 is connected to the observation camera. The other end of the second section cylinder 3312 is fixedly connected to the first hole 411 of the first mounting base 351. The split design of the imaging shielding cylinder 331 allows for independent maintenance and replacement of the two sections. If the second section cylinder 3312 becomes worn, contaminated, or deformed, it is only necessary to unscrew the threaded connection between the two sections and replace the second section cylinder 3312 separately.

[0041] like Figures 3-6 As shown, in some embodiments of the present invention, the observation camera is threadedly connected to a hinge 37, which is threadedly connected to the first section cylinder 3311 and the observation unit 31.

[0042] In this embodiment, the laser beam is focused by a focusing optical element 4, which is an off-axis parabolic mirror. The focused beam is split by a beam splitter 34, reflecting 10% of the laser energy into the shielding cylinder 33, while retaining 90% of the laser energy in the original optical path 5. After adjustment by the three-dimensional adjustment mechanism 2, the microscope objective 40 images the focal spot onto the CMOS chip of the observation camera, achieving the effect of observing the focal spot.

[0043] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in the present invention should still be covered by the claims of the present invention.

Claims

1. A compact focal spot observation microscope, characterized in that, It includes a mounting frame (1), a three-dimensional adjustment mechanism (2) disposed on the mounting frame (1), and a microscopic optical mechanism (3) driven by the three-dimensional adjustment mechanism (2) to move so as to image the focal spot; The microscopic optical mechanism (3) includes a driving component driven by the three-dimensional adjustment mechanism (2). The driving component is provided with an observation unit (31) and a beam splitter (34). The observation unit (31) is connected to a shielding tube (33). A microscope objective (40) is provided inside the shielding tube (33). The beam splitter (34) is used to extend into the optical path (5) to reflect part of the laser into the shielding tube (33). Part of the laser is imaged on the observation unit (31) after passing through the microscope objective (40). The driving component is used to drive the beam splitter (34) to extend into or out of the optical path (5).

2. The compact focal spot observation microscope according to claim 1, characterized in that, The drive assembly includes multiple cage rods (32), a slider (36) slidably mounted on the cage rods (32), and a fastening screw threaded onto the slider (36). One end of the multiple cage rods (32) is fixed to the observation unit (31), and the other end of the multiple cage rods (32) is fixed with a connecting block (35). The connecting block (35) is provided with a mounting hole (41), and the shielding cylinder (33) is assembled into the mounting hole (41) on the connecting block (35). The slider (36) is fixedly mounted on the three-dimensional adjustment mechanism (2), and the fastening screw is used to thread through the slider (36) and press against the cage rod (32) to lock the microscopic optical mechanism (3).

3. The compact focal spot observation microscope according to claim 2, characterized in that, The shielding tube (33) includes an imaging shielding tube (331) and a sampling shielding tube (332). One end of the imaging shielding tube (331) is connected to the observation unit (31), and the other end is connected to the mounting hole (41) on the connecting block (35). The microscope objective (40) and the sampling shielding tube (332) are both assembled in the mounting hole (41) on the connecting block (35). The microscope objective (40) is located inside the sampling shielding tube (332), and the beam splitter (34) is located at the opening of the sampling shielding tube (332).

4. The compact focal spot observation microscope according to claim 3, characterized in that, The connecting block (35) is provided with a connecting rod (38), one end of the connecting rod (38) is fixed on the connecting block (35), and the other end of the connecting rod (38) is provided with a bracket (39) for placing the beam splitter (34), and the bracket (39) is located at the opening of the sampling shielding tube (332).

5. The compact focal spot observation microscope according to claim 4, characterized in that, The bracket (39) includes a mounting part (392) for placing a beam splitter (34) and a connecting part (391) fixed to the connecting rod (38), wherein the beam splitter (34) is obliquely arranged on the mounting part (392).

6. The compact focal spot observation microscope according to claim 5, characterized in that, The mounting part (392) and the connecting part (391) are integrally formed structures.

7. The compact focal spot observation microscope according to claim 3, characterized in that, The connecting block (35) includes a first mounting base (351) and a second mounting base (352) connected together. The mounting hole (41) passes through the first mounting base (351) and the second mounting base (352). A plurality of cage rods (32) are fixedly assembled with the first mounting base (351). The imaging shielding tube (331) and the microscope objective (40) are disposed in the mounting hole (41) of the first mounting base (351). The sampling shielding tube (332) is disposed in the mounting hole (41) of the second mounting base (352).

8. The compact focal spot observation microscope according to claim 7, characterized in that, The imaging shielding tube (331) is divided into a first section tube (3311) and a second section tube (3312). One end of the first section tube (3311) is threadedly connected to one end of the second section tube (3312). The other end of the first section tube (3311) is connected to the observation unit (31). The other end of the second section tube (3312) is fixedly connected to the mounting hole (41) of the first mounting base (351).

9. The compact focal spot observation microscope according to claim 8, characterized in that, The observation unit (31) is threadedly connected to a hinge (37), which is threadedly connected to the first section cylinder (3311) and the observation unit (31).

Images