Electron beam welding method for gas distribution disc

Abstract

The invention relates to an electron beam welding method for a gas distribution plate, in particular to the field of gas distribution plates, and the electron beam welding method comprises the following steps: assembling an upper plate body, a support column and a lower plate body and then carrying out electron beam welding; the supporting column is arranged between the upper tray body and the lower tray body; the assembling clearance among the upper disc body, the supporting column and the lower disc body is 0.24-0.26 mm; soldering lugs are arranged among welding seams among the upper disc body, the supporting columns and the lower disc body. According to the electron beam welding method provided by the invention, the electron beam welding method is optimized, so that the flatness of the prepared gas distribution plate can meet the specific requirement, the surface degree requirement of the gas outlet surface of the gas distribution plate can be remarkably met, and the gas outlet surface of the gas distribution plate is ensured to have the good flatness gradient requirement.

Description

Technical Field

[0001] This invention relates to the field of gas distribution disks, and more specifically to an electron beam welding method for gas distribution disks. Background Technology

[0002] Currently, in the semiconductor processing field, process gases are delivered into the reaction chamber via nozzles. The nozzle has a gas inlet and multiple gas outlets. The process gas flows into the nozzle from the gas inlet, and the nozzle is equipped with a gas equalization structure to ensure that the process gas flowing in from the gas inlet flows out of the nozzle uniformly from the multiple gas outlets, thereby improving the uniformity of the process gas concentration throughout the reaction chamber.

[0003] Gas distribution equipment typically requires welding during its fabrication process, such as using electron beam welding. For example, CN119747828A discloses a gas distribution device with a heating tube and its fabrication method. The fabrication method includes: (I) providing a distribution body, a cover plate, and at least one heating tube; (II) the distribution body has an extension, and an overlap block is provided at one end of the extension away from the distribution body. At least one limiting groove is provided circumferentially on the surface of the distribution body, and at least two lead-out holes are provided on the overlap block, which are respectively connected to the two ends of the limiting groove; (III) filling the limiting groove with a heating tube and fastening the cover plate onto the distribution body, with the lead-out holes not connected to the cover plate, to obtain a distribution assembly; (IV) placing the distribution assembly in a vacuum environment and performing electron beam welding on the distribution assembly. After the weld reaches the overlap block, the direction of the electron beam is changed to align with the lead-out holes for compensation welding.

[0004] However, the control of the flatness of the welded disk is extremely strict when performing electron beam welding. However, due to imperfections in the assembly and welding process, the existing welding methods result in poor flatness of the welded disk, which cannot meet the stringent usage requirements. Summary of the Invention

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide an electron beam welding method for a gas distribution disk, so as to solve the defect that the flatness of the welded disk is poor due to imperfections in assembly and welding process, which makes it unable to meet the stringent use requirements.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This invention provides an electron beam welding method for a gas distribution disk, the electron beam welding method comprising:

[0008] After assembling the upper plate, support column and lower plate, electron beam welding is performed.

[0009] The support column is positioned between the upper and lower plates;

[0010] The assembly clearance between the upper plate, the support column, and the lower plate is 0.24-0.26 mm;

[0011] Welding plates are provided between the welds of the upper plate, the support column and the lower plate.

[0012] The electron beam welding method provided by this invention optimizes the electron beam welding method so that the flatness of the prepared gas distribution disk can meet specific requirements, significantly satisfy the surfaceness requirements of the gas distribution disk outlet surface, and ensure that the gas distribution disk outlet surface has good flatness gradient requirements.

[0013] As a preferred embodiment of the present invention, the gap between the welds of the upper plate, the support column and the lower plate is 0.9-1mm.

[0014] As a preferred technical solution of the present invention, the electron beam welding includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

[0015] As a preferred embodiment of the present invention, the absolute vacuum degree of the electron beam welding is ≤3.2×10⁻⁶. -4 Pa.

[0016] As a preferred embodiment of the present invention, the focusing current of the electron beam welding is 400-420mA.

[0017] As a preferred embodiment of the present invention, the beam current of the electron beam welding is 10-15mA.

[0018] As a preferred technical solution of the present invention, the voltage of the electron beam welding is 70-90kV.

[0019] As a preferred embodiment of the present invention, the electron beam welding speed is 10-30 mm / s.

[0020] As a preferred embodiment of the present invention, the filament current of the electron beam welding is 30-35A.

[0021] As a preferred embodiment of the present invention, the thickness of the welding sheet is 0.5-0.7 mm.

[0022] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0023] The welding method provided by this invention optimizes assembly-related parameters such as assembly gaps and weld processes, and combines them with electron beam welding to achieve a stepped flatness design on the gas distribution surface of the gas distribution disk. This design features a flatness distribution with a slightly convex central structure and slightly concave edges (starting from the center of the gas distribution disk, 70-80% of the area is slightly convex, and the remaining area is slightly concave; with the horizontal plane where the area boundary is located as the reference, the flatness of the central area is +0.03mm to +0.06mm, and the flatness of the edge ring is -0.12mm to -0.17mm, where + indicates above the reference horizontal plane and - indicates below the reference horizontal plane). This ensures that the gas distribution disk can achieve the designed coating effect.

[0024] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0025] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0026] Currently, in the semiconductor processing field, process gases are delivered into the reaction chamber via nozzles. The nozzle has a gas inlet and multiple gas outlets. The process gas flows into the nozzle through the gas inlet, and the nozzle has a gas equalization structure to ensure that the process gas flowing in through the gas inlet flows out of the nozzle evenly through the multiple gas outlets, thereby improving the uniformity of process gas concentration throughout the reaction chamber. Gas distribution equipment typically requires welding during manufacturing, such as using electron beam welding. However, current electron beam welding methods require extremely strict control over the flatness of the welded disk. Existing welding methods, due to imperfections in assembly and welding processes, result in poor flatness of the welded disk, failing to meet stringent usage requirements. Therefore, this invention optimizes the assembly process and combines it with electron beam welding to achieve excellent welding results, avoiding the defect of substandard flatness of the welded disk. Specifically:

[0027] I. This embodiment provides an electron beam welding method for a gas distribution disk, the electron beam welding method comprising:

[0028] After assembling the upper plate, support column, and lower plate, electron beam welding is performed.

[0029] The support column is positioned between the upper plate and the lower plate.

[0030] The assembly gap between the upper plate, the support column, and the lower plate is 0.24-0.26 mm, for example, it can be 0.24 mm, 0.242 mm, 0.244 mm, 0.246 mm, 0.248 mm, 0.25 mm, 0.252 mm, 0.254 mm, 0.256 mm, 0.258 mm, or 0.26 mm, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0031] Welding plates are provided between the welds of the upper plate, the support column and the lower plate.

[0032] The gap between the welds of the upper plate, the support column and the lower plate is 0.9-1mm, for example, it can be 0.9mm, 0.91mm, 0.92mm, 0.93mm, 0.94mm, 0.95mm, 0.96mm, 0.97mm, 0.98mm, 0.99mm or 1mm, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0033] In this invention, the assembly gap refers to the gap reserved between mating parts. The gap of the weld is to meet the gap for arranging the welding pieces. The specific gap can be reasonably selected according to the conventional requirements in the art. In this invention, the assembly gap is the assembly gap of other parts except for the welded joint.

[0034] The electron beam welding process includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

[0035] Wherein, the absolute vacuum degree of the electron beam welding is ≤3.2×10 -4 Pa, for example, could be 3.2 × 10⁻⁶. -4 Pa, 3.1×10 -4 Pa, 3×10 -4 Pa, 2.9 × 10 -4 Pa, 2.8 × 10 -4 Pa, 2.7 × 10 -4 Pa, 2.6 × 10 -4 Pa, 2.5 × 10 -4 Pa, 2.4 × 10 -4 Pa, 2.3×10 -4 Pa or 2.2 × 10 -4 Pa, etc., but not limited to the listed values, other unlisted values ​​within this range also meet the requirements.

[0036] The focusing current for electron beam welding is 400-420mA, such as 400mA, 402mA, 404mA, 406mA, 408mA, 410mA, 412mA, 414mA, 416mA, 418mA, or 420mA, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0037] The electron beam welding current is 10-15mA, for example, it can be 10mA, 10.5mA, 11mA, 11.5mA, 12mA, 12.5mA, 13mA, 13.5mA, 14mA, 14.5mA or 15mA, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0038] The voltage for electron beam welding is 70-90kV, for example, it can be 70kV, 72kV, 74kV, 76kV, 78kV, 80kV, 82kV, 84kV, 86kV, 88kV or 90kV, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0039] The electron beam welding speed is 10-30 mm / s, for example, it can be 10 mm / s, 12 mm / s, 14 mm / s, 16 mm / s, 18 mm / s, 20 mm / s, 22 mm / s, 24 mm / s, 26 mm / s, 28 mm / s or 30 mm / s, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0040] The filament current for electron beam welding is 30-35A, for example, it can be 30A, 30.5A, 31A, 31.5A, 32A, 32.5A, 33A, 33.5A, 34A, 34.5A or 35A, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0041] The thickness of the solder sheet is 0.5-0.7mm, for example, it can be 0.5mm, 0.52mm, 0.54mm, 0.56mm, 0.58mm, 0.6mm, 0.62mm, 0.64mm, 0.66mm, 0.68mm or 0.7mm, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0042] In this invention, the material of the welding pad is the same as the material of the object being welded. The same material means that they have similar element categories. For example, when the disk is pure aluminum, the welding pad can be pure aluminum or aluminum alloy, etc. When the disk is aluminum alloy, the welding pad can be pure aluminum or aluminum alloy, etc., and the aluminum alloy can be 6061, etc.

[0043] In this invention, in electron beam welding, a fixture can be optionally configured to fix the upper and lower plates to suppress deformation during the welding process.

[0044] II. To illustrate the welding effect achievable by the electron beam welding method provided by this invention, the following example is used for explanation:

[0045] In the following embodiments, the gas distribution disk is designed with a diameter of 200 mm.

[0046] Example 1

[0047] This embodiment provides an electron beam welding method for a gas distribution disk, the electron beam welding method comprising:

[0048] After assembling the upper plate, support column and lower plate, electron beam welding is performed.

[0049] The support column is positioned between the upper and lower plates;

[0050] The assembly clearance between the upper plate, the support column, and the lower plate is 0.25 mm;

[0051] Welding sheets are provided between the welds of the upper plate, support column, and lower plate; the thickness of the welding sheets is 0.6mm; the upper plate and lower plate are both made of aluminum alloy 6061, and the welding sheets are made of pure aluminum with a purity of 99.99%;

[0052] The gap between the welds of the upper plate, the support column and the lower plate is 0.94 mm;

[0053] The electron beam welding includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

[0054] The absolute vacuum degree of the electron beam welding is 3.2 × 10⁻⁶. -4 Pa, focusing current 410mA, beam current 12mA, voltage 80kV, welding speed 20mm / s, filament current 32A.

[0055] Example 2

[0056] This embodiment provides an electron beam welding method for a gas distribution disk, the electron beam welding method comprising:

[0057] After assembling the upper plate, support column and lower plate, electron beam welding is performed.

[0058] The support column is positioned between the upper and lower plates;

[0059] The assembly clearance between the upper plate, the support column, and the lower plate is 0.25 mm;

[0060] Welding sheets are provided between the welds of the upper plate, the support column and the lower plate; the thickness of the welding sheets is 0.6mm; the upper plate, the lower plate and the welding sheets are all made of aluminum alloy 6061.

[0061] The gap between the welds of the upper plate, the support column and the lower plate is 0.98 mm;

[0062] The electron beam welding includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

[0063] The absolute vacuum degree of the electron beam welding is 3.2 × 10⁻⁶. -4 Pa, focusing current 410mA, beam current 13mA, voltage 80kV, welding speed 20mm / s, filament current 33A.

[0064] Example 3

[0065] This embodiment provides an electron beam welding method for a gas distribution disk, the electron beam welding method comprising:

[0066] After assembling the upper plate, support column and lower plate, electron beam welding is performed.

[0067] The support column is positioned between the upper and lower plates;

[0068] The assembly clearance between the upper plate, the support column, and the lower plate is 0.24 mm;

[0069] Welding sheets are provided between the welds of the upper plate, support column, and lower plate; the thickness of the welding sheets is 0.5mm; the upper plate and lower plate are both made of aluminum alloy 6061, and the welding sheets are made of pure aluminum with a purity of 99.99%;

[0070] The gap between the welds of the upper plate, the support column and the lower plate is 0.9 mm;

[0071] The electron beam welding includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

[0072] The absolute vacuum degree of the electron beam welding is 2.2 × 10⁻⁶. -4 Pa, focusing current is 400mA, beam current is 10mA, voltage is 70kV, welding speed is 10mm / s, and filament current is 30A.

[0073] Example 4

[0074] This embodiment provides an electron beam welding method for a gas distribution disk, the electron beam welding method comprising:

[0075] After assembling the upper plate, support column and lower plate, electron beam welding is performed.

[0076] The support column is positioned between the upper and lower plates;

[0077] The assembly clearance between the upper plate, the support column, and the lower plate is 0.26 mm;

[0078] Welding plates are provided between the welds of the upper plate, the support column and the lower plate; the thickness of the welding plates is 0.7mm; the upper plate, the lower plate and the welding plates are all made of aluminum alloy 6061;

[0079] The gap between the welds of the upper plate, the support column and the lower plate is 1 mm;

[0080] The electron beam welding includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

[0081] The absolute vacuum degree of the electron beam welding is 1.2 × 10⁻⁶. -4 Pa, focusing current 420mA, beam current 15mA, voltage 90kV, welding speed 30mm / s, filament current 35A.

[0082] Example 5

[0083] The only difference from Example 1 is that the gap between the welds between the upper plate, the support column and the lower plate is 0.8 mm.

[0084] Example 6

[0085] The only difference from Example 1 is that the gap between the welds of the upper plate, the support column and the lower plate is 1.4 mm.

[0086] Example 7

[0087] The only difference from Example 1 is that the focusing current for electron beam welding is 350mA.

[0088] Example 8

[0089] The only difference from Example 1 is that the focusing current for electron beam welding is 450mA.

[0090] Example 9

[0091] The only difference from Example 1 is that the filament current for electron beam welding is 25A.

[0092] Example 10

[0093] The only difference from Example 1 is that the filament current for electron beam welding is 38A.

[0094] Example 11

[0095] The only difference from Example 1 is that the electron beam welding current is 25mA.

[0096] Example 12

[0097] The only difference from Example 1 is that the thickness of the solder sheet is 0.4 mm.

[0098] Example 13

[0099] The only difference from Example 1 is that the thickness of the solder sheet is 0.8 mm.

[0100] Comparative Example 1

[0101] The only difference from Example 1 is that the assembly gap between the upper plate, the support column and the lower plate is 0.05mm.

[0102] Comparative Example 2

[0103] The only difference from Example 1 is that the assembly gap between the upper plate, the support column and the lower plate is 0.3 mm.

[0104] The flatness of the products obtained in the above embodiments and comparative examples was tested, and the results are shown in Table 1 below.

[0105] Table 1

[0106]

[0107] In the table: + indicates above the reference level, and - indicates below the reference level.

[0108] As shown in Table 1, the solution provided by the present invention optimizes the electron beam welding method so that the flatness of the prepared gas distribution disk can meet specific requirements, significantly satisfy the surfaceness requirements of the gas distribution disk outlet surface, and ensure that the gas distribution disk outlet surface has good flatness gradient requirements.

[0109] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0110] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0111] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. An electron beam welding method for a gas distribution disk, characterized in that, The electron beam welding method includes: After assembling the upper plate, support column and lower plate, electron beam welding is performed. The support column is positioned between the upper and lower plates; The assembly clearance between the upper plate, the support column, and the lower plate is 0.24-0.26 mm; Welding plates are provided between the welds of the upper plate, the support column and the lower plate.

2. The electron beam welding method as described in claim 1, characterized in that, The gap between the welds of the upper plate, the support column and the lower plate is 0.9-1mm.

3. The electron beam welding method as described in claim 1, characterized in that, The electron beam welding includes: first welding the weld between the upper plate and the support column, and then welding the weld between the upper plate and the lower plate.

4. The electron beam welding method as described in claim 1, characterized in that, The absolute vacuum degree of the electron beam welding is ≤3.2×10⁻⁶. -4 Pa.

5. The electron beam welding method as described in claim 1, characterized in that, The focusing current for electron beam welding is 400-420mA.

6. The electron beam welding method as described in claim 1, characterized in that, The electron beam welding current is 10-15 mA.

7. The electron beam welding method as described in claim 1, characterized in that, The voltage for electron beam welding is 70-90kV.

8. The electron beam welding method as described in claim 1, characterized in that, The electron beam welding speed is 10-30 mm / s.

9. The electron beam welding method as described in claim 1, characterized in that, The filament current for electron beam welding is 30-35A.

10. The electron beam welding method as described in claim 1, characterized in that, The thickness of the welding sheet is 0.5-0.7 mm.

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