Full-automatic system device of ion thinning instrument

Abstract

The invention discloses a full-automatic system device of an ion thinning instrument, and belongs to the technical field of transmission electron microscope sample preparation, the full-automatic system device comprises an ion thinning instrument, a sample automatic filling and taking-out assembly, a control module assembly and an automatic material changing and recycling assembly, the sample automatic filling and taking-out assembly is fixed at the top end of the ion thinning instrument, and the control module assembly is fixed at the bottom end of the ion thinning instrument; the automatic material changing and recycling assembly is far away from the automatic sample filling and taking-out assembly and fixed to the top end of the ion thinning instrument, the control module assembly is connected with the ion thinning instrument through an electric wire, the full-automatic system device of the ion thinning instrument can automatically fill and take out samples for the ion thinning instrument, unmanned operation is achieved, and the operation efficiency is improved. The thinning success rate can be rapidly recorded and counted, thin area pictures in different stages can be obtained and stored, meanwhile, the processed sample plate can be automatically replaced and recycled, and the thinning efficiency is improved.

Description

Technical Field

[0001] This invention belongs to the field of transmission electron microscopy sample preparation technology, and particularly relates to a fully automated system device for an ion thinning instrument. Background Technology

[0002] The market mainly offers ion thinning instruments, primarily from brands like Gatan, Hitachi, and Leica. These products mainly provide the core function of ion thinning, focusing on thinning single sheet samples. The provided quick sample change components are also for single sample replacement. Personnel need to constantly monitor the process progress within the thinning instrument and manually change and cover the sample after the process is complete. For small sample volumes, this is generally sufficient. However, for continuous sample preparation over a period of time, or even during off-peak hours like late at night, the lack of automatic loading and unloading makes it unsuitable, or requires significant manpower and is inefficient. For professional sample preparation... Testing institutions prepare 30 to 40 samples daily, making it crucial to improve sample preparation efficiency and reduce manpower requirements. Currently, the success rate of sample thinning is calculated manually, but with a large daily sample volume and reliance on visual observation, it's impossible to acquire and store images of thin areas at different stages, resulting in slow recording and statistical analysis of the success rate. Furthermore, after processing a sample, unprocessed samples must be manually replaced for the next thinning cycle, increasing labor costs and reducing efficiency. Therefore, this invention provides a fully automated ion thinning instrument system to address the problems mentioned in the background. Summary of the Invention

[0003] The purpose of this invention is to provide a fully automated system for an ion thinning instrument. This fully automated system can automatically fill and remove samples from the ion thinning instrument, achieving unmanned operation. It can quickly record and statistically analyze the thinning success rate, acquire and store thin area photos at different stages, and automatically replace and recycle the processed sample plate, thereby improving thinning efficiency.

[0004] To achieve the above objectives, the present invention provides the following technical solution: a fully automated system device for an ion thinner, comprising: an ion thinner, an automatic sample loading and unloading component, a control module component, and an automatic material replacement and recovery component. The automatic sample loading and unloading component is fixed at the top of the ion thinner, and the automatic material replacement and recovery component is fixed at the top of the ion thinner away from the automatic sample loading and unloading component. The control module component is electrically connected to the ion thinner.

[0005] Furthermore, the automatic sample filling and removal assembly includes a support frame fixed to the top of the ion thinning instrument. A fixing plate is fixed to the bottom of the support frame, and a rotating shaft is inserted through one end of the fixing plate. A drive motor is fixedly connected to the top of the rotating shaft. A first connecting plate is fixed to the top and bottom of the rotating shaft. A first drive cylinder is fixed to the top of the first connecting plate. A pneumatic vacuum suction cup is sleeved at the bottom of the first drive cylinder. A vision camera is fixed through the top of the support frame. A second sliding block is fixed below the vision camera. The second sliding block is slidably connected to a second slider. A bracket is fixed to the top of the second slider. A fifth drive cylinder is fixed through the top of the bracket. A third connecting plate is fixedly connected to the bottom of the fifth drive cylinder. A material retrieval suction cup is fixedly connected to the bottom of the third connecting plate.

[0006] Furthermore, a first infrared sensor is embedded inside the first connecting plate.

[0007] Furthermore, the automatic material replacement and recycling assembly includes a first chute block fixed to the top of the ion thinning instrument. The first chute block is slidably connected to a first slider. A first chute plate is fixed to the top of the first slider. A first sample carrier plate is slidably connected to the inside of the first chute plate. A fixed column is slidably connected to the top of the first sample carrier plate. A second connecting plate is sleeved on the top of the fixed column. A push rod is fixed to the bottom of the second connecting plate. A second driving cylinder is fixed to one end of the push rod. A third driving cylinder is fixed to the side of the first slider and through one end of the support frame.

[0008] Furthermore, a material changing trough plate is fixed to the top of the support frame, the inside of the material changing trough plate is slidably connected to the second sample carrier plate, a fourth driving cylinder is fixed through the side of the material changing trough plate, and a push plate is fixed to the top of the fourth driving cylinder.

[0009] Furthermore, the control module component includes a device control PLC system module that is wired to the ion thinner, the device control PLC system module that is wired to the user interface module, the ion thinner that is wired to the visual recognition system module, and the visual recognition system module that is wired to the visual algorithm platform, the IO communication card software module, and the light source control software module.

[0010] Furthermore, a recycling box is fixed to the side of the first chute plate.

[0011] Furthermore, a support platform is fixed to the side of the second chute block, a collection plate is fixed to the top of the support platform, and a second infrared sensor is embedded inside the third connecting plate.

[0012] The beneficial effects of this invention are:

[0013] 1. Set up an automatic sample loading and unloading component. When using the ion thinner, manually place the sample to be thinned into the first sample carrier plate and the second sample carrier plate respectively. Then, manually start the drive motor, causing it to drive the rotating shaft to rotate, which in turn rotates the first connecting plate to change the angle. At the same time, the first drive cylinder will also move with the first connecting plate. The first drive cylinder, through its telescopic movement, pushes the pneumatic vacuum chuck fitted at its bottom downwards, using suction to hold the sample to be thinned. After that, the first infrared sensor no longer detects the sample, and then transmits the signal to the first drive cylinder, which then starts to move the pneumatic vacuum chuck and the sample to be thinned upwards. Then, manually start the drive motor again, causing it to drive the rotating shaft to move upwards. As the sample returns to its original position, the operator manually activates the sixth drive cylinder to extend it. Simultaneously, the operator manually activates the fifth drive cylinder to move the third connecting plate up and down. This allows the suction cup fixed at the bottom of the third connecting plate to remove the thinned sample material. The operator then manually activates the sixth drive cylinder again to pull the second slider back into the second groove. When the third connecting plate is above the receiving plate, the second infrared sensor embedded inside the third connecting plate detects the receiving plate via infrared light. This causes the fifth drive cylinder to extend downwards, placing the sample held by the suction cup into the sample plate. Batch observation is then performed using a vision camera. This system automatically loads and removes samples from the ion thinner, achieving unmanned operation.

[0014] 2. An automatic material changing and recycling component is installed. After the above process has thinned the sample on the first sample carrier plate, the second drive cylinder is manually activated, causing the third drive cylinder to extend and push the push rod to move the second connecting plate outward from the first sliding block. Simultaneously, the movement of the second connecting plate will also move the fixing column outward from the first sliding block. Therefore, the movement of the fixing column will use friction to move the first sample carrier plate outward from the first sliding block and slide it into the recycling box, awaiting collection by staff. A material changing trough plate is fixed to the top of the support frame, and the inside of the material changing trough plate is slidably connected to the second sample carrier plate. A fourth drive cylinder is fixed through the side of the material changing trough plate, and a push plate is fixed to the top of the fourth drive cylinder. When there is no sample material on the first sample carrier plate, the pressure sensor inside the first sample carrier plate will sense... The pressure signal is transmitted via wire to the solenoid valve switch in the third drive cylinder, which opens the cylinder and causes it to retract, moving the first slider inside the chute towards the material changing trough. The third drive cylinder stops operating only when the material changing trough and the first chute are aligned. Then, the fourth drive cylinder is manually activated, extending and pushing the pusher plate to push the second sample carrier plate into the first chute. Subsequently, the pressure sensor transmits the detected pressure signal via wire to the solenoid valve switch in the third drive cylinder, which opens the cylinder and causes it to extend and push the first slider inside the first chute away from the material changing trough, thus separating the material changing trough from the first chute. This allows for automatic replacement and recycling of the processed sample plate, improving thinning efficiency.

[0015] 3. The control module component allows operators to control the equipment via the user interface module and the PLC system module. This PLC system module primarily controls the operation of various hardware mechanisms, including the ion thinning instrument, such as the first, second, third, fourth, fifth, and sixth drive cylinders. Subsequently, the vision recognition system module uses the vision camera on the ion thinning instrument to collect and identify the thinned sample. If the observed thinned sample is too dark, the brightness of the vision camera can be increased by manually operating the light source control software module. The vision algorithm platform primarily uses the I / O communication card software module's own algorithm to calculate the thinning success rate from the sample data, records and statistically analyzes the success rate, and acquires and stores thin area photos at different stages. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the sample automatic loading and unloading component of a fully automated system device for an ion thinner provided by the present invention;

[0017] Figure 2 This is a schematic diagram of the automatic material replacement and recycling component structure of a fully automated system device for an ion thinning instrument provided by the present invention;

[0018] Figure 3 This is a supplementary schematic diagram of the structure of a fully automated system device for an ion thinning instrument provided by the present invention;

[0019] Figure 4 This invention provides a fully automated system device for an ion thinning apparatus. Figure 2 Enlarged structural diagram at point A in the middle;

[0020] Figure 5 This is a schematic diagram of the control module components of a fully automated system device for an ion thinning instrument provided by the present invention;

[0021] In the diagram: 1. Ion thinning instrument; 2. Automatic sample loading and unloading assembly; 3. Automatic material replacement and recycling assembly; 4. Control module assembly; 201. Support frame; 202. Fixing plate; 203. Rotating shaft; 204. Drive motor; 205. First connecting plate; 206. First drive cylinder; 207. Pneumatic vacuum suction cup; 208. Vision camera; 209. Second sliding block; 210. Second slider; 211. Bracket; 212. Fifth drive cylinder; 213. Third connecting plate; 214. Material retrieval suction cup; 215. Sixth drive cylinder; 301. First sliding block; 302. First slider; 303. First sliding plate; 30 4. First sample carrier plate; 305. Fixed column; 306. Second connecting plate; 307. Push rod; 308. Third drive cylinder; 309. Second drive cylinder; 401. Equipment control PLC system module; 402. User interface module; 403. Vision recognition system module; 404. Vision algorithm platform; 405. IO communication card software module; 406. Light source control software module; 5. First infrared sensor; 6. Material changing trough plate; 7. Second sample carrier plate; 8. Pressure sensor; 9. Push plate; 10. Fourth drive cylinder; 11. Recycling box; 12. Collection plate; 13. Second infrared sensor; 14. Support platform. Detailed Implementation

[0022] To further understand the invention's content, features, and effects, the following embodiments are provided, and detailed descriptions are given in conjunction with the accompanying drawings.

[0023] Please also refer to Figures 1 to 5 The following is a detailed description of a fully automated system device for an ion thinning apparatus according to an embodiment of the present invention, with reference to the accompanying drawings.

[0024] The applicant's research found that current ion thinning instruments are mainly used for thinning single sheet samples, and the provided rapid sample change components are also for single sample replacement. Sample preparation personnel need to constantly monitor the process progress within the thinning instrument and manually change and cover the sample after the process is complete. For small sample volumes, this is generally sufficient. However, if continuous sample preparation is required over a period of time, or even during off-peak hours such as late at night, the lack of automatic loading and unloading makes it largely inadequate, or requires significant manpower and is inefficient. For professional sample preparation and testing institutions, the daily sample volume can reach 30-40 pieces, so improving sample preparation efficiency and reducing manpower requirements is particularly important. Furthermore, due to the limitations of current technology... In the past, the success rate of sample thinning was calculated manually. However, the daily sample volume was large, and the observation was done manually with the naked eye. It was impossible to acquire and store thin area images at different stages, and the recording and statistical analysis of the thinning success rate was slow. On the other hand, after processing the sample, it was necessary to manually replace the unprocessed sample for the next sample thinning, which increased labor costs and reduced the efficiency of thinning. Therefore, further research was conducted to develop a fully automated system device for ion thinning instruments that could automatically fill the sample into the ion thinning instrument, improve the thinning efficiency, automatically remove the thinned sample, achieve unmanned operation, and quickly record and statistically analyze the thinning success rate, acquire and store thin area images at different stages.

[0025] refer to Figures 1 to 5 The fully automated system of the ion thinner 1 includes: ion thinner 1, automatic sample loading and unloading component 2, control module component 4, and automatic material replacement and recycling component 3. The automatic sample loading and unloading component 2 is fixed at the top of the ion thinner 1, and the automatic material replacement and recycling component 3 is fixed at the top of the ion thinner 1 away from the automatic sample loading and unloading component 2. The control module component 4 is wired to the ion thinner 1.

[0026] refer to Figure 2 and Figure 3The automatic sample loading and unloading component 2 includes a support frame 201 fixed to the top of the ion thinner 1. A fixing plate 202 is fixed to the bottom of the support frame 201. A rotating shaft 203 is inserted through one end of the fixing plate 202. A drive motor 204 is fixedly connected to the top of the rotating shaft 203. A first connecting plate 205 is fixed to the top and bottom of the rotating shaft 203. A first driving cylinder 206 is fixed to the top of the first connecting plate 205. A pneumatic vacuum suction cup 207 is sleeved at the bottom of the first driving cylinder 206. A vision camera 208 is fixedly fixed through the top of the support frame 201. A second sliding block 209 is fixed below the vision camera 208. The second slide block 209 is slidably connected to the second slider 210. A bracket 211 is fixed to the top of the second slider 210. A fifth drive cylinder 212 is fixedly fixed to the top of the bracket 211. A third connecting plate 213 is fixedly connected to the bottom of the fifth drive cylinder 212. A material suction cup 214 is fixedly connected to the bottom of the third connecting plate 213. A sixth drive cylinder 215 is fixedly connected to the side of the second slider 210. A support platform 14 is fixed to the side of the second slide block 209. A collecting plate 12 is fixed to the top of the support platform 14. A second infrared sensor 13 is embedded inside the third connecting plate 213. A first infrared sensor 5 is embedded inside the first connecting plate 205.

[0027] When using the ion thinning instrument 1, the samples to be thinned are manually placed into the first sample carrier plate 9 and the second sample carrier plate 15, respectively. Then, the drive motor 204 is manually started, causing the drive motor 204 to drive the rotating shaft 203 to rotate. Since the bottom end of the rotating shaft 203 is fixed with the first connecting plate 205, the rotation of the rotating shaft 203 will drive the first connecting plate 205 to rotate and change the angle. At the same time, the first drive cylinder 206 will also move together with the first connecting plate 205. When the first connecting plate 205 rotates to above the first sample carrier plate 9, the first infrared sensor 5 embedded in the first connecting plate 205 will transmit the signal of the sample sensed by the sensor to the electromagnetic sensor in the first drive cylinder 206 through the wire connection. The valve is switched on, causing the first drive cylinder 206 to start and extend / retract. This movement pushes the pneumatic vacuum suction cup 207, which is fitted to its bottom, downwards. The suction cup 207 then generates suction through the air supplied by the first drive cylinder 206, holding the sample to be thinned. Afterwards, the first infrared sensor 5 no longer detects the sample and transmits the signal back to the first drive cylinder 206, causing it to retract upwards. This retracts the first drive cylinder 206, moving the pneumatic vacuum suction cup 207 and the sample upwards. Then, the drive motor 204 is manually activated again, causing it to rotate the shaft 203 in the opposite direction. The rotation causes the second connecting plate 11 to move together with the first driving cylinder 206. When the first connecting plate 205 rotates to the thinning area of ​​the ion thinning instrument 1, its first driving cylinder 206 begins to extend downwards, causing the pneumatic vacuum suction cup 207 at the bottom of the first driving cylinder 206 to place the adsorbed sample into the thinning area. Then, the first driving cylinder 206 begins to retract. Afterwards, the driving motor 204 is manually started, causing the driving motor 204 to drive the rotating shaft 203 to return to its original position. At the same time, the operator manually starts the sixth driving cylinder 215, causing the sixth driving cylinder 215 to extend. Then, the sixth driving cylinder 215 extends and pushes the second slider 210 to slide in the second sliding groove block 209 towards the vision camera 208. A bracket 211 is fixed to the top of the second slider 210, and a fifth drive cylinder 212 is fixed through the top of the bracket 211. Therefore, the bracket 211 and the fifth drive cylinder 212 will move together with the second slider 210. Since a third connecting plate 213 is fixed to the bottom of the fifth drive cylinder 212, the third connecting plate 213 will also be manually activated when the fifth drive cylinder 212 is activated, causing the fifth drive cylinder 212 to retract. In turn, the fifth drive cylinder 212 drives the third connecting plate 213 to move up and down, so that the material suction cup 214 fixed to the bottom of the third connecting plate 213 can take out the thinned sample material through the up and down movement. Then, the sixth drive cylinder 215 is manually activated again to pull the second slider 210 back into the second slide block 209.The third connecting plate 213, the second infrared sensor 13, and the material-collecting suction cup 214 move together with the second slider 210. When the third connecting plate 213 is above the collecting plate 12, the second infrared sensor 13 embedded inside the third connecting plate 213 will detect the collecting plate through infrared light. The second infrared sensor 13 then transmits the detection signal through a wire connection to the solenoid valve switch in the fifth driving cylinder 212, causing the fifth driving cylinder 212 to extend downwards and place the sample held by the material-collecting suction cup 214 into the sample plate. Afterwards, batch observation is performed using the vision camera 208.

[0028] refer to Figure 2 and Figure 4 The automatic material replacement and recycling component 3 includes a first chute block 301 fixed to the top of the ion thinner 1. The first chute block 301 is slidably connected to a first slider 302. A first chute plate 303 is fixed to the top of the first slider 302. A first sample carrier plate 304 is slidably connected inside the first chute plate 303. A fixing post 305 is slidably connected to the top of the first sample carrier plate 304. A second connecting plate 306 is sleeved on the top of the fixing post 305. A pusher is fixed to the bottom of the second connecting plate 306. A moving rod 307 is fixedly connected to a second driving cylinder 309 at one end. A third driving cylinder 308 is fixedly fixed to the side of the first slider 302 and through one end of the support frame 201. A material changing trough plate 6 is fixed to the top of the support frame 201. The material changing trough plate 6 is slidably connected to the second sample carrier plate 7 inside. A fourth driving cylinder 10 is fixedly fixed through the side of the material changing trough plate 6. A push plate 9 is fixed to the top of the fourth driving cylinder 10. A recycling box 11 is fixed to the side of the first sliding trough plate 303.

[0029] After the above process has completed the sample thinning of the first sample carrier plate 304, the second drive cylinder 309 is manually activated to begin its telescopic movement. This causes the third drive cylinder 308 to extend and push the push rod 307 to move the second connecting plate 306 outward from the first sliding block 301. Simultaneously, as the second connecting plate 306 moves, it also drives the fixing post 305 outward from the first sliding block 301. Since the top of the first sample carrier plate 304 is slidably connected to the fixing post 305... Therefore, when the fixed column 305 moves, it will drive the first sample carrier plate 304 to move outward from the first sliding block 301 through friction, so that the first sample carrier plate 304 slides out from the inside of the first sliding block 301 and falls into the recycling box 11, waiting for the staff to collect it. The top of the support frame 201 is fixed with a material changing trough plate 6, which is slidably connected to the second sample carrier plate 7. The side of the material changing trough plate 6 is fixed with a fourth drive cylinder 10, and the top of the fourth drive cylinder 10 is fixed with a push plate 9. When there is no sample material in the first sample carrier plate 304, the pressure sensor 8 inside the first sample carrier plate 304 will transmit the sensed pressure signal through the wire to the solenoid valve switch in the third drive cylinder 308, which will open the cylinder. This will cause the third drive cylinder 308 to retract and slide the first slider 302 towards the material changing trough plate 6 inside the trough block. The third drive cylinder 308 will stop operating until the material changing trough plate 6 and the first trough plate 303 are engaged. Then, the fourth drive cylinder 10 will be manually activated to extend the pusher plate 9 and push the second sample carrier plate 7 in the material changing trough plate 6 into the first trough plate 303. Subsequently, the pressure sensor 8 will transmit the sensed pressure signal through the wire to the solenoid valve switch in the third drive cylinder 308, which will open the cylinder. This will cause the third drive cylinder 308 to extend and push the first slider 302 away from the material changing trough plate 6 inside the first trough block 301, thus separating the material changing trough plate 6 from the first trough plate 303 and achieving automatic material changing.

[0030] refer to Figure 1 and Figure 5 The control module component 4 includes a device control PLC system module 401 that is wired to the ion thinner 1. The device control PLC system module 401 is wired to the user interface module 402. The ion thinner 1 is wired to a visual recognition system module 403. The visual recognition system module 403 is wired to a visual algorithm platform 404, an IO communication card software module 405, and a light source control software module 406.

[0031] Operators can control the equipment control PLC system module 401 through the user interface module 402. The user interface module 402 is written in C#, uses the .NET framework, and runs on Win7 / 10 / 11 x64. It includes an account module for registering and creating different users and recording their parameter settings individually; a main interface displayed after an existing user logs in, containing buttons for displaying and setting the most commonly used instrument status parameters, including switching between automatic and manual operation modes; an operation panel interface for controlling most major actions of the equipment components in manual control mode; an alarm interface for recording alarms triggered by abnormal instrument operation and their specific recorded parameters, allowing for setting specific operating parameters for each mechanical axis and servo motor mechanism, or performing critical operations such as switching on / off and resetting each mechanism; and an equipment operation status interface for querying statistical results of the equipment's basic operating status. The equipment control PLC system module 401 primarily controls the operation of various hardware mechanisms, including the ion thinner 1, such as the first drive cylinder 206 and the second drive cylinder 13. The operation of the third driving cylinder 19, the fourth driving cylinder 16, the fifth driving cylinder 304, and the sixth driving cylinder 307, etc., is followed by the visual recognition system module 403 acquiring and recognizing the thinned sample through the visual camera 208 on the ion thinning instrument 1. The recognized data information is then input into the visual algorithm platform 404, the IO communication card software module 405, and the light source control software module 406 through the telecommunication connection. If the observed thinned sample is found to be dark, the brightness observed by the visual camera 208 can be increased by manually operating the light source control software module 406. The visual algorithm platform 404 mainly records and statistically analyzes the thinned sample data and the thinning success rate through the algorithm of the IO communication card software module 405. At the same time, the visual algorithm platform 404 acquires and stores thin area photos at different stages through the visual camera 208.

[0032] In the above embodiments, the first infrared sensor, pneumatic vacuum suction cup, pressure sensor, equipment control PLC system module, user interface module, visual recognition system module, visual algorithm platform, IO communication card software module, and light source control software module can be directly purchased and used in reality. In this embodiment, the first infrared sensor, pneumatic vacuum suction cup, pressure sensor, equipment control PLC system module, user interface module, visual recognition system module, visual algorithm platform, IO communication card software module, and light source control software module respectively adopt the models ESR-22N, ZPR, JHHM-H1, S7-1200, AOZ1282CI, K210, SNM920, A7670C, and MID-1401.

[0033] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fully automated system device for an ion thinning instrument, characterized in that, include: The ion thinner (1), the automatic sample loading and unloading assembly (2), the control module assembly (4), and the automatic material replacement and recycling assembly (3) are provided. The automatic sample loading and unloading assembly (2) is fixed at the top of the ion thinner (1), and the automatic material replacement and recycling assembly (3) is fixed at the top of the ion thinner (1) away from the automatic sample loading and unloading assembly (2). The control module assembly (4) is wired to the ion thinner (1).

2. The fully automated system device for an ion thinning apparatus according to claim 1, characterized in that, The automatic sample loading and unloading assembly (2) includes a support frame (201) fixed to the top of the ion thinner (1). A fixing plate (202) is fixed to the bottom of the support frame (201). A rotating shaft (203) is inserted through one end of the fixing plate (202). A drive motor (204) is fixedly connected to the top of the rotating shaft (203). A first connecting plate (205) is fixed to the top and bottom of the rotating shaft (203). A first driving cylinder (206) is fixed to the top of the first connecting plate (205). A pneumatic vacuum suction cup (207) is sleeved at the bottom of the first driving cylinder (206). The support frame (201) A vision camera (208) is fixed through the top of the device. A second sliding block (209) is fixed below the vision camera (208). The second sliding block (209) is slidably connected to the second slider (210). A bracket (211) is fixed at the top of the second slider (210). A fifth driving cylinder (212) is fixed through the top of the bracket (211). A third connecting plate (213) is fixedly connected to the bottom of the fifth driving cylinder (212). A material suction cup (214) is fixedly connected to the bottom of the third connecting plate (213). A sixth driving cylinder (215) is fixedly connected to the side of the second slider (210).

3. The fully automated system device for an ion thinning apparatus according to claim 2, characterized in that, The first connecting plate (205) has a first infrared sensor (5) embedded inside.

4. The fully automated system device for an ion thinning apparatus according to claim 1, characterized in that, The automatic material replacement and recycling assembly includes a first chute block (301) fixed to the top of the ion thinner (1). The first chute block (301) is slidably connected to the first slider (302). The top of the first slider (302) is fixed with a first chute plate (303). The first sample carrier plate (304) is slidably connected to the inside of the first chute plate (303). The top of the first sample carrier plate (304) is slidably connected with a fixing column (305). The top of the fixing column (305) is sleeved with a second connecting plate (306). The bottom of the second connecting plate (306) is fixed with a push rod (307). One end of the push rod (307) is fixedly connected with a second driving cylinder (309). The side of the first slider (302) and through one end of the support frame (201) are fixed with a third driving cylinder (308).

5. The fully automated system device for an ion thinning apparatus according to claim 2, characterized in that, The support frame (201) has a material changing trough plate (6) fixed at the top. The material changing trough plate (6) is slidably connected to the second sample carrier plate (7). A fourth driving cylinder (10) is fixed through the side of the material changing trough plate (6). A push plate (9) is fixed at the top of the fourth driving cylinder (10).

6. The fully automated system device for an ion thinning apparatus according to claim 1, characterized in that, The control module component (4) includes a device control PLC system module (401) that is wired to the ion thinner (1). The device control PLC system module (401) is wired to a user interface module (402). The ion thinner (1) is wired to a visual recognition system module (403). The visual recognition system module (403) is wired to a visual algorithm platform (404), an IO communication card software module (405), and a light source control software module (406).

7. The fully automated system device for an ion thinning apparatus according to claim 4, characterized in that, A pressure sensor (8) is embedded inside the first slide plate (8).

8. The fully automated system device for an ion thinning apparatus according to claim 4, characterized in that, A recycling box (11) is fixed to the side of the first chute plate (303).

9. The fully automated system device for an ion thinning apparatus according to claim 2, characterized in that, The second slide block (209) has a support platform (14) fixed on its side, and a collection plate (12) is fixed on the top of the support platform (14). The third connecting plate (213) has a second infrared sensor (13) embedded inside.

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