Scroll pump
By using a biasing mechanism with a flexible diaphragm and a preloaded spring in the vortex pump, the problems of fretting wear and radial clearance variation in the vortex pump seals are solved, resulting in higher sealing performance and pumping efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2026-04-14
AI Technical Summary
Existing vortex pumps are prone to fretting wear and radial clearance changes at the axial seal, resulting in poor sealing and affecting pumping efficiency and reliability.
The biasing mechanism, which combines a flexible diaphragm and a preloaded spring, supports the annular bearing through the flexible diaphragm, allowing the bearing to move axially. The preloaded spring provides axial biasing force, ensuring a tight seal and stability between the scroll plates.
It effectively reduces fretting wear, maintains the precise radial position between the scroll plates, reduces radial clearance changes, and improves sealing performance and pumping efficiency.
Smart Images
Figure CN121866408A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to vortex pumps. Background Technology
[0002] A scroll pump is a known type of pump used to pump fluids in a variety of industries. A scroll pump operates by using the relative motion of two meshing scroll discs (called a stationary scroll disc and a rotating scroll disc) to pump fluid. Each of the stationary and rotating scroll discs includes a helical wall extending from its base. In one type of scroll pump, the end of the helical wall of each scroll disc contacts an axial seal located at the base of the other scroll disc to seal the space used for pumping. Summary of the Invention
[0003] In one aspect of the invention, a scroll pump is provided, comprising: a rotating scroll disk; a fixed scroll disk; a drive shaft coupled to the rotating scroll disk, wherein the drive shaft is axially movable relative to the fixed scroll disk; an annular bearing coupled to the drive shaft for supporting the drive shaft and facilitating its rotation; a biasing mechanism arranged to provide a biasing force on the annular bearing, the biasing force acting via the annular bearing and the drive shaft to axially bias the rotating scroll disk and the fixed scroll disk together; and a diaphragm attached to the annular bearing to support the annular bearing, wherein the diaphragm is axially flexible to allow the annular bearing to move axially, thereby facilitating the axial mobility of the drive shaft relative to the fixed scroll disk.
[0004] The diaphragm can be rigid in the radial direction to resist the radial movement of the ring bearing.
[0005] The diaphragm can mechanically connect the annular bearing to the fixed scroll plate.
[0006] The diaphragm can mechanically connect the annular bearing to the housing of the vortex pump.
[0007] The vortex pump may include a first annular bearing and a second annular bearing, wherein both the first annular bearing and the second annular bearing extend about the drive shaft to support the drive shaft and facilitate its rotation.
[0008] The diaphragm mechanically connects the first annular bearing to the stationary scroll plate. The second annular bearing is mechanically connected to the housing portion of the scroll pump, allowing the second annular bearing to slide axially relative to the housing portion, thereby facilitating the axial movement of the drive shaft relative to the stationary scroll plate.
[0009] A diaphragm can mechanically connect the first annular bearing to the stationary scroll plate. A second annular bearing can be mechanically connected to the housing portion of the scroll pump via an additional diaphragm attached to support the second annular bearing. This additional diaphragm is flexible in the axial direction to allow the second annular bearing to move in the axial direction, thereby promoting the axial mobility of the drive shaft relative to the stationary scroll plate.
[0010] The biasing mechanism may include a preloaded spring.
[0011] In another aspect of the invention, a scroll pump is provided, comprising: a fixed scroll disk; a rotating scroll disk; an annular bearing coupled to the rotating scroll disk; a crank sleeve coupled to the annular bearing; and a drive shaft coupled to the crank sleeve, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk via the crank sleeve and the annular bearing, wherein the crank sleeve is axially movable relative to the drive shaft to allow axial movement of the rotating scroll disk relative to the fixed scroll disk; and a biasing mechanism arranged to provide a biasing force on the crank sleeve, the biasing force acting via the crank sleeve and the annular bearing to axially bias the rotating scroll disk and the fixed scroll disk together.
[0012] In another aspect of the invention, a scroll pump is provided, comprising: a fixed scroll disk; a rotating scroll disk; an annular bearing coupled to the rotating scroll disk; a crank sleeve coupled to the annular bearing; a drive shaft coupled to the crank sleeve, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk via the crank sleeve and the annular bearing, wherein the annular bearing is axially movable relative to the crank sleeve to allow axial movement of the rotating scroll disk relative to the fixed scroll disk; and a biasing mechanism arranged to provide a biasing force on the annular bearing to axially bias the rotating scroll disk and the fixed scroll disk together.
[0013] In another aspect of the invention, a scroll pump is provided, comprising: a fixed scroll disk; a rotating scroll disk; an annular bearing coupled to the rotating scroll disk; a drive shaft coupled to the annular bearing, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk via the annular bearing, wherein the rotating scroll disk is axially movable relative to the annular bearing to allow axial movement of the rotating scroll disk relative to the fixed scroll disk; and a biasing mechanism arranged to provide a biasing force on the rotating scroll disk to axially bias the rotating scroll disk and the fixed scroll disk together.
[0014] In another aspect of the invention, a scroll pump is provided, comprising: a fixed scroll disk; a rotating scroll disk; a drive shaft coupled to the rotating scroll disk, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk; wherein the fixed scroll disk is axially movable relative to the drive shaft, and the rotating scroll disk is axially fixed relative to the drive shaft, thereby allowing axial movement of the fixed scroll disk relative to the rotating scroll disk; and a biasing mechanism arranged to provide a biasing force on the fixed scroll disk to axially bias the rotating scroll disk and the fixed scroll disk together.
[0015] In yet another aspect of the invention, a vacuum pumping system is provided, comprising a vortex pump according to any of the above aspects.
[0016] In yet another aspect of the invention, the use of a vortex pump for pumping fluids according to any of the above aspects is provided. Attached Figure Description
[0017] Figure 1 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the first vortex pump. Figure 2 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the second vortex pump. Figure 3 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the third vortex pump. Figure 4 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the fourth vortex pump; and Figure 5 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the fifth vortex pump. Detailed Implementation
[0018] Figure 1 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the first vortex pump 100.
[0019] The first scroll pump 100 includes a housing portion 110, a fixed scroll plate 120, a rotating scroll plate 130, a drive shaft 140, an actuator 150, a first bearing assembly 160a, a second bearing assembly 160b, a third bearing assembly 160c, a diaphragm 170, a first channel seal 180a, a second channel seal 180b, a first preload spring 190a, and a second preload spring 190b.
[0020] In this embodiment, the housing portion 110 and the fixed scroll plate 120 together define an integral housing of the scroll pump 100, within which other components of the scroll pump 100 are located. However, it will be understood that in other embodiments, the fixed scroll plate 120 may not define any integral housing of the scroll pump 100, but may be entirely located within the integral housing. In this embodiment, the revolving scroll plate 130 is located within the integral housing of the scroll pump 100.
[0021] A rotating scroll plate 130 engages with a fixed scroll plate 120 to define a space (or passage) used by the scroll pump 100 to pump fluid (e.g., gas) during operation. The rotating scroll plate 130 is configured to rotate relative to the fixed scroll plate 120 to pump fluid from the inlet (not shown) of the scroll pump 100 to the outlet (not shown) of the scroll pump 100. The precise physical mechanism used to pump fluid by rotating the scroll plate 130 relative to the fixed scroll plate 120 is well known and will not be described herein.
[0022] The fixed scroll plate 120 includes a first base 122 and a first helical wall 124. The rotating scroll plate 130 includes a second base 132 and a second helical wall 134. The first helical wall 124 and the second helical wall 134 engage with each other. Furthermore, the first helical wall 124 extends perpendicularly from the first base 122 toward the second base 132 such that its end surface (also referred to as the tip) contacts the first channel seal 180a. The second helical wall 134 extends perpendicularly from the second base 132 toward the first base 122 such that its end surface (or tip) contacts the second channel seal 180b. In this way, the space between the helical walls 124 and 134 for pumping fluid is sealed to prevent radial leakage of fluid across the helical walls 124 and 134.
[0023] In this embodiment, the first base 122 and the first helical wall 124 are integrally formed with each other, and the second base 132 and the second helical wall 134 are integrally formed with each other. However, in other embodiments, one or both of the helical walls 124 and 134 are not integrally formed with their respective bases 122 and 132.
[0024] A drive shaft 140 is coupled to a rotating scroll plate 130 and configured to rotate to drive the rotation of the rotating scroll plate 130. The drive shaft 140 is located within the overall housing of the scroll pump 100 and is mounted via a main bearing assembly 160, which facilitates the rotation of the drive shaft 140. In this embodiment, the drive shaft 140 extends through both the fixed scroll plate 120 and the rotating scroll plate 130, with the rotating scroll plate 130 mounted at the end of the drive shaft 140.
[0025] An actuator 150 (e.g., an electric motor) is coupled to a drive shaft 140 and configured to actuate the drive shaft 140 to cause it to rotate, thereby driving the rotation of the scroll plate 130. The actuator 150 is located within the integral housing of the scroll pump 100 and is mounted around the drive shaft 140.
[0026] The first bearing 160a is an annular bearing mounted at the first end of the drive shaft 140. The second bearing 160b is an annular bearing mounted on the drive shaft 140 at a position between the first end and the second end of the drive shaft 140. In other words, the second bearing 160b is located axially between the first bearing 160a and the third bearing 160c. The third bearing 160c is an annular bearing mounted at the second end of the drive shaft 140. The first bearing 160a mechanically connects the rotating scroll 130 to the first end of the drive shaft 140. The second bearing 160b mechanically connects the stationary scroll 120 to the drive shaft 140. More specifically, the second bearing 160b mechanically connects the stationary scroll 120 to the drive shaft 140 via a diaphragm 170. The third bearing 160c mechanically connects the second end of the drive shaft 140 to the integral housing of the scroll pump 100.
[0027] A diaphragm 170 is attached to and surrounds the second bearing 160b to mechanically connect the second bearing 160b to the stationary scroll plate 120. The diaphragm 170 is attached to the stationary scroll plate 120 at its radially outer periphery. The diaphragm 170 extends circumferentially around the second bearing 160b to support the second bearing 160b in its position. In other words, the diaphragm 170 includes a bore, and the second bearing 160b is located within this bore, while being attached to the diaphragm 170 via the edge defining the bore. The diaphragm 170 supports the second bearing 160b while being flexible in the axial direction to allow axial movement of the second bearing 160b relative to the stationary scroll plate 120. The diaphragm 170 also has high radial stiffness to resist and / or prevent radial movement of the second bearing 160b. The ratio of radial stiffness to axial stiffness may be at least 10:1, preferably 100:1 or greater. The diaphragm 170 can be formed of, for example, steel or aluminum.
[0028] The first channel seal 180a is a helical seal located on the second base 132 of the rotating scroll plate 130. The first channel seal 180a is sandwiched between the end of the first helical wall 124 and the second base 132 to seal the space used for pumping fluid. The second channel seal 180b is a helical seal located on the first base 122 of the fixed scroll plate 120. Similar to the first channel seal 180a, the second channel seal 180b is sandwiched between the end of the second helical wall 134 and the first base 122 to seal the space used for pumping fluid.
[0029] In this embodiment, the third bearing 160c is mounted to the housing portion 110 in an inner bore, such that the third bearing 160c is axially slidable relative to the housing portion 110. This allows the third bearing 160c to move axially within the inner bore relative to the housing portion 110 and the fixed scroll plate 120. An O-ring is positioned around the third bearing 160c within the inner bore between the third bearing 160c and the housing portion 110 to center the third bearing 160c within the inner bore and reduce noise caused by the movement of the third bearing 160c. Since both the second bearing 160b and the third bearing 160c are axially movable, this allows the drive shaft 140 to move axially, which in turn allows axial movement about the scroll plate 130.
[0030] In this embodiment, the scroll pump 100 further includes a first preload spring 190a and a second preload spring 190b. The first preload spring 190a is arranged to cause a preload force acting on a second bearing 160b, which pulls the rotating scroll 130 axially toward the fixed scroll 120. The second preload spring 190b is arranged to cause a preload force acting on a third bearing 160c, which pulls the rotating scroll 130 axially toward the fixed scroll 120. In this embodiment, the first preload spring 190a is located axially between the fixed scroll 120 and the second bearing 160b, and the second preload spring 190b is located axially between the housing portion 110 and the third bearing 160c. This preload force, combined with the axial mobility of the drive shaft 140, allows the rotating scroll 130 and the fixed scroll 120 to be precisely offset together to maintain a tight seal.
[0031] Advantageously, the use of the diaphragm 180 tends to avoid fretting wear problems that occur in other mechanisms that allow the bearing to move axially (e.g., the sliding mechanism described for the third bearing 160c).
[0032] Advantageously, due to the high radial stiffness of the diaphragm 180, the use of the diaphragm 180 tends to enable very precise radial positioning of the rotating scroll 130. The diaphragm 180 eliminates radial movement of the drive shaft 140 in the plane of the second bearing 160b, which in turn reduces variations in the radial clearance between the scrolls and allows for the use of smaller radial clearances.
[0033] Advantageously, the flexibility of the diaphragm 180 allows the second bearing 160b to tilt and be fully aligned with the drive shaft 140. Therefore, the third bearing 160c and the housing portion 200 can be repositioned by radially moving them without stressing the second bearing 160b.
[0034] In another embodiment (not shown), instead of being supported via the sliding mechanism described above, the third bearing 160c is supported by a diaphragm in the same manner as the second bearing 160b. In other words, in this embodiment, the vortex pump 100 includes an additional diaphragm located between the third bearing 160c and the housing portion 110. This additional diaphragm is attached to and surrounds the third bearing 160c to mechanically connect it to the housing portion 110. This additional diaphragm supports the third bearing 160c while being flexible in the axial direction to allow axial movement of the third bearing 160c relative to the housing portion 110. This additional diaphragm also has high radial stiffness to counteract and / or prevent radial movement of the third bearing 160c.
[0035] Figure 2 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the second vortex pump 200.
[0036] The second scroll pump 200 includes a housing portion 210, a fixed scroll plate 220, a rotating scroll plate 230, a drive shaft 240, an actuator 250, a first bearing assembly 260a, a second bearing assembly 260b, a third bearing assembly 260c, a slidable crank sleeve 270, a first channel seal 280a, a second channel seal 280b, a first preload spring 290a, and a second preload spring 290b.
[0037] Figure 2 Implementation examples and Figure 1 The embodiments are the same, except that instead of having a diaphragm 170, the second vortex pump 200 includes an axially movable crank sleeve 270, and Figure 2 The first preloaded spring 290a is located at the same position as Figure 1 The first preloaded spring 190a is in different positions.
[0038] It will be understood that the housing portion 210, the fixed scroll plate 220, the rotating scroll plate 230, the drive shaft 240, the actuator 250, the first bearing assembly 260a, the second bearing assembly 260b, the third bearing assembly 260c, the first channel seal 280a, the second channel seal 280b, and the second preloaded spring 290b respectively correspond to Figure 1 The elements labeled 110, 120, 130, 140, 150, 160a, 160b, 160c, 180a, 180b, and 190b in the embodiments, and therefore have the same Figure 1 The corresponding elements described herein have the same or similar structure and / or function.
[0039] Crank sleeve 270 is a component present in the scroll pump that provides crank offset to the rotational path of the scroll disk 230 around the scroll pump 200. Crank sleeve 270 extends about drive shaft 240 and is coupled to the scroll disk 230 via a first bearing 260a. Crank sleeve 270 is an eccentric member having a center of rotation parallel to but radially offset from the axis of rotation of drive shaft 240, in order to provide crank offset for the rotation of the scroll disk 230.
[0040] In this embodiment, the crank sleeve 270 is axially movable (or slidable) relative to the drive shaft 240 to allow axial movement of the rotating scroll plate 230 relative to the fixed scroll plate 220. Specifically, the crank sleeve 270 is attached to a first bearing 260a, and the first bearing 260a is attached to the rotating scroll plate 230. Therefore, axial movement of the crank sleeve 270 causes axial movement of the rotating scroll plate 230 via the attachment of the rotating scroll plate 230 to the first bearing 260a and the attachment of the first bearing 260a to the crank sleeve 270. In this embodiment, the second bearing 260b is fixed, and the first bearing 260a is movable.
[0041] A first preloaded spring 290a is arranged to provide an axial biasing force on the crank sleeve 270, which acts through the crank sleeve 270 and the first bearing 260a to bias the rotating scroll 230 toward the fixed scroll 220. In this embodiment, the first preloaded spring 290a extends axially between a shoulder portion of the drive shaft 240 (e.g., a clamping disc at the end of the drive shaft 240) and the crank sleeve 270. Because the crank sleeve 270 is axially movable relative to the drive shaft 240, a specific biasing force provided by the first preloaded spring 290a can be selected to maintain the stability of the rotating scroll 230 and provide a tight seal between the fixed scroll 220 and the rotating scroll 230.
[0042] Figure 3 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the third vortex pump 300. The third scroll pump 300 includes a housing portion 310, a fixed scroll plate 320, a rotating scroll plate 330, a drive shaft 340, an actuator 350, a first bearing assembly 360a, a second bearing assembly 360b, a third bearing assembly 360c, a crank sleeve 370, a first channel seal 380a, a second channel seal 380b, a first preload spring 390a, and a second preload spring 390b.
[0043] Figure 3 Implementation examples and Figure 2The embodiments are the same, except that, instead of the crank sleeve being slidable relative to the drive shaft, the first bearing 360a is slidable relative to the crank sleeve 370. Furthermore, with... Figure 2 Compared to the first preloaded spring, the first preloaded spring 390a is in a different position.
[0044] It will be understood that the housing portion 310, the fixed scroll plate 320, the rotating scroll plate 330, the drive shaft 340, the actuator 350, the first bearing assembly 360a, the second bearing assembly 360b, the third bearing assembly 360c, the first channel seal 380a, the second channel seal 380b, and the second preloaded spring 390b respectively correspond to Figure 1 The elements labeled 110, 120, 130, 140, 150, 160a, 160b, 160c, 180a, 180b, and 190b in the embodiments, and therefore have the same Figure 1 The corresponding elements described herein have the same or similar structure and / or function.
[0045] exist Figure 3 In this embodiment, the crank sleeve 370 is fixed relative to the drive shaft 340, and the first bearing 360a is axially movable (or slidable) relative to the crank sleeve 370. More specifically, the first bearing 360a is axially movable on the crank pin of the crank sleeve 370. The first bearing 360a is attached to the rotating scroll plate 330. Therefore, axial movement of the first bearing 360a on the crank sleeve 370 causes axial movement of the rotating scroll plate 330 via the attachment of the first bearing 260a to the rotating scroll plate 330.
[0046] A first preloaded spring 390a is arranged to provide an axial biasing force on a first bearing 360a, which acts via the first bearing 360a to bias the rotating scroll 330 toward the fixed scroll 320. In this embodiment, the first preloaded spring 390a extends axially between a shoulder portion of the crank sleeve 370 and the first bearing 360a. Because the first bearing 360a is axially movable relative to the crank sleeve 370, a specific biasing force provided by the first preloaded spring 390a can be selected to maintain the stability of the rotating scroll 330 and provide a tight seal between the fixed scroll 320 and the rotating scroll 330.
[0047] Figure 4 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the fourth vortex pump 400.
[0048] The fourth scroll pump 400 includes a housing portion 410, a fixed scroll plate 420, a rotating scroll plate 430, a drive shaft 440, an actuator 450, a first bearing assembly 460a, a second bearing assembly 460b, a third bearing assembly 460c, a crank sleeve 470, a first channel seal 480a, a second channel seal 480b, a first preload spring 490a, and a second preload spring 490b.
[0049] Figure 4 Implementation examples and Figure 3 The embodiments are the same, except that the first bearing is slidable relative to the crank sleeve, and the swirling scroll 430 is slidable relative to the first bearing 460a. Furthermore, with... Figure 3 Compared to the first preloaded spring, the first preloaded spring 490a is in a different position.
[0050] It will be understood that the housing portion 410, the fixed scroll plate 420, the rotating scroll plate 430, the drive shaft 440, the actuator 450, the first bearing assembly 460a, the second bearing assembly 460b, the third bearing assembly 460c, the first channel seal 480a, the second channel seal 480b, and the second preloaded spring 490b respectively correspond to Figure 1 The elements labeled 110, 120, 130, 140, 150, 160a, 160b, 160c, 180a, 180b, and 190b in the embodiments, and therefore have the same Figure 1 The corresponding elements described herein have the same or similar structure and / or function.
[0051] exist Figure 4 In one embodiment, the first bearing 460a is fixed relative to the crank sleeve 470, and the scroll plate 430 about the first bearing 460a is axially movable (or slidable) relative to the first bearing 460a. Therefore, axial movement of the scroll plate 430 about the first bearing 460a causes axial movement of the scroll plate 430 about the fixed scroll plate 420.
[0052] A first preloaded spring 490a is arranged to provide an axial biasing force on the rotating scroll disk 430, which acts on the base 432 of the rotating scroll disk 430 to bias the rotating scroll disk 430 toward the fixed scroll disk 420. In this embodiment, the first preloaded spring 490a extends axially between the first bearing 460a and the base 432 of the rotating scroll disk 430. Since the rotating scroll disk 430 is axially movable relative to the first bearing 460a, a specific biasing force provided by the first preloaded spring 490a can be selected to maintain the stability of the rotating scroll disk 430 and provide a tight seal between the fixed scroll disk 420 and the rotating scroll disk 430.
[0053] Figure 5 This is a schematic illustration (not drawn to scale) showing a cross-sectional view of the fifth vortex pump 500.
[0054] The fifth scroll pump 500 includes a housing portion 510, a fixed scroll plate 520, a rotating scroll plate 530, a drive shaft 540, an actuator 550, a first bearing assembly 560a, a second bearing assembly 560b, a third bearing assembly 560c, a crank sleeve 570, a first channel seal 580a, a second channel seal 580b, a first preload spring 590a, and a second preload spring 590b.
[0055] Figure 5 Implementation examples and Figure 4 The embodiment is the same, except that instead of the rotating scroll plate being slidable relative to the first bearing, the fixed scroll plate 520 is slidable relative to the housing portion 510. More specifically, the fixed scroll plate 520 is slidable relative to the housing portion 510 of the motor body constituting the scroll pump 100 (i.e., a portion of the overall housing containing the actuator 550, which may be a motor). Furthermore, with... Figure 4 Compared to the first preloaded spring, the first preloaded spring 590a is in a different position.
[0056] It will be understood that the housing portion 510, the fixed scroll plate 520, the rotating scroll plate 530, the drive shaft 540, the actuator 550, the first bearing assembly 560a, the second bearing assembly 560b, the third bearing assembly 560c, the first channel seal 580a, the second channel seal 580b, and the second preloaded spring 590b respectively correspond to Figure 1 The elements labeled 110, 120, 130, 140, 150, 160a, 160b, 160c, 180a, 180b, and 190b in the embodiments, and therefore have the same Figure 1 The corresponding elements described herein have the same or similar structure and / or function.
[0057] exist Figure 5 In one embodiment, the fixed scroll plate 520 is axially movable (or slidable) relative to the motor body 510, and the rotating scroll plate 530 is fixed relative to the drive shaft 540, such that the fixed scroll plate 520 is axially movable relative to the rotating scroll plate 530.
[0058] A first preloaded spring 590a is arranged to provide an axial biasing force on the fixed scroll plate 520, which acts through the base 522 of the fixed scroll plate 520 to bias the fixed scroll plate 520 toward the rotating scroll plate 530. In this embodiment, the first preloaded spring 590a extends axially between the housing portion 510 and the base 522 of the fixed scroll plate 520. Since the fixed scroll plate 520 is axially movable relative to the drive shaft 540, a specific biasing force provided by the first preloaded spring 590a can be selected to maintain the stability of the rotating scroll plate 530 and provide a tight seal between the fixed scroll plate 520 and the rotating scroll plate 530.
[0059] Advantageously, Figure 5 Examples of this technology often avoid fretting wear on the scroll bearings because axial movement is performed on the fixed scroll side rather than the scroll side.
[0060] Advantageously, it will be understood that all the scroll pumps described herein offer different alternative methods of biasing the stationary scroll plate and the rotating scroll plate together to provide a tight seal between the stationary scroll plate and the rotating scroll plate while maintaining radial stability.
[0061] The aforementioned vortex pump 100 can be used as part of a vacuum pumping system that includes multiple pumps and / or other components.
[0062] It will be understood that various modifications / deviations can be made to the embodiments described above without departing from the scope of the invention. For example, Figures 1 to 5 In the embodiments, the positions of the fixed scroll plate and the rotating scroll plate are all in the so-called "reverse" design of a scroll pump, wherein the rotating scroll plate is located at the end of the drive shaft, and the drive shaft extends through the fixed scroll plate to reach the rotating scroll plate. However, it will be understood that a so-called "forward" design can be used instead, wherein the fixed scroll plate is located on the opposite side of the rotating scroll plate, and the drive shaft does not extend through the fixed scroll plate. Furthermore, in Figures 1 to 5 In the embodiments described, a preloaded spring is used to provide the axial biasing force(s), but it will be understood that, in general, any suitable biasing mechanism can be used to provide the axial biasing force(s). Furthermore, in Figure 1 , Figure 3 , Figure 4 and Figure 5 In one embodiment, the crank sleeve on which the first bearing (rotating scroll bearing) is mounted may or may not be integrally formed with the drive shaft.
[0063] List of reference numerals 100, 200, 300, 400, 500: Vortex pumps 110, 210, 310, 410, 510: Shell 120, 220, 320, 420, 520: Fixed scroll plate 122, 222, 322, 422, 522: Base of the fixed scroll disk 124, 224, 324, 424, 524: Spiral walls of fixed scroll disks 130, 230, 330, 430, 530: Rotating vortex disk 132, 232, 332, 432, 532: Base of the rotating vortex disk 134, 234, 334, 434, 534: The spiral wall of the rotating vortex disk. 140, 240, 340, 440, 540: Drive shaft 150, 250, 350, 450, 550: Actuators 160, 260, 360, 460, 560: Main bearing assembly 160a, 260a, 360a, 460a, 560a: First bearing 160b, 260b, 360b, 460b, 560b: Second bearing 160c, 260c, 360c, 460c, 560c: Third bearing 170: Diaphragm 270, 370, 470, 570: Crank sleeve.
Claims
1. A vortex pump, comprising: Fixed scroll plate; Rotating vortex disk; An annular bearing, which is connected to the rotating scroll disk; A crank sleeve, which is connected to the annular bearing; as well as A drive shaft connected to the crank sleeve, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk via the crank sleeve and the annular bearing, wherein the crank sleeve is axially movable relative to the drive shaft to allow axial movement of the rotating scroll disk relative to the stationary scroll disk; and A biasing mechanism is arranged to provide a biasing force on the crank sleeve, the biasing force acting via the crank sleeve and the annular bearing to axially bias the rotating scroll and the stationary scroll together.
2. The vortex pump according to claim 1, wherein, The biasing mechanism includes a preloaded spring.
3. The vortex pump according to claim 1 or claim 2, wherein, The biasing mechanism extends between the crank sleeve and the shoulder portion of the drive shaft.
4. A vortex pump, comprising: Rotating vortex disk; Fixed scroll plate; A drive shaft is connected to the rotating scroll disk, wherein the drive shaft is movable relative to the fixed scroll disk in the axial direction; An annular bearing is connected to the drive shaft to support the drive shaft and facilitate its rotation; A biasing mechanism arranged to provide a biasing force on the annular bearing, the biasing force acting via the annular bearing and the drive shaft to axially bias the revolving scroll disk and the stationary scroll disk together; and A diaphragm is attached to the annular bearing to support it, wherein the diaphragm is flexible along the axial direction to allow the annular bearing to move along the axial direction, thereby promoting the mobility of the drive shaft relative to the fixed scroll plate along the axial direction.
5. The vortex pump according to claim 4, wherein, The diaphragm is rigid in the radial direction to resist movement of the annular bearing in the radial direction.
6. The vortex pump according to claim 4 or claim 5, wherein, The diaphragm mechanically connects the annular bearing to the fixed scroll plate.
7. The vortex pump according to any one of claims 4 to 6, wherein, The diaphragm mechanically connects the annular bearing to the housing portion of the vortex pump.
8. The vortex pump according to any one of claims 4 to 7, wherein, The vortex pump includes a first annular bearing and a second annular bearing, wherein both the first annular bearing and the second annular bearing extend around the drive shaft to support the drive shaft and facilitate its rotation.
9. The vortex pump according to claim 8, wherein: The diaphragm mechanically connects the first annular bearing to the fixed scroll disk, and The second annular bearing is mechanically connected to the housing portion of the vortex pump, allowing the second annular bearing to slide relative to the housing portion in the axial direction, thereby facilitating the mobility of the drive shaft relative to the fixed vortex disk in the axial direction.
10. The vortex pump according to claim 8, wherein: The diaphragm mechanically connects the first annular bearing to the fixed scroll disk, and The second annular bearing is mechanically connected to the housing portion of the vortex pump via an additional diaphragm attached to support the second annular bearing. The additional diaphragm is flexible along the axial direction to allow the second annular bearing to move along the axial direction, thereby facilitating the mobility of the drive shaft relative to the fixed vortex disk along the axial direction.
11. The vortex pump according to any one of claims 4 to 10, wherein, The biasing mechanism includes a preloaded spring.
12. A vortex pump, comprising: Fixed scroll plate; Rotating vortex disk; An annular bearing, which is connected to the rotating scroll disk; A crank sleeve, which is connected to the annular bearing; A drive shaft is connected to the crank sleeve, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk via the crank sleeve and the annular bearing. Wherein, the annular bearing is axially movable relative to the crank sleeve to allow axial movement of the revolving scroll disk relative to the fixed scroll disk; and A biasing mechanism is arranged to provide a biasing force on the annular bearing to axially bias the revolving scroll disk and the fixed scroll disk together.
13. A vortex pump, comprising: Fixed scroll plate; Rotating vortex disk; An annular bearing, which is connected to the rotating scroll disk; A drive shaft is connected to the annular bearing, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk via the annular bearing. Wherein, the revolving scroll disk is axially movable relative to the annular bearing to allow axial movement of the revolving scroll disk relative to the fixed scroll disk; and A biasing mechanism is arranged to provide a biasing force on the rotating scroll disk to axially bias the rotating scroll disk and the fixed scroll disk together.
14. A vortex pump, comprising: Fixed scroll plate; Rotating vortex disk; A drive shaft is connected to the rotating scroll disk, wherein the drive shaft is arranged to drive the rotation of the rotating scroll disk; The fixed scroll plate is axially movable relative to the drive shaft, and the revolving scroll plate is axially fixed relative to the drive shaft, thereby allowing axial movement of the fixed scroll plate relative to the revolving scroll plate; and A biasing mechanism is arranged to provide a biasing force on the fixed scroll disk to axially bias the rotating scroll disk and the fixed scroll disk together.
15. A vacuum pumping system comprising a vortex pump according to any one of the preceding claims.