Beam detection circuit and method of ion implanter and adjusting device

Abstract

The invention discloses an ion implanter beam detection circuit and method and an adjusting device, and the circuit comprises an input conditioning unit which is used for receiving a differential analog signal of an ion implanter beam; converting the received differential analog signal into a corresponding single-ended signal; performing filtering processing on the single-ended signal to obtain an alternating signal in the single-ended signal; carrying out amplification processing on the alternating signal; the absolute value taking unit is coupled with the input conditioning unit and is used for carrying out absolute value taking processing on the amplified alternating signal to obtain a corresponding absolute value voltage; and comparing the absolute value voltage with a preset threshold voltage to obtain a corresponding GLITCH signal detection result. According to the technical scheme, the detection efficiency of the GLITCH signal of the beam of the ion implanter can be improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to an ion implanter beam current detection circuit, method and adjustment device. Background Technology

[0002] Ion implantation is a material modification method that introduces dopant atoms into a solid. In a vacuum system, an ion implanter uses an ion implanter to irradiate a solid material with an accelerated ion beam containing the atoms to be doped. The ion beam interacts with the atoms or molecules in the solid material through a series of physical and chemical processes. The incident ions gradually lose energy and eventually remain within the material, causing changes in the material's surface composition, structure, and properties. This results in the formation of a surface layer with specific properties in the selected area, thereby optimizing the material's surface properties or acquiring new and superior properties.

[0003] The ion source is the main component of an ion implanter, its function being to ionize the gaseous particles of the element to be implanted. Electrons generated by DC or high-frequency discharge from the ion source serve as bombardment particles, which are accelerated to obtain a high-energy ion beam. Under these operating conditions, sparking frequently occurs, causing beam interruption and affecting the ion implantation effect.

[0004] Therefore, how to quickly detect the GLITCH signal in the ion implanter beam has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] The problem solved by the embodiments of the present invention is to provide an ion implanter beam detection circuit, method and adjustment device that can improve the detection speed of GLITCH signal in ion implanter beam.

[0006] To address the above problems, embodiments of the present invention provide an ion implanter beam current detection circuit, comprising:

[0007] An input conditioning unit is used to receive the differential analog signal from the ion implanter beam; convert the received differential analog signal into a corresponding single-ended signal; filter the single-ended signal to obtain the alternating signal in the single-ended signal; and amplify the alternating signal.

[0008] An absolute value unit, coupled to the input conditioning unit, is used to perform absolute value processing on the amplified alternating signal to obtain the corresponding absolute value voltage; the absolute value voltage is compared with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

[0009] Optionally, the input conditioning unit includes:

[0010] The signal conversion module is used to receive the differential analog signal of the ion implanter beam and convert the received differential analog signal into a corresponding single-ended signal.

[0011] A filtering module, coupled to the signal conversion module, is used to filter the single-ended signal to obtain the alternating signal in the single-ended signal;

[0012] The signal amplification module, coupled to the filtering module, is used to amplify the alternating signal.

[0013] Optionally, the signal conversion module includes a first differential amplifier;

[0014] The non-inverting input of the first differential amplifier is used to receive the first differential signal in the differential analog signal, and the inverting input of the first differential amplifier is used to receive the second differential signal in the differential analog signal. The output of the first differential amplifier is coupled to the filtering module and is used to output the single-ended signal.

[0015] Optionally, the filtering module includes:

[0016] A second-order low-pass filter is coupled to the output of the signal conversion module and is used to perform second-order low-pass filtering on the single-ended signal.

[0017] A high-pass filter, coupled to the output of the signal conversion module, is used to perform high-pass filtering on the single-ended signal.

[0018] Optionally, the second-order low-pass filter includes a first resistor, a second resistor, a first capacitor, and a second capacitor;

[0019] The first end of the first resistor is coupled to the output end of the signal conversion module, the second end of the first resistor is coupled to the first end of the second resistor and the first end of the first capacitor, the second end of the second resistor is coupled to the first end of the second capacitor, and the second end of the first capacitor is grounded to the second end of the second capacitor.

[0020] Optionally, the high-pass filter includes a third capacitor and a third resistor;

[0021] The first terminal of the third capacitor is coupled to the output terminal of the second-order low-pass filter, the second terminal of the third capacitor is coupled to the first terminal of the third resistor, and the second terminal of the third resistor is grounded.

[0022] Optionally, the signal amplification module includes a second differential amplifier;

[0023] The non-inverting input of the second differential amplifier is used to receive the single-ended signal, the inverting input of the second differential amplifier is grounded, and the output of the second differential amplifier serves as the output of the input conditioning unit.

[0024] Optionally, the input conditioning unit further includes at least one of the following:

[0025] A transient voltage suppression module is used to perform transient voltage suppression processing on the differential analog signal;

[0026] The first low-pass filter module is used to perform a first low-pass filter process on the differential analog signal;

[0027] The second low-pass filter module is used to perform a second low-pass filter processing on the differential analog signal;

[0028] The clamping protection module is used to clamp the voltage of the differential analog signal within a preset safe voltage range.

[0029] Optionally, the transient voltage suppression module includes a first transient diode and a second transient diode;

[0030] The first terminal of the first transient diode is used to receive the first differential signal in the differential analog signal, and the second terminal of the first transient diode is grounded;

[0031] The first terminal of the second transient diode is used to receive the second differential signal in the differential analog signal, and the second terminal of the second transient diode is grounded.

[0032] Optionally, the first low-pass filter module includes a first inductor and a second inductor;

[0033] The first end of the first inductor serves as the first input end of the first low-pass filter module, used to receive the first differential signal in the differential analog signal, and the second end of the first inductor serves as the first output end of the first low-pass filter module.

[0034] The first end of the second inductor serves as the second input terminal of the first low-pass filter module, used to receive the second differential signal in the differential analog signal, and the second end of the second inductor serves as the second output terminal of the first low-pass filter module.

[0035] Optionally, the second low-pass filter module includes a fourth resistor, a fifth resistor, a fourth capacitor, a fifth capacitor, and a sixth capacitor;

[0036] The first end of the fourth resistor serves as the first input terminal of the second low-pass filter module, used to receive the first differential signal in the differential analog signal. The second end of the fourth resistor is coupled to the first end of the fourth capacitor, the first end of the sixth capacitor, and the first differential signal input terminal of the signal conversion module. The second end of the fourth capacitor is grounded.

[0037] The first end of the fifth resistor serves as the second input terminal of the second low-pass filter module, used to receive the second differential signal in the differential analog signal. The second end of the fifth resistor is coupled to the first end of the fifth capacitor, the second end of the sixth capacitor, and the second differential signal input terminal of the signal conversion module. The second end of the fifth capacitor is grounded.

[0038] Optionally, the clamping protection module includes a first clamping diode, a second clamping diode, a third clamping diode, and a fourth clamping diode;

[0039] The first terminal of the first clamping diode is used to receive the first power supply voltage signal. The second terminal of the first clamping diode is coupled to the first terminal of the second clamping diode and the first differential signal input terminal of the signal conversion module. The second terminal of the second clamping diode is used to receive the second power supply voltage signal. The second power supply voltage signal and the first power supply voltage signal are differential voltage signals.

[0040] The first terminal of the third clamping diode is used to receive the first power supply voltage signal. The second terminal of the third clamping diode is coupled to the first terminal of the fourth clamping diode and the second differential signal input terminal of the signal conversion module. The second terminal of the fourth clamping diode is used to receive the second power supply voltage signal.

[0041] Optionally, the absolute value unit includes:

[0042] The absolute value module is used to perform absolute value processing on the amplified alternating signal to obtain the corresponding absolute value voltage.

[0043] The comparison module is used to compare the absolute voltage with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

[0044] Optionally, the absolute value module includes a first operational amplifier, a second operational amplifier, a sixth to a tenth resistor, a first diode, and a second diode;

[0045] The non-inverting input terminal of the first operational amplifier is grounded, the inverting input terminal of the first operational amplifier is coupled to the first terminal of the sixth resistor, the first terminal of the seventh resistor, and the second terminal of the first diode, the output terminal of the first operational amplifier is coupled to the first terminal of the first diode and the second terminal of the second diode, the second terminal of the sixth resistor is coupled to the first terminal of the eighth resistor and serves as the input terminal of the absolute value module, and the second terminal of the seventh resistor is coupled to the first terminal of the second diode and the first terminal of the ninth resistor.

[0046] The non-inverting input terminal of the second operational amplifier is grounded, and the inverting input terminal of the second operational amplifier is coupled to the second terminal of the eighth resistor, the second terminal of the ninth resistor, and the first terminal of the tenth resistor. The output terminal of the second operational amplifier is coupled to the second terminal of the tenth resistor and serves as the output terminal of the absolute value module.

[0047] Optionally, the comparison module includes a comparator, a third operational amplifier, an eleventh resistor, a twelfth resistor, a variable resistor, a seventh capacitor, and an eighth capacitor;

[0048] The non-inverting input terminal of the comparator is coupled to the first terminal of the eleventh resistor and the first terminal of the seventh capacitor, the inverting input terminal of the comparator is coupled to the first terminal of the twelfth resistor and the first terminal of the eighth capacitor, the output terminal of the comparator serves as the output terminal of the comparator module, the second terminal of the seventh capacitor and the second terminal of the eighth capacitor are grounded, and the second terminal of the twelfth resistor serves as the input terminal of the comparator module.

[0049] The non-inverting input terminal of the third operational amplifier is coupled to the sliding terminal of the variable resistor, and the inverting input terminal of the third operational amplifier is coupled to the output terminal of the third operational amplifier and the second terminal of the eleventh resistor; the first terminal of the variable resistor is used to receive the third power supply voltage signal, and the second terminal of the variable resistor is grounded.

[0050] Accordingly, embodiments of the present invention also provide an ion implanter beam current adjustment device, comprising:

[0051] The signal detection unit is used to acquire the corresponding GLITCH signal detection result using the ion implanter beam detection circuit as described in any of the above items.

[0052] The signal transmission unit is used to transmit the corresponding GLITCH signal detection result to the beam adjustment circuit when the GLITCH signal detection result indicates that a GLITCH signal exists in the beam of the ion implanter.

[0053] The beam adjustment unit is used to adjust the beam current of the ion implanter based on the detection result of the GLITCH signal.

[0054] Optionally, the signal transmission unit includes:

[0055] The interface driver module is used to generate corresponding drive signals based on the detection results of the corresponding GLITCH signals.

[0056] The signal transmission module, coupled to the interface driving module, is used to transmit the corresponding GLITCH signal detection result to the beam adjustment unit under the drive signal.

[0057] Optionally, the interface driver module includes a thirteenth resistor, an OR gate, and a fourteenth resistor;

[0058] The first end of the thirteenth resistor serves as the input terminal of the interface driver module. The second end of the thirteenth resistor is coupled to the first input terminal and the second input terminal of the OR gate. The output terminal of the OR gate is coupled to the first end of the fourteenth resistor. The second end of the fourteenth resistor serves as the output terminal of the interface driver module.

[0059] Optionally, the signal transmission module includes an optical fiber transmitter chip;

[0060] The input terminal of the optical fiber transmitting chip serves as the input terminal of the signal transmission module, and the output terminal of the optical fiber transmitting chip serves as the output terminal of the signal transmission module.

[0061] Optionally, the signal transmission module further includes a filtering module, coupled to the interface driver module, for filtering the GLITCH signal detection result.

[0062] Optionally, the filtering module includes a fifteenth resistor and a Schmitt filter;

[0063] The first end of the fifteenth resistor is used to receive the fourth power supply voltage signal, the second end of the fifteenth resistor is coupled to the input end of the Schmitt filter and is used as the input end of the filtering module, and the output end of the Schmitt filter is used as the output end of the filtering module.

[0064] Accordingly, this invention also provides a method for detecting beam current in an ion implanter, comprising: receiving a differential analog signal from an ion implanter beam; converting the received differential analog signal into a corresponding single-ended signal; filtering the single-ended signal to obtain an alternating signal in the single-ended signal; amplifying the alternating signal; taking the absolute value of the amplified alternating signal to obtain a corresponding absolute voltage; and comparing the absolute voltage with a preset threshold voltage to obtain a corresponding GLITCH signal detection result.

[0065] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages:

[0066] The ion implanter beam detection circuit provided in this embodiment of the invention includes: an input conditioning unit for receiving a differential analog signal from the ion implanter beam; converting the received differential analog signal into a corresponding single-ended signal; filtering the single-ended signal to obtain an alternating signal in the single-ended signal; amplifying the alternating signal; and an absolute value unit coupled to the input conditioning unit for performing absolute value processing on the amplified alternating signal to obtain a corresponding absolute value voltage; and comparing the absolute value voltage with a preset threshold voltage to obtain a corresponding GLITCH signal detection result.

[0067] The ion implanter beam detection circuit provided in this embodiment of the invention uses an input conditioning unit and an absolute value taking unit to obtain the GLITCH signal detection result of the ion implanter beam. Compared with the GLITCH signal detection result of the ion implanter beam obtained by software program, it can improve the detection efficiency of the GLITCH signal of the ion implanter beam. Attached Figure Description

[0068] Figure 1 This is a schematic diagram of an embodiment of the beam detection circuit for an ion implanter provided by the technical solution of the present invention;

[0069] Figure 2 This is a circuit structure diagram of an embodiment of the input conditioning unit in the technical solution of the present invention;

[0070] Figure 3 This is a circuit structure diagram of an embodiment of the absolute value taking unit in the technical solution of the present invention;

[0071] Figure 4 This is a schematic diagram of an embodiment of the ion implanter beam current adjustment device provided by the technical solution of the present invention;

[0072] Figure 5 This is a circuit structure diagram of an embodiment of the signal transmission unit device provided by the technical solution of the present invention;

[0073] Figure 6 This is a schematic flowchart of an embodiment of the ion implanter beam detection method provided by the technical solution of the present invention. Detailed Implementation

[0074] As can be seen from the background technology, the detection speed of GLITCH signals in the beam of ion implanters still needs to be improved.

[0075] To address the aforementioned technical problem, the ion implanter beam detection circuit provided in this embodiment of the invention includes: an input conditioning unit for receiving a differential analog signal from the ion implanter beam; converting the received differential analog signal into a corresponding single-ended signal; filtering the single-ended signal to obtain an alternating signal within the single-ended signal; amplifying the alternating signal; and an absolute value unit coupled to the input conditioning unit for performing absolute value processing on the amplified alternating signal to obtain a corresponding absolute value voltage; and comparing the absolute value voltage with a preset threshold voltage to obtain a corresponding GLITCH signal detection result.

[0076] The ion implanter beam detection circuit provided in this embodiment of the invention uses an input conditioning unit and an absolute value taking unit to obtain the GLITCH signal detection result of the ion implanter beam. Compared with the GLITCH signal detection result of the ion implanter beam obtained by software program, it can improve the detection efficiency of the GLITCH signal of the ion implanter beam.

[0077] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0078] Figure 1 A schematic diagram of an embodiment of the ion implanter beam current detection circuit provided by the present invention is shown. (Reference) Figure 1 An ion implanter beam detection circuit 10 may include an input conditioning unit 110 and an absolute value taking unit 120. The input conditioning unit 110 and the absolute value taking unit 120 are coupled to each other.

[0079] In an exemplary embodiment, the input conditioning unit 110 may receive a differential analog signal V from the ion implanter beam. in+ and V in- and the received differential analog signal V in+ and V in- Convert to the corresponding single-ended signal.

[0080] The received differential analog signal V in+ and V in-It is converted into a corresponding single-ended signal, providing a basis for subsequent acquisition of the alternating signal in the single-ended signal.

[0081] The received differential analog signal V in+ and V in- Converting to the corresponding single-ended signal refers to converting the differential analog signal V of the ion implanter beam. in+ and V in- Converted into a readable ground reference output signal.

[0082] Reference Figure 2 , Figure 2 This is a circuit diagram of an embodiment of the input conditioning unit in the technical solution of the present invention. In an exemplary embodiment, the input conditioning unit 110 includes a signal conversion module 1101. The input conditioning unit 110 receives the differential analog signal V from the ion implanter beam through the signal conversion module 1101. in+ and V in- and the received differential analog signal V in+ and V in- Convert to the corresponding single-ended signal.

[0083] As an example, the signal conversion module 1101 includes a first differential amplifier U11. The non-inverting input of the first differential amplifier U11 is used to receive the differential analog signal V. in+ and V in- The first differential signal V in in+ The inverting input of the first differential amplifier U11 is used to receive the differential analog signal V. in+ and V in- The second differential signal V in in- The output terminal of the first differential amplifier U11 is used to output the single-ended signal. Furthermore, the signal conversion module 1101 may include any useful electronic circuit components, without limitation by this disclosure. For example, the gain adjustment terminal of the first differential amplifier U11 is also coupled to a first gain adjustment resistor R01, and the differential power supply terminal of the first differential amplifier U11 is also used to receive differential power supply voltage signals. For example, the voltages of the differential power supply voltage signals are +15V and -15V, respectively.

[0084] In other embodiments, the signal conversion module may also employ other structures with the same function to convert the received differential analog signal into a corresponding single-ended signal, which is not limited in this disclosure.

[0085] In one exemplary embodiment, the received differential analog signal V in+ and V in-After being converted into the corresponding single-ended signal, the input conditioning unit 110 can also filter the single-ended signal to obtain the alternating signal in the single-ended signal.

[0086] The single-ended signal is filtered to obtain the alternating signal in the single-ended signal, which provides a basis for subsequent amplification of the alternating signal.

[0087] In one exemplary embodiment, the input conditioning unit 110 further includes a filtering module 1102. The input conditioning unit 110 uses the filtering module 1102 to filter the single-ended signal to obtain the alternating signal in the single-ended signal.

[0088] Please refer to the reference. Figure 2 As an example, the filtering module 1102 includes a second-order low-pass filter and a high-pass filter.

[0089] The second-order low-pass filter can perform second-order low-pass filtering on the single-ended signal. Specifically, the second-order low-pass filter includes a first resistor R1, a second resistor R2, a first capacitor C1, and a second capacitor C2. The first terminal of the first resistor R1 is coupled to the output terminal of the signal conversion module 1101; the second terminal of the first resistor R1 is coupled to the first terminal of the second resistor R2 and the first terminal of the first capacitor C1; the second terminal of the second resistor R2 is coupled to the first terminal of the second capacitor C2; and the second terminal of the first capacitor C1 and the second terminal of the second capacitor C2 are grounded.

[0090] By using the second-order low-pass filter to perform second-order low-pass filtering on the single-ended signal, the stopband of the output signal of the second-order low-pass filter can be narrowed, which is beneficial to improving the effect of low-pass filtering.

[0091] After performing second-order low-pass filtering on the single-ended signal, the high-pass filter can perform high-pass filtering on the single-ended signal that has undergone second-order low-pass filtering.

[0092] As an example, the high-pass filter includes a third capacitor C3 and a third resistor R3. The first terminal of the third capacitor C3 is coupled to the output terminal of the second-order low-pass filter, the second terminal of the third capacitor C3 is coupled to the first terminal of the third resistor R3, and the second terminal of the third resistor R3 is grounded.

[0093] High-pass filtering of a single-ended signal processed by a second-order low-pass filter can remove high-frequency components from the single-ended signal, making the output signal of the high-pass filter smoother.

[0094] In other embodiments, the filtering module may also employ other structures that can achieve the same function to acquire the alternating signal in the single-ended signal. Those skilled in the art can set it according to actual needs, and no restrictions are imposed here.

[0095] In one exemplary embodiment, after acquiring the alternating signal in the single-ended signal, the input conditioning unit 110 can further amplify the alternating signal.

[0096] Amplifying the alternating signal can enhance its signal strength, improve its transmission quality, and meet the needs of subsequent signal processing.

[0097] In one exemplary embodiment, the input conditioning unit 110 includes a signal amplification module 1103. The input conditioning unit 110 amplifies the alternating signal using the signal amplification module 1103.

[0098] As an example, the signal amplification module includes a second differential amplifier U12. The non-inverting input of the second differential amplifier U12 is used to receive the single-ended signal, the inverting input of the second differential amplifier U12 is grounded, and the output of the second differential amplifier U12 serves as the output of the input conditioning unit 110 or is coupled to the output of the input conditioning unit 110. Furthermore, the signal amplification module may include any useful electronic circuit elements, without limitation by this disclosure. For example, the gain adjustment terminal of the second differential amplifier U12 is also coupled to a second gain adjustment resistor R02, and the differential power supply terminal of the second differential amplifier U12 is also used to receive a differential power supply voltage signal. For example, the voltages of the differential power supply voltage signals are +15V and -15V, respectively.

[0099] In an exemplary embodiment, the input conditioning unit 110 may further include a transient voltage suppression module. The input conditioning unit 1101 can condition the differential analog signal V. in+ and V in- Transient voltage suppression processing is performed.

[0100] The differential analog signal is subjected to transient voltage suppression processing, which can provide good protection for the detection circuit in the embodiment of the present invention.

[0101] Please continue to refer to the reference. Figure 2 As an example, the transient voltage suppression module includes a first transient diode D11 and a second transient diode D12. The first terminal of the first transient diode D11 is used to receive the differential analog signal V. in+ and V in- The first differential signal V in in+The second terminal of the first transient diode D11 is grounded; the first terminal of the second transient diode D12 is used to receive the differential analog signal V. in+ and V in- The second differential signal V in in- The second terminal of the second transient diode D12 is grounded.

[0102] In one exemplary embodiment, the input conditioning unit 110 may further include a first low-pass filter module. The input conditioning unit 110 performs a first low-pass filter processing on the differential analog signal using the first low-pass filter module.

[0103] For the differential analog signal V in+ and V in- Performing a first low-pass filter can filter out the differential analog signal V. in+ and V in- The high-frequency components in the differential analog signal V are retained. in+ and V in- The low-frequency components in the signal help reduce interference to subsequent signal processing.

[0104] Please continue to refer to the reference. Figure 2 As an example, the first low-pass filter module includes a first inductor L1 and a second inductor L2. The first terminal of the first inductor L1 serves as the first input terminal of the first low-pass filter module and is used to receive the differential analog signal V. in+ and V in- The first differential signal V in in+ The second end of the first inductor L1 serves as the first output terminal of the first low-pass filter module; the first end of the second inductor L2 serves as the second input terminal of the first low-pass filter module and is used to receive the differential analog signal V. in+ and V in- The second differential signal V in in- The second terminal L2 of the second inductor serves as the second output terminal of the first low-pass filter module.

[0105] The inductance values ​​of the first inductor L1 and the second inductor L2 can be determined based on the differential analog signal V. in+ and V in- The filtering requirements are set accordingly, without specific limitations here.

[0106] In one exemplary embodiment, the input conditioning unit 110 may further include a second low-pass filter module. The input conditioning unit 110 performs low-pass filtering processing on the differential analog signal using the second low-pass filter module.

[0107] Please continue to refer to the reference. Figure 2As an example, the second low-pass filter module includes a fourth resistor R4, a fifth resistor R5, a fourth capacitor C4, a fifth capacitor C5, and a sixth capacitor C6. The first terminal of the fourth resistor R4 serves as the first input terminal of the second low-pass filter module, used to receive the differential analog signal V. in+ and V in- The first differential signal V in in+ The second terminal of the fourth resistor R4 is coupled to the first terminal of the fourth capacitor C4, the first terminal of the sixth capacitor C6, and the first differential signal input terminal of the signal conversion module 1101. The second terminal of the fourth capacitor C4 is grounded. The first terminal of the fifth resistor R5 serves as the second input terminal of the second low-pass filter module, used to receive the differential analog signal V. in+ and V in- The second differential signal V in in- The second end of the fifth resistor R5 is coupled to the first end of the fifth capacitor C5, the second end of the sixth capacitor C6 and the second differential signal input terminal of the signal conversion module 1101, and the second end of the fifth capacitor C5 is grounded.

[0108] In one exemplary embodiment, the fourth capacitor and the fifth capacitor are common-mode capacitors, and the sixth capacitor is a differential-mode capacitor.

[0109] The resistance values ​​of the fourth resistor R4 and the fifth resistor R5, and the capacitance values ​​of the fourth capacitor C4, the fifth capacitor C5, and the sixth capacitor C6, can be determined based on the differential analog signal V. in+ and V in- The filtering requirements can be set without restrictions.

[0110] In an exemplary embodiment, the input conditioning unit 110 may further include a clamping protection module. The input conditioning unit 110 uses the clamping protection module to control the differential analog signal V. in+ and V in- The voltage clamp is within the preset safe voltage range.

[0111] The differential analog signal V in+ and V in- The voltage is clamped within a preset safe voltage range to avoid damage to circuit components caused by excessive voltage, which helps to improve the safety of the detection circuit in the embodiments of the present invention.

[0112] Please continue to refer to the reference. Figure 2As an example, the clamping protection module includes a first clamping diode D21, a second clamping diode D22, a third clamping diode D23, and a fourth clamping diode D24. The first terminal of the first clamping diode D21 receives a first power supply voltage signal VDD1, and the second terminal of the first clamping diode D21 is coupled to the first terminal of the second clamping diode D22 and the first differential signal input terminal of the signal conversion module 1101. The second terminal of the second clamping diode D22 receives a second power supply voltage signal VDD2. The first terminal of the third clamping diode D23 receives the first power supply voltage signal VDD1, and the second terminal of the third clamping diode D23 is coupled to the first terminal of the fourth clamping diode D24 and the second differential signal input terminal of the signal conversion module 1101. The second terminal of the fourth clamping diode D24 receives the second power supply voltage signal VDD2.

[0113] The second power supply voltage signal VDD2 and the first power supply voltage signal VDD1 are differential voltage signals. For example, the voltage of the first power supply voltage signal VDD1 is -15V, and the voltage of the second power supply voltage signal VDD2 is +15V. The voltages of the second power supply voltage signal VDD2 and the first power supply voltage signal VDD1 can be determined based on the differential analog signal V. in+ and V in- The voltage clamping requirements can be set, but this disclosure does not impose any limitations.

[0114] In one exemplary embodiment, the absolute value taking unit 120 can perform absolute value taking processing on the amplified alternating signal to obtain the corresponding absolute value voltage.

[0115] Reference Figure 3 In one exemplary embodiment, the absolute value unit 120 includes an absolute value module 1201. The absolute value unit 120 performs absolute value processing on the amplified alternating signal using the absolute value module 1201 to obtain the corresponding absolute value voltage.

[0116] Please refer to the reference. Figure 3 As an example, the absolute value module 1201 includes a first operational amplifier U21, a second operational amplifier U22, a sixth resistor R6 to a tenth resistor R10, a first diode D31 and a second diode D32.

[0117] In this configuration, the non-inverting input of the first operational amplifier U21 is grounded, and its inverting input is coupled to the first terminal of the sixth resistor R6, the first terminal of the seventh resistor R7, and the second terminal of the first diode D31. The output of the first operational amplifier U21 is coupled to the first terminal of the first diode D31 and the second terminal of the second diode D32. The second terminal of the sixth resistor R6 is coupled to the first terminal of the eighth resistor R8 and serves as the input of the absolute value module 1201. The second terminal of the seventh resistor R7 is coupled to the first terminal of the second diode D32 and the first terminal of the ninth resistor R9. The non-inverting input of the second operational amplifier U22 is grounded, and its inverting input is coupled to the second terminal of the eighth resistor R8, the second terminal of the ninth resistor R9, and the first terminal of the tenth resistor R10. The output of the second operational amplifier U22 is coupled to the second terminal of the tenth resistor R10 and serves as the output of the absolute value module 1201.

[0118] In other embodiments, the absolute value taking module 1201 can also use other structures with the same function to perform absolute value taking on the amplified alternating signal, which is not limited in this disclosure.

[0119] In an exemplary embodiment, after obtaining the corresponding absolute voltage, the absolute value unit 120 can further compare the absolute voltage with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

[0120] Specifically, when the absolute voltage is greater than a preset threshold voltage, it indicates that the differential analog signal V of the ion implanter beam current is... in+ and V in- The presence of a GLITCH signal indicates that the differential analog signal V of the ion implanter beam is present when the absolute value voltage is less than a preset threshold voltage. in+ and V in- The GLITCH signal is not present.

[0121] The preset threshold voltage can be set according to the needs of GLITCH signal detection, and this disclosure does not impose any restrictions.

[0122] Please continue to refer to the reference. Figure 3 In one exemplary embodiment, the absolute value taking unit 120 further includes a comparison module 1202. The absolute value taking unit 120 compares the absolute value voltage with a preset threshold voltage using the comparison module 1202 to obtain the corresponding GLITCH signal detection result.

[0123] As an example, the comparison module 1202 includes a comparator U30, a third operational amplifier U23, an eleventh resistor R11, a twelfth resistor R12, a variable resistor RX, a seventh capacitor C7, and an eighth capacitor C8. Specifically, the non-inverting input of comparator U30 is coupled to the first terminal of the eleventh resistor R11 and the first terminal of the seventh capacitor C7; the inverting input of comparator U30 is coupled to the first terminal of the twelfth resistor R12 and the first terminal of the eighth capacitor C8; the output of comparator U30 serves as the output of comparator module 1202; the second terminals of the seventh capacitor C7 and the eighth capacitor C8 are grounded; and the second terminal of the twelfth resistor R12 serves as the input of comparator module 1202. The non-inverting input of the third operational amplifier U23 is coupled to the sliding terminal of the variable resistor RX; the inverting input of the third operational amplifier U23 is coupled to its output and the second terminal of the eleventh resistor R11; the first terminal of the variable resistor RX is used to receive the third power supply voltage signal VDD3; and the second terminal of the variable resistor RX is grounded.

[0124] In other embodiments, the comparison module can also employ other structures with the same function to perform absolute value processing on the amplified alternating signal, which is not limited in this disclosure.

[0125] Accordingly, embodiments of the present invention also provide an ion implanter beam current adjustment device.

[0126] Figure 4 A schematic diagram of an embodiment of the ion implanter beam current adjustment device provided in this invention is shown. See also... Figure 4 The ion implanter beam current adjustment device 40 includes a signal detection unit 401, a signal transmission unit 402, and a beam current adjustment unit 403. The signal detection unit 401 is coupled to the signal transmission unit 402, and the signal transmission unit 402 is also coupled to the beam current adjustment unit 403.

[0127] In an exemplary embodiment, the signal detection unit 401 may use the ion implanter beam detection circuit provided in this embodiment of the invention to obtain the corresponding GLITCH signal detection result. For details regarding the ion implanter beam detection circuit provided in this embodiment of the invention, please refer to the foregoing description, which will not be repeated here.

[0128] In an exemplary embodiment, after the signal detection unit 401 obtains the corresponding GLITCH signal detection result using the ion implanter beam current detection circuit provided in this embodiment of the invention, the signal transmission unit 402 may transmit the corresponding GLITCH signal detection result to the beam current adjustment circuit when the GLITCH signal detection result indicates that a GLITCH signal exists in the beam current of the ion implanter.

[0129] In one exemplary embodiment, the signal transmission unit 402 includes an interface driver module 4021. The signal transmission unit 402 generates a corresponding drive signal based on the corresponding GLITCH signal detection result through the interface driver module 4021.

[0130] Based on the detection results of the corresponding GLITCH signal, a corresponding drive signal is generated, which can enhance the driving capability of the drive signal.

[0131] Please refer to the reference. Figure 5 As an example, the interface driver module 4021 includes a thirteenth resistor R13, an OR gate, and a fourteenth resistor R14. The first terminal of the thirteenth resistor R13 serves as the input terminal of the interface driver module 4021. The second terminal of the thirteenth resistor R13 is coupled to both the first and second input terminals of the OR gate. The output terminal of the OR gate is coupled to the first terminal of the fourteenth resistor R14, and the second terminal of the fourteenth resistor R14 serves as the output terminal of the interface driver module 4021.

[0132] In other embodiments, the interface driver module can also use other structures with the same function to generate corresponding drive signals based on the corresponding GLITCH signal detection results, which is not limited in this disclosure.

[0133] In an exemplary embodiment, the signal transmission unit 402 further includes a signal transmission module 4022. The signal transmission unit 402, via the signal transmission module 4022, transmits the corresponding GLITCH signal detection result to the beam adjustment unit 403 under the drive of the driving signal.

[0134] As an example, the signal transmission module 4022 includes an optical fiber transmitting chip J1. The input terminal of the optical fiber transmitting chip J1 serves as the input terminal of the signal transmission module 4022, and the output terminal of the optical fiber transmitting chip J1 serves as the output terminal of the signal transmission module 4022. Furthermore, the signal transmission module 4022 may also include any useful electronic circuit components, without limitation by this disclosure. For example, a ninth capacitor C9 and a tenth capacitor C10 are coupled in parallel between the power supply connection terminal and the ground wire of the optical fiber transmitting chip J1 to filter the power signal input to the optical fiber transmitting chip J1.

[0135] In one exemplary embodiment, the signal transmission unit 402 further includes a filtering module 4023. The signal transmission unit 402 uses the filtering module 4023 to filter the GLITCH signal detection result before transmitting it to the signal transmission module 4021.

[0136] As an example, the filtering module 4023 includes a fifteenth resistor R15 and a Schmitt filter U40. The first terminal of the fifteenth resistor R15 is used to receive a fourth power supply voltage signal VDD4, and the second terminal of the fifteenth resistor R15 is coupled to the input terminal of the Schmitt filter U40, serving as the input terminal of the filtering module 4023. The output terminal of the Schmitt filter serves as the output terminal of the filtering module 4023.

[0137] In other embodiments, the filtering module can also employ other structures with the same function to perform filtering processing on the GLITCH signal detection results, which is not limited in this disclosure.

[0138] The beam current adjustment unit 403 is used to adjust the beam current of the ion implanter based on the GLITCH signal detection result. Specifically, the beam current adjustment unit 403 can adjust the beam current of the ion implanter using a corresponding beam current adjustment strategy based on the GLITCH signal detection result. Furthermore, those skilled in the art know how to adjust the beam current of the ion implanter using a corresponding beam current adjustment strategy based on the GLITCH signal detection result, and will not be elaborated further here.

[0139] Accordingly, this invention also provides a method for beam current detection in an ion implanter.

[0140] Figure 6 This diagram illustrates a flow chart of an embodiment of the ion implanter beam current detection method provided by the present invention. See also... Figure 6 A method for detecting beam current in an ion implanter, specifically including:

[0141] Step S610: Receive the differential analog signal of the ion implanter beam;

[0142] Step S620: Convert the received differential analog signal into the corresponding single-ended signal;

[0143] Step S630: Filter the single-ended signal to obtain the alternating signal in the single-ended signal;

[0144] Step S640: Amplify the alternating signal;

[0145] Step S650: Perform absolute value processing on the amplified alternating signal to obtain the corresponding absolute value voltage;

[0146] Step S660: Compare the absolute voltage with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

[0147] The ion implanter beam current detection circuit provided in this embodiment of the invention can execute the ion implanter beam current detection method provided in this embodiment of the invention, or other functional modules can be used to execute the ion implanter beam current detection method provided in this embodiment of the invention. For a detailed description of the ion implanter beam current detection method provided in this embodiment of the invention, please refer to the foregoing section; it will not be repeated here.

[0148] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is accorded the widest scope consistent with the principles and novel features disclosed herein.

[0149] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. An ion implanter beam current detection circuit, comprising: include: An input conditioning unit is used to receive the differential analog signal from the ion implanter beam; convert the received differential analog signal into a corresponding single-ended signal; filter the single-ended signal to obtain the alternating signal in the single-ended signal; and amplify the alternating signal. An absolute value unit, coupled to the input conditioning unit, is used to perform absolute value processing on the amplified alternating signal to obtain the corresponding absolute value voltage; the absolute value voltage is compared with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

2. The ion implanter beam current detection circuit as described in claim 1, characterized in that, The input conditioning unit includes: The signal conversion module is used to receive the differential analog signal of the ion implanter beam and convert the received differential analog signal into a corresponding single-ended signal. A filtering module, coupled to the signal conversion module, is used to filter the single-ended signal to obtain the alternating signal in the single-ended signal; The signal amplification module, coupled to the filtering module, is used to amplify the alternating signal.

3. The ion implanter beam current detection circuit as described in claim 2, characterized in that, The signal conversion module includes a first differential amplifier; The non-inverting input of the first differential amplifier is used to receive the first differential signal in the differential analog signal, and the inverting input of the first differential amplifier is used to receive the second differential signal in the differential analog signal. The output of the first differential amplifier is coupled to the filtering module and is used to output the single-ended signal.

4. The ion implanter beam current detection circuit as described in claim 2, characterized in that, The filtering module includes: A second-order low-pass filter, coupled to the signal conversion module, is used to perform second-order low-pass filtering on the single-ended signal; A high-pass filter, coupled to the signal conversion module, is used to perform high-pass filtering on the single-ended signal.

5. The ion implanter beam current detection circuit as described in claim 4, characterized in that, The second-order low-pass filter includes a first resistor, a second resistor, a first capacitor, and a second capacitor; The first end of the first resistor is coupled to the output end of the signal conversion module, the second end of the first resistor is coupled to the first end of the second resistor and the first end of the first capacitor, the second end of the second resistor is coupled to the first end of the second capacitor, and the second end of the first capacitor is grounded to the second end of the second capacitor.

6. The ion implanter beam current detection circuit as described in claim 4, characterized in that, The high-pass filter includes a third capacitor and a third resistor; The first terminal of the third capacitor is coupled to the output terminal of the second-order low-pass filter, the second terminal of the third capacitor is coupled to the first terminal of the third resistor, and the second terminal of the third resistor is grounded.

7. The ion implanter beam current detection circuit as described in claim 4, characterized in that, The signal amplification module includes a second differential amplifier; The non-inverting input of the second differential amplifier is used to receive the single-ended signal, the inverting input of the second differential amplifier is grounded, and the output of the second differential amplifier serves as the output of the input conditioning unit.

8. The ion implanter beam current detection circuit as described in claim 2, characterized in that, The input conditioning unit further includes at least one of the following: A transient voltage suppression module is used to perform transient voltage suppression processing on the differential analog signal; The first low-pass filter module is used to perform a first low-pass filter process on the differential analog signal; The second low-pass filter module is used to perform a second low-pass filter processing on the differential analog signal; The clamping protection module is used to clamp the voltage of the differential analog signal within a preset safe voltage range.

9. The ion implanter beam current detection circuit as described in claim 8, characterized in that, The transient voltage suppression module includes a first transient diode and a second transient diode; The first terminal of the first transient diode is used to receive the first differential signal in the differential analog signal, and the second terminal of the first transient diode is grounded; The first terminal of the second transient diode is used to receive the second differential signal in the differential analog signal, and the second terminal of the second transient diode is grounded.

10. The ion implanter beam current detection circuit as described in claim 8, characterized in that, The first low-pass filter module includes a first inductor and a second inductor; The first end of the first inductor serves as the first input end of the first low-pass filter module, used to receive the first differential signal in the differential analog signal, and the second end of the first inductor serves as the first output end of the first low-pass filter module. The first end of the second inductor serves as the second input terminal of the first low-pass filter module, used to receive the second differential signal in the differential analog signal, and the second end of the second inductor serves as the second output terminal of the first low-pass filter module.

11. The ion implanter beam current detection circuit as described in claim 8, characterized in that, The second low-pass filter module includes a fourth resistor, a fifth resistor, a fourth capacitor, a fifth capacitor, and a sixth capacitor; The first end of the fourth resistor serves as the first input terminal of the second low-pass filter module, used to receive the first differential signal in the differential analog signal. The second end of the fourth resistor is coupled to the first end of the fourth capacitor, the first end of the sixth capacitor, and the first differential signal input terminal of the signal conversion module. The second end of the fourth capacitor is grounded. The first end of the fifth resistor serves as the second input terminal of the second low-pass filter module, used to receive the second differential signal in the differential analog signal. The second end of the fifth resistor is coupled to the first end of the fifth capacitor, the second end of the sixth capacitor, and the second differential signal input terminal of the signal conversion module. The second end of the fifth capacitor is grounded.

12. The ion implanter beam current detection circuit as described in claim 8, characterized in that, The clamping protection module includes a first clamping diode, a second clamping diode, a third clamping diode, and a fourth clamping diode; The first terminal of the first clamping diode is used to receive the first power supply voltage signal. The second terminal of the first clamping diode is coupled to the first terminal of the second clamping diode and the first differential signal input terminal of the signal conversion module. The second terminal of the second clamping diode is used to receive the second power supply voltage signal. The second power supply voltage signal and the first power supply voltage signal are differential voltage signals. The first terminal of the third clamping diode is used to receive the first power supply voltage signal. The second terminal of the third clamping diode is coupled to the first terminal of the fourth clamping diode and the second differential signal input terminal of the signal conversion module. The second terminal of the fourth clamping diode is used to receive the second power supply voltage signal.

13. The ion implanter beam current detection circuit as described in claim 1, characterized in that, The absolute value unit includes: The absolute value module is used to perform absolute value processing on the amplified alternating signal to obtain the corresponding absolute value voltage. The comparison module is used to compare the absolute voltage with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

14. The ion implanter beam current detection circuit as described in claim 13, characterized in that, The absolute value taking module includes a first operational amplifier, a second operational amplifier, a sixth to a tenth resistor, a first diode, and a second diode; The non-inverting input terminal of the first operational amplifier is grounded, the inverting input terminal of the first operational amplifier is coupled to the first terminal of the sixth resistor, the first terminal of the seventh resistor, and the second terminal of the first diode, the output terminal of the first operational amplifier is coupled to the first terminal of the first diode and the second terminal of the second diode, the second terminal of the sixth resistor is coupled to the first terminal of the eighth resistor and serves as the input terminal of the absolute value module, and the second terminal of the seventh resistor is coupled to the first terminal of the second diode and the first terminal of the ninth resistor. The non-inverting input terminal of the second operational amplifier is grounded, and the inverting input terminal of the second operational amplifier is coupled to the second terminal of the eighth resistor, the second terminal of the ninth resistor, and the first terminal of the tenth resistor. The output terminal of the second operational amplifier is coupled to the second terminal of the tenth resistor and serves as the output terminal of the absolute value module.

15. The ion implanter beam current detection circuit as described in claim 13, characterized in that, The comparison module includes a comparator, a third operational amplifier, an eleventh resistor, a twelfth resistor, a variable resistor, a seventh capacitor, and an eighth capacitor; The non-inverting input terminal of the comparator is coupled to the first terminal of the eleventh resistor and the first terminal of the seventh capacitor, the inverting input terminal of the comparator is coupled to the first terminal of the twelfth resistor and the first terminal of the eighth capacitor, the output terminal of the comparator serves as the output terminal of the comparator module, the second terminal of the seventh capacitor and the second terminal of the eighth capacitor are grounded, and the second terminal of the twelfth resistor serves as the input terminal of the comparator module. The non-inverting input terminal of the third operational amplifier is coupled to the sliding terminal of the variable resistor, and the inverting input terminal of the third operational amplifier is coupled to the output terminal of the third operational amplifier and the second terminal of the eleventh resistor; the first terminal of the variable resistor is used to receive the third power supply voltage signal, and the second terminal of the variable resistor is grounded.

16. A beam current adjustment device for an ion implanter, characterized in that, include: The signal detection unit is used to acquire the corresponding GLITCH signal detection result using the ion implanter beam detection circuit as described in any one of claims 1-15; The signal transmission unit is used to transmit the corresponding GLITCH signal detection result to the beam adjustment circuit when the GLITCH signal detection result indicates that a GLITCH signal exists in the beam of the ion implanter. The beam adjustment unit is used to adjust the beam current of the ion implanter based on the detection result of the GLITCH signal.

17. The ion implanter beam current adjustment device as described in claim 16, characterized in that, The signal transmission unit includes: The interface driver module is used to generate corresponding drive signals based on the detection results of the corresponding GLITCH signals. The signal transmission module, coupled to the interface driving module, is used to transmit the corresponding GLITCH signal detection result to the beam adjustment unit under the drive signal.

18. The ion implanter beam current adjustment device as described in claim 17, characterized in that, The interface driver module includes a thirteenth resistor, an OR gate, and a fourteenth resistor; The first end of the thirteenth resistor serves as the input terminal of the interface driver module. The second end of the thirteenth resistor is coupled to the first input terminal and the second input terminal of the OR gate. The output terminal of the OR gate is coupled to the first end of the fourteenth resistor. The second end of the fourteenth resistor serves as the output terminal of the interface driver module.

19. The ion implanter beam current adjustment device as described in claim 17, characterized in that, The signal transmission module includes an optical fiber transmitting chip; The input terminal of the optical fiber transmitting chip serves as the input terminal of the signal transmission module, and the output terminal of the optical fiber transmitting chip serves as the output terminal of the signal transmission module.

20. The ion implanter beam current adjustment device as described in claim 17, characterized in that, Also includes: The filtering module, coupled to the interface driver module, is used to filter the detection results of the GLITCH signal.

21. The ion implanter beam current adjustment device as described in claim 20, characterized in that, The filtering module includes a fifteenth resistor and a Schmitt filter; The first end of the fifteenth resistor is used to receive the fourth power supply voltage signal, the second end of the fifteenth resistor is coupled to the input end of the Schmitt filter and is used as the input end of the filtering module, and the output end of the Schmitt filter is used as the output end of the filtering module.

22. A method for detecting beam current in an ion implanter, characterized in that, include: Receives differential analog signals from the ion implanter beam; Convert the received differential analog signal into the corresponding single-ended signal; The single-ended signal is filtered to obtain the alternating signal in the single-ended signal; The alternating signal is amplified. The amplified alternating signal is subjected to absolute value processing to obtain the corresponding absolute voltage. The absolute voltage is compared with a preset threshold voltage to obtain the corresponding GLITCH signal detection result.

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