Turnover device for semiconductor preceding equipment parts

Abstract

A clamping assembly comprises a transmission frame, an arc-shaped adjusting plate and a clamping plate, one end of the transmission frame is axially and rotatably connected to a support, and the arc-shaped adjusting plate is connected to the other end of the transmission frame and is configured to move in the arc length direction of the arc-shaped adjusting plate relative to the transmission frame; the clamping plate is connected to the arc-shaped adjusting plate, and a plurality of clamping units are arranged on the opposite side of the clamping plate. The overturning protection assembly comprises a flexible protection plate, wherein one end of the flexible protection plate can be axially and rotatably connected to the support, and the flexible protection plate can move relative to the clamping plate. Wherein the plurality of clamping units and the flexible protection plate are configured to adaptively clamp a to-be-overturned part according to the shape of the to-be-overturned part so as to overturn and protect the to-be-overturned part, so that the problems that the adaptive clamping of the part cannot be realized and overturning protection measures are lacked due to the limitation of the overturning angle of the existing semiconductor processing overturning device are solved; and therefore, the problems that the overturning requirements under multiple working conditions are difficult to adapt and the reliability is reduced are solved.

Description

Technical Field

[0001] This invention relates to the field of flipping device technology, specifically to a flipping device for semiconductor front-end equipment components. Background Technology

[0002] Semiconductor front-end equipment components refer to components such as substrates and electrostatic chucks that are directly involved in key processes during wafer manufacturing. Because they need to be processed or transferred at multiple angles during processing, existing technologies often use flipping devices to precisely change their positions to ensure process integrity.

[0003] For example, patent CN119008506B discloses a semiconductor processing substrate flipping device and its flipping method, including a main body and two connecting plates. Both connecting plates are fixedly connected to the top of the main body, and each connecting plate has a lifting hole. The device also includes a transmission mechanism disposed between the two connecting plates, comprising two limiting sliding frames slidably connected inside the two lifting holes; and a positioning mechanism disposed at the bottom of the limiting sliding frames. Although the above patent achieves automatic clamping through mechanical linkage, the flipping angle of the aforementioned patent is limited, making it difficult to adapt to the flipping requirements under various working conditions. Its lack of flexibility severely restricts the widespread application of the flipping device. Furthermore, the lack of flipping protection measures leads to a decrease in the reliability of the flipping device.

[0004] Based on this, this application proposes a flipping device for semiconductor front-end equipment components to overcome the above-mentioned defects. Summary of the Invention

[0005] The purpose of this invention is to solve the problems of existing semiconductor processing flipping devices, which are limited by the flipping angle, unable to adapt to the clamping of components, and lack flipping protection measures, resulting in their inability to adapt to flipping requirements under multiple working conditions and reduced reliability.

[0006] To achieve the above objectives, the present invention provides a flipping device for semiconductor front-end equipment components, including a base and two flipping mechanisms disposed opposite to each other on the base in a horizontal direction, wherein the two flipping mechanisms are configured to move toward or away from each other. Each flipping mechanism includes a support that can move vertically relative to the base, and a clamping assembly and a flipping protection assembly are provided on the opposite side of the support. The clamping assembly includes a transmission frame, an arc-shaped adjustment plate, and a clamping plate. One end of the transmission frame is axially rotatably connected to the support. The arc-shaped adjustment plate is connected to the other end of the transmission frame and is configured to move relative to the transmission frame along its arc length direction. The clamping plate is connected to the arc-shaped adjustment plate, and a plurality of clamping units are provided on its opposite side. The flip protection assembly includes a flexible protective plate that is axially rotatably connected to the support and is movable relative to the clamping plate. The clamping units and the flexible protective plate are configured to adaptively clamp the parts to be flipped according to their shape, so as to flip and protect them.

[0007] Optionally, the base is provided with a first sliding groove, and the lower ends of the two supports are embedded in the first sliding groove and can move towards or away from each other along the first sliding groove.

[0008] Optionally, a first cylinder is provided on one side of the support for driving it to move along the first slide groove.

[0009] Optionally, a base is provided below the support, and a plurality of second cylinders are provided in the base. The upper ends of the plurality of second cylinders are connected to the support to drive the support to move vertically relative to the base.

[0010] Optionally, one end of the transmission frame is connected to a first rotating shaft, the drive end of the first rotating shaft is connected to a first motor, and the first motor is embedded in the support.

[0011] Optionally, the arc-shaped adjustment plate has an arc-shaped open area, and two racks extending along their arc length are symmetrically arranged in the arc-shaped open area. Each rack is meshed with a first gear, and a hollow motor is arranged between the two first gears. A second rotating shaft passes through the hollow motor, and both ends of the second rotating shaft extend out of the arc-shaped open area and are fixedly connected to the transmission frame.

[0012] Optionally, several clamping units are evenly distributed along the circumference of the clamping plate, and each clamping unit includes a limiting cylinder connected to the clamping plate. A clamping rod is inserted inside the limiting cylinder. A return spring is sleeved on the clamping rod, with one end connected to it and the other end connected to the limiting cylinder. One end of the clamping rod is provided with a flexible clamping head for contacting and clamping the part to be flipped.

[0013] Optionally, four second gears are evenly distributed around the circumference of the first motor inside the support, and a double gear is meshed with the inner side of the four second gears. The inner ring of the double gear is meshed with a toothed cam that is sleeved on the hollow motor at one end, and one end of the flexible protective plate is connected to the toothed cam. One of the four second gears has a second motor connected to its drive end, and the second motor is used to drive the flexible protective plate to rotate axially.

[0014] Optionally, a connecting plate is fixedly connected to one side of the toothed cam, a bearing plate is fixedly connected to one side of the connecting plate, a second slide groove is provided on one side of the bearing plate, a lead screw is inserted in the second slide groove, a third motor is connected to the driving end of the lead screw, and one end of the flexible protective plate extends into the second slide groove and is threadedly connected to the lead screw.

[0015] Optionally, the flexible protective plate is embedded with a drive frame, which includes a drive seat with one end threaded to the lead screw, and a first built-in motor at the other end of the drive seat. A third rotating shaft with both ends connected to the drive seat is fitted onto the first built-in motor. A first drive frame is fitted onto the third rotating shaft. A fourth rotating shaft passes through one end of the first drive frame. A second built-in motor is installed inside the fourth rotating shaft, and both ends of the fourth rotating shaft are connected to a first drive plate. A fifth rotating shaft passes through one end of the two first drive plates. A third built-in motor is installed inside the fifth rotating shaft, and a second drive frame is fitted onto it. A sixth rotating shaft passes through the other end of the second drive frame. A fourth built-in motor is installed inside the sixth rotating shaft, and both ends of the sixth rotating shaft are connected to a second drive plate. A seventh rotating shaft passes through one end of the two second drive plates.

[0016] The beneficial effects of this invention are as follows: This invention proposes a flipping device for semiconductor front-end equipment components. It comprises two flipping mechanisms configured to move towards or away from each other. Each flipping mechanism includes a support that can move vertically relative to a base, with clamping components and flipping protection components arranged on opposite sides of the support. Compared to existing semiconductor processing flipping devices, this invention utilizes an arc-shaped adjustment plate that can move relative to a transmission frame along its arc length to adjust the flipping angle, adapting to flipping requirements under various working conditions, improving flexibility, and facilitating the widespread application of the flipping device. Furthermore, it can utilize several clamping units and a flexible protective plate to adaptively clamp the component to be flipped according to its shape, thereby achieving adaptive clamping and effective protection of the component, improving the accuracy and reliability of the flipping operation, and significantly enhancing the reliability of the flipping device of this invention.

[0017] As can be seen from the above, the present invention can effectively solve the problems of existing semiconductor processing flipping devices, which are limited by the flipping angle, unable to adapt and clamp the components, and lack flipping protection measures, resulting in their inability to adapt to the flipping requirements under multiple working conditions and reduced reliability.

[0018] Other features and advantages of the present invention will be described in detail in the following detailed description section. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a flipping device for semiconductor front-end equipment components according to an embodiment of the present invention; Figure 2 This is a cross-sectional view of the flipping mechanism according to an embodiment of the present invention; Figure 3 This is a cross-sectional view of the arc-shaped adjustment plate according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the clamping unit according to an embodiment of the present invention; Figure 5 This is a cross-sectional view of the flip protection component according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of the support plate according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the drive skeleton according to an embodiment of the present invention.

[0021] Figure label: 1. Base; 101. First slide groove; 2. Support; 3. Transmission frame; 4. Arc-shaped adjusting plate; 401. Arc-shaped open area; 5. Clamping plate; 6. Flexible protective plate; 7. First cylinder; 8. Base; 9. Second cylinder; 10. First rotating shaft; 11. First motor; 12. Rack; 13. First gear; 14. Hollow motor; 15. Second rotating shaft; 16. Limiting cylinder; 17. Clamping rod; 18. Return spring; 19. Flexible clamping head ; 20. Second gear; 21. Double gear; 22. Toothed cam; 23. Second motor; 24. Connecting plate; 25. Bearing plate; 2501. Second slide groove; 26. Lead screw; 27. Third motor; 28. Drive seat; 29. ​​Third shaft; 30. First drive frame; 31. Fourth shaft; 32. First drive plate; 33. Fifth shaft; 34. Second drive frame; 35. Sixth shaft; 36. Second drive plate; 37. Seventh shaft. Detailed Implementation

[0022] To enable those skilled in the art to more fully understand the technical solutions of the present invention, exemplary embodiments of the present invention will be described more comprehensively and in detail below with reference to the accompanying drawings. Obviously, the one or more embodiments of the present invention described below are merely one or more specific ways to implement the technical solutions of the present invention, and are not exhaustive. It should be understood that other ways belonging to a general inventive concept can be used to implement the technical solutions of the present invention, and should not be limited to the embodiments described exemplary. Based on one or more embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0023] Reference Figure 1-7 An embodiment of the present invention provides a flipping device for semiconductor front-end equipment components, including a base 1 and two flipping mechanisms disposed opposite to each other on the base 1 in a horizontal direction, and the two flipping mechanisms are configured to move toward or away from each other. Each flipping mechanism includes a support 2 that can move vertically relative to the base 1, and a clamping assembly and a flipping protection assembly are provided on the opposite side of the support 2. The clamping assembly includes a transmission frame 3, an arc-shaped adjustment plate 4, and a clamping plate 5. One end of the transmission frame 3 is axially rotatably connected to the support 2. The arc-shaped adjustment plate 4 is connected to the other end of the transmission frame 3 and is configured to move relative to the transmission frame 3 along its arc length direction. The clamping plate 5 is connected to the arc-shaped adjustment plate 4, and several clamping units are provided on its opposite side. The overturning protection assembly includes a flexible protective plate 6 that is axially rotatably connected to the support 2 and is movable relative to the clamping plate 5. Among them, several clamping units and flexible protective plates 6 are configured to adaptively clamp the parts to be flipped according to their shape, so as to flip and protect them.

[0024] In one embodiment, a first sliding groove 101 is provided on the base 1, and the lower ends of the two supports 2 are embedded in the first sliding groove 101 and can move towards or away from each other along the first sliding groove 101.

[0025] In one specific embodiment, a first cylinder 7 is provided on one side of the support 2 for driving it to move along the first slide groove 101.

[0026] Specifically, such as Figure 1 As shown, one end of the first cylinder 7 is fixed to the base 1, which can drive the support 2 to adjust the distance between the two supports 2, thereby facilitating the adaptation and clamping of the parts to be flipped by several clamping units.

[0027] In one embodiment, a base 8 is provided below the support 2, and a plurality of second cylinders 9 are provided in the base 8. The upper ends of the plurality of second cylinders 9 are connected to the support 2 to drive the support 2 to move vertically relative to the base 1.

[0028] Specifically, such as Figure 2 As shown, the arrangement of several second cylinders 9 enables the vertical adjustment of the distance between the support 2 and the base 1, thereby facilitating the adaptation and clamping of the parts to be flipped by several clamping units.

[0029] In one embodiment, one end of the transmission frame 3 is connected to a first rotating shaft 10, and the driving end of the first rotating shaft 10 is connected to a first motor 11, which is embedded in the support 2.

[0030] Specifically, such as Figure 1 and 2 As shown, the first motor 11 can drive the transmission frame 3 through the first rotating shaft 10, so that the transmission frame 3 can drive the arc-shaped adjusting plate 4 and the clamping plate 5 to rotate, so as to realize the flipping of the parts to be flipped by several clamping units.

[0031] In one embodiment, the arc-shaped adjustment plate 4 has an arc-shaped open area 401. Two racks 12 are symmetrically arranged in the arc-shaped open area 401, both extending along their arc length direction. Each rack 12 is meshed with a first gear 13. A hollow motor 14 is arranged between the two first gears 13. A second rotating shaft 15 passes through the hollow motor 14. Both ends of the second rotating shaft 15 extend out of the arc-shaped open area 401 and are fixedly connected to the transmission frame 3.

[0032] Specifically, such as Figure 3 As shown, the hollow motor 14 can drive the two first gears 13 to rotate through the second rotating shaft 15, thereby driving the two racks 12 so that the arc-shaped adjusting plate 4 moves relative to the transmission frame 3 along its arc length direction under the drive of the two racks 12.

[0033] Based on this structure, the flipping device of the present invention can adjust the flipping angle of the parts to be flipped when flipping them, so as to adapt to the flipping requirements under multiple working conditions. It is highly flexible and conducive to the widespread application of the flipping device.

[0034] In one specific embodiment, the clamping plate 5 is configured to be annular in shape.

[0035] In one specific embodiment, several clamping units are evenly distributed along the circumference of the clamping plate 5, and each clamping unit includes a limiting cylinder 16 connected to the clamping plate 5. A clamping rod 17 is inserted inside the limiting cylinder 16. A return spring 18 is sleeved on the clamping rod 17, with one end connected to it and the other end connected to the limiting cylinder 16. One end of the clamping rod 17 is provided with a flexible clamping head 19 for contacting and clamping the part to be flipped.

[0036] Specifically, such as Figure 4 As shown, the clamping plate 5 is configured as a ring with several clamping units evenly distributed along its circumference. This allows the clamping units to evenly clamp the parts to be flipped from multiple directions, ensuring stability and balance during the flipping process. This effectively prevents the parts from wobbling or shifting due to uneven force during flipping, improving the accuracy and reliability of the flipping operation.

[0037] Furthermore, each clamping unit is designed with a movable gap through the cooperation of a limiting cylinder 16, a clamping rod 17, and a return spring 18, allowing the flexible clamping head 19 to elastically extend and retract within the movable gap. When it comes into contact with parts of different shapes and sizes to be flipped, the return spring 18 can automatically adjust the position of the clamping rod 17 according to the surface shape of the parts to be flipped and the clamping force requirements, and cooperate with the first cylinder 7 to achieve adaptive clamping of the parts to be flipped, which greatly improves the versatility and applicability of the flipping device of the present invention and can meet the flipping requirements of various types of semiconductor front-end equipment parts.

[0038] In one specific embodiment, the flexible gripping head 19 is a frustum structure made of silicone. Specifically, silicone has good flexibility, elasticity, and wear resistance, which can provide a stable gripping force when in contact with the part to be flipped, while avoiding scratches or other damage to the surface of the part. In addition, the frustum structure can be used to increase the contact area with the part to be flipped and further improve the gripping stability.

[0039] In one embodiment, four second gears 20 are evenly arranged in the support 2 along the circumference of the first motor 11. The inner sides of the four second gears 20 are meshed with a double gear 21. The inner ring of the double gear 21 is meshed with a toothed cam 22 with one end sleeved on the hollow motor 14. One end of the flexible protective plate 6 is connected to the toothed cam 22. Among them, the drive end of one of the four second gears 20 is connected to a second motor 23, which is used to drive the flexible protective plate 6 to rotate axially.

[0040] In one specific embodiment, a connecting plate 24 is fixedly connected to one side of the toothed cam 22, and a bearing plate 25 is fixedly connected to one side of the connecting plate 24. One side of the bearing plate 25 has a second slide groove 2501. A lead screw 26 is inserted into the second slide groove 2501. A third motor 27 is connected to the driving end of the lead screw 26. One end of the flexible protective plate 6 extends into the second slide groove 2501 and is threadedly connected to the lead screw 26.

[0041] Specifically, such as Figure 5 and 6 As shown, the second motor 23 drives one of the second gears 20, enabling all four second gears 20 to rotate synchronously. The double gear 21, meshing with the inner sides of the four second gears 20, rotates accordingly, thereby driving the rotation of the toothed cam 22, which meshes with the double gear 21. Since one end of the flexible protective plate 6 is connected to the toothed cam 22, axial rotation of the flexible protective plate 6 can be achieved.

[0042] In addition, the screw 26 inserted in the second slide groove 2501 is driven to rotate by the third motor 27, so as to drive the flexible protective plate 6 to move along the screw 26, thereby realizing the movement of the flexible protective plate 6 relative to the clamping plate 5.

[0043] Through the combined design of the above structures, precise and flexible motion control of the flexible protective plate 6 can be achieved. On the one hand, the use of multi-gear transmission ensures the smoothness and accuracy of the transmission, making the axial rotation of the flexible protective plate 6 stable and reliable, which is beneficial to the smooth flipping of the flexible protective plate 6 when it acts on the part to be flipped; on the other hand, the threaded connection between the lead screw 26 and the flexible protective plate 6 can precisely control the moving distance of the flexible protective plate 6, further improving the accuracy of the flipping operation, thereby providing a strong guarantee for the flipping quality and efficiency of the flipping device of the present invention.

[0044] In one specific embodiment, the flexible protective plate 6 is a flat plate structure made of rubber.

[0045] In one embodiment, a drive frame is embedded in the flexible protective plate 6. The drive frame includes a drive seat 28 with one end threadedly connected to a lead screw 26. A first built-in motor (not shown in the figure) is provided at the other end of the drive seat 28. A third rotating shaft 29 with both ends connected to the drive seat 8 is sleeved on the first built-in motor. A first drive frame 30 is sleeved on the third rotating shaft 29. A fourth rotating shaft 31 passes through one end of the first drive frame 30. A second built-in motor (not shown in the figure) is provided inside the fourth rotating shaft 31. Both ends of the fourth rotating shaft 31 are connected to a first drive plate 32. A fifth rotating shaft 33 passes through one end of the two first drive plates 32. A third built-in motor (not shown in the figure) is provided inside the fifth rotating shaft 33. A second drive frame 34 is sleeved on the fifth rotating shaft 33. A sixth rotating shaft 35 passes through the other end of the second drive frame 34. A fourth built-in motor (not shown in the figure) is provided inside the sixth rotating shaft 35. Both ends of the sixth rotating shaft 35 are connected to a second drive plate 36. A seventh rotating shaft 37 passes through one end of the two second drive plates 36.

[0046] Specifically, such as Figure 7 As shown, the third rotating shaft 29 is driven to rotate by the first built-in motor, thereby driving the first drive frame 30 to move. At this time, the first built-in motor can adjust the posture of the related components of the first drive frame 30. The second built-in motor can drive the fourth rotating shaft 31 to rotate, thereby driving the two first drive plates 32 to move. At this time, the second built-in motor can adjust the posture of the related components of the two first drive plates 32. The third built-in motor can drive the fifth rotating shaft 33 to rotate, thereby driving the second drive frame 34 to move. At this time, the third built-in motor can adjust the posture of the related components of the second drive frame 34. The fourth built-in motor can drive the sixth rotating shaft 35 to rotate, thereby moving the two second drive plates 36. At this time, the fourth built-in motor can adjust the posture of the related components of the two second drive plates 36.

[0047] Based on this structure, a drive source can be installed inside the seventh rotating shaft 37 to extend the drive frame.

[0048] This invention, through the coordinated movement of the aforementioned structure, converts the power of the built-in motor into complex deformation, driving the flexible protective plate 6 to produce corresponding deformation. This allows the flexible protective plate 6 to deform flexibly and precisely according to the shape, size, and other characteristics of the component to be flipped, achieving adaptive clamping and ensuring a tight fit with the component, providing a stable and reliable clamping force. This effectively prevents the component from slipping or shaking during the flipping process. Simultaneously, the rubber-material flexible protective plate 6 remains soft during deformation, preventing scratches, collisions, or other damage to the surface of the component, thus providing excellent protection and ensuring the quality and safety of semiconductor front-end equipment components.

[0049] It is worth noting that the flexible protective plate 6 can be adjusted and deformed according to the actual clamping or protection requirements under the action of the above structure, thereby achieving effective protection of the parts to be flipped and significantly improving the reliability of the flipping device of the present invention.

[0050] Furthermore, the electrical structures described above in this invention, such as the first cylinder 7, the first motor 11, the hollow motor 14, and the first built-in motor, can all be electrically controlled by external control devices such as a host computer, and their specific structures and working principles are all existing technologies, which will not be elaborated further here.

[0051] The flipping device of the present invention operates as follows: First, based on the size of the parts to be flipped, the first cylinder 7 is activated by an external control device to drive the two supports 2 to move towards or away from each other along the first slide groove 101 on the base 1, adjusting to a suitable distance. Then, the second cylinder 9 inside the base 8 is activated to drive the support 2 to move in the vertical direction, so that the clamping assembly is height-matched with the parts; Then, the hollow motor 14 drives the arc-shaped adjusting plate 4 to move along the arc length direction of the transmission frame 3, and adjusts the position of the clamping plate 5 to the vicinity of the parts to be flipped. At this time, the flexible clamping head 19 contacts the surface of the component, and the return spring 18 automatically adjusts the position of the clamping rod 17 according to the shape of the component to achieve adaptive and uniform clamping and ensure the stability of the flipping.

[0052] During this process, according to the protection requirements, the second motor 23 drives the second gear 20, the double gear 21 and the toothed cam 22 to rotate the flexible protective plate 6 axially to the preset protection position of the part to be flipped; the third motor 27 can also drive the lead screw 26 to rotate, controlling the flexible protective plate 6 to move along the second slide 2501 to the designated position. Next, the first to fourth built-in motors in the drive frame can be activated to drive the third rotating shaft 29, the fourth rotating shaft 31, the fifth rotating shaft 33 and the sixth rotating shaft 35 to rotate in sequence, so that the first drive frame 30, the first drive plate 32, the second drive frame 34 and the second drive plate 36 move together, driving the flexible protective plate 6 to produce complex deformation, closely fitting the surface of the parts to be flipped or the shape suitable for protection. Finally, the first motor 11 is started to drive the transmission frame 3 to rotate through the first rotating shaft 10, thereby causing the clamped parts to be flipped to flip to the target angle.

[0053] This invention proposes a flipping device for semiconductor front-end equipment components. It comprises two flipping mechanisms configured to move towards or away from each other. Each flipping mechanism includes a support that can move vertically relative to a base, with clamping components and flipping protection components arranged on opposite sides of the support. Compared to existing semiconductor processing flipping devices, this invention utilizes an arc-shaped adjustment plate that can move relative to a transmission frame along its arc length to adjust the flipping angle, adapting to flipping requirements under various working conditions, improving flexibility, and facilitating the widespread application of the flipping device. Furthermore, it can utilize several clamping units and a flexible protective plate to adaptively clamp the component to be flipped according to its shape, thereby achieving adaptive clamping and effective protection of the component, improving the accuracy and reliability of the flipping operation, and significantly enhancing the reliability of the flipping device of this invention.

[0054] While one or more embodiments of the present invention have been described above, those skilled in the art will recognize that the present invention can be implemented in any other form without departing from its spirit and scope. Therefore, the embodiments described above are illustrative and not restrictive, and many modifications and substitutions will be apparent to those skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A flipper for semiconductor front-end equipment components, characterized by, It includes a base (1) and two flipping mechanisms arranged opposite each other on the base (1) in a horizontal direction, and the two flipping mechanisms are configured to move towards or away from each other; Each flipping mechanism includes a support (2) that can move vertically relative to the base (1), and a clamping assembly and a flipping protection assembly are provided on the opposite side of the support (2); The clamping assembly includes a transmission frame (3), an arc-shaped adjustment plate (4), and a clamping plate (5). One end of the transmission frame (3) is axially rotatably connected to the support (2). The arc-shaped adjustment plate (4) is connected to the other end of the transmission frame (3) and is configured to move relative to the transmission frame (3) along its arc length direction. The clamping plate (5) is connected to the arc-shaped adjustment plate (4), and several clamping units are provided on its opposite side. The overturning protection assembly includes a flexible protective plate (6) that is axially rotatably connected to the support (2) and can move relative to the clamping plate (5). Among them, several of the clamping units and the flexible protective plate (6) are configured to adaptively clamp the parts to be flipped according to their shape, so as to flip and protect them.

2. The turnover device for semiconductor front-end equipment parts according to claim 1, wherein, The base (1) is provided with a first slide groove (101), and the lower ends of the two supports (2) are embedded in the first slide groove (101) and can move towards or away from each other along the first slide groove (101).

3. The turnover device for semiconductor front-end equipment parts according to claim 2, wherein, One side of the support (2) is provided with a first cylinder (7) for driving it to move along the first slide (101).

4. The turnover device for semiconductor front-end equipment parts according to claim 3, wherein, A base (8) is provided below the support (2), and a plurality of second cylinders (9) are provided in the base (8). The upper ends of the plurality of second cylinders (9) are connected to the support (2) to drive the support (2) to move vertically relative to the base (1).

5. The turnover device for semiconductor front-end equipment parts according to claim 4, wherein, One end of the transmission frame (3) is connected to a first rotating shaft (10), and the driving end of the first rotating shaft (10) is connected to a first motor (11), which is embedded in the support (2).

6. The turnover device for semiconductor front-end equipment parts according to claim 5, wherein, The arc-shaped adjustment plate (4) has an arc-shaped open area (401). Two racks (12) are symmetrically arranged in the arc-shaped open area (401) and extend along their arc length direction. Each rack (12) is meshed with a first gear (13). A hollow motor (14) is arranged between the two first gears (13). A second rotating shaft (15) is inserted in the hollow motor (14). Both ends of the second rotating shaft (15) extend out of the arc-shaped open area (401) and are fixedly connected to the transmission frame (3).

7. The flipper for semiconductor front end equipment components according to claim 6, wherein, Several clamping units are evenly distributed around the clamping plate (5), and each clamping unit includes a limiting cylinder (16) connected to the clamping plate (5). A clamping rod (17) is inserted inside the limiting cylinder (16). A return spring (18) with one end connected to the clamping rod (17) and the other end connected to the limiting cylinder (16) is sleeved on the clamping rod (17). A flexible clamping head (19) is provided at one end of the clamping rod (17) for contacting and clamping the part to be flipped.

8. The turnover device for semiconductor front-end equipment parts according to claim 7, wherein, Four second gears (20) are evenly arranged in the support (2) along the circumference of the first motor (11). The inner sides of the four second gears (20) are meshed with a double gear (21). The inner ring of the double gear (21) is meshed with a toothed cam (22) with one end sleeved on the hollow motor (14). One end of the flexible protective plate (6) is connected to the toothed cam (22). Among them, the driving end of one of the four second gears (20) is connected to a second motor (23), which is used to drive the flexible protective plate (6) to rotate axially.

9. The flipper for semiconductor front end equipment components according to claim 8, wherein, A connecting plate (24) is fixedly connected to one side of the toothed cam (22), and a bearing plate (25) is fixedly connected to one side of the connecting plate (24). The bearing plate (25) has a second slide groove (2501) on one side. A lead screw (26) is inserted into the second slide groove (2501). A third motor (27) is connected to the driving end of the lead screw (26). One end of the flexible protective plate (6) extends into the second slide groove (2501) and is threadedly connected to the lead screw (26).

10. The flipper for semiconductor front end equipment components according to claim 9, wherein, The flexible protective plate (6) is embedded with a drive frame. The drive frame includes a drive seat (28) with one end threaded to the lead screw (26). The other end of the drive seat (28) is provided with a first built-in motor. The first built-in motor is fitted with a third rotating shaft (29) with both ends connected to the drive seat (28). The third rotating shaft (29) is fitted with a first drive frame (30). One end of the first drive frame (30) is fitted with a fourth rotating shaft (31). The fourth rotating shaft (31) is provided with a second built-in motor. Furthermore, both ends of the fourth rotating shaft (31) are connected to the first drive plate (32), and one end of the two first drive plates (32) is provided with the fifth rotating shaft (33). The fifth rotating shaft (33) is provided with the third built-in motor, and a second drive frame (34) is sleeved on it. The other end of the second drive frame (34) is provided with the sixth rotating shaft (35), and the sixth rotating shaft (35) is provided with the fourth built-in motor, and both ends of it are connected to the second drive plate (36). One end of the two second drive plates (36) is provided with the seventh rotating shaft (37).

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