Convenient fine-tuning ejector pin device and ejector pin fine tuning method

Abstract

The invention provides a convenient fine-adjustable ejector pin device and an ejector pin fine-adjusting method, and the device comprises a lifting base which is located in a shielding case, and the shielding case is connected with the lower bottom surface of a process cavity; the transmission mechanisms are used for driving the corresponding ejector pins to ascend and descend in the vertical direction; the input end of the transmission mechanism is rotationally arranged on the shielding cover, the output end of the transmission mechanism is connected with the corresponding ejector pin, and the output end of the transmission mechanism extends in the vertical direction and can ascend into the process cavity from the interior of the shielding cover. The height of the ejector pin in the process cavity can be finely adjusted.

Description

Technical Field

[0001] This invention belongs to the field of wafer ejector mechanism technology in the field of wafer equipment, and particularly relates to a convenient and finely adjustable ejector device and ejector fine-tuning method. Background Technology

[0002] In semiconductor manufacturing equipment, most processes are performed in a vacuum environment or a sealed lower space. The process cavity requires lift pins as a transfer medium for wafer transfer with robotic arms; lift pins typically employ a three-pin or four-pin mechanism. Existing technologies such as... Figure 1 As shown, Figure 1 In the process chamber 3, a stage and a Lift Pin support ring assembly are provided. An ejector pin 5 is located on the Lift Pin support ring assembly and passes through the Lift Pin limiting post on the stage. The Lift Pin support ring assembly is lifted and lowered by a cylinder, and a wafer transfer port is provided on the process chamber 3.

[0003] Figure 1 In the middle position: with the lift pin in the lower position, the robot arm transfers the wafer from the transfer port to the process cavity 3. The lift pin lifts up to separate the wafer 7 from the robot arm, the robot arm exits the process cavity 3, and the lift pin descends, placing the wafer 7 onto the stage. The reverse process transfers the wafer out of the process cavity. To prevent the wafer from shifting when landing on the stage, the wafer's level on the lift pin must be consistent with the stage. Therefore, the lift pin height needs to be adjusted to ensure that the three or four pins are at the same height.

[0004] Therefore, the existing technology has the following drawbacks: 1. The space between the bottom surface of the process cavity 3 and the stage is small, making it impossible to install the ejector pin fine-tuning structure, and thus impossible to fine-tune the ejector pin 5 in the process cavity 3. 2. Using a hard connection method requires ensuring that the aforementioned height difference is consistent only under conditions of zero machining accuracy, which is difficult to meet in reality and results in a high scrap rate. 3. Most existing ejector pin lift pin fine-tuning mechanisms require removing the side plate of the bottom shield 2 during adjustment, and then inserting a wrench into the shield to make adjustments. Figure 1 The two bases (orange-red parts) are located in a small space within the shielding cover 2, making them difficult to adjust. Summary of the Invention

[0005] The purpose of this invention is to provide a convenient and finely adjustable ejector pin device and ejector pin fine-tuning method, which can finely adjust the height of the ejector pin 5 in the process cavity 3. The technical solution adopted is as follows: A convenient and finely adjustable ejector pin device includes: The lifting base 1 is located inside the shielding cover 2, which is connected to the bottom surface of the process cavity 3. And several transmission mechanisms 4, all used to drive the corresponding ejector pins 5 to rise and fall in the vertical direction; The transmission mechanism 4 has its input end rotatably mounted on the shield 2 and extending to the outside of the shield 2, its output end connected to the corresponding ejector pin 5, and its output end extending vertically and rising from inside the shield 2 to the process cavity 3.

[0006] Preferably, the transmission mechanism 4 includes: Worm gear 41 is used to drive the lifting shaft 43 to lift and rotate, and is mounted on the lifting base 1. The lifting shaft 43 extends vertically and is threadedly connected to the worm gear 41. Its upper end is connected to the ejector pin 5. The worm gear 42 meshes with the worm wheel 41, and its lifting base 1 and shielding cover 2 are rotatably connected.

[0007] Preferably, one section of the worm gear 42 is embedded in the inner ring of the first bearing 44, and the outer ring of the first bearing 44 is embedded in the shielding cover 2.

[0008] Preferably, the other section of the worm gear 42 is connected to the lifting base 1 via a second bearing 45.

[0009] Preferably, the worm gear 42 is embedded in a section of the first bearing 44, and a hexagonal groove is formed on its end face.

[0010] Preferably, the worm gear 41 is embedded in the bracket 11 of the lifting base 1.

[0011] Preferably, the upper end face of the shielding cover 2 is provided with a lower through hole for the lifting shaft 43 to pass through, and the lower end face of the process cavity 3 is provided with an upper through hole corresponding to the lower through hole.

[0012] Preferably, the upper end face of the shield 2 is fitted with the lower end face of the process cavity 3, and the shield 2 and the process cavity 3 are connected by screws.

[0013] Preferably, the inner wall of the worm gear 41 is provided with an internal thread, which engages with the external thread on the ejector pin 5.

[0014] A method for fine-tuning a thimble includes the following steps: Using an Allen wrench, rotate the input end of the transmission mechanism to drive the worm gear 42 to rotate. At the same time, the worm gear 42 drives the worm wheel 41 to rotate, and the worm wheel 41 drives the lifting shaft 43 to rise and fall. The lifting shaft 43 drives the ejector pin 5 to rise and fall.

[0015] Compared with the prior art, the advantages of the present invention are: 1. Improve the Lift Pin support ring assembly to achieve fine adjustment of the height of the ejector pin 5 in the process cavity 3.

[0016] This ensures that wafer 7 is parallel to the stage, thus avoiding issues such as high scrap rates and wafer misalignment when it falls onto the stage.

[0017] To avoid abnormal verticality of the Lift Pin caused by machining errors, which could lead to friction and jamming between the Lift Pin and the Lift Pin limiting post.

[0018] 3. The height of the ejector pin 5 can be finely adjusted by rotating it with an Allen wrench from the outside of the shielding cover 2 without disassembling it. This avoids repeated disassembly, which increases working time and installation difficulty.

[0019] 4. The worm gear mechanism has a self-locking function to ensure that the height position of the ejector pin 5 remains unchanged after it has been raised or lowered to the set height.

[0020] 5. This device is mainly designed for the limited space in the lower part of the process cavity 3, but it is not limited to this. It is also applicable to large spaces or open spaces in the lower part of the process cavity 3. Attached Figure Description

[0021] Figure 1 This is a cross-sectional view of a semiconductor manufacturing equipment in the prior art; Figure 2 A three-dimensional diagram of the easily adjustable ejector pin device; Figure 3 An exterior view of a semiconductor manufacturing equipment equipped with a convenient, finely adjustable ejector pin device; Figure 4 for Figure 3 Perspective view; Figure 5 This diagram illustrates the installation method of the ejector pin and the lifting shaft.

[0022] Among them, 1-lifting base, 2-shielding cover, 3-process cavity, 4-Transmission mechanism, 41-Worn gear, 42-Worn, 43-Lifting shaft, 44-Bearing No. 1, 45-Bearing No. 2 5-Ejector pin, 6-Drive unit, 7-Wafer, 8-Guide cylinder. Detailed Implementation

[0023] The convenient and finely adjustable ejector pin device and ejector pin fine-tuning method of the present invention will be described in more detail below with reference to the schematic diagrams, which illustrate preferred embodiments of the present invention. It should be understood that those skilled in the art can modify the present invention described herein while still achieving the advantageous effects of the present invention. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the present invention.

[0024] In this embodiment, the height difference between the ejector pins 5 ranges from 0 to 3 mm. That is, the fine-tuning range is 0 to 3 mm.

[0025] like Figures 2-5 A convenient and finely adjustable ejector pin device includes: a lifting base 1 and three transmission mechanisms 4.

[0026] The lifting base 1 is located inside the shielding cover 2 and can move up and down in the vertical direction. Its bottom surface is connected to the output end of the power unit 6, which is located inside the shielding cover 2.

[0027] According to existing technology: the power unit 6 is installed on the base, and the base is fixed inside the shielding cover 2; the base is provided with guide columns, and the guide columns are slidably connected to the process cavity 3.

[0028] The output end of the power unit 6 is connected to the lifting base 1. In this embodiment, the power unit 6 is a cylinder.

[0029] The shield 2 is connected to the bottom surface of the process cavity 3.

[0030] Specifically: the upper end face of the shielding cover 2 is provided with a lower through hole for the lifting shaft 43 to pass through, and the lower end face of the process cavity 3 is provided with an upper through hole corresponding to the lower through hole.

[0031] The upper end face of the shield 2 is attached to the lower end face of the process cavity 3, and the shield 2 and the process cavity 3 are connected by screws.

[0032] The three transmission mechanisms 4 are all used to drive the corresponding ejector pins 5 to move up and down vertically within the process cavity 3; The transmission mechanism has its input end rotatably mounted on the shield 2, and its output end connected to the corresponding ejector pin 5. The ejector pin 5 extends vertically and can rise from inside the shield 2 into the process cavity 3.

[0033] Specifically, the transmission mechanism 4 includes: worm gear 41, worm 42, lifting shaft 43 and bearing 44.

[0034] Among them, the worm gear 42 is the input end of the transmission mechanism 4, and the lifting shaft 43 is the output end of the transmission mechanism 4.

[0035] The worm gear 41 is used to drive the lifting shaft 43 to lift and rotate, and its rotation is set on the lifting base 1.

[0036] Specifically, the worm gear 41 is mounted on the bracket 11 of the lifting base 1, that is, the upper and lower end faces (non-tooth surfaces) of the worm gear 41 are in contact with the bracket 11. Under the limiting action of the bracket 11, the worm gear 41 can rotate in the bracket 11.

[0037] like Figure 2As shown, the bracket 11 is part of the lifting base 1, and it includes two clamping plates arranged vertically opposite each other. The vertical gap formed between the clamping plates is used to install and limit the worm gear 41. In actual operation, the worm gear is simply inserted between the clamping plates.

[0038] The lifting shaft 43 is fitted with the guide cylinder 8 with a clearance, and the guide cylinder 8 is embedded in the lifting base 1.

[0039] The lifting shaft 43 extends vertically and is threadedly connected to the worm gear 41. Its upper end is connected to the ejector pin 5.

[0040] In this embodiment, an internal thread is formed on the inner wall of the worm gear 41, and the internal thread engages with the external thread on the ejector pin 5.

[0041] The worm 42 has one end that meshes with the worm wheel 41 externally, and the other end that is embedded in the inner ring of the first bearing 44; The worm gear 42 has one end embedded in the inner ring of the first bearing 44, the outer ring of the first bearing 44 is embedded in the shield 2, and the other end is rotatably connected to the lifting base 1 through the second bearing 45.

[0042] The first bearing 44 is embedded in the shield 2, and its axis is perpendicular to the ejector pin 5.

[0043] The worm gear 42 is embedded in a section of the first bearing 44, extending out of the shield 2, and has a hexagonal slot on its end face, such as... Figure 4 As shown.

[0044] like Figure 2 As shown, three LIFT pins are connected to the lifting base 1, and the lifting base 1 is connected to the cylinder. The cylinder lifts and lowers, driving the entire mechanism (convenient and finely adjustable ejector pin device) to move vertically up and down in the vertical direction to realize the action process.

[0045] like Figures 3-4 As shown, bearing 44 is embedded in shield 2, and worm gear 42 has an internal hexagonal slot at one end so that the operator can rotate the worm gear with an internal hexagonal wrench.

[0046] The rotation of the worm gear 42 drives the worm wheel 41 to rotate, which in turn transmits the power to the lifting shaft 43, causing the lifting shaft 43 to move up and down. The lifting shaft 43 is connected to the ejector pin by a thread, so that the height of the whole consisting of the lifting shaft 43 and the ejector pin 5 can be adjusted up and down. At the same time, the worm gear mechanism has a self-locking function, so that after all the LIFT pins are adjusted to the same height, their positions will not change during the movement of the mechanism (lifting base 1).

[0047] This invention mainly modifies the support ring structure (Lift Pin support ring assembly), and the specific installation and adjustment methods are as follows: Using an Allen wrench, rotate the hexagonal slot on the outside of the shield 2 to rotate the worm gear 42. At the same time, the worm gear 42 drives the worm wheel 41 to rotate, and the worm wheel 41 drives the lifting shaft 43 to rise and fall. The lifting shaft 43 drives the LIFT PIN to rise and fall. Adjust the height of three or four LIFT PINs until multiple LIFT PINs are adjusted to the same height to ensure that the wafer wafer remains parallel to the stage when it is raised and lowered.

[0048] After adjusting the wafer to a horizontal position using this convenient, finely adjustable ejector pin device, ensuring all ejector pins are at the same height, the wafer handling process via the robotic arm is as follows: 1. The robotic arm carries the wafer through the transfer port into the process chamber 3; 2. The cylinder rises, causing the entire assembly to rise. The lifting base 1 then raises the lift pin. The lift pin is higher than the surface of the robotic arm, lifting the wafer and detaching it from the robotic arm. Figure 2 As shown; 3. The robotic arm exits the process chamber 3; 4. The Lift Pin descends via the cylinder and lifting base 1, causing the wafer to fall onto the Stage; at this time, the height of the Lift Pin is lower than the surface of the Stage. 5. Processing begins in the process chamber; 6. The process in the process chamber is complete; 7. The Lift Pin lifts the wafer via a cylinder and lifting base 1; 8. The robotic arm enters the process chamber through the transfer port; 9. The lift pin descends, causing the wafer to fall onto the robotic arm, and the lift pin detaches from the wafer; 10. The robotic arm carries the wafer out of the process chamber; the wafer handling process is complete. The above are merely preferred embodiments of the present invention and do not constitute any limitation on the present invention. Any equivalent substitutions or modifications made by those skilled in the art to the technical solutions and content disclosed in the present invention without departing from the scope of the present invention shall be deemed to have remained within the scope of protection of the present invention.

Claims

1. A convenient and finely adjustable ejector pin device, characterized in that, include: The lifting base (1) is located inside the shielding cover (2), which is connected to the bottom surface of the process cavity (3); And several transmission mechanisms (4), all of which are used to drive the corresponding ejector pins (5) to rise and fall in the vertical direction; The transmission mechanism (4) has its input end rotatably mounted on the shield (2) and extending to the outside of the shield (2), its output end connected to the corresponding ejector pin (5), and its output end extending vertically and rising from inside the shield (2) to the process cavity (3).

2. The convenient and finely adjustable ejector pin device according to claim 1, characterized in that, The transmission mechanism (4) includes: Worm gear (41), which is used to drive the lifting shaft (43) to lift, and its rotation is set on the lifting base (1). The lifting shaft (43) extends vertically and is threadedly connected to the worm gear (41), and its upper end is connected to the ejector pin (5); The worm (42) meshes with the worm wheel (41), and its lifting base (1) and shield (2) are rotatably connected.

3. The convenient and finely adjustable ejector pin device according to claim 2, characterized in that, One section of the worm (42) is embedded in the inner ring of the first bearing (44), and the outer ring of the first bearing (44) is embedded in the shield (2).

4. The convenient and finely adjustable ejector pin device according to claim 3, characterized in that, The other section of the worm gear (42) is connected to the lifting base (1) via a second bearing (45).

5. The convenient and finely adjustable ejector pin device according to claim 3, characterized in that, The worm (42) is embedded in a section of the first bearing (44), and a hexagonal groove is provided on its end face.

6. The convenient and finely adjustable ejector pin device according to claim 1, characterized in that, The worm gear (41) is embedded in the bracket (11) of the lifting base (1).

7. The convenient and finely adjustable ejector pin device according to claim 2, characterized in that, The upper end face of the shield (2) is provided with a lower through hole for the lifting shaft (43) to pass through, and the lower end face of the process cavity (3) is provided with an upper through hole corresponding to the lower through hole.

8. The convenient and finely adjustable ejector pin device according to claim 1, characterized in that, The upper end face of the shield (2) is attached to the lower end face of the process cavity (3), and the shield (2) and the process cavity (3) are connected by screws.

9. The convenient and finely adjustable ejector pin device according to claim 1, characterized in that, The worm gear (41) has an internal thread on its inner wall, which engages with the external thread on the ejector pin (5).

10. A method for fine-tuning a pin, characterized in that, Includes the following steps: Using an Allen wrench, rotate the input end of the transmission mechanism to drive the worm (42) to rotate. At the same time, the worm (42) drives the worm wheel (41) to rotate. The worm wheel (41) drives the lifting shaft (43) to rise and fall. The lifting shaft (43) drives the ejector pin (5) to rise and fall.

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