Mass flow control system

Abstract

The invention relates to a mass flow control system (300) having a carrier plate (301) which, on a first side (302), has fluid interfaces for mounting valve modules (304), each fluid interface having a plurality of channel ports (345), each channel port (345) being connected to an inlet channel (306, 307) or to one of a plurality of outlet channels (309), the inlet channel (306, 307) extends from the first inflow connection (401) through the carrier plate (301) to the second inflow connection (401), and in the inlet channel (306, 307) a blocking assembly (406) is provided which divides the inlet channel (306, 307) into a first inlet channel section (407) and a second inlet channel section (408), the first inlet channel section (407) being in fluid connection with at least one channel opening (345) associated with the first inlet channel section (407), and the second inlet channel section (408) being in fluid connection with at least one channel opening (345) associated with the second inlet channel section (408). The second inlet channel section (408) is fluidically connected to at least one channel opening (345) associated with the second inlet channel section (408), and the mass flow control system has a plurality of valve modules (304) each having at least one valve device (325).

Description

Technical Field

[0001] This invention relates to a mass flow control system for providing fluid mass flow under control. Such systems are used, for example, in production equipment, to precisely provide a defined fluid mass flow rate, particularly compressed air mass flow rate or process gas flow rate, to one or more workspaces, or to precisely extract fluid mass flow rate from such workspaces to generate or maintain negative pressure or vacuum. Background Technology

[0002] The object of this invention is therefore to provide a modular mass flow control system that provides two fluid mass flow rates under control, specifically for fluid supply and fluid extraction from the workspace. Summary of the Invention

[0003] This objective of the present invention is achieved by means of a mass flow controller for providing fluid mass flow under control, the mass flow control system having a carrier plate having a fluid interface on a first side for mounting valve modules, each fluid interface having multiple channels, each channel being connected to either a first inlet channel constructed on the carrier plate or to one of a plurality of outlet channels constructed on the carrier plate, the inlet channel extending from a first inlet connector via the carrier plate to a second inlet connector, the inlet channel having a blocking component, particularly freely locating within the inlet channel, the component dividing the input channel into a first inlet channel segment and a second inlet channel segment, the first and second inlet channel segments being fluidly separated, the first inlet channel segment being fluidly connected to at least one channel port configured for the first input channel segment, the second inlet channel segment being fluidly connected to at least one channel port configured for the second input channel segment, and the mass flow control system having a carrier plate having a first inlet connector for mounting valve modules, each fluid interface having multiple channels for mounting valve modules, each channel port being fluidly connected to at least one channel port configured for the second input channel segment, and the mass flow control system having a first inlet connector for mounting valve modules, each fluid interface having multiple channels ... The mass flow control system has multiple valve modules, each equipped with at least one valve device. Each valve module is designed to affect at least one fluid mass flow rate. Each valve module has an input interface and an output interface. The input interface is sealed to an input channel via an associated channel port, and the output interface is sealed to one of the output channels via an associated channel port. The mass flow control system has an electronic processing unit, a power supply interface, and a power control interface for coupling with the valve modules. Each output channel has a flow resistance, and each outlet channel is equipped with a sensor port in the flow resistance region. The sensor port leads to a second side of the support plate away from the first side of the support plate. A pressure sensor is configured to be connected to the sensor port. The processing unit is electrically connected to the pressure sensor, the supply interface, and the control interface. The processing unit is configured to evaluate the sensor signal from the pressure sensor and control the valve module connected to the control interface to perform mass flow control.

[0004] The fluid mass flow control system of the present invention is designed to provide controlled, fluidly separated fluid mass flow rates, with the fluid separation achieved by a barrier component disposed in the input channel. To provide controlled, fluidly separated fluid mass flow rates, the fluid mass flow control system constructs a first fluid cycle and a second fluid cycle. The first fluid cycle consists of a first inlet connector, a first input channel section, a channel opening configured for the first input channel section, a flow module sealed to the channel opening, and an output channel sealed to the flow module. Similarly, the second fluid cycle consists of a second inlet connector, a second input channel section, a channel opening configured for the second input channel section, a flow module sealed to the channel opening, and an output channel sealed to the flow module.

[0005] For example, a fluid mass flow rate, particularly a processing gas, can be directed under control to a working space via a first fluid circulation, while simultaneously a fluid mass flow rate is drawn from another working space under control, particularly to evacuate the other working space and maintain a predetermined or predeterminable negative pressure therein.

[0006] For example, the inlet channel may include a first hole formed on the front end side of the support plate adjacent to the first side of the support plate, and another hole fluidly connected to this hole formed on the side side of the support plate adjacent to the first side and the front end side. The positions of the first hole penetrating the front end side and the second hole penetrating the side side define the first inlet connector and the second inlet connector.

[0007] The channel opening is preferably fluidly connected to the second orifice, and the blocking assembly is also preferably disposed in the second orifice. Therefore, depending on the position of the blocking assembly, which can be freely positioned within the inlet channel, multiple channel openings configured for the second input channel segment can be determined. Subsequently, during manufacturing, the support plate and mass flow control system are adapted to the characteristics of the application by changing the support plate, thereby determining the number of channel openings configured for the first and second input channel segments, as well as the number of valve modules configured for each segment, and thus determining the maximum fluid mass flow rate in each fluid circulation.

[0008] The barrier assembly is advantageously designed as a spherical component with a diameter larger than that of the input channel and a material with a higher hardness than that of the support plate. Therefore, the barrier assembly can be pressed into the input channel, dividing it into a first input channel segment and a second input channel segment. The required fluid separation between the first and second inlet channel segments is achieved through the pressure fit between the input channel and the barrier assembly. Other geometries are also possible for the barrier assembly.

[0009] Alternatively, the barrier component can be, for example, a barrier component embedded with material fitting properties, particularly a solder joint or adhesive joint.

[0010] The mass flow control system of this invention also features high modularity, allowing its use in mass flow control systems with different configurations. For example, two or more valve modules can be connected to a support plate, allowing a single fluid mass flow rate to supply two users, or the first of two valve modules can initially supply the user, switching to the second valve module if the first module encounters a problem. Furthermore, the number of valve modules used can be determined based on usage. For example, five valve modules can be configured to supply five different users. Therefore, the number of valve modules is flexible because the evaluation of required sensor data and the preparation of valve control signals for the valve modules can be performed by an electronic processing unit implemented as a processor or microcontroller on the motherboard. No dedicated controller is required within the valve modules.

[0011] The support plate serves two purposes: firstly, it provides mechanical fixation for the valve module; secondly, it facilitates fluid connections between the fluid source, the valve module, and / or multiple consumable devices (particularly the working space). During vacuuming, the working space requiring vacuuming can be considered the fluid source, for example, supplying fluid mass flow rate to a vacuum pump considered a consumable device. The support plate is made of materials such as plastic or metal, particularly aluminum, and preferably has a generally square shape.

[0012] Valve modules are preferably arranged adjacent to each other along an alignment direction and opposite sides, particularly the largest plane of each valve module. Each valve module housing has two parallel sides connected by narrow sides, and at least one of the narrow sides is designed to rest against a support plate. Preferably, this narrow side is flat, and the support plate is also flat, at least in the fluid interface area.

[0013] Each valve module housing may be, for example, square, and has multiple, in particular parallel, parallel boxes that are equidistant from each other and are spaced at the same interval, on the front end side perpendicular to the narrow side to which it is to be abutted against the support plate. Each box extends into the valve module housing in the form of a groove along an extending axis from the front end face. The box preferably has a substantially constant cross-section, and its opening is preferably on a surface parallel to the front end face. Each box is designed to accommodate a valve device, and each valve device can be pushed into the box from the opening in the direction of the first extending axis.

[0014] The valve assembly has a supply connector and an output interface, each designed as an inlet to either a supply channel or an output channel of the valve assembly. A valve seat and valve element are installed in the outlet channel; the valve element can move between the closed and open positions of the valve seat, thus changing the cross-section of the outlet channel. The valve element is connected to an actuator, which controls the valve seat between the open and closed positions based on an electrical control signal.

[0015] Preferably, the valve releases the maximum cross-section of the output channel in the open position and completely closes the output channel in the closed position.

[0016] The flow resistance provided in each outlet channel of the support plate allows pressure sensors mounted on the main board to measure fluid mass flow rate in each outlet channel using a differential pressure method. The flow resistance can be designed as, for example, a throttling device, a shutter, or a lavaldüse nozzle. Each pressure sensor configured for the output channel protrudes into a sensor port located in the flow resistance zone and is fluidly connected to its respective outlet channel. A sealing assembly is provided to ensure a fluid-tight connection between the pressure sensor and the support plate. The pressure sensor is directly mounted on the main board, and the electrical sensor signal provided by the sensor is transmitted to the electronic processing unit via signal wires integrated on the main board, where it is processed.

[0017] The electronic processing unit is connected to the power supply circuit board of each valve module via the electrical control interface of the valve module. This allows the electronic processing unit to send control signals to the valve devices within the valve module.

[0018] In this invention, an electronic processing unit performs mass flow control on each output channel to provide a preset fluid mass flow rate to the output interface of each outlet channel. Here, the electronic processing unit implements valve module control based on the measured fluid mass flow rate. It can be configured such that all valve devices configured for an output channel are operated simultaneously, each having substantially the same valve opening. In this type of operation, when the actuators of each valve device release the maximum cross-section of each output channel in the open position, all valve assemblies configured for the output channel can fully open their valve openings, providing the maximum fluid mass flow rate.

[0019] Another approach could be to pair up two valves in the valve module to form a first group, and then pair up the other two valves in the valve module to form a second group. Initially, only the first group is used to control the fluid mass flow rate, and the second group only begins operation if at least one valve in the first group fails, thus serving as a backup group.

[0020] The power supply interface is used to supply current to electrical and electronic components, especially to the processing unit and pressure sensor, and also supplies valve modules through various control interfaces.

[0021] Furthermore, the supply interface allows the fluid mass flow system to communicate with upper-level controllers, such as those in networked automation facilities. For this purpose, the supply interface is designed to connect the fluid mass flow system to an AC system. For example, the supply interface communicates according to the following groups of AC standards: OPCUA (Open Platform Communication Unified Architecture), bus communication systems, and trained IO-Link. In this case, data exchange can be performed via the supply interface, for example, with upper-level controllers, particularly programmable logic controllers (PLCs), or with control panels, or with the cloud.

[0022] Further advantageous embodiments of the invention are described in the appendix claims.

[0023] In a favorable design of a mass flow control system, the electronic processing unit, electrical supply interface, electrical control interface, and pressure sensor are all located on a single motherboard.

[0024] By centralizing the processing unit, supply interface, control interface, and pressure sensor on the mainboard, all components can be centrally supplied and controlled, allowing all steps required for mass flow control to be implemented by the mainboard. This eliminates the need for separate boards, such as sensor boards and control boards, implemented in series. Advantageously, the blocking assembly is removably positioned in the input channel. Thus, for example, a screw-in blocking assembly is not initially positioned in the inlet channel with threads that at least partially mate with the blocking assembly's threads, and only the second inlet connector is fluidly sealed, so that the inlet channel is not separated, and the mass flow control system has one fluid cycle starting from the first inlet connector. If the mass flow control system is used for operations requiring two fluid cycles, the blocking assembly can be screwed into the input channel to form a first-stage second inlet channel segment, fluidly separating them.

[0025] When there is no second fluid circulation or no need for a second fluid circulation, or when a larger fluid mass flow rate needs to be provided by the first fluid circulation control, the separation reversal can be reversed in a similar manner.

[0026] In a preferred design, a first sensor orifice is located before the flow resistance in the flow direction, and a second sensor orifice is located after the flow resistance in the flow direction. A first pressure sensor configured for the first sensor orifice and a second pressure sensor configured for the second sensor orifice are each designed as an absolute pressure sensor. The pressure loss induced by the flow resistance can be detected as a pressure difference between the sensor signals of the first and second pressure sensors, and the fluid mass flow rate is calculated based on this. The calculations required for this are performed within the electronic processing unit. The electronic processing unit is further configured to send an appropriate control signal to the valve module when there is a difference between the actual calculated fluid mass flow rate and the predetermined expected fluid mass flow rate, thereby controlling the fluid mass flow rate to the expected fluid mass flow rate. In this embodiment, in addition to the first and second pressure sensors, an additional pressure sensor can be configured on the main board to measure ambient pressure; its sensor signal is also processed in the electronic processing unit.

[0027] An alternative approach is to design the first and second pressure sensors as relative pressure sensors, and provide an ambient pressure sensor on the motherboard to measure ambient pressure. This allows for the use of a simpler relative pressure sensor, and the measurement results can be corrected before calculating the fluid mass flow rate by using the detected ambient pressure.

[0028] An alternative approach is to position the first sensor port upstream of the flow resistance in the flow direction, and the second sensor port has a first inlet channel and a second inlet channel. The first inlet channel leads to the outlet channel upstream of the flow resistance in the flow direction, and the second inlet channel leads to the outlet channel downstream of the flow resistance in the flow direction. The first pressure sensor supplied to the first sensor port is designed as an absolute pressure sensor, and the second pressure sensor supplied to the second sensor port is designed as a differential pressure sensor. Alternatively, the first pressure sensor can be designed as a relative pressure sensor, and the second pressure sensor as a differential pressure sensor. An ambient pressure sensor is installed on the main board to measure ambient pressure. This allows the differential pressure measuring device to be advantageously used for direct differential pressure measurement of pressure loss induced by flow resistance, and, together with the absolute pressure measured upstream of the flow resistance, is used in the calculation of mass flow rate.

[0029] Advantageously, the valve module has multiple output interfaces and includes multiple valve devices, each connected to an input interface and an output interface, or to multiple output interfaces. Thus, for example, in a valve module with four valve devices, two valve devices are fluidly connected to a first output interface, and the other two valve devices are fluidly connected to other output interfaces, with each output interface sealed to an outlet channel via a port. The fluid mass flow rate supplied by each outlet channel can also be determined in each output channel. Therefore, for example, fluid mass flow rates can be simultaneously or alternately supplied to two different consumption devices, and each supplied fluid mass flow rate can be controlled. Alternatively, a fluid separation can be made between the first and second output interfaces, thus allowing different fluids to be supplied to each consumption device.

[0030] In a favorable design, a channel plate is provided on the valve module to connect multiple valve devices within the module. The channel plate is designed to be mounted on the front end of the valve housing. A first connection channel and a second connection channel are formed on the channel plate. The first connection channel is fluidly connected to the supply connector of each valve device, and the second connection channel is fluidly connected to the output interface of each valve device. The input interface of the first connection channel is a port connected to the input channel, and the output interface of the second connection channel is sealed to the output channel via one or more ports. Depending on the number of valve devices in the valve module and / or the provided fluid mass flow rate, the first and second connection channels can be interchanged via the channel plate to achieve different configurations.

[0031] For example, it is conceivable that only two valve devices are installed in the first and second boxes of the valve module. In this case, the first connection channel and the second connection channel each have only two connections to the valve devices.

[0032] Preferably, the supply interface has both data and current interfaces for connecting to the supply module, and an interchangeable supply module is inserted into the supply interface and connected to the supply interface via the data and current interfaces. Therefore, the supply module can be replaced to adapt the supply interface to different conditions. For example, a supply module with a 50Hz current supply or a 60Hz current supply can be provided. It is also preferable to include an AC unit in the supply module that can be integrated into various AC systems, so that it can operate on different AC systems through module interchange.

[0033] In another design of a mass flow control system, the support plate has multiple grooves, each accommodating a plug segment of a valve module, providing a connection between the valve module and the main board in an engaged state. This creates an initial fixation of the valve modules on the support plate, ensuring correct alignment of the connectors. After proper alignment, the valve modules can be secured to the support plate, for example, using other fixing components.

[0034] Advantageously, the actuator of the valve device is a piezoelectric bender. The piezoelectric bender, particularly strip-shaped, can be a single, double, or triple piezoelectric chip, with or without a conductive intermediate layer, thereby enabling a proportional valve function. By changing the bending radius of the piezoelectric bender, the position of the valve connected to it changes, thus affecting the cross-section of the outflow channel, allowing the mass flow rate of the fluid released by the valve device to be adjusted by a control signal from an appropriate processing unit.

[0035] The valve module preferably includes a power supply board with high-voltage electronics to power the actuator designed as a piezoelectric bender. High voltage here refers to a DC voltage in the range of 300V. The power supply board is compatible with the valve device inserted into the valve module. However, it is still controlled by the processing unit; the high-voltage electronics included in the valve module simply convert the control signals from the processing unit into high-voltage signals suitable for the actuator. In this way, the complexity of the power supply board is significantly reduced, and the high-voltage electronics can be adapted to the valve device located within the valve module. Therefore, advantageously, when the valve module is replaced, the high-voltage electronics required to supply the valve device are also replaced.

[0036] In an advantageous design of the invention, the processing unit is designed to individually control each actuator. Therefore, for each valve assembly, the adjustment of each valve cross-section can be independent of the other valve cross-sections. In particular, each actuator can be electrically controlled by the processing unit with individual parameter sets.

[0037] Advantageously, the flow resistance is designed as a turbulent flow throttle. Using a turbulent flow throttle can generate a significant pressure drop, allowing for accurate differential pressure measurement while maintaining a small construction space requirement. This is particularly true when comparing the construction space requirements of a turbulent flow throttle with those of a laminar flow throttle. The function of a turbulent flow throttle is based on the fact that the fluid flow is diverted multiple times as it passes through it, thus undergoing multiple reversals, thereby achieving the desired pressure drop. For this purpose, at least two, preferably three, flow guide components are provided in the turbulent flow throttle, each pierced by one or more grooves. The grooves of adjacent flow guide components are arranged such that, on the projection surface transverse to the main flow direction of the fluid mass flow, the projections of the grooves of adjacent flow guide components do not overlap. Attached Figure Description

[0038] The invention will now be further described with reference to the accompanying drawings, which show:

[0039] Figure 1 Schematic diagram and 3D view of a mass flow control system.

[0040] Figure 2 Figure 1 3D exploded view of a mass flow control system.

[0041] Figure 3 Schematic diagram and exploded 3D view of the valve module.

[0042] Figure 4 A schematic diagram of the first fluid connection in a mass flow control system.

[0043] Figure 5 A schematic diagram of the second fluid connection in a mass flow control system.

[0044] Figure 6 A schematic diagram of all fluid connections in a mass flow control system.

[0045] Figure 7 Figure 1 A cross-sectional view of the mass flow control system as seen from section II on the side.

[0046] Figure 8 Figure 7 Detailed view of the exit channel in detail drawing A.

[0047] Figure 9 A cross-sectional view of the side view of the flow resistance designed as a turbulent flow throttle.

[0048] Figure 10 Figure 9 The top view of the inlet plate of the turbulence throttle shown.

[0049] Figure 11 Figure 9The top view of the throttling plate of the turbulence throttling device shown. Detailed Implementation

[0050] Figure 1 The mass flow control system 300 shown is used for fluid supply to multiple consumption devices (not shown). For example, the mass flow control system 300 includes a square aluminum support plate 301, on which multiple valve modules 304 are attached to an upper side 302, also referred to as the first side. Figure 2 An exploded perspective view of the mass flow control system 300 is shown. On the support plate 301...

[0051] The first front end side 305, perpendicular to the upper side 302, is provided with, for example, a first inlet connector 402 of a first inlet channel 306 and a first inlet connector 402 of a second inlet channel 307, each of which is connected to the fluid source 308. Figure 4 and 5 This is designed for use with respect to mass flow control system 300. Through this channel, mass flow control system 300 can be supplied with one or two pressurized fluids, particularly compressed air or process gas.

[0052] On the front end side 305, for example, eight outlet coupling devices 311 are provided, on which fluid lines (not shown) can be installed for connecting to consumption devices (not shown).

[0053] In the illustrated embodiment, the first inlet connector 401 of the first inlet channel 306 and the first inlet connector 401 of the second inlet channel 307 each have an inlet coupling device 310 implemented as a pneumatic connector. The outlet connections 311 each restrict the configured output channel 309, which extends on the support plate 301.

[0054] For example, five valve modules 304 are provided on the support plate 301, each having a function in Figure 2 and 3 The plug segment 312 can be seen in the image. The plug segment 312 is provided for the electrical connection of the valve module 304, and each of them passes through the groove 313 of the support plate 301. Each valve module 304 is mounted on the support plate 301 with two fixing screws 386 and 388.

[0055] Valve modules 304 are arranged adjacent to each other along an axis 303 with their largest facing sides 315. The housing 316 of valve module 304 has two parallel sides 315 connected by a narrow side 318, one of which can be designated as the bottom side 319. Here, valve modules 304 are positioned on the upper side 302 of support plate 301 with their bottom sides 319. Housing 316 is generally square. The first valve module 304 is adjacent to the housing 321 of supply module 322 with one side 315, and housing 321 is also fixed to support plate 301. To secure supply module 322, a support plate groove 314 is provided, adjacent to the front end side 305, which can be closed by a cover plate 317, and supply module 322 is partially accommodated in this groove. The cover plate 317 is secured by fixing screws 320.

[0056] On the support plate 305.

[0057] Figure 3 The valve module 304, as shown in the exploded perspective, has, for example, multiple parallel boxes 324 on the front end 323 perpendicular to the bottom side 319, which are spaced at the same distance from each other. Figure 4 , 5 (6). The housing 324 has a substantially constant cross-section for accommodating the valve device 325. The valve module 304 shown, for example, has four housings 324, each accommodating one valve device 325. The first side 328 of the valve device 325 is located in the front end side 323 region and has a supply connector 326 and an output interface 327. Four electrical connectors 330 are formed, for example, on the second side 329 of the valve device 325 opposite to the first side 328, for electrical connection to the power supply circuit board 331. However, the number of housings 324 can vary, particularly eight housings.

[0058] The electrical connector 330 protrudes from the receiving frame 333 formed on the second front end side 332 opposite to the first front end side 323 of the housing 316. A sealing ring 335 is provided between the sealing surface 334 of the valve device 325 and the inner surface of the receiving frame 333, which faces the housing 324 and is not visible, to fluidly seal the housing 324 against the receiving frame 333. In the region 336 on the outer side opposite to the inner surface of the receiving frame 333, a receiving chamber 337 is formed within the housing 321, which is accommodated when the power supply circuit board 331 is connected to the electrical connector 330. In this state, the power supply circuit board 331 partially protrudes from the plug section 312, such that the electrical connector 338 of the power supply circuit board 331 protrudes from the plug section 312. The receiving chamber 337 can be closed by the cover 339. A channel plate 340 is provided in the first front end side 333 region, on which a first connecting channel 341 and a second connecting channel 342 are formed. The first connecting channel 341 is sealed to the supply connector 326 of each valve device 325, and the second connecting channel 342 is sealed to the output interface 327. A sealing assembly 344 is provided between the first side 323 and the channel plate 340 to fluidly seal each valve device 325 relative to the channel plate 340.

[0059] A channel opening 345 is formed on the upper side 302 of the support plate 301. Through this channel opening, the input interface 346 of the first connecting channel 341 is sealed to either the first inlet channel 306 or the second inlet channel 307, and the output interface 347 of the second connecting channel 342 is sealed to one of the outlet channels 309. For this purpose, an additional seal 348 is provided, which can be placed on the bottom side 343 of the channel plate 340. A cover plate 351, sealed by a cover plate seal 350, is provided on the side 349 of the channel plate 340 away from the bottom side 343, and can be fixed to the channel plate 340 by means of fixing screws 386. For example, every two channel openings 345 represent a fluid interface configured for each valve module 304.

[0060] The aforementioned air pressure line can be specifically made by Figure 4 As shown in the first circuit diagram, the fluid source 308 is connected to the mass flow control system 300, for example, via the first inlet connector 401 of the first inlet channel 306, and supplies a fluid mass flow rate to the system. In the illustrated embodiment, the fluid mass flow rate enters the first input channel 306 in the carrier plate 301, exits through the channel port 345, enters the first connecting channel 341 of the channel plate 340 via the input interface 346, and is guided through this connecting channel to the... Figure 4The supply connector 326 of the valve device 325 is shown by way of example. Fluid mass flow rate is delivered from this point via the supply connector 326 of the valve device 325 through a supply passage 352 to the pressure chamber 353 within the valve device 325. The supply passage 352, like the two discharge passages 354, is formed in a nozzle carrier 355 provided in the valve device 325, and each discharge passage 354 has a pressure chamber-side opening 356 with a valve seat 357. The valve seat can be sealed closed by means of a valve element 358 of an actuator 359 of the valve device 325 implemented as a piezoelectric bender, or the cross-section of the discharge passage 354 can be changed by the actuator 359. Preferably, the actuator 359 releases the maximum cross-section of the discharge passage 354 in the open position and completely closes the discharge passage 354 in the closed position. Depending on the cross-section adjusted by each discharge channel 354, a portion of the fluid mass flow rate passes through each discharge channel 354, through the configured output interface 327, to the second connecting channel 342 and the outlet end 347, and enters an outlet channel 309 through the channel port 345, from which it can be sent to the consumption device. To measure the fluid mass flow rate guided through the outlet channel 309, a flow resistance 201, implemented as a turbulence throttling device, is provided in the outlet channel 309, for example. Figure 7 and 8 As can be seen, the pressure loss generated is measured by the first pressure sensor 361 and the second pressure sensor 362 of the main board 363. The main board 363 is equipped with sensor ports 364 that lead into the second side 365 of the carrier plate 301. In the illustrated embodiment, the first pressure sensor 361 and the second pressure sensor 362 are implemented as absolute pressure sensors, and the first sensor port 364 is located before the flow resistance 201 in the flow direction. The second sensor port 364 has a first inlet channel 366 and a second inlet channel 367, and is located after the flow resistance 201 in the flow direction.

[0061] In an embodiment not shown, the second sensor port 364 may have only one inlet channel, which is located after the flow resistance 201. Alternatively, in an embodiment not shown, both the first pressure sensor 361 and the second pressure sensor 362 may be implemented as relative pressure sensors, while in this embodiment, another pressure sensor implemented as an absolute pressure sensor is provided on the motherboard 363 for measuring ambient pressure.

[0062] The processing unit 368 on the motherboard 363, which is implemented as a microcontroller, is electrically connected to the first and second pressure sensors 361 and 362, and to the supply interface 369 and the control interface 370. The supply interface 369 of the motherboard 363 is provided for connection to the supply module 322. The motherboard 363 receives voltage through the supply interface and can, for example, communicate with the overall system (not shown), in which the mass flow control system 300 is integrated. For this purpose, the supply interface 369 has internal data and electrical interfaces. As previously shown, when the supply module 322 is placed into the supply interface 369, the connection between the supply interface 369 and the supply module 322 is established through this interface. The control interface 370 is used to house the electrical connector 338 of the power supply circuit board 331 and allows voltage supply to the valve device 325 via the motherboard 363, and allows control signals from the processing unit 368 to be transmitted to the actuator 359 of the valve device 325. Therefore, only high-voltage electronic devices exist on the power supply circuit board 331, and other operations of the valve device 325 are still performed by the processing unit 368.

[0063] The control interface 370, the supply interface 369, and the first and second pressure sensors 361 and 362 are located on the upper side 372 of the main board 363, and each outlet channel 309 of the carrier board 301 is equipped with a pair of the first and second pressure sensors 361 and 362. The processing unit 368 is also located on the upper side 372, but it can also be located on the bottom side 373 of the main board 363, opposite to the upper side 372.

[0064] Figure 5 The second line is shown, which includes the aforementioned first line, and an additional second inlet channel 307 with a first inlet connector 401 mounted on another fluid source 308. For this line, an additional channel plate 340 is used, which, in addition to connecting channels 341 and 342, has another first connecting channel 341 with another inlet opening 346 and another second connecting channel 342 with an outlet opening 347. The mass flow rate of fluid supplied by the additional fluid source 308 enters the carrier plate 301 via the first inlet connector 401 of the second inlet channel 307, exits through another channel opening 345, enters another first supply channel 341 of the additional channel plate 340 via another input interface 346, and is thus guided to a supply connector 326 of a valve device 325. From the aforementioned point, the additional fluid mass flow rate reaches the support plate 301—an additional outlet channel 309, which also contains all the components required to measure the fluid mass flow rate, particularly an additional flow resistance 201, an additional first pressure sensor 361, and an additional second pressure sensor 362, an additional sensor port 364, etc. Since the illustrated mass flow controller system includes multiple first pressure sensors 361 and multiple second pressure sensors 362, these in… Figure 2 The area is enclosed by a dashed box.

[0065] Figure 6 The diagram shows the complete pneumatic wiring of the mass flow control system 300, which, as an example, has five valve modules 304 (indicated by dashed lines). Two of these are designed to be supplied by two fluid sources 308, but the received fluid mass flow is provided via an outlet channel 309. The other three valve modules 304 are supplied by two separate outlet channels 309, each fluidly connected to only one of the two fluid sources 308, allowing one of the two fluid sources 308 to be supplied to a supply device (not shown) via this outlet channel 309.

[0066] The first input channel 306 and the second input channel 307 each include a first hole 403 formed on the front end side 305 of the support plate 301 adjacent to the upper side 302 and perpendicular to it, i.e., including another hole 404 fluidly connected to this hole 403, which is formed on a side surface 405 of the support plate 301 adjacent to the upper side 302 and the front end side 305. The first hole 403 penetrates the position of the front end face 305, and the second hole 404 penetrates the position of the front end face 405 to define the first inlet connector 401 and the second inlet connector 402. The channel port 345 is fluidly connected to the second hole 404 via the first connection channel 341 of the corresponding valve module 304 through the input interface 346. In the first inlet channel 306 and the second inlet channel 307, a blocking assembly 406 is provided to segment the first inlet channel 306 and the second inlet channel 307 into a first inlet channel segment 407 and a second inlet channel segment 408, thereby creating fluid separation. For example, each of the first inlet channel segments 407 of the first inlet channel 306 and the second inlet channel 307 is connected to four channel ports 345, which supply four flow modules 304 with fluid mass flow rates from one or two fluid sources 308. Each of the second inlet channel segments 408 of the first inlet channel 306 and the second inlet channel 307 has a channel port 345 configured to connect to a flow module 304 that is not supplied by two fluid sources 308. As shown, the output channel 309 configured for this flow module 304 is connected to a vacuum pump 409, so that this flow module 304 can also be labeled as a vacuum flow module 304. The mass flow control system 300 shown has a first fluid circulation in which a fluid mass flow rate of a processed gas can be introduced to a consumable device (not shown) via two fluid sources 308, and has a second fluid circulation connected to a vacuum pump 409, which is drawn in a controlled manner via a fluid mass flow rate taken from a workspace (not shown) mounted on a second inlet connector 402 of a first inlet channel 306 and a second inlet connector 402 mounted on a second inlet channel 307.

[0067] Here, the barrier assembly 406 located in the first input channel 306 and the second input channel 307, together with the second inlet connector 402 on the side 405 of the support plate 301, ensures that the vacuum flow module 304 flows in the same direction as other flow modules 304. This ensures that when an operation requiring only the first fluid circulation is converted to an operation requiring two fluid circulations by setting the barrier assembly 406, the valve device 325 housed in the vacuum flow module 304 and the flow resistance 201 in the configured output channel 309 do not need to change their flow direction.

[0068] For example, in the assembled state, the motherboard 363 is housed in a board receiving space 375 formed on the bottom side 374 of the support plate 301, and is fixed to the storage section 377 by means of a fixing component 376. The board receiving space 375 is restricted by a cover plate 390 and a cover plate 317, the cover plate 390 being parallel to the bottom side 374 and capable of being installed in a groove 389 formed in the support plate 305.

[0069] To seal the first and second pressure sensors 361 and 362, two sleeves 378 are provided, installed between the main board 363 and the support plate 301, each having a first sealing groove 379 and a second sealing groove 380 for accommodating the first and second annular sealing assemblies 381 and 382. The first sealing groove 379 accommodates the first annular sealing assembly 381 on the side of the sleeve 378 away from the main board 363, and the sealing assembly seals the sleeve 378 relative to the environment between the sleeve 378 and the second side 365 of the support plate 301. The second annular sealing assembly 382 seals the main board 363 relative to the outlet channel 309, and the second sealing groove 380 accommodating the second annular sealing assembly 382 is formed in the sleeve 378, such that the second annular sealing assembly 382 is attached to the cylindrical section 383 of the corresponding first and second pressure sensors 361 and 362.

[0070] In order to seal the second inlet channel 367, a teardrop-shaped sealing component 384 is provided in the sealing groove 383 of the support plate 301.

[0071] Depend on Figure 7 It can be seen that each valve module 304 is fixed by a fixing screw 386 extending through the fixing groove 385 into the channel plate 340, and by a fixing screw 388 extending through the fixing groove 387 into the cover shell 339.

[0072] Figure 8 Further details are shown Figure 8A turbulence throttling device 201 is installed in the outlet channel 309. The turbulence throttling device 201 is designed as an independent structural group, which can be installed and functionally tested independently without being affected by other components of the mass flow control system 300. The turbulence throttling device 201 includes, for example, a tubular throttling sleeve 203 that is rotationally symmetrical about the intermediate axis 202 and extends along the intermediate axis 202.

[0073] The outer surface 204 of the throttling sleeve 203, for example only, is divided into three adjacent sections along the central axis 202: a first guide section 205, a fluid section 206, and a second guide section 207. The first guide section 205 and the second guide section 207 each have an outer diameter (not shown), which substantially corresponds to the inner diameter of a throttling section 391 in the output channel 309 that houses the turbulence throttling device 201. The fluid section 206, located between the first guide section 205 and the second guide section 207, has a smaller outer diameter than the two guide sections 205 and 207, and when the turbulence throttling device 201 is assembled in the throttling section 391 of the outlet channel 309, it forms an annular channel 392 with the throttling section 391.

[0074] The second inlet channel 367 connects to this ring channel 391, and the second inlet channel 367 is configured to... Figure 8 The second pressure sensor 362 is shown in detail.

[0075] In a purely illustrative example, the groove 208 of the throttling sleeve 203, which is rotationally symmetrical about the intermediate axis 202, can be divided into an inflow section 209, a holding section 210, and an outflow section 211. The diameters of the inflow section 209 and the outflow section 211 are larger than those of the holding section 210. In a purely illustrative example, the inflow section 209 and the outflow section 211 each taper slightly from the holding section 210 to an inlet 212 and an outlet 213.

[0076] Multiple flow guiding components are provided in the inflow section 209 so that the desired turbulence throttling device function can be generated when the gaseous fluid flows through the turbulence throttling device 201. Starting from the inlet 212, the inflow section 209 is provided with an inflow plate 214, a throttling plate 215 directly adjacent to the inflow section along the intermediate axis 202, and an outflow plate 216 directly adjacent to the throttling plate 215 along the intermediate axis 202.

[0077] Depend on Figure 10 As can be seen, the inflow plate 214 is disc-shaped and designed as a planar parallel plate, and has multiple inflow holes 217, which, for example, maintain equal angular intervals on a common portion circle 220. For example, the inflow plate 214 is made of a metal plate, and the inflow holes 217 are formed by a laser cutting device or etching process. Alternatively, the inflow plate can also be made of plastic material, especially manufactured in plastic injection molding.

[0078] Preferably, the inflow plate 214 and the outflow plate 216 have the same structure.

[0079] Compared to the inflow plate 214 and the outflow plate 216, the throttling plate 215 has a significantly larger axial extension along the central axis 202. Functionally, the throttling plate 215 can be divided into a throttling disk 221, a front distance ring 222, and a rear distance ring 223. The throttling disk 221 is annular in shape and has an outer diameter (not shown), slightly smaller than the inner diameter of the inflow section 209 (also not shown). The throttling disk 221 has a throttling orifice 218, coaxial with the outer diameter of the throttling disk 221. For example only, the throttling orifice 218 is constructed to be circular. Figure 8 As can be seen, the throttling disk 221 extends axially along the central axis 202, approximately seven times the axial extension of the inflow plate 214 and the outflow plate 216. On the opposite axial end faces 224 and 225, distance rings 222 and 223 protrude from the throttling disk 221, serving as axial distance maintainers for the inflow plate 214 and the outflow plate 216. The distance rings 222 and 223 each have an inner diameter (not shown), chosen such that the inflow hole 217 of the inflow plate 214 and the outflow hole 219 of the outflow plate 216 are not obstructed. Furthermore, the distance rings 222 and 223 are only provided to maintain the distance between the inflow plate 214 and the outflow plate 216, and have no significant effect on the throttling effect of the turbulence throttling device 201, which will be further explained below.

[0080] The retaining section 210 has an inner diameter slightly smaller than that of the inflow plate 214, the throttling plate 215, and the outflow plate 216 from the lower structure group. Its purpose is only to provide axial support for this lower structure group, and it has no significant effect on the throttling effect of the turbulence throttling device 201, which will be further explained below.

[0081] The outflow section 211 has an axial extension along the central axis 202 that is substantially the same as that of the inflow section 209, and its function is to stabilize the fluid flow after it passes through the aforementioned flow guide components (inflow plate 214, throttling plate 215, outflow plate 216).

[0082] Furthermore, a radial hole 226 is formed in the outflow section 211 to ensure fluid communication between the outflow section 211 and the annular channel between the aforementioned fluid section 206 and the output channel 309, and thus allows the detection of the fluid pressure dominated by the outflow section 211 for differential pressure measurement.

[0083] Depend on Figure 10It is evident that the projection 227 of the throttling orifice 218 on the inflow plate 214 does not overlap with the inflow orifice 217. This ensures that the fluid (especially compressed air or process gas) undergoes multiple flow direction changes as it flows through the turbulent throttling device 201. Consequently, the desired turbulent flow can be generated on the turbulent throttling device 201. The advantage of this turbulent flow is that the simplified design of the turbulent throttling device 201 allows for differential pressure measurement. The pressure value upstream or in front of the turbulent throttling device 201, particularly in the inlet 212 region, is significantly different from the pressure value downstream or behind the turbulent throttling device 201, particularly in the radial orifice 226, thus allowing for accurate measurement of the differential pressure. This differential pressure measurement enables the high-precision detection of the fluid mass flow rate through the turbulent throttling device 201.

[0084] As previously described, the turbulence throttle 201 is housed in a throttling section 391, which has a diameter (not shown) larger than the remaining output channels 309. The throttling section 391 extends from the front end 305 of the support plate 301 into the outlet channel 309 in the opposite direction of the flow direction, while the base of the throttling section (not shown) is located between the first inlet channel 366 and the second inlet channel 367 in the flow direction, restricting the throttling section 391 at its end away from the front end 305. Due to the enlarged diameter, the base of the throttling section forms a circular sealing seat 400. The sealing seat 400 and the throttling end face 228 ( Figure 8 Between the turbulent flow throttle 201 and the outlet coupling device 311, in the assembled state, a throttling seal 393, for example designed as an O-ring, is provided. In order to fix the turbulent flow throttle 201 and to provide sealing force on the throttling seal 393, a fixing sleeve 394 is provided between the outlet coupling device 311 and the turbulent flow throttle 201, each of which abuts against the turbulent flow throttle 201 and the outlet coupling device 311 with an annular surface not shown.

[0085] The section of the outlet channel 309 located upstream of the turbulent flow throttle 201 preferably has a through section 395, which is fluidly connected to the channel opening 345 and parallel to the front end side 305. The through section 395 connects to the connecting section 396 of the outlet channel 309 at an inlet point 397, and the connecting section 396 is perpendicular to the front end side 305 or concentric with the throttle section 391. In the illustrated embodiment, the inlet point 397 of the through section 395 is located between the throttle section 391 and the channel base 398, and the channel base 398 defines the connecting section 396 on its side away from the connecting flow section 391.

[0086] Based on this design, there is virtually no or only very small fluid flow in the region of the connecting section 396 between the inlet point 397 and the channel base 398, making this region also known as the dead water chamber 399. To minimize interference in pressure measurement up to the turbulence throttle 201, the first sensor port 364 is constructed in the region of the connecting section 396 that forms the dead water chamber 399. "No interference" here means that the measured pressure has little or no dynamic pressure component caused by fluid flow.

[0087] In a design not shown, the second sensor port 364 and the first inlet channel 366 of the second sensor port 364 are constructed in the region of the connecting section 396 that forms the dead water chamber 399.

[0088] List of reference numerals

[0089] 300 Mass Flow Control System

[0090] 301 bearing plate

[0091] 302 upper side

[0092] 303 Arrangement axis

[0093] 304 Valve Module

[0094] 305 Front Side

[0095] 306 Import Channel

[0096] 307 Import Channel

[0097] 309 Export Channel

[0098] 310 Imported Coupling Device

[0099] 311 Outlet Coupling Device

[0100] 317 Sheath

[0101] 320 fixing screws

[0102] 386 fixing screw

[0103] 388 Fixing screw.

Claims

1. A mass flow control system (300) for providing fluid mass flow under control, the mass flow control system having a support plate (301) having a fluid interface on a first side (302) for mounting a valve module (304), wherein, Each fluid interface is equipped with multiple channel ports (345), each channel port (345) being connected to one of the inlet channels (306, 307) constructed on the support plate (301), or to one of the multiple outlet channels (309) constructed on the support plate (301), wherein the inlet channels (306, 307) extend from a first inlet connector (401) through the support plate (301) to a second inlet connector (402), wherein in the inlet channels (306, 307), a blocking assembly (406) is provided, particularly in the inlet channels (306, 307), which is freely positionable within the inlet channels (306, 307), to block the inlet channels (306, 309). 07) Divided into a first inlet channel segment (407) and a second inlet channel segment (408), the first inlet channel segment and the second inlet channel segment are fluidly separated, wherein the first inlet channel segment (407) is fluidly connected to at least one channel port (345) configured for the first inlet channel segment (407), and the second inlet channel segment (408) is fluidly connected to at least one channel port (345) configured for the second inlet channel segment (408), and the mass flow control system has a plurality of valve modules (304) each having at least one valve device (325), the valve devices being designed to affect at least one fluid mass flow rate, wherein each valve module ( 304) has an input interface (346) and an output interface (347). The input interface is sealed to the input channels (306, 307) via an associated channel port (345). The output interface is sealed to one of the output channels (309) via an associated channel port (345). The mass flow control system has an electronic processing unit (368), a power supply interface (369), and a power control interface (370) for coupling with the valve module (304). Each outlet channel (309) has a flow resistance (201), and each outlet channel (309) has a flow resistance (201) in the region of the flow resistance (201). The sensor port (364) is connected to a second side (365) of the support plate (301) away from the first side (302) of the support plate (301). Pressure sensors (361, 362) are configured to the sensor port (364). The electronic processing unit (368) is electrically connected to the pressure sensors (361, 362) and to the supply interface (369) and the control interface (370). The electronic processing unit is designed to evaluate the sensor signals of the pressure sensors (361, 362) and to control the valve module (304) connected to the control interface (370) to perform mass flow control.

2. The mass flow control system according to claim 1, characterized in that, The electronic processing unit (368), the power supply interface (369), the electrical control interface (370), and the pressure sensors (361, 362) are located on the motherboard (363).

3. The mass flow control system according to claim 1 or 2, characterized in that, The blocking component (406) is disposed in the input channel (306, 307) in a releasable manner.

4. The mass flow control system according to any one of claims 1 to 3, characterized in that, The first sensor port (364) is located before the flow resistance (201) along the flow direction, and the second sensor port (364) is located after the flow resistance (201) along the flow direction. The first pressure sensor (361) configured for the first sensor port (364) and the second pressure sensor (362) configured for the second sensor port (364) are designed as absolute pressure sensors, or the first pressure sensor (361) and the second pressure sensor (362) are designed as relative pressure sensors. An environmental pressure sensor is provided on the main board (363) for measuring environmental pressure.

5. The mass flow control system according to any one of claims 1 to 3, characterized in that, The first sensor port (364) is located before the flow resistance (201) along the flow direction, and the second sensor port (364) has a first inlet channel (366) and a second inlet channel (367). The first inlet channel (366) enters the outlet channel (309) before the flow resistance (201) in the flow direction, and the second inlet channel (367) enters the output channel (309) after the flow resistance (201) in the flow direction. The first pressure sensor (361) configured for the first sensor port (364) is designed as an absolute pressure sensor, and the second pressure sensor (362) configured for the second sensor port (364) is designed as a differential pressure sensor. Alternatively, the first pressure sensor (361) is designed as a relative pressure sensor, and the second pressure sensor (362) is designed as a differential pressure sensor. An environmental pressure sensor is provided on the main board for measuring environmental pressure.

6. The mass flow control system according to any one of the preceding claims, characterized in that, The actuator (359) of the valve device (325) is designed as a piezoelectric bender.

7. The mass flow control system according to claim 6, characterized in that, The valve module (304) includes a power supply circuit board (331) with high-voltage electronic devices for powering the actuator (359).

8. The mass flow control system according to any one of the preceding claims, characterized in that, The processing unit (368) is designed to individually control each actuator (359).

9. The mass flow control system according to any one of the preceding claims, characterized in that, The flow resistance (201) is designed as a throttle, particularly a turbulent throttle.

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