AFM clamp based on photoelectricity and heat

Abstract

The invention discloses an AFM clamp based on photoelectricity and heat. The AFM clamp comprises a clamp base; the fixed pressing sheet is arranged on the clamp base and is provided with an accommodating hole; the transparent heating sheet is arranged in the accommodating hole; the top of the transparent heating sheet is used for bearing a sample; the conductive clamp is arranged on the clamp base; the end part of the conductive clamp extends towards the accommodating hole and is in compression joint with the sample; the heating module is arranged on the clamp base and is in contact with the transparent heating sheet from the bottom of the transparent heating sheet so as to heat the transparent heating sheet; the light source is arranged on the clamp base and is positioned below the fixed pressing sheet; the light emitting direction of the light source faces the transparent heating sheet; the physical field modules can be used independently and can also be combined at will, and synchronous testing and regulation under the action of the composite physical field are achieved. Compared with a traditional clamp which can only support a single function, the integrated test clamp can solve the problems that an existing AFM test clamp is single in function, and multi-physics field composite testing is difficult to achieve.

Description

Technical Field

[0001] This invention relates to the field of AFM fixture technology, and more particularly to an AFM fixture based on photoelectric heating. Background Technology

[0002] Atomic force microscopy (AFM) is a scanning probe microscopy technique with high spatial resolution, widely used in materials science, biology, micro-nano fabrication, and other fields. It can characterize the surface morphology and various physical properties of samples, including mechanical, electrical, and thermal properties, at the nanoscale or even atomic scale. To achieve stable and accurate scanning measurements, AFM systems are typically equipped with specialized sample holders / fixtures for sample fixation and positioning, while also adapting to the needs of different experimental environments, such as vacuum, liquid, high temperature, and low temperature.

[0003] In existing technologies, AFM test fixtures typically have a single function, meaning each fixture is often only suitable for a specific test condition, such as high-temperature environments, low-temperature environments, optical illumination, or electric field loading. While this design provides stable performance under specific test conditions, it struggles to integrate functions when performing multi-physics composite tests (such as high-temperature and optical linkage, electric field and optical superposition, and low-temperature and optical joint testing). These fixtures suffer from problems such as limited functionality, poor system compatibility, and cumbersome experiment switching, making them unable to meet the increasingly complex testing demands.

[0004] Therefore, existing technologies still need to be improved and developed. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide an AFM fixture based on photoelectric and thermal methods, which addresses the above-mentioned deficiencies of the prior art and aims to solve the problem that the existing AFM test fixtures have limited functionality and are difficult to implement multi-physics composite testing.

[0006] The technical solution adopted by this invention to solve the technical problem is as follows: An AFM fixture based on photoelectric and thermal methods, comprising: Fixture base; A fixed pressure plate is disposed on the fixture base and has a receiving hole; A transparent heating element is disposed within the receiving hole; the top of the transparent heating element is used to support the sample. At least one conductive clip is disposed on the clamp base; the end of the conductive clip extends toward the receiving hole and presses against the sample; A heating module is disposed on the fixture base and contacts the transparent heating sheet from the bottom to heat the transparent heating sheet; A light source is disposed on the fixture base and located below the fixed pressure plate; the light emission direction of the light source is towards the transparent heating plate.

[0007] The photoelectric and thermal AFM fixture has a receiving groove recessed downwards on the top surface of the fixture base. The fixing plate, the heating module, and the light source are all located in the receiving groove, and the heating module and the light source are both located below the fixing plate. The top surface of the fixing plate is flush with the top surface of the fixture base.

[0008] The photoelectric and thermal AFM fixture, wherein the light source includes: Main circuit board; A light-emitting chip is disposed on the top surface of the main circuit board; the light-emitting surface of the light-emitting chip is arranged opposite to the transparent heating sheet.

[0009] The photoelectric thermal AFM fixture, wherein the heating module includes: A heating circuit board is located above the main circuit board and is electrically connected to the main circuit board; the heating circuit board is also electrically connected to the transparent heating element to heat the transparent heating element. The heating circuit board is provided with a light-transmitting hole, which is located between the light-emitting chip and the transparent heating sheet.

[0010] The photoelectric and thermal-based AFM fixture further includes: A metal probe is located between the main circuit board and the heating circuit board, and is electrically connected to both the main circuit board and the heating circuit board.

[0011] The photoelectric and thermal-based AFM fixture further includes: A light-emitting chip interface is disposed on the main circuit board and electrically connected to the light-emitting chip; a first wiring notch is provided on the fixture base, the first wiring notch corresponding to the light-emitting chip interface to expose the light-emitting chip interface; A heating circuit board interface is disposed on the main circuit board and electrically connected to the heating circuit board; a second wiring notch is provided on the fixture base, the second wiring notch corresponding to the heating circuit board interface to expose the heating circuit board interface.

[0012] The photoelectric and thermal-based AFM fixture further includes: A universal clamp base; the universal clamp base is provided with a receiving position, and the clamp base is detachably arranged in the receiving position; the universal clamp base is also provided with a first notch and a second notch, the first notch corresponds to and communicates with the first wiring notch, and the second notch corresponds to and communicates with the second wiring notch.

[0013] The photoelectric and thermal-based AFM fixture further includes: Multiple supporting members; the supporting members are detachably connected to the universal clamp base and support the clamp base from the periphery of the clamp base.

[0014] The photoelectric and thermal-based AFM fixture further includes: The connector has a mounting hole on the fixture base and an elongated hole on the conductive clamp, which extends along the direction of the mounting hole and the sample. The connector is detachably fitted with the mounting hole and is used to lock the conductive clamp.

[0015] The photoelectric and thermal AFM fixture includes a recessed cavity around the bottom of the fixing plate along the periphery of the receiving hole, the cavity being recessed upwards; a portion of the transparent heating plate is located within the recessed cavity.

[0016] Beneficial effects: Through its highly integrated structural design, this fixture achieves effective coupling and collaborative operation of three functional modules—light source irradiation, voltage application, and high-temperature loading—within a limited space. It is suitable for multi-field coupling experimental environments (such as complex test scenarios like light-electricity, light-heat, and electricity-heat) and can also be used independently for a single function (such as independently applying light, electricity, or heat).

[0017] The photoelectric and thermal-based AFM fixture in this application features a compact structure, simple operation, and flexible functional combinations. Each physics module can be used independently to meet conventional single-field testing needs, or it can be arbitrarily combined according to specific experimental objectives to achieve synchronous testing and control under the action of composite physics fields. Compared with traditional fixtures that can only support a single function, the integrated test fixture of this application can solve the problems of existing AFM test fixtures having limited functionality and difficulty in achieving multi-physics composite testing, significantly reducing equipment switching and debugging time, improving experimental efficiency and data correlation, and avoiding positioning errors that may be introduced by multiple clamping. Attached Figure Description

[0018] Figure 1 This is a first view of the photoelectric and thermal-based AFM fixture described in this invention; Figure 2 This is a second view of the photoelectric and thermal-based AFM fixture described in this invention; Figure 3This is a partially exploded structural diagram of the photoelectric and thermal-based AFM fixture described in this invention; Figure 4 This is an exploded structural diagram of the photoelectric and thermal AFM fixture described in this invention; Figure 5 This is a schematic diagram of the structure of the fixed pressure plate described in this invention. Detailed Implementation

[0019] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this application means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when we say an element is “connected” or “coupled” to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements. Furthermore, “connected” or “coupled” as used herein can include wireless connections or wireless coupling. The term “and / or” as used herein includes all or any units and all combinations of one or more associated listed items.

[0020] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.

[0021] This application provides an AFM fixture based on photoelectric and thermal properties, such as... Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the photoelectric and thermal AFM fixture includes: a fixture base 1, a fixing plate 2, and a transparent heating plate 3 (e.g., ...). Figure 2 and Figure 4 (As shown), heating module 4, light source 5, and at least one conductive clamp 6; the fixing plate 2 is disposed on the clamp base 1 and has a receiving hole 21 (as shown). Figure 4(As shown); a transparent heating element 3 is disposed within a receiving hole 21; the top of the transparent heating element 3 is used to support the sample 100; a conductive clamp 6 is disposed on a fixture base 1; the end of the conductive clamp 6 extends toward the receiving hole 21 and presses against the sample 100; a heating module 4 is disposed on a fixture base 1 and contacts the transparent heating element 3 from the bottom of the transparent heating element 3 to heat the transparent heating element 3; a light source 5 is disposed on a fixture base 1 and is located below the fixed pressing plate 2; the light emission direction of the light source 5 is toward the transparent heating element 3.

[0022] Specifically, the fixing plate 2 is used to support the transparent heating plate 3 and the sample 100, wherein the sample 100 is arranged on top of the transparent heating plate 3, so that the top surface of the sample 100 can be exposed and pressed by the conductive clip 6. The conductive clip 6 is mounted on the fixture base 1, and its end extends beyond the fixing plate 2 toward the receiving hole 21 and presses the sample 100; the conductive clip 6 is also connected to an external power source, so that after being connected to an external power source, a voltage is applied to the sample 100 for electrical testing of the sample 100.

[0023] The receiving hole 21 extends downwards through the fixed pressure plate 2, and the transparent heating plate 3 is arranged inside the receiving hole 21, ensuring that the top and bottom of the transparent heating plate 3 are not obstructed by the fixed pressure plate 2. Therefore, the sample 100 can be placed on top of the transparent heating plate 3, and the heating module 4 can contact the transparent heating plate 3 from the bottom and heat it, achieving high-temperature testing of the sample 100. The light source 5 is arranged below the fixed pressure plate 2 and emits light towards the transparent heating plate 3. Under the light transmission effect of the transparent heating plate 3, the sample 100 can receive light irradiation, thereby enabling optical testing of the sample 100.

[0024] This application presents an atomic force microscope testing fixture integrating optical, electrical, and high-temperature multi-physics field functions. It enables the simultaneous acquisition of multi-dimensional physical information from a single platform, including morphology measurement, conductivity characterization, and temperature distribution monitoring of a sample 100. Through its highly integrated structural design, the fixture effectively couples and coordinates the three functional modules—light source 5 illumination, voltage application, and temperature loading—within a limited space. This makes it suitable for multi-field coupling experimental environments (such as complex testing scenarios involving light-electricity, light-heat, and electricity-heat) and also allows for the independent use of a single function (such as independently applying light, electricity, or heat).

[0025] As can be seen, the photoelectric and thermal-based AFM fixture in this application features a compact structure, simple operation, and flexible functional combinations. Each physics module can be used independently to meet the needs of conventional single-field testing, or it can be arbitrarily combined according to specific experimental objectives to achieve synchronous testing and control under the action of composite physics fields. Compared with traditional fixtures that can only support a single function, the integrated test fixture of this application can solve the problem of existing AFM test fixtures having limited functionality and difficulty in achieving multi-physics composite testing, significantly reducing equipment switching and debugging time, improving experimental efficiency and data correlation, and avoiding positioning errors that may be introduced by multiple clamping.

[0026] One embodiment of this application, such as Figure 4 As shown, the top surface of the fixture base 1 is recessed downwards and has a receiving groove 101. The fixed pressure plate 2, the heating module 4 and the light source 5 are all located in the receiving groove 101, and the heating module 4 and the light source 5 are both located below the fixed pressure plate 2. The top surface of the fixed pressure plate 2 is flush with the top surface of the fixture base 1.

[0027] Specifically, the receiving slot 101 is used to form a receiving space on the top surface of the fixture base 1 and to receive the fixing plate 2, the heating module 4 and the light source 5, so that the fixing plate 2, the sample 100, the conductive clamp 6, the heating module 4 and the light source 5 can be assembled into a whole after being assembled, so as to be applied to different models and brands of AFM systems or other testing platforms, thereby improving the overall compatibility and application flexibility of the photoelectric and thermal AFM fixture of this application.

[0028] Meanwhile, the receiving groove 101 provides space on the top surface of the fixture base 1 for the fixing plate 2, heating module 4, and light source 5, making more efficient use of space, maintaining a neat external outline, and facilitating system integration and packaging. It also ensures that after these structures are assembled, the top surface of the fixing plate 2 is flush with the top surface of the fixture base 1. In this way, while the conductive clip 6 is installed on the top surface of the fixture base 1, its position can be adjusted to ensure that its end extends to the sample 100 mounting area, thereby pressing against the sample 100. Furthermore, the end of the conductive clip 6 presses vertically downwards onto the sample 100, resulting in more uniform clamping force.

[0029] It should be noted that in atomic force microscopy (AFM) testing, the probe system typically descends vertically from directly above the sample 100 or performs a transverse scan. In this application, thanks to the housing 101, the heating module 4, the light source 5, and a portion of the fixing plate 2 can be concealed within the housing 101, rather than protruding from the fixture base 1. This results in a more open space above the fixture base 1, avoiding mechanical interference or field of view obstruction, accommodating various types of probes, and preventing any structural obstruction of the AFM probe's movement trajectory or scanning area. Simultaneously, the housing 101 can serve as a semi-enclosed space for the light or heat field, reducing disturbances caused by external airflow and heat exchange, and enhancing the concentration of irradiation and the uniformity of heating.

[0030] Furthermore, the number of conductive clips 6 in this application is not specifically limited. The figure shows an example of two conductive clips 6 to illustrate the contact and pressing method between the conductive clips 6 and the sample 100. When multiple conductive clips 6 are provided, their relative positions can be adaptively designed according to factors such as the required pressure area, electric field distribution, or sample 100 size to achieve a better electrical loading effect.

[0031] One embodiment of this application, such as Figure 1 As shown, the light source 5 includes a main circuit board 51 and a light-emitting chip 52; as Figure 3 and Figure 4 As shown, the light-emitting chip 52 is disposed on the top surface of the main circuit board 51; the light-emitting surface of the light-emitting chip 52 is arranged opposite to the transparent heating sheet 3.

[0032] Specifically, the main circuit board 51 is arranged opposite to the fixed pressure plate 2 and is located below the fixed pressure plate 2. Taking a circular main circuit board 51 and a circular fixed pressure plate 2 as an example, the main circuit board 51 and the fixed pressure plate 2 are arranged coaxially and are fitted with the bottom of the receiving groove 101. Therefore, the center alignment between the main circuit board 51 and the fixed pressure plate 2 can be quickly completed by center positioning, reducing alignment errors. The main circuit board 51 is used to carry and position the light-emitting chip 52 and to supply power to the light-emitting chip 52, thereby controlling the switching of the light-emitting chip 52. In this application, the light-emitting chip 52 is protruding from the top surface of the main circuit board 51 and the light emission direction is towards the transparent heating plate 3, so as to ensure that the light can pass through the transparent heating plate 3 and irradiate the sample 100.

[0033] Understandably, the main circuit board 51 also integrates a driving circuit or a control circuit, which is connected to the light-emitting chip 52 to control voltage, current, brightness, etc. When the main circuit board 51 is powered on, the light-emitting chip 52 emits light of a specific wavelength. The light passes through the transparent heating plate 3 and illuminates the surface of the sample 100, realizing light loading, light excitation, or light response testing. Furthermore, different optical testing requirements can be met by replacing the light-emitting chip 52 with one of different wavelengths.

[0034] In one embodiment of this application, the heating module 4 includes a heating circuit board, which is located above and electrically connected to the main circuit board 51; the heating circuit board is also electrically connected to the transparent heating sheet 3 to heat the transparent heating sheet 3; the heating circuit board is provided with a light-transmitting hole 41 (e.g., Figure 4 As shown in the figure, the light-transmitting hole 41 is located between the light-emitting chip 52 and the transparent heating plate 3.

[0035] Specifically, the heating circuit board is located above the main circuit board 51 and below the fixing plate 2; the heating circuit board is in contact with and attached to the bottom surface of the transparent heating plate 3. The heating circuit board is closer to the transparent heating plate 3, thereby transferring heat to the transparent heating plate 3. It should be noted that, since the heating circuit board is placed above the main circuit board 51, and the light-emitting chip 52 is mounted on the main circuit board 51, in order to avoid the heating circuit board blocking the light emitted by the light-emitting chip 52, a light-transmitting hole 41 is also provided on the heating circuit board. The upper part of the light-transmitting hole 41 faces the transparent heating plate 3, and the lower part of the light-transmitting hole 41 faces the light-emitting chip 52, ensuring the smooth progress of optical testing.

[0036] In this application, the main circuit board 51 integrates a light-emitting chip 52, which is responsible for light emission driving and signal control; the heating circuit board is independently set above the main circuit board 51 and is specifically used to drive the transparent heating sheet 3; the heating circuit board and the main circuit board 51 are layered vertically, which clearly separates the light source 5 and the heating function, helps to avoid circuit coupling interference, and improves the control accuracy of optical and high temperature testing.

[0037] It is understandable that an electrode structure is also provided on the heating circuit board corresponding to the electrode area of ​​the transparent heating sheet 3, and the electrode structure of the heating circuit board is attached to the electrode area of ​​the transparent heating sheet 3 to achieve reliable contact between the two; then the external power supply current is reliably introduced into the transparent heating sheet 3 from the heating circuit board, thereby forming a current loop, so that the transparent heating sheet 3 generates heat and heats the sample 100.

[0038] like Figure 3 and Figure 4 As shown, the photoelectric and thermal AFM fixture also includes a metal probe 7, which is located between the main circuit board 51 and the heating circuit board, and is electrically connected to the main circuit board 51 and the heating circuit board respectively.

[0039] Specifically, there is at least one metal probe 7; the metal probe 7 is arranged between the main circuit board 51 and the heating circuit board, and is used not only to realize the electrical connection between the main circuit board 51 and the heating circuit board, but also to realize the spatial isolation between the main circuit board 51 and the heating circuit board.

[0040] Since the heating circuit board generates high temperatures during operation, direct contact between it and the main circuit board 51 would conduct heat to the main circuit board 51. Therefore, in this application, a metal probe 7 is provided between the main circuit board 51 and the heating circuit board to maintain a certain vertical gap between them, achieving thermal isolation and physical decoupling, and preventing heat conduction from causing performance degradation or damage to the main circuit board 51. Furthermore, the separate arrangement of the heating circuit board and the main circuit board 51 allows for the replacement of heating circuit boards with different frequencies and structures according to different experimental requirements, improving the versatility, maintainability, and expandability of the entire system.

[0041] like Figure 2 , Figure 3 and Figure 4 As shown, the photoelectric and thermal AFM fixture also includes a light-emitting chip interface 511 and a heating circuit board interface 512; wherein, the light-emitting chip interface 511 is disposed on the main circuit board 51 and electrically connected to the light-emitting chip 52; as Figure 2 , Figure 3 and Figure 4 As shown, the fixture base 1 is provided with a first wiring notch 102, which corresponds to the light-emitting chip interface 511 to expose the light-emitting chip interface 511; the heating circuit board interface 512 is provided on the main circuit board 51 and is electrically connected to the heating circuit board; the fixture base 1 is provided with a second wiring notch 103, which corresponds to the heating circuit board interface 512 (e.g., Figure 2 As shown), to expose the heating circuit board interface 512.

[0042] Specifically, the light-emitting chip interface 511 and the heating circuit board interface 512 are both located on the main circuit board 51 and on the side of the main circuit board 51 facing the heating circuit board. The fixture base 1 has corresponding wiring notches at each interface. Therefore, under the premise that the metal probe 7 physically isolates the heating circuit board from the main circuit board 51, so that the side of the main circuit board 51 facing the heating circuit board can have a certain space, the light-emitting chip interface 511 and the heating circuit board interface 512 are set on the side of the main circuit board 51 facing the heating circuit board, and through the corresponding wiring notches, both the light-emitting chip interface 511 and the heating circuit board interface 512 can be exposed.

[0043] Through this structural design, an external power supply or control module can be electrically connected to the light-emitting chip interface 511 and the heating circuit board interface 512 respectively, thereby independently controlling the on / off, power supply, and adjustment of the light-emitting chip 52 and the heating circuit board. This structure not only achieves physical separation of the light source 5 and the heating function at the electrical control level, avoiding functional interference or signal coupling, but also greatly improves the module's adaptability and maintainability. Users can choose to enable a single function or use two functions in combination according to experimental needs, achieving flexible testing. At the same time, the interfaces are centrally located at the wiring notch on the edge of the fixture base 1, which facilitates the accessibility and convenience of electrical connection operations and makes manual plugging and unplugging and debugging easier. If a function malfunctions, the tester can independently troubleshoot the light-emitting or heating parts without disassembling the entire machine, and avoids circuit wiring interference with the area above the AFM probe, keeping the scanning space clean and open.

[0044] It is understandable that both the light-emitting chip interface 511 and the heating circuit board interface 512 are located near the edge of the main circuit board 51, so that the light-emitting chip interface 511 and the heating circuit board interface 512 can be closer to the corresponding wiring notch, making them easier to access and connect.

[0045] like Figures 1-4 As shown, the photoelectric and thermal-based AFM fixture also includes a universal fixture base 8; as Figure 4 As shown, the universal fixture base 8 is provided with a receiving position 81, and the fixture base 1 is detachably arranged in the receiving position 81; the universal fixture base 8 is also provided with a first notch 82 and a second notch 83, the first notch 82 corresponds to and is connected to the first wiring notch 102, and the second notch 83 corresponds to and is connected to the second wiring notch 103.

[0046] Specifically, to enhance the versatility and functional expandability of the fixture structure, a universal fixture base 8 is provided below the fixture base 1. This universal fixture base 8 has a receiving position 81 that mates with the fixture base 1, used to accommodate and stably install the fixture base 1, achieving integrated assembly of the upper and lower structures. Simultaneously, alignment notches are provided on the side of the universal fixture base 8; wherein the first notch 82 corresponds in position and size to the first wiring notch 102, and the second notch 83 corresponds in position and size to the second wiring notch 103, ensuring that the light-emitting chip interface 511 and the heating circuit board interface 512 on the main circuit board 51 can still be accessed and connected from outside the universal fixture base 8 after assembly.

[0047] This structural design ensures that the fixture base 1 is firmly embedded in the universal fixture base 8, improving the overall structural stability of the fixture and its compatibility with universal platforms. On the other hand, the alignment design of the two notches forms a continuous external interface channel, allowing users to directly connect power lines, control lines, or sensor interfaces from the outside without the need for complex wiring or additional opening modifications inside the fixture.

[0048] Furthermore, this structure boasts excellent modularity. The fixture base 1 can serve as a functional carrier, replacing different types of photoelectric and thermal testing units according to testing requirements, while the universal fixture base 8 remains unchanged as a fixed platform. This significantly enhances the flexibility, maintenance efficiency, and scalability of the testing system. The unified arrangement of interfaces and notches on the side also helps control the cable routing direction, maintains a clean testing area, and avoids obstructing the AFM probe scanning path.

[0049] One embodiment of this application, such as Figure 1 As shown, the photoelectric and thermal AFM fixture also includes multiple supporting members 9; the supporting members 9 are detachably connected to the universal fixture base 8 and support the fixture base 1 from the periphery of the fixture base 1.

[0050] Specifically, multiple support members 9 are arranged sequentially along the circumference of the fixture base 1; the support members 9 are detachably connected and positioned to the universal fixture base 8 via threaded connections. The universal fixture base 8 has multiple threaded holes, each corresponding to a support member 9; when the support member 9 is installed by rotating and engaging with the threaded holes, its end can pass through the threaded holes and press against the fixture base 1, thereby increasing the fastening force on the outside of the fixture base 1 and improving the stability of the assembly between the fixture base 1 and the universal fixture base 8. In one embodiment of this example, the support member 9 is a set screw.

[0051] Understandably, the arrangement of the receiving position 81 allows the side of the clamp base 1 to partially overlap with the side of the universal clamp base 8, thereby enabling the installation of the top support 9.

[0052] The photoelectric and thermal AFM fixture also includes a connector; the fixture base 1 is provided with mounting holes 104 (e.g., ...). Figure 2 and Figure 4 As shown), the conductive clip 6 is provided with an elongated hole 61 (as shown). Figure 4 As shown), the elongated hole 61 extends along the alignment direction of the mounting hole 104 and the sample 100; the connector is detachably fitted with the mounting hole 104 and is used to lock the conductive clamp 6.

[0053] Specifically, the mounting hole 104 is located on the top surface of the fixture base 1 and around the periphery of the receiving groove 101; the conductive clip 6 is locked to the top surface of the fixture base 1 by a connector, thereby positioning the conductive clip 6 and achieving contact pressing between the conductive clip 6 and the sample 100, preventing displacement of the conductive clip 6. The mounting hole 104 is used to cooperate with the connector to install and position the connector; while the elongated hole 61, while cooperating with the connector, can also provide relative displacement between the connector and the conductive clip 6, thereby changing the installation position of the conductive clip 6 on the top surface of the fixture base 1.

[0054] It should be noted that after the mounting hole 104 accommodates the connector, the position between the two is relatively fixed; however, when the connector is inserted into the mounting hole 104 through the elongated hole 61 and the connector is not locked in place with the mounting hole 104, the conductive clip 6 can be moved to change the length of the conductive clip 6 extending above the sample 100, thereby changing the contact and pressing position of the conductive clip 6 on the sample 100 to meet the needs of adjusting the position of the electrical test application.

[0055] In one embodiment of this application, the connector can be a threaded connector such as a screw with a limiting structure on its head, so that it can be connected to the mounting hole 104 in a threaded detachable manner. When the connector is in a loose state, the conductive clip 6 can be moved back and forth along the extension direction of the elongated hole 61. When locked, the limiting structure can be used to press the conductive clip 6 to prevent the conductive clip 6 from shifting.

[0056] One embodiment of this application, such as Figure 5 As shown, a cavity 22 is provided around the bottom of the fixed pressure plate 2 along the periphery of the receiving hole 21, and the cavity 22 is arranged to be recessed upward; a part of the transparent heating plate 3 is located in the cavity 22.

[0057] Specifically, the cavity 22 is arranged around the periphery of the receiving hole 21 and communicates with the receiving hole 21. After the transparent heating sheet 3 is embedded in the cavity 22, the top surface of the transparent heating sheet 3 can be exposed through the receiving hole 21, thereby allowing the sample 100 to be placed on the transparent heating sheet 3. The cavity 22 serves as a mounting position, allowing the transparent heating sheet 3 to be positioned and embedded, preventing the transparent heating sheet 3 from slipping or falling. The depth of the cavity 22 matches the depth of the transparent heating sheet 3, so that after the transparent heating sheet 3 is placed in the cavity 22, the bottom surface of the transparent heating sheet 3 can be flush with the bottom surface of the fixing plate 2, and the top surface of the heating circuit board can be in contact with the bottom surfaces of the transparent heating sheet 3 and the fixing plate 2, respectively.

[0058] In summary, this application provides an AFM fixture based on photoelectric and thermal principles, comprising: a fixture base; a fixing plate disposed on the fixture base and having a receiving hole; a transparent heating plate disposed within the receiving hole; the top of the transparent heating plate for supporting a sample; at least one conductive clamp disposed on the fixture base; the end of the conductive clamp extending towards the receiving hole and pressing against the sample; a heating module disposed on the fixture base and contacting the transparent heating plate from the bottom to heat the transparent heating plate; and a light source disposed on the fixture base and located below the fixing plate; the light emission direction of the light source is towards the transparent heating plate. This application integrates optical, electrical, and thermal multi-physics field functions into an atomic force microscope testing fixture, enabling simultaneous acquisition of multi-dimensional physical information such as sample morphology measurement, conductivity characterization, and temperature distribution monitoring on the same platform. Through its highly integrated structural design, this test fixture achieves effective coupling and collaborative operation of three functional modules—light source irradiation, voltage application, and thermal loading—within a limited space. It is suitable for multi-field coupling experimental environments (such as complex test scenarios like light-electricity, light-thermal, and electrical-thermal), and can also be used independently for a single function (such as independently applying light, electricity, or heat).

[0059] As can be seen, the photoelectric and thermal-based AFM fixture in this application features a compact structure, simple operation, and flexible functional combinations. Each physics module can be used independently to meet the needs of conventional single-field testing, or it can be arbitrarily combined according to specific experimental objectives to achieve synchronous testing and control under the action of composite physics fields. Compared with traditional fixtures that can only support a single function, the integrated test fixture of this application can solve the problem of existing AFM test fixtures having limited functionality and difficulty in achieving multi-physics composite testing, significantly reducing equipment switching and debugging time, improving experimental efficiency and data correlation, and avoiding positioning errors that may be introduced by multiple clamping.

[0060] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. An AFM fixture based on photoelectric and thermal processes, characterized in that, It includes: Fixture base; A fixed pressure plate is disposed on the fixture base and has a receiving hole; A transparent heating element is disposed within the receiving hole; The top of the transparent heating element is used to support the sample; At least one conductive clip is disposed on the clamp base; the end of the conductive clip extends toward the receiving hole and presses against the sample; A heating module is disposed on the fixture base and contacts the transparent heating sheet from the bottom to heat the transparent heating sheet; A light source is disposed on the fixture base and located below the fixed pressure plate; the light emission direction of the light source is towards the transparent heating plate.

2. The AFM fixture based on photoelectric heating according to claim 1, characterized in that, The top surface of the fixture base is recessed downwards to form a receiving groove. The fixing plate, the heating module, and the light source are all located in the receiving groove, and the heating module and the light source are both located below the fixing plate. The top surface of the fixing plate is flush with the top surface of the fixture base.

3. The photoelectric and thermal-based AFM fixture according to claim 1, characterized in that, The light source includes: Main circuit board; A light-emitting chip is disposed on the top surface of the main circuit board; the light-emitting surface of the light-emitting chip is arranged opposite to the transparent heating sheet.

4. The AFM fixture based on photoelectric heating according to claim 3, characterized in that, The heating module includes: A heating circuit board is located above the main circuit board and is electrically connected to the main circuit board; the heating circuit board is also electrically connected to the transparent heating element to heat the transparent heating element. The heating circuit board is provided with a light-transmitting hole, which is located between the light-emitting chip and the transparent heating sheet.

5. The photoelectric and thermal-based AFM fixture according to claim 4, characterized in that, It also includes: A metal probe is located between the main circuit board and the heating circuit board, and is electrically connected to both the main circuit board and the heating circuit board.

6. The photoelectric and thermal-based AFM fixture according to claim 4, characterized in that, It also includes: A light-emitting chip interface is disposed on the main circuit board and electrically connected to the light-emitting chip; a first wiring notch is provided on the fixture base, the first wiring notch corresponding to the light-emitting chip interface to expose the light-emitting chip interface; A heating circuit board interface is disposed on the main circuit board and electrically connected to the heating circuit board; a second wiring notch is provided on the fixture base, the second wiring notch corresponding to the heating circuit board interface to expose the heating circuit board interface.

7. The AFM fixture based on photoelectric heating according to claim 6, characterized in that, It also includes: A universal clamp base; the universal clamp base is provided with a receiving position, and the clamp base is detachably arranged in the receiving position; the universal clamp base is also provided with a first notch and a second notch, the first notch corresponding to and communicating with the first wiring notch, and the second notch corresponding to and communicating with the second wiring notch.

8. The photoelectric thermal AFM fixture according to claim 7, characterized in that, It also includes: Multiple supporting members; the supporting members are detachably connected to the universal clamp base and support the clamp base from the periphery of the clamp base.

9. The AFM fixture based on photoelectric heating according to claim 1, characterized in that, It also includes: The connector has a mounting hole on the fixture base and an elongated hole on the conductive clamp, which extends along the direction of the mounting hole and the sample. The connector is detachably fitted with the mounting hole and is used to lock the conductive clamp.

10. The photoelectric thermal AFM fixture according to claim 1, characterized in that, The bottom of the fixing plate is provided with a cavity around the periphery of the receiving hole, and the cavity is arranged to be recessed upward; a portion of the transparent heating plate is located in the cavity.

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