Beam line system and method for spectrum purification and effect verification thereof

Abstract

The present invention relates to a beam line system and method for spectral purification and effect verification thereof, comprising: an upstream radiation source interface for receiving broad spectrum radiation; the bunch transmission channel is used for limiting a radiation propagation path; the switchable spectrum blocking verification assembly can be switched between a first working state in which the switchable spectrum blocking verification assembly is inserted into the radiation propagation path and a second working state in which the switchable spectrum blocking verification assembly is moved out of the radiation propagation path, and is used for regulating and controlling radiation entering a subsequent structure under different spectrum conditions; the spectrum selection and purification assembly is used for carrying out selective transmission and spectrum purification on radiation of a specific target wave band; and the downstream detection unit is used for receiving and detecting the radiation treated by the spectrum selection and purification assembly. The beneficial effects of the invention are that through the combination of the double-reflector spectrum selection system and the narrowband filter membrane assembly, the multi-stage selection of the radiation of the specific target wave band is realized, and the spectral purity of the radiation of the target wave band can be improved.

Description

Technical Field

[0001] This invention belongs to the field of optical technology, and in particular relates to a beamline system and method for spectral purification and its effect verification. Background Technology

[0002] In experimental systems that use plasma or other broadband radiation sources as light sources, the radiation typically includes visible light, infrared light, and target band radiation simultaneously. Because different bands of radiation exhibit significant differences in intensity, propagation characteristics, and detection response, non-target band radiation, especially visible and infrared light, can easily create strong background signals during beamline transmission and detection, thus affecting the effective extraction and accurate measurement of target band radiation.

[0003] In existing technologies, the radiation spectrum is typically selected by setting up a filter membrane or reflective optical element. However, most of the above methods only focus on the spectral selection itself and lack effective means to verify the spectral purification effect. It is difficult to distinguish the actual contribution of the target band radiation and the non-target band background in the detected signal, thus introducing uncertainties in the experimental debugging and result analysis process.

[0004] Therefore, it is necessary to propose a beamline system and method that can not only achieve spectral purification but also verify the spectral purification effect. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a beamline system and method for spectral purification and its effect verification.

[0006] Firstly, a beamline system for spectral purification and its effectiveness verification is provided, including: Upstream radiation source interface, used to receive broadband radiation; A beamline transmission channel is used to define the radiation propagation path; A switchable spectral blocking verification component is disposed within the beamline transmission channel and can switch between a first operating state inserted into the radiation propagation path and a second operating state removed from the radiation propagation path, for use in regulating the radiation entering the subsequent structure under different spectral conditions; A spectral selection and purification component is located downstream of the switchable spectral blocking verification component and is used for selective transmission and spectral purification of radiation in a specific target band. The downstream detection unit is used to receive and detect the radiation processed by the spectral selection and purification component.

[0007] Preferably, the spectral selection and purification component includes: A dual-mirror spectral selection system is used to selectively reflect radiation in the target wavelength band. A narrow-band filter membrane assembly is disposed downstream of the dual-mirror spectral selection system and is used to selectively transmit radiation in the target wavelength band.

[0008] Preferably, when the switchable spectral blocking verification component is in the first working state, it is configured to suppress X-ray band radiation in the broadband radiation.

[0009] Preferably, the switchable spectral blocking verification component suppresses X-ray band radiation through absorption, reflection, or blocking.

[0010] Preferably, the dual-mirror spectral selection system includes a first mirror and a second mirror arranged sequentially along the radiation propagation direction. The first mirror and the second mirror have high reflectivity in the target band and low reflectivity in the non-target band.

[0011] Preferably, the narrow-band filter membrane assembly has a single-layer or multi-layer structure.

[0012] Preferably, the switchable spectral blocking verification component is located between the upstream radiation source interface and the spectral selection and purification component.

[0013] Secondly, a method for spectral purification and its effect verification is provided, performed by any of the systems described in the first aspect, including: S1. Introduce broadband radiation into the beamline transmission channel; S2. Control the switchable spectral blocking verification component to switch between a first working state and a second working state. The first working state is when the switchable spectral blocking verification component inserts into the radiation propagation path to suppress radiation in a specific band. The second working state is when the switchable spectral blocking verification component moves out of the radiation propagation path. S3. The radiation is passed through the spectral selection and purification components in sequence to select and purify radiation in a specific target band. S4. Receive and detect the radiation processed in step S3 using a downstream detection unit; S5. Compare the detection signals of the downstream detection unit when the switchable spectral blocking verification component is in the first working state and the second working state to evaluate the impact of non-target band radiation on the detection signal.

[0014] The beneficial effects of this invention are: 1. This invention achieves multi-level selection of radiation in a specific target band by combining a dual-mirror spectral selection system with a narrowband filter membrane assembly, which is beneficial to improving the spectral purity of the target band radiation.

[0015] 2. This invention introduces a switchable spectral blocking verification component, enabling the beamline system to perform comparative measurements under different spectral conditions, which is used to analyze the impact of non-target band radiation on the detection signal.

[0016] 3. This invention can distinguish the relative contributions of target band radiation and visible light and infrared background radiation to the detection signal, thereby improving the reliability and interpretability of the measurement results. Furthermore, the system structure is highly versatile and applicable to various broadband radiation sources and application scenarios with different target bands. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the beamline system for spectral purification and its effect verification provided by the present invention; Figure labeling: 1. Upstream radiation source interface; 2. Beam transmission channel; 3. Switchable spectral blocking verification component; 4. Dual-mirror spectral selection system; 5. First mirror; 6. Second mirror; 7. Narrow-band filter membrane assembly; 8. Downstream detection unit. Detailed Implementation

[0018] The present invention will be further described below with reference to embodiments. The description of the embodiments below is only for the purpose of helping to understand the present invention. It should be noted that those skilled in the art can make several modifications to the present invention without departing from the principle of the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.

[0019] Example 1: To address the problems of the prior art, Embodiment 1 of this application provides a beamline system for spectral purification and its effect verification. By introducing a switchable spectral blocking verification structure into the beamline and combining it with a multi-level spectral selection structure, it can achieve high-purity output of radiation to a specific target band while comparing and verifying the spectral purification effect, thereby improving the reliability and interpretability of experimental results.

[0020] Specifically, such as Figure 1 As shown, the beamline system provided in this application for spectral purification and its effect verification includes: Upstream radiation source interface 1 is used to receive radiation from the upstream broadband radiation source; Bundle transmission channel 2 is used to define the radiation propagation path; The switchable spectral blocking verification component 3 is disposed within the beamline transmission channel 2 and can switch between a first working state inserted into the radiation propagation path and a second working state removed from the radiation propagation path, for use in regulating the radiation entering the subsequent structure under different spectral conditions.

[0021] The spectral selection and purification component is located downstream of the switchable spectral blocking verification component 3 and is used for selective transmission and spectral purification of radiation in a specific target band.

[0022] Downstream detection unit 6 is used to receive and detect radiation after it has been processed by the spectral selection and purification component.

[0023] Specifically, the switchable spectral blocking verification component 3 is located between the upstream radiation source interface 1 and the spectral selection and purification component.

[0024] Specifically, when the switchable spectral blocking verification component 3 is in the first working state, it is configured to suppress X-ray band radiation in the broadband radiation, thereby changing the radiation spectral composition entering the subsequent spectral purification structure.

[0025] The switchable spectral blocking verification component 3 suppresses X-ray band radiation through absorption, reflection, or blocking.

[0026] In addition, in another operating state, the switchable spectral blocking verification component 3 is removed from the radiation propagation path, allowing the radiation to bypass the component and directly enter the subsequent dual-mirror spectral selection system.

[0027] By comparing the changes in the detection signal of the downstream detection unit 6 when the switchable spectral blocking verification component 3 is in different working states, the influence of non-target band radiation on the detection signal can be analyzed, thereby verifying the effect of the subsequent spectral purification structure.

[0028] Example 2: Based on Example 1, Example 2 of this application provides a more specific beamline system for spectral purification and its effect verification, including: Upstream radiation source interface 1 is used to receive broadband radiation; Bundle transmission channel 2 is used to define the radiation propagation path; The switchable spectral blocking verification component 3 is disposed within the beamline transmission channel 2 and can switch between a first working state inserted into the radiation propagation path and a second working state removed from the radiation propagation path, for use in regulating the radiation entering the subsequent structure under different spectral conditions.

[0029] The spectral selection and purification component is located downstream of the switchable spectral blocking verification component 3 and is used for selective transmission and spectral purification of radiation in a specific target band.

[0030] Downstream detection unit 6 is used to receive and detect radiation after it has been processed by the spectral selection and purification component.

[0031] The spectral selection and purification component includes: The dual-mirror spectral selection system 4 is used to selectively reflect radiation in the target wavelength band; The narrowband filter membrane assembly 5 is located downstream of the dual-mirror spectral selection system 4 and is used to selectively transmit radiation in the target band, thereby further improving the spectral purity of the target band.

[0032] The dual-mirror spectral selection system 4 includes a first mirror 41 and a second mirror 42 arranged sequentially along the radiation propagation direction. The first mirror 41 and the second mirror 42 have high reflectivity in the target band and low reflectivity in the non-target band, ensuring effective transmission of the target band radiation after two reflections, while significantly attenuating the intensity of the non-target band radiation. Through this dual-reflection structure, multi-level selection of the target band radiation can be achieved, thereby improving the signal-to-noise ratio of the target band radiation.

[0033] Furthermore, the narrowband filter membrane assembly 5 has a single-layer or multi-layer structure, thereby achieving further suppression of non-target band radiation.

[0034] It should be noted that the parts in this embodiment that are the same as or similar to those in Embodiment 1 can be referred to each other, and will not be repeated in this application.

[0035] Example 3: Based on Example 2, Example 3 of this application provides a method for spectral purification and its effect verification, including: S1. Introduce broadband radiation into the beamline transmission channel 2; S2. Control the switchable spectral blocking verification component 3 to switch between a first working state and a second working state. The first working state is when the switchable spectral blocking verification component 3 is inserted into the radiation propagation path to suppress radiation in a specific band. The second working state is when the switchable spectral blocking verification component 3 is removed from the radiation propagation path. S3. The radiation is passed through the spectral selection and purification components in sequence to select and purify radiation in a specific target band. S4. Receive and detect the radiation processed in step S3 using the downstream detection unit 6; S5. Compare the detection signals of the downstream detection unit 6 when the switchable spectral blocking verification component 3 is in the first working state and the second working state, so as to evaluate the influence of non-target band radiation on the detection signal and evaluate the spectral purification effect.

[0036] It should be noted that the method provided in this embodiment is the corresponding method of the system provided in embodiment 2. Therefore, the parts that are the same as or similar to those in embodiment 2 in this embodiment can be referred to each other, and will not be described again in this application.

[0037] In summary, this application achieves multi-level selection of radiation in the target band by combining a dual-mirror spectral selection system with a narrowband filter assembly, thereby improving the spectral purity and signal-to-noise ratio of the target band radiation. It also includes a switchable spectral blocking verification component that can switch between inserting and removing radiation propagation paths to enable comparative measurements under different spectral conditions. Furthermore, by comparing the detection signals of the downstream detection unit when the switchable spectral blocking verification component is in different states, the contribution of visible light / infrared background to the detection signal is distinguished, thus verifying the effectiveness of the subsequent spectral purification structure.

Claims

1. A beamline system for spectral purification and its effect verification, characterized in that, include: Upstream radiation source interface (1) is used to receive broadband radiation; The beamline transmission channel (2) is used to define the radiation propagation path; A switchable spectral blocking verification component (3) is disposed within the beamline transmission channel (2) and can switch between a first working state inserted into the radiation propagation path and a second working state removed from the radiation propagation path, for regulating the radiation entering the subsequent structure under different spectral conditions; The spectral selection and purification component is located downstream of the switchable spectral blocking verification component (3) and is used for selective transmission and spectral purification of radiation in a specific target band. Downstream detection unit (6) is used to receive and detect radiation after it has been processed by the spectral selection and purification component.

2. The beamline system for spectral purification and its effect verification according to claim 1, characterized in that, The spectral selection and purification component includes: A dual-mirror spectral selection system (4) is used to selectively reflect radiation in the target band. A narrow-band filter membrane assembly (5) is disposed downstream of the dual-mirror spectral selection system (4) for selective transmission of radiation in the target band.

3. The beamline system for spectral purification and its effect verification according to claim 2, characterized in that, When the switchable spectral blocking verification component (3) is in the first working state, it is configured to suppress X-ray band radiation in the broadband radiation.

4. The beamline system for spectral purification and its effect verification according to claim 3, characterized in that, The switchable spectral blocking verification component (3) suppresses the X-ray band radiation by means of absorption, reflection or blocking.

5. The beamline system for spectral purification and its effect verification according to claim 4, characterized in that, The dual-mirror spectral selection system (4) includes a first mirror (41) and a second mirror (42) arranged sequentially along the radiation propagation direction. The first mirror (41) and the second mirror (42) have high reflectivity in the target band and low reflectivity in the non-target band.

6. The beamline system for spectral purification and its effect verification according to claim 5, characterized in that, The narrow-band filter membrane assembly (5) has a single-layer or multi-layer structure.

7. The beamline system for spectral purification and its effect verification according to claim 6, characterized in that, The switchable spectral blocking verification component (3) is located between the upstream radiation source interface (1) and the spectral selection and purification component.

8. A method for spectral purification and its effectiveness verification, characterized in that, Performed by the system according to any one of claims 1 to 7, comprising: S1. Introduce broadband radiation into the beamline transmission channel (2); S2. Control the switchable spectral blocking verification component (3) to switch between a first working state and a second working state. The first working state is when the switchable spectral blocking verification component (3) is inserted into the radiation propagation path to suppress radiation in a specific band. The second working state is when the switchable spectral blocking verification component (3) is removed from the radiation propagation path. S3. The radiation is passed through the spectral selection and purification components in sequence to select and purify radiation in a specific target band. S4. Receive and detect the radiation processed in step S3 using the downstream detection unit (6); S5. Compare the detection signals of the downstream detection unit (6) when the switchable spectral blocking verification component (3) is in the first working state and the second working state to evaluate the impact of non-target band radiation on the detection signal.

Images