Method for producing ultra-thin glass elements, glass elements produced by method and use thereof

Abstract

The invention relates to a method for efficiently producing ultra-thin elements (2, 4) of glass-based material, the material thickness (d) of which is between 5 m and 100 m, into which filiform damages (14) are introduced by irradiation with an ultra-short laser pulser, the distance (A) between adjacent filiform damages (14) being between 0.4 m and 4.0 m. This advantageously achieves high edge strength. The invention also relates to ultrathin elements (2, 4) of glass-based material and to the use thereof.

Description

Technical Field

[0001] This invention relates to the manufacture of ultrathin components made of glass-based materials, particularly glass and / or glass-ceramic components, with a thickness of 5 µm to 100 µm, by introducing separation lines using laser filamentation technology. Examples of ultrathin components made of glass-based materials include ultrathin glass plates and so-called glass films. Background Technology

[0002] Laser filamentation technology for separating glass-based materials achieves higher process efficiency compared to purely mechanical separation processes. This increased efficiency involves both increased processing speed and the avoidance or at least reduction of scrap rates.

[0003] In the context of this invention, glass-based materials refer to all materials that exhibit a glassy network in at least certain regions and / or originate from glass materials. Glass-based materials include, in particular, glass itself and glass ceramics obtained through at least partial crystallization of the elements of glass materials.

[0004] When separating continuous glass ribbons, such as beaded cutting and transverse slicing, and when necessary combined with subsequent glass separation, such as compared to abrasive wheel cutting, higher ribbon running or stretching speeds and cutting speeds during the cutting process can be achieved. The cutting speeds achievable with abrasive wheel cutting for beaded cutting and transverse slicing are particularly limited by the operator's execution of the separation and placement processes. Furthermore, laser filamentation is a low-particle method, resulting in fewer contaminants and scratches on the glass. This is also applicable to the separation of individually processed ultrathin glass sheets.

[0005] Separating the glass plate itself by introducing a filament using an ultrashort pulse laser is known. Such methods are described in patent documents WO2018 / 020145 A1 or US 2018 / 0057390 A1.

[0006] The art consistently strives to maximize processing speed for efficient production. To this end, for glass substrates, the spacing A between adjacent filamentary damages (also known as pitch) is adjusted to within 10 µm. For TFT glass substrates with a thickness or material thickness of 0.5 mm to 7 mm, a pitch range of 5 µm to 10 µm is recommended. To improve processing speed, it is generally considered that the pitch should be increased.

[0007] The spacing A (Abstand) or pitch between adjacent filamentary damages is measured between their center points. The center point of a filamentary damage lies on its longitudinal axis. In the simplest case, the cross-section of a filamentary damage is circular.

[0008] One of the characteristics of processing quality is the edge strength K of the processed components (especially the edges of the desired components, typically by cutting off excess material from the edges). The goal is to obtain the highest possible edge strength. Unlike thicker substrates, post-processing of the edges is almost impossible in the case of ultra-thin components.

[0009] Ultrathin glass-based components are becoming increasingly important, for example, as substrates for electronic parts or cover plates for displays (especially hinged and / or foldable displays). Since such applications require particularly efficient manufacturing processes, the present invention aims to provide a particularly economical method for manufacturing ultrathin glass-based components, as well as corresponding ultrathin glass-based components and their applications. Summary of the Invention

[0010] The above objective is achieved through the technical subject matter of the independent claims. Advantageous technical solutions of the invention are set forth in the dependent claims. The method for manufacturing ultrathin components of glass-based materials comprises the following steps: - Provides ultrathin components made of glass-based materials, wherein the material thickness (d) of the ultrathin components is from 5µm to 100µm; - A focused laser beam (20) is generated by at least one ultrashort pulse laser (16), the laser beam having a wavelength, wherein the glass-based material element is at least substantially transparent at the wavelength; - The focused laser beam is used to introduce filamentary damage into the ultrathin glass-based element along the separation line; - The spacing (A) between adjacent filamentous lesions ranges from 0.4 µm to 3.8 µm. - Wherein, the spacing (A) is measured between the center points of adjacent filamentous lesions.

[0011] The method is based on laser filamentation technology using an ultrashort pulse laser. For this purpose, a focused laser beam from the pulsed laser is directed onto the element to be processed (also referred to as the workpiece). The laser emits a laser beam with a wavelength of λ, wherein the workpiece is at least within the laser beam incident region and is substantially transparent at least for the laser wavelength λ used. "Substantially transparent" should be understood as the workpiece having a transmittance greater than 85%, preferably greater than 90%, and particularly preferably greater than 95% at wavelength λ.

[0012] To still achieve interaction between the laser beam and the workpiece material, an ultrashort pulse laser is employed according to the present invention. In this case, the pulse width is extremely short, i.e., less than 1 nanosecond, particularly in the range of several picoseconds to several femtoseconds, particularly in the range of 100 picoseconds or 10 picoseconds to 100 femtoseconds or 10 femtoseconds. Here, this interaction can typically be based on nonlinear optical effects, such as those described, for example, in WO 2012 / 006736 A2. This involves the synergistic effect of two nonlinear effects: pulse self-focusing caused by the optical Kerr effect; and defocusing caused by the plasma generated by the laser in the material.

[0013] EP 3169635 A1 describes the use of axial-cone optics to generate a Bessel beam and extend the laser focusing line in laser cutting. This document indicates that, unlike methods based on the Kerr effect, refocusing the laser beam requires a change in the refractive index of the workpiece material (glass in this example). This inevitably leads to different defect patterns, which is undesirable.

[0014] Alternatively, and particularly advantageously, in the sense of this invention, a beam-shaping optics device can also be used to focus the laser beam onto an ultrathin element. This is especially advantageous because the ultrathin element corresponds to a length range for laser focusing, which can also be generated by a simple beam-converging path, for example, through a lens in a telescope assembly.

[0015] A filament is generally understood as a long, thin, thread-like structure whose diameter is significantly smaller than its length. In the context of this invention, "filamentary damage" refers to modification of the original material caused by irradiation with an ultrashort laser pulse, typically indicating a weakening of the original material's mechanical properties, or more favorably, a channel, particularly a hollow channel. In this hollow channel, at least locally, no original material remains, thus forming a cavity.

[0016] One well-known application of filamentation technology is laser cutting, in which defects are introduced into the glass. If multiple defects are arranged side-by-side, a separation line is formed, and the glass can be separated at this line by applying stress. A hypothetical basic mechanism is that microcracks originating from the filaments weaken the material. When multiple defects are arranged side-by-side, the microcracks connect to form a connecting line, along which separation can occur. The separation line can also be understood as a predetermined fracture line, especially when the workpiece has not yet separated after the introduction of filamentary damage, and separation can only be achieved through subsequent process steps and / or the application of mechanical force. The terms "separation line" and "predetermined fracture line" are used synonymously herein.

[0017] The inventors unexpectedly discovered that for ultrathin glass-based components, the applicable spacing A between adjacent filamentary damages is completely different from that of existing thicker components. Overall, a smaller spacing is more advantageous for ultrathin components compared to components of normal thickness. This is particularly surprising, as it was generally assumed that ultrathin components have lower mechanical stability than thicker components, and therefore only fewer defects (in this case, filamentary damage) are needed to effectively separate them; however, the opposite is true.

[0018] For ultrathin components made of glass-based materials with a thickness or material thickness d of 5µm to 100µm, a spacing A or wire pitch of 0.4µm to 4.0µm has proven particularly advantageous. A spacing A of 0.5µm to 3.8µm is particularly advantageous.

[0019] Spacing A is the distance measured from the center point of one filamentary damage to the center point of the adjacent filamentary damage. The center point is located on the longitudinal axis of the filament, which extends into the glass-based material element.

[0020] For the ultrathin components of the glass-based material described above (referred to herein as the upper O), the spacing A represents the optimal trade-off between processing speed and edge strength. As described in detail below, edge strength decreases as the spacing A increases or decreases. It has been recognized that the specified wire pitch range enables the ultrathin components of the glass-based material to achieve optimal edge strength within the thickness range. The reason for this peak is unclear. It can be speculated that, compared to thicker and more rigid materials, ultrathin materials exhibit flexibility, which reduces the formation of cracks around the filaments, thus requiring more filaments on the separation line to achieve separability.

[0021] It should be noted that, in the sense of this specification, "separability" should be understood as both the spontaneous separation of parts of the element and separation achieved by applying additional forces (mechanical fracture force and / or thermal stress), the latter of which may facilitate efficient industrial reprocessing of the separated element.

[0022] The material thickness d of the ultrathin glass substrate element is advantageously in the range of 5µm to 50µm, and particularly advantageously 7µm to 40µm. Therefore, very thin glass elements, such as glass plates, glass ribbons, and / or glass wafers, can benefit from this invention. Similarly advantageous lower limits for glass thickness are 18µm, 20µm, 22µm, 24µm, 26µm, 28µm, or 30µm. Advantageous upper limits are 42µm, 44µm, 46µm, or 48µm. These upper and lower limits can, of course, be combined with each other. Particularly advantageous ranges are, for example, 18µm to 48µm or 24µm to 38µm.

[0023] A particularly advantageous aspect of the method of the present invention is the selection of the spacing A between adjacent filamentary damages within the range of 0.6µm to 2.0µm or 2.2µm to 3.6µm. The inventors unexpectedly recognized that the edge strength of the ultrathin element exhibits two peaks, each located within a different range of spacing A. At the smaller range of the peak spacing A, a slightly higher edge strength can be achieved, but this results in a longer processing time due to the smaller filament pitch. At the larger range of the peak spacing A, the edge strength is relatively lower, but the processing time is shorter. Therefore, the user can select an appropriate spacing based on a trade-off between the desired edge strength and processing speed. This also applies perfectly to the aforementioned range of spacing A.

[0024] Advantageous ranges for spacing A may also be 0.5µm to 2.0µm, or 0.6µm to 2.0µm, or 1.1µm to 2µm, or 1.2µm to 2.0µm, or 1.2µm to 1.9µm. Similarly, advantageous ranges are 1.1µm to 3.6µm, or 1.2µm to 3.5µm. Advantageous ranges are 2.4µm to 3.6µm, or 2.5µm to 3.5µm.

[0025] In one advantageous method, the filamentary damage extends from the upper side O of the glass element to the opposite lower side U. Thus, the filaments can advantageously penetrate completely through the thickness of the glass substrate element. Alternatively, the invention also covers cases where the filamentary damage terminates within the volume of the element.

[0026] In an advantageous arrangement of the method, the diameter F of the filamentary damage is 0.2 µm to 1.2 µm, particularly 0.4 µm to 1.0 µm. In this specification, the diameter F of the filament is measured on the side of the element facing the laser (hereinafter referred to as the upper side O). As mentioned above, the defect can be material-modified or contain material modifications. However, it is particularly advantageous that the filamentary damage is a hollow channel. Such a hollow channel can be introduced, in particular, by a series of consecutive ultrashort laser pulses (i.e., a so-called pulse train). The pulse train used can advantageously consist of 2 to 6 single pulses, particularly 4 single pulses. However, the inventors have recognized that it is particularly feasible and advantageous for laser single pulses to produce hollow channel-shaped filaments.

[0027] A particularly advantageous arrangement of the method involves adjusting the spacing A between the filaments to match the diameter F of the filamentary injury. In this particularly advantageous arrangement, a spacing-filament relationship value Q is set, where Q is determined by Q=AF. The value of Q ranges from -0.4µm to 3.6µm, especially from -0.4µm to 2.8µm or from -0.2µm to 2.0µm.

[0028] The favorable ranges for A and F have been explained above. Therefore, this indicates that Q can take negative values ​​when F is less than A. This means that when Q < 0 is chosen, overlapping of filamentary damage occurs along the separation line. Surprisingly, when the overlap is too large, the edge strength decreases again. Therefore, the stated range is most advantageous.

[0029] Another particularly advantageous arrangement of the method includes separating glass-based material elements along a separation line, wherein bridges are formed along the separation line between filamentary damages, the bridge width g being 0.1µm to 3.6µm, or the bridge width g being in the range of 0.1≤g≤2·F, advantageously in the range of 0.1≤g≤F, and particularly advantageously in the range of 0.1≤g≤F / 2.

[0030] In the context of this invention, a bridge refers to an edge of a separated element, particularly a qualified product, located on and / or at least substantially parallel to the separation line. Essentially, the bridge connects filamentary damage. Thus, such a bridge exists when Q > 0, meaning there is no overlap of filaments. It has been proven particularly advantageous to adjust the width g as a function of the fiber diameter F. This can be achieved by selecting the spacing A. It has been proven advantageous that the bridge width is at most twice the filament diameter, i.e., at most 2·F. Particularly advantageously, the bridge width ranges from at most one filament diameter F, and even more advantageously, the bridge width is at most half the filament diameter (F / 2). Within these ranges, in embodiments with bridges on the separation line, ultrathin elements can achieve high edge strength.

[0031] As described above, the glass-based material of the ultrathin element particularly includes glass and / or glass-ceramic. In particular, it is composed of glass and / or glass-ceramic.

[0032] A particularly advantageous arrangement of the method includes separating glass-based material elements along a separation line, wherein the edge strength K of the glass-based material elements is greater than 120 MPa, preferably 120 MPa to 400 MPa, or 125 MPa to 300 MPa, or 125 MPa to 250 MPa, and particularly preferably the edge strength K is in the range of 4·d ≤ K ≤ 10·d. This inequality represents only a correlation, and its numerical values ​​are directly applicable; these values ​​are used in dimensionless form.

[0033] As stated above, d represents the thickness of the ultrathin element or the material thickness. It has been shown that, as expected, edge strength increases with increasing element or material thickness d. Within the range of the aforementioned thickness d, the edge strength falls within the range specified by the aforementioned inequality.

[0034] The described edge strength can be measured in accordance with the method described in patent document DE 102014110855 A1. Accordingly, when testing the fracture strength of a flat sample made of brittle material, especially glass, it is specified that the sample has a first side and a second side, as well as at least one edge, and the first side is opposite to the second side. This test involves causing a sample to fracture from a test edge under mechanical tensile stress *s*. Specifically, at the test edge, a first side of the sample is subjected to tensile stress *s* along a segment of the sample within that test edge. This is achieved by pressing the test segment onto the surface of a shape-stable gauge (Lehren-Oberfläche) with a defined curvature. The curvature of the gauge surface is imposed on the test segment, causing the sample to bend within that segment along the test edge. A gauge surface with a first bending radius *R* is used, and the fracture strength of the sample is tested under a mechanical tensile stress *s* corresponding to this bending radius *R*. This test is repeated by progressively decreasing the bending radius *R* and correspondingly increasing the tensile stress *s* until the sample fractures. The tensile stress *s* or bending radius at which the sample fractures is then evaluated. In particular, it can also be determined whether the sample fractures at the test edge.

[0035] In the method of the present invention, the glass-based material element can preferably be in the form of a flat substrate, especially a glass plate and / or a glass-ceramic plate. It is particularly advantageous to introduce the separation line into the edge region (Randbereiche) of the flat substrate.

[0036] This is particularly applicable to processing individual components at corresponding processing stations. During this process, the components are separated sequentially at the processing stations. This means that the glass components are provided to the processing station for processing. The processed components are then transported further, followed by the unprocessed components.

[0037] Of course, the invention can also cover the possibility of introducing separation lines at any location of the element. However, it is particularly advantageous to separate the edge regions of the element, especially the edge regions of ultrathin glass plates.

[0038] An alternative advantageous arrangement of the method includes: the glass-based material element being presented as a continuous glass strip having a predetermined glass thickness d, wherein at least one longitudinal separation line is formed at least along the longitudinal direction of the glass strip, having thickened beaded edges, the beaded edges being separated along the longitudinal separation line to form an edge; and / or at least one transverse separation line is formed along the transverse direction of the glass strip, wherein the glass plate is separated at the transverse separation line of the glass strip to form an edge.

[0039] Therefore, the method of the present invention can be used to separate one or two beaded edges on corresponding edge sides of a continuous ultrathin glass strip. Alternatively or additionally, the method of the present invention can also be used to laterally divide a continuous ultrathin glass strip within an ultrathin glass plate. The resulting edges exhibit enhanced edge strength.

[0040] In another advantageous arrangement, the method introduces at least one longitudinal separation line in the hot zone of the glass strip.

[0041] Using the laser filamentation technique with the parameters described in this paper, in the case of ultrathin glass ribbons, laser filamentation can be performed immediately after the glass ribbon leaves the melting unit within its thermal region, especially above the glass transition temperature T. g The edge region of the glass ribbon is treated at a certain temperature.

[0042] Alternatively, at least one longitudinal separation line may be introduced in the cold region of the glass ribbon, wherein the glass ribbon is cooled at a cooling rate of 10 K / s or more, preferably 20 K / s or more, particularly preferably 40 K / s or more.

[0043] In the sense of this specification, the rapid stretching of ultrathin glass ribbons by a down-draw method, particularly at speeds ranging from 0.5 m / min to 50 m / min, is described. However, the method is not limited to the down-draw method. Overflow-fusion-verfahren or other methods suitable for manufacturing thin glass ribbons can also be used for stretching. In the down-draw method, according to one feasible embodiment, a separation line consisting of filamentary damage can be introduced after the glass ribbon is deflected to a horizontal direction. In principle, the glass ribbon can be cooled rapidly, particularly by applying the cooling rate described above.

[0044] To reliably and easily separate the bead edges from the glass ribbon and advantageously separate individual glass plates, it is particularly advantageous to cool the glass ribbon before introducing a predetermined fracture line within the glass transition temperature range, preferably at a temperature below the softening point, and particularly preferably at a temperature below the glass transition temperature. To optimize the method, the glass ribbon may also optionally be cooled during and / or after the introduction of the predetermined fracture line.

[0045] In one feasible arrangement of the method, cooling is carried out in a cooling furnace, particularly a cooling furnace with heating elements, or by blowing or spraying a cooling fluid (especially air, other gaseous media, or aerosol). In the latter case, the cooling rate can be adjusted or determined according to process parameters (such as glass ribbon temperature and feed rate) by controlling the flow rate of the cooling fluid to prevent undesirable stresses in the glass ribbon.

[0046] In addition to the aforementioned beam-shaping optics, the laser beam can also be shaped into a Bessel beam, especially using beam-shaping optics.

[0047] In one advantageous improvement, the beam profile of the laser beam is shaped such that the extension of the laser beam in the direction of the separation line is greater than its lateral extension.

[0048] This creates a so-called priority direction in the direction of the separation line. In particular, beam-shaping optics can produce beam profiles with a lateral priority direction, such as elliptical, willow-leaf, teardrop, double-beam spaced beam forms (e.g., double Bessel beams), rhomboid, dumbbell, wedge, or spot-shaped beam profiles, or beam profiles with a main beam and low-intensity satellite beams. Thus, after separating the bead edges and dividing the ultrathin glass plate, almost arbitrary profiles with extremely high edge quality or edge intensity can be produced.

[0049] In particular, the laser beam can be shaped within its focal region such that the laser beam extension along the predetermined break line direction is 1.3 to 5 times, especially 1.5 to 4 times, greater than the extension perpendicular to the break line direction.

[0050] In one feasible arrangement for manufacturing ultrathin glass sheets, the separation lines are introduced in the following sequence: first, transverse separation lines are created transversely to the glass strip; then, longitudinal separation lines are created longitudinally on both sides of the glass strip, at the edges where thickened beaded edges are present. In this way, after the predetermined transverse break lines are introduced, the glass strip remains held together by the beaded edges, thereby achieving mechanical stability.

[0051] In another feasible arrangement, the moving device for moving the ultrathin glass ribbon is preferably equipped with at least an anpress-roll, an anpressor, or an adsorption device to fix the glass ribbon in position within the laser focusing area. This both fixes the glass ribbon's position relative to the focusing position of the ultrashort pulse laser and arranges the separation line composed of filamentary damage to prevent the glass ribbon from moving out of the laser beam's focusing area. In particular, this fixation also increases manufacturing speed while avoiding the aforementioned disadvantages, which positively impacts the economic efficiency of the method.

[0052] Separation of the bead edge at a predetermined break point in the longitudinal direction and / or separation of the ultrathin glass plate at a transverse separation line transverse to the glass strip can both be advantageously carried out mechanically.

[0053] It has been shown that separation at the predetermined break line usually requires almost no mechanical action. Typically, the movement and stress of the glass belt during transport are sufficient to separate the break line.

[0054] Using the method for manufacturing ultrathin glass sheets according to this disclosure, extremely high cutting speeds can also be achieved, especially up to 5 m / s, particularly preferably 3 m / s to 5 m / s.

[0055] As mentioned above, laser filamentation technology can be used to perform bead-edge cutting and lateral segmentation of ultrathin glass ribbons, that is, to separate the bead edges and individual glass plates, or to perform a so-called full body cut (FBC), requiring only minimal cutting force or none at all. In particular, it is not necessary to generate thermal stress by applying temperature, i.e., there is no need for so-called hot scribing processes, nor is it necessary to perform thermal shock cutting through rapid temperature drops, especially cold shocks.

[0056] The method produces very few particles and has particularly stable edge strength, resulting in a higher, predictable yield. It is also particularly cost-effective due to reduced manufacturing costs and the ability to produce ultrathin components from glass-based materials with consistent quality.

[0057] Glass plates with thicknesses ranging from 5µm to 100µm, particularly from 5µm to 50µm or from 7µm to 40µm, are produced according to the method described. Specifically, the coefficient of thermal expansion of the glass used is greater than 6ppm / K.

[0058] In addition to the method described above, the present invention also includes ultrathin elements made of glass-based materials. The present invention provides an ultrathin element made of glass-based material with a thickness ranging from 5 µm to 100 µm, having filamentous damage along at least one edge, the spacing A of which is 0.4 µm to 3.8 µm, particularly 0.6 µm to 2.0 µm or 2.2 µm to 3.6 µm.

[0059] As described above, the diameter F of the filamentary damage measured on the upper side O of the element is 0.2 µm to 1.2 µm. The particularly advantageous range described above also applies here.

[0060] An advantageous ultrathin element based on a glass substrate has a spacing-to-filament relationship value Q, wherein Q is determined by Q=AF, and the value of Q ranges from -0.4µm to 3.6µm, particularly from -0.4µm to 2.8µm or from -0.2µm to 2.0µm.

[0061] A particularly advantageous ultrathin element of a glass-based material has a bridge along the edge between filamentary damages, the bridge width g being 0.1µm to 3.6µm, or the bridge width g being in the range of 0.1≤g≤2·F, preferably in the range of 0.1≤g≤F, and particularly advantageously in the range of 0.1≤g≤F / 2.

[0062] In conjunction with the methods described above, explanations of these implementation schemes are provided, which of course also apply to the components themselves.

[0063] The ultrathin glass plates manufactured according to the method of the present invention, as well as the ultrathin elements described herein, can be used in a variety of different applications, and are particularly advantageous for use as intermediate substrates or spacers for insulating electronic components, for encapsulating optoelectronic components, as carriers for thin-film batteries (such as thin-film batteries or thin-film solar cells), as cover elements for displays (especially flip-up displays and / or foldable displays), or as substrates or composite substrates for displays and microfluidic batteries.

[0064] These diverse applications benefit from the material's excellent properties, such as chemical resistance, resistance to temperature changes, heat resistance, airtightness, high electrical insulation, suitable coefficient of thermal expansion, flexibility, high optical quality, light transmittance, high surface quality and extremely low roughness on both sides of the ultra-thin glass, and high edge strength achieved through separation. Attached Figure Description

[0065] The present invention will now be described in detail with reference to and in conjunction with the accompanying drawings, but these are not intended to limit the scope of the invention. The drawings and their descriptions also illustrate specific embodiments.

[0066] Figure 1 The diagram illustrates a glass substrate manufacturing apparatus.

[0067] Figure 2 A schematic beam profile of a beam-shaping optics device is shown.

[0068] Figure 3 An arrangement in which the glass ribbon is separated into individual glass plates is shown.

[0069] Figure 4 This is a graph showing the cooling rate versus glass thickness.

[0070] Figures 5a to 5d The image shows filamentary damage in an ultrathin component.

[0071] Figures 6a to 6b A top view of the edges of the separated components is shown.

[0072] Figure 6c A top view of an element with filaments is shown.

[0073] Figure 7 This is a curve showing the relationship between edge strength and wire pitch.

[0074] Detailed Implementation Plan Figure 1An exemplary embodiment of an apparatus 1 for manufacturing a glass sheet 2 is shown, the glass sheet 2 having a predetermined glass thickness d in the range of 15 μm to 2 mm. A continuous glass ribbon 4 is drawn from the glass melt 10 through a downward-facing slit-like nozzle 6 (which is part of a thermoforming apparatus 8). Here, the so-called down-draw method is preferably used as the thermoforming method for the glass ribbon, and preferably, the separation line 12, consisting of filamentary damage 14 (i.e., laser filamentation), is introduced directly in the down-draw method, particularly preferably after the glass ribbon 4 has been deflected to a horizontal direction. This method can also be applied in principle to other glass-based materials.

[0075] At least one ultrashort pulse laser 16 is used to controllably introduce a predetermined fracture line 12 consisting of filamentary damage 14 into the glass strip 4. An approximate Bessel beam 20 is generated by the laser pulses through a beam-shaping optics 18, thereby creating a focused region 22 that passes through the glass strip 4. The beam-shaping optics 18 can focus the laser beam 20 to increase the power density within the glass. The intensity distribution can be selectively set via the beam-shaping optics 18, and consequently, the shape of the filamentary damage 14 can be selectively adjusted.

[0076] The focal area is advantageously adjusted to be longer than the glass thickness d, so as to generate deep and spaced filamentous damage 14 within a predetermined volume of the glass strip 4, preferably from one side 51 of the glass strip 4 to the opposite side 52, i.e. preferably through the entire thickness d of the glass strip 4.

[0077] For the purposes of this invention, an example suitable for use as an ultrashort pulse laser is an Nd:YAG laser with a wavelength of 1064 nm, an average power of 12 W (at 1064 nm, 100 kHz, and one pulse per pulse train), a repetition rate of 100 kHz, a pulse train frequency of 50 MHz, and a pulse duration of approximately 10 ps (at 1064 nm, 100 kHz). Of course, other lasers, especially high-power lasers, are equally applicable.

[0078] According to another embodiment, a Yb:YAG laser with a wavelength of 1030 nm can be used. Typically, the laser can be a second harmonic (SHG) or third harmonic (THG) version. According to one embodiment, the pulse duration is in the range of 300 fs to 20 ps or in the range of 400 fs to less than 10 ps. The repetition frequency can be in the range of 50 kHz to 1 MHz, preferably 100 kHz to 500 kHz. The pulse energy can be greater than 100 μJ, greater than 200 μJ, or even greater than 400 μJ. The number of pulse trains is ≤2, ≤4, or ≤8. Particularly advantageously, instead of pulse trains, a single pulse is sufficient to generate defects in ultrathin glass.

[0079] Furthermore, the equipment 1 for manufacturing glass sheets from glass-based material 2 preferably includes a moving device 24 (e.g., moving the glass strip 4 by means of a conveyor roller, especially a traction roller), an ultrashort pulse laser 16, and / or a beam shaping optics 18 (for positioning the laser beam 20 on the glass strip 4 along the direction of a predetermined break line 12).

[0080] Here, the laser beam can be directed either onto the glass strip 4 or onto the glass strip 4 as it travels through the laser beam 20. Combinations of these two variations are also possible. To make the laser beam 20 move perpendicular to the direction of movement of the glass strip 4, a galvanometer scanner can be used, or a polarizer can be moved transversely to the axis of movement of the glass strip.

[0081] In this example, a transverse separation line 121 is formed transversely to the glass strip 4, and a longitudinal separation line 122 is formed longitudinally on both sides of the glass strip 4 along the edges with thickened beaded edges 13.

[0082] The following understanding can also be applied: by employing a cooling rate matched to the glass thickness, the dispersion of the fracture strength at the edge created by the laser-assisted method according to this disclosure can be reduced. Therefore, the apparatus 1 for manufacturing the glass plate 2 also includes a cooling device 26 arranged and configured to cool the glass ribbon 4 before introducing the filamentary damage 14, the cooling rate being selected according to a predetermined glass thickness d, wherein the cooling rate increases as the glass thickness decreases. Advantageously, the cooling of the glass ribbon 4 is completed before introducing the separation line 12 within the glass transition temperature range, preferably at a temperature below the softening point, and particularly preferably at a temperature below the glass transition temperature.

[0083] In an advantageous arrangement, the cooling of the glass belt 4 is carried out in a cooling furnace 27, particularly under the control of heating elements. If necessary, uniform cooling can also be aided by blowing in or spraying cooling fluids (especially air or aerosol).

[0084] According to one embodiment, the apparatus 1 for manufacturing the glass plate 2 further includes a separating device 28, which is arranged and configured to separate the beaded edges 13 along a predetermined longitudinal break point 122 to form an edge 30, and to separate the glass plate 2 by means of a transverse separating line 121 transverse to the glass strip 4 to form an additional edge 30, preferably implemented mechanically. Thus, the separating device may include spherical rollers guided to the predetermined break line. A heating source (such as a laser) may also be provided to induce thermal stress at the predetermined break line. In some cases, no mechanical action is required to separate the glass at the predetermined break line.

[0085] The beam-shaping optics 18 can also precisely adjust the intensity distribution within the glass and the shape of the filamentary damage 14.

[0086] In another advantageous arrangement, the moving device 24 for moving the glass strip 4 is at least equipped with a pressure roller, a pressure rib, or an adsorption device to fix the axial position of the glass strip 4 or its position along the beam direction within the focusing area, thereby preventing the glass strip 4 from warping due to the splitting of the glass plates 2 and the separation of the bead edges 13, which could otherwise affect the shape and edge quality of the individual glass plates 2. In particular, this fixing method can increase the speed of the manufacturing process while avoiding the aforementioned disadvantages, which has a positive impact on the economic efficiency of the method. Figure 1 In the example shown, a pair of clamping rollers 15 are used as a means of fixing the glass strip 4 vertically, which determines the position of the glass strip near the incident point of the ultrashort pulse laser 16 along the incident direction of the laser beam 20.

[0087] In an advantageous embodiment of the method for manufacturing glass plate 2, the beam profile is preferably adjusted by a corresponding beam-shaping optics 18 to have an intensity distribution resembling a Bessel beam shape or an approximate Bessel beam shape with highly concentrated intensity along the optical axis. The beam-shaping optics focus the beam to a linear focal point. To achieve this focusing, one or more axial pyramids or diffractive optical elements (DOEs), or combinations thereof with other optical elements, are suitable as beam-shaping optics. As described above, other optical structures are equally feasible and covered within the scope of this invention.

[0088] Specifically, the beam profile is preferably adjusted such that the extension of the laser beam in the direction of the separation line 12 is greater than its extension transversely (especially perpendicularly) to that direction. In this way, the amount of radiation accumulated along the separation line is greater than the amount of radiation accumulated along a straight line perpendicular to the separation line and intersecting the beam center.

[0089] In other words, the beam-shaping optics preferably produce a beam spot whose cross-section extends more in the direction of the linearly arranged filamentary damages 14 than in the transverse direction, with each filamentary damage 14 extending transversely (preferably perpendicularly) to the surface of the glass strip 4 in its longitudinal direction (in the propagation direction of the laser beam 20). For this purpose, the beam-shaping optics 18 is preferably adjustable for the larger cross-section of the beam spot, and the direction of this larger cross-section preferably follows the orientation of the linearly arranged filamentary damages 14.

[0090] In another advantageous embodiment of the method, beam shaping optics 18 produces an asymmetric beam profile with a lateral-preferred direction. Figure 2 Several different forms of beam profiles are shown. Sub-figure (a) shows an elliptical beam profile 32, which is oriented such that its major semi-axis is oriented along a corresponding predetermined break line. Thus, the beam profile extends along the predetermined break line A. PGreater than the extension A perpendicular to the separation line S Figure (b) shows the droplet-shaped jet profile 33. In the embodiment shown in Figure (c), the laser beam is split into two beams. Therefore, the beam profile 34 is a dual-beam configuration with two spaced beams. Figure (d) shows a diamond-shaped beam profile 35. Figure 2 (e) shows the dumbbell-shaped beam profile 36. Figure 2 (f) shows the wedge-shaped beam profile 37. Finally, Figure 2 Figure (g) shows a beam profile 38 with a main beam and weaker or smaller satellite beams. The embodiments in figures (b), (e), (f), and (g) are similar in that they not only extend greater in the feed direction than in the direction perpendicular to that feed direction, but are also asymmetrical with respect to the mirror axis perpendicular to the feed direction. This shape can be highly advantageous in further promoting separation and achieving higher edge intensity. This is particularly advantageous because the asymmetry also exists during the introduction of the filaments, since no filaments are present in front of the laser beam in the feed direction compared to the predetermined break line portion already swept by the beam. Therefore, typically, but not limited to the specific example, filamentary damage is introduced by laser beam 20, which has an asymmetrical beam profile about its mirror image perpendicular to the feed direction.

[0091] Therefore, the shape of the separation line 12 produced by the filamentous damage 14 is controllable, the geometric accuracy is higher, and the edge strength is also higher after separating the bead edge 13 and splitting the glass plate 2.

[0092] To facilitate crack formation in the separation line direction, it is advantageous to select a cross-sectional shape for the laser beam spot that has a certain extension in the desired fracture direction. Figure 2 The elliptical cross-sectional shape 32 in (a) can be obtained, for example, from the original circular cross-sectional shape of the laser beam by combining cylindrical lenses. Other beam profiles can also be produced by using suitable lenses, and diffractive optical elements (DOEs) can be used if necessary.

[0093] In a preferred arrangement of the method for manufacturing the glass plate 4, the separation lines 12 are introduced in the following order for technical reasons: first, a transverse separation line 121 is generated transversely to the glass strip; then, a predetermined longitudinal break line 122 is generated longitudinally on both sides of the glass strip, at the edges both having thickened beaded edges. In this way, the glass strip 4 remains held together by the beaded edges 13, thereby achieving mechanical stability.

[0094] Figure 3 The arrangement of separating the glass strip 4 into individual glass plates 2 and the separating bead edges 3 is shown.

[0095] For this method, a moving device 24 for conveying the continuously stretched glass strip 4 is preferably provided, which, in the illustrated example, includes a conveyor belt 240. To introduce the separation line 12, typically, but not limited to the illustrated example, multiple ultrashort pulse lasers 16 are advantageously used, wherein at least one first ultrashort pulse laser 16 introduces the transverse predetermined break line 121, and at least one second ultrashort pulse laser 16 introduces the longitudinal separation line 122. In particular, as in the illustrated example, two ultrashort pulse lasers 16 may also be used for the two longitudinal separation lines 122. For simplicity, the beam-shaping optics 18 of the ultrashort pulse lasers 16 are not shown in the figures. In the illustrated example, the moving device 24 may also include a beam deflection optics 241. According to one embodiment, the laser beam 20 is moved on the glass strip 4 by the beam deflection optics 241, thereby introducing the transverse separation line 121. The beam deflection optics 241 may, for example, include a galvanometer scanner.

[0096] As shown in the figure, in a preferred embodiment, the separation lines 121 and 122 are first introduced laterally and then longitudinally into the continuous glass strip 4.

[0097] After laser filamentation, only minimal or no cutting force is required to separate or break the glass strip 4 at a predetermined fracture line 121 transverse to the glass strip 4 using a mechanical separation device 28, thereby separating individual glass plates 2 or performing a so-called full body cut (FBC). Similarly, the bead edges of the glass strip 4 can be cut with minimal cutting force, such as by simple stretching and / or forward movement on the acceleration belt 29, i.e., separating the bead edges 13 along the predetermined fracture line 122 longitudinally. The acceleration belt 29 may be, for example, a component of the separation device 28 or constitute the separation device 28 itself, cutting into individual glass plates 2 in the direction of movement of the device.

[0098] After the glass plates 2 are separated and divided, they can be conveyed to the inspection unit 39 via the conveying device 24. The inspection unit 39 can be used to test the dimensions of the glass plates and the quality of their edges.

[0099] In particular, to achieve good edge quality, it is not necessary to thermally separate the glass strip 4 by inputting stress, nor is it necessary to introduce temperature (e.g., by CO2 laser) to cause thermal stress (i.e., no so-called hot scribing process is required), nor is it necessary to perform separation by thermal shock cutting (e.g., by temperature drop, such as by cold shock).

[0100] Separation can be accomplished, for example, by applying mechanical stress with a spherical roller or by guiding a separation line across the spherical roller. The beaded edges 13 separated from the remaining glass ribbon 4 can then be collected, for example, in a fragment container located away from the glass ribbon (in a glass break bin / other space). By selecting a spacing, the glass ribbon can be separated along the separation line under gravity. In particular, the area of ​​glass ribbon to be separated can be suspended above a guiding device (e.g., a track or roller).

[0101] In one advantageous method, the glass strip 4 is cooled at a cooling rate selected according to a predetermined glass thickness d, wherein the smaller the predetermined glass thickness d, the higher the cooling rate; and the larger the predetermined glass thickness, the lower the cooling rate.

[0102] Figure 4 A graph showing the selected cooling rate as a function of glass thickness. Specifically, Figure 4 Using Schott AG's AF32 glass as an example, the relationship between the cooling rate of the ultrathin glass strip 4 (in the range of 40 K / s to 325 K / s) and the glass thickness d (in the range of 25 µm to 110 µm) is shown (curve (a)).

[0103] The AF32 type glass provided by Schott AG is an alkali-free aluminoborosilicate thin glass, which belongs to a class of alkali-free glasses that are very suitable for this method, and has the following composition: The prerequisite is that the sum of its MgO, CaO and BaO contents is in the range of 8 wt.% to 18 wt.%.

[0104] The composition of the glass used in this embodiment, by weight percent, is as follows:

[0105] AF32 glass has high optical transmittance and a density ρ of 2430 kg / m³. 3 The surface stress γ is 0.3 N / m, the thermal conductivity λ is 2 W / mK, and the specific heat capacity c P The transition temperature T of AF32 glass is 1360 J / kgK. g The thermal expansion coefficient is 713°C. AF32 glass has a low thermal expansion coefficient, which is very close to that of silicon. The pull-down method can also be used to manufacture surfaces with exceptionally smooth surfaces and a roughness (RMS) of less than 1 nm, with an operating temperature of up to approximately 600°C.

[0106] Another type of glass suitable for the methods described herein contains the following components by weight percent:

[0107] In one embodiment, glass having the following components is manufactured:

[0108] According to another embodiment, the glass ribbon with a preferred stretching thickness of 32µm ± 5µm is used, for example, by overflow melting.

[0109] Another type of glass, which is very suitable for the present invention, can be processed into thin glass ribbons and can be easily cut by introducing separation lines (as described herein), and contains the following components by weight percent:

[0110] This glass, for example, has the following composition:

[0111] Glass plates with this composition typically have the following characteristics:

[0112] Another type of glass that can be chemically strengthened and is particularly suitable for processing by the methods described herein has the following composition by weight percent: The glass may also contain 0 wt.% to 1 wt.% of P2O5, SrO, BaO; and 0 wt.% to 1 wt.% of clarifying agent: SnO2, CeO2 or As2O3 or other clarifying agents.

[0113] According to one embodiment, the glass composed of the above-described materials can be made into ultrathin glass sheets having one of the following thicknesses: 20µm±5µm, 32µm±5µm, 40µm±5µm, 50µm±5µm, 75µm±5µm, or 100µm±10µm. These glasses can be stretched into thin glass strips by either a downward drawing method or an overflow melting method, and then easily cut into glass sheets by introducing a predetermined fracture line using the method described herein, achieving high strength. If necessary, if the desired glass thickness cannot or is difficult to achieve during the stretching process, the glass can also be thinned chemically or mechanically to achieve the desired thickness.

[0114] This glass, for example, has the following composition:

[0115] All the glass described in this article can be easily processed into glass strips with thicknesses ranging from 5µm to 100µm using the down-draw method.

[0116] Not limited to the example shown, according to the method of the present invention, the glass strip 4 (whose predetermined glass thickness d is in the range of 5µm to 100µm) preferably travels at a speed of 50K / s or higher. Figure 4 Cooling is performed at a cooling rate of ≥40K / s, preferably 100K / s or more, particularly preferably 150K / s or more, or 200K / s or more.

[0117] like Figure 4 As shown in the curve, when the glass ribbon thickness is 30µm, a cooling rate in the range of 150K / s to 300K / s is preferably selected; when the glass ribbon thickness is 50µm, a cooling rate in the range of 90K / s to 180K / s is preferably selected; and when the glass ribbon thickness is 100µm, a cooling rate in the range of 45K / s to 90K / s is preferably selected.

[0118] Therefore, without being limited to the examples shown or the glass compositions described herein, the glass ribbon is preferably cooled at a cooling rate of 150 K / s·30 µm / d to 300 K / s·30 µm / d, where d represents the thickness of the glass ribbon. Figure 4 In the figure, curve (b) indicates an upper limit of (1 / d)·300K / s·30µm, and curve (c) indicates a lower limit of (1 / d)·150K / s·30µm. This preferred range can be alternatively stated as follows: the glass ribbon is preferably cooled at a cooling rate in the range of (1 / d)·4500K·µm / s (curve (c)) to (1 / d)·9000K·µm / s (curve (b)), where d represents the thickness of the glass ribbon.

[0119] Therefore, even at higher cooling rates, glass sheets with high edge strength can be advantageously and particularly efficiently manufactured, taking into account the glass thickness.

[0120] Figures 5a to 5c Cross-sections of glass-based components 2 and 4 are shown to schematically illustrate the possible forms of filamentary damage 14. In these examples, the filamentary damage is designed as hollow channels. Figure 5aThe simplest case of introducing a cylindrical hollow channel into elements 2 and 4 as a filamentary damage 14 is shown. The axis X of the filament passes through the center point of the filamentary damage 14 (also referred to as the filament). The walls of the filament are axially symmetric. In the example shown, the filament 14 connects the upper side O of element 2 to its lower side U. The hollow channel-shaped filament 14 represents a through channel or through hole. As mentioned above, the filament may also not form a hollow channel, but rather be a damage within element 2, which is shown in this figure as reference numeral 144. The diameter of the filament (including both the hollow channel-shaped filament 14 and the filamentary damage 144) is marked as F. The filamentary damages 14 and 144 are measured relative to their respective filament axes X, spaced apart from each other by a distance A, with bridging portions between them. In the separated elements, the bridging portions and the separated filaments together form the fracture edge.

[0121] like Figure 5b As shown, a truncated conical filament 14, also known as a V-shaped filament, can also be provided. This channel can also be referred to as a hollow channel shape. In particular, the truncated conical filament is also symmetrical about the filament axis X. In this figure, the filament opens towards the lower side of the workpiece. This means that the diameter (FO) of the filament 14 on the upper side of element 14 is smaller than its diameter (FU) on the lower side. In particular, the filament 14 can be widened towards the workpiece side by adjusting the focusing position of the beam shaping optics, especially by adjusting the convergence of the laser beam and the distance from the workpiece. The common channel angle α for V-shaped or X-shaped filaments is from 0.1° to about 30°, especially 0.1° to 10°, or 0.2° to 3°. The channel angle is measured between the normal of element 2 and the inner wall of the filament, thus it corresponds to a half-open angle.

[0122] Figure 5c An hourglass-shaped, or X-shaped, filament 1 is shown, which is also formed as a continuous hollow channel. Specifically, this embodiment is achieved by placing the narrowest focusing area of ​​the laser within the volume of the workpiece. For the channel angle and / or opening angle, it is advantageous that its range is the same as that described with respect to the V-shaped filament. The X-shaped filament is characterized by a contraction in the filament diameter within a certain region along the filament axis X. In the example shown, this contraction is located at the center of element 2, i.e., equidistant from the two surfaces of the element. In some embodiments, the contraction is arranged closer to one surface of element 2 than to its opposite surface.

[0123] Figure 5d A top view of element 2 of the glass substrate material with filamentous damage 14 introduced along separation line 12 is shown. However, element 2 has not yet been separated, i.e., it has not yet been separated, which can be done in a subsequent step. Here, element 2 essentially corresponds to the glass plate whose edges are to be separated. Its inner contour can also be removed.

[0124] Figure 6aA top view of a glass-based material element separated along separation line 12 is shown. The view faces the upper side of the element, and the filament diameter F is measured here as described above. This upper side can also be identified on the element after the introduction of the filaments, as the microstructure around the filament openings has clearly identifiable features. Filaments 14 are arranged along separation line 12 at a spacing A. In the example shown in this figure, A is greater than F. Bridges 60 with a bridge width g exist between the filaments. The bridges (steg) are located on or at least substantially parallel to the separation line. As described above, the spacing-filament relationship value Q is calculated using Q=AF, where Q > 0.

[0125] Figure 6b A similar top view is shown, but the same filament diameter F and filament spacing A are chosen, so Q=0. Here, filament walls are adjacent to filament walls. Strictly speaking, a bridge 60 as defined above is not formed, but rather a filament sharply transitions to the adjacent filament.

[0126] Figure 6b A top view is shown showing filaments 14 overlapping along separation line 12 and introduced onto the upper side of an ultrathin element in glass substrate material. This means that A is chosen to be less than F, therefore Q < 0, where Q is negative. Here, bridge portions 60 cannot be formed either; instead, sharp transitions occur between adjacent filaments, at least on the upper side of the filaments shown.

[0127] Figure 7 A graph showing edge strength versus filament pitch is provided. Edge strength is determined as described above. Similarly, as described above, filament pitch is synonymous with the spacing A between adjacent filamentary damages, which typically lie on the separation line 12. The graph also shows the edge strength of ultrathin glass. Curve 501 shows the relationship between edge strength and filament pitch for ultrathin glass with a thickness of 40µm, curve 502 shows the relationship for ultrathin glass with a thickness of 32µm, and curve 503 shows the relationship for ultrathin glass with a thickness of 20µm. In all the examples shown, thickness fluctuations and / or measurement errors are approximately 3µm to 5µm. In this example, the relationship between edge strength and filament pitch is measured for filament diameters of 0.6µm, 0.8µm, and 1.0µm. These curves for filament diameters are essentially indistinguishable and largely overlap, therefore they do not need to be plotted separately.

[0128] from Figure 7Surprisingly and notably, the peak edge strength occurs within a filament pitch range of 0.4µm to 5µm, with two local peaks at approximately 1.2µm and 2.9µm. The location of these peaks is independent of the ultrathin thickness *d* of the glass substrate or the overall material thickness. Only the absolute value of the edge strength is related to the thickness *d*; the greater the material thickness, the higher the edge strength; conversely, the smaller the thickness *d*, the lower the edge strength. The filament pitch range described above lies near these peaks, thus confirming the advantage of this range selection.

[0129] exist Figure 7 In the example shown, the measurement was terminated at a filament pitch of 0.2 µm (this value serves as the lower limit or minimum spacing). Within this filament pitch range, the enhanced edge strength is substantially independent of the diameter F of the filamentary damage 14.

[0130] The edge strength enhancement is extremely significant within the indicated range. At a suitable wire pitch, the edge strength is increased by at least 30% at the primary peak of approximately 1.2 µm, and by more than 20% at the secondary peak of approximately 2.9 µm. The inventors recognized that the presence of two peaks allows for selection of the wire pitch over a relatively wide range while ensuring high edge strength. This enables high processing stability, which ultimately helps reduce scrap and improves resource-efficient operation.

[0131] Therefore, the advantage of this invention lies in providing, for the first time, a processing window regarding the filament pitch (i.e., the distance A between adjacent filamentary damages 14) for ultrathin glass-based components 2 and 4, within which exceptionally superior edge strength can be achieved. This invention strikes a balance between processing speed and manufacturing quality, thereby enabling a rational manufacturing process for ultrathin glass-based components 2 and 4 while reducing scrap rates. Benefiting from the reliable high edge strength provided by this invention, products can continue to be transported and / or further processed. This opens up conditions for the widespread application of ultrathin glass-based components 2 and 4 (especially ultrathin glass).

[0132] List of reference numerals

Claims

1. A method for manufacturing ultrathin components (2, 4) based on glass materials, comprising the following steps: - Provide ultrathin elements (2, 4) made of glass-based material, wherein the material thickness (d) of the ultrathin elements is from 5µm to 100µm; - A focused laser beam (20) is generated by at least one ultrashort pulse laser (16), the laser beam having a wavelength, wherein the glass-based material element is at least substantially transparent at the wavelength; - The focused laser beam (20) is used to introduce filamentary damage (14) into the ultrathin elements (2, 4) of the glass substrate material along the separation line (122). - Wherein, the spacing (A) between adjacent filamentous damages (14) is 0.4µm to 4.0µm, - The spacing (A) is measured between the center points of adjacent filamentous lesions (14).

2. The method according to claim 1, wherein, The material thickness (d) is 5µm to 50µm, preferably 7µm to 40µm.

3. The method according to any one of the preceding claims, wherein, The spacing (A) is 0.5µm to 3.8µm, especially 0.6µm to 2.0µm or 2.2µm to 3.6µm.

4. The method according to any one of the preceding claims, wherein, The filamentary damage (14) extends from the upper side (O) of the glass-based material elements (2, 4) to the opposite lower side (U).

5. The method according to any one of the preceding claims, wherein, The diameter (F) of the filamentary damage, measured on the side of the ultrathin element (2, 4) of the glass substrate material facing the laser, is 0.1µm to 1.2µm, especially 0.4µm to 1.0µm.

6. The method according to any one of the preceding claims, wherein, The glass-based materials (2, 4) include glass or glass ceramics.

7. The method according to any one of the preceding claims, wherein, Adjust the spacing relative to the filaments, where Q is determined by Q=AF and Q is in the range of -0.4µm to 3.6µm, especially -0.4µm to 2.8µm or -0.2µm to 2.0µm.

8. The method according to any one of the preceding claims, wherein, The glass-based material elements (2, 4) are separated along the separation line (122), wherein bridges are formed between the filamentary damages (14) along the separation line (122), the bridge width (g) being 0.1µm to 3.6µm, or the bridge width (g) being in the range of 0.1≤g≤2·F, preferably in the range of 0.1≤g≤F, and particularly preferably in the range of 0.1≤g≤F / 2.

9. The method according to any one of the preceding claims, wherein, The glass-based material elements (2, 4) are separated along the separation line (122), wherein the edge strength (K) of the glass-based material elements is greater than 120 MPa, preferably 120 MPa to 400 MPa, or 125 MPa to 300 MPa, or 125 MPa to 250 MPa, and particularly preferably the edge strength (K) is in the range of 4·d ≤ K ≤ 10·d.

10. The method according to any one of the preceding claims, wherein, The glass-based material element is in the form of a flat substrate (2), particularly a glass plate and / or a glass-ceramic plate, wherein the separation line (122) is preferably introduced into the edge region of the flat substrate.

11. The method according to any one of the preceding claims, - in, The glass substrate material is in the form of a continuous glass ribbon (4) having a predetermined glass thickness (d). - Wherein, at least one longitudinal separation line (122) is formed along the longitudinal direction of the glass strip (4), which has a thickened beaded edge (13), and wherein the beaded edge (13) is separated along the longitudinal separation line (122) to form an edge (30), and / or - Wherein, at least one transverse separation line (121) is formed along the transverse direction of the glass strip (4), and wherein the glass plate (2) is separated at the transverse separation line (122) transverse to the glass strip (4) to form an edge (30).

12. The method according to claim 11, wherein, At least one longitudinal separation line (122) is introduced in the hot region of the glass strip (4).

13. The method according to claim 11, wherein, At least one longitudinal separation line (122) is introduced in the cold region of the glass strip (4), wherein the glass strip (4) is cooled at a cooling rate of 40 K / s or more, preferably 100 K / s or more, more preferably 150 K / s or more or 200 K / s or more, and particularly preferably at a cooling rate in the range of (1 / d)·4500 K / (s·µm) to (1 / d)·9000 K / (s·µm), wherein d represents the thickness of the glass strip (4).

14. The method according to any one of the preceding claims, wherein, The beam profile of the laser beam (20) is shaped such that the laser beam (20) extends in the direction of the separation line (12) more than it extends laterally.

15. The method according to any one of the preceding claims, wherein, The separation of the bead edge (13) along the longitudinal separation line (122) and / or the separation of the glass plate (2) along the transverse separation line (121) transverse to the glass strip is carried out mechanically.

16. An ultrathin element (2, 4) of a glass-based material having a thickness (d) in the range of 5 µm to 100 µm and having filamentous damage (14) along at least one edge, the spacing (A) of the filamentous damage being 0.4 µm to 3.8 µm, particularly 0.6 µm to 2.0 µm or 2.2 µm to 3.6 µm.

17. The ultrathin element (2, 4) of the glass-based material according to claim 16, wherein, The diameter (F) of the filamentous damage measured on the upper side (O) of the element is 0.2µm to 1.2µm.

18. The ultrathin element (2, 4) of the glass-based material according to any one of claims 16 to 17, employing a spacing-to-filament relationship value Q, wherein, Q is determined by Q=AF, and the value of Q ranges from -0.4µm to 3.6µm, especially from -0.4µm to 2.8µm or from -0.2µm to 2.0µm.

19. The ultrathin element (2, 4) of the glass-based material according to any one of claims 16 to 18, wherein, A bridge portion exists along the edge between the filamentous damages (14), the bridge width (g) of which is 0.1µm to 3.6µm, or the bridge width (g) is in the range of 0.1≤g≤2·F, preferably in the range of 0.1≤g≤F, and particularly preferably in the range of 0.1≤g≤F / 2.

20. The ultrathin element (2, 4) of the glass-based material according to any one of claims 16 to 19, wherein, The edge strength (K) of the edge with filamentous damage (14) is 120 MPa, preferably 120 to 400 MPa or 125 to 300 MPa or 125 to 250 MPa, and particularly preferably the edge strength (K) is in the range of 4·d≤K≤10·d.

21. The use of the ultrathin glass-based element (2, 4) according to any one of claims 16 to 20, or the ultrathin glass-based element (2, 4) that can be manufactured by the method according to any one of claims 1 to 15, in the context of intermediate substrates or spacers for insulating electronic components, for encapsulating optoelectronic components, as a carrier for thin-film batteries (such as thin-film batteries or thin-film solar cells), as a cover element for displays (especially flip-up displays and / or foldable displays), or as a substrate or composite substrate for displays and microfluidic batteries.

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