Electronic-grade acetone purification system

Abstract

The invention belongs to the technical field of electronic-grade acetone purification, and particularly relates to an electronic-grade acetone purification system which comprises an acetone tower vacuum buffer base, the acetone tower vacuum buffer base is placed on the ground, a first vacuum buffer mechanism is installed at the top of the acetone tower vacuum buffer base, and the first vacuum buffer mechanism is externally connected with an acetone temporary storage tank. The acetone temporary storage tank conveys pretreated acetone raw materials into the first vacuum buffer mechanism, the first vacuum buffer mechanism conducts vaporization, upward drainage and collection operation on the acetone raw materials, full-coverage online cleaning of impurities on the inner wall of the conical cylinder is achieved, shutdown is not needed, and the inner wall of equipment is not damaged; secondary vaporization recovery of scraped liquid drops and separation strengthening of high-impurity raw materials are synchronously completed, and the defects that existing equipment cannot be cleaned online, the continuous operation period is short, the acetone liquid drop entrainment loss is large, the raw material recovery rate is low, and the inner surface of the equipment is prone to being damaged by a cleaning device are overcome.

Description

Technical Field

[0001] This invention relates to the field of electronic-grade acetone purification technology, specifically to an electronic-grade acetone purification system. Background Technology

[0002] Currently available acetone purification technologies for electronic grade use mostly 99.5% industrial-grade acetone as raw material, employing a combination of distillation and filtration processes with a split-pipeline layout. While these technologies can achieve basic purification effects, they are limited by equipment structure and process design flaws, making them unsuitable for the ultra-high purity requirements of advanced electronic manufacturing processes. Furthermore, they suffer from numerous unresolved issues regarding production efficiency, raw material utilization, and operational stability. Specific shortcomings are as follows: Split-cavity vacuum control accuracy is low, and the gas phase flow field is turbulent: The vaporization, separation, and filtration units of existing purification equipment are independently designed, and each unit is connected by pipelines. There are a large number of sealing nodes and pipeline dead corners, which can easily cause vacuum leakage. It is difficult to achieve accurate and stable control under reduced pressure distillation conditions. Pressure fluctuations can easily cause acetone boiling point deviation and significantly reduce separation efficiency. At the same time, the split layout makes the acetone gas phase transmission path long. The non-directional flow design can easily form gas phase vortices, resulting in insufficient impurity interception. In addition, the large contact area between the gas phase and the inner wall of the pipeline increases the risk of metal leaching and secondary pollution. It is difficult for the product purity to meet the ppt level impurity control requirements.

[0003] The efficiency of ultrafine impurity interception is insufficient and cannot meet the standards of advanced processes: Existing technologies mostly use single-screen filtration or conventional packed distillation for impurity separation. The interception effect of nanoscale ultrafine solid particles and trace amounts of high-boiling impurity droplets entrained in the gas phase is poor. These tiny impurities are easy to enter the finished product with the gas phase, leading to problems such as circuit short circuits and reduced yield in the semiconductor chip manufacturing process. They cannot meet the stringent requirements of 7nm and below semiconductor processes.

[0004] Acetone droplet entrainment loss is high and raw material recovery rate is low: During the distillation process, acetone droplets entrained in the gas phase easily adhere to the surface of the internal components of the equipment. Existing technology does not have a dedicated droplet receiving and recovery structure, and the droplets are easily discharged with the high-boiling residual liquid, resulting in a raw material recovery rate that is generally lower than 75%. In addition, there is no residual liquid reflux design in the terminal filtration stage, and the acetone droplets entrained in the filtration process are directly lost, which further increases the production cost.

[0005] The gas phase is prone to condensation and liquefaction, resulting in poor separation stability: The existing vaporization unit lacks gas phase auxiliary heating and flow field homogenization design. During the transmission process, the acetone gas phase is prone to condensation and liquefaction due to temperature fluctuations. After the droplets recombine with impurities, secondary entrainment is easily caused, leading to a significant decrease in the stability of distillation separation and large differences in purity between product batches.

[0006] Therefore, we propose an electronic-grade acetone purification system. Summary of the Invention

[0007] To solve the above-mentioned technical problems, the present invention provides the following technical solution: An electronic-grade acetone purification system includes: an acetone tower vacuum buffer base, which is placed on the ground. A first vacuum buffer mechanism is installed on the top of the acetone tower vacuum buffer base. The first vacuum buffer mechanism is connected to an acetone temporary storage tank. The acetone temporary storage tank transfers the pretreated acetone raw material to the interior of the first vacuum buffer mechanism. The first vacuum buffer mechanism vaporizes, guides upward flow, and collects the acetone raw material. A second vacuum buffer mechanism is installed on the top of the first vacuum buffer mechanism. The second vacuum buffer mechanism intercepts ultrafine particles and trace high-boiling impurities entrained in the vaporized acetone. A collection mechanism is installed at the center of the interior of the first and second vacuum buffer mechanisms. The collection mechanism scrapes and collects the acetone, ultrafine particles, and trace high-boiling impurities intercepted by the second vacuum buffer mechanism. A filter mechanism is installed on the top of the second vacuum buffer mechanism. The filter mechanism is used to intercept ultrafine solid particles entrained in the gas phase twice.

[0008] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the first vacuum buffer mechanism includes a vaporization component. The vaporization component is installed on top of the acetone tower vacuum buffer base. The vaporization component is connected to an acetone temporary storage tank. A first vacuum buffer component is provided on top of the vaporization component, and a secondary vaporization component is provided on top of the first vacuum buffer component.

[0009] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the vaporization component includes: a base plate; The base plate is installed on top of the acetone tower vacuum buffer base. A heating cylinder is installed at the center of the top of the base plate. The right end of the heating cylinder is connected to an inlet pipe, which is connected to an acetone temporary storage tank. The first vacuum buffer assembly is installed on the outer side of the top of the base plate. The first vacuum buffer assembly includes: a first vacuum tank; The first vacuum tank is set on the top of the base plate. The lower right side of the first vacuum tank is penetrated by the discharge pipe. The lower front side of the first vacuum tank is provided with a sealing port. The first mounting plate is provided in the middle of the interior of the first vacuum tank. The outer surface of the first mounting plate is provided with a first through groove. The inner surface of the first mounting plate is provided with a second through groove. The second exhaust fan is installed at the center of the surface of the first mounting plate. The secondary vaporization component includes: a connecting tank; The connecting tank is installed on top of the first vacuum tank. The lower end of the inner wall of the connecting tank is provided with an installation groove. A vaporization plate is rotatably connected inside the installation groove. The surface of the vaporization plate is rotatably connected to the bottom of the hydraulic cylinder. The top of the hydraulic cylinder is rotatably connected to the inner wall of the connecting tank.

[0010] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the second vacuum buffer mechanism includes a second vacuum buffer component. The second vacuum buffer assembly is installed on the top of the connecting tank in the first vacuum buffer mechanism. The top of the second vacuum buffer assembly is provided with a second flow guide assembly, and the bottom of the second vacuum buffer assembly is detachably installed with a flow guide assembly. The top of the flow guide assembly is detachably installed at the bottom of the second flow guide assembly.

[0011] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the second vacuum buffer assembly includes a second vacuum tank. The second vacuum tank is installed on top of the connecting tank in the first vacuum buffer mechanism, and U-shaped locking blocks are provided around the lower end of the inner wall of the second vacuum tank. The second drainage component includes: a second mounting plate; The second mounting plate is located at the top of the inner wall of the second vacuum tank. The bottom inner side of the second mounting plate is provided with a first disassembly groove, the bottom outer side of the second mounting plate is provided with a second disassembly groove, the inner end of the second mounting plate is provided with a third through groove, the outer end of the second mounting plate is provided with a fourth through groove, and the upper inner end of the second mounting plate is equipped with a second exhaust fan. The flow guiding component includes: a fixing plate; The outer wall of the fixing plate is provided with notches around its perimeter, and the top and bottom of the fixing plate are provided with blocks around its perimeter. The top of the fixing plate is provided with a first cone, the top of which is threaded into the interior of a second disassembly groove. The interior of the first cone is provided with a second cone, the top of which is threaded into the interior of the first disassembly groove.

[0012] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the collection mechanism includes a rotating component; The rotating component is rotatably connected to the center between the first mounting plate in the first vacuum buffer mechanism and the second mounting plate in the second vacuum buffer mechanism. A support component is installed in the middle of the outer wall of the rotating component. A movable component is connected to the outer wall of the rotating component. Fixed components are provided around the top of the movable component. A scraping component is rotatably connected around the outer wall of the movable component.

[0013] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the rotating component includes a hollow rod. The hollow rod is rotatably connected to the center position between the first mounting plate and the second mounting plate. The lower end of the outer wall of the hollow rod is threaded, and the lower end of the outer surface of the hollow rod is provided with guide grooves. The lower end of the outer surface of the hollow rod is equipped with a first steering gear. The left end of the first steering gear meshes with a second steering gear. The center of the second steering gear is connected to the output end of the first motor. The first motor is installed on the top left end of the first mounting plate. The upper end of the first steering gear is provided with a bearing block. The inner wall of the bearing block is connected to the lower end of the outer surface of the hollow rod. The right end of the outer wall of the bearing block is connected to a first suction pipe. The first suction pipe is connected to the output end of the pump body. The input end of the pump body is connected to a second suction pipe. The bottom of the second suction pipe contacts the bottom end of the heating cylinder in the first vacuum buffer mechanism. The pump body is installed on the surface right end of the first mounting plate. The top of the upper end of the outer wall of the hollow rod is provided with a spray plate. The spray plate is connected to the hollow rod. The bottom of the spray plate is provided with spray heads around its perimeter. The support component includes: a support disk; The bottom of the support plate is equipped with a clamping plate, and the support plate and the clamping plate are installed in the middle of the outer wall of the hollow rod. The top of the support plate is equipped with a support groove, and the outer wall of the clamping plate is threaded with a clamping nut. The active component includes: an active disk; The movable disc has a fifth through groove on both the inner and outer sides of its surface. The movable disc has a rotating groove on its surface. The movable disc has an internal threaded post at its center. The internal threaded post is threadedly connected to the hollow rod. The outer wall of the internal threaded post has through holes around its perimeter. The outer wall of the internal threaded post has a bearing seat around its perimeter. The bearing seat is rotatably connected to the bottom of the scraping component.

[0014] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the fixing component includes: a rotating toothed disk; The bottom of the rotating gear disk is equipped with a rotating disk, which is rotatably connected to the inside of the rotating groove. The two ends of the outer wall of the rotating gear disk are meshed with drive gears. The top of the drive gears is connected to the output end of the second motor. The second motor is installed at the top two ends of the first mounting plate. The top of the rotating gear disk is equipped with a limiting ring. The inside of the limiting ring is equipped with an inclined track. The inner side of the rotating gear disk is equipped with a fixed shaft seat. The inside of the fixed shaft seat is connected to a Z-shaped block through a torsion spring. The Z-shaped block is rotatably connected to the inside of the fixed shaft seat. The bottom outer end of the Z-shaped block is rotatably connected to a slider. The slider is slidably connected to the inside of the inclined track. The scraping assembly includes: a first connecting rod; The bottom of the first connecting rod is rotatably connected to the inside of the bearing seat via a torsion spring. The top of the first connecting rod is rotatably connected to the bottom of the second connecting rod. A third motor is installed on one side of the top of the outer wall of the second connecting rod. The output end of the third motor is connected to a rotating gear. The rotating gear is rotatably connected to the upper inside of the second connecting rod. The upper inside of the second connecting rod is rotatably connected to the bottom of the third connecting rod. The bottom of the third connecting rod has a half-gear block, which meshes with the rotating gear. The top of the third connecting rod is rotatably connected to the bottom of the fourth connecting rod. The top of the fourth connecting rod is rotatably connected to the top of the pressure rod. The pressure rods are configured in two sets. The bottom of one set of pressure rods is rotatably connected to the lower end of the outer wall of the first support rod, and the bottom of the other set of pressure rods is rotatably connected to the lower end of the outer wall of the second support rod. The bottom of the first support rod is rotatably connected to the bottom of the second support rod. The top of the first support rod is rotatably connected to the middle of the outer wall of the first arc-shaped scraper. The inner wall of the first arc-shaped scraper is in contact with the outer wall of the second cone in the second vacuum buffer mechanism. The top of the second support rod is rotatably connected to the middle of the inner wall of the second arc-shaped scraper. The outer wall of the second arc-shaped scraper is in contact with the inner wall of the first cone in the second vacuum buffer mechanism.

[0015] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the filtration mechanism includes a third vacuum buffer assembly. The third vacuum buffer assembly is installed on top of the second vacuum tank in the second vacuum buffer mechanism. The upper part of the interior of the third vacuum buffer assembly is provided with a residual material storage assembly, and the center of the interior of the residual material storage assembly is provided with a filter assembly.

[0016] As a preferred embodiment of the electronic-grade acetone purification system of the present invention, the third vacuum buffer assembly includes a third vacuum tank. The third vacuum tank is installed on top of the second vacuum tank, and the top of the third vacuum tank is equipped with a discharge pipe; The waste storage component includes: a waste storage tank; The residual material storage tank is located inside the upper part of the third vacuum tank. The inner wall of the residual material storage tank is equipped with scrapers at both ends and suction grooves at both ends. The suction grooves are connected to the residual material discharge pipe. The residual material discharge pipe is connected to the return tank through the pump. The residual material discharge pipe passes through the outer wall of the third vacuum tank and is connected to the outer wall of the residual material storage tank. The filter assembly includes: a support frame; The support frame is detachably installed on the bottom of the inner wall of the residual material storage tank. The top center of the support frame is rotatably connected to the support rod. The lower end of the outer wall of the support rod is fixedly installed with the third steering gear. The left end of the third steering gear is meshed with the fourth steering gear. The center of the fourth steering gear is connected to the output end of the fourth motor. The fourth motor is installed on the lower left side of the inner wall of the residual material storage tank. A filter mesh is installed on the upper end of the outer wall of the support rod. The top and bottom of the filter mesh are clamped by scrapers.

[0017] Compared with existing technologies: This invention integrates a first vacuum buffer component, a second vacuum buffer component, and a third vacuum buffer component in a vertical series to form an integrated vacuum chamber. Combined with a directional exhaust fan and a PID pressure stabilization system, it achieves precise pressure control under both reduced and normal pressure operating conditions. The invention also incorporates a tiered design with a through-slot to create a stable gas phase flow field from bottom to top, enabling precise pressure control and uniform gas phase separation for acetone purification. This invention balances adaptability to different raw material operating conditions with energy efficiency, and solves the shortcomings of existing split-type equipment, such as large vacuum fluctuations, disordered gas phase flow field, low separation efficiency, high risk of secondary pollution, and single operating conditions that cannot be flexibly adjusted. This invention constructs an annular variable-diameter swirling flow channel using coaxially nested, oppositely oriented cones. Combined with a design that matches the notched slot of the fixed plate with the gas phase flow field, it creates a high-speed centrifugal swirling flow field when the gas phase passes through. At the same time, the cone assembly uses U-shaped clips and threads for detachable installation, achieving efficient, non-powered interception of nano-sized ultrafine particles and trace amounts of high-boiling impurities. It also forces the homogenization of the gas phase flow field and eliminates eddy current losses, while facilitating equipment maintenance and cleaning. This invention solves the shortcomings of existing technologies, such as low interception efficiency for ultrafine impurities, large acetone losses due to gas phase eddies, and difficulties in fixing and cleaning internal components.

[0018] This invention achieves circumferential locking through Z-shaped blocks and guide grooves, and spiral lifting through the cooperation of hollow rod threads and internal threaded columns with first and second arc-shaped scrapers. Combined with the flexible pressurization structure of half-gear blocks and diamond-shaped connecting rods, the arc-shaped scrapers are tightly fitted to the inner wall of the cone. At the same time, the hollow rod integrates a spray function to achieve gas-liquid countercurrent distillation, realizing full-coverage online cleaning of impurities on the inner wall of the cone without stopping the machine or damaging the inner wall of the equipment. It simultaneously completes the secondary vaporization and recovery of scraped droplets and the separation and enhancement of high-impurity raw materials, solving the defects of existing equipment that cannot be cleaned online, have short continuous operation cycles, large losses due to acetone droplet entrainment, low raw material recovery rate, and easy damage to the inner surface of the equipment by the cleaning device. This invention achieves online cleaning through a rotatable double-layer sintered filter mesh combined with a fixed scraper. Combined with a residual material storage tank and suction tank, it completes the collection of residual liquid impurities and returns them to the distillation system. At the same time, the filter mesh provides anti-backflow protection, achieving complete interception of ultrafine particles at the gas phase terminal, preventing filter element clogging and eliminating acetone consumption. It balances equipment operation safety and gas phase flow field stability, solving the defects of existing technologies such as terminal filtration being unable to intercept ultrafine particles, filter components being prone to clogging and requiring shutdown for replacement, high acetone consumption, and easy backflow of external foreign matter. This invention uses a hydraulic cylinder to drive four sets of electrically heated vaporization plates to switch between folding and retracting states. When retracted, the plates are spliced ​​into a circular groove to collect droplet impurities. When folded, the plates are tilted to assist in gas phase heating, achieving efficient secondary vaporization and recovery of scraped acetone droplets. This improves the efficiency and stability of gas phase generation, while also enabling centralized collection and standardized disposal of impurities. This invention solves the shortcomings of existing equipment, such as the lack of a dedicated droplet receiving structure, easy condensation and liquefaction of the gas phase, and difficulty in cleaning dispersed impurities. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the overall cross-sectional structure provided by the present invention; Figure 3 A schematic diagram of the disassembled structure of the first vacuum buffer mechanism provided by the present invention; Figure 4 This is a schematic diagram of the connecting tank structure provided by the present invention; Figure 5 This is a schematic diagram of the vaporization plate structure provided by the present invention; Figure 6 This is a schematic diagram of the disassembled structure of the second vacuum buffer mechanism provided by the present invention; Figure 7 A schematic diagram of the structure of the second vacuum buffer assembly provided by the present invention; Figure 8 This is a schematic diagram of the disassembled structure of the second drainage component and the drainage guide component provided by the present invention; Figure 9 This is a schematic diagram of the structure of the second drainage component provided by the present invention; Figure 10 This is a schematic diagram of the flow guiding component structure provided by the present invention; Figure 11 Schematic diagram of the connection structure of the collection mechanism provided by the present invention Figure 1 ; Figure 12 Schematic diagram of the connection structure of the collection mechanism provided by the present invention Figure 2 ; Figure 13 A schematic diagram of the collection mechanism provided by the present invention; Figure 14 This is a schematic diagram of the rotating component structure provided by the present invention; Figure 15 Schematic diagram of the support component structure provided by the present invention Figure 1 ; Figure 16 Schematic diagram of the support component structure provided by the present invention Figure 2 ; Figure 17 This is a schematic diagram of the connection structure between the active component and the scraping component provided by the present invention; Figure 18 This is a schematic diagram of the connection structure between the active component and the fixed component provided by the present invention; Figure 19 This is a schematic diagram of the active component structure provided by the present invention; Figure 20 This is a schematic diagram of the fixed component structure provided by the present invention; Figure 21 This is a schematic diagram of the Z-shaped block connection structure provided by the present invention; Figure 22 Schematic diagram of the scraping component structure provided by the present invention Figure 1 ; Figure 23 Schematic diagram of the scraping component structure provided by the present invention Figure 2 ; Figure 24 Schematic diagram of the scraping component structure provided by the present invention Figure 3 ; Figure 25 Schematic diagram of the scraping component structure provided by the present invention Figure 4 ; Figure 26 This is a schematic diagram of the disassembled structure of the filtration mechanism provided by the present invention; Figure 27 A schematic diagram of the residual material temporary storage component provided by the present invention; Figure 28 This is a schematic diagram of the filter component structure provided by the present invention. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the present invention clearer, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0021] This invention provides an electronic-grade acetone purification system. Please refer to [link / reference]. Figures 1-28 It includes an acetone tower vacuum buffer base 1, a first vacuum buffer mechanism 2, a second vacuum buffer mechanism 3, a collection mechanism 4, and a filtration mechanism 5; The first vacuum buffer mechanism 2 is installed on top of the acetone tower vacuum buffer base 1. The first vacuum buffer mechanism 2 is externally connected to an acetone temporary storage tank, which transfers the pre-treated acetone raw material to the interior of the first vacuum buffer mechanism 2. The first vacuum buffer mechanism 2 performs vaporization, upward flow, and collection operations on the acetone raw material. The first vacuum buffer mechanism 2 includes: a vaporization component 21, a base plate 211, a heating cylinder 212, an inlet pipe 213, a first vacuum buffer component 22, a first vacuum tank 221, a sealing port 222, a first mounting plate 223, a first through groove 224, a second through groove 225, a first exhaust fan 226, a secondary vaporization component 23, a connecting tank 231, a mounting groove 232, a vaporization plate 233, and a hydraulic cylinder 234. The vaporization component 21 is installed on the acetone tower vacuum buffer base 1. At the top of the ketone tower vacuum buffer base 1, a vaporization component 21 is externally connected to an acetone storage tank. The acetone storage tank uses a pump to transfer pretreated acetone raw material to the interior of the vaporization component 21 for vaporization. A base plate 211 is installed on top of the acetone tower vacuum buffer base 1. A heating cylinder 212 is installed at the center of the top of the base plate 211, which heats and vaporizes the acetone raw material. An inlet pipe 213 is connected to the right end of the heating cylinder 212, which is externally connected to the acetone storage tank. The acetone storage tank uses a pump and the inlet pipe 213 to transfer the acetone raw material to the interior of the heating cylinder 212. A first vacuum buffer component 22 is installed on the outer side of the top of the base plate 211, and the top of the vaporization component 21 is equipped with the first vacuum buffer component 22. 2. The first vacuum buffer assembly 22, in conjunction with the second vacuum tank 311 and the third vacuum tank 511, performs a vacuuming operation inside the tank, thereby lowering the boiling point of acetone. Driven by the first vacuum buffer assembly 22, the vaporized acetone can be guided upwards. The first vacuum tank 221 is located on top of the base plate 211. The first vacuum tank 221 uses a vacuum pump to extract internal air pressure. The lower right side of the first vacuum tank 221 is penetrated by the discharge pipe 213. A sealing port 222 is provided on the lower front side of the first vacuum tank 221. By opening the sealing port 222, the internal heating cylinder 212 can be cleaned. At the same time, the sealing port 222 can seal the first vacuum tank 221. A first mounting plate 22 is provided in the middle of the interior of the first vacuum tank 221. 3. A first through groove 224 is provided on the outer surface of the first mounting plate 223, and a second through groove 225 is provided on the inner surface of the first mounting plate 223. The vaporized acetone can flow upward through the first through groove 224 and the second through groove 225. A second row of fans 326 is installed at the center of the surface of the first mounting plate 223. The second row of fans 326 can blow and guide the vaporized acetone upward. Since the vacuum tank is not a perfect vacuum, the gas phase after acetone vaporization is a continuous phase. The fans can give the gas phase directional kinetic energy through mechanical movement to complete the flow. A secondary vaporization component 23 is provided on the top of the first vacuum buffer component 22. Driven by the secondary vaporization component 23, the acetone liquid scraped by the collection mechanism 4 can be collected and subjected to secondary heating and vaporization.The connecting tank 231 is installed on top of the first vacuum tank 221. The lower inner wall of the connecting tank 231 has mounting grooves 232 around its perimeter. Vaporizing plates 233 are rotatably connected inside the mounting grooves 232. Four sets of vaporizing plates 233 are arranged in a circular pattern, capable of collecting liquid and impurities scraped by the collecting mechanism 4 and liquid falling from the filtering mechanism 5. Simultaneously, through continuous heating by the four sets of vaporizing plates 233, the collected liquid can undergo secondary vaporization. The surface of the vaporizing plate 233 is rotatably connected to the bottom of the hydraulic cylinder 234, and the top of the hydraulic cylinder 234 is rotatably connected to the inner wall of the connecting tank 231. Four sets of hydraulic cylinders 234 are configured, each capable of driving the folding and retraction of the vaporizing plate 233. In the folded state, the vaporized acetone can flow smoothly; in the retracted state, it can collect any falling impurities and liquid, and perform secondary heating and vaporization within the four sets of vaporizing plates 233. The second vacuum buffer mechanism 3 is installed on top of the first vacuum buffer mechanism 2. The second vacuum buffer mechanism 3 intercepts ultrafine particles and trace amounts of high-boiling impurities entrained in the vaporized acetone, improving the cleanliness of the gas phase. The second vacuum buffer mechanism 3 includes: a second vacuum buffer assembly 31, a second vacuum tank 311, a U-shaped clamping block 312, a second flow guiding assembly 32, a second mounting plate 321, a first disassembly groove 322, a second disassembly groove 323, a third through groove 324, a fourth through groove 325, a second exhaust fan 326, a flow guiding assembly 33, a fixing plate 331, a notch 332, a stop block 333, a first cone 334, and a second cone 335. The second vacuum buffer assembly 31 is installed on top of the connecting tank 231 in the first vacuum buffer mechanism 2. The second vacuum buffer assembly 31 extracts internal air pressure using a vacuum pump. The second vacuum tank 311 is installed on top of the connecting tank 231 in the first vacuum buffer mechanism 2. U-shaped locking blocks 312 are provided around the lower end of the inner wall of the second vacuum tank 311, allowing for the detachable installation of the flow guiding assembly 33. A second flow guiding assembly 32 is provided at the top of the interior of the second vacuum buffer assembly 31. Through the cooperation of the second flow guiding assembly 32 and the first exhaust fan 226, the vaporized acetone inside the first vacuum tank 221 and the second vacuum tank 311 can be drawn upwards. A second mounting plate 321 is located at the top of the inner wall of the second vacuum tank 311. A first disassembly groove 322 is provided on the inner bottom side of the second mounting plate 321, allowing for the disassembly of... The top of the second cone 335 is threadedly connected. A second disassembly groove 323 is provided on the outer bottom of the second mounting plate 321, allowing for a threaded connection to the top of the first cone 334. A third through groove 324 is provided on the inner end of the second mounting plate 321, allowing the acetone flowing inside the second cone 335 to be discharged upwards. A fourth through groove 325 is provided on the outer end of the second mounting plate 321, allowing the acetone flowing inside the first cone 334 to be discharged upwards. A second exhaust fan 326 is installed at the upper inner end of the second mounting plate 321. Through the cooperation of the second exhaust fan 326 and the first exhaust fan 226, the vaporized acetone can be guided upwards, allowing the vaporized acetone to smoothly pass through the first cone 334. Inside the first cone 334 and the second cone 335, a flow guiding component 33 is detachably installed at the lower end of the second vacuum buffer assembly 31. The top of the flow guiding component 33 is detachably installed at the bottom of the second flow guiding assembly 32. The flow guiding component 33 can intercept ultrafine particles and trace amounts of high-boiling impurities entrained in the vaporized acetone, allowing the clean acetone to continue flowing upward, thereby improving the purity of acetone purification. The outer wall of the fixing plate 331 is provided with notches 332 around its perimeter. The notches 332 allow the fixing plate 331 to be engaged between four sets of U-shaped locking blocks 312. The top and bottom perimeters of the fixing plate 331 are provided with baffles 333. The fixing plate 331 is engaged between the four sets of U-shaped locking blocks 312 through the notches 332. Then, by rotating the fixing plate 331...The fixing plate 331 is inserted into the U-shaped locking block 312, and one side of the U-shaped locking block 312 contacts the stop block 333, thereby installing and fixing the fixing plate 331. The top of the fixing plate 331 is provided with a first cone 334, and the top of the first cone 334 is threaded to the inside of the second disassembly groove 323. The first cone 334 is designed with a smaller upper port diameter and a larger lower port diameter. The inside of the first cone 334 is provided with a second cone 335, and the top of the second cone 335 is threaded to the first disassembly groove 323. Inside the tank 322, the bottom of the first cone 334 is supported and fixed by the support assembly 42. The first cone 334 is designed with a larger upper diameter and a smaller lower diameter. The arrangement of the first cone 334 and the second cone 335 enables gas-phase swirling separation, non-powered interception of ultrafine particles and trace amounts of high-boiling impurities entrained in the gas phase, improving gas phase cleanliness, achieving forced homogenization of the gas phase flow field, completely eliminating eddies, achieving efficient capture of trace acetone droplets, reducing volatilization losses, and improving raw material recovery rate. The collection mechanism 4 is installed at the center of the first vacuum buffer mechanism 2 and the second vacuum buffer mechanism 3. The collection mechanism 4 scrapes and collects acetone, ultrafine particles, and trace high-boiling impurities intercepted by the second vacuum buffer mechanism 3, causing the acetone, ultrafine particles, and trace high-boiling impurities to fall into the center of the first vacuum buffer mechanism 2. The collection mechanism 4 includes: a rotating assembly 41, a hollow rod 411, a thread 412, a guide groove 413, a first steering gear 414, a second steering gear 415, a first motor 416, a bearing block 417, a first suction pipe 418, a pump body 419, a second suction pipe 4110, a spray plate 4111, a spray head 4112, a support assembly 42, a support plate 421, a clamping plate 422, a support groove 423, and a clamping nut. 424. Movable component 43. Movable disk 431. Fifth through slot 432. Rotating slot 433. Internal threaded column 434. Through hole 435. Shaft seat 436. Fixed component 44. Rotating gear disk 441. Rotating disk 442. Drive gear 443. Second motor 444. Limiting ring 445. Inclined track 446. Fixed shaft seat 447. Z-block 448. Slider 449. Scraping component 45. First connecting rod 451. Second connecting rod 452. Third motor 453. Rotating gear 454. Third connecting rod 455. Half gear block 456. Fourth connecting rod 457. Pressure rod 458. First support rod 459. Second support rod 4510. First arc-shaped scraper 4511. Second arc-shaped scraper 4512; Rotating component 41 is rotatably connected. At the center between the first mounting plate 223 in the first vacuum buffer mechanism 2 and the second mounting plate 321 in the second vacuum buffer mechanism 3, a hollow rod 411 is rotatably connected between the center position of the first mounting plate 223 and the second mounting plate 321. The lower end of the outer wall of the hollow rod 411 is provided with a thread 412, which drives the lifting and lowering of the movable component 43. Guide grooves 413 are provided around the lower outer surface of the hollow rod 411, facilitating the fixing operation of the fixed component 44. A first steering gear 414 is installed at the lower outer surface of the hollow rod 411. The left end of the first steering gear 414 meshes with a second steering gear 415. The center of the second steering gear 415 is connected to the output end of the first motor 416. Motor 416 is mounted on the top left end of the first mounting plate 223. Driven by the first motor 416, it can drive the second steering gear 415 and the first steering gear 414 to rotate, thereby causing the first steering gear 414 to drive the hollow rod 411 to rotate. The upper end of the first steering gear 414 is provided with a bearing block 417. The inner wall of the bearing block 417 is connected to the lower end of the outer surface of the hollow rod 411. The hole at the lower end of the outer surface of the hollow rod 411 is wrapped by the inner wall of the bearing block 417. The bearing block 417 can remain stationary while the hollow rod 411 is rotating, which facilitates the extraction operation of the first extraction tube 418 and the second extraction tube 4110. The right end of the outer wall of the bearing block 417 is connected to the first extraction tube 418, which is connected to the output end of the pump body 419.The input end of the pump body 419 is connected to the second suction pipe 4110. The bottom of the second suction pipe 4110 contacts the bottom of the heating cylinder 212 in the first vacuum buffer mechanism 2. The pump body 419 is installed on the right end of the surface of the first mounting plate 223. Driven by the pump body 419, the acetone inside the heating cylinder 212 can be moved to the inside of the second suction pipe 4110 and the first suction pipe 418. Then, the acetone is transferred to the inside of the hollow rod 411 through the bearing block 417. A spray plate 4111 is provided at the top of the upper end of the outer wall of the hollow rod 411. The spray plate 4111 is connected to the hollow rod 411. Spray heads 4112 are provided around the bottom of the spray plate 4111. The acetone can be transferred to the spray heads 4112 through the cooperation between the hollow rod 411 and the spray plate 4111. A acetone is sprayed onto the surface, bringing it into contact with the vaporized acetone. Utilizing the difference in boiling points, heat and mass exchange between the gas and liquid phases allows the acetone to separate from impurities. A support assembly 42 is installed in the middle of the outer wall of the rotating component 41, supporting and fixing the bottom of the second cone 335. A clamping piece 422 is located at the bottom of the support plate 421, and the support plate 421 and clamping piece 422 are installed in the middle of the outer wall of the hollow rod 411. A support groove 423 is located at the top of the support plate 421, supporting and fixing the bottom of the second cone 335. A clamping nut 424 is threaded onto the outer wall of the clamping piece 422, locking and fixing it in place. The support plate 421 and clamping plate 422 are fixed to the middle of the outer wall of the hollow rod 411. The outer wall of the rotating component 41 is connected to the movable component 43. The inner and outer sides of the movable plate 431 are provided with fifth through grooves 432, through which vaporized acetone can flow smoothly. The surface of the movable plate 431 is provided with a rotating groove 433, which can limit and guide the rotation of the fixed component 44. The center of the surface of the movable plate 431 is provided with an internal thread post 434, which is threaded to the thread 412 of the hollow rod 411. The outer wall of the internal thread post 434 is provided with through holes 435, through which the fixed component 44 can pass. The outer wall of the internal thread post 434 is provided with a bearing seat 436. The bearing 436 is rotatably connected to the bottom of the scraping assembly 45. The top of the movable assembly 43 is surrounded by fixed components 44. Driven by the fixed components 44, the movable assembly 43 is fixedly connected to the rotating assembly 41, causing the rotating assembly 41 to drive the movable assembly 43 to rotate. This, in turn, causes the movable assembly 43 to drive the scraping assembly 45 to perform a rotating scraping operation. The bottom of the rotating gear disk 441 is provided with a rotating disk 442, which is rotatably connected inside the rotating groove 433. The interaction between the rotating disk 442 and the rotating groove 433 limits and guides the rotation of the rotating gear disk 441. The outer walls of the rotating gear disk 441 are meshed with drive gears 443, and the top of the drive gears 443 is connected to the output end of the second motor 444.The second motor 444 is installed at both ends of the top of the first mounting plate 223. Driven by the second motor 444, the drive gear 443 rotates, which in turn drives the rotating gear disk 441 to rotate. The top of the rotating gear disk 441 is provided with a limiting ring 445. The inner periphery of the limiting ring 445 is provided with an inclined track 446. One end of the inclined track 446 is lower than the other end, and it is inclined. The inclined track 446 can control the movement of the Z-shaped block 448. The inner periphery of the rotating gear disk 441 is equipped with a fixed bearing seat 447. The inside of the fixed bearing seat 447 is connected to the Z-shaped block 448 through a torsion spring. The Z-shaped block 448 is rotatably connected to the inside of the fixed bearing seat 447. A slider 449 is rotatably connected to the bottom side of the inclined track 446. The slider 449 is slidably connected inside the inclined track 446. A second motor 444 drives the rotating gear 441 and the limiting ring 445 to rotate, thus moving the inclined track 446. This causes the inclined track 446 to move the slider 449 from the bottom to the highest point, causing the slider 449 to lift the Z-shaped block 448. The inner end of the Z-shaped block 448 passes through the through hole 435 and inserts into the guide groove 413. Through the cooperation between the Z-shaped block 448 and the guide groove 413, the internally threaded column 434 rotates with the rotation of the hollow rod 411. A scraping component 45 is rotatably connected to the outer wall of the movable component 43. Through the cooperation between the scraping component 45 and the movable component 43, the rotating component 41... The rotation of the first connecting rod 451 drives the movable component 43 to perform lifting and lowering operations, thereby causing the movable component 43 to pull the scraping component 45 to lift and lower for scraping. The bottom of the first connecting rod 451 is rotatably connected to the inside of the bearing seat 436 via a torsion spring. The top of the first connecting rod 451 is rotatably connected to the bottom of the second connecting rod 452. A third motor 453 is installed on one side of the top of the outer wall of the second connecting rod 452. The output end of the third motor 453 is connected to the rotating gear 454. The rotating gear 454 is rotatably connected to the upper inside of the second connecting rod 452. The rotation of the third motor 453 can drive the rotating gear 454 to rotate. The upper inside of the second connecting rod 452 is rotatably connected to the bottom of the third connecting rod 455. The bottom of the third connecting rod 455 is provided with a half gear block 456. Wheel block 456 meshes with rotating gear 454. The rotation of rotating gear 454 drives half gear block 456 to rotate, thereby causing the third connecting rod 455 to bend. Through the meshing of half gear block 456 and rotating gear 454, the connection between the third connecting rod 455 and the second connecting rod 452 can be fixed and limited. The top of the third connecting rod 455 is rotatably connected to the bottom of the fourth connecting rod 457. The top of the fourth connecting rod 457 is rotatably connected to the top of the pressure rod 458. The pressure rod 458 is configured in two sets, and the two sets of pressure rods 458 are placed in an inverted V shape. The bottom of one set of pressure rods 458 is rotatably connected to the lower end of the outer wall of the first support rod 459, and the bottom of the other set of pressure rods 458 is rotatably connected to the lower end of the outer wall of the second support rod 4510.The bottom of the first support rod 459 is rotatably connected to the bottom of the second support rod 4510. The first support rod 459 and the second support rod 4510 are positioned in a V-shape. The top of the first support rod 459 is rotatably connected to the middle of the outer wall of the first arc-shaped scraper 4511. The inner wall of the first arc-shaped scraper 4511 contacts the outer wall of the second cone 335 in the second vacuum buffer mechanism 3. The top of the second support rod 4510 is rotatably connected to the middle of the inner wall of the second arc-shaped scraper 4512. The outer wall of the second arc-shaped scraper 4512 contacts the inner wall of the first cone 334 in the second vacuum buffer mechanism 3. Through the pressure rod 458, the first support rod 459, the second support rod 4510, and the first arc-shaped scraper... The first arc-shaped scraper 4511 and the second arc-shaped scraper 4512 are arranged in a diamond shape. When the third connecting rod 455 moves downward or bends, it can pull the fourth connecting rod 457, thereby pressurizing the pressure rod 458. This causes the pressure rod 458 to spread the first arc-shaped scraper 4511 and the second arc-shaped scraper 4512 apart, and to apply pressure to the inner wall of the first cone 334 and the outer wall of the second cone 335. This facilitates the lifting and lowering of the movable disc 431 and the internally threaded column 434. Simultaneously, the first arc-shaped scraper 4511 and the second arc-shaped scraper 4512 perform a rotating scraping operation. The filter mechanism 5 is installed on top of the second vacuum buffer mechanism 3. The filter mechanism 5 is used to intercept ultrafine solid particles entrained in the gas phase twice, preventing secondary pollution. The filter mechanism 5 can stabilize the gas phase flow field in the tank, reduce local fluctuations in vacuum, and prevent the backflow of foreign objects, thus protecting the vacuum environment inside the tank. At the same time, the filter mechanism 5 can also help block the entrainment of trace amounts of liquid droplets in the gas phase, reducing acetone loss. The filter mechanism 5 includes: a third vacuum buffer assembly 51, a third vacuum tank 511, a discharge pipe 512, a residual material storage assembly 52, a residual material storage tank 521, a scraper 522, a suction groove 523, a residual material discharge pipe 524, a filter assembly 53, a support frame 531, a support rod 532, a third steering gear 533, a fourth steering gear 534, a fourth motor 535, and a filter mesh 536.The third vacuum buffer assembly 51 is installed on top of the second vacuum tank 311 in the second vacuum buffer mechanism 3. The third vacuum tank 511 is installed on top of the second vacuum tank 311. The top of the third vacuum tank 511 is provided with a discharge pipe 512, through which the vaporized acetone after multiple filtrations can be discharged. The upper part of the interior of the third vacuum buffer assembly 51 is provided with a residual material storage assembly 52, which can collect and clean the filtered liquid of the filtration assembly 53. The residual material storage tank 521 is located at the upper part of the interior of the third vacuum tank 511. The inner walls of the residual material storage tank 521 are provided with... Scraper 522 scrapes the top and bottom of filter mesh 536, causing liquid to drip down or drain into suction tank 523. Suction tanks 523 are located at both ends of the inner wall of residual material storage tank 521, and are connected to residual material discharge pipe 524. Residual liquid and impurities are drawn from the suction tanks 523 and discharged into the residual material discharge pipe 524. The residual material discharge pipe 524 passes through the third vacuum tank 511 and connects to the outer wall of residual material storage tank 521. A filter assembly 53 is located at the center of the residual material storage assembly 52. Component 53 can perform secondary filtration on the vaporized acetone drawn upwards by the second vacuum buffer mechanism 3. Support frame 531 is detachably installed on the bottom inner wall of the residual material storage tank 521. A support rod 532 is rotatably connected to the top center of support frame 531. A third steering gear 533 is fixedly installed on the lower outer wall of support rod 532. The left end of the third steering gear 533 meshes with a fourth steering gear 534. The center of the fourth steering gear 534 is connected to the output end of a fourth motor 535. The fourth motor 535 is installed on the lower left side of the inner wall of the residual material storage tank 521. Driven by the fourth motor 535, the fourth steering gear 534 can be driven... Gear 534 and the third steering gear 533 rotate, thereby causing the third steering gear 533 to drive the support rod 532 to rotate. A filter mesh 536 is installed on the upper end of the outer wall of the support rod 532. The top and bottom of the filter mesh 536 are clamped by scraper 522. The filter mesh 536 can intercept ultrafine solid particles entrained in the gas phase twice, preventing secondary pollution. The filter mesh 536 can stabilize the gas phase flow field inside the tank, reduce local fluctuations in vacuum, and prevent the backflow of foreign objects, protecting the vacuum environment inside the tank. At the same time, the filter mesh 536 can also help block the entrainment of trace amounts of liquid droplets in the gas phase, reducing acetone loss.

[0022] In practical use, those skilled in the art will close all system outlets, turn on the external acetone tower vacuum pump, and evacuate the first vacuum tank 221, second vacuum tank 311, and third vacuum tank 511 through the discharge pipe 512 at the top of the third vacuum tank 511 until the pressure inside the first vacuum tank 221, second vacuum tank 311, and third vacuum tank 511 reaches the threshold. Maintain the pressure for 2 hours; a pressure rise ≤0.5 kPa indicates acceptable air tightness, preventing air from entering and causing acetone oxidation, and preventing acetone vapor leakage. Introduce high-purity nitrogen into the system to atmospheric pressure, repeating this replacement process three times to reduce the oxygen content in the system to below 100 ppm, completely avoiding thermal oxidation degradation during acetone high-temperature vaporization and the generation of new impurities such as aldehydes. Finally, open the acetone storage tank and discharge pipe. The feed pump between 213 delivers the pretreated 99.5% industrial-grade acetone raw material to the heating cylinder 212 inside the first vacuum tank 221. The feed rate is 60% of the heating cylinder volume. After feeding is completed, the feed valve is closed, and the heating system of the heating cylinder 212 is turned on. The heating temperature is set to 45℃ (the boiling point of acetone is 38℃ under -44kPa negative pressure; a superheating temperature of 7℃ is set to ensure stable vaporization of acetone), with a temperature control accuracy of ±0.5℃, to perform gradient preheating of the raw material. Simultaneously, the heating system of the four sets of vaporization plates 233 is turned on, and the heating temperature is set to 50℃. The hydraulic cylinder 234 drives the vaporization plates 233 to a 30° tilted and retracted state, which neither obstructs the upward flow of the gas phase nor fails to catch the subsequent scraped-off droplets containing impurities. The first exhaust fan 226 and The second fan 326 forms a bottom-up directional gas flow field, providing stable upward guiding force for the vaporized acetone gas phase. This ensures that the gas phase passes uniformly through the swirling flow channels of the first cone 334 and the second cone 335. When the raw material temperature in the heating cylinder 212 reaches 40°C and acetone gas phase is continuously generated, the PID pressure stabilization mode of the acetone tower vacuum pump is activated. This precisely controls the pressure in the first vacuum tank 221, the second vacuum tank 311, and the third vacuum tank 511, preventing pressure fluctuations from causing a shift in the acetone boiling point and ensuring the stability of the distillation separation. The heating temperature and vacuum level are maintained stable for 30 minutes, allowing the vaporization and condensation of acetone in the system to reach dynamic gas-liquid equilibrium. The gas phase flow rate is stabilized at the rated design value, establishing stable operating conditions for subsequent impurity interception and purification. The vaporized acetone gas phase flows upward through the slot of the first mounting plate 223, enters the second vacuum tank 311 through the connecting tank 231, and passes through the annular swirling flow channels of the first cone 334 and the second cone 335. The variable diameter flow channels gradually increase the gas phase velocity, forming a stable centrifugal swirling field. Centrifugal force is used to throw the ultrafine solid particles and trace amounts of high-boiling impurity droplets entrained in the gas phase onto the inner wall of the first cone 334 and the outer wall of the second cone 335, achieving non-powered swirling separation and improving impurity interception efficiency. The acetone gas phase purified by swirling separation flows upward through the third slot 324 and the fourth slot 325 of the second mounting plate 321 and enters the third vacuum tank 511, completing the core gas-solid and gas-liquid separation, solving the problem of product purity not meeting standards due to impurities entrained in the gas phase.When the impurity content in the raw material is ≥2000ppm, the spray distillation enhancement program is simultaneously activated to further improve the separation effect. Pump body 419 is activated, and acetone raw material in heating cylinder 212 is drawn through second suction pipe 4110. It enters the inner cavity of hollow rod 411 through first suction pipe 418 and bearing block 417, and finally atomizes and sprays downward through spray head 4112 at the bottom of spray plate 4111. The atomized low-temperature acetone droplets come into countercurrent contact with the upward-flowing high-temperature acetone gas phase. Through heat and mass exchange between the gas and liquid phases, the high-boiling-point impurities in the gas phase are condensed and liquefied, and fall onto the vaporization plate 233 below with the droplets, realizing secondary distillation purification. By activating the second motor 444, the drive gear 443 drives the rotating gear disk 441 to rotate, and the inclined rail... The guide 446 moves the slider 449 from a low position to a high position, lifting the Z-shaped block 448 so that its inner end passes through the through hole 435 of the internally threaded column 434 and is engaged in the guide groove 413 of the hollow rod 411, achieving circumferential locking between the movable disk 431 and the hollow rod 411. The third motor 453 is activated, driving the rotating gear 454 to rotate the half gear block 456, causing the third connecting rod 455 to bend downward, pulling the fourth connecting rod 457 and the pressure rod 458 downward to apply pressure, driving the first support rod 459 and the second support rod 4510 to spread outward, so that the first arc-shaped scraper 4511 is in close contact with the outer wall of the second cone 335 and the second arc-shaped scraper 4512 is in close contact with the inner wall of the first cone 334, with the contact pressure controlled at 0.2MPa, ensuring thorough scraping without damaging the inner wall of the cylinder. For the polishing layer, the first motor 416 is activated, driving the hollow rod 411 to rotate forward. This, along with the locked Z-shaped block 448, causes the movable disk 431 to rotate synchronously. This allows the first arc-shaped scraper 4511 and the second arc-shaped scraper 4512 to scrape the outer wall of the second cone 335 and the inner wall of the first cone 334. Simultaneously, the thread 412 of the hollow rod 411 engages with the internal thread post 434, releasing the lock of the Z-shaped block 448. Pressure is then applied by the first and second arc-shaped scrapers 4511 and 4512, driving the movable disk 431 to rise axially at a uniform speed. This achieves a spiral, full-coverage scraping of the entire surface of the first and second cones 334 and 335, scraping all adhering impurities and acetone droplets onto the vaporization plate 233 below, where they are vaporized. The acetone droplets containing impurities on plate 233 are heated to 50°C for secondary vaporization. The acetone gas phase then re-enters the cyclone channel for purification. Non-volatile high-boiling impurities and solid particles remain on the vaporization plate and are collected and cleaned after shutdown. The purified acetone gas phase after cyclone separation enters the residual material storage tank 521 in the third vacuum tank 511. It undergoes final precision filtration through a double-layer 0.1μm filter mesh 536 to intercept residual ultrafine solid particles in the gas phase, ensuring that the product particle size meets semiconductor-grade requirements. The filtered high-purity acetone gas phase is stably collected through the discharge pipe 512 at the top of the third vacuum tank 511 and connected to the acetone tower condenser and cryogenic collector. After condensation into a liquid state and cooling to ≤10°C, it is sent to the product tank for temporary storage, completing the core purification process.

[0023] Although the present invention has been described above with reference to embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the invention. In particular, as long as there is no structural conflict, the features in the disclosed embodiments can be combined with each other in any manner. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An electronic-grade acetone purification system, comprising: Acetone tower vacuum buffer base, the acetone tower vacuum buffer base is placed on the ground, characterized in that: A first vacuum buffer mechanism is installed on the top of the acetone tower vacuum buffer base. The first vacuum buffer mechanism is connected to an acetone temporary storage tank. The acetone temporary storage tank transfers the pretreated acetone raw material to the interior of the first vacuum buffer mechanism. The first vacuum buffer mechanism vaporizes, guides upward flow, and collects the acetone raw material. A second vacuum buffer mechanism is installed on the top of the first vacuum buffer mechanism. The second vacuum buffer mechanism intercepts ultrafine particles and trace high-boiling impurities entrained in the vaporized acetone. A collection mechanism is installed at the center of the interior of the first and second vacuum buffer mechanisms. The collection mechanism scrapes and collects the acetone, ultrafine particles, and trace high-boiling impurities intercepted by the second vacuum buffer mechanism. A filter mechanism is installed on the top of the second vacuum buffer mechanism. The filter mechanism is used to intercept ultrafine solid particles entrained in the gas phase twice.

2. The electronic-grade acetone purification system according to claim 1, characterized in that, The first vacuum buffer mechanism includes: a vaporization component; The vaporization component is installed on top of the acetone tower vacuum buffer base. The vaporization component is connected to an acetone temporary storage tank. A first vacuum buffer component is provided on top of the vaporization component, and a secondary vaporization component is provided on top of the first vacuum buffer component.

3. The electronic-grade acetone purification system according to claim 2, characterized in that, The vaporization component includes: a base plate; The base plate is installed on top of the acetone tower vacuum buffer base. A heating cylinder is installed at the center of the top of the base plate. The right end of the heating cylinder is connected to an inlet pipe, which is connected to an acetone temporary storage tank. The first vacuum buffer assembly is installed on the outer side of the top of the base plate. The first vacuum buffer assembly includes: a first vacuum tank; The first vacuum tank is set on the top of the base plate. The lower right side of the first vacuum tank is penetrated by the discharge pipe. The lower front side of the first vacuum tank is provided with a sealing port. The first mounting plate is provided in the middle of the interior of the first vacuum tank. The outer surface of the first mounting plate is provided with a first through groove. The inner surface of the first mounting plate is provided with a second through groove. The second exhaust fan is installed at the center of the surface of the first mounting plate. The secondary vaporization component includes: a connecting tank; The connecting tank is installed on top of the first vacuum tank. The lower end of the inner wall of the connecting tank is provided with an installation groove. A vaporization plate is rotatably connected inside the installation groove. The surface of the vaporization plate is rotatably connected to the bottom of the hydraulic cylinder. The top of the hydraulic cylinder is rotatably connected to the inner wall of the connecting tank.

4. The electronic-grade acetone purification system according to claim 3, characterized in that, The second vacuum buffer mechanism includes: a second vacuum buffer assembly; The second vacuum buffer assembly is installed on the top of the connecting tank in the first vacuum buffer mechanism. The top of the second vacuum buffer assembly is provided with a second flow guide assembly, and the bottom of the second vacuum buffer assembly is detachably installed with a flow guide assembly. The top of the flow guide assembly is detachably installed at the bottom of the second flow guide assembly.

5. The electronic-grade acetone purification system according to claim 4, characterized in that, The second vacuum buffer assembly includes: a second vacuum tank; The second vacuum tank is installed on top of the connecting tank in the first vacuum buffer mechanism, and U-shaped locking blocks are provided around the lower end of the inner wall of the second vacuum tank. The second drainage component includes: a second mounting plate; The second mounting plate is located at the top of the inner wall of the second vacuum tank. The bottom inner side of the second mounting plate is provided with a first disassembly groove, the bottom outer side of the second mounting plate is provided with a second disassembly groove, the inner end of the second mounting plate is provided with a third through groove, the outer end of the second mounting plate is provided with a fourth through groove, and the upper inner end of the second mounting plate is equipped with a second exhaust fan. The flow guiding component includes: a fixing plate; The outer wall of the fixing plate is provided with notches around its perimeter, and the top and bottom of the fixing plate are provided with blocks around its perimeter. The top of the fixing plate is provided with a first cone, the top of which is threaded into the interior of a second disassembly groove. The interior of the first cone is provided with a second cone, the top of which is threaded into the interior of the first disassembly groove.

6. The electronic-grade acetone purification system according to claim 5, characterized in that, The collection mechanism includes: a rotating component; The rotating component is rotatably connected to the center between the first mounting plate in the first vacuum buffer mechanism and the second mounting plate in the second vacuum buffer mechanism. A support component is installed in the middle of the outer wall of the rotating component. A movable component is connected to the outer wall of the rotating component. Fixed components are provided around the top of the movable component. A scraping component is rotatably connected around the outer wall of the movable component.

7. The electronic-grade acetone purification system according to claim 6, characterized in that, The rotating assembly includes: a hollow rod; The hollow rod is rotatably connected to the center position between the first mounting plate and the second mounting plate. The lower end of the outer wall of the hollow rod is threaded, and the lower end of the outer surface of the hollow rod is provided with guide grooves. The lower end of the outer surface of the hollow rod is equipped with a first steering gear. The left end of the first steering gear meshes with a second steering gear. The center of the second steering gear is connected to the output end of the first motor. The first motor is installed on the top left end of the first mounting plate. The upper end of the first steering gear is provided with a bearing block. The inner wall of the bearing block is connected to the lower end of the outer surface of the hollow rod. The right end of the outer wall of the bearing block is connected to a first suction pipe. The first suction pipe is connected to the output end of the pump body. The input end of the pump body is connected to a second suction pipe. The bottom of the second suction pipe contacts the bottom end of the heating cylinder in the first vacuum buffer mechanism. The pump body is installed on the surface right end of the first mounting plate. The top of the upper end of the outer wall of the hollow rod is provided with a spray plate. The spray plate is connected to the hollow rod. The bottom of the spray plate is provided with spray heads around its perimeter. The support component includes: a support disk; The bottom of the support plate is equipped with a clamping plate, and the support plate and the clamping plate are installed in the middle of the outer wall of the hollow rod. The top of the support plate is equipped with a support groove, and the outer wall of the clamping plate is threaded with a clamping nut. The active component includes: an active disk; The movable disc has a fifth through groove on both the inner and outer sides of its surface. The movable disc has a rotating groove on its surface. The movable disc has an internal threaded post at its center. The internal threaded post is threadedly connected to the hollow rod. The outer wall of the internal threaded post has through holes around its perimeter. The outer wall of the internal threaded post has a bearing seat around its perimeter. The bearing seat is rotatably connected to the bottom of the scraping component.

8. The electronic-grade acetone purification system according to claim 7, characterized in that, The fixing component includes: a rotating gear disk; The bottom of the rotating gear disk is equipped with a rotating disk, which is rotatably connected to the inside of the rotating groove. The two ends of the outer wall of the rotating gear disk are meshed with drive gears. The top of the drive gears is connected to the output end of the second motor. The second motor is installed at the top two ends of the first mounting plate. The top of the rotating gear disk is equipped with a limiting ring. The inside of the limiting ring is equipped with an inclined track. The inner side of the rotating gear disk is equipped with a fixed shaft seat. The inside of the fixed shaft seat is connected to a Z-shaped block through a torsion spring. The Z-shaped block is rotatably connected to the inside of the fixed shaft seat. The bottom outer end of the Z-shaped block is rotatably connected to a slider. The slider is slidably connected to the inside of the inclined track. The scraping assembly includes: a first connecting rod; The bottom of the first connecting rod is rotatably connected to the inside of the bearing seat via a torsion spring. The top of the first connecting rod is rotatably connected to the bottom of the second connecting rod. A third motor is installed on one side of the top of the outer wall of the second connecting rod. The output end of the third motor is connected to a rotating gear. The rotating gear is rotatably connected to the upper inside of the second connecting rod. The upper inside of the second connecting rod is rotatably connected to the bottom of the third connecting rod. The bottom of the third connecting rod has a half-gear block, which meshes with the rotating gear. The top of the third connecting rod is rotatably connected to the bottom of the fourth connecting rod. The top of the fourth connecting rod is rotatably connected to the top of the pressure rod. The pressure rods are configured in two sets. The bottom of one set of pressure rods is rotatably connected to the lower end of the outer wall of the first support rod, and the bottom of the other set of pressure rods is rotatably connected to the lower end of the outer wall of the second support rod. The bottom of the first support rod is rotatably connected to the bottom of the second support rod. The top of the first support rod is rotatably connected to the middle of the outer wall of the first arc-shaped scraper. The inner wall of the first arc-shaped scraper is in contact with the outer wall of the second cone in the second vacuum buffer mechanism. The top of the second support rod is rotatably connected to the middle of the inner wall of the second arc-shaped scraper. The outer wall of the second arc-shaped scraper is in contact with the inner wall of the first cone in the second vacuum buffer mechanism.

9. The electronic-grade acetone purification system according to claim 8, characterized in that, The filtration mechanism includes: a third vacuum buffer assembly; The third vacuum buffer assembly is installed on top of the second vacuum tank in the second vacuum buffer mechanism. The upper part of the interior of the third vacuum buffer assembly is provided with a residual material storage assembly, and the center of the interior of the residual material storage assembly is provided with a filter assembly.

10. The electronic-grade acetone purification system according to claim 9, characterized in that, The third vacuum buffer assembly includes: a third vacuum tank; The third vacuum tank is installed on top of the second vacuum tank, and the top of the third vacuum tank is equipped with a discharge pipe; The waste storage component includes: a waste storage tank; The residual material storage tank is located inside the upper part of the third vacuum tank. The inner wall of the residual material storage tank is equipped with scrapers at both ends and suction grooves at both ends. The suction grooves are connected to the residual material discharge pipe. The residual material discharge pipe is connected to the return tank through the pump. The residual material discharge pipe passes through the outer wall of the third vacuum tank and is connected to the outer wall of the residual material storage tank. The filter assembly includes: a support frame; The support frame is detachably installed on the bottom of the inner wall of the residual material storage tank. The top center of the support frame is rotatably connected to the support rod. The lower end of the outer wall of the support rod is fixedly installed with the third steering gear. The left end of the third steering gear is meshed with the fourth steering gear. The center of the fourth steering gear is connected to the output end of the fourth motor. The fourth motor is installed on the lower left side of the inner wall of the residual material storage tank. A filter mesh is installed on the upper end of the outer wall of the support rod. The top and bottom of the filter mesh are clamped by scrapers.

Images