Continuous vacuum nano-film spraying equipment

Abstract

The invention belongs to the technical field of spraying equipment, and discloses continuous vacuum nano-film spraying equipment which is used for material processing and comprises a control assembly, a plasma cleaning chamber, a spraying chamber and a curing chamber, and the plasma cleaning chamber, the spraying chamber and the curing chamber are communicated in sequence. A second inner gate is arranged at the joint of the spraying chamber and the curing chamber, a first outer gate is arranged on the side, away from the spraying chamber, of the plasma cleaning chamber, a second outer gate is arranged on the side, away from the spraying chamber, of the curing chamber, the plasma cleaning chamber, the spraying chamber and the curing chamber are all connected with a vacuumizing device, and a first transmission set is arranged in the plasma cleaning chamber. A second conveying set is arranged in the spraying chamber, a third conveying set is arranged in the curing chamber, and the first conveying set, the second conveying set and the third conveying set are used for moving materials. The nano-film spraying equipment has the beneficial effects that full-process vacuum continuous operation can be realized, a multi-process function is integrated, and the coating quality is accurately controlled.

Description

Technical Field

[0001] This invention relates to the field of spraying equipment technology, and in particular to a continuous vacuum nanofilm spraying equipment. Background Technology

[0002] With the surge in market demand for nanofilm products and the continuous improvement of quality requirements, the demand for functional nanocoatings on the surface of key components is growing. Such coatings require nanoscale thickness control, ultra-high uniformity, excellent adhesion, no impurities or contamination, and stable physicochemical properties. Traditional spraying equipment and processes can no longer meet the needs of industrial production.

[0003] Currently, mainstream nanofilm coating equipment in the industry generally adopts a "segmented operation" mode, meaning that the product needs to be transferred multiple times between independent cleaning equipment, spraying equipment, and heat treatment equipment to complete the processing. This decentralized processing mode has many technical bottlenecks: on the one hand, the product is easily contaminated by impurities such as external air, dust, and water vapor during the transfer process, resulting in insufficient coating cleanliness and seriously affecting the film performance; on the other hand, the independent layout of equipment for each process not only requires a large floor space and has high equipment purchase and maintenance costs, but also suffers from long intervals between processes and low production efficiency.

[0004] Current market equipment and processes mostly employ continuous production lines using electrostatic spraying or precision atomization spraying, which can basically achieve continuous coating of products on conveyor belts. However, these operating environments are atmospheric or low-cleanliness environments, making it difficult to avoid interference from dust, moisture, and oxygen in the coating process. This leads to problems such as pinholes, impurity encapsulation, and uneven adhesion, making it difficult to achieve the purity and density of vacuum-grade coatings. For nanoscale ultrathin coatings, the process control window in atmospheric environments is extremely narrow, making it difficult to guarantee uniformity. Although some "vacuum integrated" spraying equipment has emerged in existing technologies, attempting to integrate some processes to improve the above problems, such equipment still has significant shortcomings. Either it does not achieve continuous operation throughout the entire process, still requiring manual intervention to transfer products, or it lacks targeted cleaning and precise spraying structure design, failing to guarantee the uniformity and adhesion of nanoscale coatings. At the same time, most equipment lacks sufficient integration, failing to achieve coordinated linkage of control, transmission, and processing functions, making it difficult to balance production efficiency and product quality.

[0005] Spray coating technology, as one of the mainstream methods for preparing nanofilms, determines the quality of the film products through its preparation environment, process continuity, and coating control precision. The quality of nanofilm preparation is highly dependent on the processing environment and process continuity. Among these technologies, vacuum spray coating technology has become a core technical path for preparing high-performance nanofilms due to its ability to effectively isolate airborne impurities.

[0006] Therefore, it is necessary to provide a continuous vacuum nanofilm spraying equipment that can achieve continuous vacuum operation throughout the entire process, integrate multiple process functions, and precisely control the coating quality. This equipment can solve the core pain points of existing technologies, such as high pollution risk, low production efficiency, and insufficient integration, and is of great significance to promoting the upgrading and development of high-end manufacturing. Summary of the Invention

[0007] This invention discloses a continuous vacuum nanofilm spraying equipment, which relates to the field of precision spraying and surface treatment equipment technology. Specifically, it relates to an integrated production equipment that integrates plasma cleaning, nanofilm spraying and thermal curing in a continuous vacuum environment. It is particularly suitable for the preparation of nanoscale functional coatings for products such as medical devices, optical devices and outdoor sports equipment that have high requirements for cleanliness, uniformity and reliability. It can effectively solve the technical problems involved in the background art.

[0008] To achieve the above objectives, the technical solution of the present invention is as follows:

[0009] A continuous vacuum nanofilm spraying device for material processing includes a control component and a plasma cleaning chamber, a spraying chamber, and a curing chamber connected in sequence. A first inner gate is provided at the connection between the plasma cleaning chamber and the spraying chamber, and a second inner gate is provided at the connection between the spraying chamber and the curing chamber. A first outer gate is provided on the side of the plasma cleaning chamber away from the spraying chamber, and a second outer gate is provided on the side of the curing chamber away from the spraying chamber. Vacuum pumping devices are connected to the plasma cleaning chamber, the spraying chamber, and the curing chamber. A first transmission group is provided in the plasma cleaning chamber, a second transmission group is provided in the spraying chamber, and a third transmission group is provided in the curing chamber. The first, second, and third transmission groups are used to move materials.

[0010] As a preferred improvement of the present invention: the continuous vacuum nanofilm spraying equipment further includes a carrier tray for placing materials, and the first transfer group, the second transfer group and the third transfer group are used to move the carrier tray.

[0011] As a preferred improvement of the present invention: the plasma cleaning chamber is provided with a plasma plate and a plasma electrode for cleaning materials, and a first infrared sensor for positioning materials.

[0012] As a preferred improvement of the present invention: the first transmission group includes a first transmission motor, the output end of the first transmission motor is connected to a first transmission drive wheel, the first transmission drive wheel is connected to a plurality of first transmission driven wheels, and the plasma cleaning chamber is provided with a first limiting guide for guiding materials.

[0013] As a preferred improvement of the present invention: the spraying chamber is provided with a nozzle moving motor, the output end of the nozzle moving motor is connected to a nozzle moving synchronous belt, a nozzle is installed on the nozzle moving synchronous belt, the nozzle is connected to a paint inlet pipe through a flexible corrugated pipe, the paint inlet pipe is connected to an external paint storage device, and the spraying chamber is provided with a second viewing window and a second infrared sensor.

[0014] As a preferred improvement of the present invention: the paint storage device includes a paint device fixing bracket, on which a paint storage bottle and a paint buffer bottle are installed. The paint storage bottle is connected to the paint buffer bottle through a first pressure regulating valve. An annular heater is provided outside the paint buffer bottle. The paint buffer bottle is connected to a mass flow meter through a second pressure regulating valve. The mass flow meter is connected to the paint inlet pipe.

[0015] As a preferred improvement of the present invention: the curing chamber is connected to a third vacuum Roots pump through a third vacuum pneumatic baffle valve, and the curing chamber is provided with a third infrared sensor, a heater electrode and a heater, and the heater is provided with a dust cover.

[0016] As a preferred improvement of the present invention: the first inner gate includes a first rotary cylinder disposed at the connection between the plasma cleaning chamber and the spraying chamber, the output end of the first rotary cylinder is connected to the first inner gate rotating shaft, the first inner gate rotating shaft is connected to the first inner gate rocker arm, and the first inner gate rocker arm is connected to the first inner gate door plate.

[0017] As a preferred improvement of the present invention: the first outer gate includes a first outer gate cylinder base disposed on the side of the plasma cleaning chamber away from the spraying chamber, a first outer gate cylinder is installed at the first outer gate cylinder base, the output end of the first outer gate cylinder is connected to a first integrated support, the first integrated support is connected to the first outer gate panel, the upper and lower sides of the first integrated support are respectively connected to one end of a first rocker and one end of a second rocker, the other end of the first rocker and the other end of the second rocker are connected to the plasma cleaning chamber, and the plasma cleaning chamber is provided with a first sealing groove corresponding to the position of the first outer gate panel.

[0018] As a preferred improvement of the present invention: the continuous vacuum nanofilm spraying equipment further includes a reflux conveying component, the reflux conveying component includes a first lifting component, a second lifting component and a conveying mechanism, the first lifting component is arranged on the side of the plasma cleaning chamber away from the spraying chamber, the second lifting component is arranged on the side of the curing chamber away from the spraying chamber, and the conveying mechanism is located between the first lifting component and the second lifting component;

[0019] The first lifting assembly and the second lifting assembly have the same structure. The second lifting assembly includes a second lifting cylinder, a second lifting buffer block, a second lifting limit block, a second lifting limit anti-collision block, and a second lifting shifting mechanism. The output end of the second lifting cylinder is connected to the second lifting shifting mechanism. The second lifting shifting mechanism and the transmission mechanism are used to move materials.

[0020] The beneficial effects of this invention are as follows:

[0021] This invention enables continuous vacuum operation throughout the entire process, ensuring product cleanliness and efficient process connections. A reflux conveyor system runs through the plasma cleaning chamber, core spraying chamber, and thermosetting chamber. Combined with independent vacuum control and high-sealing design for each chamber, it achieves a fully vacuum environment for product flow from raw material input to finished product output. This completely isolates the product from external air, dust, moisture, and other impurities, fundamentally avoiding secondary contamination problems caused by product transfer in traditional segmented operations. Simultaneously, each process is automatically linked and coordinated through equipment control units, eliminating the need for manual intervention and completely removing process gaps, significantly improving overall production continuity. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein:

[0023] Figure 1 This is a schematic diagram of a continuous vacuum nanofilm spraying device according to the present invention;

[0024] Figure 2 This is a side view of the continuous vacuum nanofilm spraying equipment of the present invention;

[0025] Figure 3 This is a cross-sectional view of the continuous vacuum nanofilm spraying equipment of the present invention;

[0026] Figure 4 This is a schematic diagram of the plasma cleaning chamber structure of the present invention;

[0027] Figure 5 This is a schematic diagram of the spray booth structure of the present invention. Figure 1 ;

[0028] Figure 6 This is a schematic diagram of the spray booth structure of the present invention. Figure 2 ;

[0029] Figure 7 This is a schematic diagram of the curing chamber structure of the present invention;

[0030] Figure 8 This is a schematic diagram of the external gate structure of the present invention;

[0031] Figure 9 This is a schematic diagram of the internal gate structure of the present invention;

[0032] Figure 10 This is a schematic diagram of the paint storage device of the present invention;

[0033] Figure 11 This is a schematic diagram of the return transmission component structure of the present invention;

[0034] Figure 12 This is a schematic diagram of the process flow of the present invention.

[0035] In the diagram: 001-Carrier tray, 100-Control components, 200-Plasma cleaning chamber, 201-Plasma electrode plate, 202-RF plasma electrode, 203-First transmission group, 2031-First transmission motor, 2032-First transmission drive wheel, 2033-First transmission driven wheel, 204-First infrared sensor, 205-First limiting guide, 300-Spraying chamber, 301-Spray head moving synchronous belt, 302-Spray head, 303-Second transmission group, 3031 304-Second transmission motor, 305-Second limiting guide, 306-Flexible bellows, 307-Sprayer head moving motor, 308-Second viewing window, 309-Second infrared sensor, 310-Paint inlet pipe, 311-Paint device fixing bracket, 312-Paint storage bottle, 313-First pressure regulating valve, 314-Paint buffer bottle, 315-Annular heater, 316-Second pressure regulating valve, 400-Mass flow meter, 401-Curing chamber, 402-Third vacuum pneumatic stop Plate valve, 402-Third vacuum Roots pump, 403-Third infrared sensor, 404-Heater electrode, 405-Heater, 406-Dust cover plate, 407-Third transmission group, 500-First inner gate, 501-First rotary cylinder, 502-First inner gate shaft, 503-First inner gate rocker arm, 504-First inner gate plate, 600-Second inner gate, 700-First outer gate, 701-First outer gate plate, 702-First integrated support, 70 3-First rocker arm, 704-Second rocker arm, 705-First outer gate cylinder, 706-First outer gate cylinder base, 707-First sealing groove, 800-Second outer gate, 900-Return transmission assembly, 910-First lifting assembly, 920-Second lifting assembly, 921-Second lifting cylinder, 922-Second lifting buffer block, 923-Second lifting limit block, 924-Second lifting limit anti-collision block, 925-Second lifting shifting mechanism, 930-Transmission mechanism. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0037] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0038] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0040] Furthermore, the technical solutions of the various embodiments of the present invention can be combined with each other, but only if they are feasible for those skilled in the art. If the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed by the present invention.

[0041] Please see Figures 1-3As shown, this invention provides a continuous vacuum nanofilm spraying device for material processing, including a control component 100 and a plasma cleaning chamber 200, a spraying chamber 300, and a curing chamber 400 connected in sequence. A first inner gate 500 is provided at the connection between the plasma cleaning chamber 200 and the spraying chamber 300, and a second inner gate 600 is provided at the connection between the spraying chamber 300 and the curing chamber 400. A first outer gate 700 is provided on the side of the plasma cleaning chamber 200 away from the spraying chamber 300. The curing chamber 400 has a second outer gate 800 on the side away from the spraying chamber 300. The plasma cleaning chamber 200, the spraying chamber 300, and the curing chamber 400 are all connected to a vacuum device. The plasma cleaning chamber 200 has a first transfer group 203, the spraying chamber 300 has a second transfer group 303, and the curing chamber 400 has a third transfer group 407. The first transfer group 203, the second transfer group 303, and the third transfer group 407 are used to move materials. The plasma cleaning chamber 200, the spraying chamber 300, and the curing chamber 400 are vacuum environments, isolated by a first inner gate 500 and a second inner gate 600. The first transfer group 203, the second transfer group 303, and the third transfer group 407 facilitate the movement of materials within the device. Preferably, the continuous vacuum nanofilm spraying equipment further includes a carrier tray 001, which is used to place materials, and the first transmission group 203, the second transmission group 303 and the third transmission group 407 are used to move the carrier tray 001.

[0042] Please see Figure 4 As shown, the plasma cleaning chamber 200 is equipped with a plasma plate 201 and a plasma electrode 202 for material cleaning, as well as a first infrared sensor 204 for material positioning. The first transmission group 203 includes a first transmission motor 2031, the output end of which is connected to a first transmission drive wheel 2032. The first transmission drive wheel 2032 is connected to multiple first transmission driven wheels 2033 (via a synchronous belt or similar structure). The plasma cleaning chamber 200 is equipped with a first limiting guide 205 for material guidance. The material is located on the drive wheel 2032 and the driven wheels 2033. The motor drives the wheels to rotate, thereby moving the material.

[0043] Please see Figures 5-6As shown, the spraying chamber 300 is equipped with a nozzle moving motor 306. The output end of the nozzle moving motor 306 is connected to a nozzle moving synchronous belt 301. A nozzle 302 is mounted on the nozzle moving synchronous belt 301. The nozzle 302 is connected to a paint inlet pipe 309 via a flexible corrugated pipe 305. The paint inlet pipe 309 is connected to an external paint storage device. The spraying chamber 300 is equipped with a second viewing window 307 and a second infrared sensor 308. The spraying moving device is driven by a spraying moving servo motor to move the rotating shaft. The nozzle tube is fixed to the synchronous belt using synchronous belt clamps. The movement of the synchronous belt drives the movement of the nozzle tube. Figure 10 The paint storage device includes a paint device fixing bracket 310, on which a paint storage bottle 311 and a paint buffer bottle 313 are mounted. The paint storage bottle 311 is connected to the paint buffer bottle 313 through a first pressure regulating valve 312. The paint buffer bottle 313 is equipped with an annular heater 314. The paint buffer bottle 313 is connected to a mass flow meter 316 through a second pressure regulating valve 315. The mass flow meter 316 is connected to the paint inlet pipe 309. The liquid-to-gas conversion device for coatings is a key component for achieving precise spraying. Installed directly below the spraying chamber, it uses two quartz gas cylinders for storage and buffering. A pressure regulating and flow control system is comprised of two pneumatic diaphragm valves (hereinafter referred to as pressure regulating valves) and a mass flow meter. During operation, the pressure regulating valve at the front of the buffer cylinder is first opened, allowing the buffer cylinder to enter a vacuum environment. After the pressure stabilizes, this valve is closed, and the storage cylinder valve is opened. Due to the pressure difference, the liquid coating flows from the storage cylinder to the buffer cylinder. Simultaneously, the buffer cylinder heater is activated. At this point, the device is in a low-pressure environment, lowering the coating's boiling point and enabling low-power heating. After heating, the coating converts to a gaseous state. The heating time is controlled until vaporization is achieved. Then, the storage cylinder valve is closed, and the buffer cylinder valve is opened. The gaseous coating enters the spraying chamber via the mass flow meter.

[0044] Please see Figure 7 As shown, the curing chamber 400 is connected to the third vacuum Roots pump 402 through the third vacuum pneumatic baffle valve 401. The curing chamber 400 is equipped with a third infrared sensor 403, a heater electrode 404 and a heater 405. The heater 405 is equipped with a dust cover plate 406.

[0045] Please see Figure 8As shown, the first outer gate 700 includes a first outer gate cylinder base 706 disposed on the side of the plasma cleaning chamber 200 away from the spraying chamber 300. A first outer gate cylinder 705 is installed at the first outer gate cylinder base 706. The output end of the first outer gate cylinder 705 is connected to a first integrated support 702. The first integrated support 702 is connected to a first outer gate door plate 701. The upper and lower sides of the first integrated support 702 are respectively connected to one end of a first rocker arm 703 and one end of a second rocker arm 704. The other ends of the first rocker arm 703 and the second rocker arm 704 are connected to the plasma cleaning chamber 200. The plasma cleaning chamber 200 is provided with a first sealing groove 707 corresponding to the position of the first outer gate door plate 701. It is opened during material transfer and closed during processing. The outer gate adopts a four-bar linkage structure, powered by a MINI cylinder. The assembly consists of a gate panel, cylinder base, and joystick. The operation involves the cylinder pushing the joystick to move the gate panel up and down. In the closed state, the chamber side is a vacuum environment, while the outside is atmospheric. To open, the vacuum in the chamber is broken until the pressure is balanced with atmospheric pressure, after which the cylinder opens the gate. Compared to common rotary cylinder outer gate solutions on the market, this structure occupies less space, with a maximum lateral distance of 30mm when opening and closing. Its structural characteristics allow for the use of a smaller MINI cylinder as the power source, making the device simpler and aligning with cost reduction and efficiency improvement principles. It also facilitates and speeds up the replacement of easily damaged parts, minimizing the risk of production abnormalities and improving production efficiency.

[0046] Please see Figure 9 As shown, the first inner gate 500 includes a first rotary cylinder 501 disposed at the connection between the plasma cleaning chamber 200 and the spraying chamber 300. The output end of the first rotary cylinder 501 is connected to the first inner gate rotating shaft 502, the first inner gate rotating shaft 502 is connected to the first inner gate rocker arm 503, and the first inner gate rocker arm 503 is connected to the first inner gate door plate 504. It opens during material transfer and closes during processing. As an isolation unit within the vacuum environment, the inner gate's function is to isolate the two chambers using different vacuum pressures, preventing contamination between different processes in the two chambers and protecting the process environment. Generally, the vacuum level in the spraying chamber is 1x10E-5 Pa, while the vacuum levels in the plasma cleaning chamber and the thermosetting chamber are between 1x10E-1 Pa and 1x10E-2 Pa. The inner gate in the equipment always faces the spraying chamber to ensure pressure stability and the process environment during spraying. The power source for this structure is a rotary cylinder, brand CHELIC, model RTH63-90-F. During operation, the cylinder drives the rocker arm to rotate the door panel via the inner gate shaft, thus completing the opening and closing action.

[0047] Please see Figure 11As shown, the continuous vacuum nanofilm spraying equipment further includes a reflux conveying component 900. The reflux conveying component 900 includes a first lifting component 910, a second lifting component 920, and a conveying mechanism 930. The first lifting component 910 is located on the side of the plasma cleaning chamber 200 away from the spraying chamber 300, and the second lifting component 920 is located on the side of the curing chamber 400 away from the spraying chamber 300. The conveying mechanism 930 is located between the first lifting component 910 and the second lifting component 920. The first lifting component 910 conveys the material to the plasma cleaning chamber 200. After processing, the material exits from the curing chamber 400 and moves to the second lifting component 920. The second lifting component 920 lifts and lowers, conveying the material to the conveying mechanism 930, which then conveys the material back to the first lifting component 910. Preferably, the first lifting assembly 910 and the second lifting assembly 920 have the same structure. The second lifting assembly 920 includes a second lifting cylinder 921, a second lifting buffer block 922, a second lifting limit block 923, a second lifting limit anti-collision block 924, and a second lifting shifting mechanism 925. The output end of the second lifting cylinder 921 is connected to the second lifting shifting mechanism 925. The second lifting shifting mechanism 925 and the transmission mechanism 930 are used to move materials. The second lifting shifting mechanism 925 and the transmission mechanism 930 can use a motor and roller structure to transmit materials.

[0048] Three-chamber continuous vacuum integrated structure: This protects the overall architecture of a continuous vacuum production system consisting of a "feeding and plasma cleaning chamber," a "core mobile spraying chamber," and a "thermosetting and unloading chamber," connected in series by a self-developed vacuum gate and linked by a closed-loop roller return transport device. "Servo transmission + reciprocating scanning" dynamic spraying method and device: Specifically, this protects a method within the spraying chamber where, after product positioning and stopping, a servo motor-driven translation mechanism moves the nozzle in reciprocating motion to achieve nano-coating deposition, and the specific structure of the mobile spraying unit implementing this method. Integrated plasma cleaning and thermosetting process in a full vacuum environment: This protects a complete process method that seamlessly integrates RF plasma cleaning as a pre-process and product thermosetting as a post-process with vacuum spraying in a continuous, vacuum-free flow. Closed-loop return transport design: This protects the mechanical path and drive scheme that allows the product tray to automatically return to the feeding end via a lifting and transfer platform after unloading. This is a core feature for achieving compact, automated, and continuous equipment operation. Integrated collaborative control system: Protects the equipment control unit and its control logic used to coordinate and control the five major modules of vacuum, transmission, cleaning, spraying and thermosetting, and realize fully automatic formula-based operation.

[0049] To address the following core technical problems existing in current spraying equipment and processes for nanofilm preparation: 1. Poor production continuity and difficulty in ensuring product cleanliness: Existing spraying equipment is mostly segmented, requiring products to be transferred between different equipment or environments, making them susceptible to contamination from external air, dust, and other impurities. This fails to guarantee the clean environment required for nanofilm preparation, and the production intervals are long. Although some equipment integrates certain processes within a single vacuum chamber, it lacks a dedicated reflux transfer device, preventing continuous production from raw materials to finished products. Manual assistance is still required for some transfer or loading / unloading operations, limiting production efficiency; 2. Insufficient coating uniformity and difficulty in controlling nanoscale thickness: Traditional processes often use fixed nozzle designs, which cannot achieve comprehensive and uniform coverage of the product surface, especially making it difficult to accurately prepare nanoscale thickness coatings. This easily leads to uneven coating thickness and local defects, failing to meet the coating precision requirements of high-end products; 3. Low equipment integration, large footprint, and high cost: In some processes, cleaning, spraying, and thermosetting require independent equipment, resulting in a dispersed equipment layout, relatively independent mechanisms, and low integration. This not only occupies a large amount of production space but also increases the costs of equipment purchase, maintenance, and process integration, limiting the space for equipment size optimization and making cost reduction and efficiency improvement insignificant. 4. Poor cleaning effect, poor coating stability, and incomplete elimination of internal stress: Current pre-production cleaning methods are limited, mostly water washing and acid washing, leaving residues on the surface after cleaning, which greatly affects the adhesion of the film layer. Moreover, the coating after spraying is prone to structural instability due to internal stress. Existing thermosetting processes are mostly heat treatment under normal pressure, which cannot form an effective connection with the spraying environment, resulting in poor elimination of internal stress and affecting the service life of the coating. 5. Poor environmental performance and significant impact on the working environment: In non-enclosed operation modes, the volatile substances of the coating generated during the spraying process are easily diffused into the external environment, polluting the air and harming the health of operators, which not only affects product quality but also does not meet the requirements of green production.

[0050] Achieving continuous vacuum production throughout the entire process, precisely ensuring product cleanliness: Through a recirculation conveyor system, RF plasma cleaning chamber, core spraying chamber, and thermosetting chamber, coupled with independent vacuum control and sealing design for each chamber, the entire process—from material feeding, surface cleaning, nano-spraying to thermosetting—is continuously processed in a vacuum environment. This isolates the product from external air, dust, moisture, and other impurities, ensuring the cleanliness of the nano-film coating and preventing coating defects caused by impurities. Optimizing the spraying structure and process, achieving high-precision and uniform preparation of nano-coatings: By designing a servo-driven reciprocating spraying unit, combined with precisely adjustable transmission speed and spraying flow rate, the nozzle achieves comprehensive, seamless, and uniform coverage of the product surface. This precisely controls the coating thickness within the 1-100nm nanometer range, reducing coating thickness unevenness and improving surface smoothness and performance consistency. Enhancing equipment integration, achieving cost reduction, efficiency improvement, and space optimization: This invention integrates five functional units—equipment control, RF plasma cleaning, mobile spraying, thermosetting, and reflow conveying—with three vacuum chambers into a single integrated design. This eliminates the independent layout and connecting mechanisms of traditional segmented equipment, significantly reducing the equipment's footprint. Simultaneously, it reduces production gaps through process coordination, lowering equipment purchase, maintenance, and process connection costs, thereby improving industrial production efficiency. Optimized cleaning and thermosetting processes thoroughly eliminate internal stress and stabilize the coating structure: a self-developed plasma cleaning structure is added to the front of the equipment to remove residues from the material surface, while a customized surround heating plate is added to the rear. Through precise temperature control and insulation design, the sprayed coating undergoes simultaneous heat treatment, completely eliminating internal stress between the coating and the substrate, improving the adhesion between the coating and the substrate, preventing coating peeling and cracking during subsequent use, and extending product lifespan. Furthermore, this invention provides a stable, reliable, flexible, and scalable new process platform: The invention aims to provide a standardized, modular equipment architecture. Its purpose is not only to achieve the aforementioned specific continuous processes but also to construct a flexibly configurable vacuum platform. For example, by adding, removing, or replacing functional chambers (such as adding a second spraying unit for multi-layer coatings) and adjusting process parameters and formulations, this equipment can quickly adapt to the R&D and production needs of different substrates (such as metals, glass, and polymers) and different functional coatings (such as hydrophobic, insulating, optical, and anti-corrosion coatings), enhancing the equipment's versatility and market competitiveness. It achieves fully enclosed, environmentally friendly operation, ensuring production safety and environmental friendliness: through the overall sealed design and full vacuum operation mode, the volatile substances and reactive gases generated during the spraying process are completely confined within the vacuum chamber. These are then treated at high temperatures in a tail gas treatment furnace by a vacuum pump, preventing them from diffusing into the external environment and causing air pollution. Simultaneously, it ensures the occupational health and safety of operators, meeting the industry's requirements for green production.

[0051] The fully vacuum continuous nano-coating integrated preparation equipment provided by this invention has produced many significant and quantifiable beneficial effects compared with existing technologies. Compared with existing technologies, it has many significant and practical advantages, which are specifically described in multiple dimensions as follows: 1. Full-process vacuum continuous operation, thoroughly ensuring product cleanliness and process connection efficiency: This invention uses a reflux transmission device to run through the plasma cleaning chamber, core spraying chamber, and thermosetting chamber. Combined with independent vacuum control and high sealing performance design of each chamber, it realizes the full vacuum environment flow of the product from raw material feeding to finished product output, completely isolating external air, dust, water vapor and other impurities from contamination. It fundamentally avoids the secondary pollution problem caused by product transfer in traditional segmented operations. At the same time, each process is automatically linked and connected through the equipment control unit, without the need for manual intervention for transfer, completely eliminating process gaps and greatly improving the overall production continuity. 2. Reciprocating mobile spraying + precise parameter control for high-precision and uniform preparation of nanoscale coatings: Addressing the pain point of poor uniformity in traditional fixed-nozzle spraying, this invention employs a reciprocating mobile spraying unit driven by a servo motor and synchronous belt. The nozzle can reciprocate at a uniform speed along the vertical direction of product transport. Combined with the steplessly adjustable transport speed and the spraying flow supplied by a high-precision mass flow meter, it achieves all-round, dead-angle-free coverage of the product surface. Simultaneously, the high-vacuum environment of the core spraying chamber allows for precise control of the coating thickness within the 1-100nm range, with a uniformity error ≤±3%, meeting the precision requirements of mid-to-high-end products for nanoscale coatings. 3. Multi-unit integrated design significantly reduces equipment size and overall cost: This invention innovatively integrates multiple processes, eliminating the independent frames, connecting conveyor mechanisms, and repetitive vacuum systems of traditional segmented equipment. The equipment footprint is reduced by more than 60% compared to traditional distributed equipment, significantly reducing factory occupancy costs. Meanwhile, the integrated design reduces pipeline connections and redundant components between devices, which not only lowers equipment purchase costs but also reduces potential failure points and maintenance costs in subsequent operation and maintenance, achieving the dual goals of cost reduction and efficiency improvement. 4. RF plasma cleaning + vacuum thermosetting treatment significantly improves coating stability and adhesion: This invention continuously connects the RF plasma cleaning unit with the spraying process in a vacuum. Through plasma bombardment with adjustable power of 100-500W, it thoroughly removes tiny impurities and oil stains from the surface of the material and activates the surface. After spraying, it passes through a vacuum thermosetting heat treatment chamber. Through precise temperature control (0-200℃, temperature control accuracy ±2℃) and heat preservation curing process, the internal stress between the coating and the substrate is eliminated in a vacuum environment, avoiding problems such as coating peeling and cracking during subsequent use. At the same time, it improves coating adhesion by more than 30%, significantly extending the product's service life.5. Fully enclosed vacuum operation + automated control, balancing environmental protection and production stability: The equipment adopts a fully sealed design, completely confining the volatile substances and reactive gases generated during the spraying process within the vacuum chamber, preventing them from diffusing into the outside air and protecting the occupational health of operators. The equipment eliminates more than 70% of the auxiliary time (including vacuuming / ventilation, material transfer, equipment waiting, etc.) found in traditional split or single-unit equipment. Within the same time frame, the effective process time ratio increases from less than 30% to over 85%, with a projected capacity increase of 3 to 4 times. The equipment has a high degree of automation, enabling 24-hour uninterrupted operation, reducing manual intervention by more than 70%, lowering human error, and improving batch consistency and operational stability. Simultaneously, the multi-parameter linkage control function supports rapid switching of process formulas, shortening changeover time to within 30 minutes, adapting to the flexible production needs of multiple varieties and small batches. 6. Strong flexibility and adaptability, broadening equipment application scenarios: Through the precise adjustable design of multiple parameters (such as nozzle reciprocating speed 0.1~2m / min, transmission speed 0.1-1.0m / min, heating temperature 0~200℃, chamber pressure atmospheric to 1x10E-5, coating spraying flow rate 0~2L / min, etc.), this invention can quickly switch process formulas to adapt to the nano-coating preparation needs of different materials (metals, plastics, glass, textiles, etc.) and different specifications of products, greatly broadening the market application scenarios of the equipment and enhancing its market competitiveness.

[0052] The workflow is as follows, achieving continuous vacuum production throughout:

[0053] 1. Equipment Start-up and Vacuum Establishment: Start the equipment through the equipment control unit. The vacuum units in each vacuum chamber will start working and evacuate the plasma cleaning chamber, core spraying chamber, and thermosetting chamber to the preset vacuum level. At the same time, start the preheating of each unit and set the RF plasma cleaning parameters, spraying parameters, thermosetting parameters, and transmission speed parameters.

[0054] 2. Material feeding and plasma cleaning: The material to be processed is placed at the feeding end of the reflux conveyor, and the conveyor carries the material into the plasma cleaning chamber; the RF plasma cleaning unit is started, and the surface of the material is cleaned in all directions at the preset power and gas flow rate to remove impurities and oil stains and activate the surface;

[0055] 3. Continuous nano-spraying: The cleaned material enters the core spraying chamber under the drive of the conveying device; the paint is heated from the paint storage bottle to the boiling point and turns from liquid to gas after passing through the buffer bottle. Due to the pressure difference between the buffer bottle and the spraying chamber, the gaseous paint is atomized and sprayed out through the nozzle by the precise control of the flow rate of the mass flow meter. At the same time, the moving spraying unit is started, and the spraying nozzle moves back and forth under the drive of the reciprocating drive mechanism. The paint is precisely and evenly sprayed onto the surface of the material to form a nano-thickness coating.

[0056] 4. Vacuum thermosetting: The coated product enters the thermosetting chamber through the conveyor and is subjected to heat preservation and curing treatment at a preset temperature to eliminate internal stress and stabilize the coating structure.

[0057] 5. Finished product discharge: The cured product is sent out from the discharge end of the thermosetting chamber by the conveyor device, completing the entire process from raw material to finished product; the return conveyor device runs continuously to realize the continuous processing of subsequent materials.

[0058] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for the present invention. Other modifications can be easily made by those skilled in the art. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A continuous vacuum nanofilm spraying equipment for material processing, characterized in that: The system includes a control assembly (100) and a plasma cleaning chamber (200), a spraying chamber (300), and a curing chamber (400) connected in sequence. A first inner gate (500) is provided at the connection between the plasma cleaning chamber (200) and the spraying chamber (300), and a second inner gate (600) is provided at the connection between the spraying chamber (300) and the curing chamber (400). A first outer gate (700) is provided on the side of the plasma cleaning chamber (200) away from the spraying chamber (300), and the curing chamber (400) is located away from the spraying chamber. A second outer gate (800) is provided on one side of (300). The plasma cleaning chamber (200), the spraying chamber (300) and the curing chamber (400) are all connected to a vacuum device. The plasma cleaning chamber (200) is provided with a first transfer group (203), the spraying chamber (300) is provided with a second transfer group (303), and the curing chamber (400) is provided with a third transfer group (407). The first transfer group (203), the second transfer group (303) and the third transfer group (407) are used to move materials.

2. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The continuous vacuum nanofilm spraying equipment also includes a carrier tray (001) for placing materials, and the first transfer group (203), the second transfer group (303) and the third transfer group (407) for moving the carrier tray (001).

3. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The plasma cleaning chamber (200) is equipped with a plasma plate (201) and a plasma electrode (202) for cleaning materials, as well as a first infrared sensor (204) for positioning materials.

4. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The first transmission group (203) includes a first transmission motor (2031), the output end of the first transmission motor (2031) is connected to a first transmission drive wheel (2032), the first transmission drive wheel (2032) is connected to a plurality of first transmission driven wheels (2033), and the plasma cleaning chamber (200) is provided with a first limiting guide (205) for material guidance.

5. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The spraying chamber (300) is equipped with a nozzle moving motor (306), the output end of which is connected to a nozzle moving timing belt (301). A nozzle (302) is installed on the nozzle moving timing belt (301). The nozzle (302) is connected to a paint inlet pipe (309) through a flexible corrugated pipe (305). The paint inlet pipe (309) is connected to an external paint storage device. The spraying chamber (300) is equipped with a second viewing window (307) and a second infrared sensor (308).

6. The continuous vacuum nanofilm spraying equipment according to claim 5, characterized in that: The paint storage device includes a paint device fixing bracket (310), on which a paint storage bottle (311) and a paint buffer bottle (313) are installed. The paint storage bottle (311) is connected to the paint buffer bottle (313) through a first pressure regulating valve (312). The paint buffer bottle (313) is provided with an annular heater (314). The paint buffer bottle (313) is connected to a mass flow meter (316) through a second pressure regulating valve (315). The mass flow meter (316) is connected to the paint inlet pipe (309).

7. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The curing chamber (400) is connected to the third vacuum Roots pump (402) through the third vacuum pneumatic baffle valve (401). The curing chamber (400) is equipped with a third infrared sensor (403), a heater electrode (404) and a heater (405). The heater (405) is equipped with a dust cover plate (406).

8. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The first inner gate (500) includes a first rotary cylinder (501) disposed at the connection between the plasma cleaning chamber (200) and the spraying chamber (300). The output end of the first rotary cylinder (501) is connected to the first inner gate rotating shaft (502). The first inner gate rotating shaft (502) is connected to the first inner gate rocker arm (503). The first inner gate rocker arm (503) is connected to the first inner gate door plate (504).

9. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The first outer gate (700) includes a first outer gate cylinder base (706) disposed on the side of the plasma cleaning chamber (200) away from the spraying chamber (300). A first outer gate cylinder (705) is installed at the first outer gate cylinder base (706). The output end of the first outer gate cylinder (705) is connected to a first integrated support (702). The first integrated support (702) is connected to a first outer gate door plate (701). The upper and lower sides of the first integrated support (702) are respectively connected to one end of a first rocker (703) and one end of a second rocker (704). The other end of the first rocker (703) and the other end of the second rocker (704) are connected to the plasma cleaning chamber (200). The plasma cleaning chamber (200) is provided with a first sealing groove (707) at the position corresponding to the first outer gate door plate (701).

10. The continuous vacuum nanofilm spraying equipment according to claim 1, characterized in that: The continuous vacuum nanofilm spraying equipment further includes a reflux conveying component (900), which includes a first lifting component (910), a second lifting component (920), and a conveying mechanism (930). The first lifting component (910) is disposed on the side of the plasma cleaning chamber (200) away from the spraying chamber (300), and the second lifting component (920) is disposed on the side of the curing chamber (400) away from the spraying chamber (300). The conveying mechanism (930) is located between the first lifting component (910) and the second lifting component (920). The first lifting assembly (910) and the second lifting assembly (920) have the same structure. The second lifting assembly (920) includes a second lifting cylinder (921), a second lifting buffer block (922), a second lifting limit block (923), a second lifting limit anti-collision block (924), and a second lifting shifting mechanism (925). The output end of the second lifting cylinder (921) is connected to the second lifting shifting mechanism (925). The second lifting shifting mechanism (925) and the transmission mechanism (930) are used to move materials.

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