Dielectric paste and preparation method and application thereof
By adjusting the composition of the microcrystalline glass powder and the selection of the organic carrier, a low-dielectric-expansion dielectric slurry was prepared, which solved the problems of insufficient compatibility and high-temperature insulation of the alumina substrate, and improved the stability and insulation of the dielectric layer.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING U PRECISION TECH
- Filing Date
- 2024-10-30
- Publication Date
- 2026-05-01
AI Technical Summary
Existing dielectric pastes are difficult to match with alumina substrates, resulting in easy cracking at high temperatures and insufficient insulation performance, which cannot meet the high-temperature use requirements of equipment such as electrostatic chucks.
By adjusting the composition of the microcrystalline glass powder, adding raw materials such as silicon oxide, barium oxide, and aluminum oxide, and doping with strontium oxide, magnesium oxide, zinc oxide, and rare earth oxides, a low-dielectric-expansion dielectric slurry is prepared. Combined with the selection of organic carriers and sintering processes, the compatibility and insulation with the alumina substrate are ensured.
The prepared dielectric slurry has a thermal expansion coefficient close to that of the alumina substrate. After sintering, it forms a dense and flat dielectric layer that maintains good insulation at 500℃, has a high breakdown voltage and low leakage current, and is suitable for high-temperature stable use on alumina substrates.
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Abstract
Citation Information
Patent Citations
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