Power-off control device for wafer suction cup positioning mechanism and wafer cutting device
By designing a power failure control device in the wafer chuck positioning mechanism, and using an emergency power supply and vacuum sensors to determine the product status, the problem of positional displacement caused by vacuum loss during wafer dicing was solved, resulting in cost savings and yield improvement.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- GUANGDONG TAILAI PACKAGING & TESTING TECH CO LTD
- Filing Date
- 2025-12-30
- Publication Date
- 2026-05-05
AI Technical Summary
In the semiconductor manufacturing process, the loss of vacuum during wafer dicing leads to wafer position displacement and dicing deformation, affecting yield. Existing technologies using large-capacity UPS power supplies are costly and cannot guarantee switching during long-term power outages.
Design a power-off control device for a wafer chuck positioning mechanism. The device controls the vacuum chuck to maintain suction by using an emergency power supply. The emergency power supply is only used when there is a product present. Combined with a bypass vacuum pumping mechanism and a vacuum sensor, the device can determine whether there is a product present, thus saving energy.
Effective cost savings are achieved by using small-capacity energy storage devices as emergency power sources, preventing wafer misalignment, and improving yield.
Smart Images
Figure CN121973344A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of semiconductor manufacturing, and more particularly to a power-off control device for a wafer chuck positioning mechanism and a wafer dicing device. Background Technology
[0002] In semiconductor manufacturing, if vacuum is lost during wafer dicing (such as due to power failure or abnormal power-on / off), it can lead to wafer misalignment and dicing deformation, resulting in issues like off-cut, missed cuts, and chip damage, directly impacting yield. To address this critical issue, vacuum holding devices are needed to prevent quality problems caused by such anomalies.
[0003] In existing technologies, unexpected power outages are generally handled by simply switching the external power supply to the UPS. However, the capacity of a UPS is closely related to its cost. If a UPS is used to completely replace the external power supply during a power outage, a high-capacity UPS would be required, which would be very expensive. If the power outage lasts for a long time, it would be difficult to guarantee uninterrupted power switching.
[0004] Therefore, there is an urgent need for a power outage control device that can solve the above problems. Summary of the Invention
[0005] The purpose of this invention is to provide a power-off control device and a wafer dicing device for a wafer chuck positioning mechanism. The device uses an emergency power supply to control the vacuum chuck to maintain suction only when there is a product on it, effectively saving energy. This invention allows the use of small-capacity energy storage devices as emergency power supplies, effectively saving costs.
[0006] To achieve the above objectives, the present invention provides a power-off control device for a wafer chuck positioning mechanism. The wafer chuck positioning mechanism includes a vacuum chuck and a vacuum system. The vacuum chuck is used to adsorb wafers. The vacuum system is connected to the vacuum port of the vacuum chuck and, under the control of a vacuum control valve, evacuates or stops evacuating the vacuum chuck. The power-off control device includes an emergency power supply and a control unit. The emergency power supply supplies power to the control unit when the external power supply fails. The control unit monitors the external power supply and initiates power-off emergency control when an abnormal power failure occurs: controlling the vacuum chuck to maintain a suction state, monitoring and determining whether there is a product on the vacuum chuck, controlling the vacuum chuck to continue maintaining a suction state when there is a product on the vacuum chuck, and controlling the vacuum chuck to stop a suction state when there is no product on the vacuum chuck.
[0007] Preferably, the control unit monitors the power failure of the external power supply and the energization status of the vacuum control valve, and initiates a power failure emergency control when both the external power supply and the vacuum control valve lose power simultaneously. This scheme prevents the power failure emergency control from being initiated during normal restart and prevents accidental triggering of the power failure emergency control.
[0008] Specifically, the control unit includes a first detection circuit, a second detection circuit, and a control circuit. The first detection circuit monitors the external power supply and outputs a first signal to the control circuit when the external power supply fails. The second detection circuit monitors the energization status of the vacuum control valve and outputs a second signal to the control circuit when the vacuum control valve fails. The control circuit initiates power failure emergency control when it receives both the first and second signals simultaneously.
[0009] More specifically, the first detection circuit includes a first relay, the vacuum control valve includes a coil for controlling the valve's on / off state and a contact switch that operates in conjunction with the coil, the second detection circuit includes a contact switch of the vacuum solenoid valve, the coil of the first relay is connected between two phases of the external power supply, the contact switch of the first relay is connected to the first input terminal of the control circuit, the contact switch of the vacuum solenoid valve is connected to the second input terminal of the control circuit, and the control circuit initiates emergency power-off control when both the coil of the first relay and the coil of the vacuum solenoid valve are simultaneously disconnected.
[0010] Preferably, the power failure control device further includes a bypass vacuuming mechanism, which includes a vacuum generator and an emergency control valve. The vacuum generator is connected to the vacuum port of the vacuum suction cup and, under the control of the emergency control valve, evacuates or stops evacuating the vacuum suction cup. The control unit is connected to the emergency control valve and, after activating the power failure emergency control, controls the valve to open, so that the vacuum suction cup remains in a suction state. The control unit also monitors whether there is a product on the vacuum suction cup. When there is a product on the vacuum suction cup, it controls the valve of the emergency control valve to remain open, so that the vacuum suction cup continues to maintain a suction state. When there is no product on the vacuum suction cup, it controls the valve of the emergency control valve to close, so that the vacuum suction cup ends its suction state. This solution features a passive bypass vacuuming mechanism. When an external power supply fails unexpectedly and vacuuming needs to be maintained, the emergency power supply only needs to power the control unit, without powering the vacuuming system, effectively saving the energy stored in the emergency power supply. This allows the solution to use a small-capacity battery as an emergency power source.
[0011] Specifically, the emergency control valve is a solenoid valve, and the control unit includes a control circuit and an intermediate relay. The normally open contact of the intermediate relay is connected in series with the coil of the emergency control valve between the positive and negative terminals of the power supply terminal of the control unit. The control circuit is connected to the coil of the intermediate relay so as to control the opening and closing of the emergency control valve by controlling the on and off state of the coil of the intermediate relay.
[0012] Preferably, the power failure control device further includes a vacuum sensor that detects the vacuum value on the vacuum suction cup. After the power failure emergency control is performed, the control unit controls the vacuum suction cup to maintain the suction state. After the vacuum suction cup maintains the suction state, the control unit determines whether there is a product on the vacuum suction cup based on the signal detected by the vacuum sensor.
[0013] Specifically, when the vacuum sensor detects a vacuum value greater than or equal to a preset value, it outputs a vacuum signal to the control unit, and the control unit determines that there is a product on the vacuum suction cup when it receives the vacuum signal.
[0014] Preferably, when there is no product on the vacuum suction cup, the control unit controls the vacuum suction cup to end the suction state after a preset delay.
[0015] Specifically, the preset duration is 30 seconds.
[0016] This invention also discloses a wafer dicing apparatus, including a wafer chuck positioning mechanism, a dicing mechanism, and a power-off control device. The wafer chuck positioning mechanism includes a vacuum chuck and a vacuum system. The vacuum system is connected to the vacuum port of the vacuum chuck and, under the control of a vacuum control valve, evacuates or stops evacuating the vacuum chuck. The vacuum chuck serves as the dicing stage of the dicing mechanism and is used to adsorb wafers. The dicing mechanism is used to dic the wafers on the vacuum chuck. An external power supply is connected to the wafer chuck positioning mechanism and the dicing mechanism and supplies power to them. The external power supply is connected to an emergency power supply. When the external power supply is operating normally, the emergency power supply transmits power from the external power supply to the power-off control device to power the power-off control device. When the external power supply is interrupted, the emergency power supply controls its own energy storage battery to power the control unit.
[0017] Compared to existing technologies, this invention features a separate power-off control device for the wafer chuck positioning mechanism. When an external power supply to the wafer chuck positioning mechanism experiences an abnormal power outage, this device first determines whether there is a product on the vacuum chuck. Only when there is a product on the vacuum chuck is the emergency power supply activated to perform the vacuuming function, thus saving energy. Furthermore, the emergency power supply only powers the power-off control device and not the wafer chuck positioning mechanism, allowing the invention to utilize small-capacity energy storage devices as emergency power, effectively saving costs. Attached Figure Description
[0018] Figure 1 This is a circuit diagram of the power-off control device and the wafer chuck positioning mechanism of the present invention.
[0019] Figure 2 This is a circuit diagram of the power-off control device of the present invention.
[0020] Figure 3This is a flowchart illustrating the operation of a power-off control device in one embodiment of the present invention.
[0021] Figure 4 This is a flowchart of the power-off control device in a preferred embodiment of the present invention. Detailed Implementation
[0022] To illustrate the technical content, structural features, objectives, and effects of the present invention in detail, the following description is provided in conjunction with the embodiments and accompanying drawings.
[0023] This invention discloses a wafer dicing apparatus, including a wafer chuck positioning mechanism, a dicing mechanism, and a power-off control device. The wafer chuck positioning mechanism includes a vacuum chuck 12 and a vacuum system 11. The vacuum chuck 12 serves as the worktable of the dicing mechanism and is used to adsorb wafers. The vacuum system 11 is connected to the vacuum port of the vacuum chuck 12 and, under the on / off control of the vacuum control valve KA2, evacuates and stops evacuating the vacuum chuck 12. The power-off control device is used to control the power-off of the wafer chuck positioning mechanism.
[0024] refer to Figure 1 The vacuum system 11 includes a compressor, a controller, and a vacuum control valve KA2. An external power supply powers the vacuum system 11, while the emergency power supply 21 is not connected to it. The compressor's output is connected to the vacuum port of the vacuum suction cup 12 via a suction channel. The vacuum control valve KA2 is connected between the compressor and the vacuum port of the vacuum suction cup 12. The controller is connected to the compressor and the vacuum control valve KA2 to control their operation. When the valve of the vacuum control valve KA2 between the compressor and the vacuum port of the vacuum suction cup 12 is open, the compressor can evacuate the vacuum suction cup 12. When the valve of the vacuum control valve KA2 is closed, the compressor can stop evacuating the vacuum suction cup 12.
[0025] Among them, vacuum control valve KA2 is a solenoid valve. The controller is connected to the coil of vacuum control valve KA2 to control the opening and closing of vacuum control valve KA2. Vacuum control valve KA2 is connected to the vacuum channel between the compressor and the vacuum suction cup 12.
[0026] refer to Figure 1 and Figure 2 The power outage control device includes an emergency power supply 21 and a control unit 30. The emergency power supply 21 supplies power to the control unit 30 when the external power supply fails. The control unit 30 monitors the external power supply and initiates the power outage emergency control when the external power supply fails abnormally.
[0027] refer to Figure 1 and Figure 3The power outage emergency control specifically includes: the control unit 30 controls the vacuum suction cup 12 to maintain the suction state, and then monitors whether there is a product on the vacuum suction cup 12. When there is a product on the vacuum suction cup 12, the control unit 30 controls the vacuum suction cup 12 to continue to maintain the suction state. When there is no product on the vacuum suction cup 12, the control unit 30 controls the vacuum suction cup 12 to end the suction state.
[0028] refer to Figure 3 The power-off control device performs power-off control as follows: S1: Monitor the external power supply and determine whether there is an abnormal power outage. If so, proceed to step S2; otherwise, return to continue monitoring. S2: Control the vacuum suction cup 12 to maintain the suction state. S3: Monitor whether there is a product on the vacuum suction cup 12. If so, proceed to step S4; otherwise, proceed to step S5. S4: When there is a product on the vacuum suction cup 12, control the vacuum suction cup 12 to continue maintaining the suction state. S5: When there is no product on the vacuum suction cup 12, control the vacuum suction cup 12 to end the suction state.
[0029] Preferably, after step S4, the method further includes: after the external power supply is turned on and the cutting mechanism has completed the cutting work, controlling the vacuum suction cup 12 to end the vacuuming process.
[0030] The power failure control device also includes a switching power supply 22, and an emergency power supply 21 including an energy storage battery and a switching control circuit. When the external power supply is normal, the switching control circuit directly supplies the external power to the switching power supply 22, which converts the external power into a DC power supply output to power the control unit 30. When the external power supply fails, the switching control circuit switches the power supply circuit to the energy storage battery, supplying the energy from the energy storage battery to the switching power supply 22. The switching power supply 22 converts the energy from the energy storage battery into a preset power supply (output through output terminals a and b).
[0031] refer to Figure 2 The control unit 30 monitors the power failure of the external power supply and the energization status of the vacuum control valve KA2. When both the external power supply and the vacuum control valve KA2 lose power, it determines that there is an abnormal power failure of the external power supply and initiates emergency power failure control.
[0032] Specifically, the control unit 30 includes a first detection circuit, a second detection circuit, and a control circuit 31. The first detection circuit monitors the external power supply and outputs a first signal to the control circuit 31 when the external power supply fails. The second detection circuit monitors the energization status of the vacuum control valve KA2 and outputs a second signal to the control circuit 31 when the vacuum control valve KA2 fails. The control circuit 31 initiates power failure emergency control when it receives both the first signal and the second signal simultaneously.
[0033] The first detection circuit includes a first relay KM, the vacuum control valve KA2 includes a coil for controlling the valve's on / off state and a contact switch KA2 associated with the coil, the second detection circuit includes the contact switch KA2 of the vacuum control valve KA2, the two ends of the coil KM of the first relay KM are connected between the two phase lines of the external power supply, the contact switch KM of the first relay KM is connected to the first input terminal X1 of the control circuit 31, the contact switch KA2 (normally open contact) of the vacuum control valve KA2 is connected to the second input terminal X2 of the control circuit 31, and the control circuit 31 initiates power-off emergency control when both the first input terminal X1 and the second input terminal X2 receive a disconnection signal, so that the control circuit 31 initiates power-off emergency control when both the coil of the first relay KM and the coil of the vacuum control valve KA2 are disconnected.
[0034] refer to Figure 1 and Figure 2 The power failure control device also includes a bypass vacuum mechanism 40, which includes a vacuum generator 41 and an emergency control valve KA3. The vacuum generator 41 is connected to the vacuum port of the vacuum suction cup 12, and the valve of the emergency control valve KA3 is installed in the vacuum passage between the vacuum generator 41 and the vacuum port to control the vacuum suction cup 12 to perform and stop vacuuming. The emergency control valve KA3 is a solenoid valve. The vacuum generator 41 uses a nitrogen gas source to supply nitrogen normally in the event of a power failure, allowing it to operate normally even when power is off. When the valve of the emergency control valve KA3 is open, the vacuum generator 41 can perform vacuuming on the vacuum port of the vacuum suction cup 12; when the valve of the emergency control valve KA3 is closed, the vacuum generator 41 stops performing vacuuming on the vacuum port of the vacuum suction cup 12.
[0035] refer to Figure 1 The power-off control device also includes a vacuum sensor 32 that detects the vacuum value on the vacuum suction cup 12. The control unit 30 determines whether there is a product on the vacuum suction cup 12 based on the signal detected by the vacuum sensor 32. Specifically, when the vacuum sensor 32 detects a vacuum value greater than or equal to a preset value, it outputs a vacuum signal to the third input terminal X3 of the control circuit 31 of the control unit 30. The control unit 30 determines whether there is a product on the vacuum suction cup 12 based on the vacuum signal.
[0036] refer to Figure 4When there is no product on the vacuum suction cup 12, the control unit 30 delays for a preset time to control the vacuum suction cup 12 to end its suction state. Specifically, the preset time is 30 seconds, but it is not limited to 30 seconds and can be between 10 and 60 seconds. Specifically, when the control unit 30 receives a signal at the third input terminal X3, it determines that there is no product on the vacuum suction cup 12. At this time, after a preset time delay, the coil of the intermediate relay KA1 is de-energized, the normally open contact KA1 opens, so that the coil of the emergency control valve KA3 is de-energized, the normally open contact KA3 opens, and the valve of the emergency control valve KA3 closes, so that the vacuum suction cup 12 ends its suction state.
[0037] refer to Figure 1 and Figure 4 The control unit 30 is connected to the coil of the emergency control valve KA3. After the power failure emergency control is activated, the control unit 30 controls the coil of the emergency control valve KA3 to conduct, opening the normally open contact KA3 and causing the valve of the emergency control valve KA3 to open. The vacuum suction cup 12 then begins to continuously pump a vacuum. After the valve of the emergency control valve KA3 is opened, the control unit 30 monitors whether there is a product on the vacuum suction cup 12. When there is a product on the vacuum suction cup 12, the control unit 30 controls the valve of the emergency control valve KA3 to remain open, allowing the vacuum suction cup 12 to continue pumping a vacuum and maintain the suction state. When there is no product on the vacuum suction cup 12, the control unit 30 de-energizes the coil of the emergency control valve KA3, opening the valve of the emergency control valve KA3 and causing the vacuum suction cup 12 to stop pumping a vacuum, thus ending the suction state.
[0038] refer to Figure 2 The control unit 30 includes an intermediate relay KA1. The contact switch KA1 (normally open contact) of the intermediate relay KA1 is connected in series with the coil KA3 of the emergency control valve KA3 and then connected between the ab terminals of the switching power supply 22. The control circuit 31 is connected to the coil KA1 of the intermediate relay KA1 so as to control the on / off state of the coil of the emergency control valve KA3 by controlling the on / off state of the normally open contact KA1 of the intermediate relay KA1.
[0039] refer to Figure 2 and Figure 4 The working process of the power-off control device of the present invention is described as follows: During normal operation, the emergency power supply 21 delivers electricity from the external power source to the switching power supply 22, which converts the external power source into DC power supply output, which powers the control unit 30.
[0040] S11, when the external power supply suddenly fails, the coil of the first relay KM is de-energized, the normally open contact KM connected to the first input terminal X1 opens, and the first input terminal X1 receives a disconnection signal, at which point it is determined that the external power supply is lost. At this time, the emergency power supply 21 supplies power from its own energy storage battery to the switching power supply 22, and the switching power supply 22 converts the external power supply into DC power supply output, which supplies power to the control unit 30.
[0041] S12, if an abnormal power outage occurs in the external power supply at this time, the vacuum system 11 will also be de-energized. The coil KA2 of the vacuum control valve KA2 will disconnect the normally open contact switch KA2 (connected to the second input terminal X2) due to the power outage. The second input terminal X2 receives the disconnection signal and at this time it is determined that the vacuum system 11 stops evacuating the vacuum suction cup 12.
[0042] S2, when the control circuit 31 receives the disconnection signal at the first input terminal X1 and the second input terminal X2 at the same time, it determines that the external power supply and the vacuum control valve KA2 have lost power at the same time. It then judges that the external power supply has an abnormal power failure and starts the power failure emergency control: the control circuit 31 controls the output terminal Y4 to output a signal, the coil KA1 of the intermediate relay KA1 is turned on, the normally open contact switch KA1 of the intermediate relay KA1 is turned on, the coil KA3 of the emergency control valve KA3 is turned on, the valve of the emergency control valve KA3 is opened, and the compressed gas (nitrogen) of the vacuum generator 41 controls the vacuum suction cup 12 to suck up the gas, and the vacuum suction cup 12 maintains the suction state.
[0043] S3. If there is a product on the vacuum suction cup 12, the vacuum level detected by the vacuum sensor 32 is greater than or equal to the preset value. At this time, an output signal is sent to the third input terminal X3 of the control circuit 31. If there is no product on the vacuum suction cup 12, the vacuum level detected by the vacuum sensor 32 is less than the preset value. At this time, no signal is input to the third input terminal X3 of the control circuit 31. Assuming there is a product on the vacuum suction cup 12, after the coil of the emergency control valve KA3 is turned on, the control circuit 31 determines that there is a product on the vacuum suction cup 12 through the signal received at the third input terminal X3 and executes step S4. Assuming there is no product on the vacuum suction cup 12, after the coil of the emergency control valve KA3 is turned on, the control circuit 31 determines that there is no product on the vacuum suction cup 12 through the absence of a signal received at the third input terminal X3 and executes step S5.
[0044] S4, the control circuit 31 continuously conducts the coil KA1 of the intermediate relay KA1, so that the coil of the emergency control valve KA3 is continuously conducted, the valve of the emergency control valve KA3 is continuously open, the compressed gas (nitrogen) of the vacuum generator 41 continuously controls the vacuum suction cup 12 to suck up air, and the vacuum suction cup 12 maintains the suction state.
[0045] S5, the control circuit 31 starts timing and disconnects the coil KA1 of the intermediate relay KA1 after a preset time, so that the coil KA3 of the emergency control valve KA3 is subsequently disconnected, the valve of the emergency control valve KA3 is closed, and the vacuum suction cup 12 ends the suction state.
[0046] The above-disclosed embodiments are merely preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. Therefore, any equivalent variations made in accordance with the scope of the present invention are still within the scope of the present invention.
Claims
1. A power-off control device for a wafer chuck positioning mechanism, the wafer chuck positioning mechanism comprising a vacuum chuck and a vacuum system, the vacuum chuck being used to adsorb wafers, the vacuum system being connected to the vacuum port of the vacuum chuck, and evacuating or stopping the vacuum chuck under the control of a vacuum control valve, characterized in that: The power failure control device includes an emergency power supply and a control unit. The emergency power supply supplies power to the control unit when the external power supply fails. The control unit monitors the external power supply and initiates power failure emergency control when the external power supply experiences an abnormal power failure: controlling the vacuum suction cup to maintain the suction state, monitoring and determining whether there is a product on the vacuum suction cup, controlling the vacuum suction cup to continue maintaining the suction state when there is a product on the vacuum suction cup, and controlling the vacuum suction cup to stop the suction state when there is no product on the vacuum suction cup.
2. The power-off control device for a wafer chuck positioning mechanism as described in claim 1, characterized in that: The control unit monitors the power failure of the external power supply and the energization status of the vacuum control valve, and initiates emergency power failure control when both the external power supply and the vacuum control valve lose power simultaneously.
3. The power-off control device for a wafer chuck positioning mechanism as described in claim 2, characterized in that: The control unit includes a first detection circuit, a second detection circuit, and a control circuit. The first detection circuit monitors the external power supply and outputs a first signal to the control circuit when the external power supply fails. The second detection circuit monitors the energization status of the vacuum control valve and outputs a second signal to the control circuit when the vacuum control valve fails. The control circuit initiates power failure emergency control when it receives both the first and second signals simultaneously.
4. The power-off control device for a wafer chuck positioning mechanism as described in claim 3, characterized in that: The first detection circuit includes a first relay, the vacuum control valve includes a coil for controlling the valve's on / off state and a contact switch that operates in conjunction with the coil, the second detection circuit includes a contact switch of the vacuum solenoid valve, the coil of the first relay is connected between two phases of the external power supply, the contact switch of the first relay is connected to the first input terminal of the control circuit, the contact switch of the vacuum solenoid valve is connected to the second input terminal of the control circuit, and the control circuit initiates emergency power-off control when both the coil of the first relay and the coil of the vacuum solenoid valve are simultaneously disconnected.
5. The power-off control device for a wafer chuck positioning mechanism as described in claim 1, characterized in that: It also includes a bypass vacuuming mechanism, which comprises a vacuum generator and an emergency control valve. The vacuum generator is connected to the vacuum port of the vacuum suction cup and, under the control of the emergency control valve, evacuates or stops evacuating the vacuum suction cup. The control unit is connected to the emergency control valve and, after activating the power failure emergency control, controls the valve to open so that the vacuum suction cup remains in a suction state. The control unit also monitors whether there is a product on the vacuum suction cup. When there is a product on the vacuum suction cup, it controls the valve of the emergency control valve to remain open so that the vacuum suction cup continues to maintain a suction state. When there is no product on the vacuum suction cup, it controls the valve of the emergency control valve to close so that the vacuum suction cup ends its suction state.
6. The power-off control device for a wafer chuck positioning mechanism as described in claim 5, characterized in that: The emergency control valve is a solenoid valve. The control unit includes a control circuit and an intermediate relay. The normally open contact of the intermediate relay is connected in series with the coil of the emergency control valve between the positive and negative terminals of the power supply terminal of the control unit. The control circuit is connected to the coil of the intermediate relay to control the opening and closing of the emergency control valve by controlling the on / off state of the coil of the intermediate relay.
7. The power-off control device for a wafer chuck positioning mechanism as described in claim 1, characterized in that: It also includes a vacuum sensor that detects the vacuum value on the vacuum suction cup. After the power failure emergency control is activated, the control unit controls the vacuum suction cup to maintain the suction state. After the vacuum suction cup maintains the suction state, it determines whether there is a product on the vacuum suction cup based on the signal detected by the vacuum sensor.
8. The power-off control device for a wafer chuck positioning mechanism as described in claim 7, characterized in that: When the vacuum sensor detects a vacuum value greater than or equal to a preset value, it outputs a vacuum signal to the control unit. When the control unit receives the vacuum signal, it determines that there is a product on the vacuum suction cup.
9. The power-off control device for a wafer chuck positioning mechanism as described in claim 1, characterized in that: When there is no product on the vacuum suction cup, the control unit controls the vacuum suction cup to end the suction state after a preset delay.
10. A wafer dicing apparatus, characterized in that: The device includes a wafer chuck positioning mechanism, a dicing mechanism, and a power-off control device. The wafer chuck positioning mechanism includes a vacuum chuck and a vacuum system. The vacuum system is connected to the vacuum port of the vacuum chuck and, under the control of a vacuum control valve, evacuates or stops evacuating the vacuum chuck. The vacuum chuck serves as the dicing table of the dicing mechanism and is used to adsorb wafers. The dicing mechanism is used to dice the wafers on the vacuum chuck. The power-off control device is a power-off control device for the wafer chuck positioning mechanism as described in any one of claims 1-9. The external power supply is connected to the wafer chuck positioning mechanism and the dicing mechanism and supplies power to the wafer chuck positioning mechanism and the dicing mechanism; the external power supply is connected to the emergency power supply, and when the external power supply is normally powered, the emergency power supply delivers the power from the external power supply to the power failure control device to supply power to the power failure control device, and when the external power supply is de-energized, it controls its own energy storage battery to supply power to the control unit.