Vacuum high-low temperature semi-automatic probe station

Abstract

The invention provides a vacuum high-low temperature semi-automatic probe station, comprising: a vacuum system comprising a vacuum cavity and a vacuum pump set connected with the vacuum cavity so as to establish and maintain a vacuum environment in the vacuum cavity, the top of the vacuum cavity being provided with an operation port, the operation port being provided with a transparent sealing plate for sealing; the refrigerating system comprises at least two refrigerating machines installed at the bottom of the vacuum cavity, a helium compressor providing high-pressure helium for the refrigerating machines and a heat conduction component connected to cold heads of the refrigerating machines. According to the vacuum high-low temperature semi-automatic probe station, at least two probe stations are adopted for cooling at the same time, and heat conduction belts between the probe stations are optimized, so that a sample can reach a lower temperature, and the vacuum high-low temperature semi-automatic probe station has higher practicability and optimal use performance.

Description

Technical Field

[0001] This invention belongs to the field of probe testing technology, specifically relating to a vacuum high and low temperature semi-automatic probe station. Background Technology

[0002] In the field of probe testing technology, probe stations are important tools used to test whether the contact points of electronic components and circuits inside PCB boards or wafers are conductive. Probe stations are mainly used in the semiconductor industry, optoelectronic industry, integrated circuits and packaging testing. They are widely used in the research and development of precision electrical measurements for complex, high-speed devices, aiming to ensure quality and reliability, and reduce R&D time and device manufacturing process costs. However, existing probe stations are mainly manual or semi-automatic machines with low temperature (only down to -60℃), with a small temperature coverage area, low movement accuracy and structural instability, which affect the accuracy and stability of test results. Summary of the Invention

[0003] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a vacuum high and low temperature semi-automatic probe station.

[0004] To achieve the above objectives, the technical solution of the present invention is implemented as follows: This invention provides a vacuum high and low temperature semi-automatic probe station, comprising: A vacuum system includes a vacuum chamber and a vacuum pump assembly connected to the vacuum chamber to establish and maintain a vacuum environment within the vacuum chamber. The top of the vacuum chamber is provided with an operating port, which is sealed with a transparent sealing plate. The refrigeration system includes at least two refrigerators installed at the bottom of a vacuum chamber, a helium compressor that provides high-pressure helium to the refrigerators, and a heat-conducting component connected to the cold head of the refrigerators. The sample carrying and positioning system includes an X / Y / Z / T high-precision displacement mechanism disposed in the vacuum cavity, a sample stage mounted on the motion platform of the X / Y / Z / T high-precision displacement mechanism, and a flexible heat-conducting connector connecting the heat-conducting component and the bottom of the sample stage. The flexible heat-conducting connector is used to transfer cold energy from the heat-conducting component to the sample stage. A probe card bracket is disposed directly above the sample stage.

[0005] In one embodiment, a temperature control system is also included, comprising a heater and a temperature sensor mounted directly below the sample stage, and a temperature controller connected to the heater and the temperature sensor for controlling the temperature of the sample stage.

[0006] A frame is installed at the bottom of the vacuum chamber, and the frame has clearance holes for accommodating the refrigerator. A support frame connects the bottom of the refrigerator to the frame.

[0007] The frame is equipped with a microscope bridge, and the microscope bridge is equipped with an electron microscope.

[0008] The flexible thermally conductive connector is an oxygen-free copper braided strip.

[0009] The top of the vacuum chamber is also provided with an inspection port, and the inspection port is fixed with an inspection cover by bolts.

[0010] The frame is equipped with a counterweight box, which contains several counterweight blocks.

[0011] It also includes an electrical control cabinet, which is connected to the X / Y / Z / T high-precision displacement mechanism via control lines, and is used to control the movement of the X / Y / Z / T high-precision displacement mechanism.

[0012] The top of the rack is also equipped with an operating unit for integrating equipment control buttons.

[0013] In one embodiment, the vacuum pump assembly is connected to the vacuum chamber via a bellows; the helium compressor is connected to the refrigerator via a high-pressure helium pipeline; and the temperature controller is connected to the heater and temperature sensor via a temperature control line.

[0014] Compared with the prior art, the vacuum high and low temperature semi-automatic probe station of the present invention uses at least two units to simultaneously cool and de-temperature the sample, and optimizes the temperature between the probe and the heat transfer cable, so that the sample can reach a lower temperature, making the present application more practical and with optimal performance. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the vacuum high and low temperature semi-automatic probe station of the present invention; Figure 2 A bottom view of the structure of the invention of a vacuum high and low temperature semi-automatic probe station; Figure 3 A front view of the structure of the invention of a vacuum high and low temperature semi-automatic probe station; Figure 4 This is a structural diagram of the inside of a vacuum chamber; Figure 5 A front view of the X / Y / Z / T high-precision displacement mechanism; Figure 6 This is a structural diagram of the sample stage.

[0016] Explanation of reference numerals in the attached figures: 1. Frame; 101. Counterweight box; 102. Support frame; 2. Refrigeration unit; 3. Operating unit; 4. Vacuum chamber; 401. Inspection cover; 402. Transparent sealing plate; 5. Microscope bridge; 6. X / Y / Z / T high-precision displacement mechanism; 7. Sample stage; 8. Heat-conducting components; 9. Heater; 10. Temperature sensor; 11. Probe card holder; 12. Electron microscope. Detailed Implementation

[0017] See also Figures 1-6 This embodiment provides a vacuum high and low temperature semi-automatic probe station, including: The vacuum system includes a vacuum chamber 4 and a vacuum pump assembly connected to the vacuum chamber 4 to establish and maintain a vacuum environment within the vacuum chamber 4. The top of the vacuum chamber 4 is provided with an operation port, which is sealed by a transparent sealing plate 402. The vacuum pump assembly can quickly extract the gas from the vacuum chamber 4 and maintain the vacuum level, reducing the interaction between gas molecules and the sample and eliminating interference from external gases on the test signal. The transparent sealing plate 402 has good light transmittance while ensuring sealing performance, meeting the needs of visual observation. The transparent sealing plate 402 is fixed by bolts. The refrigeration system includes at least two refrigerators 2 installed at the bottom of the vacuum chamber 4, a helium compressor that provides high-pressure helium gas to the refrigerators 2, and a heat-conducting component 8 connected to the cold head of the refrigerators 2. The high-pressure helium gas provided by the helium compressor provides power for the refrigeration cycle of the refrigerators 2. The cooling capacity generated by the refrigerators 2 is efficiently transferred through the heat-conducting component 8. The coordinated operation of multiple refrigerators 2 can increase the refrigeration power, accelerate the cooling speed, and make the cooling capacity distribution more uniform. The sample carrying and positioning system includes an X / Y / Z / T high-precision displacement mechanism 6 housed within a vacuum chamber 4, a sample stage 7 mounted on the motion platform of the X / Y / Z / T high-precision displacement mechanism 6, and a flexible thermally conductive connector connecting the thermally conductive component 8 and the bottom of the sample stage 7. The flexible thermally conductive connector is used to transfer cold energy from the thermally conductive component 8 to the sample stage 7. A probe card bracket 11 is located directly above the sample stage 7. The X / Y / Z / T high-precision displacement mechanism 6 has multi-degree-of-freedom high-precision motion capability, which can accurately adjust the position and orientation of the sample stage 7 to meet the positioning requirements of small samples or high-precision tests. The flexible thermally conductive connector has good thermal conductivity and flexibility. While transferring cold energy, it can deform with the movement of the X / Y / Z / T high-precision displacement mechanism 6 without generating rigid constraints, ensuring the temperature stability of the sample stage 7.

[0018] Furthermore, it also includes a temperature control system, which includes a heater 9 and a temperature sensor 10 installed directly below the sample stage 7, as well as a temperature controller. The temperature controller is connected to the heater 9 and the temperature sensor 10 and is used to control the temperature of the sample stage 7. The temperature sensor 10 collects the temperature signal of the sample stage 7 in real time and feeds it back to the temperature controller. The temperature controller accurately controls the start and stop of the heater 9 and the heating power according to the difference between the preset temperature and the actual temperature. It works in conjunction with the refrigeration system to achieve accurate temperature control over a wide temperature range and avoid the impact of temperature fluctuations on sample performance and test results.

[0019] Furthermore, a frame 1 is installed at the bottom of the vacuum chamber 4. The frame 1 has a clearance hole for accommodating the refrigerator 2. A support frame 102 connects the bottom of the refrigerator 2 to the frame 1. The frame 1 provides stable support for the vacuum chamber 4, improving the overall structural stability of the equipment. The support frame 102 can support the refrigerator 2.

[0020] Furthermore, a microscope bridge 5 is installed on the frame 1, and an electron microscope 12 is installed on the microscope bridge 5; the electron microscope 12 has high-resolution imaging capability, which can clearly display the microstructure of the sample surface and help operators quickly find the target test point.

[0021] Furthermore, the flexible thermally conductive connector is made of oxygen-free copper braided strip; oxygen-free copper has a high thermal conductivity, far superior to ordinary metals, which can effectively reduce the loss during the transfer of cold energy; the braided structure allows the copper strip to deform in multiple directions, and it is not easy to cause permanent damage after deformation, which can not only meet the motion requirements of the X / Y / Z / T high-precision displacement mechanism 6, but also maintain stable thermal conductivity over a long period of time.

[0022] Furthermore, an inspection port is provided on the top of the vacuum chamber 4, and an inspection cover 401 is fixed to the inspection port by bolts.

[0023] Furthermore, a counterweight box 101 is provided inside the frame 1, and several counterweight blocks are placed inside the counterweight box 101. The counterweight blocks are reasonably arranged through the counterweight box 101 to balance the weight distribution of the frame 1 and its components, and reduce the shaking amplitude of the equipment caused by vibration or external force interference.

[0024] Furthermore, it also includes an electrical control cabinet, which is connected to the X / Y / Z / T high-precision displacement mechanism 6 via control lines, and is used to control the movement of the X / Y / Z / T high-precision displacement mechanism 6.

[0025] Furthermore, an operation unit 3 for integrating equipment control buttons is also installed on the top of the rack 1, enabling centralized operation of various equipment functions and simplifying the operation process.

[0026] Furthermore, the vacuum pump unit is connected to the vacuum chamber 4 via a bellows; the helium compressor is connected to the refrigerator 2 via a high-pressure helium pipeline; the temperature controller is connected to the heater 9 and the temperature sensor 10 via a temperature control line; the bellows can absorb vibrations, preventing the vibrations of the vacuum pump unit from being transmitted to the vacuum chamber 4 through the connecting components, thus ensuring the stability of the vacuum chamber 4; the high-pressure helium pipeline has the characteristics of high pressure resistance and good sealing performance, which can prevent helium leakage and ensure that the refrigerator 2 receives a stable supply of high-pressure helium.

[0027] The probe station host is connected to the operation unit 3; the operation unit 3 can accurately transmit the operator's instructions to the probe station host, and the host controls the coordinated operation of each system according to the instructions to complete the test process.

[0028] Open the transparent sealing plate 402 and place the sample to be tested stably on the sample stage 7. Close the transparent sealing plate 402 and tighten it with bolts. Fine-tune the X / Y / Z / T high-precision displacement mechanism 6 to adjust the position of the sample stage 7. Observe the sample position using the electron microscope 12 on the microscope bridge 5. Move the sample roughly to the center of the field of view. Start the vacuum pump group and use the vacuum pipeline connected by the bellows to evacuate the gas in the vacuum chamber 4. If low-temperature testing is required, start the refrigerator 2. The helium compressor provides high-pressure helium to the refrigerator 2, and the cooling energy is transferred to the sample stage 7 through the heat-conducting component 8 and the oxygen-free copper braided strip. If high-temperature testing is required, the temperature controller controls the temperature. Heater 9 is activated and begins to heat up. Temperature data is fed back in real time by temperature sensor 10 to observe the temperature change of sample stage 7. Once the temperature stabilizes at the set value and the fluctuation range meets the requirements, the subsequent testing steps are initiated: the probe card is fixed on the probe card holder 11, and the X / Y / Z / T high-precision displacement mechanism 6 is finely adjusted by operation unit 3. At the same time, the position and angle of sample stage 7 are precisely adjusted by high magnification observation with electron microscope 12, so that the probe slowly approaches and accurately docks with the sample test point to avoid collision and damage between the probe and the sample. During the test, the operator observes the test status in real time through transparent sealing plate 402 and electron microscope 12.

[0029] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of protection of this application is limited to these examples; within the framework of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of one or more embodiments of this application as described above, which are not provided in detail for the sake of brevity.

[0030] One or more embodiments in this application are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of this application. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of one or more embodiments in this application should be included within the protection scope of this application.

Claims

1. A vacuum high and low temperature semi-automatic probe station, characterized in that, include: A vacuum system includes a vacuum chamber (4) and a vacuum pump assembly connected to the vacuum chamber (4) to establish and maintain a vacuum environment within the vacuum chamber (4). The top of the vacuum chamber (4) is provided with an operation port, which is sealed with a transparent sealing plate (402). The refrigeration system includes at least two refrigerators (2) installed at the bottom of the vacuum chamber (4), a helium compressor that provides high-pressure helium to the refrigerators (2), and a heat-conducting component (8) connected to the cold head of the refrigerators (2). The sample carrying and positioning system includes an X / Y / Z / T high-precision displacement mechanism (6) disposed in the vacuum cavity (4), a sample stage (7) mounted on the motion platform of the X / Y / Z / T high-precision displacement mechanism (6), and a flexible heat-conducting connector connecting the heat-conducting component (8) and the bottom of the sample stage (7). The flexible heat-conducting connector is used to transfer cold energy from the heat-conducting component (8) to the sample stage (7). A probe card bracket (11) is disposed directly above the sample stage (7).

2. The vacuum high and low temperature semi-automatic probe station as described in claim 1, characterized in that, It also includes a temperature control system, which includes a heater (9) and a temperature sensor (10) installed directly below the sample stage (7) and a temperature controller connected to the heater (9) and the temperature sensor (10) for controlling the temperature of the sample stage (7).

3. The vacuum high and low temperature semi-automatic probe station as described in claim 1, characterized in that, The bottom of the vacuum chamber (4) is fitted with a frame (1), and the frame (1) has a clearance hole for accommodating the refrigerator (2). The bottom of the refrigerator (2) is connected to the frame (1) by a support frame (102).

4. The vacuum high and low temperature semi-automatic probe station as described in claim 3, characterized in that, A microscope bridge (5) is mounted on the frame (1), and an electron microscope (12) is mounted on the microscope bridge (5).

5. The vacuum high and low temperature semi-automatic probe station as described in claim 1, characterized in that, The flexible thermally conductive connector is an oxygen-free copper braided strip.

6. The vacuum high and low temperature semi-automatic probe station as described in claim 1, characterized in that, The top of the vacuum chamber (4) is also provided with an inspection port, and the inspection port is fixed with an inspection cover (401) by bolts.

7. The vacuum high and low temperature semi-automatic probe station as described in claim 3, characterized in that, The frame (1) is equipped with a counterweight box (101) inside, and a number of counterweight blocks are placed inside the counterweight box (101).

8. The vacuum high and low temperature semi-automatic probe station as described in claim 1, characterized in that, It also includes an electrical control cabinet, which is connected to the X / Y / Z / T high-precision displacement mechanism (6) via a control line and is used to control the movement of the X / Y / Z / T high-precision displacement mechanism (6).

9. The vacuum high and low temperature semi-automatic probe station as described in claim 3, characterized in that, The top of the frame (1) is also equipped with an operating unit (3) for integrating equipment control buttons.

10. The vacuum high and low temperature semi-automatic probe station as described in claim 2, characterized in that, The vacuum pump assembly is connected to the vacuum chamber (4) via a bellows; the helium compressor is connected to the refrigerator (2) via a high-pressure helium pipeline; and the temperature controller is connected to the heater (9) and the temperature sensor (10) via a temperature control line.

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