Ceramic composite material and ceramic nozzle

Abstract

The ceramic composite material is formed by sintering powder, the powder comprises silicon nitride, silicon carbide, a first metal oxide and a second metal oxide, and the weight ratio of the silicon nitride to the silicon carbide is (100: 0.5)-(100: 12). The first metal oxide may be aluminum oxide, and the second metal oxide may be yttrium oxide. In another aspect, the first metal oxide may be magnesium oxide, and the second metal oxide may be cerium oxide. The ceramic composite material can be used for ceramic nozzles.

Description

Technical Field

[0001] This invention relates to ceramic composite materials, and in particular to their application in ceramic nozzles. Background Technology

[0002] Wire bonding is an indispensable bonding technology in the semiconductor packaging industry, including ICs and LEDs. Its purpose is to connect the chip and lead frame using extremely fine (0.8~1.0 mil) metal wires, thereby transmitting the chip's circuit signals to the outside world. Due to its mature process and high wiring flexibility, wire bonding is currently the most widely used bonding technology, accounting for approximately 90% of all packaged products.

[0003] The bonding wire is usually gold wire. Gold has excellent ductility, conductivity, and oxidation resistance. However, gold wire is expensive. If alloy wire is used instead of gold wire, the cost can be reduced by about 60%. However, alloy wire is hard and easily wears down the ceramic tip. Therefore, it is necessary to develop a ceramic material with higher hardness and flexural strength for use in ceramic tips. Summary of the Invention

[0004] The ceramic composite material provided in one embodiment of the present invention is formed by sintering powder, wherein the powder includes silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide, the weight ratio of silicon nitride to silicon carbide is 100:0.5 to 100:12, and the first metal oxide is aluminum oxide or magnesium oxide; when the first metal oxide is aluminum oxide, the second metal oxide is yttrium oxide; and when the first metal oxide is magnesium oxide, the second metal oxide is cerium oxide.

[0005] The ceramic nozzle provided in one embodiment of the present invention comprises the above-mentioned ceramic composite material. Detailed Implementation

[0006] The ceramic composite material provided in one embodiment of the present invention is formed by sintering powder. The powder includes silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide, and the weight ratio of silicon nitride to silicon carbide is 100:0.5 to 100:12, such as 100:0.9, 100:1, 100:2, 100:3, 100:4, 100:5, 100:6, 100:7, 100:8, 100:9, 100:10, 100:11, 100:11.5, or 100:12. If the amount of silicon carbide is too low, the hardness of the ceramic composite material cannot be improved. If the amount of silicon carbide is too high, the hardness of the ceramic composite material is reduced (compared to a ceramic composite material sintered from powder without silicon carbide). The powder is basically composed of silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide, and does not contain other materials commonly found in sintered ceramics such as boron oxide, iron oxide, chromium oxide, or titanium oxide.

[0007] In some embodiments, the first metal oxide is aluminum oxide and the second metal oxide is yttrium oxide. In some embodiments, the first metal oxide is magnesium oxide and the second metal oxide is cerium oxide.

[0008] In some embodiments, the weight ratio of silicon nitride to the first metal oxide is 100:3 to 100:7, such as 100:4, 100:5, or 100:6. If the amount of the first metal oxide is too low or too high, the hardness and flexural strength of the ceramic composite material will be low. In some embodiments, the weight ratio of silicon nitride to the second metal oxide is 100:1 to 100:5, such as 100:1.5, 100:2, 100:3, or 100:4. If the amount of the second metal oxide is too low or too high, the hardness and flexural strength of the ceramic composite material will be low.

[0009] In some embodiments, the powder further includes impurities, including titanium, iron, nickel, zirconium, lanthanum, or combinations thereof. The impurities primarily originate from raw materials of silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide. Theoretically, these raw materials could be further purified to remove impurities, but this purification step would significantly increase the cost of the ceramic composite material. On the other hand, these impurities have a limited impact on the properties of the ceramic composite material, therefore, the raw materials are not intentionally purified to remove them. It is understood that if commercially available raw materials do not contain these impurities, the ceramic composite material of the present invention is also free from these impurities. In this way, the ceramic composite material may be impurity-free.

[0010] In some embodiments, the weight ratio of silicon nitride to impurities is from 100:0.01 to 100:4. If the impurity content is too high, it reduces the properties of the ceramic composite material, such as hardness and flexural strength.

[0011] In some embodiments, the content of the first metal oxide is greater than the content of the impurities, and the content of the second metal oxide is greater than the content of the impurities. For example, if the content of silicon nitride is 100 parts by weight and the content of impurities is as high as 4 parts by weight, then the content of the first metal oxide will necessarily be greater than 4 parts by weight, and the content of the second metal oxide will also necessarily be greater than 4 parts by weight. If the content of the first metal oxide or the content of the second metal oxide is less than the content of the impurities, the properties of the ceramic composite material, such as hardness and flexural strength, may be reduced.

[0012] The ceramic nozzle provided in one embodiment of the present invention comprises the above-mentioned ceramic composite material. Generally, the material used for ceramic nozzles for wire bonding alloy wires needs to have a hardness greater than 1800 Hv and a flexural strength greater than 650 MPa. In one embodiment, the ceramic nozzle can be formed by injection molding as follows: Silicon nitride powder, a first metal oxide powder, a second metal oxide powder, and silicon carbide powder are ball-milled and sieved to obtain a starting powder. The starting powder, binder, and paraffin wax are mixed, dried, and granulated to form a raw material. The molten raw material is injected into a mold and cooled to obtain a green body, and the binder and paraffin wax in the green body are removed (degreasing). The ceramic nozzle is obtained by sintering the degreased green body. The above injection molding process is for illustration only and is not intended to limit the present invention. The present invention can employ other methods and is not limited to injection molding.

[0013] On the other hand, the primary application of the ceramic composite material of the present invention is in ceramic nozzles, but it can also be applied to other products and is not limited to ceramic nozzles. In other words, the ceramic composite material used in other products may have a lower hardness (e.g., below 1800 Hv).

[0014] To make the above-mentioned and other objects, features and advantages of the present invention more apparent and understandable, embodiments are provided below for detailed description:

[0015] Example

[0016] In the following embodiments, the hardness of the samples was measured according to CNS 13983. In the following embodiments, the flexural strength of the samples was measured according to CNS 12701.

[0017] Comparative Example 1-1

[0018] Take 93 parts by weight of silicon nitride powder and 7 parts by weight of magnesium oxide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of polyethyleneimine (PEI, purchased from Nippon Shokubai's EPOMIN SP-200) as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0019] 80 parts by weight of starting powder, 15 parts by weight of polystyrene (TAIRIREX® purchased from Formosa Chemicals and Fiber Corporation) as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding material. The molten material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. It was then heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800°C under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1425 Hv10, and the flexural strength was 478 MPa.

[0020] The injection molding, debinding, and sintering steps described above mainly correspond to the actual product manufacturing process. If injection molding is not used, other steps can be employed to form the product. For example, the starting powder can be directly pressed into a block and then sintered, omitting the binder and paraffin wax. It is understood that the properties of the sample obtained by directly sintering the starting powder, such as hardness and flexural strength, should be similar to those of the sample obtained by the above process.

[0021] Comparative Examples 1-2

[0022] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of magnesium oxide powder, and 2 parts by weight of cerium oxide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0023] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1693 Hv10, and the flexural strength was 581 MPa.

[0024] Comparative Examples 1-3

[0025] Take 93 parts by weight of silicon nitride powder, 3 parts by weight of magnesium oxide powder, and 4 parts by weight of cerium oxide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0026] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was impregnated with n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1596 Hv10, and the flexural strength was 576 MPa.

[0027] Comparative Examples 1-4

[0028] Take 93 parts by weight of silicon nitride powder, 1 part by weight of magnesium oxide powder, and 6 parts by weight of cerium oxide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0029] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1316 Hv10, and the flexural strength was 421 MPa.

[0030] Example 1

[0031] As can be seen from Comparative Examples 1-1 to 1-4, the sample sintered from 93 parts by weight of silicon nitride powder, 5 parts by weight of magnesium oxide powder, and 2 parts by weight of cerium oxide powder (Comparative Example 1-2) exhibits higher hardness and flexural strength. Therefore, silicon carbide powder was added to this composition to further adjust the sample properties.

[0032] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of magnesium oxide powder, 2 parts by weight of cerium oxide powder, and 5 parts by weight of silicon carbide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0033] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1823 Hv10, and the flexural strength was 638 MPa.

[0034] Comparative Example 2-1

[0035] Take 93 parts by weight of silicon nitride powder and 7 parts by weight of alumina powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0036] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1672 Hv10, and the flexural strength was 648 MPa.

[0037] Comparative Example 2-2

[0038] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of alumina powder, and 2 parts by weight of yttrium oxide, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0039] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1812 Hv10, and the flexural strength was 674 MPa.

[0040] Comparative Examples 2-3

[0041] Take 93 parts by weight of silicon nitride powder, 3 parts by weight of alumina powder, and 4 parts by weight of yttrium oxide, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0042] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was impregnated with n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1705 Hv10, and the flexural strength was 623 MPa.

[0043] Comparative Examples 2-4

[0044] Take 93 parts by weight of silicon nitride powder, 1 part by weight of alumina powder, and 6 parts by weight of yttrium oxide, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0045] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1546 Hv10, and the flexural strength was 579 MPa.

[0046] Example 2-1

[0047] As shown in Comparative Examples 2-1 to 2-4, the sample sintered from 93 parts by weight of silicon nitride powder, 5 parts by weight of alumina powder, and 2 parts by weight of yttrium oxide powder (Comparative Example 2-2) exhibits higher hardness and flexural strength. Therefore, silicon carbide powder was added to this composition to further adjust the sample properties.

[0048] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of alumina powder, 2 parts by weight of yttrium oxide, and 1 part by weight of silicon carbide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0049] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1892 Hv10, and the flexural strength was 703 MPa.

[0050] Example 2-2

[0051] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of alumina powder, 2 parts by weight of yttrium oxide, and 5 parts by weight of silicon carbide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0052] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 2460 Hv10, and the flexural strength was 762 MPa.

[0053] Example 2-3

[0054] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of alumina powder, 2 parts by weight of yttrium oxide, and 10 parts by weight of silicon carbide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0055] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. Then, it was heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The hardness of this sample was 1832 Hv10, and the flexural strength was 678 MPa.

[0056] Comparative Examples 2-5

[0057] Take 93 parts by weight of silicon nitride powder, 5 parts by weight of alumina powder, 2 parts by weight of yttrium oxide, and 15 parts by weight of silicon carbide powder, mix them, add 50 mL of anhydrous ethanol solvent, and then add 0.5 parts by weight of PEI as a dispersant. Place the mixture into a ball mill jar. Add 10 mm diameter tungsten carbide grinding balls to the ball mill jar and ball mill for 8 hours. Place the mixture in an oven at 120°C until the powder is completely dry, then grind and sieve to obtain a starting powder with uniform particle size.

[0058] 80 parts by weight of starting powder, 15 parts by weight of polystyrene as a binder, and 5 parts by weight of paraffin wax were uniformly mixed, dried, and granulated to obtain a high-flowability injection molding raw material. The molten raw material was injected into a mold, cooled, and solidified to obtain a green body. The green body was immersed in n-heptane solvent for 4 hours to remove most of the paraffin wax and binder. It was then heated in a degreasing furnace for 6 hours to thermally decompose the remaining paraffin wax and binder (degreasing). Finally, the degreased green body was heated to 1800℃ under nitrogen atmosphere and sintered for 12 hours to obtain the sample. The sample had a hardness of 1657 Hv10 and a flexural strength of 646 MPa. As can be seen from the above, adding too much silicon carbide will actually reduce the hardness and flexural strength of the sample.

[0059] It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A ceramic composite material, formed by sintering a powder, The powder comprises silicon nitride, silicon carbide, a first metal oxide, and a second metal oxide, wherein the weight ratio of silicon nitride to silicon carbide is 100:0.5 to 100:12, and the first metal oxide is aluminum oxide or magnesium oxide. When the first metal oxide is aluminum oxide, the second metal oxide is yttrium oxide; and When the first metal oxide is magnesium oxide, the second metal oxide is cerium oxide.

2. The ceramic composite material according to claim 1, wherein the weight ratio of silicon nitride to the first metal oxide is 100:3 to 100:

7.

3. The ceramic composite material according to claim 1, wherein the weight ratio of silicon nitride to the second metal oxide is 100:1 to 100:

5.

4. The ceramic composite material according to claim 1, wherein the powder further includes impurities, and the impurities include titanium, iron, nickel, zirconium, lanthanum, or a combination thereof.

5. The ceramic composite material according to claim 4, wherein the weight ratio of silicon nitride to the impurity is from 100:0.01 to 100:

4.

6. The ceramic composite material according to claim 4, wherein the content of the first metal oxide is greater than the content of the impurities, and the content of the second metal oxide is greater than the content of the impurities.

7. A ceramic nozzle comprising the ceramic composite material as described in claim 1.