Water-cooling conducting ring structure and magnetron sputtering film deposition equipment

Abstract

The invention discloses a water-cooling conducting ring structure and magnetron sputtering film deposition equipment, the water-cooling conducting ring structure comprises a rectangular frame, the rectangular frame comprises four splicing strips and four splicing parts, every two adjacent splicing strips are connected and fixed through the corresponding splicing part, cooling water channels are formed in the splicing strips in the length direction of the splicing strips, and the splicing strips are connected through the splicing parts; transition water channels are formed in the splicing parts and communicate with the cooling water channels of every two adjacent splicing strips, so that an annular circulating water channel is formed; the electric connector is connected to the rectangular frame and provided with a water inlet channel and a water outlet channel which are communicated with the circulating water channel. According to the water-cooling conducting ring structure provided by the embodiment of the invention, the four splicing strips are arranged, and the splicing parts are utilized to splice the four splicing strips, so that the water-cooling conducting ring structure is made into a spliced structure, and compared with integral processing, the water-cooling conducting ring structure not only is more convenient to process and manufacture, but also is lower in cost.

Description

Technical Field

[0001] This invention relates to the field of magnetron sputtering, and particularly to a water-cooled conductive ring structure and a magnetron sputtering thin film deposition apparatus. Background Technology

[0002] Magnetron sputtering, as a highly efficient thin-film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of electric and magnetic fields. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which deposit on the substrate to form a film. In semiconductors, with each generation of devices increasing circuit density, it is necessary to coat the surface and walls of substrates with high aspect ratio holes. When coating substrates with deep holes, it is desirable that the direction of the atoms and ions moving from the target surface to the substrate surface is nearly perpendicular to the substrate surface. This prevents the holes from being sealed before the bottom is fully coated, leading to poor coating quality. Therefore, the magnetic fields generated by the upper and lower coils are needed to correct the ion trajectory. Since the atoms being coated are not affected by the magnetic and electric fields, a collimator is needed to filter out atoms that do not meet the directional requirements. Furthermore, in some processes, the collimator can be connected to a pulsed power supply to correct ion trajectories. In existing technologies, the collimator is indirectly energized and cooled by water through a water-cooled conductive ring. However, existing water-cooled conductive rings are usually machined in one piece, which is difficult to manufacture and very expensive. Summary of the Invention

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a water-cooled conductive ring structure that is easy to manufacture and has low cost.

[0004] The present invention also proposes a magnetron sputtering thin film deposition apparatus having the above-mentioned water-cooled conductive ring structure.

[0005] According to a first aspect of the present invention, a water-cooled conductive ring structure includes:

[0006] A rectangular frame includes four splicing strips and four splicing parts. Two adjacent splicing strips are connected and fixed through the splicing parts. Cooling water channels are arranged inside the splicing strips along their own length direction. Transition water channels are arranged inside the splicing parts. The transition water channels connect the cooling water channels of two adjacent splicing strips, thereby forming a ring-shaped circulating water channel.

[0007] An electrical connector is attached to the rectangular frame, and the electrical connector is provided with an inlet channel and an outlet channel that connect to the circulating water channel.

[0008] The water-cooled conductive ring structure according to embodiments of the present invention has at least the following beneficial effects:

[0009] By setting four splicing strips and using splicing parts to splice the four splicing strips, the water-cooled conductive ring structure can be made into a spliced ​​structure. Compared with one-piece processing, this setting is not only more convenient to process and manufacture, but also lower in cost.

[0010] According to some embodiments of the present invention, at least one of the splicing portion and the splicing strip is provided with an extension along the length direction of the splicing strip, and the extension is fitted and connected to the upper end and / or lower end of the other.

[0011] According to some embodiments of the present invention, two extension portions are provided at one end of the splicing portion near the splicing strip, and the two extension portions are respectively attached to the upper end and the lower end of the splicing strip.

[0012] According to some embodiments of the present invention, the extension portion is provided with a first positioning protrusion at one end of the splicing strip, and the splicing strip is provided with a first positioning recess. The first positioning protrusion is fitted into the first positioning recess to at least limit the movement of the splicing portion relative to the splicing strip along the length direction of the splicing strip.

[0013] According to some embodiments of the present invention, the splicing part includes:

[0014] Corner piece, the two ends of which abut against the ends of two adjacent splicing strips;

[0015] Two fixing plates are provided at the upper and lower ends of the corner piece, and the two ends of the fixing plates extend to the upper or lower ends of the two adjacent splicing strips to form the extension.

[0016] According to some embodiments of the present invention, the corner piece and the fixing plate are respectively provided with a matching second positioning protrusion and a second positioning recess on their opposing sides.

[0017] According to some embodiments of the present invention, the outer side of the splicing portion is provided with a first arc-shaped transition surface and the inner side is provided with a second arc-shaped transition surface. The first arc-shaped transition surface is flush with the outer end faces of two adjacent splicing strips, and the second arc-shaped transition surface is flush with the inner end faces of two adjacent splicing strips.

[0018] According to some embodiments of the present invention, the transition channel includes a first segment and a second segment along its length, the first segment and the second segment respectively connecting an adjacent cooling channel, and the first segment and the second segment being distributed at an obtuse angle.

[0019] According to some embodiments of the present invention, a sealing ring is provided at the junction of the transition water channel and the cooling water channel.

[0020] According to a second aspect of the present invention, a magnetron sputtering thin film deposition apparatus includes:

[0021] Collimator;

[0022] The water-cooled conductive ring structure described in the first aspect embodiment above is disposed on the periphery of the collimator.

[0023] The magnetron sputtering thin film deposition apparatus according to embodiments of the present invention has at least the following beneficial effects:

[0024] By adopting the water-cooled conductive ring structure of the first aspect embodiment of the present invention, the water-cooled conductive ring structure is provided with four splicing strips, and the four splicing strips are spliced ​​together by the splicing part, thereby making the water-cooled conductive ring structure into a spliced ​​structure. Compared with integral processing, it is not only more convenient to process and manufacture, but also lower in cost.

[0025] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0027] Figure 1 This is a schematic diagram of the installation structure of the water-cooled conductive ring structure according to an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the internal structure of the water-cooled conductive ring structure according to an embodiment of the present invention;

[0029] Figure 3 This is an exploded view of the installation structure of the splicing strip and splicing part according to an embodiment of the present invention.

[0030] Icon labels:

[0031] Rectangular frame 100, splicing strip 110, cooling water channel 111, first positioning recess 112, splicing part 120, transition water channel 121, first positioning protrusion 122, first arc-shaped transition surface 123, second arc-shaped transition surface 124, first section 125, second section 126, corner piece 130, second positioning recess 131, fixing plate 140, second positioning protrusion 141, sealing ring 150, first screw 160, second screw 170;

[0032] Electrical connector 200, water inlet 201, water outlet 202. Detailed Implementation

[0033] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0034] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0035] In the description of this invention, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features or their sequential relationship.

[0036] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0037] When coating deep-hole substrates, it is desirable for the direction of the deposited atoms and ions from the target surface to the substrate surface to be nearly perpendicular to the substrate surface. This prevents the deep holes from being sealed before the coating is fully applied, leading to poor coating results. Therefore, a magnetic field is needed to correct the ion trajectory. Since the deposited atoms are unaffected by magnetic and electric fields, a collimator is required to filter out atoms that do not meet the directional requirements. In existing technologies, the collimator is indirectly energized and cooled by water via a water-cooled conductive ring. However, existing water-cooled conductive rings are usually machined in a single piece, which is difficult and costly to manufacture.

[0038] To address these issues, this invention proposes a water-cooled conductive ring structure and a magnetron sputtering thin film deposition apparatus, which can effectively improve the aforementioned problems.

[0039] The following is for reference. Figures 1 to 3 The invention describes a water-cooled conductive ring structure and a magnetron sputtering thin film deposition apparatus according to embodiments of the present invention.

[0040] According to a first aspect of the present invention, a water-cooled conductive ring structure includes a rectangular frame 100 and an electrical connector 200.

[0041] The rectangular frame 100 includes four splicing strips 110 and four splicing parts 120. Adjacent splicing strips 110 are connected and fixed by splicing parts 120. The four splicing parts 120 are used to splice and combine the four splicing strips 110 to form a spliced ​​structure. Cooling water channels 111 are arranged inside the splicing strips 110 along their own length direction. Transition water channels 121 are arranged inside the splicing parts 120. The transition water channels 121 connect the cooling water channels 111 of two adjacent splicing strips 110. The cooling water channels 111 of the four splicing strips 110 and the transition water channels 121 of the four splicing parts 120 together form a ring-shaped circulating water channel.

[0042] Electrical connector 200 is connected to rectangular frame 100. Electrical connector 200 has an inlet channel 201 and an outlet channel 202 that connect to the circulating water channel for inputting and outputting cooling water to and from the circulating water channel. Specifically, electrical connector 200 can connect a cable to supply power to rectangular frame 100. Electrical connector 200 is connected to one of the four splicing strips 110. The cooling water channel 111 of the splicing strip 110 connected to electrical connector 200 is divided into two sections. These two sections of cooling water channel 111 are respectively connected to the inlet channel 201 and the outlet channel 202 on electrical connector 200. In addition, splicing strip 110 and splicing part 120 are made of materials with high electrical conductivity and high thermal conductivity, such as high-purity copper, silver and other metals.

[0043] The water-cooled conductive ring structure of this invention is made into a spliced ​​structure by setting four splicing strips 110 and splicing the four splicing strips 110 together using splicing part 120. This setting is not only more convenient to process and manufacture than one-piece processing, but also lower in cost.

[0044] Reference Figure 1 and Figure 3 As shown, in some embodiments of the present invention, at least one of the splicing portion 120 and the splicing strip 110 is provided with an extension along the length direction of the splicing strip 110. The extension is fitted and connected to the upper end and / or lower end of the other. Specifically, this includes the following situations: firstly, one extension is provided on the splicing portion 120 near the end of the splicing strip 110 to fit and connect with the upper end or lower end of the splicing strip 110; secondly, two extensions are provided on the splicing portion 120 near the end of the splicing strip 110 to respectively fit and connect with the upper end of the splicing strip 110. The upper and lower ends of 10 are fitted together. Thirdly, an extension is provided on one end of the splicing strip 110 near the splicing part 120 to fit and connect with the upper or lower end of the splicing part 120. Fourthly, two extensions are provided on one end of the splicing strip 110 near the splicing part 120 to fit and connect with the upper and lower ends of the splicing part 120 respectively. By setting the extension, a better installation position can be provided to set the connector to connect the splicing strip 110 and the splicing part 120, which facilitates the connection between the two.

[0045] In this embodiment, to make the connection between the splicing strip 110 and the splicing part 120 more stable, the second structural form described above is adopted. Two extensions are provided at one end of the splicing part 120 near the splicing strip 110. The two extensions are respectively attached to the upper and lower ends of the splicing strip 110, thereby clamping the splicing strip 110. In a further embodiment of the present invention, a first positioning protrusion 122 is provided at one end of the extension attached to the splicing strip 110, and a first positioning recess 112 is provided on the splicing strip 110. The first positioning protrusion 122 fits into the first positioning recess 112 to at least limit the movement of the splicing part 120 relative to the splicing strip 110 along the length direction of the splicing strip 110. It can be understood that since the water-cooled conductive ring structure needs to be energized, it is generally made of materials with high conductivity and high thermal conductivity, such as high-purity copper, silver and other metals. That is to say, the splicing strip 110 and the splicing part 120 need to be made of the above materials. Most of the above materials are relatively soft, while the splicing strip 110 Since the splicing strip 10 and the splicing part 120 need to withstand the hydraulic tension of the cooling water in the circulating water channel, they also need to have a certain structural strength. Therefore, in this embodiment, a first positioning protrusion 122 and a first positioning recess 112 are provided. The first positioning protrusion 122 is adapted to be embedded in the first positioning recess 112 so as to position the splicing strip 110 and the splicing part 120 relative to each other along the length direction of the splicing strip 110. The connection strength between the splicing strip 110 and the splicing part 120 is improved by the cooperation of the first positioning protrusion 122 and the first positioning recess 112. In this way, the connector between the splicing strip 110 and the splicing part 120 can only play a fixing role without having to withstand hydraulic tension. Specifically, the connector between the splicing strip 110 and the extension of the splicing part 120 can be a first screw 160. That is, the extension of the splicing part 120 and the splicing strip 110 are connected by the first screw 160. The first screw 160 is vertically distributed. Since the first screw 160 is distributed perpendicular to the length direction of the splicing strip 110, the hydraulic tension can be borne by the first positioning protrusion 122 and the first positioning recess 112. The first screw 160 and the threaded hole that mates with it do not need to bear the hydraulic tension of the cooling water in the circulating water channel, thus avoiding easy damage to the screw threads and reducing the service life.

[0046] It is conceivable that the first positioning protrusion 122 and the first positioning recess 112 can have various structural forms, such as in this embodiment, like Figure 3 As shown, the first positioning protrusion 122 is configured as an elongated protrusion, distributed perpendicular to the length direction of the splicing strip 110, while the first positioning recess 112 is configured as an elongated groove adapted to it; or, for example, the first positioning protrusion 122 is configured as a cylindrical protrusion, distributed perpendicular to the length direction of the splicing strip 110, while the first positioning recess 112 is configured as a cylindrical hole adapted to it, or other structural forms that can meet the conditions are adopted, which will not be listed here.

[0047] Reference Figure 1 and Figure 3 As shown, in some embodiments of the present invention, the splicing portion 120 includes a corner piece 130 and two fixing plates 140. The two ends of the corner piece 130 abut against the ends of two adjacent splicing strips 110, and a transition channel 121 is provided inside the corner piece 130; the two fixing plates 140 are disposed at the upper and lower ends of the corner piece 130, and the two ends of the fixing plates 140 extend to the upper or lower ends of two adjacent splicing strips 110 to form extension portions. The two ends of the fixing plate 140 located at the upper end of the corner piece 130 extend to the upper ends of two adjacent splicing strips 110, and the two ends of the fixing plate 140 located at the lower end of the corner piece 130 extend to the lower ends of two adjacent splicing strips 110, thereby forming four extension portions through the two fixing plates 140. In this embodiment, each of the two fixing plates 140 has two first positioning protrusions 122 on its opposite sides to cooperate with the first positioning recess 112 on the splicing strip 110. Both fixing plates 140 are connected to the splicing strip 110 by first screws 160.

[0048] Reference Figure 3 As shown, in some embodiments of the present invention, to facilitate the assembly and disassembly of the splicing part 120 and the splicing strip 110, both fixing plates 140 are detachably connected to the corner piece 130. During assembly, the corner piece 130 can be connected to one of the fixing plates 140 first, and then this fixing plate 140 can be connected to two adjacent splicing strips 110 by the first screw 160, while the first positioning protrusion 122 of this fixing plate 140 is embedded in the corresponding first positioning recess 112. Then, the other fixing plate 140 is connected to the corner piece 130 and the two adjacent splicing strips 110. Disassembly is performed by reversing the operation. Specifically, both fixing plates 140 are connected to the corner piece 130 by the second screw 170, which are vertically distributed. The screw 170 connects the corner piece 130 and the fixing plate 140, facilitating the connection. Furthermore, the corner piece 130 and the fixing plate 140 have matching second positioning protrusions 141 and second positioning recesses 131 on their opposing sides. The second positioning protrusion 141 is embedded in the second positioning recess 131. Similarly, with the matching structure of the second positioning protrusion 141 and the second positioning recess 131, the second positioning protrusion 141 and the second positioning recess 131 can bear the hydraulic tension, improving the connection strength between the fixing plate 140 and the corner piece 130. The second screw 170 only serves a connecting and fixing function, thus preventing the second screw 170 and its mating threaded hole from bearing the hydraulic tension of the cooling water in the circulating water channel, and preventing the screw threads from being easily damaged by hydraulic tension. In this embodiment, the second positioning recess 131 has a fan-shaped structure, and the second positioning protrusion 141 is located on the fixing plate 140 and matches the shape and size of the second positioning recess 131.

[0049] Reference Figure 2As shown, in some embodiments of the present invention, the outer side of the splicing portion 120 is provided with a first arc-shaped transition surface 123, and the inner side of the splicing portion 120 is provided with a second arc-shaped transition surface 124. The first arc-shaped transition surface 123 is flush with the outer end faces of two adjacent splicing strips 110, and the second arc-shaped transition surface 124 is flush with the inner end faces of two adjacent splicing strips 110. That is, the splicing portion 120 has a rounded corner structure, which, compared with a right-angle structure, can avoid stress concentration and easy damage. Specifically, in this embodiment, the first arc-shaped transition surface 123 and the second arc-shaped transition surface 124 are respectively provided on the outer and inner sides of the corner piece 130.

[0050] Reference Figure 2 As shown, in some embodiments of the present invention, the transition water channel 121 includes a first segment 125 and a second segment 126 along its length. The first segment 125 and the second segment 126 are respectively connected to an adjacent cooling water channel 111. The first segment 125 and the second segment 126 are distributed at an obtuse angle. Specifically, the first segment 125 and the second segment 126 are both inclined inward relative to the corresponding cooling water channel 111, that is, the first segment 125 and the second segment 126 intersect at an angle. It can be understood that, for cost, installation and other factors, the sidewall of the circulating water channel is designed to be relatively thin. If the first segment 125 and the second segment 126 of the transition water channel 121 are intersected at a right angle, it is easy to break the sidewall of the water channel when drilling a section of the water channel. Therefore, in this embodiment, the first segment 125 and the second segment 126 are distributed at an obtuse angle to reduce the risk of breaking the sidewall when drilling a section of the water channel.

[0051] Reference Figure 2 and Figure 3 As shown, in some embodiments of the present invention, a sealing ring 150 is provided at the junction of the transition water channel 121 and the cooling water channel 111. The sealing ring 150 is used to prevent the cooling water in the circulating water channel from leaking. Specifically, a groove is provided on the end face of the splicing strip 110 in the length direction, and the sealing ring 150 is embedded in the groove to facilitate the positioning and installation of the sealing ring 150.

[0052] According to a second aspect of the present invention, a magnetron sputtering thin film deposition apparatus includes a collimator and a water-cooled conductive ring structure as described in the first aspect of the present invention. The water-cooled conductive ring structure is disposed on the periphery of the collimator, and the collimator is indirectly energized and cooled by water through the water-cooled conductive ring structure.

[0053] The magnetron sputtering thin film deposition equipment adopts the water-cooled conductive ring structure of the first aspect embodiment of the present invention. The water-cooled conductive ring structure is provided with four splicing strips 110, and the four splicing strips 110 are spliced ​​together by splicing part 120, so that the water-cooled conductive ring structure is made into a spliced ​​structure. Compared with the one-piece processing, it is not only more convenient to process and manufacture, but also has a lower cost.

[0054] It should be noted that since the magnetron sputtering thin film deposition equipment can adopt all the technical solutions of the water-cooled conductive ring structure of the first aspect embodiment, it has at least all the beneficial effects brought about by the technical solutions of the first aspect embodiment. These additional beneficial effects will not be elaborated here.

[0055] It is understood that other configurations and operations of the magnetron sputtering thin film deposition apparatus according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0056] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A water-cooled conductive ring structure, characterized in that, include: A rectangular frame includes four splicing strips and four splicing parts. Two adjacent splicing strips are connected and fixed through the splicing parts. Cooling water channels are arranged inside the splicing strips along their own length direction. Transition water channels are arranged inside the splicing parts. The transition water channels connect the cooling water channels of two adjacent splicing strips, thereby forming a ring-shaped circulating water channel. An electrical connector is attached to the rectangular frame, and the electrical connector is provided with an inlet channel and an outlet channel that connect to the circulating water channel.

2. The water-cooled conductive ring structure according to claim 1, characterized in that: Along the length of the splicing strip, at least one of the splicing portion and the splicing strip has an extension portion, which is fitted and connected to the upper end and / or lower end of the other.

3. The water-cooled conductive ring structure according to claim 2, characterized in that: Two extensions are provided at one end of the splicing part near the splicing strip, and the two extensions are respectively attached to the upper and lower ends of the splicing strip.

4. The water-cooled conductive ring structure according to claim 3, characterized in that: The extension portion is provided with a first positioning protrusion at one end of the splicing strip, and the splicing strip is provided with a first positioning recess. The first positioning protrusion is fitted into the first positioning recess to at least limit the movement of the splicing portion relative to the splicing strip along the length direction of the splicing strip.

5. The water-cooled conductive ring structure according to claim 3, characterized in that: The splicing part includes: Corner piece, the two ends of which abut against the ends of two adjacent splicing strips; Two fixing plates are provided at the upper and lower ends of the corner piece, and the two ends of the fixing plates extend to the upper or lower ends of the two adjacent splicing strips to form the extension.

6. The water-cooled conductive ring structure according to claim 5, characterized in that: The corner piece and the fixing plate are respectively provided with a matching second positioning protrusion and a second positioning recess on their opposite sides.

7. The water-cooled conductive ring structure according to claim 1, characterized in that: The outer side of the splicing part is provided with a first arc-shaped transition surface, and the inner side is provided with a second arc-shaped transition surface. The first arc-shaped transition surface is flush with the outer end face of the two adjacent splicing strips, and the second arc-shaped transition surface is flush with the inner end face of the two adjacent splicing strips.

8. The water-cooled conductive ring structure according to claim 7, characterized in that: The transition waterway includes a first segment and a second segment along its length. The first segment and the second segment are respectively connected to an adjacent cooling waterway. The first segment and the second segment are distributed at an obtuse angle.

9. The water-cooled conductive ring structure according to claim 1, characterized in that: A sealing ring is provided at the junction of the transition water channel and the cooling water channel.

10. A magnetron sputtering thin film deposition apparatus, characterized in that, include: Collimator; The water-cooled conductive ring structure according to any one of claims 1 to 9, wherein the water-cooled conductive ring structure is disposed on the periphery of the collimator.

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