Burning method and burning device of adjustable reference source

Abstract

The invention provides a burning adjustment method and a burning adjustment device of an adjustable reference source. The adjustable reference source comprises an anode, a reference voltage output end, a plurality of divider resistors, a plurality of burning resistors and a plurality of fuses; the divider resistors and the burning and adjusting resistors are connected between the anode and the reference voltage output end in series, and each burning and adjusting resistor is connected with one fuse in parallel. The burning adjustment method of the adjustable reference source comprises the following steps: providing constant current for the adjustable reference source, and measuring a test voltage value of a reference voltage output end; according to the test voltage value, the target voltage value and the adjusting voltage corresponding to each burning and adjusting resistor, determining a target fuse wire needing to be fused; for each target fuse, determining the positions of at least two melting points of the target fuse; all the melting points of the same target fuse are arranged in the width direction of the target fuse; and for each target fuse, controlling the laser to sequentially irradiate each melting point of the target fuse so as to fuse the target fuse.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to a method and apparatus for adjusting an adjustable reference source. Background Technology

[0002] Adjustable shunt reference sources are widely used to provide a stable reference voltage. The chip of an adjustable shunt reference source has an aluminum film layer, which includes electrodes for bonding to the leads of the lead frame and multiple fuses, each fuse connected in parallel with a resistor.

[0003] When adjusting the adjustable shunt reference source, at least one fuse can be blown. For thicker aluminum films (e.g., thickness greater than or equal to 1.2 μm), a high current pulse is typically applied to the electrodes connected to both ends of the fuse to blow it. The electrodes connected to both ends of the fuse occupy a large area, which limits the number of fuses that can be installed on the aluminum film, thus hindering the improvement of adjustment accuracy. Summary of the Invention

[0004] This application provides a method and apparatus for adjusting an adjustable reference source.

[0005] According to a first aspect of the embodiments of this application, a method for adjusting an adjustable reference source is provided. The adjustable reference source includes an anode, a reference voltage output terminal, a plurality of voltage divider resistors, a plurality of adjusting resistors, and a plurality of fuses; the plurality of voltage divider resistors and the plurality of adjusting resistors are connected in series between the anode and the reference voltage output terminal, and each adjusting resistor is connected in parallel with one of the fuses; the method for adjusting the adjustable reference source includes:

[0006] A constant current is supplied to the adjustable reference source, and the test voltage value at the reference voltage output terminal is measured;

[0007] Based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the heating resistors, determine the target fuse that needs to be blown;

[0008] For each target fuse, the positions of at least two melting points of the target fuse are determined; all melting points of the same target fuse are arranged in the width direction of the target fuse;

[0009] For each target fuse, the laser is controlled to sequentially irradiate each melting point of the target fuse, causing the target fuse to melt and break.

[0010] In one embodiment, the distance between two adjacent melting points and the distance between the opposite edges of the target fuse in the width direction and their adjacent melting points are the same.

[0011] In one embodiment, in the width direction of the target fuse, the distance between two adjacent melting points and the distance between the opposite edges of the target fuse in the width direction and their adjacent melting points are both smaller than the laser spot size.

[0012] In one embodiment, the target voltage value includes a first target voltage threshold, a second target voltage threshold, and a target voltage value, wherein the first target voltage threshold is less than the second target voltage threshold, and the target voltage value is the average of the first target voltage threshold and the second target voltage threshold; the sum of the adjustment voltages corresponding to all the adjustment resistors is the maximum adjustment voltage;

[0013] The step of determining the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors includes:

[0014] When the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, all fuses are determined to be target fuses.

[0015] In one embodiment, when the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, the target fuse to be blown is determined based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors. This further includes: determining whether the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value.

[0016] When the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value, all fuses are determined to be target fuses.

[0017] In one embodiment, the sum of the adjustment voltages corresponding to all the adjustment resistors is the maximum adjustment voltage; after providing a constant current to the adjustable reference source and measuring the test voltage value at the reference voltage output terminal, the adjustment method of the adjustable reference source further includes:

[0018] Determine whether the difference between the target voltage value and the test voltage value is greater than the sum of the maximum adjustment voltage and the preset voltage value;

[0019] When the difference between the target voltage value and the test voltage value is greater than the sum of the maximum adjustment voltage and the preset voltage value, the adjustable reference source is determined to be defective and will not be adjusted.

[0020] In one embodiment, the target voltage value includes a first target voltage threshold, a second target voltage threshold, and a target voltage value, wherein the first target voltage threshold is less than the second target voltage threshold, and the target voltage value is the midpoint between the first target voltage threshold and the second target voltage threshold; the sum of the adjustment voltages corresponding to all the adjusting resistors is the maximum adjustment voltage;

[0021] The step of determining the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors includes:

[0022] When the difference between the target voltage value and the test voltage value is less than the maximum adjustment voltage, a target fuse is determined from all fuses based on the difference between the target voltage value and the test voltage value and the adjustment voltage corresponding to each of the adjustment resistors; the absolute value of the difference between the test voltage value and the sum of the adjustment voltages corresponding to all target fuses and the target voltage value is a first absolute value, and the absolute value of the difference between the test voltage value and the sum of the adjustment voltages corresponding to all fuses in the non-target fuse group and the target voltage value is a second absolute value, wherein the first absolute value is less than or equal to each of the second absolute values; the non-target fuse group includes one or more fuses, and the fuses in the non-target fuse group are not all the same as all the target fuses.

[0023] In one embodiment, any two of the plurality of adjustable resistors have different adjustment voltages.

[0024] In one embodiment, the number of the adjusting resistors is n; the adjusting voltages corresponding to the n adjusting resistors are respectively 2 0 mV, 2mV, 2 2 mV……and 2 n-1 mV, where n is a positive integer greater than 3.

[0025] In one embodiment, the target voltage value includes a first target voltage threshold and a second target voltage threshold, wherein the first target voltage threshold is less than the second target voltage threshold;

[0026] After providing a constant current to the adjustable reference source and measuring the test voltage value at the reference voltage output terminal, the adjustment method of the adjustable reference source further includes: if the test voltage value is between the first target voltage threshold and the second target voltage threshold, then it is determined that all fuses do not need to be blown.

[0027] And / or,

[0028] After controlling the laser to sequentially irradiate each melting point of the target fuse to melt it for each target fuse, the method for adjusting the adjustable reference source further includes:

[0029] A constant current is supplied to the adjustable reference source to measure the reference voltage value at the reference voltage output terminal;

[0030] Determine whether the reference voltage value is between the first target voltage threshold and the second target voltage threshold;

[0031] When the reference voltage value is determined to be between the first target voltage threshold and the second target voltage threshold, the adjustable reference source is determined to be a good product; when the reference voltage value is determined to be less than the first target voltage threshold or greater than the second target voltage threshold, the adjustable reference source is determined to be a defective product.

[0032] According to a second aspect of the embodiments of this application, an adjustable reference source burn-in apparatus is provided, including a controller, the controller being used for the above-described adjustable reference source burn-in method.

[0033] The main technical effects achieved by the embodiments of this application are:

[0034] The firing method and firing apparatus for an adjustable reference source provided in this application determine at least two melting points of the target fuse that needs to be melted, and use a laser to sequentially irradiate all melting points of the target fuse to melt it. Even if the thickness of the fuse is large, the fuse can be melted by laser irradiation. Therefore, the aluminum film layer does not need to be provided with electrodes connected to the fuse to apply high current pulses. The aluminum film layer has more area to set more fuses. During the firing process, the target fuse with higher matching degree can be selected according to the test voltage value, the target voltage value and the adjustment voltage corresponding to each firing resistor, which helps to improve the firing accuracy and firing range. Attached Figure Description

[0035] Figure 1 This is a circuit schematic diagram of an adjustable reference source provided in an exemplary embodiment of this application;

[0036] Figure 2 This is a partial structural schematic diagram of the metal layer of an adjustable reference source provided in an exemplary embodiment of this application;

[0037] Figure 3 This is a partial structural schematic diagram of the metal layer of an adjustable reference source provided in an exemplary embodiment of this application;

[0038] Figure 4 This is a flowchart of an adjustable reference source control method provided in an exemplary embodiment of this application;

[0039] Figure 5 This is a schematic diagram of the structure of the target fuse of the adjustable reference source provided in an exemplary embodiment of this application. Specific Implementation

[0040] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0041] The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The singular forms “a,” “the,” and “the” used in this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0042] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0043] This application provides a method for adjusting an adjustable reference source. For example... Figure 1 As shown, the adjustable reference source includes an anode 10, a cathode (not shown) reference voltage output terminal 30, multiple voltage divider resistors R11 to R1n, multiple adjustable resistors R1 to R8, and multiple fuses 40; the multiple voltage divider resistors R11 to R1n and the multiple adjustable resistors R1 to R8 are connected in series between the anode 10 and the reference voltage output terminal 30, and each adjustable resistor is connected in parallel with one fuse 40.

[0044] In one embodiment, the adjusting resistor may include one resistive element, or two or more resistive elements connected in series or in parallel.

[0045] In one embodiment, the plurality of voltage divider resistors R11 to R1n are adjacent to each other, and the plurality of adjustable resistors R1 to R8 are adjacent to each other. In other embodiments, the voltage divider resistors and adjustable resistors can be interleaved.

[0046] In one embodiment, the adjustable reference source is a chip, and further includes an insulating layer. Multiple voltage divider resistors R11-R1n and multiple adjustable resistors R1-R8 are all covered by the insulating layer. The top surface of the insulating layer is provided with a metal layer, which may be, for example, an aluminum film layer. The metal layer includes fuses 40. Figure 2 As shown, the metal layer may further include multiple conductive blocks 50, with each fuse 40 having its opposite ends connected to a conductive block 50. The fuse 40 is connected in parallel with its corresponding adjusting resistor through the conductive block 50. Multiple fuses 40 can be arranged side-by-side, with the arrangement direction being the width direction of the fuses 40. Figure 3 As shown, the metal layer may also include a laser alignment mark 60, which may be generally L-shaped and include two mutually perpendicular metal lines. The laser alignment mark 60 is used for laser and melting point alignment.

[0047] In one embodiment, such as Figure 2 As shown, each of the fuses 40 has a length of L, a width of W, and a spacing of d between two adjacent fuses 40. In some embodiments, L can be 10 μm, W can be 1.5 μm, d can be 10 μm, and the thickness of the fuse 40 can be greater than or equal to 1.2 μm, for example, 1.6 μm.

[0048] In one embodiment, the metal layer further includes a reference voltage electrode. The test electrode is connected via an insulating layer between the voltage divider resistor R1n and the adjusting resistor R1. The reference voltage electrode is connected via an insulating layer to the end of the adjusting resistor R8 furthest from the adjusting resistor R7. The reference voltage electrode is also the reference voltage output terminal 30.

[0049] In one embodiment, the adjustable reference source further includes a first transistor and a second transistor. The emitter of the first transistor is connected to the anode 10, and the base and collector of the first transistor are connected to the same node; the base of the second transistor is connected to the reference voltage output terminal 30, and the collector of the second transistor is connected to the cathode. Multiple voltage divider resistors and multiple adjustable resistors are connected in series between the aforementioned node and the emitter of the second transistor. In one embodiment, as... Figure 4 As shown, the method for adjusting the adjustable reference source includes the following steps 110 to 140.

[0050] In step 110, a constant current is supplied to the adjustable reference source, and the test voltage value at the reference voltage output terminal is measured.

[0051] In step 120, the target fuse that needs to be blown is determined based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the heating resistors.

[0052] In step 130, for each target fuse, the positions of at least two melting points of the target fuse are determined; all melting points of the same target fuse are arranged in the width direction of the target fuse.

[0053] In step 140, for each target fuse, the laser is controlled to sequentially irradiate each melting point of the target fuse, causing the target fuse to melt and break.

[0054] The adjustable reference source firing method provided in this application, for a target fuse that needs to be melted, determines at least two melting points of the target fuse and uses a laser to sequentially irradiate all melting points of the target fuse to melt it. Even if the thickness of the fuse is large (e.g., greater than or equal to 1.2 μm), the fuse can still be melted by laser irradiation. Therefore, the aluminum film layer does not need to be equipped with electrodes connected to the fuse to apply high-current pulses, and the aluminum film layer has more area to accommodate more fuses. During the firing process, the method can be adjusted according to the test voltage value, the target voltage value, and the corresponding firing resistors. Adjusting the voltage to select a target fuse with a higher matching degree helps improve the accuracy and range of the firing process. Since the size of the electrode connected to the fuse to apply a high current pulse is much larger than the size of the fuse, it also helps to reduce the size of the adjustable reference source. Compared with the method of using a test probe to apply a high current pulse to the electrode connected to the fuse to melt the fuse, this application does not require the use of a test probe and does not require high-frequency cleaning and maintenance of the test probe, which can improve the firing efficiency. According to statistics, the firing method provided in the embodiments of this application can improve the firing efficiency by 30% to 50%.

[0055] The following will describe in detail each step of the adjustable reference source tuning method provided in the embodiments of this application.

[0056] In step 110, a constant current is supplied to the adjustable reference source, and the test voltage value at the reference voltage output terminal is measured.

[0057] In one embodiment, the adjustable reference source further includes a cathode. The cathode of the adjustable reference source is connected to the positive terminal of an external power supply, and the anode of the adjustable reference source is connected to the negative terminal of the external power supply or ground, thereby allowing the external power supply to provide a constant current to the adjustable reference source. Once the external power supply provides a constant current to the adjustable reference source, the current flowing through the voltage divider resistor and the adjusting resistor is also substantially constant. In some embodiments, the magnitude of the constant current provided to the adjustable reference source may be approximately 10 mA, and the current flowing through the voltage divider resistor and the adjusting resistor is typically tens of μA.

[0058] In step 120, the target fuse that needs to be blown is determined based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the heating resistors.

[0059] In one embodiment, the target voltage value includes a first target voltage threshold V. TARGET_L Second target voltage threshold V TARGET_H and target voltage value V TARGET The first target voltage threshold V TARGET_L Less than the second target voltage threshold V TARGET_H The target voltage value V TARGET The first target voltage threshold V TARGET_LWith the second target voltage threshold V TARGET_H The average value; the sum of the adjustment voltages corresponding to all the adjustment resistors is the maximum adjustment voltage. In some embodiments, the first target voltage threshold V TARGET_L With the target voltage value V TARGET The ratio could be, for example, 90%, and the second target voltage threshold V TARGET_H With the target voltage value V TARGET The ratio could be, for example, 110%. Target voltage value V TARGET This represents the desired reference voltage value output at the reference voltage output terminal after adjustment. The adjustment voltage corresponding to each adjustment resistor is a theoretical value, which can be calculated based on the resistance value of the adjustment resistor and the theoretical current flowing through the adjustment resistor when a constant current is supplied to the adjustable reference source. Since the adjustment voltage corresponding to each adjustment resistor is a theoretical value, it may deviate slightly from the actual voltage value. Therefore, it cannot be guaranteed that the reference voltage value output at the reference voltage output terminal after adjustment will equal the target voltage value V. TARGET As long as the reference voltage value output by the reference voltage output terminal after burn-in is within the first target voltage threshold V. TARGET_L With the second target voltage threshold V TARGET_H If the adjustable reference source is within the specified range, it is considered to meet the requirements and is considered a good product. The reference voltage value is between the first target voltage threshold V. TARGET_L With the second target voltage threshold V TARGET_H The "between" refers to the reference voltage value being greater than or equal to the first target voltage threshold V. TARGET_L And less than or equal to the second target voltage threshold V TARGET_H .

[0060] In one embodiment, step 120, which determines the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors, includes the following process:

[0061] At the target voltage value V TARGET When the difference between the test voltage value and the maximum adjustment voltage is less than the target voltage value V, the voltage is adjusted according to the target voltage value V. TARGET The target fuse is determined from all fuses by using the difference between the test voltage value and the adjustment voltage corresponding to each of the adjustment resistors. The sum of the test voltage value and the adjustment voltages corresponding to all target fuses is equal to the target voltage value V. TARGET The absolute value of the difference is the first absolute value, and the sum of the test voltage value and the adjustment voltages corresponding to all fuses in the non-target fuse group is equal to the target voltage value V. TARGETThe absolute value of the difference is the second absolute value, and the first absolute value is less than or equal to each of the second absolute values; the non-target fuse group includes one or more fuses, and the fuses in the non-target fuse group are not all the same as all the target fuses. Many non-target fuse groups can be obtained by selecting different combinations from all the fuses of the adjustable reference source. A non-target fuse group may or may not include target fuses. The number of fuses in the non-target fuse group may be the same as or different from the number of all target fuses. When the number of fuses in the non-target fuse group is the same as the number of all target fuses, at least one fuse in the non-target fuse group is not a target fuse. The adjustment voltage corresponding to the target fuse is also the adjustment voltage corresponding to the adjustment resistor connected in parallel with the target fuse.

[0062] This setting minimizes the absolute value of the difference between the test voltage value and the sum of the adjustment voltages corresponding to all target fuses and the target voltage value. As a result, the reference voltage output from the reference voltage output terminal of the adjustable reference source after adjustment is closest to the target voltage value, thus improving the accuracy of adjustment.

[0063] In one embodiment, any two of the plurality of adjusting resistors R1 to R8 have different adjustment voltages. This configuration helps to reduce the absolute value of the difference between the test voltage value and the sum of the adjustment voltages corresponding to all target fuses and the target voltage value.

[0064] Furthermore, the number of the adjusting resistors is n; the adjustment voltages corresponding to the n adjusting resistors are respectively 2... 0 mV, 2mV, 2 2 mV……and 2 n-1 mV. With this setting, by selecting the target fuse, the sum of the adjustment voltages corresponding to all target fuses can be 1mV, 2mV, 3mV, 4mV, 5mV…(2) n -2)mV and (2 n -1)mV, that is, the accuracy of the sum of the adjustment voltages corresponding to the target fuse is 1mV, which can effectively improve the accuracy of the firing. For example, if the target voltage value is 2.495V, the theoretical accuracy of the firing is about 0.04%; considering that the theoretical value of the adjustment voltage corresponding to the firing resistor deviates slightly from the actual value, the final firing accuracy can be controlled within ±0.2%.

[0065] In some embodiments, when determining the target fuse from all fuses, the target voltage value V is first calculated. TARGET The difference between the measured voltage and the test voltage value is calculated, rounded to the nearest integer, and then the target fuse is selected based on this integer. The sum of the adjustment voltages corresponding to all selected target fuses is then equal to this integer. For example, if the calculated difference is 4.6mV, the sum of the adjustment voltages corresponding to the target fuses is determined to be 5mV; if the calculated difference is 4.2mV, the sum of the adjustment voltages corresponding to the target fuses is determined to be 4mV.

[0066] In some embodiments, the number of adjusting resistors is eight, R1 to R8. The adjusting voltage corresponding to adjusting resistor R1 is 1mV, R2 is 2mV, R3 is 4mV, R4 is 8mV, R5 is 16mV, R6 is 32mV, R7 is 64mV, and R8 is 128mV. If the target voltage value V... TARGET The difference between the voltage value and the test voltage value is 4.6mV. Therefore, the sum of the adjustment voltages corresponding to the target fuses is 5mV. This confirms that the fuses corresponding to adjustment resistors R1 and R3 are both target fuses. If the target voltage value V... TARGET The difference between the voltage value and the test voltage value is 24.6mV. Therefore, the sum of the adjustment voltages corresponding to the target fuses is 25mV. It can be determined that the fuses corresponding to the adjustment resistors R1, R4, and R5 are all target fuses.

[0067] In one embodiment, the adjustable reference source tuning method provided in this application can be executed by a controller, which calculates the target voltage value V. TARGET The difference between the measured voltage value and the measured voltage value, rounded to the nearest integer, can be counted using binary data. The number of binary digits corresponds one-to-one with the number of adjustment resistors, and from right to left, the adjustment voltage of the corresponding resistor increases progressively. For example, if there are eight adjustment resistors, R1 to R8, counted as ABCDEFGH, where A corresponds to resistor R8, B to R7, C to R6, D to R5, E to R4, F to R3, G to R2, and H to R1. In the eight bits of the binary data, a digit of 0 indicates that the corresponding fuse is not the target fuse, while a digit of 1 indicates that the corresponding fuse is the target fuse. For example, when the controller calculates the target voltage value V... TARGET When the difference between the test voltage value and the target voltage value is rounded to the nearest integer and the result is 25mV, then 25 is represented as 00011001 in binary. This confirms that the fuses corresponding to adjusting resistors R1, R4, and R5 are all target fuses. In this way, the target fuse can be identified relatively quickly from all available fuses.

[0068] In one embodiment, step 120, which determines the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors, includes the following steps:

[0069] When the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, all fuses are determined to be target fuses.

[0070] When the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, all fuses are blown. After the adjustment, the reference output voltage of the adjustable reference source has a certain probability of being between the first target voltage threshold and the second target voltage threshold. Therefore, all fuses are determined to be target fuses.

[0071] Furthermore, when the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, step 120, which determines the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors, further includes the following process: determining whether the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value;

[0072] If the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value, then all fuses are determined to be target fuses.

[0073] The preset voltage value can be determined empirically. When the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value, all fuses are blown. After the adjustment, the reference output voltage of the adjustable reference source is likely to be between the first target voltage threshold and the second target voltage threshold. In some embodiments, the preset voltage value may be approximately 0.04V.

[0074] In one embodiment, after providing a constant current to the adjustable reference source and measuring the test voltage value at the reference voltage output terminal, the burn-in method of the adjustable reference source further includes the following steps:

[0075] Determine whether the difference between the target voltage value and the test voltage value is greater than the sum of the maximum adjustment voltage and the preset voltage value;

[0076] When the difference between the target voltage value and the test voltage value is greater than the sum of the maximum adjustment voltage and the preset voltage value, the adjustable reference source is determined to be defective and will not be adjusted.

[0077] When the difference between the target voltage and the test voltage is greater than the sum of the maximum adjustment voltage and the preset voltage, even if all fuses are blown, the reference output voltage of the adjustable reference source after adjustment will still be less than the first target voltage threshold. Therefore, when the difference between the target voltage and the test voltage is greater than the sum of the maximum adjustment voltage and the preset voltage, fuses are no longer blown, and the adjustable reference source is directly identified as defective, which helps to save on the adjustment process.

[0078] In one embodiment, after step 110 of providing a constant current to the adjustable reference source and measuring the test voltage value at the reference voltage output terminal, the method for adjusting the adjustable reference source further includes: if the test voltage value is between the first target voltage threshold and the second target voltage threshold, then determining that none of the fuses need to be blown.

[0079] In step 130, for each target fuse, the positions of at least two melting points of the target fuse are determined; all melting points of the same target fuse are arranged in the width direction of the target fuse.

[0080] In one embodiment, such as Figure 5 As shown, all melting points 411 of the same target fuse 41 are arranged at intervals in its width direction Y.

[0081] In one embodiment, in the width direction of the target fuse 41, the distance between two adjacent melting points 411 and the distance from each side of the target fuse 41 in the width direction to its adjacent melting point 411 are both the same. This configuration ensures that when all melting points of the target fuse are sequentially irradiated with a laser, the laser energy received by the target fuse in the width direction is more uniform, effectively guaranteeing that the target fuse is melted. Here, "same" refers to being substantially the same, including cases where the difference is identical or very small, such as the ratio of the difference to the larger value being less than or equal to 10%.

[0082] In one embodiment, in the width direction of the target fuse 41, the distance between two adjacent melting points 411 and the minimum distance between the opposite edges of the target fuse 41 in the width direction and their adjacent melting points 411 are both smaller than the laser spot size. This configuration further ensures that the target fuse is melted.

[0083] In one embodiment, the number of melting points in the target fuse can be determined based on the laser energy. In some embodiments, if the distance between two adjacent melting points of the target fuse is determined to be less than or equal to 0.75 μm based on the laser energy, the width of the target fuse is calculated by dividing the value by 0.75 μm. If the value is an integer, the number of melting points is equal to that value; if the value is not an integer, the number of melting points is the integer part of the value plus 1. For example, if the width of the target fuse is 1.5 μm, the number of melting points is 2, and the distance between two melting points and the distance from two melting points to adjacent edges of the target fuse can both be 0.5 μm; if the width of the target fuse is 2 μm, the number of melting points is 3, and the distance between two adjacent melting points and the distance from two opposite edges of the target fuse in the width direction to their adjacent melting points can both be 0.5 μm.

[0084] In step 140, for each target fuse, the laser is controlled to sequentially irradiate all melting points of each target fuse, causing the target fuse to melt and break.

[0085] In one embodiment, when controlling the melting point of the target fuse to be irradiated by the laser, the center of the laser spot basically coincides with the melting point of the target fuse.

[0086] In one embodiment, the location of the melting point can be determined based on a laser alignment mark.

[0087] In one embodiment, if there are two or more target fuses, laser irradiation can be performed on one melting point of all target fuses simultaneously.

[0088] In one embodiment, after the target fuse is melted by irradiating its melting points with a laser, the method for adjusting the adjustable reference source further includes the following steps:

[0089] First, a constant current is supplied to the adjustable reference source, and the reference voltage value at the reference voltage output terminal is measured;

[0090] Subsequently, it is determined whether the reference voltage value is between the first target voltage threshold and the second target voltage threshold;

[0091] When the reference voltage value is determined to be between the first target voltage threshold and the second target voltage threshold, the adjustable reference source is determined to be a good product; when the reference voltage value is determined to be less than the first target voltage threshold or greater than the second target voltage threshold, the adjustable reference source is determined to be a defective product.

[0092] After the adjustable reference source is calibrated, the reference voltage value output at the reference voltage output terminal is measured, and it is determined whether the reference voltage value is between the first target voltage threshold and the second target voltage threshold. This can effectively identify defective products and prevent adjustable reference sources that are defective after calibration from being mistakenly identified as good products.

[0093] This application also provides an adjustable reference source burn-in device, the adjustable reference source burn-in device including a controller, the controller being used for the adjustable reference source burn-in method described in any of the above embodiments.

[0094] In one embodiment, the adjustable reference source firing device further includes an image sensor and a laser. The image sensor is used to capture an image of the adjustable reference source so that the controller can determine the melting point position of each target fuse based on the image. The controller is also used to control the laser to emit laser light to irradiate the melting point of the target fuse.

[0095] The adjustable reference source firing device and the adjustable reference source firing method provided in this application belong to the same inventive concept. The relevant details and beneficial effects can be referred to each other, and will not be repeated here.

[0096] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the disclosure herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the claims.

Claims

1. A method for adjusting an adjustable reference source, characterized in that, The adjustable reference source includes an anode, a reference voltage output terminal, multiple voltage divider resistors, multiple adjustable resistors, and multiple fuses; the multiple voltage divider resistors and the multiple adjustable resistors are connected in series between the anode and the reference voltage output terminal, and each adjustable resistor is connected in parallel with one fuse; The method for adjusting the adjustable reference source includes: A constant current is supplied to the adjustable reference source, and the test voltage value at the reference voltage output terminal is measured; Based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the heating resistors, determine the target fuse that needs to be blown; For each target fuse, the positions of at least two melting points of the target fuse are determined; all melting points of the same target fuse are arranged in the width direction of the target fuse; For each target fuse, the laser is controlled to sequentially irradiate each melting point of the target fuse, causing the target fuse to melt and break.

2. The method for adjusting the adjustable reference source according to claim 1, characterized in that, In the width direction of the target fuse, the distance between two adjacent melting points and the distance between the opposite two edges of the target fuse in the width direction and their adjacent melting points are the same.

3. The method for adjusting the adjustable reference source according to claim 1, characterized in that, In the width direction of the target fuse, the distance between two adjacent melting points and the distance between the opposite edges of the target fuse in the width direction and their adjacent melting points are both smaller than the laser spot size.

4. The method for adjusting the adjustable reference source according to claim 1, characterized in that, The target voltage value includes a first target voltage threshold, a second target voltage threshold, and a target voltage value. The first target voltage threshold is less than the second target voltage threshold, and the target voltage value is the average of the first target voltage threshold and the second target voltage threshold. The sum of the adjustment voltages corresponding to all the adjustment resistors is the maximum adjustment voltage. The step of determining the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors includes: When the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, all fuses are determined to be target fuses.

5. The method for adjusting the adjustable reference source according to claim 4, characterized in that, When the difference between the target voltage value and the test voltage value is greater than or equal to the maximum adjustment voltage, the target fuse to be blown is determined based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors. This further includes: determining whether the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value. When the difference between the target voltage value and the test voltage value is less than or equal to the sum of the maximum adjustment voltage and the preset voltage value, all fuses are determined to be target fuses.

6. The method for adjusting the adjustable reference source according to claim 1, characterized in that, The sum of the adjustment voltages corresponding to all the adjustable resistors is the maximum adjustment voltage; after providing a constant current to the adjustable reference source and measuring the test voltage value at the reference voltage output terminal, the adjustment method of the adjustable reference source further includes: Determine whether the difference between the target voltage value and the test voltage value is greater than the sum of the maximum adjustment voltage and the preset voltage value; When the difference between the target voltage value and the test voltage value is greater than the sum of the maximum adjustment voltage and the preset voltage value, the adjustable reference source is determined to be defective and will not be adjusted.

7. The method for adjusting the adjustable reference source according to claim 1, characterized in that, The target voltage value includes a first target voltage threshold, a second target voltage threshold, and a target voltage value, wherein the first target voltage threshold is less than the second target voltage threshold, and the target voltage value is the midpoint between the first target voltage threshold and the second target voltage threshold. The sum of the adjustment voltages corresponding to all the adjustable resistors is the maximum adjustment voltage; The step of determining the target fuse to be blown based on the test voltage value, the target voltage value, and the adjustment voltage corresponding to each of the adjustment resistors includes: When the difference between the target voltage value and the test voltage value is less than the maximum adjustment voltage, a target fuse is determined from all fuses based on the difference between the target voltage value and the test voltage value and the adjustment voltage corresponding to each of the adjustment resistors; the absolute value of the difference between the test voltage value and the sum of the adjustment voltages corresponding to all target fuses and the target voltage value is a first absolute value, and the absolute value of the difference between the test voltage value and the sum of the adjustment voltages corresponding to all fuses in the non-target fuse group and the target voltage value is a second absolute value, wherein the first absolute value is less than or equal to each of the second absolute values; the non-target fuse group includes one or more fuses, and the fuses in the non-target fuse group are not all the same as all the target fuses.

8. The method for adjusting the adjustable reference source according to claim 1, characterized in that, Among the plurality of adjustable resistors, the adjustment voltages corresponding to any two adjustable resistors are different.

9. The method for adjusting the adjustable reference source according to claim 7, characterized in that, The number of the adjusting resistors is n; the adjustment voltages corresponding to the n adjusting resistors are 2... 0 mV, 2mV, 2 2 mV……and 2 n-1 mV, where n is a positive integer greater than 3.

10. The method for adjusting the adjustable reference source according to claim 1, characterized in that, The target voltage value includes a first target voltage threshold and a second target voltage threshold, wherein the first target voltage threshold is less than the second target voltage threshold; After providing a constant current to the adjustable reference source and measuring the test voltage value at the reference voltage output terminal, the adjustment method of the adjustable reference source further includes: if the test voltage value is between the first target voltage threshold and the second target voltage threshold, then it is determined that all fuses do not need to be blown. And / or, For each target fuse, after controlling the laser to sequentially irradiate each melting point of the target fuse to melt it, the method for adjusting the adjustable reference source further includes: A constant current is supplied to the adjustable reference source to measure the reference voltage value at the reference voltage output terminal; Determine whether the reference voltage value is between the first target voltage threshold and the second target voltage threshold; When the reference voltage value is determined to be between the first target voltage threshold and the second target voltage threshold, the adjustable reference source is determined to be a good product; when the reference voltage value is determined to be less than the first target voltage threshold or greater than the second target voltage threshold, the adjustable reference source is determined to be a defective product.

11. A device for adjusting an adjustable reference source, characterized in that, Includes a controller for performing the tuning method of the adjustable reference source according to any one of claims 1 to 10.

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