Bonding device

Abstract

There is provided a bonding device comprising: a lower electrostatic chuck; the upper electrostatic chuck is arranged above the lower electrostatic chuck; the elastic part is arranged above the upper electrostatic chuck; a first shaft disposed on the upper electrostatic chuck and disposed in a space defined inside the elastic portion; a first plate disposed on the first shaft and the elastic portion; the bracket is arranged on the first plate; the first cylinder is arranged on the bracket; the guide rod is arranged on the first plate; and a second cylinder disposed adjacent to the guide rod in the horizontal direction and connected to an upper end portion of the guide rod.

Description

[0001] This patent application claims priority and benefit to Korean Patent Application No. 10-2024-0155468, filed on November 5, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] The disclosure herein relates to a coupling device. Background Technology

[0003] Electronic devices that provide images to users (such as smartphones, digital cameras, laptops, navigation systems, and smart TVs) include display devices for displaying images. The display device generates images and presents them to the user via a screen.

[0004] Recently, with the development of display device technology, various types of display devices are being developed. For example, display devices that can display images not only on the front surface of the display device but also on the rear and side surfaces are being developed.

[0005] The display device includes a display panel for displaying images and a window disposed on the display panel to protect it. The window can be attached to the upper surface of the display panel using a coupling device. Summary of the Invention

[0006] A bonding device is disclosed that can prevent bonding failure between the display module and the window.

[0007] However, the embodiments are not limited to those described herein. The following embodiments will become more apparent to those skilled in the art from the detailed description of the disclosure given below.

[0008] An embodiment provides a joining device, comprising: a lower electrostatic chuck; an upper electrostatic chuck disposed above the lower electrostatic chuck; an elastic portion disposed above the upper electrostatic chuck; a first shaft disposed on the upper electrostatic chuck and within a space defined inside the elastic portion; a first plate disposed on the first shaft and the elastic portion; a bracket disposed on the first plate; a first cylinder disposed on the bracket; a guide rod disposed on the first plate; and a second cylinder disposed adjacent to the guide rod in a horizontal direction and connected to the upper end of the guide rod.

[0009] In an embodiment, the coupling device may further include: a support plate disposed above the first plate and including a hole, wherein the first cylinder may be disposed on the support plate and extend toward the bracket, the second cylinder may be disposed on the support plate, and the guide rod may extend above the support plate through the hole in the support plate.

[0010] In one embodiment, the first cylinder may include: a first body disposed on a support plate; and a first movable rod connected to the lower part of the first body, extending below the support plate and disposed on a bracket, and the first movable rod may be vertically movable.

[0011] In one embodiment, the first movable rod may be detached from the bracket or in contact with the upper surface of the bracket.

[0012] In an embodiment, the connecting device may further include: a support column adjacent to one side of the support plate; and a vertically movable portion connected to one side of the support plate and the support column, and movable in the vertical direction.

[0013] In an embodiment, when the process objects respectively disposed on the upper surface of the lower electrostatic chuck and the lower surface of the upper electrostatic chuck are engaged with each other, the vertically moving part can move a first distance in the downward direction, and the first movable rod can move a second distance toward the first body that is shorter than the first distance.

[0014] In one embodiment, the second cylinder may include: a second body disposed on a support plate; and a second movable rod connected to the upper part of the second body, extending upward and connected to the upper end of a guide rod, and the second movable rod may be vertically movable.

[0015] In an embodiment, the coupling device may further include: a connecting rod connected to the upper end of the guide rod and the upper end of the second movable rod.

[0016] In an embodiment, there may be multiple first cylinders and multiple second cylinders. The multiple first cylinders may be arranged in a first direction, and the multiple second cylinders may be spaced apart from the multiple first cylinders in a second direction that intersects the first direction, and arranged in the first direction.

[0017] In an embodiment, there may be multiple guide rods, which may be arranged in a first direction and spaced apart from multiple first cylinders in a second direction, and each of the multiple second cylinders may be arranged between adjacent guide rods in the multiple guide rods.

[0018] In an embodiment, the joining device may further include: a second shaft disposed below the lower electrostatic chuck; and a second plate disposed below the second shaft.

[0019] In one embodiment, the upper surface of the lower electrostatic chuck may have a concave curved surface, and the lower surface of the upper electrostatic chuck may have a convex curved surface.

[0020] In one embodiment, the display module may be disposed on the upper surface of the lower electrostatic chuck, and the window may be disposed on the lower surface of the upper electrostatic chuck.

[0021] In one embodiment, the elastic portion can provide elastic force to the first plate and the upper electrostatic chuck in the vertical direction.

[0022] In an embodiment, the joining device includes: a lower electrostatic chuck; an upper electrostatic chuck disposed above the lower electrostatic chuck; an elastic portion disposed above the upper electrostatic chuck; a first shaft disposed on the upper electrostatic chuck and within a space defined inside the elastic portion; a first plate disposed on the first shaft and the elastic portion; a bracket disposed on the first plate; a first cylinder including a first body disposed on the bracket and a first movable rod extending from the first body toward the bracket and disposed on the bracket; a guide rod disposed on the first plate; and a second cylinder disposed adjacent to the guide rod in a horizontal direction and connected to the upper end of the guide rod.

[0023] In one embodiment, the first movable rod may be detached from the bracket or in contact with the upper surface of the bracket.

[0024] In an embodiment, the coupling device may further include: a support plate disposed above the first plate, wherein the second cylinder may include: a second body disposed on the support plate; and a second movable rod connected to the upper part of the second body and extending upward, and connected to the upper end of the guide rod, and the second movable rod may be vertically movable.

[0025] In an embodiment, the joining device includes: a lower electrostatic chuck; an upper electrostatic chuck disposed above the lower electrostatic chuck; an elastic portion disposed above the upper electrostatic chuck; a first shaft disposed on the upper electrostatic chuck and within a space defined inside the elastic portion; a first plate disposed on the first shaft and the elastic portion; a bracket disposed on the first plate; a first cylinder disposed on the bracket; a guide rod disposed on the first plate; a second cylinder disposed adjacent to the guide rod in a horizontal direction; and a connecting rod connected to the upper end of the guide rod and the upper end of the second cylinder. Attached Figure Description

[0026] The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and form a part of this specification. The drawings illustrate embodiments and, together with the description, serve to explain the principles of the invention. In the drawings: Figure 1 This is a schematic diagram showing the interior of a car in which a display device manufactured by a coupling device according to an embodiment is provided; Figure 2 yes Figure 1 A schematic plan view of the display device shown; Figure 3 It is a schematic cross-sectional view of the display module and window of the display device; Figure 4 It is shown Figure 3 A schematic cross-sectional view of the display module shown; Figure 5 It is shown Figure 4 A schematic cross-sectional view of the display panel shown; Figure 6 yes Figure 5 A schematic plan view of the display panel shown; Figure 7 This is a schematic perspective view of the coupling device according to an embodiment; Figure 8 This is a schematic side view of the coupling device according to the embodiment when viewed in a second direction; Figure 9 This is a schematic front view of the coupling device according to the embodiment when viewed in a first direction; Figure 10A and Figure 10B This is an enlarged schematic diagram of the first movable rod and the bracket according to an embodiment; Figure 11A and Figure 11B This is an enlarged schematic diagram of the first movable rod and the back pressure support; and Figure 12A , Figure 12B , Figure 12C , Figure 12D , Figure 12E , Figure 12F and Figure 12G This is a schematic front view of the coupling device according to an embodiment. Detailed Implementation

[0027] In the following description, numerous specific details are set forth for purposes of explanation in order to provide a thorough understanding of various embodiments or implementations of the invention. As used herein, "embodiment" and "implementation" are interchangeable terms and are non-limiting examples of the apparatus or methods disclosed herein. However, it will be apparent that various embodiments may be practiced without these specific details or with one or more equivalent arrangements. These various embodiments are not necessarily exclusive nor restrictive of the disclosure herein. For example, the specific shape, construction, and characteristics of an embodiment may be used or implemented in another embodiment.

[0028] Unless otherwise stated, the embodiments shown are to be understood as providing features of the invention. Therefore, unless otherwise stated, features, components, modules, layers, films, panels, regions and / or aspects (hereinafter individually or collectively referred to as “elements”) of various embodiments may be combined, separated, interchanged and / or rearranged in other ways without departing from the scope of the invention.

[0029] The use of crosshairs and / or shading in the accompanying drawings is generally provided to clarify the boundaries between adjacent elements. Thus, unless otherwise stated, the presence or absence of crosshairs or shading does not convey or indicate any preference or requirement for the specific material, material properties, size, scale, commonalities between the elements shown, and / or any other characteristics, properties, etc., of the elements. Furthermore, in the drawings, the dimensions and relative dimensions of elements may be exaggerated for clarity and / or descriptive purposes. When embodiments can be implemented differently, the specific process sequence may be performed differently from the described sequence. For example, two consecutively described processes may be performed substantially simultaneously or in the reverse order of the described sequence. Similarly, the same reference numerals denote the same elements.

[0030] When a component or layer is referred to as being "on" another component or layer, "connected to" another component or layer, or "bonded to" another component or layer, the component or layer may be directly on, directly connected to, or directly bonded to the other component or layer, or an intermediary component or layer may be present. However, when a component or layer is referred to as being "directly on" another component or layer, "directly connected to" another component or layer, or "directly bonded to" another component or layer, an intermediary component or layer is not present. Therefore, the term "connection" can refer to a physical connection, electrical connection, and / or fluid connection with or without an intermediary component. Furthermore, the axes of the first direction DR1, the second direction DR2, and the third direction DR3 are not limited to the three axes of a Cartesian coordinate system (such as the X, Y, and Z axes) and can be interpreted in a broader sense. For example, the axes of the first direction DR1, the second direction DR2, and the third direction DR3 can be perpendicular to each other, or can represent different directions that are not perpendicular to each other. For the purposes of this disclosure, "at least one of A and B" can be understood to mean only A, only B, or any combination of A and B. Additionally, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" can be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0031] Although the terms “first,” “second,” etc., may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Therefore, without departing from the publicly stated teachings, the first element discussed below may be referred to as the second element.

[0032] For descriptive purposes, spatial relative terms such as “below,” “under,” “below,” “lower,” “above,” “upper,” “above,” “higher,” and “side” (e.g., as in “sidewall”) may be used herein to describe the relationship of one element to another (or other elements) as shown in the accompanying drawings. In addition to the orientations depicted in the drawings, the spatial relative terms are intended to cover different orientations of the equipment during use, operation, and / or manufacture. For example, if the equipment in the drawings is flipped, an element described as “below” or “under” other elements or features will subsequently be oriented “above” other elements or features. Thus, the term “below” can cover both above and below orientations. Furthermore, the equipment may be otherwise oriented (e.g., rotated 90 degrees or in other orientations), and in such cases, the spatial relative descriptive terms used herein should be interpreted accordingly.

[0033] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “the” are intended to include the plural forms as well. Furthermore, when the terms “comprising,” “including,” and / or variations thereof are used in this specification, they indicate the presence of the stated features, integrals, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or groups thereof. It should also be noted that, as used herein, the terms “substantially,” “about,” and other similar terms are used as approximate terms rather than terms of degree, and are thus used to interpret the inherent deviations of measured, calculated, and / or provided values ​​that will be recognized by one of ordinary skill in the art. For example, “about” may refer to within one or more standard deviations, or within ±20%, ±10%, or ±5% of the stated value.

[0034] Various embodiments are described herein with reference to cross-sectional views and / or exploded views that serve as schematic diagrams of examples and / or intermediate structures. Thus, variations in the shapes shown in the drawings will be anticipated due to factors such as manufacturing techniques and / or tolerances. Therefore, the embodiments disclosed herein should not be construed as limited to the specific shapes shown for a particular area, but will include shape deviations due to factors such as manufacturing. In this way, the areas shown in the drawings may be schematic in nature, and the shapes of these areas may not reflect the actual shapes of the areas of the device, and are thus not intended to be limiting.

[0035] In accordance with the conventions of the art, some embodiments are described and illustrated in the accompanying drawings with respect to functional blocks, units, and / or modules. Those skilled in the art will understand that these blocks, units, and / or modules are physically implemented by electronic (or optical) circuitry (such as logic circuits, discrete components, microprocessors, hardwired circuits, memory elements, wiring connections, etc.), which can be formed using semiconductor-based manufacturing techniques or other manufacturing techniques. Where blocks, units, and / or modules are implemented by microprocessors or other similar hardware, they can be programmed and controlled using software (e.g., microcode) to perform the various functions discussed herein, and may optionally be driven by firmware and / or software. It is also contemplated that each block, unit, and / or module can be implemented by dedicated hardware, or as a combination of dedicated hardware performing some functions and processors performing other functions (e.g., one or more programmed microprocessors and associated circuitry). Furthermore, without departing from the scope of the invention, each block, unit, and / or module of some embodiments may be physically divided into two or more interactive and discrete blocks, units, and / or modules. Furthermore, without departing from the scope of the invention, blocks, units, and / or modules of some embodiments may be physically combined into more complex blocks, units, and / or modules.

[0036] In the following description, embodiments will be illustrated with reference to the accompanying drawings.

[0037] Figure 1 This is a schematic diagram showing the interior of a car in which a display device implemented by a coupling device according to an embodiment is provided. Figure 2 yes Figure 1 A schematic plan view of the display device shown.

[0038] Reference Figure 1 The display device DD can be installed inside the vehicle's AM. The display device DD can be installed inside the vehicle's AM and provide various information to the driver US (hereinafter referred to as the user). The display device DD can provide the user US with information such as speed, weather, or maps. The display device DD can be defined as a touch screen that operates based on touch input from the user US.

[0039] Reference Figure 1 and Figure 2 According to an embodiment, the display device DD may have a quadrilateral shape having a long side extending in a first direction DR1 and a short side extending in a second direction DR2 intersecting the first direction DR1. However, the embodiment is not limited to this, and the display device DD may have various shapes (such as a circular shape or other polygonal shapes besides a quadrilateral shape).

[0040] In the following text, the direction substantially perpendicular to the plane defined by the first direction DR1 and the second direction DR2 is defined as the third direction DR3. Additionally, in this description, the terms "when viewed in a plane" or "in a plan view" may refer to the state when viewed in the third direction DR3.

[0041] The upper surface of the display device DD that provides an image to the user US can be defined as a display surface DS, and has a plane defined by a first direction DR1 and a second direction DR2. An image IM generated by the display device DD through the display surface DS can be provided to the user US. The display device DD can sense touch from the user US.

[0042] The display surface DS may include a display area DA and a non-display area NDA surrounding the display area DA. The display area DA may display an image, and the non-display area NDA may not display an image. The non-display area NDA may surround the display area DA and define the boundary of the display device DD printed in a predetermined color or a specific color.

[0043] The display device DD is shown as an example, but the embodiments are not limited thereto. For example, the display device DD according to the embodiments can also be used in electronic devices (such as smartphones, digital cameras, laptops, monitors, and smart TVs) that provide images to users.

[0044] Figure 3 It is a schematic cross-sectional view of the display module and window of the display device.

[0045] For example, Figure 3 The diagram shows a cross-section of the display module DM and window WIN when viewed in the second direction DR2.

[0046] Reference Figure 3 The display device DD may include a display module DM and a window WIN disposed on the display module DM. The window WIN can protect the display module DM from external scratches or impacts.

[0047] The window (WIN) and display module (DM) may have curved surfaces. The window (WIN) and display module (DM) may be bent or folded downwards in a recessed manner. An adhesive layer (AL) may be disposed between the display module (DM) and the window (WIN). The adhesive layer (AL) can bond the display module (DM) and the window (WIN). The adhesive layer (AL) may include pressure-sensitive adhesive (PSA) or optically clear adhesive (OCA), but the type of adhesive is not limited to these.

[0048] Figure 4 It is shown Figure 3 A schematic cross-sectional view of the display module shown.

[0049] For example, Figure 4A cross-section of the display module DM is shown when viewed in the second direction DR2.

[0050] Reference Figure 4 The display module DM may include a display panel DP, an input sensing unit ISP, an anti-reflective layer RPL, a panel protective film PPF, and an adhesive layer AL'.

[0051] According to an embodiment, the display panel DP can be a light-emitting display panel. For example, the display panel DP can be an organic light-emitting display panel or an inorganic light-emitting display panel. The light-emitting layer of an organic light-emitting display panel can include organic light-emitting materials. The light-emitting layer of an inorganic light-emitting display panel can include quantum dots, quantum rods, etc. Hereinafter, the display panel DP is described as an organic light-emitting display panel.

[0052] The input sensing unit (ISP) can be disposed on the display panel (DP). The ISP may include a sensor unit for sensing external input capacitively. In the case of manufacturing the display device (DD), the ISP can be directly manufactured on the display panel (DP). However, embodiments are not limited to this. The ISP can be manufactured as a separate panel from the display panel (DP) and then attached to the display panel (DP) via an adhesive layer.

[0053] The anti-reflective layer RPL can be disposed on the input sensing unit ISP. In the case of manufacturing a display device DD, the anti-reflective layer RPL can be directly fabricated on the input sensing unit ISP. However, the embodiments are not limited to this. The anti-reflective layer RPL can be fabricated separately as a panel and then attached to the input sensing unit ISP via an adhesive layer.

[0054] The anti-reflective layer RPL can be defined as an external light anti-reflective film. The anti-reflective layer RPL reduces the reflectivity of external light entering the display panel DP from above the display device DD. Due to the anti-reflective layer RPL, external light is invisible to the user.

[0055] When external light propagating toward the display panel DP is reflected at the display panel DP and then re-provided to the external user, the external light is visible to the user as if it were reflected from a mirror. To prevent this phenomenon, the anti-reflective layer RPL may include, for example, a color filter that displays the same color as the pixels of the display panel DP.

[0056] A color filter can filter out external light that has a color corresponding to the color of a pixel. For example, the external light may be invisible to the user. However, embodiments are not limited to this, and the anti-reflective layer RPL may include a retarder and / or a polarizer for reducing the reflectivity of external light.

[0057] A panel protective film (PPF) can be placed below the display panel (DP). The PPF protects the lower part of the display panel (DP). The PPF can comprise flexible plastic materials such as polyethylene terephthalate (PET).

[0058] The adhesive layer AL' can be disposed between the display panel DP and the panel protective film PPF. The adhesive layer AL' can bond the display panel DP and the panel protective film PPF. The adhesive layer AL' can include pressure-sensitive adhesive or optically clear adhesive, but the type of adhesive is not limited to these.

[0059] Figure 5 It is shown Figure 4 A schematic cross-sectional view of the display panel shown.

[0060] For example, Figure 5 A cross-section of the display panel DP is shown when viewed in the second direction DR2.

[0061] Reference Figure 5 The display panel DP may include a substrate SUB, a circuit element layer DP-CL disposed on the substrate SUB, a display element layer DP-OLED disposed on the circuit element layer DP-CL, and a thin film encapsulation layer TFE disposed on the display element layer DP-OLED.

[0062] The substrate SUB may include a display area DA and a non-display area NDA surrounding the display area DA. The substrate SUB may include glass or a flexible plastic material such as polyimide (PI).

[0063] The DP-OLED display element layer can be placed in the display area DA. The DP-OLED display element layer can generate images.

[0064] Pixels can be disposed in the circuit element layer DP-CL and the display element layer DP-OLED. Each pixel can include a transistor disposed in the circuit element layer DP-CL and a light-emitting element disposed in the display element layer DP-OLED and connected to the transistor.

[0065] A thin-film encapsulation layer (TFE) can be deposited on the DP-CL circuit element layer to cover the DP-OLED display element layer. The TFE can protect the pixels from moisture, oxygen, and external foreign matter.

[0066] Figure 6 yes Figure 5 A schematic plan view of the display panel shown.

[0067] Reference Figure 6The display device DD may include a display panel DP, a scan driver SDV, a data driver DDV, a flexible circuit board FPCB, a transmitter driver EDV, and a printed circuit board PCB.

[0068] The display panel DP may include a display area DA and a non-display area NDA surrounding the display area DA. The display area DA and the non-display area NDA of the display panel DP may respectively correspond to Figure 5 The diagram shows the display area DA and the non-display area NDA. The display panel DP may have a rectangular shape with a long side extending in the first direction DR1 and a short side extending in the second direction DR2, but the shape of the display panel DP is not limited to this.

[0069] The display panel DP may include pixels PX, scan lines SCL1 to SCLm, data lines DL1 to DLn, and emission lines EL1 to ELm. m and n can be natural numbers that are not zero.

[0070] Pixel PX can be set in the display area DA. Scan driver SDV and transmit driver EDV can be set in the non-display area NDA adjacent to the corresponding short side of the display panel DP.

[0071] The data driver (DDV) can be positioned adjacent to the lower side of the display panel (DP), defined as one of the long sides of the display panel (DP), in a plan view. The printed circuit board (PCB) can also be positioned adjacent to the lower side of the display panel (DP) in a plan view. A flexible circuit board (FPCB) can be connected to the lower side of the display panel (DP) and the printed circuit board (PCB). The data driver (DDV) can be manufactured as an integrated circuit chip and mounted on the corresponding flexible circuit board (FPCB).

[0072] Scan lines SCL1 to SCLm can extend along the first direction DR1 to connect to the pixel PX and the scan driver SDV. Emit lines EL1 to ELm can extend along the first direction DR1 to connect to the pixel PX and the emitter driver EDV.

[0073] Data lines DL1 to DLn can extend in the second direction DR2 to connect to the pixel PX and the data driver DDV. For example, two data lines DL1 and DLn are shown connected to the data drivers DDV arranged on the far left and far right, respectively, but essentially, data lines DL1 to DLn can be connected to their respective data drivers DDV.

[0074] For example, the display device DD may also include a timing controller that controls the operation of the scan driver SDV, the data driver DDV, and the transmit driver EDV. The timing controller may be manufactured as an integrated circuit chip and mounted on a printed circuit board PCB. The timing controller may be connected to the data driver DDV, the scan driver SDV, and the transmit driver EDV via the printed circuit board PCB and the flexible circuit board FPCB.

[0075] The scan driver SDV generates a scan signal, which is applied to pixel PX via scan lines SCL1 to SCLm. The data driver DDV generates a data voltage, which is applied to pixel PX via data lines DL1 to DLn. The transmit driver EDV generates a transmit signal, which is applied to pixel PX via transmit lines EL1 to ELm.

[0076] A pixel PX can receive data voltage in response to a scan signal. A pixel PX can display an image by emitting light with a brightness corresponding to the data voltage in response to a transmission signal. The transmission time of a pixel PX can be controlled by the transmission signal.

[0077] Figure 7 This is a schematic perspective view of the coupling device according to an embodiment. Figure 8 This is a schematic side view of the coupling device according to the embodiment when viewed in a second direction.

[0078] For ease of description, Figure 7 The internal structures of the upper chamber UCB and the lower chamber LCB are omitted. For ease of description, in Figure 8 The supporting column SC and the vertical moving part VM are omitted.

[0079] Reference Figure 7 and Figure 8 The coupling device BDE may include an electrostatic chuck ESC, a chamber CHB, a first shaft SH1, a second shaft SH2, a first plate PL1, a second plate PL2, an elastic part EP, a bracket BC, a support plate SP, a first cylinder SL1, a guide rod GB, a second cylinder SL2, and a connecting rod CB.

[0080] An electrostatic chuck (ESC) may include electrodes. These electrodes may be alternately arranged in one direction. Voltages of different polarities may be applied to the electrodes. Electrodes of different polarities can generate electrostatic forces. Due to the electrostatic forces generated from the ESC, a workpiece can be secured to the ESC. For example, a vacuum suction port for securing the workpiece may be defined within the ESC.

[0081] An electrostatic chuck (ESC) may include an upper electrostatic chuck (UESC) and a lower electrostatic chuck (LESC). The upper electrostatic chuck (UESC) may be positioned above the lower electrostatic chuck (LESC). The lower surface of the upper electrostatic chuck (UESC) may have a convex curved surface. The lower electrostatic chuck (LESC) may be positioned below the upper electrostatic chuck (UESC) (e.g., positioned below the upper electrostatic chuck (UESC) in a direction opposite to the third direction DR3). The upper surface of the lower electrostatic chuck (LESC) may have a concave curved surface. The upper surface of the lower electrostatic chuck (LESC) and the lower surface of the upper electrostatic chuck (UESC) may have corresponding shapes. The upper surface of the lower electrostatic chuck (LESC) and the lower surface of the upper electrostatic chuck (UESC) are shown as having curved surfaces, but they may have various shapes depending on the shape of the object being processed.

[0082] The chamber CHB may include an upper chamber UCB and a lower chamber LCB disposed below the upper chamber UCB. An upper electrostatic chuck UESC may be disposed inside the upper chamber UCB. A lower electrostatic chuck LESC may be disposed inside the lower chamber LCB. The upper chamber UCB may move in a downward direction (e.g., opposite to the third direction DR3) and come into contact with the lower chamber LCB (e.g., in direct contact). With the upper chamber UCB and the lower chamber LCB in contact with each other (e.g., in direct contact), a chamber CHB in a vacuum state can be formed. Details will be described later.

[0083] The first axis SH1 can be disposed on the upper electrostatic chuck UESC. The first axis SH1 can be disposed in a space defined within the elastic portion EP. For example, the diameter of each of the elastic portions EP can be larger than the diameter of each of the first axes SH1. The first axis SH1 can penetrate the upper chamber UCB to connect to the upper electrostatic chuck UESC. The first axes SH1 can be arranged to be spaced apart from each other along the first direction DR1.

[0084] The second shaft SH2 can be disposed below the lower electrostatic chuck LESC (e.g., disposed below the lower electrostatic chuck LESC in a direction opposite to the third direction DR3). The second shaft SH2 can be disposed within a space defined inside the elastic portion EP. For example, the diameter of each of the elastic portions EP can be larger than the diameter of each of the second shafts SH2. The second shaft SH2 can penetrate the lower chamber LCB to connect to the lower electrostatic chuck LESC. The second shafts SH2 can be arranged to be spaced apart from each other along the first direction DR1.

[0085] The first plate PL1 can be set on the first axis SH1 and the elastic part EP. The second plate PL2 can be set below the second axis SH2 and the elastic part EP.

[0086] The elastic section EP can be positioned on the upper chamber UCB. The elastic section EP can be positioned above the upper electrostatic chuck UESC. The elastic section EP can be positioned below the lower chamber LCB. A space can be defined within the elastic section EP. The elastic section EP can provide elasticity to the first plate PL1 and the upper chamber UCB (or the upper electrostatic chuck UESC) in the vertical direction (e.g., the third direction DR3 and the direction opposite to DR3). When the upper electrostatic chuck UESC moves in the direction opposite to DR3, the elastic section EP can protect the chamber CHB and assist the upper electrostatic chuck UESC in moving in the direction opposite to DR3. Details will be described later.

[0087] The bracket BC can be mounted on the first plate PL1. The bracket BC can be fixed to the first plate PL1, and its length can remain constant. The bracket BC can be positioned corresponding to the first cylinder SL1. For example, the bracket BC can be stacked on top of the first cylinder SL1. The brackets BC can be arranged to be spaced apart from each other along a first direction DR1. The bracket BC can be positioned on the first direction DR1 at the center of the first plate PL1 relative to a second direction DR2.

[0088] The support plate SP can be positioned above the first plate PL1. For ease of description... Figure 8 The support plate SP is shown schematically.

[0089] The first cylinder SL1 can be mounted on the bracket BC. The first cylinder SL1 can be mounted on the support plate SP and extend toward the bracket BC. The first cylinders SL1 can be arranged to be spaced apart from each other along the first direction DR1.

[0090] The first cylinder SL1 can be connected to the upper electrostatic chuck UESC via the bracket BC, the first plate PL1, and the first shaft SH1. The first cylinder SL1 can provide thrust. The thrust provided by the first cylinder SL1 can be transmitted to the upper electrostatic chuck UESC, and the first cylinder SL1 can transmit the thrust evenly to the upper electrostatic chuck UESC.

[0091] The first cylinder SL1 may include a first body B1 and a first movable rod MB1. The first body B1 may be mounted on a support plate SP. The first body B1 may have an internal structure in the shape of a piston.

[0092] The first movable rod MB1 can penetrate the support plate SP and extend below the support plate SP. The first movable rod MB1 can move vertically (e.g., vertically in the third direction DR3 and in the direction opposite to the third direction DR3). For example, when moving along the third direction DR3, the first movable rod MB1 can move toward the interior of the first body B1. For example, when the piston inside the first body B1 moves on the third direction DR3, the first movable rod MB1 can move on the third direction DR3.

[0093] A first movable rod MB1 can extend from the first body B1 in a direction toward the support BC (e.g., opposite to the third direction DR3) and is disposed on the support BC. The first movable rod MB1 can contact (e.g., in direct contact) the upper surface of the support BC. When the first movable rod MB1 moves in the direction opposite to the third direction DR3, a thrust can be transmitted to the support BC.

[0094] The guide rod GB can be disposed on the first plate PL1. The guide rod GB can extend above the support plate SP through a hole defined in the support plate SP. For example, the guide rod GB can extend from the first plate PL1 toward the support plate SP and penetrate the support plate SP.

[0095] The guide rods GB can be spaced apart from the first cylinder SL1 in the second direction DR2. The guide rods GB can be arranged to be spaced apart from each other in the first direction DR1.

[0096] The guide rod GB can move in the third direction DR3 and in the opposite direction to DR3. For example, the guide rod GB can move vertically (e.g., vertically in the third direction DR3 and in the opposite direction to DR3). The guide rod GB can be connected to the first board PL1.

[0097] Because of the guide rod GB, the position of the support plate SP can be fixed without shifting in the first direction DR1 and the second direction DR2.

[0098] The second cylinder SL2 can be mounted on the support plate SP. The second cylinder SL2 can be positioned adjacent to the guide rod GB in the horizontal direction (e.g., the first direction DR1). The second cylinder SL2 can be spaced apart from the first cylinder SL1 in the second direction DR2. The second cylinders SL2 can be arranged to be spaced apart from each other in the first direction DR1. Some of the second cylinders SL2 can be positioned between the guide rods GB in the first direction DR1. For example, the guide rods GB and the second cylinder SL2 can be arranged alternately in the first direction DR1.

[0099] Each second cylinder SL2 may include a second body B2 and a second movable rod MB2. The second body B2 may be mounted on a support plate SP. The second body B2 may have an internal structure in the shape of a piston.

[0100] The second movable rod MB2 can be connected to the upper part of the second body B2. The second movable rod MB2 can extend to the upper part of the second body B2. The second movable rod MB2 can move vertically (e.g., vertically in the direction of the third direction DR3 and in the direction opposite to the third direction DR3). For example, when moving in the direction opposite to the third direction DR3, the second movable rod MB2 can move toward the interior of the second body B2. For example, when the piston inside the second body B2 moves in the direction opposite to the third direction DR3, the second movable rod MB2 can move in the direction opposite to the third direction DR3.

[0101] A connecting rod CB can connect the guide rod GB and the second cylinder SL2. The connecting rod CB can be mounted on the guide rod GB and the second cylinder SL2. For example, the connecting rod CB can be connected to the upper end of each of the guide rods GB and the upper end of the second movable rod MB2 of each of the second cylinders SL2. The second movable rods MB2 can all be connected to the upper end of the guide rod GB via the connecting rod CB. The second cylinder SL2 can be connected to the upper end of the guide rod GB. Due to the connecting rod CB, the guide rod GB and the second cylinder SL2 can move the same distance in the third direction DR3.

[0102] Figure 9 This is a schematic front view of the coupling device according to the embodiment when viewed in the first direction DR1.

[0103] Reference Figure 7 and Figure 9 The coupling device BDE may also include a support column SC and a vertically moving part VM.

[0104] Support columns SC can be adjacent to one side of support plate SP. Multiple support columns SC can be provided. Support columns SC can be arranged spaced apart from each other in the first direction DR1 and positioned spaced apart from each other in the second direction DR2. Support columns SC can be symmetrically arranged at the virtual center line of the long side of support plate SP extending in the first direction DR1 at the virtual center line of the second direction DR2, and at the virtual center line of the short side of support plate SP extending in the second direction DR2 at the virtual center line of the first direction DR1. Support columns SC can form a resisting torque against the torque generated when components mounted on the first plate PL1 and components connected to the first plate PL1 move in the third direction DR3.

[0105] The vertically moving part VM can be connected to one side of the support plate SP and the support column SC. The support plate SP can be mounted on the vertically moving part VM. The vertically moving part VM can move in the vertical direction (e.g., parallel to the third direction DR3). While the first cylinder SL1 generates thrust in the direction opposite to the third direction DR3 (or downwards) (or when the first cylinder SL1 generates thrust in the direction opposite to the third direction DR3 (or downwards), the support plate SP and the first plate PL1 can move in the downward direction. For example, the support plate SP and the vertically moving part VM connected to the support plate SP can move together in the downward direction. Multiple vertically moving parts VM can be configured. Each vertically moving part VM can be individually connected to the support column SC.

[0106] Figure 10A and Figure 10B This is an enlarged schematic diagram of the first movable rod and the bracket according to an embodiment.

[0107] Figure 10A This is a schematic diagram showing the state in which the first movable rod MB1 and the bracket BC are separated. Figure 10B This is a schematic diagram showing the state in which the first movable rod MB1 and the bracket BC are in contact with each other (e.g., in direct contact).

[0108] Reference Figure 10A and Figure 10B The first movable rod MB1 can be mounted on the bracket BC and detached from the bracket BC. The first movable rod MB1 is located on the first body B1 (see...). Figure 9 When the piston is moving inside, the first movable rod MB1 can be separated from the bracket BC.

[0109] During the bonding process of the window and display module, the first movable rod MB1 can contact (e.g., directly contact) the upper surface of the bracket BC. When the first movable rod MB1 performs a piston movement and moves in the direction opposite to the third direction DR3, the first movable rod MB1 can contact (e.g., directly contact) the upper surface of the bracket BC. Therefore, in the first cylinder SL1 (see... Figure 9 When a thrust is generated in the direction opposite to that of DR3, the first movable rod MB1 contacts the bracket BC (e.g., in direct contact), so the thrust of the first cylinder SL1 can be transmitted to the bracket BC.

[0110] Figure 11A and Figure 11B This is an enlarged schematic diagram of the first movable rod and the back pressure support.

[0111] Reference Figure 11A and Figure 11B , Figure 11A and Figure 11B It is shown that, according to an embodiment, a back pressure brace BB is used instead of a brace BC (see Figure 10A Example: When the first movable rod MB1' moves on the third direction DR3, the end of the back pressure bracket BB contacts the first movable rod MB1' (e.g., direct contact), and therefore back pressure can be applied. Due to the tolerance between the back pressure bracket BB and the first movable rod MB1', the first movable rod MB1' and the back pressure bracket BB can contact each other asymmetrically. For example, back pressure may not be applied to the engagement device BDE.

[0112] Figures 12A to 12G This is a schematic front view of the coupling device according to an embodiment. For operational description purposes, Figures 12A to 12G A construction different from the actual construction is shown. Figures 12A to 12G The diagram shows two second cylinders SL2, two guide rods GB, and two elastic sections EP.

[0113] Figure 12A This is a schematic diagram showing the standby state before the bonding process is performed.

[0114] Reference Figure 12A The display module DM can be mounted on the upper surface of the lower electrostatic chuck LESC. The adhesive layer AL can be mounted on the upper surface of the display module DM. The window WIN can be mounted on the lower surface of the upper electrostatic chuck UESC. The distance between the first plate PL1 and the upper chamber UCB can be distance D11 (1-1). The distance between the first plate PL1 and the support plate SP can be distance D21 (2-1). The distance between the upper surface of the bracket BC and the support plate SP can be distance D31 (3-1).

[0115] Figure 12B This is a schematic diagram illustrating the state in which a vacuum is formed inside the chamber during the bonding process.

[0116] Reference Figure 12B The vertically moving portion VM can move in the direction opposite to the third direction DR3 (e.g., downward). The vertically moving portion VM can move in the downward direction, and the upper chamber UCB can contact (e.g., directly contact) the lower chamber LCB. For example, the first-first distance D11, the second-first distance D21, and the third-first distance D31 can contact... Figure 12A The distances D11 (first-first), D21 (second-first), and D31 (third-first) are the same, and the vertically moving part VM can move the distance between the upper chamber UCB and the lower chamber LCB. When the upper chamber UCB and the lower chamber LCB are in contact (e.g., in direct contact), a vacuum can be formed inside the chamber. In a vacuum state, when the window WIN and the display module DM are joined via the adhesive layer AL, it is convenient to join the window WIN and the display module DM.

[0117] Figure 12C This is a schematic diagram showing the state in which the window WIN is in contact (e.g., in direct contact) with the adhesive layer AL during the bonding process.

[0118] Reference Figure 12C The vertically moving part of the VM can move in the downward direction. The distance the vertically moving part of the VM moves in the downward direction can be... Figure 12B The distance between the window WIN and the adhesive layer AL is the same. Figure 12B The distance between the window WIN and the adhesive layer AL can be a first distance. The first distance can be a scalar. The first-to-first distance D11a can be compared to... Figure 12B The distance from D11 to the first-1st point is shorter. Figure 12B The difference between the first-1 distance D11 and the first-1 distance D11a can represent the first distance. The elastic part EP can retract the first distance. The distance between the lower surface of the upper chamber UCB and the upper electrostatic chuck UESC can extend the first distance. For example, since the length of the first shaft SH1 is constant, the vertical moving part VM can move the first distance in the downward direction, the upper electrostatic chuck UESC can be spaced apart from the lower surface of the upper chamber UCB by the first distance, and the second-1 distance D21 and the third-1 distance D31 can be... Figure 12B The second-first distance D21 and the third-first distance D31 are the same, so the window WIN can contact the adhesive layer AL (e.g., direct contact).

[0119] Figure 12D This is a schematic diagram showing the state in which the window WIN and the display module DM are bonded together via the adhesive layer AL during the bonding process.

[0120] Reference Figure 12D The vertically moving portion VM can move in the downward direction. When the vertically moving portion VM moves in the downward direction, the window WIN, which is the processing object set on the lower surface of the upper electrostatic chuck UESC, can be engaged with the adhesive layer AL and the display module DM, which are the processing objects set on the upper surface of the lower electrostatic chuck LESC. For example, the vertically moving portion VM can move a first distance in the downward direction (e.g., in the direction opposite to the third direction DR3).

[0121] The first movable rod MB1 can move towards the first body B1 by a second distance shorter than the first distance. The second distance can be half the first distance. The first movable rod MB1 can perform piston-like motion and move the second distance within the first body B1, therefore the third-first distance D31a can be shorter than the first distance. Figure 12C The third-1st distance D31 is the shortest second distance.

[0122] The guide rod GB can perform piston movement inside the cylinder at the upper part of the guide rod GB, and move a second distance in the third direction DR3. Therefore, the second-first distance D21a can be greater than... Figure 12C The second-1st distance D21 is the shortest second distance.

[0123] Even when the first movable rod MB1 and the guide rod GB perform piston movement and move a second distance on the third direction DR3, and the vertical moving part VM moves a first distance in the downward direction, the first plate PL1 can also move a second distance. Therefore, the first-1 distance D11b can be greater than... Figure 12C The first distance D11a is shorter than the second distance. The elastic part EP can retract to the second distance. The distance between the lower surface of the upper chamber UCB and the upper electrostatic chuck UESC can be further extended to the second distance. Figure 12B Compared to the distance between the lower surface of the upper chamber UCB and the upper electrostatic chuck UESC, the distance between the lower surface of the upper chamber UCB and the upper electrostatic chuck UESC can be obtained by summing (or adding) the first distance and the second distance. For example, since the length of the first axis SH1 is constant, the vertical moving part VM moves a first distance, and the distance between the upper electrostatic chuck UESC and the lower surface of the upper chamber UCB can be further extended by a second distance, so that the adhesive layer AL can bond the window WIN and the display module DM. The adhesive layer AL can have a thickness that reduces the second distance, thereby bonding the window WIN and the display module DM.

[0124] Figure 12E This is a schematic diagram showing the state in which the upper electrostatic chuck is separated after the vacuum state is released following the bonding process.

[0125] Reference Figure 12E The second cylinder SL2 can apply a force equal to the total weight of the first cylinder SL1, support plate SP, first plate PL1, first shaft SH1, elastic part EP, and upper electrostatic chuck UESC on the third-party direction DR3. The vertically moving part VM can move on the third-party direction DR3 via the second cylinder SL2. The vertically moving part VM can move a first distance on the third-party direction DR3. The vacuum inside the chamber CHB can be released before the vertically moving part VM moves.

[0126] The elastic portion EP can be stretched a second distance on the third direction DR3. The first-to-first distance D11a can be represented as becoming more than Figure 12D The first-1 distance D11b is longer than the second distance, and it indicates that it becomes longer than... Figure 12B The distance D11 is shorter than the first length. Since the length of the first axis SH1 is constant, the distance between the lower surface of the upper chamber UCB and the upper electrostatic chuck UESC can be the first distance.

[0127] The first movable rod MB1 can perform piston movement within the first body B1 of the first cylinder SL1. When the vertical moving part VM moves on the third direction DR3 (or when the vertical moving part VM moves on the third direction DR3), the first movable rod MB1 can be repositioned within the first body B1 in the direction opposite to the third direction DR3 to the second distance. Therefore, the third-1 distance D31 can become more than... Figure 12D The third-first distance D31a is the second distance.

[0128] The guide rod GB can perform piston movement inside the cylinder at the upper part of the guide rod GB, and move a second distance in the opposite direction to the third direction DR3. Therefore, the second-first distance D21 can become greater than Figure 12D The second distance is the second distance of the second-1st distance D21a.

[0129] Figure 12F and Figure 12G This is a schematic diagram showing the state in which the chambers are separated after the joining process.

[0130] Reference Figure 12F The vertically moving part VM can move along the third direction DR3. The vertically moving part VM can move a first distance along the third direction DR3. The elastic part EP can stretch a first distance along the third direction DR3. The vertically moving part VM can move a first distance, and the elastic part EP can stretch a first distance. Therefore, the upper electrostatic chuck UESC can move a first distance along the third direction DR3. The first distance D11c can become more than... Figure 12E The first distance D11a is longer than the first distance, and becomes the same as the first distance. Figure 12B The distance from the first to the first point is equal to that of D11.

[0131] Reference Figure 12G When the second cylinder SL2 applies back pressure to the third-party axis DR3, the vertically moving part VM can move on the third-party axis DR3, thus separating the upper chamber UCB and the lower chamber LCB. This separation allows the upper chamber UCB and the lower chamber LCB to be separated, and finally, the connection between the window WIN and the display module DM can be completed.

[0132] According to an embodiment, the first cylinder can apply thrust, and the second cylinder can apply back pressure. The failure to connect the display module and the window can be prevented by separating the thrust portion and the back pressure portion.

[0133] In concluding this detailed description, those skilled in the art will understand that many variations and modifications can be made to the embodiments without substantially departing from the principles, spirit, and scope of the disclosure. Therefore, the disclosed embodiments are used in a general and descriptive sense only and not for limiting purposes.

Claims

1. A joining device, the joining device comprising: Lower electrostatic chuck; The upper electrostatic chuck is positioned above the lower electrostatic chuck. The elastic portion is located above the upper electrostatic chuck; The first axis is disposed on the upper electrostatic chuck and disposed within the space defined inside the elastic portion; The first plate is disposed on the first shaft and the elastic portion; The bracket is mounted on the first plate; The first cylinder is mounted on the bracket; The guide rod is mounted on the first plate; as well as The second cylinder is arranged adjacent to the guide rod in the horizontal direction and is connected to the upper end of the guide rod.

2. The joining device according to claim 1, further comprising: A support plate, disposed above the first plate, includes holes, wherein... The first cylinder is mounted on the support plate and extends toward the bracket. The second cylinder is mounted on the support plate, and The guide rod extends above the support plate through the hole in the support plate.

3. The joining device according to claim 2, wherein, The first cylinder includes: The first main body is disposed on the support plate; and A first movable rod, connected to the lower part of the first body, extends below the support plate and is mounted on the bracket. The first movable rod is vertically movable.

4. The coupling device according to claim 3, wherein, The first movable rod is either separated from the bracket or in contact with the upper surface of the bracket.

5. The joining device according to claim 3, further comprising: A support column is adjacent to one side of the support plate; as well as The vertically movable portion is connected to one side of the support plate and the support column, and moves in the vertical direction.

6. The coupling device according to claim 5, wherein, When the workpieces respectively disposed on the upper surface of the lower electrostatic chuck and the lower surface of the upper electrostatic chuck are joined together, The vertically moving part can move a first distance in the downward direction, and The first movable rod can move towards the first body a second distance shorter than the first distance.

7. The coupling device according to claim 2, wherein, The second cylinder includes: The second main body is disposed on the support plate; and The second movable rod is connected to the upper part of the second body, extends upward, and is connected to the upper end of the guide rod. The second movable rod is vertically movable.

8. The joining device according to claim 7, further comprising: A connecting rod is connected to the upper end of the guide rod and the upper end of the second movable rod.

9. The coupling device according to claim 1, wherein, The first cylinder is configured to be multiple. The second cylinder is configured to be multiple. Multiple first cylinders are arranged in the first direction, and A plurality of second cylinders are spaced apart from the plurality of first cylinders in a second direction intersecting the first direction, and are arranged in the first direction.

10. The coupling device according to claim 9, wherein, The guide rods are configured in multiple ways. Multiple guide rods are arranged in the first direction and spaced apart from the multiple first cylinders in the second direction, and Each of the plurality of second cylinders is disposed between adjacent guide rods in the plurality of guide rods.

11. The joining device according to claim 1, further comprising: The second axis is located below the lower electrostatic chuck. as well as The second plate is positioned below the second shaft.

12. The coupling device according to claim 1, wherein, The upper surface of the lower electrostatic chuck has a concave curved surface, and The lower surface of the upper electrostatic chuck has a convex curved surface.

13. The coupling device according to claim 12, wherein, The display module is disposed on the upper surface of the lower electrostatic chuck, and The window is disposed on the lower surface of the upper electrostatic chuck.

14. The coupling device according to claim 1, wherein, The elastic portion provides elastic force to the first plate and the upper electrostatic chuck in the vertical direction.

15. A joining device, the joining device comprising: Lower electrostatic chuck; The upper electrostatic chuck is positioned above the lower electrostatic chuck. The elastic portion is located above the upper electrostatic chuck; The first axis is disposed on the upper electrostatic chuck and disposed within the space defined inside the elastic portion; The first plate is disposed on the first shaft and the elastic portion; The bracket is mounted on the first plate; The first cylinder includes: a first body disposed on the bracket; and a first movable rod extending from the first body toward the bracket and disposed on the bracket; Guide rod, disposed on the first plate; and The second cylinder is arranged adjacent to the guide rod in the horizontal direction and is connected to the upper end of the guide rod.

16. The coupling device according to claim 15, wherein, The first movable rod is either separated from the bracket or in contact with the upper surface of the bracket.

17. The joining device according to claim 15, further comprising: A support plate is disposed above the first plate, wherein... The second cylinder includes: a second body disposed on the support plate; and a second movable rod connected to the upper part of the second body and extending upward, and connected to the upper end of the guide rod. The second movable rod is vertically movable.

18. A joining device, the joining device comprising: Lower electrostatic chuck; The upper electrostatic chuck is positioned above the lower electrostatic chuck. The elastic portion is located above the upper electrostatic chuck; The first axis is disposed on the upper electrostatic chuck and disposed within the space defined inside the elastic portion; The first plate is disposed on the first shaft and the elastic portion; The bracket is mounted on the first plate; The first cylinder is mounted on the bracket; The guide rod is mounted on the first plate; The second cylinder is arranged adjacent to the guide rod in the horizontal direction; as well as A connecting rod is connected to the upper end of the guide rod and the upper end of the second cylinder.

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