Connecting device and processing chamber comprising same

Abstract

The invention provides a connecting device and a processing chamber comprising the same, the connecting device is configured at the outer side part of an upper cover in a manner that a first surface of the connecting device penetrates to the inner side wall of the upper cover of the processing chamber, and the connecting device comprises a connecting part, a second surface, opposite to the first surface, of the connecting device, and a connecting part, the opening and closing device is used for opening and closing the upper cover; and the connecting pipeline is located in the connecting device, the first end of the connecting pipeline is located on the first surface of the connecting device, the second end of the connecting pipeline is located on the surface, except the first surface, of the connecting device, and the connecting pipeline is used for enabling heat exchange fluid to flow into and / or flow out of the machining cavity.

Description

Technical Field

[0001] The present invention relates to a connecting device and a processing chamber including the thereof, specifically to an integrated multifunctional connecting device and a processing chamber including the thereof capable of connecting an opening and closing device, connecting a fluid source, and storing cables. Background Technology

[0002] With the development of semiconductor technology, semiconductor processing technology is becoming increasingly complex. In order to meet the various conditions required to implement these semiconductor processing technologies, the structure of semiconductor processing equipment is becoming more and more complex, which in turn makes the assembly, operation, maintenance, and repair of semiconductor processing equipment increasingly difficult.

[0003] Taking Chemical Vapor Deposition (CVD) as an example, the processing chamber generally consists of an open upper shell and an open upper lid cover of the shell that can be opened and closed. The shell houses a substrate support, a substrate heater, and a substrate lifter, while the lid houses a shower head, a shower head heating device, and a process gas conditioning device. In particular, as the lid is an openable and closable component, its two outer walls are typically connected to opening and closing devices (e.g., piston cylinders). Therefore, a connection structure for connecting these opening and closing devices is required on its outer side.

[0004] Furthermore, chemical vapor deposition (CVD) processes require vacuum and high-temperature conditions. Therefore, the processing chamber needs to be equipped with various pipelines for vacuuming and heat exchange. Consequently, not only are the cables and pipes responsible for various functions inside and outside the processing chamber intricately connected, but multiple holes need to be made in the housing and / or top cover to run these cables and pipes to connect the devices or systems inside and outside the processing chamber. This negatively impacts the overall sealing performance of the processing chamber and its stability under external interference.

[0005] Therefore, there is a current need for an integrated, multifunctional connection device that can connect to the opening and closing device, connect to the fluid source, and store cables, as well as a processing chamber including the device, to reduce the difficulty of assembling, operating, maintaining, and repairing semiconductor processing equipment. Summary of the Invention

[0006] Technical issues

[0007] The purpose of this invention is to provide a connecting device that is an integrated, multifunctional device capable of connecting an opening and closing device, connecting a fluid source, and storing cables.

[0008] Another object of the present invention is to provide a processing chamber having the connection device of the present invention.

[0009] Technical solution

[0010] One embodiment of the present invention provides a connecting device disposed on the outer side of the upper cover of a processing chamber, wherein the connecting device extends through the inner wall of the upper cover of the processing chamber via a first surface, wherein the connecting device includes: a connecting portion located on a second surface of the connecting device opposite to the first surface, for connecting an opening and closing device for opening and closing the upper cover; and a connecting pipe located inside the connecting device, with a first end located on the first surface of the connecting device and a second end located on a surface of the connecting device other than the first surface, for allowing heat exchange fluid to flow into and / or out of the processing chamber.

[0011] In one embodiment of the present invention, the connecting portion may be a shaft extending outward from the second surface of the connecting device, so as to be rotatably connected to the opening and closing device.

[0012] In one embodiment of the invention, a port for connecting to an external fluid source may be provided at the second end of the connecting pipe.

[0013] In one embodiment of the invention, a receiving portion recessed into the interior of the connecting device may be formed on the surface of the connecting device at the location where the port is configured, so as to receive the port.

[0014] In one embodiment of the invention, the receiving portion may extend laterally to at least one of the surfaces of the connecting device other than the first surface.

[0015] In one embodiment of the present invention, the connecting pipeline may include: a supply pipeline for supplying heat exchange fluid; and a discharge pipeline for discharging heat exchange fluid.

[0016] In one embodiment of the present invention, the first end of the supply pipeline and the first end of the discharge pipeline may each branch into multiple branches.

[0017] In one embodiment of the present invention, control valves may be provided on each of the plurality of branches to switch the plurality of branches on and off.

[0018] In one embodiment of the invention, a support portion may be further included, the support portion being located on any of the surfaces of the connecting device other than the first surface, for receiving cables.

[0019] In one embodiment of the invention, the connecting device may be formed of one or more materials selected from aluminum alloy, copper, nickel, stainless steel, ferrite and silver.

[0020] Another embodiment of the present invention provides a processing chamber including the above-described connecting device.

[0021] Beneficial effects

[0022] The connecting device of the present invention has the functions of connecting opening and closing devices, connecting fluid sources, and storing cables. Therefore, it has a simple and compact structure and is easy to operate and maintain.

[0023] The processing chamber of the present invention is equipped with the connection device of the present invention, therefore, the structure is simple and compact, and it has higher sealing performance and operational stability, and is easy to operate and maintain. Attached Figure Description

[0024] Figure 1 This is a schematic diagram showing the connecting devices of one embodiment of the present invention respectively disposed on the two side walls of the upper cover of the processing chamber.

[0025] Figure 2 yes Figure 1 Right view of the processing chamber.

[0026] Figure 3 yes Figure 1 A schematic diagram of the connection structure of part A in the diagram.

[0027] Figure 4 This is a front view of a connecting device according to one embodiment of the present invention.

[0028] Figure 5 This is a left view showing the connecting pipes within a connecting device according to an embodiment of the present invention.

[0029] Figure 6 This is a front view showing a connecting device with a storage section according to an embodiment of the present invention.

[0030] Figure 7 This is a front view showing the supply and discharge pipes within a connecting device according to an embodiment of the present invention.

[0031] Figure 8 This is a left view showing the first end of the supply pipe in the connecting device of one embodiment of the present invention branching into two branches.

[0032] Figure 9 This is a front view of a connecting device with a support portion according to one embodiment of the present invention.

[0033] Figure 10 This is a top view of a connecting device with a support portion according to one embodiment of the present invention.

[0034] Figure Labels

[0035] 100: Connecting device

[0036] 101: First Surface

[0037] 102: Second Surface

[0038] 110: Connecting part

[0039] 120: Connecting pipes

[0040] 121: Supply pipeline

[0041] 121a: First supply branch

[0042] 121b: Second supply branch

[0043] 122: Discharge pipeline

[0044] 130: Port

[0045] 131: Storage Department

[0046] 140: Support section

[0047] 200: Machining Chamber

[0048] 210: Top Cover

[0049] 220: Casing

[0050] 230: Heat exchange piping

[0051] 240: Opening and closing device

[0052] 241: Event End Detailed Implementation

[0053] The following describes one or more embodiments of the present invention in detail with reference to the accompanying drawings. Obviously, these embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0054] The terminology used in the following embodiments is for illustrative or explanatory purposes only and is not intended to limit the scope of protection of the present invention. Furthermore, the singular expressions used in this invention, such as "a," "an," "the," "the," "the," and "this," are intended to include plural forms such as "one or more," unless the context clearly indicates otherwise. It should also be understood that, in embodiments of the present invention, the use of terms such as "one or more," "at least one," and "more than one" is intended to include cases of one, two, and at least three.

[0055] Furthermore, when the terms "in one embodiment," "in some embodiments," or "in one or more embodiments" are used in the description of this invention, it is intended that one or more embodiments of the invention may include specific technical features described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," and "in one or more embodiments" appearing in different parts of this specification do not necessarily refer to the same embodiment, but may refer to both the same embodiment and different embodiments, unless the specific technical features described in those embodiments cannot be used alone or in combination.

[0056] Furthermore, in this invention, when an element is described as "comprising," "containing," or "having" another element, it is intended to be an open-ended definition, meaning that the element may include other elements besides the other element. Conversely, when an element is described as "comprising only," "containing only," "having only," or "consisting of another element," it is intended to be a closed-ended definition, meaning that the element does not include other elements besides the other element. However, it should be noted that when the term "formed by another element" is used to describe the formation relationship between multiple elements, this term is not intended to be a closed-ended definition; it should be considered that the other element forms part of the first element, and the first element may include other elements besides the other element.

[0057] It should be understood that when sequential terms such as "first" and "second" are used in this document to describe various elements, these sequential terms are only used to distinguish one element from another, and should not be interpreted as indicating a primary or secondary relationship, or a sequential relationship. Without departing from the scope of this invention, a first element may be labeled as a second element, and a second element may be labeled as a first element.

[0058] In this invention, when describing the positional relationship between two or more elements, if terms such as "above", "below", or "between" are used, it indicates that one or more other elements may be set between the two or more elements, unless terms such as "exactly" or "adjacent" are used.

[0059] Hereinafter, one or more embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can clearly and completely understand the present invention. When the description of well-known structures or features would unnecessarily obscure the main points of the present invention, the description of such well-known structures or features will be omitted.

[0060] One embodiment of the present invention provides a connecting device that may simultaneously include a connecting portion (e.g., connecting portion 110 described later) for connecting to an external mechanical device (e.g., an opening and closing device for opening and closing the top cover of a processing chamber) and a connecting pipe (e.g., connecting pipe 120 described later) for conveying heat exchange fluid, and may be configured in a processing chamber to simultaneously provide the functions of opening and closing the processing chamber and supplying heat exchange fluid to the processing chamber.

[0061] Hereinafter, the connecting part and the connecting pipeline will be described in detail with reference to the configuration of the connecting device and the processing chamber of the present invention.

[0062] Figure 1 This is a schematic diagram showing the connecting devices of one embodiment of the present invention respectively disposed on the two side walls of the upper cover of the processing chamber. Figure 2 yes Figure 1 Right view of the processing chamber. Figure 3 yes Figure 1 A schematic diagram of the connection structure of part A in the diagram.

[0063] Reference Figures 1 to 3 The processing chamber 200 can be composed of an open upper shell 220 and an openable and closable upper cover 210 connected to the open upper part of the shell 220. The connecting device 100 can be disposed on the outer side of the upper cover 210 such that its first surface 101 extends through to the inner wall of the upper cover 210 of the processing chamber 200. Therefore, the processing chamber 200 only needs to have a mounting hole on the side where the connecting device 100 is installed to accommodate the connecting device 100 and utilize at least two of its functions, such as connecting opening and closing devices, connecting fluid sources, and storing cables.

[0064] When the connecting device 100 is as follows Figure 1 When the connecting devices 100 on both sides of the processing chamber are arranged as shown, the shape and structure of the connecting devices 100 on both sides can be symmetrical or similar to each other, so as to provide the same or similar functions on each side.

[0065] On the other hand, the fastening method between the connecting device 100 and the processing chamber 200 can be a method commonly used in the art, such as bolt fastening, and the connection part between the two can also be sealed using a sealing method commonly used in the art. For example, sealing gaskets such as O-rings, X-rings, D-rings, Y-rings, V-rings, T-rings, triangle rings, square rings, and spiral rings made of any one or more of the following materials: silicone rubber, ethylene propylene diene monomer (EPDM), nitrile butadiene rubber (NBR), polytetrafluoroethylene (PTFE), fluororubber (FKM), and hydrogenated nitrile butadiene rubber (HNBR) can be used. The present invention is not limited to these.

[0066] Figure 4 This is a front view of a connecting device according to one embodiment of the present invention.

[0067] Further reference Figure 4 The connecting portion 110 may be located on the second surface 102 of the connecting device 100 opposite to the first surface 101. The connecting portion 110 is used to connect to the opening and closing device 240 for opening and closing the upper cover 210. The opening and closing device 240 can be a commonly used opening and closing device in the art, such as a piston-type drive device, etc. In this case, it is shown in... Figure 3 The movable end 241 can be connected to the connecting part 110 and the upper cover 210 can be opened or closed by pushing or pulling the connecting part 110. The connecting part 110 can be, for example, a shaft extending outward from the second surface 102 of the connecting device 100, so as to be rotatably connected to the opening and closing device 240. In this case, it is not only convenient to connect to the opening and closing device 240, but also the pushing or pulling force from the opening and closing device 240 can always be converted into a force in the opening and closing direction of the upper cover 210, so as to smoothly open and close the upper cover 210.

[0068] Furthermore, in the accompanying drawings of the present invention, the connecting device 100 has a generally rectangular shape, but the present invention is not limited thereto. The connecting device 100 may have an appropriate shape according to actual needs, and its volume may be increased or decreased to have an appropriate size, as long as the connecting part 110, the connecting pipe and the support part described later can be configured and operated smoothly.

[0069] In a preferred embodiment, the first surface 101 of the connecting device 100 may be planar or conform to the shape of the inner sidewall of the upper cover 210 to prevent the first surface 101 from occupying too much of the internal space of the upper cover 210. Additionally, at least the portion of the second surface 102 of the connecting device 100 used for providing the connecting portion 110 may be planar to facilitate the placement of the connecting portion 110.

[0070] On the other hand, although not shown, a cover portion extending along the extension direction of the connecting portion 110 and surrounding the outer end of the connecting portion 110 may be provided on the upper surface of the connecting device 100 to both protect the connecting portion 110 and the part of the opening and closing device 240 connected to the connecting portion 110 (e.g., the movable end 241), and to reinforce the connecting portion 110.

[0071] Figure 5 This is a left view showing the connecting pipes within a connecting device according to an embodiment of the present invention.

[0072] like Figure 5 As shown, the connecting conduit 120 may be located inside the connecting device 100 and may extend from one side of the connecting device 100 to a side different from the first side. Specifically, the first end of the connecting conduit 120 may be located on the first surface 101 of the connecting device 100, while the second end of the connecting conduit 120 may be located on a surface of the connecting device 100 other than the first surface 101, for example, it may be as follows: Figure 5 The lower surface of the connecting device 100 shown.

[0073] The connecting pipe 120 allows heat exchange fluid to flow into and / or out of the processing chamber 200. Specifically, external heat exchange fluid can enter the connecting pipe 120 from the second end and be transported through the connecting pipe 120 to the first end and flow into the processing chamber 200. Afterward, it flows in the heat exchange pipe 230 and performs the heat exchange operation required by the processing chamber 200. Alternatively, the heat exchange fluid that has completed the heat exchange operation in the processing chamber 200 can enter the connecting pipe 120 from the first end and be transported through the connecting pipe 120 to the second end and flow out of the processing chamber 200. Afterward, it undergoes temperature adjustment in an external fluid source (not shown) in preparation for re-flowing into the processing chamber 200.

[0074] The cross-sectional shape, length, and extension path of the connecting pipe 120 can be appropriately selected by those skilled in the art based on actual conditions (e.g., the flow velocity, flow direction, and inflow angle of the heat exchange fluid). Furthermore, depending on actual needs, the heat exchange operation can be various operations such as heat preservation, heating, and cooling, and the heat exchange fluid can be in various forms such as gas and liquid, for example, water at 80°C. This invention is not limited to these; any operation that enables the required heat exchange can be performed.

[0075] Furthermore, such as Figure 5The second end of the connecting pipe 120 may be provided with a port 130 for connecting to an external fluid source. In this case, one end of a hose can be connected to, for example, the fluid inlet / outlet of the fluid source, and the other end can be connected to the port 130, thereby easily connecting the connecting pipe 120 to the fluid source. The connection between the port 130 and the hose can be made using threaded connections or other methods commonly used in the art. Furthermore, the connection can be sealed using sealing gaskets or other commonly used sealing methods in the art, such as O-rings, X-rings, D-rings, Y-rings, V-rings, T-rings, triangle rings, square rings, and spiral rings, made from any one or more of the following materials: silicone rubber, EPDM, NBR, PTFE, FKM, and HNBR. However, the invention is not limited to these methods.

[0076] exist Figure 5 In this invention, the pipe inside the port 130 extends in a straight line, but the invention is not limited to this. Those skilled in the art can choose to use the port 130 with the pipe bent at different angles, such as right angles, according to actual needs, so as to appropriately change the connection direction with the outside, such as a hose, etc., thereby facilitating assembly, disassembly, maintenance and other operations, while avoiding interference with the operation of the opening and closing device 240 connected to the connection part 110.

[0077] Figure 6 This is a front view showing a connecting device with a storage section according to an embodiment of the present invention.

[0078] like Figure 6As shown, in one embodiment, a recessed receiving portion 131 can be formed on the surface of the connecting device 100 at the location where the port 130 is configured, to receive the port 130, thereby preventing the connecting device 100 from becoming too large due to the port 130. Preferably, the receiving portion 131 can extend laterally to at least one of the surfaces of the connecting device 100 other than the first surface 101, to form a larger open space around the port 130, thereby not only reducing the size and weight of the connecting device 100, but also facilitating assembly, disassembly, maintenance, and other operations.

[0079] For example, when the second end of the connecting pipe 120 is located on the second surface 102 of the connecting device 100, the port 130 is disposed on the second surface 102 of the connecting device 100. The receiving portion 131 is formed on the second surface 102 where the port 130 is disposed to receive the port 130, thereby preventing the port 130 from protruding too much from the second surface 102 of the connecting device 100 and interfering with the operation of the opening and closing device 240 connected to the connecting portion 110.

[0080] In this preferred embodiment, the receiving portion 131 may extend to at least one of the surfaces of the connecting device 100 adjacent to the second surface 102.

[0081] To show Figure 6 Taking the storage part 131 as an example, the storage part 131 can extend to two of the surfaces of the connecting device 100 adjacent to the second surface 102. In this case, the storage part 131 can be a stepped shape with three open sides, thereby providing enough space for the port 130 to perform assembly, disassembly, maintenance and other operations.

[0082] Of course, the shape of the storage portion 131 is not limited to this. When the storage portion 131 extends to one of the surfaces of the connecting device 100 adjacent to the second surface 102, the storage portion 131 has a stepped shape with two open sides. In this case, sufficient space can also be provided for the port 130.

[0083] When the receiving portion 131 extends through three of the surfaces of the connecting device 100 adjacent to the second surface 102, the receiving portion 131 takes on a stepped shape with four open sides. At this time, sufficient space can be provided for the port 130.

[0084] Furthermore, the recessed bottom surface of the receiving portion 131 can have different curvatures; for example, it can be a flat surface, a protruding curved surface, or a recessed curved surface, and the outline shape of the bottom surface is not limited to such a shape. Figure 6 The quarter circle shown can also be a rectangle, triangle, hexagon, circle or other shapes. Those skilled in the art can make appropriate selections as needed, as long as it is convenient to store and set up the port 130.

[0085] Figure 7 This is a front view showing the supply and discharge pipes within a connecting device according to an embodiment of the present invention.

[0086] like Figure 7 As shown, there can be multiple connecting pipes 120. In this case, the multiple connecting pipes 120 can respectively perform the operation of allowing heat exchange fluid to flow into the processing chamber 200 or allowing heat exchange fluid to flow out of the processing chamber 200. That is, the connecting pipes of the present invention may include a supply pipe 121 and a discharge pipe 122. The supply pipe 121 is used to supply heat exchange fluid so that heat exchange fluid flows into the processing chamber 200, and the discharge pipe 122 is used to discharge heat exchange fluid so that heat exchange fluid flows out of the processing chamber 200.

[0087] Specifically, when the two ends of a heat exchange pipe 230 in the processing chamber 200 are respectively connected to the supply pipe 121 and the discharge pipe 122, the external heat exchange fluid can enter the supply pipe 121 from the second end of the supply pipe 121 and be transported through the supply pipe 121 to the first end of the supply pipe 121 and flow into the processing chamber 200. Then, it flows in the heat exchange pipe 230 and performs the heat exchange operation required by the processing chamber 200. Next, the heat exchange fluid that has completed the heat exchange operation in the processing chamber 200 can enter the discharge pipe 122 from the first end of the discharge pipe 122 and be transported through the discharge pipe 122 to the second end of the discharge pipe 122 and flow out of the processing chamber 200.

[0088] However, the supply pipe 121 and the discharge pipe 122 can also be changed according to the flow direction of the heat exchange fluid in the heat exchange pipe 230 or the supply direction of the heat exchange fluid from an external fluid source. That is, when the flow direction or the supply direction is reversed, the original supply pipe 121 can become the discharge pipe 122, and the original discharge pipe 122 can become the supply pipe 121. Of course, if the flow direction does not need to be changed or should not be changed, check valves or the like can be added to the supply pipe 121 and / or the discharge pipe 122 to prevent backflow of the heat exchange fluid.

[0089] On the other hand, one of the connecting devices 100 may need to supply heat exchange fluid to multiple heat exchange pipes 230. Therefore, multiple supply pipes 121 and multiple discharge pipes 122 can be provided. However, as a preferred embodiment, the first end of the supply pipe 121 and the first end of the discharge pipe 122 can be branched into multiple branches to connect the multiple heat exchange pipes 230 in the processing chamber 200 in parallel. Thus, it is not necessary to increase the connecting pipes 120, but only one supply pipe 121 can be used to supply heat exchange fluid to multiple heat exchange pipes 230 and only one discharge pipe 122 can be used to discharge heat exchange fluid from multiple heat exchange pipes 230.

[0090] Figure 8 This is a left view showing the first end of the supply pipe in the connecting device of one embodiment of the present invention branching into two branches.

[0091] like Figure 8 As shown, in one embodiment, the first end of the supply pipe 121 branches into a first supply branch 121a and a second supply branch 121b. Similarly, the first end of the discharge pipe 122 can also branch into two discharge branches. Thus, the supply pipe 121 and the discharge pipe 122 can connect the two heat exchange pipes 230 in parallel. Furthermore, the number of branches can be adjusted according to the required number of heat exchange pipes 230 connected in parallel.

[0092] Furthermore, control valves (not shown) can be installed on each of the multiple branches to open and close them, thereby controlling the supply of heat exchange fluid to each of the heat exchange pipes 230 and the discharge of heat exchange fluid from each of the heat exchange pipes 230. In this case, when the number of branches exceeds the required number, the excess branches can be closed by the control valves installed on the excess branches, while only the branches connected to the heat exchange pipes 230 are open.

[0093] The connecting device of the present invention, which includes a connecting portion and a connecting pipe, has been described in detail above. Hereinafter, a connecting device further including a support portion will be described in detail.

[0094] Figure 9 This is a front view of a connecting device with a support portion according to one embodiment of the present invention. Figure 10 This is a top view of a connecting device with a support portion according to one embodiment of the present invention.

[0095] Reference Figure 9 and Figure 10As a further preferred embodiment, the connecting device 100 of the present invention may further include a support portion 140, which may be located on any of the surfaces of the connecting device 100 other than the first surface 101, to accommodate cables.

[0096] Specifically, when the bracket portion 140 is located on the second surface 102 of the connecting device 100, its specific configuration position on the second surface 102 should be selected to avoid interfering with the operation of the opening and closing device 240. When the bracket portion 140 is located on a surface of the connecting device 100 other than the first surface 101 and the second surface 102, it can avoid the bracket portion 140 itself directly interfering with the operation of the opening and closing device 240. However, its arrangement should avoid the portion of the cable extended from the bracket portion 140 interfering with the operation of the opening and closing device 240 or the opening and closing of the upper cover 210.

[0097] The bracket portion 140 may, for example, use an openable and closable ring structure to secure and detach the cable. Alternatively, the bracket portion 140 may also be other shapes, such as an open ring, as long as it is open at least at both ends and has internal storage space.

[0098] On the other hand, semiconductor processing technologies such as chemical vapor deposition often use radio frequency (RF) to heat the substrate. Therefore, the connection device 100 is preferably formed of a material capable of shielding RF to avoid RF interference with the connection device 100 itself, the heat exchange fluid flowing in the connection conduit 120, and the cables housed in the support portion 140. For example, the connection device 100 may be formed of one or more materials selected from aluminum alloys, copper, nickel, stainless steel, ferrite, and silver. More specifically, the entire connection device 100 may be formed of the aforementioned RF-shielding material, or only its surface may be formed of the aforementioned RF-shielding material, for example, by forming a plating, coating, or shell.

[0099] The above provides a detailed description of a connecting device according to one embodiment of the present invention. As can be seen, the connecting device of the present invention simultaneously has the functions of connecting opening and closing devices, connecting fluid sources, and storing cables. Therefore, it has a simple and compact structure and is easy to operate and maintain.

[0100] Another embodiment of the present invention provides a processing chamber.

[0101] The following describes a processing chamber according to another embodiment of the present invention, but details that are repeated above are omitted.

[0102] Refer again Figures 1 to 3 In one embodiment of the present invention, the processing chamber 200 may include the connecting device 100 of the present invention.

[0103] As one embodiment, the processing chamber 200 may further include a heat exchange pipeline 230, which is connected to the connecting pipeline 120 in the connecting device 100 to perform heat exchange operation using the heat exchange fluid in the connecting pipeline 120.

[0104] The heat exchange pipes 230 can be configured at locations within the processing chamber 200 requiring heat exchange operations, such as the inner wall of the upper cover 210 or the spray head. Specifically, when the spray head needs heating, a heating fluid can be supplied to the heat exchange pipes 230 located on the spray head side via the connecting pipe 120 in the connecting device 100 to heat the spray head. For example, when the upper cover 210 overheats, a cooling fluid can be supplied to the heat exchange pipes 230 located on the upper cover 210 side via the connecting pipe 120 in the connecting device 100 to cool the upper cover 210. Furthermore, multiple heat exchange pipes 230 can be connected in parallel via the connecting device 100.

[0105] On the other hand, the processing chamber 200 of the present invention can be further connected to the opening and closing device 240 for opening and closing the upper cover 210 via the connecting portion 110 of the connecting device 100, and the support portion 140 of the connecting device 100 can further accommodate messy cables. Therefore, the processing chamber 200 of the present invention has a simple and compact structure, higher sealing performance and operational stability, and is easy to operate and maintain.

[0106] The embodiments of the present invention have been described above, but this is only for the purpose of helping to fully understand the present invention. The present invention is not limited thereto, and those skilled in the art can make various modifications and variations based on these descriptions. Therefore, the technical concept of the present invention is not limited to the above-described embodiments, and the appended claims and their equivalents or variations are all within the scope of the present invention.

Claims

1. A connecting device, characterized in that, It is disposed on the outer side of the upper cover such that its first surface extends through the inner wall of the upper cover of the processing chamber. The connecting device includes: A connecting portion, located on a second surface of the connecting device opposite to the first surface, is used to connect an opening and closing device for opening and closing the upper cover; and A connecting pipe is located inside the connecting device, with a first end located on the first surface of the connecting device and a second end located on a surface of the connecting device other than the first surface, which is used to allow heat exchange fluid to flow into and / or out of the processing chamber.

2. The connecting device according to claim 1, characterized in that, The connecting portion is a shaft extending outward from the second surface of the connecting device, so as to be rotatably connected to the opening and closing device.

3. The connecting device according to claim 1, characterized in that, The second end of the connecting pipe is provided with a port for connecting to an external fluid source.

4. The connecting device according to claim 3, characterized in that, A recessed receiving portion is formed on the surface of the connecting device at the location where the port is configured, so as to receive the port.

5. The connecting device according to claim 4, characterized in that, The receiving portion extends laterally to at least one of the surfaces of the connecting device other than the first surface.

6. The connecting device according to claim 1, characterized in that, The connecting pipeline includes: Supply piping for supplying heat exchange fluid; and Discharge pipes are used to discharge heat exchange fluid.

7. The connecting device according to claim 6, characterized in that, The first end of the supply pipeline and the first end of the discharge pipeline each branch into multiple branches.

8. The connecting device according to claim 7, characterized in that, Control valves are installed on each of the multiple branches to switch the multiple branches on and off.

9. The connecting device according to claim 1, characterized in that, It further includes a support portion located on any of the surfaces of the connecting device other than the first surface, for receiving cables.

10. The connecting device according to claim 1, characterized in that, The connecting device is formed of one or more materials selected from aluminum alloy, copper, nickel, stainless steel, ferrite and silver.

11. A processing chamber, characterized in that, Includes the connecting device as described in any one of claims 1 to 10.

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