Pressure driving device, displacement amplifier and detection device

Abstract

The invention provides a pressure driving device, a displacement amplifier and a detection device, and relates to the technical field of displacement detection, the device comprises a measuring assembly formed by stacking a plurality of Van der Waals material layers, and any Van der Waals material layer is in non-common contact with the adjacent Van der Waals material layer; external force is applied above the measuring assembly, the force application direction of the external force is perpendicular to the Van der Waals material layers, any Van der Waals material layer is dissociated from the adjacent Van der Waals material layer, the Van der Waals material layer moves in the direction perpendicular to the force application direction of the external force, and the movement displacement of the Van der Waals material is in positive correlation with the magnitude of the external force. The to-be-measured piece is measured through the measurement assembly composed of the Van der Waals material layer, the induction precision can be improved, meanwhile, the induction lower limit can be reduced, and induction of tiny motion is achieved.

Description

Technical Field

[0001] This disclosure relates to the field of pressure drive technology, and in particular to a pressure drive device, a displacement amplifier, and a detection device. Background Technology

[0002] Current displacement sensors can generally only detect displacements at the millimeter level and above, failing to detect minute displacements, which is detrimental to the manufacturing of precision components. Similarly, current pressure sensors generally lack sufficient precision in pressure detection, also unable to detect minute pressures. Therefore, there is an urgent need for a reliable and direct method to amplify minute movements such as displacement or pressure, enabling sensors and other devices to detect them and utilize them in the manufacturing of precision components. Summary of the Invention

[0003] This disclosure aims to at least partially address one of the technical problems in the related art.

[0004] Therefore, one object of this disclosure is to provide a pressure-driven device.

[0005] The second objective of this disclosure is to provide a displacement amplifier.

[0006] The third objective of this disclosure is to provide a detection device.

[0007] To achieve the above objectives, a first aspect of this disclosure provides a pressure-driven device, comprising: a measuring component composed of a plurality of van der Waals material layers stacked together, wherein any one of the van der Waals material layers is in incommensurate contact with an adjacent van der Waals material layer; an external force is applied above the measuring component, the direction of the applied external force being perpendicular to the van der Waals material layers; any one of the van der Waals material layers is separated from an adjacent van der Waals material layer, and the van der Waals material layer moves in a direction perpendicular to the applied external force, wherein the displacement of the van der Waals material is positively correlated with the magnitude of the external force.

[0008] According to one embodiment of this disclosure, the apparatus further includes: a substrate, on which the van der Waals material layer is stacked; and an island cover disposed on the upper part of the measuring component, the island cover being made of silicon dioxide or metal.

[0009] According to one embodiment of this disclosure, the external force applied above the measuring component is not less than 100 micronewtons, and the length and width of the cross-section of the measuring component are both greater than or equal to 1 micrometer and less than or equal to 20 micrometers.

[0010] According to one embodiment of this disclosure, the measuring component includes at least 10 van der Waals material layers, all of which have a thickness greater than or equal to 1 micrometer and less than or equal to 100 micrometers.

[0011] According to one embodiment of this disclosure, all van der Waals material layers of the measuring component are made of the same material, which is one of graphene, hexagonal boron nitride, molybdenum disulfide, and tungsten disulfide.

[0012] According to one embodiment of this disclosure, in the direction of displacement of any of the van der Waals material layers, the thickness on one side is less than the thickness on the other side.

[0013] According to one embodiment of this disclosure, the external force is applied by the component to be tested at a constant speed perpendicular to the van der Waals material layer.

[0014] To achieve the above objectives, a second aspect of this disclosure provides a displacement amplifier, including a pressure driving device as described in the first aspect embodiment. An external force applied to the pressure driving device is applied by a displacement motion component, which includes a fixed portion and a movable portion. One end of the movable portion moves perpendicular to the van der Waals material layer of the pressure driving device.

[0015] To achieve the above objectives, a third aspect of this disclosure provides a detection device, comprising: a pressure driving device as described in the first aspect embodiment or a displacement amplifier as described in the second aspect embodiment; and a displacement sensor for detecting the displacement of a van der Waals material layer.

[0016] Therefore, by using a measurement assembly composed of van der Waals material layers to measure the workpiece, the accuracy of sensing can be improved, while the lower limit of sensing can be lowered, enabling the sensing of minute movements. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of a pressure driving device according to one embodiment of the present disclosure; Figure 2 This is a schematic diagram of the structure of another pressure driving device according to one embodiment of the present disclosure; Figure 3 This is a displacement amplifier according to one embodiment of the present disclosure; Figure 4 This is a schematic diagram of the structure of a detection device according to one embodiment of the present disclosure. Detailed Implementation

[0018] Embodiments of this disclosure are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this disclosure, and should not be construed as limiting this disclosure.

[0019] The acquisition, storage, use, and processing of data in this disclosed technical solution all comply with the relevant provisions of relevant laws and regulations.

[0020] It should be noted that in the embodiments of this application, certain software, components, models and other existing solutions in the industry may be mentioned. These should be regarded as exemplary and are only intended to illustrate the feasibility of implementing the technical solution of this application. However, it does not mean that the applicant has used or necessarily used the solution.

[0021] Figure 1 This is a schematic diagram of the structure of a pressure driving device according to one embodiment of the present disclosure, as shown below. Figure 1 As shown, the device includes a measurement component consisting of multiple van der Waals material layers stacked together, wherein any van der Waals material layer is in incommensurable contact with an adjacent van der Waals material layer.

[0022] It should be noted that van der Waals materials, also known as layered van der Waals materials or two-dimensional (2D) materials, are a class of materials with unique electronic, optical, and mechanical properties, which are bonded together by van der Waals forces. Van der Waals forces are relatively weak intermolecular forces, including induced dipole-induced dipole interactions, permanent dipole interactions, and dispersion forces (London forces). Because these forces are weak, these materials possess unique peelability and tunability, allowing them to be peeled into atomically thin sheets, exhibiting properties different from their bulk form. Van der Waals materials are quite sensitive, exhibiting regular deformation under extremely small forces.

[0023] It should be noted that incommensurate contact refers to a contact state between two or more object surfaces where their unit lengths or angles are not identical. In engineering and mechanical design, incommensurate contact can cause problems such as uncertain frictional forces and uneven wear. To mitigate the impact of these problems, measures are usually taken, such as adding lubricant or improving the shape of the contact surfaces. Incommensurate contact is an important consideration in finite element analysis because the geometric differences between the contact surfaces must be taken into account when calculating contact forces and deformations.

[0024] The part to be measured is placed on the top of the measuring component, and the bottom of the measuring component is connected to the top of the base.

[0025] It should be noted that, as Figure 1 As shown, an external force is applied above the measuring component, and the direction of the force is perpendicular to the van der Waals material layer. Any van der Waals material layer is separated from the adjacent van der Waals material layer, and the van der Waals material layer moves in the direction perpendicular to the force. The displacement of the van der Waals material is positively correlated with the magnitude of the external force.

[0026] When the force between the object to be measured and the measuring component changes, at least one van der Waals material layer of the measuring component dissociates and pops out.

[0027] By using a measurement assembly composed of van der Waals material layers to measure the workpiece, the accuracy of sensing can be improved, while the lower limit of sensing can be lowered, enabling the sensing of minute movements.

[0028] It should be noted that the pressure driving device in the embodiments of this disclosure can be a driving device for various devices, such as a driving device for an electric motor.

[0029] In one possible implementation, the height of the graphite islands ranges from 1 to 100 micrometers.

[0030] like Figure 2 As shown, taking a measurement assembly composed of three layers of van der Waals material stacked together as an example, when the object to be measured applies an external force to the measurement assembly from the top, the measurement assembly will exhibit a "tongue-out" phenomenon, that is, some van der Waals material layers in the measurement assembly will separate and pop out, and the van der Waals material layers will return to their original position after the pressure is removed. Figure 2 It can be seen that when the "tongue-out" phenomenon occurs, the thickness on one side of any van der Waals material layer is less than the thickness on the other side in the direction of displacement, which indicates that the measuring component is subjected to an external force.

[0031] Therefore, the measuring component can be detected and monitored by the detection element. When the van der Waals material layer disintegrates, it indicates that the force on the measured object and the measuring component has changed or that there is an external force. Due to the properties of van der Waals material, the measuring component is quite sensitive and can detect very small external forces. Based on examples from actual experiments, the following formula is shown:

[0032]

[0033]

[0034]

[0035]

[0036] in, The strain of the detection head of the detection device. For the applied pressure, The contact area between the detection head and the detection point. To test the length of the gold-plated headpiece, For the response of graphite islands, To apply pressure to the graphite island, The contact area of ​​the graphite island under stress. Let be the length of the graphite island subjected to force. For the angular strain of the graphite sheets extending from the graphite island, For changing angles, This refers to the lateral displacement of the graphite sheets extending from the graphite island. Let be the total normal displacement of the graphite sheets extending from the graphite island. To detect the normal displacement of the head, Let be the normal displacement of the graphite sheet extending from the graphite island. This refers to the normal displacement caused by the change in the angle of the graphite sheets extending from the graphite island. This represents the magnification factor from lateral to longitudinal displacement. As can be seen from the above formula and experimental data, the measuring component can amplify the lateral displacement generated by the pressure applied to the island cover by the measured component by at least 100 times, thereby enabling the detection or utilization of minute displacements. This technology can be widely applied within various types of sensors.

[0037] In one possible implementation, the device also includes a substrate on which layers of van der Waals material are stacked.

[0038] The device also includes an island cover, which is positioned above the measuring assembly and is used to place the part to be measured. The part to be measured can be placed at any position on the island cover.

[0039] In one embodiment of this disclosure, the island cover is made of silicon dioxide or metal.

[0040] In practice, to achieve better recognition results, the inventors discovered through experiments that the external force applied above the measuring component should be no less than 100 micronewtons, and the length and width of the measuring component's cross-section should be greater than or equal to 1 micrometer and less than or equal to 20 micrometers. Within this range, accurate pressure detection can be achieved, thereby improving the accuracy of subsequent driving.

[0041] In another possible implementation, in order to achieve better detection results, the inventors discovered through experiments that the measuring component includes at least 10 van der Waals material layers, all of which have a thickness greater than or equal to 1 micrometer and less than or equal to 100 micrometers.

[0042] In one embodiment of this disclosure, the line connecting the center of gravity of the component to be measured and the center of gravity of the island cover is perpendicular to the horizontal plane. This allows for better measurement results.

[0043] In one embodiment of this disclosure, all van der Waals layers of the measurement component are made of the same material, which may be one of graphene, hexagonal boron nitride, molybdenum disulfide, or tungsten disulfide. This ensures that all van der Waals layers of the measurement component have the same properties, thereby improving the stability and linearity of the measurement component.

[0044] Figure 3A displacement amplifier, the displacement amplifier comprising, as Figure 1 The pressure drive device shown is subjected to an external force by a displacement motion component, which includes a fixed part and a moving part. One end of the moving part moves perpendicular to the van der Waals material layer of the pressure drive device.

[0045] It should be noted that the displacement motion component is fixed on the pressure drive device. The fixed part is used to fix the component to be tested, and the moving part is used to apply a force perpendicular to the van der Waals material layer of the pressure drive device to the component to be tested.

[0046] Figure 4 This is a schematic diagram of the structure of a detection device according to one embodiment of the present disclosure, as shown below. Figure 3 As shown, the device includes: Figure 1 The pressure drive device shown or such Figure 3 The displacement amplifier and displacement sensor are shown.

[0047] It should be noted that the displacement sensor includes a light signal transmitter, a light signal reflector, and a processor.

[0048] The optical signal reflector is positioned on the upper part of the base of the displacement detection device and is located on one side of the measurement component of the displacement detection device.

[0049] The optical signal transmitter is positioned directly above the optical signal reflector. The optical signal transmitter is used to send optical signals to the optical signal reflector. When the force between the measured object and the measuring component changes, at least one van der Waals material layer of the measuring component dissociates and pops out. The popped van der Waals material layer blocks the optical signal transmitted by the optical signal transmitter to the optical signal reflector.

[0050] When the light signal is blocked, the processor generates a braking command. It should be noted that there are various types of braking commands, and no specific limitations are made here. For example, the braking command could be a device start command, a device stop command, or a device state change command, etc.

[0051] Therefore, through such Figure 1 The pressure drive device shown or such Figure 3 The displacement amplifier shown can improve the accuracy of sensing and lower the lower limit of sensing, enabling the sensing of minute movements and making it suitable for braking of high-precision instruments.

[0052] It should be noted that personal information collected from users should be used for legitimate and reasonable purposes and should not be shared or sold outside of these legitimate uses. Furthermore, such collection / sharing should only be conducted after receiving the user's informed consent, including but not limited to notifying the user to read the user agreement / user notice and sign an agreement / authorization that includes authorization of relevant user information before the user uses the function. In addition, any necessary steps must be taken to protect and safeguard access to such personal information data and ensure that others with access to personal information data comply with their privacy policies and procedures.

[0053] This application is intended to provide an implementation scheme for users to selectively prevent the use or access to their personal information data. Specifically, this disclosure is intended to provide hardware and / or software to prevent or block access to such personal information data. Once personal information data is no longer needed, risks can be minimized by restricting data collection and deleting data. Furthermore, where applicable, such personal information is de-identified to protect user privacy.

[0054] In the foregoing descriptions of the embodiments, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0055] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0056] Any process or method description in the flowchart or otherwise herein can be understood as representing a module, segment, or portion of code comprising one or more executable instructions for implementing custom logic functions or processes, and the scope of the preferred embodiments of this application includes additional implementations in which functions may be performed not in the order shown or discussed, including substantially simultaneously or in reverse order depending on the functions involved, as should be understood by those skilled in the art to which embodiments of this application pertain.

[0057] The logic and / or steps represented in the flowchart or otherwise described herein, for example, can be considered as a sequenced list of executable instructions for implementing logical functions, and can be embodied in any computer-readable medium for use by, or in conjunction with, an instruction execution system, apparatus, or device (such as a computer-based system, a processor-included system, or other system that can fetch and execute instructions from, an instruction execution system, apparatus, or device). For the purposes of this specification, "computer-readable medium" can be any means that contains, stores, communicates, propagates, or transmits programs for use by, or in conjunction with, an instruction execution system, apparatus, or device. More specific examples (a non-exhaustive list) of computer-readable media include: an electrical connection having one or more wires (electronic device), a portable computer disk drive (magnetic device), random access memory (RAM), read-only memory (ROM), erasable and editable read-only memory (EPROM or flash memory), fiber optic devices, and portable optical disc read-only memory (CDROM). Alternatively, the computer-readable medium may be paper or other suitable media on which the program can be printed, since the program can be obtained electronically, for example, by optically scanning the paper or other medium, followed by editing, interpreting, or otherwise processing as necessary, and then stored in a computer memory.

[0058] It should be understood that various parts of this application can be implemented using hardware, software, firmware, or a combination thereof. In the above embodiments, multiple steps or methods can be implemented using software or firmware stored in memory and executed by a suitable instruction execution system. For example, if implemented in hardware as in another embodiment, it can be implemented using any one or a combination of the following techniques known in the art: discrete logic circuits having logic gates for implementing logical functions on data signals, application-specific integrated circuits (ASICs) having suitable combinational logic gates, programmable gate arrays (PGAs), field-programmable gate arrays (FPGAs), etc.

[0059] Those skilled in the art will understand that all or part of the steps of the methods in the above embodiments can be implemented by a program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, the program includes one or a combination of the steps of the method embodiments.

[0060] Furthermore, the functional units in the various embodiments of this application can be integrated into a processing module, or each unit can exist physically separately, or two or more units can be integrated into a module. The integrated module can be implemented in hardware or as a software functional module. If the integrated module is implemented as a software functional module and sold or used as an independent product, it can also be stored in a computer-readable storage medium.

[0061] The storage medium mentioned above can be a read-only memory, a disk, or an optical disk, etc. Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of this application.

Claims

1. A pressure-driven device, characterized in that, include: A measurement assembly consisting of multiple van der Waals material layers stacked together, wherein any one of the van der Waals material layers is in incommensurable contact with the adjacent van der Waals material layer; An external force is applied above the measuring component, the direction of the applied force being perpendicular to the van der Waals material layer. Any van der Waals material layer is separated from the adjacent van der Waals material layer, and the van der Waals material layer moves in the direction perpendicular to the applied force. The displacement of the van der Waals material is positively correlated with the magnitude of the external force.

2. The apparatus according to claim 1, characterized in that, The device further includes: The substrate, wherein the van der Waals material layers are stacked on the substrate; An island cover is disposed on the upper part of the measuring component, and the island cover is made of silicon dioxide or metal.

3. The apparatus according to claim 1, characterized in that, The external force applied above the measuring component is not less than 100 micronewtons, and the length and width of the cross-section of the measuring component are both greater than or equal to 1 micrometer and less than or equal to 20 micrometers.

4. The apparatus according to claim 1, characterized in that, The measurement component comprises at least 10 van der Waals material layers, all of which have a thickness greater than or equal to 1 micrometer and less than or equal to 100 micrometers.

5. The apparatus according to claim 1, characterized in that, All van der Waals material layers of the measuring component are made of the same material, which is one of graphene, hexagonal boron nitride, molybdenum disulfide, and tungsten disulfide.

6. The apparatus according to claim 1, characterized in that, In any of the van der Waals material layers, the thickness on one side is less than the thickness on the other side in the direction of displacement.

7. The apparatus according to any one of claims 1 to 6, characterized in that, The external force is applied by the component under test at a constant speed perpendicular to the van der Waals material layer.

8. A displacement amplifier, characterized in that, The pressure drive device includes any one of claims 1 to 7, wherein an external force applied to the pressure drive device is applied by a displacement motion component, the displacement motion component including a fixed part and a movable part, one end of the movable part moving perpendicular to the van der Waals material layer of the pressure drive device.

9. A detection device, characterized in that, include: The pressure drive device as described in any one of claims 1 to 7 or the displacement amplifier as described in claim 8; as well as Displacement sensors used to detect the movement and displacement of van der Waals material layers.

10. The apparatus according to claim 9, characterized in that, The displacement sensor includes a light signal transmitter, a light signal reflector, and a processor; The optical signal reflector is located on the upper part of the base of the pressure driving device and is situated on one side of the measuring component of the pressure driving device. The optical signal transmitter is positioned directly above the optical signal reflector. The optical signal transmitter is used to send an optical signal to the optical signal reflector. When the force between the measured object and the measuring component changes, at least one van der Waals material layer of the measuring component dissociates and pops out. The popped van der Waals material layer blocks the optical signal sent by the optical signal transmitter to the optical signal reflector. The processor generates a braking command when the light signal is blocked.

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