Loading basket for loading multiple layers of silicon wafers
By designing a loading basket for multilayer silicon wafers, and using flipping components and guardrail assemblies to support the wafers, the problem of unsafe wafer retrieval for multilayer silicon wafers was solved, achieving stable loading and safe retrieval of multilayer silicon wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD
- Filing Date
- 2025-12-22
- Publication Date
- 2026-05-12
AI Technical Summary
Existing silicon wafer cleaning equipment cannot safely remove multilayer silicon wafers with three or more layers, and cannot meet the requirements for debonding and removing multilayer silicon wafers.
A loading basket for loading multilayer silicon wafers has been designed, including a fixed bracket, a flipping component, a basket frame, a first guard rod group, and a second guard rod group. The angle of the basket frame can be adjusted by the flipping component, and the silicon wafers can be supported by the guard rod group to ensure that the silicon wafers do not tip over during the flipping process and can be removed layer by layer.
This technology enables safe loading and unloading of multilayer silicon wafers, reduces the impact of the basket frame structure on wafer unloading, and ensures the stability and safety of the silicon wafers.
Smart Images
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Abstract
Description
Technical Field
[0001] This invention relates to the field of silicon wafer manufacturing technology, and more particularly to a loading basket for loading multilayer silicon wafers. Background Technology
[0002] In the field of crystalline silicon photovoltaics, photovoltaic silicon wafers are an important material for the preparation of photovoltaic crystalline silicon cells. They can be made into photovoltaic silicon wafers by cutting, slicing, cleaning and sorting after monocrystalline silicon material is made into silicon rods.
[0003] In related technologies, the stacked rod production process has been adopted for silicon wafer production. This process involves stacking two or more silicon rods and fixing them with adhesive, followed by slicing, cleaning, and sorting processes to improve the production efficiency of the silicon wafer preparation process.
[0004] However, existing equipment for cleaning and debonding silicon wafers all use a single-layer loading method, which is only suitable for single-layer silicon wafer production processes. However, if three or more layers of silicon wafers are loaded, it is easy to encounter the problem of not being able to safely remove the lower layer silicon wafers, and it cannot meet the debonding and wafer removal requirements of multi-layer silicon wafers. Summary of the Invention
[0005] To address the shortcomings of existing technologies, this invention provides a loading basket for loading multilayer silicon wafers. This basket reduces the impact of the basket frame structure on the removal of multilayer silicon wafers, ensures that the loading basket meets the loading and removal requirements of multilayer silicon wafers, and guarantees the safety of removing the silicon wafers from the adhesive.
[0006] To address the aforementioned technical problems, the present invention provides a loading basket for loading multilayer silicon wafers, comprising: The fixed bracket has an internal flip-up mechanism. A flower basket frame is used to load multilayer silicon wafers. The flower basket frame is flipped and connected to the flipping component, which is used to adjust the placement angle of the flower basket frame relative to the fixed support. The flower basket frame is detachably connected with multiple layers of first guard rod groups and multiple layers of second guard rod groups. The first guard rod groups and the second guard rod groups extend along the length direction of the flower basket frame, and the first guard rod groups and the second guard rod groups are respectively located on opposite sides of the flower basket frame. A first width is formed between the first guardrail group and the second guardrail group, and the first width is equal to the rated loading width of the flower basket frame; The number of layers in the first guardrail group and the second guardrail group is greater than or equal to the rated load layer number of the flower basket frame.
[0007] As an improvement to the above scheme, a first gap is formed between two adjacent layers of the first guard rod group, and a first gap is formed between two adjacent layers of the second guard rod group, the first gap being equal to the height of each layer of silicon wafer.
[0008] As an improvement to the above solution, the first guardrail group includes a first guardrail and a second guardrail, and a second spacing between the first guardrail and the second guardrail is 1 / 2 of the first spacing, and the first spacing is formed between two adjacent first guardrails; The structure of the second guard post group is the same as that of the first guard post group.
[0009] As an improvement to the above solution, the flower basket frame has two end plates arranged opposite to each other, and each end plate is connected to the flipping component; The end plate is formed with a first connecting groove and a second connecting groove extending along a preset direction, the preset direction being the arrangement direction of the first guard rod group and the second guard rod group in the same layer; The end of the first guard rod assembly is slidably connected to the first connecting groove, and the end of the second guard rod assembly is slidably connected to the second connecting groove; both the first and second connecting grooves are connected to locking members, and both the first and second guard rod assemblies abut against the locking members.
[0010] As an improvement to the above solution, the first connecting groove forms a first insertion section and a first fixing section, and the second connecting groove forms a second insertion section and a second fixing section; The diameter of the first plug-in section is greater than or equal to the end diameter of the first guard rod assembly, the diameter of the second plug-in section is greater than or equal to the end diameter of the second guard rod assembly, a second width is formed between the first fixing section and the second fixing section, and the second width is less than or equal to the rated loading width.
[0011] As an improvement to the above solution, the locking member has a connecting end and a latching end. The connecting end is connected to the end plate, and the latching end abuts against the first guard rod group and the second guard rod group. The wall surface of the latching end facing away from the connecting end is consistent with the end shape of the first guard rod group and the second guard rod group.
[0012] As an improvement to the above solution, the flipping component includes a flipping shaft, a first locking component, and a second locking component. One end of the flipping shaft is fixedly connected to the flower basket frame, and the other end of the flipping shaft is rotatably connected to the fixed bracket. The flipping shaft is used to drive the flower basket frame to switch between a vertical state and a horizontal state. The first locking member is disposed on the fixed bracket, and the second locking member is disposed on the flower basket frame. In the vertical state, the first locking member is locked to the flower basket frame, and in the horizontal state, the second locking member is locked to the fixed bracket.
[0013] As an improvement to the above solution, the fixed bracket is formed with a first positioning hole, and the first locking member is inserted into the first positioning hole. The flower basket frame has a second positioning hole, and in the vertical state, the first positioning hole and the second positioning hole are coaxial.
[0014] As an improvement to the above solution, the fixed bracket is formed with a connected arc-shaped groove and a horizontal groove, the flower basket frame is formed with an adjustment groove, and one end of the second locking member is slidably connected to the adjustment groove. In the vertical position, the other end of the second locking member is connected to the arc-shaped groove; in the horizontal position, the other end of the second locking member is connected to the horizontal groove.
[0015] As an improvement to the above solution, a support rod is connected inside the flower basket frame, a bearing surface is formed on the top of the flower basket frame, and a preset loading depth is formed between the support rod and the bearing surface, the preset loading depth being equal to the rated loading depth of the flower basket frame.
[0016] Implementing this invention has the following beneficial effects: In this embodiment, the loading basket for loading multilayer silicon wafers can be adjusted from a stacked state to a single-layer state by flipping the basket frame when the wafers need to be removed. The first and second guardrail groups provide pressure on the wafers, ensuring that the wafers do not tip over during the basket frame flipping process. Since each layer of wafers is supported by one or more first and second guardrail groups, the first or second guardrail groups located above the wafers can be removed layer by layer during wafer removal. The weak adhesive bonding between adjacent layers ensures that the wafers do not tip over, while also preventing the first or second guardrail groups from obstructing the wafer removal process. This reduces the impact of the basket frame structure on multilayer wafer removal, ensuring that the loading basket meets the loading and removal requirements of multilayer silicon wafers and guarantees the safety of wafer removal. Attached Figure Description
[0017] Figure 1 is a three-dimensional structural diagram of the flower basket frame when it is placed vertically and the basket is loaded. Figure 2 is a three-dimensional structural diagram of the flower basket frame when it is placed horizontally in this invention, with the basket loaded. Figure 3 is a schematic diagram of the main view of the loading basket structure when the flower basket frame is placed vertically in this invention. Figure 4 is a schematic diagram of the main view of the loading basket structure when the flower basket frame is placed horizontally in this invention. Figure 5 is a schematic diagram showing the relative positions of the first guard rod group, the second guard rod group, and the silicon wafer in this invention. Figure 6 is a three-dimensional structural diagram of the flower basket frame in this invention; Figure 7 is a schematic diagram of the front view structure of the end portion in this invention; Figure 8 is an enlarged structural diagram of point A in Figure 6. Detailed Implementation
[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings. It is hereby declared that the directional terms such as up, down, left, right, front, back, inside, and outside used in this text are based solely on the accompanying drawings and are not intended to specifically limit the invention.
[0019] The present invention provides a loading basket for loading multilayer silicon wafers, wherein the multilayer silicon wafers 3 are obtained by stacking two or more silicon rods and fixing them with adhesive, and then slicing them by a diamond wire slicer or other slicing equipment. Each layer of silicon wafers 3 contains multiple half-wafers 3, and any two layers of silicon wafers 3 are connected by the adhesive effect of epoxy resin adhesive or other adhesives.
[0020] As shown in Figures 1 to 5, the loading basket for loading multilayer silicon wafers includes a fixed support 1 and a basket frame 2 for loading multilayer silicon wafers 3. The fixed support 1 is provided with a flipping component 11. The basket frame 2 is flipped and connected to the flipping component 11. The flipping component 11 is used to adjust the placement angle of the basket frame 2 relative to the fixed support 1, so that the basket frame 2 is placed horizontally or vertically relative to the fixed support 1. When the basket frame 2 is placed vertically, the multilayer silicon wafers 3 are stacked on top of each other; when the basket frame 2 is placed vertically, each layer of silicon wafer 3 is placed single layer.
[0021] The flower basket frame 2 is detachably connected to multiple layers of first guard rod group 21 and multiple layers of second guard rod group 22. The first guard rod group 21 and the second guard rod group 22 extend along the length of the flower basket frame 2, and the first guard rod group 21 and the second guard rod group 22 are located on opposite sides of the flower basket frame 2, so that the first guard rod group 21, the second guard rod group 22 and the flower basket frame 2 can cooperate to complete the loading of the multilayer silicon wafer 3.
[0022] As shown in Figure 5, a first width W1 is formed between the first guardrail group 21 and the second guardrail group 22. The first width W1 is equal to the rated loading width of the basket frame 2, where the rated loading width of the basket frame 2 is the width of the silicon wafer 3 that needs to be loaded. This ensures that when the silicon wafer 3 is loaded between the first guardrail group 21 and the second guardrail group 22, the first guardrail group 21 and the second guardrail group 22 can always press against the silicon wafer 3, preventing the silicon wafer 3 from wobbling in the width direction. The number of layers of the first guardrail group 21 and the second guardrail group 22 is greater than or equal to the rated loading layer number of the basket frame 2, where the rated loading layer number of the basket frame 2 is the number of silicon wafer 3 layers that need to be loaded. This ensures that each layer of silicon wafer 3 is supported by one or more layers of the first guardrail group 21 and the second guardrail group 22, ensuring the stability of each layer of silicon wafer 3 in the basket frame 2.
[0023] In this embodiment, the loading basket used for loading multilayer silicon wafers can adjust the stacked state of the multilayer silicon wafers 3 to a single-layer state by flipping the basket frame 2 when it is necessary to remove the silicon wafers 3. The first guard rod group 21 and the second guard rod group 22 are used to press against the silicon wafers 3, ensuring that the silicon wafers 3 will not tip over during the flipping of the basket frame 2. Since each layer of silicon wafers 3 is supported by one or more first guard rod groups 21 and second guard rod groups 22, the first guard rod group 21 or the second guard rod group 22 located above the silicon wafers 3 can be removed layer by layer during wafer removal. The weak adhesive bonding between adjacent layers ensures that the silicon wafers 3 will not tip over. At the same time, the first guard rod group 21 or the second guard rod group 22 of the basket frame 2 will not obstruct the wafer removal action, reducing the impact of the basket frame 2 structure on the removal of multilayer silicon wafers 3. This ensures that the loading basket can meet the loading and removal requirements of multilayer silicon wafers 3, effectively guaranteeing the safety of removing the silicon wafers 3 from the adhesive.
[0024] Specifically, the loading basket can be used as a transfer tool between the silicon wafer slicing process and the silicon wafer cleaning and degumming process. It transfers the multilayer silicon wafer 3 after slicing from the slicing equipment to the cleaning equipment to clean the silicon wafer 3 and remove most of the adhesive in the multilayer silicon wafer 3, thus completing the degumming operation of the multilayer silicon wafer 3.
[0025] When cleaning is complete and the silicon wafers 3 need to be removed from the loading basket, the top layer of silicon wafers 3 can be removed by using the flipping component 11 to place the basket frame 2 horizontally. This ensures that each layer of silicon wafers 3 is placed in a single layer during removal, reducing or avoiding mutual interference between multiple layers of silicon wafers 3. Since the first width W1 between the first guardrail group 21 and the second guardrail group 22 is equal to the width of the silicon wafer 3, the first guardrail group 21 and the second guardrail group 22 are always in contact with each layer of silicon wafers 3 as the silicon wafers 3 are flipped along with the basket frame 2, effectively preventing the silicon wafers 3 from tipping over during the flipping process.
[0026] Since the basket frame 2 is placed horizontally, and each layer of silicon wafers 3 is supported by one or more first guard rod groups 21 and second guard rod groups 22, when removing the multilayer silicon wafers 3, the first guard rod group 21 or the second guard rod group 22 located at the top of each layer of silicon wafers 3 can be removed individually, exposing each layer of silicon wafers 3 to the basket frame 2. This facilitates the removal of the multilayer silicon wafers 3 layer by layer, reducing the impact of the basket frame 2 structure on the removal of the multilayer silicon wafers 3. At this time, due to the capillary force between adjacent layers of silicon wafers 3, there will be a weak adhesive effect between adjacent layers of silicon wafers 3, thus ensuring that the exposed silicon wafers 3 will not tip over after the guard rods are removed, ensuring the completion of the removal operation of the upper layer of silicon wafers 3.
[0027] In addition, when it is necessary to remove the last layer of silicon wafer 3, the basket frame 2 can be flipped back to a vertical position. Since the guard rod group above the last layer of silicon wafer 3 has been removed at this time, the structure of the basket frame 2 itself will not affect the removal operation of the last layer of silicon wafer 3. With the cooperation of the first guard rod group 21 and the second guard rod group 22 of the last layer, it is ensured that the last layer of silicon wafer 3 will not tip over when it is removed, thus completing the removal operation of the last layer of silicon wafer 3.
[0028] It should be noted that the top of the multilayer silicon wafer 3 is attached to the workpiece plate 31 by adhesive. The workpiece plate 31 can be used to fix the multilayer silicon rod on the slicing machine. After slicing is completed, the workpiece plate can be gripped by a robot arm to place the multilayer silicon wafer 3 between the first guard rod group 21 and the second guard rod group 22.
[0029] As shown in Figure 5, a first spacing D1 is formed between two adjacent layers of first guard rod groups 21 and between two adjacent layers of second guard rod groups 22. The first spacing D1 is equal to the height of each silicon wafer 3, ensuring that the positional distribution of the first guard rod groups 21 and second guard rod groups 22 in the basket frame 2 is the same as the positional distribution of the multilayer silicon wafers 3 loaded in the basket frame 2. Furthermore, when the multilayer silicon wafers 3 are placed into the basket frame 2, and the sides of the silicon wafers 3 are in contact with the first guard rod groups 21 and second guard rod groups 22, it ensures that each silicon wafer 3 is supported by one or more first guard rod groups 21 and second guard rod groups 22, and prevents the first guard rod groups 21 and second guard rod groups 22 from contacting the connection gaps between adjacent silicon wafers 3, further ensuring the stability of the silicon wafers 3 in the basket frame 2.
[0030] As a specific example, when the silicon rod height is 105mm and the width is 182mm, the first spacing D1 between two adjacent first guard rod groups 21 is 105mm, and the first width W1 between the first guard rod group 21 and the second guard rod group 22 located in the same layer is 180mm. The number of silicon wafers 3 that the basket frame 2 needs to load can be 2 to 4 layers, and the corresponding number of first guard rod groups 21 and second guard rod groups 22 can also be 2 to 4 layers. In this embodiment, the number of first guard rod groups 21 and second guard rod groups 22 is preferably 4 layers.
[0031] As a further embodiment, as shown in Figures 3 to 5, the first guard rod group 21 includes a first guard rod 23 and a second guard rod 24. A second gap D2 is formed between the first guard rod 23 and the second guard rod 24. The second gap D2 is 1 / 2 of the first gap D1. A first gap D1 is formed between two adjacent first guard rods 23 to ensure that each silicon wafer 3 is protected on the side by both the first guard rod 23 and the second guard rod 24. This provides more stable support for the silicon wafer 3 during the flipping process and further prevents the silicon wafer 3 from shaking or tipping over when the basket frame 2 is flipped.
[0032] The structure of the second guard rod group 22 is the same as that of the first guard rod group 21. That is, the second guard rod group 22 also has a first guard rod 23 and a second guard rod 24 forming a second spacing D2 to ensure that the supporting force on both sides of the silicon wafer 3 is the same, and further ensure that the silicon wafer 3 will not tip over between the first guard rod group 21 and the second guard rod group 22.
[0033] As an optional embodiment, as shown in Figures 1, 2, 6, and 7, the flower basket frame 2 has two oppositely arranged end plates 25, each end plate 25 being connected to the flipping member 11. The end plates 25 have a first connecting groove 26 and a second connecting groove 27 extending in a preset direction, which is the arrangement direction of the first guard rod group 21 and the second guard rod group 22 on the same layer. The end of the first guard rod group 21 is slidably connected to the first connecting groove 26, and the end of the second guard rod group 22 is slidably connected to the second connecting groove 27, thus connecting the first guard rod group 21 and the second guard rod group 22 to the flower basket frame 2, so that the flipping member 11 can drive the flower basket frame 2 and the first guard rod group 21 and the second guard rod group 22 to flip.
[0034] As shown in Figure 6, both the first connecting groove 26 and the second connecting groove 27 are connected to locking members 28. The first guard rod group 21 and the second guard rod group 22 abut against the locking members 28. When the silicon wafer 3 is loaded onto the basket frame 2 and when the silicon wafer 3 is rotated with the basket frame 2, the locking members 28 limit the first guard rod group 21 and the second guard rod group 22, ensuring their positions within the basket frame 2 and maintaining their constraint effect on the silicon wafer 3. When it is necessary to remove the silicon wafer 3 from the basket frame 2, the abutment between the locking members 28 and the first guard rod group 21 and the second guard rod group 22 can be released, allowing the first guard rod group 21 to be removed from the first connecting groove 26, or the second guard rod group 22 to be removed from the second connecting groove 27. This exposes the silicon wafer 3 within the basket frame 2, enabling the layer-by-layer removal of the multilayer silicon wafer 3.
[0035] Further, as shown in Figures 6 and 7, the first connecting groove 26 forms a first insertion section 261 and a first fixing section 262, and the second connecting groove 27 forms a second insertion section 271 and a second fixing section 272. The diameter of the first insertion section 261 is greater than or equal to the end diameter of the first guard rod assembly 21, and the diameter of the second insertion section 271 is greater than or equal to the end diameter of the second guard rod assembly 22, so that the end of the first guard rod assembly 21 can be inserted from the first insertion section 261 into the first connecting groove 26 and fixed to the first fixing section 262 by the locking member 28, and the end of the second guard rod assembly 22 can be inserted from the second insertion section 271 into the second connecting groove 27 and fixed to the second fixing section 272 by the locking member 28. A second width W2 is formed between the first fixed section 262 and the second fixed section 272. The second width W2 is less than the rated loading width to ensure that the guard rod assembly has sufficient adjustment length in the first connecting groove 26 and the second connecting groove 27. By adjusting the position of the first guard rod assembly 21 in the first fixed section 262 and the position of the second guard rod assembly 22 in the second fixed section 272, the first width W1 between the first guard rod assembly 21 and the second guard rod assembly 22 can be adjusted to the rated loading width, ensuring the pressure resistance of the first guard rod assembly 21 and the second guard rod assembly 22 on the silicon wafer 3.
[0036] In this embodiment, as shown in Figures 6 to 8, the locking member 28 has a connecting end 281 and a latching end 282. The connecting end 281 is connected to the end plate 25, and the latching end 282 abuts against the first guard rod group 21 and the second guard rod group 22. The wall surface of the latching end 282 away from the connecting end 281 has the same shape as the end shape of the first guard rod group 21 and the second guard rod group 22. That is, when the end shape of the first guard rod group 21 and the second guard rod group 22 is arc-shaped, the wall surface of the latching end 282 away from the connecting end 281 is also arc-shaped. Therefore, by utilizing the wall surface of the latching end 282 away from the connecting end 281 to cooperate with the first guard rod group 21 and the second guard rod group 22, the latching end 282 ensures the pressing and limiting effect on the end of the first guard rod group 21 and the end of the second guard rod group 22, further ensuring that the first guard rod group 21 and the second guard rod group 22 can provide stable support for the silicon wafer 3.
[0037] As a specific example, the connecting end 281 of the locking component is detachably connected to the end plate 25 via fasteners, which are bolts or studs. The number of fasteners can be one or more. Two or more fasteners are arranged along a preset direction on the end plate 25 to ensure that the installation direction of the locking component on the end plate 25 is consistent with the extension direction of the connecting groove, thus ensuring the locking component's limiting effect on the first guard rod group 21 and the second guard rod group 22. When it is necessary to remove the guard rod group, the fasteners can be removed from the end plate 25, allowing the first guard rod group 21 or the second guard rod group 22 to slide from the fixed section to the insertion section, so that the guard rod group can be removed from the end plate 25, avoiding interference with the silicon wafer 3 removal operation.
[0038] As an optional embodiment, as shown in Figures 1 to 4, the flipping component 11 includes a flipping shaft 111, a first locking component 112, and a second locking component 113. One end of the flipping shaft 111 is fixedly connected to the basket frame 2, and the other end of the flipping shaft 111 is rotatably connected to the fixed bracket 1. The flipping shaft 111 is used to drive the basket frame 2 to switch between a vertical state and a horizontal state, so as to adjust the multilayer silicon wafers 3 from a multilayer silicon wafers 3 stacked state to a single-layer silicon wafers 3 placed state, which facilitates the individual removal of each silicon wafer 3. The first locking member 112 is disposed on the fixed bracket 1, and the second locking member 113 is disposed on the flower basket frame 2. In the vertical state, the first locking member 112 is locked to the flower basket frame 2. In the horizontal state, the second locking member 113 is locked to the fixed bracket 1. Thus, the arrangement of the first locking member 112 between the fixed bracket 1 and the flower basket frame 2 ensures the connection stability between the flower basket frame 2 and the fixed bracket 1 in the vertical state; and the arrangement of the second locking member 113 between the fixed bracket 1 and the flower basket frame 2 ensures the connection stability between the flower basket frame 2 and the fixed bracket 1 in the horizontal state.
[0039] As a preferred embodiment, as shown in Figures 1 to 4 and Figure 7, the fixed bracket 1 has a first positioning hole 114, and the first locking member 112 is inserted into the first positioning hole 114. The flower basket frame 2 has a second positioning hole 251. In the vertical state, the first positioning hole 114 and the second positioning hole 251 are coaxial. At this time, the first locking member 112 can be inserted into the first positioning hole 114 and the second positioning hole 251 at the same time, thereby using the first locking member 112 to limit and lock the flower basket frame 2 and the fixed bracket 1, ensuring the connection stability between the flower basket frame 2 and the fixed bracket 1 in the vertical state.
[0040] Preferably, the first locking element 112 is a pin.
[0041] As a preferred embodiment, as shown in Figures 1 to 4 and Figure 7, the fixed bracket 1 has a communicating arc-shaped groove 115 and a horizontal groove 116, and the flower basket frame 2 has an adjustment groove 252. One end of the second locking member 113 is slidably connected to the adjustment groove 252. In the vertical state, the other end of the second locking member 113 is connected to the arc-shaped groove 115, so that the second locking member 113 can easily rotate with the flower basket frame 2 by utilizing the cooperation between the second locking member 113 and the arc-shaped groove 115. In the horizontal state, the other end of the second locking member 113 is connected to the horizontal groove 116, so that the connection stability between the flower basket frame 2 and the fixed bracket 1 is ensured by utilizing the cooperation between the second locking member 113 and the horizontal groove 116 in the horizontal state.
[0042] The movement of the first locking member 112 and the second locking member 113 relative to the basket frame 2 and the fixed bracket 1 during the flipping process will be described below.
[0043] When transferring silicon wafer 3 to the loading basket and cleaning silicon wafer 3 using the loading basket, the first positioning hole 114 and the second positioning hole 251 are kept coaxial, and the first locking member 112 is simultaneously inserted into the first positioning hole 114 and the second positioning hole 251, so that when the basket frame 2 is kept in a vertical state, the first locking member 112 can be used to ensure the connection stability between the basket frame 2 and the fixed bracket 1.
[0044] When the cleaned silicon wafer 3 needs to be removed, the first locking member 112 is moved out of the second positioning hole 251, driving the flipping shaft 111 to rotate, causing the basket frame 2 to rotate relative to the fixed bracket 1, so that the basket frame 2 drives the second locking member 113 to slide relative to the arc groove 115. When the basket frame 2 is rotated to a horizontal position, the second locking member 113 slides to the position where the horizontal groove 116 and the arc groove 115 are connected. At this time, the second locking member 113 can be pushed into the horizontal groove 116, so that the connection stability between the basket frame 2 and the fixed bracket 1 is ensured when the basket frame 2 is in a horizontal state by utilizing the cooperation between the second locking member 113 and the horizontal groove 116, ensuring that the basket frame 2 will not continue to flip during the wafer removal process.
[0045] As an optional embodiment, as shown in Figure 5, a support rod 29 is connected inside the basket frame 2, and a bearing surface 291 is formed on the top of the basket frame 2. When the multilayer silicon wafer 3 is placed in the basket frame 2, the bottom layer of the silicon wafer 3 can abut against the support rod 29, and the top layer of the multilayer silicon wafer 3 can abut against the bearing surface 291. This utilizes the support effect of the support rod 29 and the bearing surface 291 to ensure the loading stability of the multilayer silicon wafer 3 within the basket frame 2. A preset loading depth H1 is formed between the support rod 29 and the bearing surface 291. The preset loading depth H1 is equal to the rated loading depth of the basket frame 2, where the rated loading depth of the basket frame 2 is the overall height of the multilayer silicon wafer 3 after loading the rated number of layers, further ensuring that the basket frame 2 can meet the loading requirements of the multilayer silicon wafer 3 within the basket frame 2.
[0046] Specifically, when the height of the silicon wafer 3 is 105mm and the basket frame 2 needs to load 2 to 4 layers of silicon wafer 3, the preset loading depth H1 between the support rod 29 and the bearing surface 291 can be 210mm-420mm. In this embodiment, the preset loading depth H1 is preferably 420mm to ensure that the basket frame 2 can accommodate 2, 3, and 4 layers of multilayer silicon wafer 3.
[0047] The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications are also considered to be within the scope of protection of the present invention.
Claims
1. A loading basket for loading multilayer silicon wafers, characterized in that, include: The fixed bracket has an internal flip-up mechanism. A flower basket frame is used to load multilayer silicon wafers. The flower basket frame is flipped and connected to the flipping component, which is used to adjust the placement angle of the flower basket frame relative to the fixed support. The flower basket frame is detachably connected with multiple layers of first guard rod groups and multiple layers of second guard rod groups. The first guard rod groups and the second guard rod groups extend along the length direction of the flower basket frame, and the first guard rod groups and the second guard rod groups are respectively located on opposite sides of the flower basket frame. A first width is formed between the first guardrail group and the second guardrail group, and the first width is equal to the rated loading width of the flower basket frame; The number of layers in the first guardrail group and the second guardrail group is greater than or equal to the rated load layer number of the flower basket frame.
2. The loading basket for loading multilayer silicon wafers as described in claim 1, characterized in that, A first gap is formed between two adjacent layers of the first guard rod group, and a first gap is formed between two adjacent layers of the second guard rod group. The first gap is equal to the height of each layer of silicon wafer.
3. The loading basket for loading multilayer silicon wafers as described in claim 2, characterized in that, The first guardrail group includes a first guardrail and a second guardrail, and the second guardrail forms a second spacing that is 1 / 2 of the first spacing, and the first spacing is formed between two adjacent first guardrails; The structure of the second guard post group is the same as that of the first guard post group.
4. The loading basket for loading multilayer silicon wafers as described in claim 1, characterized in that, The flower basket frame has two end plates arranged opposite each other, and each end plate is connected to the flipping component; The end plate is formed with a first connecting groove and a second connecting groove extending along a preset direction, the preset direction being the arrangement direction of the first guard rod group and the second guard rod group in the same layer; The end of the first guard rod assembly is slidably connected to the first connecting groove, and the end of the second guard rod assembly is slidably connected to the second connecting groove; both the first and second connecting grooves are connected to locking members, and both the first and second guard rod assemblies abut against the locking members.
5. The loading basket for loading multilayer silicon wafers as described in claim 4, characterized in that, The first connecting groove forms a first insertion section and a first fixing section, and the second connecting groove forms a second insertion section and a second fixing section; The diameter of the first plug-in section is greater than or equal to the end diameter of the first guard rod assembly, the diameter of the second plug-in section is greater than or equal to the end diameter of the second guard rod assembly, a second width is formed between the first fixing section and the second fixing section, and the second width is less than or equal to the rated loading width.
6. The loading basket for loading multilayer silicon wafers as described in claim 4, characterized in that, The locking member has a connecting end and a latching end. The connecting end is connected to the end plate, and the latching end abuts against the first guard rod group and the second guard rod group. The wall surface of the latching end facing away from the connecting end has the same shape as the end of the first guard rod group and the second guard rod group.
7. The loading basket for loading multilayer silicon wafers as described in claim 1, characterized in that, The flipping component includes a flipping shaft, a first locking component, and a second locking component. One end of the flipping shaft is fixedly connected to the flower basket frame, and the other end of the flipping shaft is rotatably connected to the fixed bracket. The flipping shaft is used to drive the flower basket frame to switch between a vertical state and a horizontal state. The first locking member is disposed on the fixed bracket, and the second locking member is disposed on the flower basket frame. In the vertical state, the first locking member is locked to the flower basket frame, and in the horizontal state, the second locking member is locked to the fixed bracket.
8. The loading basket for loading multilayer silicon wafers as described in claim 7, characterized in that, The fixed bracket has a first positioning hole, and the first locking member is inserted into the first positioning hole; The flower basket frame has a second positioning hole, and in the vertical state, the first positioning hole and the second positioning hole are coaxial.
9. The loading basket for loading multilayer silicon wafers as described in claim 7, characterized in that, The fixed bracket has a connected arc-shaped groove and a horizontal groove, the flower basket frame has an adjustment groove, and one end of the second locking member is slidably connected to the adjustment groove. In the vertical position, the other end of the second locking member is connected to the arc-shaped groove; in the horizontal position, the other end of the second locking member is connected to the horizontal groove.
10. The loading basket for loading multilayer silicon wafers as described in claim 1, characterized in that, The flower basket frame is connected to a support rod, and a bearing surface is formed on the top of the flower basket frame. A preset loading depth is formed between the support rod and the bearing surface, and the preset loading depth is equal to the rated loading depth of the flower basket frame.