Stage apparatus, lithographic apparatus, and article manufacturing method

Abstract

A stage apparatus includes: a stage; an actuator that drives the stage and has a mover that moves together with the stage and a stator that generates a thrust force on the mover; the gyroscopic moment generating unit is connected to the rotor; and a control unit that controls the gyroscopic moment generation unit such that at least a part of a moment acting on the mover by driving the stage using the actuator is cancelled out by the moment generated by the gyroscopic moment generation unit.

Description

Technical Field

[0001] This invention relates to a stage device, a photolithography device, and a method for manufacturing articles. Background Technology

[0002] In photolithography apparatuses, such as exposure and imprinting devices, a substrate can be driven to align its projection area with a master image. In such apparatuses, a stage used for alignment between the substrate and the master image can be driven at high speed. However, high-speed driving of the stage generates a corresponding torque, which can cause the stage to vibrate or the floor on which the photolithography apparatus is mounted to vibrate.

[0003] Japanese Patent Application Publication No. 11-190786 describes a platform device comprising a movable platform, a surface plate supporting the platform, a drive mechanism for driving the platform, and a rotor that generates torque to reduce the reaction force generated along with the movement of the platform. Japanese Patent Application Publication No. 2012-161896 describes a moving device comprising a moving body, a linear motor, and a rotary motor fixed to the moving body. The linear motor includes a mover attached to the moving body and moves the mover along an axial direction. When the linear motor moves the mover, the combined moving body formed by the moving body, the mover, and the rotary motor is subjected to a rotational torque. The rotary motor rotates the rotor to counteract at least a portion of the rotational torque. However, neither Japanese Patent Application Publication Nos. 11-190786 nor 2012-161896 discloses the idea of ​​using gyroscopic torque to counteract at least a portion of the torque generated when the mover moves. Summary of the Invention

[0004] This invention provides a technique that helps reduce vibrations that can be generated by driving a stage.

[0005] According to one aspect of the invention, a stage device is provided, the stage device including a stage, an actuator, a gyroscopic torque generating unit, and a control unit, the actuator including a mover that moves with the stage and a stator that generates a thrust on the mover, and configured to drive the stage, the gyroscopic torque generating unit being connected to the mover, and the control unit being configured to control the gyroscopic torque generating unit such that at least a portion of the torque acting on the mover when the stage is driven by the actuator is canceled out by the torque generated by the gyroscopic torque generating unit.

[0006] Other features and advantages of the invention will become more apparent from the following description taken in conjunction with the accompanying drawings. Note that in all the drawings, the same reference numerals denote the same or similar parts. Attached Figure Description

[0007] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with this description, serve to explain the principles of the invention.

[0008] Figure 1 This is a perspective view showing the construction of the stage device according to the first embodiment.

[0009] Figure 2A This is a schematic diagram showing the standby state of the gyroscope torque generating unit.

[0010] Figure 2B This is a diagram schematically illustrating the operating state of the gyroscope torque generating unit.

[0011] Figure 3 It is a diagram schematically showing the state of the stage being driven.

[0012] Figure 4 This is a schematic diagram showing the structure of the gyro torque generating unit connected to the lower surface of the mover.

[0013] Figure 5 This is a perspective view showing the construction of the stage device according to the second embodiment.

[0014] Figure 6 This diagram schematically illustrates the operating states of two gyro torque generating units.

[0015] Figure 7 This is a perspective view showing the construction of the stage device according to the third embodiment.

[0016] Figure 8 This is a perspective view illustrating the operation of the stage device according to the third embodiment.

[0017] Figure 9 This is a diagram illustrating the construction of an exposure apparatus according to an embodiment.

[0018] Figure 10 This is a block diagram of the control system for controlling the angular velocity of the second motor.

[0019] Figure 11 This is a schematic diagram showing the structure of the gyro torque generating unit connected to the side surface of the mover.

[0020] Figure 12 This shows the angular velocity of the second motor in the gyro torque generating unit. Y, the angular velocity of the first motor A graph showing an example of the time-varying rate of change of Z and stage torque AM. Detailed Implementation

[0021] In the following description, embodiments will be illustrated with reference to the accompanying drawings. Please note that the following embodiments are not intended to limit the scope of the claimed invention. Multiple features are described in the embodiments, but the invention is not limited to requiring all of these features, and multiple features can be combined as needed. Furthermore, in the drawings, the same or similar constructions are given the same reference numerals, and repeated descriptions thereof are omitted.

[0022] In this specification and accompanying drawings, the structure and operation will be described according to the XYZ coordinate system. The Z-axis in the XYZ coordinate system can be an axis parallel to the vertical direction. The directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are referred to as the X direction, Y direction, and Z direction, respectively.

[0023] Figure 1 This is a perspective view showing the construction of the stage device 100 according to the first embodiment. The stage device 100 can be used, for example, as a stage device for a photolithography apparatus (pattern transfer apparatus) such as an exposure apparatus or an imprinting apparatus. The stage device 100 includes an X-drive unit 12 and a Y-drive unit 1, which drive the stage (moving stage) 11 in the X and Y directions, respectively. The Y-drive unit 1 is constrained in the Z direction by a pressure application mechanism (not shown), which is formed by a Z-air jet unit 7 forming an air bearing and a magnet arranged nearby thereon. The pressure application mechanism including the X-air jet unit 8 has a similar construction and constrains the Y-drive unit 1 in the X direction. Therefore, the Y-drive unit 1 is guided by the plate 6 in a non-contact state via the Z-air jet unit 7 and the X-air jet unit 8, and can only move in the Y direction. A linear motor 2 (actuator) formed by a stator 2a and a mover 2b drives the Y-drive unit 1 in the Y direction. The stage 11 is arranged on the Y-drive unit 1 and moves together with the Y-drive unit 1 in the Y direction. In other words, the stator 2a exerts a thrust on the mover 2b in the Y direction, and the mover 2b moves together with the platform 11 in the Y direction.

[0024] The X-drive unit 12 drives the stage 11 in the X direction along the Y-drive unit 1 via a linear motor formed by a stator 13 and a mover (not shown). The stage 11 is equipped with an X encoder (not shown) that measures the X-direction position of the stage 11. The Y-drive unit 1 is equipped with a Y encoder (not shown) that measures the Y-direction position of the stage 11. Based on the X-direction and Y-direction positions of the stage 11 measured by the X and Y encoders, the stage 11 can be controlled to be driven or positioned to any target location.

[0025] The gyro torque generating unit 3 can be mounted on the mover 2b. Figure 1In the example shown, the gyro torque generating unit 3 is connected to the upper surface of the mover 2b. The gyro torque generating unit 3 may include a rotating body 3a, a first gimbal 3b, a first motor 3z, a second gimbal 3c, and a second motor 3y. The first gimbal 3b supports the rotating body 3a, enabling it to rotate about a second axis (Z-axis) perpendicular to the first axis (Y-axis). The first axis may be a fixed axis parallel to the Y-axis. The second axis may be an axis parallel to the Z-axis in the standby state, but may be an axis that rotates about the first axis (Y-axis) in the operating state. The first motor 3z causes the rotating body 3a to rotate about the second axis. The second gimbal 3c supports the first gimbal 3b (rotating body 3a), enabling it to rotate about the first axis. The second motor 3y causes the first gimbal 3b (rotating body 3a) to rotate about the first axis, and the second axis also rotates about the first axis accordingly.

[0026] The stage device 100 may include a control unit CNT that controls the gyroscopic torque generating unit 3. When the stage 11 is driven by the linear motor 2, a torque is applied to the mover 2b (and all components that move with the mover 2b). This torque is referred to hereinafter as the stage torque. The control unit CNT controls the gyroscopic torque generating unit 3 such that the torque generated by the gyroscopic torque generating unit 3 counteracts at least a portion of the stage torque. The control unit CNT may include a first motor control unit 10 and a second motor control unit 9. The first motor control unit 10 controls the rotation (angular velocity) of the first motor 3z, and the second motor control unit 9 controls the rotation (angular velocity) of the second motor 3y.

[0027] Next, the principle of how the gyro torque generating unit 3 generates the gyro torque JM will be described. Figure 2A The standby state of the gyro torque generating unit 3 is schematically shown, and Figure 2B The schematic diagram illustrates the operating state of the gyro torque generating unit 3. In standby mode, the first motor 3z causes the rotating body 3a to rotate around the second axis ( Figure 2A The first motor 3z rotates the rotating body 3a around the second axis (Z-axis) at a predetermined angular velocity. In operation, while the first motor 3z continuously rotates the rotating body 3a around the second axis at a predetermined angular velocity, the second motor 3y rotates the rotating body 3a (first gimbal 3b) around the first axis (Y-axis). The gyroscopic torque generating unit 3 thus generates a gyroscopic torque JM around the X-axis. From a power consumption reduction perspective, if the generation of the gyroscopic torque JM is not required, the first motor control unit 10 or control unit CNT can stop the rotation of the first motor 3z.

[0028] Figure 3The diagram schematically illustrates the state in which the linear motor 2 drives the Y-drive unit 1 in the Y direction. The generation principle of the stage torque AM generated in the movable part when the Y-drive unit 1 is driven in the Y direction will be described. Here, the movable part refers to the sum of all components that move together with the mover 2b, more specifically, including the Y-drive unit 1, the X-drive unit 12, the stage 11, and the gyroscopic torque generating unit 3. To move the Y-drive unit 1 in the Y direction, a thrust AF is generated on the mover 2b. Since the position of the thrust AF deviates from the center of gravity of the movable part (hereinafter referred to as the stage center of gravity) SG in the Z-axis direction, a stage torque AM about the X-axis is generated.

[0029] The principle of generating gyroscopic torque JM is as described above, and gyroscopic torque JM is generated by rotating a rotating body 3a, which is rotating around the first axis (Y-axis) at a predetermined angular velocity. The control unit CNT can activate the gyroscopic torque generating unit 3 before the linear motor 2 starts driving the stage 11 (i.e., before the linear motor 2 generates thrust). More specifically, the first motor control unit 10 can activate the first motor 3z and rotate the rotating body 3a at a predetermined angular velocity before driving the stage 11 begins (before the linear motor 2 generates thrust). Additionally, the second motor control unit 9 can control the angular velocity of the second motor 3y to generate a gyroscopic torque JM that is the same in magnitude but opposite in direction to the stage torque AM.

[0030] Figure 10 This is a block diagram of a control system for controlling the angular velocity of the second motor 3y. The second motor control unit 9 may include a target value calculation unit 94, a feedforward (FF) controller 95, and a feedback (FB) controller 96. The target value calculation unit 94 can calculate the target angular velocity. Yi, such that JM=AM. More specifically, the target value calculation unit 94 can be based on... Yi = AM / (IZ× Z) Calculate the target angular velocity Yi. The stage torque AM can be calculated by multiplying the magnitude of the thrust AF by the distance between the stage center of gravity SG and the position (Z direction) of the thrust AF. The magnitude of the thrust AF can be calculated by multiplying the drive current of the linear motor 2 by the thrust constant of the linear motor 2. The drive current can be obtained from the linear motor control unit 93. The thrust constant of the linear motor 2 and the distance between the stage center of gravity SG and the position (Z direction) of the thrust AF can be calculated based on the design values. IZ indicates the moment of inertia of the rotating body 3a about the second axis (Z-axis) and can be calculated based on the design values ​​of the rotating body 3a. Z indicates the predetermined angular velocity of the rotating body 3a about the second axis (Z-axis), and can be obtained from an encoder (not shown) integrated in the first motor 3z.

[0031] To reduce the target angular velocity angular velocities of Yi and the second motor 3y The deviation between Y and Y is fed back to motor 3y by the FB controller 96. The angular velocity of the second motor 3y... Y can be obtained from an encoder (not shown) integrated in the second motor 3y. The feedforward controller 95 can perform feedforward control on the second motor 3y, while simultaneously providing the second motor 3y with values ​​based on the target angular velocity. Yi calculates the feedforward operation amount. That is, the second motor control unit 9 (control unit CNT) can perform feedforward control on the second motor 3y based on the control information used to control the linear motor 2 (e.g., the thrust AF to be generated by the linear motor 2 or the current supplied to the linear motor 2).

[0032] As described above, the second motor control unit 9 (control unit CNT) controls the angular velocity of the second motor 3y while driving the linear motor 2, and generates the gyroscopic torque JM simultaneously with the stage torque AM. This can cancel the entire stage torque AM about the X-axis without delay. Note that a target angular velocity can be generated. Yi is used to counteract at least a portion of the stage torque AM. Figure 12 Show angular velocity Y, angular velocity Examples of the time-varying rates of Z and stage torque AM.

[0033] The gyroscopic torque JM is determined by IZ× Z× Y represents the position of the stage center of gravity SG. Therefore, the magnitude of the gyro torque JM is determined independently of the position of the stage center of gravity SG. This means that even with individual differences in the position of the stage center of gravity SG, the stage torque AM can be correctly counteracted.

[0034] After the stage torque AM around the X-axis is canceled out, the second motor control unit 9 controls the second motor 3y, causing the rotating body 3a to return to its position before cancellation. At this time, in order to avoid generating gyroscopic torque JM, the first motor control unit 10 preferably controls the first motor 3z, so that the angular velocity of the first motor 3z is 0.

[0035] exist Figure 1 In the example shown, the gyro torque generating unit 3 is connected to the upper surface of the mover 2b. However, the invention is not limited thereto. For example, as Figure 11 As illustrated, the gyro torque generating unit 3 can be connected to the side surface of the mover 2b. In Figure 11In the example shown, the position of the stage's center of gravity SG in the Z-direction matches the position of the drive shaft of the second motor 3y of the gyroscopic torque generating unit 3 in the Z-direction. This allows the position of the stage torque AM to match the position of the gyroscopic torque JM. This arrangement helps to suppress the torque acting on the mover 2b and reduce the vibration generated by this torque.

[0036] like Figure 4 As illustrated, the gyro torque generating unit 3 can be connected to the lower surface of the mover 2b. In Figure 4 In the example shown, with Figure 1 Compared to the example shown, the position of the stage's center of gravity SG can be moved in the negative Z direction. This allows for a shorter distance LG between the stage's center of gravity SG and the point of application of the thrust AF, and a smaller stage torque AM. This arrangement is beneficial for reducing the magnitude of the gyro torque JM and lowering the power consumption of the second motor 3y.

[0037] In this embodiment, an example is shown using a linear motor as the actuator for driving the Y-drive unit 1. However, for example, ball screws and servo motors can also be used as actuators. In this case, this method is excellent in terms of cost.

[0038] In this embodiment, an example is shown of using a pressure application mechanism formed by an air jet unit that forms an air bearing and a magnet to constrain the Y drive unit 1, but a slider and guide can also be used instead. In this case, this method is excellent in terms of cost.

[0039] The following will refer to Figure 5 and Figure 6 The stage device 200 according to the second embodiment is described. Matters not mentioned in the second embodiment may be followed according to the first embodiment. Figure 5 This is a perspective view showing the construction of the stage device 200 according to the second embodiment. The second embodiment provides a stage device 200 including a plurality of gyroscopic torque generating units 31 and 32.

[0040] exist Figure 5 In the example shown, the stage device 200 includes two gyroscopic torque generating units 31 and 32. Each of the gyroscopic torque generating units 31 and 32 has the same construction as the gyroscopic torque generating unit 3 according to the first embodiment. To distinguish between the gyroscopic torque generating units 31 and 32, they can be referred to as the first gyroscopic torque generating unit 31 and the second gyroscopic torque generating unit 32, respectively. The gyroscopic torque generating units 31 and 32, as a plurality of gyroscopic torque generating units, are connected to the mover 2b.

[0041] When the stage 11 is driven by the linear motor 2, the stage torque acts on the mover 2b. The control unit CNT controls the first gyro torque generating unit 31 and the second gyro torque generating unit 32, such that at least a portion of the stage torque is canceled out by the torque generated by the gyro torque generating units 31 and 32. The first gyro torque generating unit 31 and the second gyro torque generating unit 32 can be aligned along a first direction (Y direction) parallel to the first axis (Y-axis).

[0042] The first gyro torque generating unit 31 may include a first rotating body 31a, a first gimbal 31b, a first motor 31z, a second gimbal 31c, and a second motor 31y. The first rotating body 31a, the first gimbal 31b, the first motor 31z, the second gimbal 31c, and the second motor 31y may have the same structure as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 3y in the first embodiment. The second gyro torque generating unit 32 may include a second rotating body 32a, a third gimbal 32b, a third motor 32z, a fourth gimbal 32c, and a fourth motor 32y. The second rotating body 32a, the third gimbal 32b, the third motor 32z, the fourth gimbal 32c, and the fourth motor 32y may have the same structure as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 32y in the first embodiment.

[0043] Figure 6 The operating states of the first gyroscopic torque generating unit 31 and the second gyroscopic torque generating unit 32 are shown. The principle of gyroscopic torque generation and the calculation method of the angular velocities of the second motor 31y and the fourth motor 32y are the same as in the first embodiment. However, in the second embodiment, since the first gyroscopic torque generating unit 31 and the second gyroscopic torque generating unit 32 are provided, the magnitudes of the angular velocities of the second motor 31y and the fourth motor 32y can be approximately half the angular velocity of the second motor 37 in the first embodiment. Figure 6As shown, the angular velocity of the first rotating body 31a caused by the first motor 31z and the angular velocity of the second rotating body 32a caused by the third motor 32z are the same in magnitude, but the rotational directions of the first rotating body 31a caused by the first motor 31z and the second rotating body 32a caused by the third motor 32z are different. Therefore, since the torque generated by the first motor 31z and the torque generated by the third motor 32z cancel each other out, the generation of torque around the Y-axis and Z-axis is suppressed. Similarly, since the torques generated by the second motor 31y and the fourth motor 32y cancel each other out when they are driven, the generation of torque around the Y-axis is also suppressed. In other words, by providing the first gyro torque generating unit 31 and the second gyro torque generating unit 32, the generation of torque around the Z-axis and Y-axis generated when the first motor 31y and the third motor 32y, as well as the second motor 31z and the fourth motor 32z are driven, is suppressed.

[0044] When the first gyro torque generating unit 31 and the second gyro torque generating unit 32 are operated, gyro torques JM1 and JM2 are generated. The angle formed by the drive shafts of the first motor 31z and the third motor 32z with the Z-axis. The gyroscopic torque JM1 can be decomposed into the angles acting about the X-axis. X-gyro torque JM1X and its action around the Z-axis The gyroscopic torque JM1Z is Z. The gyroscopic torque JM2 can also be similarly decomposed into... X-gyro torque JM2X and The gyroscopic torque Z is JM2Z. Their magnitudes can be expressed as JM1X = JM1×cos JM2X = JM2×cos JM1Z = JM1×sin And JM2Z = JM2×sin Since the gyro torques JM1 and JM2 are the same, X-gyro torque JM1X and The X-axis gyroscopic torques JM2X are equal in magnitude and opposite in direction, thus canceling each other out. Therefore, the magnitude of the torque generated by gyroscopic torque generating units 31 and 32 is JM1X + JM2X. Therefore, it is possible to generate a torque related to the angle... The irrelevant torque only about the X-axis.

[0045] The torque around the X-axis generated by the first gyro torque generating unit 31 and the second gyro torque generating unit 32 is expressed as (JM1 + JM2) × cos , and, when the angle 0 (cos When = 1), the torque is maximized. Therefore, the attitude of the first rotating body 31a and the second rotating body 32a in the standby state is preferably controlled by the second motor 31y and the fourth motor 32y, so that the magnitude of the platform torque generated when the linear motor 2 is driven is maximized when the angle is maximized. 0 Furthermore, when the angle For 90 or -90 hour, The X-axis gyroscope torques JM1X and JM2X are 0, therefore no torque is generated around the X-axis. Thus, the second motor 31y and the fourth motor 32y can be controlled to... Greater than -90 And less than 90 .

[0046] As a detailed example, an example with two gyroscopic torque generating units has been described here. However, three or more gyroscopic torque generating units can also be used. In this case, the angular velocity of the motor that rotates the body about the Y-axis and the angular velocity of the motor that rotates the body about the Z-axis can be controlled so that the torques generated about the Y-axis and Z-axis are canceled out. According to this configuration, the size of each gyroscopic torque generating unit can be reduced, and the design freedom of the stage device can be increased.

[0047] The following will refer to Figure 7 and Figure 8 The stage device 600 according to the third embodiment is described. Matters not mentioned in the third embodiment may be followed according to the first embodiment. Figure 7 This is a perspective view showing the construction of the stage device 600 according to the third embodiment. The third embodiment provides a stage device 600 including a plurality of gyro torque generating units 605 and 606 and a plurality of linear motors 602 and 603.

[0048] The stage device 600 may further include a stage 612, an X-drive unit 604, and a Y-drive unit 601. By driving the X-drive unit 604 in the X direction and driving the Y-drive unit 601 in the Y direction, the stage 612 can be driven or positioned to any target location.

[0049] Linear motors 602 and 603 may be configured as actuators to drive the Y-drive unit 601 in the Y direction. Linear motor 602 includes a mover 602b and a stator 602a. Linear motor 603 includes a mover 603b and a stator 603a. Gyroscopic torque generating units 605 and 606 may be configured on the movers 602b and 603b, respectively. Gyroscopic torque generating units 605 and 606 may have the same construction as gyroscopic torque generating unit 3 according to the first embodiment. For the purpose of individually designating gyroscopic torque generating units 605 and 606, they may be referred to as the first gyroscopic torque generating unit 605 and the second gyroscopic torque generating unit 606. Each gyroscopic torque generating unit in the first gyroscopic torque generating unit 605 and the second gyroscopic torque generating unit 606 may be connected to a corresponding mover in one of the movers 602b and 603b.

[0050] When the stage 612 is driven by linear motors 602 and 603, the stage torque acts on the movers 602b and 603b. The control unit CNT controls the first gyro torque generating unit 605 and the second gyro torque generating unit 606 so that at least a portion of the stage torque is canceled out by the torque generated by the first gyro torque generating unit 605 and the second gyro torque generating unit 606.

[0051] The first gyro torque generating unit 605 may include a first rotating body 605a, a first gimbal 605b, a first motor 605z, a second gimbal 605c, and a second motor 605y. The first rotating body 605a, the first gimbal 605b, the first motor 605z, the second gimbal 605c, and the second motor 605y may have the same structure as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 3y in the first embodiment. The second gyro torque generating unit 606 may include a second rotating body 606a, a third gimbal 606b, a third motor 606z, a fourth gimbal 606c, and a fourth motor 606y. The second rotating body 606a, the third universal joint 606b, the third motor 606z, the fourth universal joint 606c, and the fourth motor 606 may have the same structure as the rotating body 3a, the first universal joint 3b, the first motor 3z, the second universal joint 3c, and the second motor 3y in the first embodiment.

[0052] Figure 8 The following states are schematically shown: where, with Figure 7In contrast, stage 612 is located in the positive direction of the X-axis, and in this state, stage 612 is driven in the Y-axis. With stage 612 in the positive direction of the X-axis, the distance between the stage's center of gravity 6SG and the thrust application position of linear motor 602 in the X-axis direction is less than the distance between the stage's center of gravity 6SG and the thrust application position of linear motor 603 in the X-axis direction. When stage 612 is driven in the Y-axis direction in this state, to suppress the torque acting on the Y-drive unit 601 about the Z-axis, linear motors 602 and 603 generate different thrusts AF2 and AF3. Therefore, the stage torques AM2 and AM3 about the X-axis, generated by the distance between the stage's center of gravity 6SG and the application position of thrust AF2 in the Z-axis direction, and the positional deviation between the stage's center of gravity 6SG and the application position of thrust AF3 in the Z-axis direction, have different magnitudes.

[0053] The second motor control unit 611 can control the angular velocity of the second motor 605y, so that the gyroscopic torque JM5 generated by the gyroscopic torque generating unit 605 is equal in magnitude and opposite in direction to the stage torque AM2. The principle of gyroscopic torque generation and the calculation method of angular velocity are the same as in the first embodiment. Furthermore, for the gyroscopic torque generating unit 606, the second motor control unit 611 can control the angular velocity of the fourth motor 606y, so that the gyroscopic torque JM6 is equal in magnitude and opposite in direction to the stage torque AM3. This allows the torque about the X-axis to be canceled at each torque generation location, and the torque to be canceled without generating torque in the Y drive unit 601. Therefore, the vibration of the plate 607 caused by the torsion of the Y drive unit 601 can be suppressed.

[0054] The following describes a photolithography apparatus employing the stage arrangement represented by the first to third embodiments. This photolithography apparatus can be configured to transfer a pattern from a master image onto a substrate, and the stage arrangement can be configured to align the master image and the substrate. If the photolithography apparatus is an exposure apparatus, the stage arrangement can be used as a substrate stage arrangement, as a master image stage arrangement, or as both a substrate stage arrangement and a master image stage arrangement. If the photolithography apparatus is an imprinting apparatus, the stage arrangement can be used as a substrate stage arrangement.

[0055] Figure 9 An exemplary configuration of an exposure apparatus 800 according to an embodiment is shown. The exposure apparatus 800 may include, for example, an illumination optics system 801, a master plate stage device 802 for positioning the master plate, a projection optics system 803, and a substrate stage device 804 for positioning the substrate. The exposure apparatus 800 may be configured to transfer a pattern of a master plate onto a substrate. The exposure apparatus 800 may be configured to transfer the pattern of the master plate onto the substrate using a step-repetition method or a step-scan method.

[0056] The illumination optical system 801 can be configured to include a light source unit and an illumination optical system to illuminate the original image. The light source unit may include, for example, a laser. An ArF excimer laser with a wavelength of approximately 193 nm, a KrF excimer laser with a wavelength of approximately 248 nm, etc., can be used as the laser. The type of laser is not limited to excimer lasers, and for example, a YAG laser can also be used, and the number of lasers is not limited. If a laser is used in the light source unit, a beam-shaping optical system that shapes the parallel beam from the laser source into the desired beam shape, or an incoherent optical system that makes the coherent laser beam incoherent, is preferably used. The light source that can be used in the light source unit is not limited to a laser, and one or more lamps such as mercury lamps or xenon lamps can also be used. Furthermore, the light source unit may include an EUV light source.

[0057] An optical system 803 may be used as an optical system containing only multiple lens elements, an optical system formed by multiple lens elements and at least one concave mirror, an optical system including multiple lens elements and at least one diffractive optical element, or a total internal reflection optical system.

[0058] The stage apparatus represented in the above embodiments can be applied to at least one of the original stage apparatus 802 and / or the substrate stage apparatus 804. In the step-scan method, the stage of the original stage apparatus 802 and the stage of the substrate stage apparatus 804 are driven synchronously. The exposure apparatus 800 can be used to manufacture, for example, semiconductor devices such as semiconductor integrated circuits, and devices with fine patterns formed such as micromechanical or thin-film magnetic heads.

[0059] The article manufacturing method using the above-described photolithography apparatus will now be described exemplarily. This article manufacturing method may include: a transfer step, in which the original pattern is transferred onto a substrate using the photolithography apparatus; and a processing step, in which the substrate after the transfer step is processed to obtain the article.

[0060] If the photolithography apparatus is an exposure apparatus, a substrate coated with a photosensitive material is used, and the pattern of the original is transferred as a latent image onto the photosensitive material of the substrate through a transfer step. The processing steps may include a development step that converts the latent image into a physical pattern. The processing steps may also include a step of processing the substrate (e.g., etching) using the physical pattern formed by the development step.

[0061] If the photolithography apparatus is an imprinting apparatus, then in the transfer step, imprinting material is applied to the substrate, and the original pattern is transferred onto the imprinting material. Processing steps may include processing the substrate (e.g., etching) using the pattern transferred to the imprinting material.

[0062] This invention is not limited to the embodiments described above, and various changes and modifications can be made within the spirit and scope of this invention. Therefore, the appended claims are provided to inform the public of the scope of this invention.

[0063] This application claims priority to Japanese Patent Application No. 2023-179028, filed on October 17, 2023, which is incorporated herein by reference.

[0064] List of reference numerals 100, 200, 600: Platform device; 11: Platform; 2b: Mover; 2a: Stator; 2: Linear motor (actuator); 3: Gyro torque generating unit; CNT: Control unit; 3a: Rotating body; 3b: First gimbal; 3z: First motor; 3c: Second gimbal; 37: Second motor.

Claims

1. A stage device, comprising: Platform; An actuator comprising a mover that moves together with the stage and a stator that generates thrust on the mover, and configured to drive the stage; A gyro torque generating unit is connected to the mover; as well as A control unit is configured to control the gyro torque generating unit such that at least a portion of the torque acting on the mover when the stage is driven by the actuator is canceled out by the torque generated by the gyro torque generating unit.

2. The platform device according to claim 1, wherein, The gyro torque generating unit includes: The first gimbal is configured to support a rotating body such that the rotating body can rotate about a second axis perpendicular to a first axis, the first axis being parallel to the direction in which the actuator drives the stage; A first motor is configured to rotate the rotating body about the second axis; A second gimbal, configured to support the first gimbal, allowing the first gimbal to rotate about the first axis; and A second motor is configured to rotate the first gimbal about the first axis.

3. The platform device according to claim 2, wherein, The control unit performs feedforward control on the second motor based on control information for controlling the actuator.

4. The platform device according to claim 3, wherein, The control information includes the thrust to be generated by the actuator.

5. The platform device according to claim 3, wherein, The control information includes the current to be supplied to the actuator.

6. The stage device according to any one of claims 1 to 5, wherein the stage device further comprises: A flat plate, and a drive unit connected to the mover to move on the flat plate; The platform moves together with the drive unit on the flat plate.

7. The platform device according to claim 6, wherein, The gyro torque generating unit is connected to the upper surface of the mover.

8. The platform device according to claim 6, wherein, The gyro torque generating unit is connected to the side surface of the mover.

9. The platform device according to claim 6, wherein, The gyro torque generating unit is connected to the lower surface of the mover.

10. The stage device according to any one of claims 1 to 9, wherein the stage device further comprises: Multiple gyro torque generating units, including the gyro torque generating units. The plurality of gyroscopic torque generating units are connected to the mover, and The control unit controls the plurality of gyro torque generating units such that at least a portion of the torque acting on the mover when the stage is driven by the actuator is canceled out by the torque generated by the plurality of gyro torque generating units.

11. The stage device according to claim 10, wherein, The plurality of gyro torque generating units are aligned in the direction in which the actuator drives the stage.

12. The stage device according to claim 2, further comprising: The second gyro torque generating unit is connected to the mover. The gyro torque generating unit and the second gyro torque generating unit are aligned along the direction in which the actuator drives the platform. The second gyro torque generating unit includes: The third gimbal is configured to support the second rotating body, enabling the second rotating body to rotate about the second axis; A third motor is fixed and configured to rotate the second rotating body about the second axis; A fourth gimbal, configured to support the third gimbal, allowing the third gimbal to rotate about the first axis; and A fourth motor is configured to rotate the fourth gimbal about the first axis. The direction in which the first motor in the gyro torque generating unit rotates the rotating body is opposite to the direction in which the third motor in the second gyro torque generating unit rotates the second rotating body. The direction in which the second motor in the gyro torque generating unit rotates the rotating body is opposite to the direction in which the fourth motor in the second gyro torque generating unit rotates the second rotating body.

13. The stage device according to any one of claims 1 to 9, wherein the stage device further comprises: Multiple gyro torque generating units, including the gyro torque generating units; as well as Multiple actuators, including the actuators, Each of the plurality of actuators includes a mover that moves together with the stage and a stator that generates thrust on the mover; Each of the plurality of gyro torque generating units is connected to the mover of a corresponding actuator in one of the plurality of actuators.

14. The platform device according to claim 13, wherein, The control unit performs feedforward control on each gyro torque generating unit in the gyro torque generating unit based on control information for controlling a corresponding actuator among the plurality of actuators.

15. The platform device according to any one of claims 1 to 14, wherein, The control unit activates the gyro torque generating unit before the actuator begins to drive the stage.

16. A photolithography apparatus for transferring a pattern from an original image onto a substrate, characterized in that, The photolithography apparatus includes: The stage device as defined in any one of claims 1 to 15 is configured to align the original with the substrate.

17. A method for manufacturing an article, comprising: In the transfer step, the original pattern is transferred onto the substrate using the photolithography apparatus as defined in claim 16; as well as The processing step involves processing the substrate that has undergone the transfer step to obtain an article.

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