A high-cleanliness transfer valve
By introducing a combination structure of support components, shock-absorbing cylinders, cam sections, and elastic support components into the transmission valve, the problem of excessive vibration in traditional transmission valves is solved, achieving higher sealing performance and cleanliness.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- JINGJIANG JIASHENG VACUUM TECH CO LTD
- Filing Date
- 2026-02-11
- Publication Date
- 2026-05-26
Smart Images
Figure CN122083101A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of valve technology, specifically a high-cleanliness transmission valve. Background Technology
[0002] In a vacuum system, a transfer valve is required to control the flow of gas. The transfer valve plays a role in controlling the flow rate, regulating the pressure, or isolating the system, thereby enabling the control and operation of the system. In related technologies, the transfer valve needs to maintain a high vacuum level in the cavity (e.g., 10) when opening and closing. -5 ~10 - 1 For high density and low particle size (e.g., for 300 switching cycles, particles with a diameter ≥ 0.1 μm and a total number of particles ≤ 10), the transfer valve needs to have excellent sealing performance and minimize the generation of friction particles. Among them, the traditional PRESYS transmission valve adopts a valve plate straight up and down transmission method, with one cylinder realizing the lifting and lowering action of the valve plate, and another cylinder realizing the valve plate contacting / separating from the valve body; Traditional VAT transfer valves employ L-Motion technology. The valve plate first moves vertically to the closed position, during which there is virtually no contact between the valve plate and the valve body, reducing the generation of friction particles. Furthermore, in the final movement phase, the valve plate is pushed horizontally onto the valve body. At this point, the seals on the valve plate contact the valve body with essentially the same pressure, ensuring a tight seal. However, the two types of transmission valves mentioned above use a rigid connection method for transmission (here, rigid connection means, for example, that the telescopic shaft on the cylinder is connected to the push rod by bolts, or that there is no elastic buffer structure), which results in relatively large vibrations when the transmission valve is opened or closed. Summary of the Invention
[0003] In view of the above-mentioned shortcomings in the related technologies, the purpose is to provide a high-cleanliness transfer valve to solve the technical problem that the transfer valve in the related technologies has relatively large vibration when it is opened or closed. The technical solution to achieve the objective is: a high-cleanliness transfer valve, characterized in that it comprises: The valve body has a first hollow space inside and a channel on the side wall, the channel being connected to the first hollow space; A valve plate is disposed in the first hollow space; A support member, one end of which is connected to the valve body, has a through space in the middle of the support member, and has at least two shock-absorbing pads on the support member; A shock-absorbing cylinder is connected to the other end of the support member. One end of the shock-absorbing cylinder is disposed in the through space, and the other end is disposed outside the through space. A cam section is connected to the shock-absorbing cylinder and is linked by the shock-absorbing cylinder. The cam section has an arc-shaped through groove. The movable connector is movably connected to the arc-shaped through groove. The push rod has one end set in the through space and connected to the movable connector, and the other end passes through the support and is connected to the valve plate. When the cam section is linked by the shock-absorbing cylinder, the movable connector moves along the arc-shaped through groove, and the push rod links the valve plate to open or close the channel. An elastic support is provided at the through space, between the support, the shock-absorbing cylinder and the push rod. As the shock-absorbing cylinder moves, the elastic support moves along the support and the push rod, and moves together with the push rod. After the elastic support moves into place, it partially contacts the shock-absorbing pad.
[0004] Furthermore: the support member includes two support blocks, symmetrically spaced apart, one end of the support block is connected to the valve body, and the inner wall of the support block has a groove, the groove being an oblong groove, and the end has the shock-absorbing pad. And a connecting block, which connects to one end of the support block and has the through space between them, with the push rod passing through the middle of the connecting block.
[0005] Furthermore: the shock-absorbing cylinder includes: a cylinder body connected to the support member, the cylinder body having a second hollow space; The first air nozzle is connected to the side wall of the cylinder; The second air nozzle is connected to the side wall of the cylinder body and is spaced apart from the first air nozzle. The first cover plate, connected to the end of the cylinder body, is disposed outside the through space and is used to seal one end of the second hollow space; The first shock absorber ring is disposed on the inner wall of the first cover plate and disposed in the second hollow space; A piston structure is movably connected in the second hollow space, dividing the second hollow space into a first space and a second space. The first space is connected to the first air nozzle, and the second space is connected to the second air nozzle. The piston structure is connected to the cam section and contacts the elastic support member. The second shock absorber ring is connected to the piston structure; A magnetic ring is attached to the piston structure; And a magnetic ring sensor, connected to the cylinder block.
[0006] Furthermore: the piston structure includes: a piston disposed in the second hollow space; Pressed blocks; At least one first connecting bolt connects the piston, the pressure block, and the cam segment, and presses the magnetic ring between the piston and the pressure block; A piston rod, one end of which is connected to the piston and the other end of which contacts the elastic support, and the piston rod surrounds a portion of the push rod and the cam section, and a second damping ring is provided between the piston rod and the piston; A first sealing ring is connected to the piston and disposed between the piston and the cylinder. And a second sealing ring, connected to the cylinder body and disposed between the cylinder body and the piston rod.
[0007] Furthermore, it also includes a self-locking component connected to the side wall of the cylinder body, used to engage with a groove on the piston when the valve plate closes the channel.
[0008] Furthermore: the self-locking component includes: a side seat connected to the outer wall of the cylinder body, the side seat having a first stepped through hole; A first spring is disposed at the first stepped through hole, and one end protrudes from the first stepped through hole; A locking block is provided at the second stepped through hole on the cylinder body for engaging with the slot. The third sealing ring is connected to the side seat and faces the locking block; And a fourth sealing ring, connected to the locking block, is disposed between the locking block and the cylinder body.
[0009] Furthermore: the cam section includes a circular block connected to the first connecting bolt; And a convex plate, disposed on the circular block, having the arc-shaped through groove, and the convex plate being inserted into one end of the push rod.
[0010] Furthermore: the movable connector includes a bearing disposed in the arc-shaped through groove; And a pin, connecting the push rod, the bearing and the convex plate.
[0011] Furthermore: the elastic support includes a bellows assembly disposed in the through space, between the support and the push rod, the bellows assembly moves with the push rod, the bellows assembly moves along the support, and after the bellows assembly moves into position, it partially contacts the shock-absorbing pad. And a second spring, disposed at the through space, between the piston structure and the bellows assembly; The corrugated pipe assembly includes a corrugated pipe that surrounds the push rod, with one end connected to the support member and the other end in contact with a protrusion on the push rod. The fifth sealing ring is connected to one end of the bellows and is disposed between the bellows and the support member; The sixth sealing ring is connected to the other end of the bellows and is disposed between the bellows and the push rod; The bellows outer seat has one end in contact with the push rod and the other end surrounding the bellows; At least one second connecting bolt connects the bellows outer seat and the push rod; And two rings, symmetrically connected to the outer seat of the bellows, are slidably connected one-to-one with the sliding groove.
[0012] Furthermore, it also includes a second cover plate, symmetrically arranged, connected to the connecting block and the shock-absorbing cylinder, positioned between the support block, and covering the through space.
[0013] The above technical solution has the following beneficial effects: a high-cleanliness transmission valve, compared with related technologies, is provided with a valve body, valve plate, support component, shock-absorbing cylinder, cam section, movable connecting component, push rod and elastic support component; When the shock-absorbing cylinder moves, the elastic support moves in conjunction with it. The elastic support moves along the support and the push rod, and the elastic support moves together with the push rod. The push rod moves in conjunction with the valve plate in the first hollow space. The cam section moves together with the shock-absorbing cylinder, and the movable connecting piece moves along the arc-shaped groove on the cam section until the cam section is in place. The cam section then abuts against the movable connecting piece, and the push rod moves in conjunction with the valve plate to close the channel on the valve body. At this time, the elastic support partially contacts the shock-absorbing pad. Because of the elastic support components, the shock-absorbing pads and shock-absorbing cylinders themselves have a shock-absorbing function, and the arc-shaped through groove on the cam section is connected to the movable connecting parts, the purpose of reducing vibration is achieved compared with the rigid connection method in the existing technology. This overcomes the technical problem of relatively large vibration when the transmission valve is opened or closed, achieving the technical effect of reducing vibration and making it practical. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the overall assembly structure; Figure 2 for Figure 1 A schematic diagram of the structure after removing the valve body and valve plate and adding the second cover plate; Figure 3 for Figure 2 One of the partial sectional views; Figure 4 for Figure 2Partial sectional view two; Figure 5 A partial sectional view of the shock-absorbing cylinder, cam section, movable connecting parts, and push rod after they are connected. Figure 6 A partial sectional view of the support member, push rod, and elastic support member after they are connected. Figure 7 A partial cross-sectional view showing the position of the movable connector in the arc-shaped through groove when the passage on the valve body is opened; Figure 8 This is a schematic diagram of the cam section. Figure 9 This is a partial sectional view of the self-locking component connected to the cylinder block; In the diagram: 10. Valve body, 11. Channel, 20. Valve plate, 30. Support component, 31. Through space, 32. Shock-absorbing pad, 30-1. Support block, 30-11. Slide groove, 30-2. Connecting block, 40. Shock-absorbing cylinder, 40-1. Cylinder body, 40-11. First space, 40-12. Second space, 40-2. First nozzle, 40-3. Second nozzle, 40-4. First cover Plate, 40-5. First damping ring, 40-6. Piston structure, 40-61. Piston, 40-61-1. Slot, 40-61-2. Outer chamfer, 40-62. Pressure block, 40-63. First connecting bolt, 40-64. Piston rod, 40-65. First sealing ring, 40-66. Second sealing ring, 40-7. Second damping ring, 40-8. Magnetic ring, 40-9. Magnetic ring Sensor, 40-10. Self-locking component, 40-10-1. Side seat, 40-10-11. First stepped through hole, 40-10-2. First spring, 40-10-3. Locking block, 40-1-1. Second stepped through hole, 40-10-4. Third sealing ring, 40-10-5. Fourth sealing ring, 50. Cam section, 51. Arc-shaped through groove, 50-1. Circular block, 50-2. Convex Plate, 60. Movable connector, 60-1. Bearing, 60-2. Pin, 70. Push rod, 70-1. Protrusion, 80. Elastic support, 81. Bellows assembly, 81-1. Bellows, 81-2. Fifth sealing ring, 81-3. Sixth sealing ring, 81-4. Bellows outer seat, 81-5. Second connecting bolt, 81-6. Ring sleeve, 82. Second spring, 90. Second cover plate. Detailed Implementation
[0015] To make the content easier to understand, the following detailed description is provided with reference to specific embodiments and accompanying drawings; A high-cleanliness transfer valve solves the technical problem of relatively large vibration when the transfer valve is opened or closed in related technologies. It can be manufactured and used, achieving the positive effect of reducing vibration. The overall concept is as follows: Implementation Method
[0016] like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown; a high-cleanliness transfer valve, comprising: The valve body 10 has a first hollow space inside and a channel 11 on its side wall, the channel 11 being connected to the first hollow space; Valve plate 20 is disposed in the first hollow space; The support member 30 is connected to the valve body 10 at one end, has a through space 31 in the middle position, and has at least two shock-absorbing pads 32 on the support member 30. A shock-absorbing cylinder 40 is connected to the other end of the support member 30. One end of the shock-absorbing cylinder 40 is disposed in the through space 31, and the other end is disposed outside the through space 31. A cam section 50 is connected to the shock-absorbing cylinder 40 and is linked by the shock-absorbing cylinder 40. The cam section 50 has an arc-shaped through groove 51. The movable connector 60 is movably connected to the arc-shaped through groove 51; The push rod 70 has one end set in the through space 31 and connected to the movable connector 60, and the other end passes through the support 30 and is connected to the valve plate 20. When the cam section 50 is linked by the shock-absorbing cylinder 40, the movable connector 60 moves along the arc-shaped through groove 51, and the push rod 70 links the valve plate 20 to open or close the channel 11. And an elastic support 80 is provided at the through space 31, between the support 30, the shock-absorbing cylinder 40 and the push rod 70. As the shock-absorbing cylinder 40 moves, the elastic support 80 moves along the support 30 and the push rod 70, and moves together with the push rod 70. After the elastic support 80 moves into place, it partially contacts the shock-absorbing pad 32. Specifically, during implementation, the shock-absorbing cylinder 40 is activated, which in turn activates the elastic support 80. The elastic support 80 moves along the support 30 and the push rod 70, and moves together with the push rod 70. The push rod 70 moves together with the valve plate 20 in the first hollow space. The cam section 50 and the shock-absorbing cylinder 40 are activated together, and the movable connecting piece 60 moves along the arc-shaped through groove 51 on the cam section 50 until the cam section 50 is in place. The cam section 50 then abuts against the movable connecting piece 60, and the push rod 70 closes the channel 11 on the valve body 10. At this time, the elastic support 80 partially contacts the shock-absorbing pad 32. Because of the elastic support 80, the shock-absorbing pad 32 and the shock-absorbing cylinder 40 have their own shock-absorbing function, and the arc-shaped through groove 51 on the cam section 50 is connected to the movable connector 60, the purpose of reducing vibration is achieved compared with the hard connection method in the prior art. Another implementation method: like Figure 1 As shown; in practice, the valve body 10 has a roughly rectangular shape, with a first hollow space inside and a channel 11 on the side wall; The first hollow space is provided to accommodate the valve plate 20, and the valve plate 20 can move smoothly. Channel 11 is a rectangular channel; Another implementation method: like Figure 1 As shown; in practice, the valve plate 20 is a rectangular plate structure, which is beneficial for blocking the channel 11; Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 6 As shown; in implementation, the support member 30 includes: two support blocks 30-1, symmetrically spaced apart, one end of each support block 30-1 being connected to the valve body 10, and the inner wall of each support block 30-1 having a groove 30-11, the groove 30-11 being an oblong groove, with the shock-absorbing pad 32 at its end; and a connecting block 30-2, connecting one end of each support block 30-1, with a through space 31 between the connecting block 30-1 and the support block 30-1, the middle position of which is penetrated by the push rod 70; The connecting block 30-2 is connected between the support blocks 30-1 and the support blocks 30-1 by internal hex bolts, which makes assembly relatively convenient and ensures structural reliability; After the support block 30-1 and the connecting block 30-2 are combined, it is easy to assemble with the valve body 10. The support block 30-1 and the valve body 10 are connected by internal hex bolts, which makes assembly relatively convenient. The slide groove 30-11 is provided to form a guide, which is conducive to the bellows assembly 81 always moving along a straight line. The through space 31 is provided, which is conducive to the arrangement of other components and the structure is relatively compact. A shock-absorbing pad 32, such as a rubber pad, is provided and is bonded to the inner wall of the end of the slide groove 30-11. When the ring 81-6 contacts the shock-absorbing pad 32, it is not a hard collision, which reduces the vibration noise generated by the collision. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 9 As shown; in implementation, the shock-absorbing cylinder 40 includes: a cylinder body 40-1, connected to the support member 30, the cylinder body 40-1 having a second hollow space; a first air nozzle 40-2, connected to the side wall of the cylinder body 40-1; a second air nozzle 40-3, connected to the side wall of the cylinder body 40-1, spaced apart from the first air nozzle 40-2; a first cover plate 40-4, connected to the end of the cylinder body 40-1, disposed outside the through space 31, for sealing one end of the second hollow space; and a first shock-absorbing ring 40-5, disposed on the inner wall of the first cover plate 40-4, disposed in the second hollow space. The piston structure 40-6 is movably connected in the second hollow space, dividing the second hollow space into a first space 40-11 and a second space 40-12. The first space 40-11 communicates with the first air nozzle 40-2, and the second space 40-12 communicates with the second air nozzle 40-3. The piston structure 40-6 is connected to the cam segment 50 and contacts the elastic support member 80. A second damping ring 40-7 is connected to the piston structure 40-6. A magnetic ring 40-8 is connected to the piston structure 40-6. A magnetic ring sensor 40-9 is connected to the cylinder body 40-1. The cylinder block 40-1 and the support block 30-1 are connected by internal hex bolts, which makes assembly relatively convenient; The first air nozzle 40-2 or the second air nozzle 40-3 is a commonly used structure in the prior art. It is connected to the side wall of the cylinder 40-1, which is conducive to the entry and exit of pressurized gas. Those skilled in the art can directly and without doubt know how to set it up after seeing the disclosed content, without having to do creative work or conduct excessive experiments. When pressurized gas is introduced through the first gas nozzle 40-2, the pressurized gas enters the first space 40-11, pushing the piston structure 40-6 to move towards the valve body 10. The piston structure 40-6, in conjunction with the cam section 50, movable connecting piece 60, push rod 70, elastic support piece 80 and valve plate 20, moves until the valve plate 20 closes the channel 11. When pressurized gas is introduced through the second gas nozzle 40-3, the pressurized gas enters the second space 40-12, pushing the piston structure 40-6 to move towards the first cover plate 40-4. The piston structure 40-6, in conjunction with the cam section 50, movable connecting piece 60, push rod 70, elastic support piece 80 and valve plate 20, moves until the valve plate 20 opens the channel 11. The first cover plate 40-4 is a square plate structure, which is connected to the cylinder body 40-1 by internal hex bolts, making assembly relatively convenient; The first damping ring 40-5 is an O-ring, which is set in the groove on the inner wall of the first cover plate 40-4. When the piston structure 40-6 moves towards the first cover plate 40-4, the piston structure 40-6 contacts the first damping ring 40-5. Since the first damping ring 40-5 is a flexible structure, the vibration noise generated by the collision is reduced. The piston structure 40-6 includes: a piston 40-61 disposed in the second hollow space; a pressure block 40-62; at least one first connecting bolt 40-63 connecting the piston 40-61, the pressure block 40-62, and the cam segment 50, and pressing the magnetic ring 40-8 between the piston 40-61 and the pressure block 40-62; and a piston rod 40-64, one end of which is connected to the piston 40-61, and the other end of which contacts the elastic support member 80. The piston rod 40-64 surrounds a portion of the push rod 70 and the cam section 50; a second damping ring 40-7 is provided between the piston rod 40-64 and the piston 40-61; a first sealing ring 40-65 is connected to the piston 40-61 and disposed between the piston 40-61 and the cylinder 40-1; and a second sealing ring 40-66 is connected to the cylinder 40-1 and disposed between the cylinder 40-1 and the piston rod 40-64. The piston 40-61, pressure block 40-62 and cam section 50 are connected by the first connecting bolt 40-63, which makes assembly relatively convenient; The first connecting bolt 40-63 is an internal hex bolt; One end of the piston rod 40-64 is threaded to the piston 40-61, making assembly relatively convenient. Furthermore, the middle position of the piston rod 40-64 has a stepped through space, which is beneficial for setting up the cam section 50, the movable connecting piece 60, the push rod 70, and the second spring 82, making assembly relatively convenient. The first sealing ring 40-65 and the second sealing ring 40-66 are O-rings, which ensures sealing performance; The second damping ring 40-7 is an O-ring. When the piston structure 40-6 moves towards the valve body 10, the second damping ring 40-7 contacts the cylinder 40-1. Since the second damping ring 40-7 is a flexible structure, it reduces the vibration noise generated by the collision. The magnetic ring 40-8 and the magnetic ring sensor 40-9 are common structures in the prior art, used to test the opening and closing status of valves. For example, the Hall magnetic ring sensor is used to detect the position of the magnetic ring 40-8. Since the magnetic ring 40-8 is set on the piston structure 40-6, it can detect the position of the piston structure 40-6, thus achieving the purpose of detecting the opening and closing status of the valve. Those skilled in the art can directly and without doubt know how to set it up after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. It also includes: a self-locking component 40-10, connected to the side wall of the cylinder 40-1, for engaging with the groove 40-61-1 on the piston 40-61 when the valve plate 20 closes the channel 11; The self-locking component 40-10 includes: a side seat 40-10-1 connected to the outer wall of the cylinder body 40-1, the side seat 40-10-1 having a first stepped through hole 40-10-11; a first spring 40-10-2 disposed at the first stepped through hole 40-10-11, with one end protruding from the first stepped through hole 40-10-11; a locking block 40-10-3 disposed at the second stepped through hole 40-1-1 on the cylinder body 40-1 for engaging with the slot 40-61-1; a third sealing ring 40-10-4 connected to the side seat 40-10-1 facing the locking block 40-10-3; and a fourth sealing ring 40-10-5 connected to the locking block 40-10-3 and disposed between the locking block 40-10-3 and the cylinder body 40-1. The side seat 40-10-1 is connected to the cylinder block 40-1 by internal hex bolts, which makes assembly relatively convenient. The first stepped through hole 40-10-11 is provided, which is beneficial for positioning the first spring 40-10-2; The first spring 40-10-2 is a commonly used structure in the prior art, such as a cylindrical spring; The locking block 40-10-3 has a roughly "T" shaped structure, is located at the second stepped through hole 40-1-1, and can move along the second stepped through hole 40-1-1. The third sealing ring 40-10-4 is an O-ring. When the locking block 40-10-3 contacts the third sealing ring 40-10-4, the third sealing ring 40-10-4 is a flexible structure, which not only reduces the vibration and noise generated by the collision, but also ensures the sealing performance. The fourth sealing ring, 40-10-5, is an O-ring, ensuring a tight seal. When pressurized gas is introduced through the first air nozzle 40-2, the pressurized gas enters the first space 40-11, pushing the piston structure 40-6 to move towards the valve body 10. The outer chamfer 40-61-2 on one end of the piston 40-61 (the outer chamfer 40-61-2 facilitates pushing the locking block 40-10-3 and will not collide with or jam the locking block 40-10-3) contacts the locking block 40-10-3, pushing the locking block 40-10-3 to move along the second stepped through hole 40-1-1. The first spring 40-10-2 is compressed until it reaches the slot 4. When 0-61-1 is aligned with the locking block 40-10-3, under the action of the first spring 40-10-2, the locking block 40-10-3 is engaged in the slot 40-61-1, thereby positioning the piston structure 40-6. At this time, the valve plate 20 closes the channel 11. Since the piston structure 40-6 is positioned, if an accidental gas interruption occurs and the pressure of the pressurized gas in the first space 40-11 becomes insufficient, the piston structure 40-6 will not move. The valve plate 20 will always close the channel 11, achieving the purpose of self-locking and ensuring the closing effect of the high-cleanliness transmission valve. When it is necessary to open channel 11, pressurized gas is introduced through the second air nozzle 40-3. The pressurized gas enters the second space 40-12 and the second stepped through hole 40-1-1, pushing the locking block 40-10-3 to move along the second stepped through hole 40-1-1. The first spring 40-10-2 is compressed, the locking block 40-10-3 moves out of the slot 40-61-1, and the piston structure 40-6 moves towards the first cover plate 40-4. The piston structure 40-6 is linked to the cam section 50, the movable connecting piece 60, the push rod 70, the elastic support piece 80, and the valve plate 20 to move until the valve plate 20 opens channel 11. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 As shown; in implementation, the cam section 50 includes: a circular block 50-1, which is connected to the first connecting bolt 40-63; and a convex plate 50-2, which is disposed on the circular block 50-1, has the arc-shaped through groove 51, and the convex plate 50-2 is inserted into one end of the push rod 70. The circular block 50-1 is connected to the first connecting bolt 40-63, making assembly relatively convenient; The protruding plate 50-2 is inserted into one end of the push rod 70, making assembly relatively convenient; The arc-shaped through groove 51 facilitates the movement of the movable connector 60, providing a flexible connection. Compared to the rigid connection method in the prior art, this reduces vibration. Furthermore, the arc-shaped structure of the through groove 51 acts as a guide. When the movable connector 60 moves, it moves together with the push rod 70. The push rod 70, in conjunction with the valve plate 20, opens or closes the channel 11. This reduces friction between the valve plate 20 and the valve body 10 when the valve plate 20 moves in the first hollow space, thus reducing the generation of friction particles. The movable connector 60 includes: a bearing 60-1 disposed in the arc-shaped through groove 51; and a pin 60-2 connecting the push rod 70, the bearing 60-1, and the convex plate 50-2. Bearing 60-1 is a commonly used structure in the prior art, such as a deep groove ball bearing. The rolling position along the arc-shaped through groove 51 has relatively small frictional resistance and will not jam. The pin 60-2 is a commonly used structure in the prior art, used to connect the push rod 70, the bearing 60-1 and the convex plate 50-2, and is relatively easy to assemble; One end of the push rod 70 is connected to the movable connector 60 and the cam section 50, and the other end passes through the support 30 and is connected to the valve plate 20. When the cam section 50 is linked by the damping cylinder 40, the movable connector 60 moves along the arc-shaped through groove 51, and the push rod 70 links the valve plate 20 to open or close the channel 11. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 As shown; in implementation, the elastic support 80 includes: a bellows assembly 81, disposed at the through space 31, between the support 30 and the push rod 70, the bellows assembly 81 moves with the push rod 70, the bellows assembly 81 moves along the support 30, and after the bellows assembly 81 moves into position, it partially contacts the shock-absorbing pad 32; and a second spring 82, disposed at the through space 31, between the piston structure 40-6 and the bellows assembly 81; The bellows assembly 81 includes: a bellows 81-1, which surrounds the push rod 70, with one end connected to the support member 30 and the other end contacting a protrusion 70-1 on the push rod 70; a fifth sealing ring 81-2, connected to one end of the bellows 81-1 and disposed between the bellows 81-1 and the support member 30; a sixth sealing ring 81-3, connected to the other end of the bellows 81-1 and disposed between the bellows 81-1 and the push rod 70; a bellows outer seat 81-4, with one end contacting the push rod 70 and the other end surrounding the bellows 81-1; at least one second connecting bolt 81-5, connecting the bellows outer seat 81-4 and the push rod 70; and two rings 81-6, symmetrically connected to the bellows outer seat 81-4 and slidably connected to the sliding groove 30-11 one-to-one; The bellows 81-1 is a commonly used structure in the prior art. One end is connected to the connecting block 30-2 by an internal hex bolt, which is relatively easy to assemble. The fifth sealing ring 81-2 is an O-ring, which ensures a tight seal; The sixth sealing ring 81-3 is an O-ring, which ensures a tight seal; The outer corrugated pipe seat 81-4 surrounds the corrugated pipe 81-1 and is spaced apart from the corrugated pipe 81-1, forming a barrier and limiting the corrugated pipe 81-1 to prevent the corrugated pipe 81-1 from twisting and breaking when compressed or rebounding. It is equipped with a protrusion 70-1, such as a circular protrusion, which can be linked to the bellows 81-1 for compression; The second connecting bolt 81-5 is a threaded pin, which is threadedly connected to the bellows outer seat 81-4 and tightens the push rod 70, so that there is a reliable connection between the bellows outer seat 81-4 and the push rod 70. The ring 81-6 slides along the groove 30-11, forming a guide, which helps the bellows assembly 81 to always move along a straight line and will not get stuck. The second spring 82 is a common structure in the prior art, such as a cylindrical spring. When the piston structure 40-6 pushes the second spring 82, the second spring 82 is compressed and moves along the push rod 70, forming a buffer and reducing the vibration noise generated by the collision. When the piston structure 40-6 continues to push, as the second spring 82 is compressed, the second spring 82 will move along with the bellows assembly 81, thereby moving the push rod 70. Another implementation method: like Figure 2 As shown; in practice, it also includes: a second cover plate 90, symmetrically arranged, connected to the connecting block 30-2 and the shock-absorbing cylinder 40, disposed between the support block 30-1, covering the through space 31; The second cover plate 90 is a plate-shaped structure, which is connected to the connecting block 30-2 and the shock-absorbing cylinder 40 by internal hex bolts, forming protection and being relatively aesthetically pleasing; In the description, it should be understood that the terms "up", "down", "left", "right", "front", "back", etc., indicate the orientation or positional relationship based on the positional relationship shown in the accompanying drawings, and are only for the convenience or simplification of the description, rather than indicating a specific orientation that must be present; the operation process described in the embodiments is not an absolute usage step, and corresponding adjustments can be made in actual use; Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art; the words “first,” “second,” and similar terms used in the specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components, and similarly, the words “a” or “a” and similar terms do not determine a quantity limitation, but rather indicate the presence of at least one, as determined by the content of the embodiments; The above description is only a preferred embodiment, but the scope of protection is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the disclosed technology, based on the technical solution and inventive concept, should be included within the scope of protection.
Claims
1. A high-cleanliness transfer valve, characterized in that, include: The valve body has a first hollow space inside and a channel on the side wall, the channel being connected to the first hollow space; A valve plate is disposed in the first hollow space; A support member, one end of which is connected to the valve body, has a through space in the middle of the support member, and has at least two shock-absorbing pads on the support member; A shock-absorbing cylinder is connected to the other end of the support member. One end of the shock-absorbing cylinder is disposed in the through space, and the other end is disposed outside the through space. A cam section is connected to the shock-absorbing cylinder and is linked by the shock-absorbing cylinder. The cam section has an arc-shaped through groove. The movable connector is movably connected to the arc-shaped through groove. The push rod has one end set in the through space and connected to the movable connector, and the other end passes through the support and is connected to the valve plate. When the cam section is linked by the shock-absorbing cylinder, the movable connector moves along the arc-shaped through groove, and the push rod links the valve plate to open or close the channel. An elastic support is provided at the through space, between the support, the shock-absorbing cylinder and the push rod. As the shock-absorbing cylinder moves, the elastic support moves along the support and the push rod, and moves together with the push rod. After the elastic support moves into place, it partially contacts the shock-absorbing pad.
2. The high-cleanliness transfer valve according to claim 1, characterized in that: The support includes two support blocks, symmetrically spaced apart, one end of each support block being connected to the valve body, and the inner wall of each support block having a groove, the groove being an oblong groove, and the end having the shock-absorbing pad. And a connecting block, which connects to one end of the support block and has the through space between them, with the push rod passing through the middle of the connecting block.
3. The high-cleanliness transmission valve according to claim 2, characterized in that: The shock-absorbing cylinder includes: a cylinder body connected to the support member, and the cylinder body has a second hollow space; The first air nozzle is connected to the side wall of the cylinder; The second air nozzle is connected to the side wall of the cylinder body and is spaced apart from the first air nozzle. The first cover plate, connected to the end of the cylinder body, is disposed outside the through space and is used to seal one end of the second hollow space; The first shock absorber ring is disposed on the inner wall of the first cover plate and disposed in the second hollow space; A piston structure is movably connected in the second hollow space, dividing the second hollow space into a first space and a second space. The first space is connected to the first air nozzle, and the second space is connected to the second air nozzle. The piston structure is connected to the cam section and contacts the elastic support member. The second shock absorber ring is connected to the piston structure; A magnetic ring is attached to the piston structure; And a magnetic ring sensor, connected to the cylinder block.
4. The high-cleanliness transfer valve according to claim 3, characterized in that: The piston structure includes: a piston disposed in the second hollow space; Pressed blocks; At least one first connecting bolt connects the piston, the pressure block, and the cam segment, and presses the magnetic ring between the piston and the pressure block; A piston rod, one end of which is connected to the piston and the other end of which contacts the elastic support, and the piston rod surrounds a portion of the push rod and the cam section, and a second damping ring is provided between the piston rod and the piston; A first sealing ring is connected to the piston and disposed between the piston and the cylinder. And a second sealing ring, connected to the cylinder body and disposed between the cylinder body and the piston rod.
5. A high-cleanliness transfer valve according to claim 4, characterized in that: Also includes: A self-locking component is connected to the side wall of the cylinder and is used to engage with a groove on the piston when the valve plate closes the channel.
6. The high-cleanliness transfer valve according to claim 5, characterized in that: The self-locking component includes: a side seat connected to the outer wall of the cylinder body, the side seat having a first stepped through hole; A first spring is disposed at the first stepped through hole, and one end protrudes from the first stepped through hole; A locking block is provided at the second stepped through hole on the cylinder body for engaging with the slot. The third sealing ring is connected to the side seat and faces the locking block; And a fourth sealing ring, connected to the locking block, is disposed between the locking block and the cylinder body.
7. A high-cleanliness transfer valve according to claim 4, characterized in that: The cam section includes: a circular block, which is connected to the first connecting bolt; And a convex plate, disposed on the circular block, having the arc-shaped through groove, and the convex plate being inserted into one end of the push rod.
8. A high-cleanliness transfer valve according to claim 7, characterized in that: The movable connector includes a bearing disposed in the arc-shaped through groove; And a pin, connecting the push rod, the bearing and the convex plate.
9. A high-cleanliness transmission valve according to claim 3, characterized in that: The elastic support includes a bellows assembly disposed in the through space, between the support and the push rod. The bellows assembly moves with the push rod and moves along the support. After the bellows assembly is in place, it partially contacts the shock-absorbing pad. And a second spring, disposed at the through space, between the piston structure and the bellows assembly; The corrugated pipe assembly includes a corrugated pipe that surrounds the push rod, with one end connected to the support member and the other end in contact with a protrusion on the push rod. The fifth sealing ring is connected to one end of the bellows and is disposed between the bellows and the support member; The sixth sealing ring is connected to the other end of the bellows and is disposed between the bellows and the push rod; The bellows outer seat has one end in contact with the push rod and the other end surrounding the bellows; At least one second connecting bolt connects the bellows outer seat and the push rod; And two rings, symmetrically connected to the outer seat of the bellows, are slidably connected one-to-one with the sliding groove.
10. A high-cleanliness transfer valve according to claim 2, characterized in that: Also includes: The second cover plate, symmetrically arranged, is connected to the connecting block and the shock-absorbing cylinder, positioned between the support block, and covers the through space.