A displacement table and conveyor

Abstract

The application provides a displacement table and a conveying device, and relates to the technical field of semiconductor equipment manufacturing. The displacement table provided by the application comprises a stator unit, a mover unit arranged above the stator unit, a piezoelectric driving module capable of driving the mover unit to move relative to the stator unit, and an electromagnetic driving module. The piezoelectric driving module comprises a piezoelectric driving mechanism connected with the mover unit, and the piezoelectric driving mechanism is configured to be capable of acting on the upper surface of the stator unit. The electromagnetic driving module comprises a conductor array arranged on the stator unit and a magnet array arranged on the mover unit and matched with the conductor array. The displacement table provided by the application can realize long-distance conveying with large stroke, high speed and high acceleration, and can also realize high-precision positioning and has better position stability. The mover unit of the application can cross the stator units of multiple displacement tables through the electromagnetic driving module, so as to realize handover without manual operation or a handover manipulator.

Description

Technical Field

[0001] This specification relates to the field of semiconductor equipment manufacturing, and in particular to a displacement stage and a conveying device. Background Technology

[0002] The transfer between the conveying device and the processing station relies on handover robots, etc. This transfer method is discontinuous and the overall compactness is relatively scattered, which cannot meet the requirements of high efficiency and collaboration of new manufacturing systems, as well as the requirements of overall integration and compactness. Summary of the Invention

[0003] This specification provides one or more embodiments of a displacement stage, including: a stator unit, a movable unit disposed above the stator unit, a piezoelectric drive module and an electromagnetic drive module capable of driving the movable unit to move relative to the stator unit; the piezoelectric drive module includes: a piezoelectric drive mechanism connected to the movable unit, the piezoelectric drive mechanism being configured to act on the upper surface of the stator unit; the electromagnetic drive module includes: a conductor array disposed on the stator unit and a magnet array disposed on the movable unit matching the conductor array; the piezoelectric drive module and the electromagnetic drive module are configured to independently drive the same movable unit to move relative to the stator unit; the electromagnetic drive module is configured to position the movable unit in a first position or a second position, wherein when the movable unit is in the first position, at least a portion of the piezoelectric drive module abuts against the stator unit, and when the movable unit is in the second position, both the movable unit and the piezoelectric drive module are suspended above the stator unit.

[0004] In some embodiments, the conductor array includes: a plurality of first conductor groups and a plurality of second conductor groups; the extending directions of the first conductor groups and the extending directions of the second conductor groups intersect; the plurality of first conductor groups are arranged in a mirror-symmetric manner with respect to a vertical plane of the direction of the stator unit toward the mover unit, and the plurality of second conductor groups are arranged in a mirror-symmetric manner with respect to the vertical plane.

[0005] In some embodiments, the piezoelectric drive module includes: a plurality of piezoelectric drive mechanism arrays connected to the moving part, each piezoelectric drive mechanism array including one or more piezoelectric drive mechanisms; the plurality of piezoelectric drive mechanism arrays are located around the magnet array; the plurality of piezoelectric drive mechanisms in each piezoelectric drive mechanism array are arranged in a one-dimensional linear array or a two-dimensional planar array.

[0006] In some embodiments, the stator unit includes: a stator base and a cover plate disposed on the stator base, a first accommodating space being formed between the stator base and the cover plate, and the conductor array being disposed inside the first accommodating space; the mover unit includes: a second accommodating space formed on the lower surface of the mover unit, and the magnet array being disposed within the second accommodating space; the mover unit further includes: a third accommodating space formed on the lower surface of the mover unit, and the piezoelectric drive mechanism being disposed within the third accommodating space; wherein the lower surface of the piezoelectric drive mechanism protrudes beyond the lower surface of the mover unit, and the lower surface of the piezoelectric drive mechanism protrudes beyond the lower surface of the magnet array.

[0007] In some embodiments, the displacement stage is configured to be in a first operating state or a second operating state; when the displacement stage is in the first operating state, the piezoelectric drive mechanism acts on the upper surface of the stator unit; when the displacement stage is in the second operating state, the moving unit, carrying the piezoelectric drive mechanism and the magnet array, is suspended above the stator unit.

[0008] In some embodiments, the displacement stage further includes: a power-harvesting unit, the power-harvesting unit including a stator conductive member connected to the stator unit, a mover conductive member connected to the mover unit, and a power-harvesting mechanism; the power-harvesting mechanism is configured to: mechanically connect the mover conductive member and the stator conductive member, and enable the mover conductive member and the stator conductive member to be electrically connected and / or signal connected; the power-harvesting mechanism is configured to: enable the mover unit to move relative to the stator conductive member along a first direction and / or a second direction while the mover conductive member maintains the electrical connection and / or the signal connection with the stator conductive member, the first direction intersecting the second direction, and the first direction and the second direction being parallel to the surface of the stator unit.

[0009] In some embodiments, the power taking mechanism is configured to be flexible in a first direction and flexible in a second direction intersecting the first direction; the first direction and the second direction are parallel to the surface of the stator unit.

[0010] In some embodiments, the power extraction unit is a first power extraction unit, the stator conductive component includes a first stator lead plate, the mover conductive component includes a first mover lead plate, and the power extraction mechanism includes a clamping mechanism; the clamping mechanism includes: a first plate-shaped structure connected to the stator unit, a second plate-shaped structure located above the first plate-shaped structure, and a third plate-shaped structure located between the first plate-shaped structure and the second plate-shaped structure; the second plate-shaped structure is flexibly connected to the first plate-shaped structure, the third plate-shaped structure is flexibly connected to the second plate-shaped structure, and the first stator lead plate is disposed on the third plate-shaped structure.

[0011] In some embodiments, the clamping mechanism includes: a first-direction flexible module and a second-direction flexible module; the first-direction flexible module connects the second plate-like structure and the first plate-like structure, and is configured to be flexible in a first direction and capable of driving the second plate-like structure to move closer to or away from the first plate-like structure; the second-direction flexible module connects the third plate-like structure and the second plate-like structure, and is configured to be flexible in a second direction intersecting the first direction.

[0012] In some embodiments, the clamping mechanism further includes a pressure plate, the clamping mechanism being configured such that the pressure plate of the clamping mechanism can approach or move away from the first stator lead plate, so that the first mover lead plate is clamped between the first stator lead plate and the pressure plate, or the first mover lead plate is disengaged from the first stator lead plate and the pressure plate; the first mover lead plate has a first mover lead contact, the first stator lead plate has a first stator lead contact, and the first mover lead contact is configured to abut against the first stator lead contact.

[0013] In some embodiments, the pressure plate is flexibly connected to the second plate-like structure, and the pressure plate is located between the second plate-like structure and the third plate-like structure; the clamping mechanism includes: a pressure plate flexible module connecting the pressure plate and the second plate-like structure, the pressure plate flexible module being configured to: drive a portion of the pressure plate toward or away from the third plate-like structure.

[0014] In some embodiments, the clamping mechanism further includes: a top block disposed on the third plate structure; the pressure plate is configured to rotate about the top block as a fulcrum; the pressure plate flexible module is configured to drive a portion of the pressure plate located on one side of the top block to move closer to or away from the third plate structure, so that a portion of the pressure plate located on the other side of the top block moves away from or closer to the first stator lead plate.

[0015] In some embodiments, the first directional flexible module includes: a first directional flexible spring and a first directional piezoelectric film that is attached to the first directional flexible spring; the second directional flexible module includes: a second directional flexible spring; the clamping mechanism includes a pressure plate flexible module, the pressure plate flexible module including: a pressure plate flexible spring and a pressure plate piezoelectric film that is attached to the pressure plate flexible spring.

[0016] In some embodiments, one of the first mover lead plate and the first stator lead plate is provided with one or more positioning holes, and the other of the first mover lead plate and the first stator lead plate is provided with one or more positioning posts, wherein the positioning holes match the positioning posts.

[0017] In some embodiments, the power-taking unit is a second power-taking unit, the stator conductive member includes a power-taking ball head, and the mover conductive member includes a second mover lead plate; the power-taking mechanism includes: a power-taking bracket disposed on the stator unit, and a power-taking elastic member disposed on the power-taking bracket; the power-taking ball head is disposed on the power-taking elastic member; the second mover lead plate has a second mover lead contact, and the second mover lead contact is configured to abut against the power-taking ball head.

[0018] This specification provides a conveying device according to one or more embodiments, including one or more displacement stages as described in any one of the above; the conveying device includes: a conveying path, the conveying path including a plurality of interconnected stator units; one or more of the moving units are capable of moving along the conveying path.

[0019] This specification provides a conveying device in one or more embodiments, including one or more displacement stages as described in any one of the above; the conveying device includes: a functional station, the functional station including the stator unit and a one-dimensional motion device or a multi-dimensional motion device for driving the stator unit to move; the moving unit is capable of moving on the stator unit.

[0020] This specification provides a conveying device according to one or more embodiments, including one or more displacement stages as described in any one of the above claims; the conveying device includes a conveying path and a functional station, the functional station being disposed adjacent to the conveying path; the conveying path includes a plurality of interconnected stator units, and one or more of the movable units are capable of moving on the stator units of the conveying path; the functional station includes a stator unit and a one-dimensional motion device or a multi-dimensional motion device for driving the stator unit to move; the stator unit of the functional station is configured to be able to move to a junction position, the junction position being adjacent to the stator unit of the conveying path; the movable unit has a movable conductive member, and the stator unit of the functional station has a stator conductive member that matches the movable conductive member and a clamping mechanism for clamping the movable conductive member based on the stator conductive member.

[0021] The beneficial effects that the embodiments of this specification may bring include, but are not limited to: (1) providing a displacement stage that can achieve long-distance transmission with large stroke, high speed and high acceleration, and can also achieve high-precision positioning and have good position stability; (2) the moving sub-unit can cross the stator units of multiple displacement stages through the electromagnetic drive module, thereby realizing handover without manual or handover robot arm; (3) integrating a part of the piezoelectric drive module and the electromagnetic drive module on the same moving sub-unit, so that the same moving sub-unit can switch between piezoelectric drive mode and electromagnetic drive mode by cooperating with the stator unit, without providing a multi-layer moving sub-unit structure, reducing the overall height of the equipment; (4) using the magnetic levitation characteristics of the electromagnetic drive module to realize piezoelectric drive. The moving module drives or disengages from the moving sub-unit, thereby achieving the switching between two piezoelectric driving modes and electromagnetic driving modes; (5) Two different power-taking units are provided to achieve electrical connection and / or signal connection between the moving sub-unit and the stator unit; (6) The pressure plate flexible module of the first power-taking unit can drive the pressure plate to rotate based on the fulcrum provided by the top block, thereby achieving the release or clamping of the first moving lead plate; (7) The first power-taking unit provides flexibility in the first and second directions so that the moving sub-unit can further adjust its precise position after being powered on and achieve motion decoupling; (8) The pressure plate flexible module adopts the structure of spring and piezoelectric diaphragm, and the first direction flexible module also adopts the structure of spring and piezoelectric diaphragm, with a small volume. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced can be any one or a combination of the above, or any other possible beneficial effects. Attached Figure Description

[0022] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings denote the same structures or steps.

[0023] Figure 1 This is a schematic diagram of a displacement stage according to some embodiments of this specification.

[0024] Figure 2 This is a schematic diagram of the stator unit of a displacement stage according to some embodiments of this specification.

[0025] Figure 3 This is a schematic diagram of the moving element of a displacement stage according to some embodiments of this specification.

[0026] Figure 4 This is a schematic diagram of a conductor array and a magnet array of a displacement stage according to some embodiments of this specification.

[0027] Figure 5 This is a schematic diagram of the cooperation between the piezoelectric drive module and the stator unit of the displacement stage according to some embodiments of this specification.

[0028] Figure 6 This is a schematic diagram of a piezoelectric drive module and an electromagnetic drive module of a displacement stage according to some embodiments of this specification.

[0029] Figure 7 This is a schematic diagram of a piezoelectric drive mechanism array for a displacement stage according to some embodiments of this specification.

[0030] Figure 8 This is a schematic diagram of a piezoelectric drive mechanism array for a displacement stage according to other embodiments of this specification.

[0031] Figure 9 This is a schematic diagram of the tangential deformation mode of the piezoelectric drive mechanism array of the displacement stage according to some embodiments of this specification.

[0032] Figure 10 This is a schematic diagram of the walking mode of the piezoelectric drive mechanism array of the displacement stage according to some embodiments of this specification.

[0033] Figure 11 This is a schematic diagram of the power supply unit of the displacement stage according to some embodiments of this specification.

[0034] Figure 12 , Figure 13 This is a three-dimensional schematic diagram of the power supply unit of the displacement stage according to some embodiments of this specification.

[0035] Figure 14 This is a schematic diagram of the mover lead plate and stator lead plate of the power take-up unit of the displacement stage according to some embodiments of this specification.

[0036] Figure 15 , Figure 16This is a perspective view of the clamping mechanism of the displacement stage according to some embodiments of this specification.

[0037] Figure 17 This is a schematic diagram of the motion of the second plate-shaped structure of the power-taking unit of the displacement stage according to some embodiments of this specification.

[0038] Figure 18 This is a schematic diagram of the movement of the pressure plate of the power-taking unit of the displacement stage according to some embodiments of this specification.

[0039] Figure 19 This is a schematic diagram of the power supply unit of the displacement stage according to other embodiments of this specification.

[0040] Figure 20 This is a schematic diagram of a transmission device with a transmission path according to some embodiments of this specification.

[0041] Figure 21 This is a schematic diagram of a conveying device with a conveying path and functional workstations, as shown in some embodiments of this specification.

[0042] Figure 22 , Figure 23 , Figure 24 This is a schematic diagram of the functional workstations of the conveying device according to some embodiments of this specification.

[0043] In the diagram: 1 Stator unit; 11 Stator base; 12 Cover plate; 2 Moving unit; 3 Piezoelectric drive mechanism array; 31 Piezoelectric drive mechanism; 311 First piezoelectric stack; 312 Second piezoelectric stack; 313 Third piezoelectric stack; 41 Conductor array; 411 First conductor group; 412 Second conductor group; 42 Magnet array; 421 Magnet group; 5 First power extraction unit; 51 First stator lead plate; 511 Positioning post; 52 First moving unit lead plate; 521 Positioning hole; 53 Clamping mechanism; 530 Pressure plate; 5301 Pressure plate extension; 5302 Bending part; 531 First plate structure; 532 Second plate structure; 533 Third plate structure; 534 First direction flexible module; 5341 First direction flexible spring; 5342 First direction piezoelectric diaphragm; 535 Second direction flexible module; 5351 Second-direction flexible spring; 536 Pressure plate flexible module; 5361 Pressure plate flexible spring; 5362 Pressure plate piezoelectric diaphragm; 537 Top block; 6 Second power-taking unit; 61 Power-taking ball head; 611 Power-taking bracket; 612 Power-taking elastic element; 62 Second mover lead plate; 7 Conveying path; 8 Functional station; 81 One-dimensional motion device; 82 Multi-dimensional motion device. Detailed Implementation

[0044] To more clearly illustrate the technical solutions of the embodiments in this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the content described below are some examples or embodiments of this specification. For those skilled in the art, without creative effort, the technical solutions or means disclosed in this specification can be applied to other scenarios based on this technical content.

[0045] It should be understood that the terms "system," "device," "equipment," "part" and / or "component," "unit" and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other words can achieve the same purpose, they may be replaced by other expressions.

[0046] Unless otherwise specified, the technical terms used to describe components, elements, etc. in this specification are not singular but may include plural. Generally speaking, terms such as "comprising" or "including" only indicate that explicitly identified steps, elements, or components are included, and these steps, elements, and components do not constitute an exclusive list, as the described method or apparatus may also include other steps or components.

[0047] In the description of this specification, it should be understood that the directional descriptions, such as up, down, front, back, left, and right, indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. These descriptions are for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this specification, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in this specification in conjunction with the specific content of the technical solution.

[0048] Conveying devices are used to transport workpieces from one location to another, such as from one processing station to another. In some related embodiments, the conveying device may include a belt conveyor, a roller conveyor, a chain conveyor, etc. A belt conveyor may include a rubber or polyurethane belt wound between driving and driven rollers, relying on friction to drive continuous transport; a roller conveyor may include a series of parallel, unpowered rollers or powered metal or plastic rollers; a chain conveyor includes a sleeve roller chain or plate chain, which drives a carrying platform to achieve rigid continuous transport.

[0049] In some related embodiments, the transmission device may also include a magnetic levitation transmission device, which uses electromagnetic force to drive the mover to levitate on the stator without contact. It can achieve long-distance transmission with large stroke, high speed and high acceleration, but it has a certain jitter error in the stationary state, which makes it difficult to meet the requirements of high positioning accuracy and position stability.

[0050] Furthermore, the transfer between the conveying device and the processing station relies on handover robots, etc. This transfer method is discontinuous and the overall compactness is relatively scattered, which cannot meet the requirements of high efficiency and collaboration of new manufacturing systems, as well as the requirements of overall integration and compactness.

[0051] Based on this, one or more embodiments of this specification provide a displacement stage that can achieve long-distance transmission through an electromagnetic drive module and high-precision positioning through a piezoelectric drive module, has good position stability, and can realize the handover between workstations through the electromagnetic drive module and the piezoelectric drive module without relying on manual labor or handover robots.

[0052] Figure 1 This is a schematic diagram of a displacement stage according to some embodiments of this specification. Figure 2 This is a schematic diagram of the stator unit of the displacement stage according to some embodiments of this specification. Figure 3 This is a schematic diagram of the moving sub-unit of the displacement stage according to some embodiments of this specification. Figure 4 This is a schematic diagram of a conductor array and a magnet array of a displacement stage according to some embodiments of this specification. Figure 5 This is a schematic diagram illustrating the interaction between the piezoelectric drive module and the stator unit of the displacement stage according to some embodiments of this specification. See also... Figures 1 to 5 As shown, in one or more embodiments of this specification, the displacement stage may include: a stator unit 1, a movable unit 2 disposed above the stator unit 1, a piezoelectric drive module and an electromagnetic drive module capable of driving the movable unit 2 to move relative to the stator unit 1. In some embodiments, the piezoelectric drive module and the electromagnetic drive module independently drive the same movable unit 2 to move relative to the stator unit 1. Exemplarily, the piezoelectric drive module and the electromagnetic drive module independently drive the same movable unit 2 to move relative to the same stator unit 1. Exemplarily, the piezoelectric drive module and the electromagnetic drive module independently drive the same movable unit 2 to move relative to a stator unit device formed by splicing multiple stator units 1. In some embodiments, the piezoelectric drive module and the electromagnetic drive module are configured to act independently on the same movable unit 2. In some embodiments, a portion of the piezoelectric drive module and the electromagnetic drive module are integrated on the same movable unit 2.

[0053] In some embodiments, the motion mode of the moving subunit 2 relative to the stator unit 1 can be selected from piezoelectric drive mode and electromagnetic drive mode. When the motion mode is in piezoelectric drive mode, the piezoelectric drive module drives the moving subunit 2 to move relative to the stator unit 1. When the motion mode is in electromagnetic drive mode, the electromagnetic drive module drives the moving subunit 2 to move relative to the stator unit 1. A portion of the piezoelectric drive module and the electromagnetic drive module are integrated on the same moving subunit 2, so that the same moving subunit 2 can cooperate with the stator unit 1 to realize the switching between piezoelectric drive mode and electromagnetic drive mode, eliminating the need to provide a multi-layer moving subunit structure and reducing the overall height of the device.

[0054] In some embodiments, the number of moving sub-units 2 is one, and both the piezoelectric drive module and the electromagnetic drive module drive this one moving sub-unit 2.

[0055] In some embodiments, the stator unit 1 has an upper surface, and the movable unit 2 is configured to be located on or above the upper surface of the stator unit 1. In some embodiments, the movable unit 2 is movable relative to the stator unit 1. Exemplarily, the movable unit 2 is movable along the X-axis or the Y-axis. Exemplarily, the X-axis intersects the Y-axis. Exemplarily, the X-axis is perpendicular to the Y-axis.

[0056] In some embodiments, the upper surface of the stator unit 1 can be a plane or approximately a plane, in which case the X-axis and Y-axis directions can be parallel to the upper surface of the stator unit 1, respectively. In other embodiments, the upper surface of the stator unit 1 may not be a plane, in which case the X-axis and Y-axis directions can be parallel to a horizontal plane, or the X-axis and Y-axis directions can be parallel to the plane in which the mover unit 2 is located when it is suspended above the stator unit 1.

[0057] In some embodiments, the moving sub-unit 2 can be in at least a first position or a second position relative to the stator unit 1. When the moving sub-unit 2 is in the first position, it is located above the stator unit 1 and there is a first distance between them. When the moving sub-unit 2 is in the second position, it (and the components attached to it) is located above the stator unit 1 and there is a second distance between them. The first distance is less than the second distance. It should be noted that the first distance and the second distance specify the distance along the Z-axis from a fixed preset point in the sub-unit 1 to a fixed preset point in the moving sub-unit 2, for example, the distance from the center of the stator unit 1 to the center of the moving sub-unit 2.

[0058] In some embodiments, the piezoelectric drive module includes a piezoelectric drive mechanism 31 connected to the moving subunit 2. The piezoelectric drive mechanism 31 is configured to act on the upper surface of the stator unit 1, for example, the piezoelectric drive mechanism 31 can abut against the upper surface of the stator unit 1. The piezoelectric drive mechanism 31 is configured to move based on the frictional force between itself and the upper surface of the stator unit 1. In some embodiments, the piezoelectric drive mechanism 31 is configured to drive the moving subunit 2 to move relative to the stator unit 1 along the X-axis and / or Y-axis and / or Z-axis directions when the moving subunit 2 is in a first position.

[0059] In some applications, when the moving unit 2 is in the first position, the piezoelectric drive mechanism 31 can abut against the upper surface of the stator unit 1. In some applications, while the piezoelectric drive mechanism 31 abuts against the upper surface of the stator unit 1 and drives the moving unit 2, the electromagnetic drive module can be in a non-operating state. In some embodiments, the piezoelectric drive mechanism 31 can be a inchworm-type piezoelectric drive mechanism, which can travel on the upper surface of the stator unit 1. In some embodiments, the Z-axis is vertical, the electromagnetic drive module is in a non-operating state, and the frictional force between the upper surface of the stator unit 1 and the piezoelectric drive mechanism 31 is provided by the moving unit 2 itself and the load gravity.

[0060] In some embodiments, the electromagnetic drive module includes: a conductor array 41 disposed on the stator unit 1 and a magnet array 42 disposed on the mover unit 2 that matches the conductor array 41. In some embodiments, the conductor array 41 and the magnet array 42 are configured to enable the mover unit 2 to be in a first position (e.g., the mover unit 2 at least partially abuts against the upper surface of the stator unit 1) or a second position (e.g., the mover unit 2 and the piezoelectric drive module located on the mover unit 2 are all magnetically levitated on the upper surface of the stator unit 1) and to drive the mover unit 2 to move relative to the stator unit 1 in the X-axis direction and / or the Y-axis direction.

[0061] In some applications, when the moving unit 2 is in the second position, there is a gap between the piezoelectric drive mechanism 31 and the upper surface of the stator unit 1 to prevent the piezoelectric drive mechanism 31 from obstructing the drive of the moving unit 2 by the conductor array 41 and the magnet array 42. In some applications, the piezoelectric drive module may be in a non-operating state while the conductor array 41 and the magnet array 42 are driving the moving unit 2. In some embodiments, the conductor array 41 and the magnet array 42 may form a moving magnet type magnetic levitation planar motor.

[0062] In some application scenarios, the magnetic levitation characteristics of the electromagnetic drive module are used to enable the piezoelectric drive module to drive or disengage the moving sub-unit 2, thereby achieving the switching between the two piezoelectric drive modes and the electromagnetic drive mode.

[0063] In some applications, the displacement stage is configured to operate in either a first or a second working state. When the displacement stage is in the first working state, the piezoelectric drive mechanism 31 acts on the upper surface of the stator unit 1. At this time, the piezoelectric drive mechanism 31 can be in a working state, while the conductor array 41 and the magnet array 42 can be in a non-working state. When the displacement stage is in the second working state, the mover unit 2, carrying the piezoelectric drive mechanism 31 and the magnet array 42, suspends above the stator unit 1. At this time, the piezoelectric drive mechanism 31 is in a non-working state, while the conductor array 41 and the magnet array 42 can be in a working state.

[0064] In other application scenarios, when the displacement stage is in its first working state, the electromagnetic drive module and the piezoelectric drive module work simultaneously. At this time, the electromagnetic drive module provides an attractive force between the stator unit 1 and the mover unit 2 to ensure that the piezoelectric drive module and the upper surface of the stator unit 1 have sufficient friction.

[0065] Piezoelectric drive modules feature extremely low heat generation and minimal vibration error, enabling high positioning accuracy and stability of workpieces at various workstations. Electromagnetic drive modules enable long-distance workpiece transfer with large strokes, high speeds, and high accelerations. The displacement stage, equipped with both piezoelectric and electromagnetic drive modules, can quickly switch between high-precision positioning and long-distance transfer, reducing the need for manual labor and robotic arms while improving automation levels and meeting the requirements of high-productivity, high-precision, and high-stability precision motion systems.

[0066] In one or more embodiments of this specification, see Figure 3 , Figure 5 , Figure 6 As shown, the piezoelectric drive module includes: a plurality of piezoelectric drive mechanism arrays 3 connected to the moving subunit 2, each piezoelectric drive mechanism array 3 including one or more piezoelectric drive mechanisms 31, for example, the figure shows that each piezoelectric drive mechanism array 3 includes three piezoelectric drive mechanisms 31.

[0067] In some embodiments, the plurality of piezoelectric drive mechanisms 31 in each piezoelectric drive mechanism array 3 are arranged in a one-dimensional linear array or a two-dimensional planar array. For example, Figure 7 Three piezoelectric actuators 31 arranged in a two-dimensional planar array are shown. Exemplary, Figure 8 Two piezoelectric drive mechanisms 31 arranged in a one-dimensional linear array are shown.

[0068] In some embodiments, see Figure 7 , Figure 8As shown, each piezoelectric drive mechanism 31 may include a first piezoelectric stack 311, a second piezoelectric stack 312, and a third piezoelectric stack 313 connected in sequence. The first piezoelectric stack 311 may be fixedly connected to the moving unit 2, the third piezoelectric stack 313 may be disposed toward the stator unit 1 and configured to abut against the stator unit 1, and the second piezoelectric stack 312 is located between the first piezoelectric stack 311 and the third piezoelectric stack 313.

[0069] In some embodiments, the first piezoelectric stack 311 can undergo axial deformation under the action of an electric field, and the second piezoelectric stack 312 and the third piezoelectric stack 313 can undergo tangential deformation under the action of an electric field, and the tangential deformation direction of the second piezoelectric stack 312 is different from that of the third piezoelectric stack 313.

[0070] In some use cases, see Figure 7 , Figure 8 As shown, combined with Figure 9 As shown, when the first piezoelectric stack 311 is energized, it can deform along the Z-axis, thereby causing the moving unit 2 to move relative to the stator unit 1 along the Z-axis. When the second piezoelectric stack 312 is energized, it can deform along the Y-axis, thereby causing the moving unit 2 to move relative to the stator unit 1 along the Y-axis. When the third piezoelectric stack 313 is energized, it can deform along the X-axis, thereby causing the moving unit 2 to move relative to the stator unit 1 along the X-axis.

[0071] refer to Figure 9 The piezoelectric drive mechanism 31 shown is in operation, and the piezoelectric drive module can be in tangential deformation mode. In some application scenarios, the first piezoelectric stack 311 of part or all of the piezoelectric drive mechanism 31 is axially extended, and its second piezoelectric stack 312 and / or third piezoelectric stack 313 undergo tangential deformation, thereby finely adjusting the position of the sub-unit 2 relative to the stator unit 1.

[0072] In some use cases, see Figure 7 , Figure 8 As shown, combined with Figure 9 As shown, when one of the multiple first piezoelectric stacks 311 extends axially, its corresponding third piezoelectric stack 313 can abut against the stator unit 1. At this time, the tangential deformation of its corresponding second piezoelectric stack 312 and / or third piezoelectric stack 313 can cause the moving unit 2 to move relative to the stator unit 1. When another of the multiple first piezoelectric stacks 311 contracts axially, its corresponding third piezoelectric stack 313 can detach from the stator unit 1. At this time, the tangential deformation of its corresponding second piezoelectric stack 312 and / or third piezoelectric stack 313 will not affect the position of the moving unit 2 relative to the stator unit 1.

[0073] refer to Figure 10The piezoelectric drive mechanism 31 shown in the diagram can also be in a walking mode. In some application scenarios, each piezoelectric drive mechanism 31 can perform steps 1 and 2. Step 1 includes: the first piezoelectric stack 311 axially elongates so that the third piezoelectric stack 313 abuts against the surface of the stator unit 1; the second piezoelectric stack 312 and / or the third piezoelectric stack 313 tangentially deforms; and the moving unit 2 is displaced in the X-axis and / or Y-axis directions by the friction between the third piezoelectric stack 313 and the surface of the stator unit 1. Step 2 includes: the first piezoelectric stack 311 axially recovers or shortens so that the third piezoelectric stack 313 disengages from the surface of the stator unit 1; and the second piezoelectric stack 312 and / or the third piezoelectric stack 313 recovers or reverses tangential deformation. When the piezoelectric drive module is in walking mode, one part of the piezoelectric drive mechanism 31 reciprocates in the order of step 1, step 2, step 1, while the other part of the piezoelectric drive mechanism 31 reciprocates in the order of step 2, step 1, step 2. The two sets of piezoelectric drive mechanisms 31 alternately abut against the upper surface of the stator unit 1 to drive the drive subunit 2 to move continuously.

[0074] It should be noted that the second piezoelectric stack 312 can cause the moving sub-unit 2 to move relative to the stator unit 1 along one of the X-axis and Y-axis directions, and the third piezoelectric stack 313 can cause the moving sub-unit 2 to move relative to the stator unit 1 along the other of the X-axis and Y-axis directions. The second piezoelectric stack 312 and the third piezoelectric stack 313 can move relatively independently (for example, the third piezoelectric stack 313 is stationary when the second piezoelectric stack 312 is working, or the second piezoelectric stack 312 is stationary when the third piezoelectric stack 313 is working), and the second piezoelectric stack 312 and the third piezoelectric stack 313 can also move in conjunction (for example, the second piezoelectric stack 312 and the third piezoelectric stack 313 work simultaneously).

[0075] In some embodiments, see Figure 6 As shown, several piezoelectric drive mechanism arrays 3 are located around the magnet array 42. For example, there are four piezoelectric drive mechanism arrays 3, located at the four corners of the magnet array 42. Alternatively, there are three piezoelectric drive mechanism arrays 3, arranged along the edge of the moving sub-unit 2. In some applications, the piezoelectric drive mechanism arrays 3 surrounding the magnet array 42 can effectively support the weight of the moving sub-unit 2 and the loads on it.

[0076] In one or more embodiments of this specification, see Figures 2 to 4 as well as Figure 6As shown, the conductor array 41 includes a plurality of first conductor groups 411 and a plurality of second conductor groups 412. The extending directions of the first conductor groups 411 and the extending directions of the second conductor groups 412 intersect. In some embodiments, the first conductor groups 411 can cooperate with the magnet array 42 to drive the actuator 2 to move relative to the stator 1 along one of the X-axis and Y-axis directions. The second conductor groups 412 can cooperate with the magnet array 42 to drive the actuator 2 to move relative to the stator 1 along the other of the X-axis and Y-axis directions.

[0077] For example, see Figure 4 As shown, the first conductor group 411 may include multiple coils arranged in the same plane (e.g., a plane parallel to the XY plane), some coils may be wound around an axis parallel to the Z-axis direction, some coils may be elongated, and some coils may extend in the X-axis direction.

[0078] For example, see Figure 4 As shown, the second conductor group 412 may include multiple coils arranged in the same plane (e.g., a plane parallel to the XY plane), some coils may be wound around an axis parallel to the Z-axis, some coils may be elongated, and some coils may extend in the Y-axis direction.

[0079] For example, see Figure 4 As shown, the magnet array 42 may include a plurality of magnet groups 421, and each magnet group 421 may include a plurality of parallel-arranged bar magnets. For example, see [link to example]. Figure 3 , Figure 4 As shown, a plurality of magnet groups 421 can be arranged in the same plane (e.g., a plane parallel to the XY plane, or, for example, arranged on the lower surface of the moving element 2), and the plurality of magnet groups 421 can be arranged in a centrally symmetrical manner with respect to the center of the moving element 2. In some embodiments, see Figure 4 As shown, the number of magnet groups 421 can be four, and the four magnet groups 421 are arranged symmetrically with respect to the center of the moving subunit 2. In some embodiments, the number of magnet groups 421 can also be three, and the three magnet groups 421 are arranged symmetrically with respect to the center of the moving subunit 2. In other embodiments, the number of magnet groups 421 can also be greater than four.

[0080] In some embodiments, a plurality of first conductor groups 411 are arranged in a mirror-symmetric manner with respect to a vertical plane of the stator unit 1 toward the mover unit 2, and a plurality of second conductor groups 412 are arranged in a mirror-symmetric manner with respect to the vertical plane.

[0081] For example, see Figure 3 , Figure 4As shown, the direction toward the moving sub-unit 2 can be the Z-axis direction, and a perpendicular plane toward the moving sub-unit 2 can be a perpendicular plane in the Z-axis direction, that is, a plane parallel to the XY plane. Multiple first conductor groups 411 are arranged in a mirror-symmetric manner with respect to this plane, and multiple second conductor groups 412 are also arranged in a mirror-symmetric manner with respect to this plane to form a dual-plane orthogonal coil array.

[0082] For example, see Figure 3 , Figure 4 As shown, there can be two first conductor groups 411 and two second conductor groups 412. The two second conductor groups 412 are located between the two first conductor groups 411, that is, arranged sequentially from bottom to top along the Z-axis in the order of first conductor group 411, second conductor group 412, second conductor group 412, and first conductor group 411.

[0083] For example, the number of first conductor groups 411 can be four, and the number of second conductor groups 412 can also be four, arranged sequentially from bottom to top along the Z-axis in the order of first conductor group 411, second conductor group 412, first conductor group 411, second conductor group 412, second conductor group 412, first conductor group 411, second conductor group 412, and first conductor group 411 again. Similarly, the number of first conductor groups 411 and second conductor groups 412 can be set to more.

[0084] For example, the number of first conductor groups 411 may be equal to the number of second conductor groups 412. For example, the first conductor groups 411 and the second conductor groups 412 may be arranged alternately.

[0085] In other embodiments, the first conductor group 411 and the second conductor group 412 may also be arranged sequentially from bottom to top along the Z-axis in the order of second conductor group 412, first conductor group 411, first conductor group 411, and second conductor group 412.

[0086] In other embodiments, the first conductor group 411 and the second conductor group 412 may also be arranged sequentially from bottom to top along the Z-axis in the order of first conductor group 411, first conductor group 411, second conductor group 412, second conductor group 412, second conductor group 412, second conductor group 412, first conductor group 411, first conductor group 411.

[0087] The symmetrical arrangement of the upper and lower coils allows the magnetic fields generated by the two first conductor groups 411 (or the magnetic fields generated by the two second conductor groups 412) to be superimposed at their corresponding symmetrical planes, effectively compensating for the inherent edge field distortion of a single-layer coil and significantly improving the magnetic field uniformity in the central region.

[0088] In one or more embodiments of this specification, see Figure 2 As shown, the stator unit 1 includes: a stator base 11 and a cover plate 12 disposed on the stator base 11, a first accommodating space is formed between the stator base 11 and the cover plate 12, and a conductor array 41 is disposed inside the first accommodating space.

[0089] In some embodiments, see Figure 3 As shown, the moving unit 2 includes a second accommodating space formed on the lower surface of the moving unit 2, and a magnet array 42 disposed within the second accommodating space. In some embodiments, the second accommodating space may be a slot structure with an open lower end. In other embodiments, the second accommodating space may also have a cover plate.

[0090] In some embodiments, see Figure 3 As shown, the moving unit 2 further includes a third accommodating space formed on the lower surface of the moving unit 2, and a piezoelectric drive mechanism 31 disposed within the third accommodating space. The lower surface of the piezoelectric drive mechanism 31 protrudes beyond the lower surface of the moving unit 2 and also protrudes beyond the lower surface of the magnet array 42. In some embodiments, the third accommodating space surrounds the second accommodating space.

[0091] In one or more embodiments of this specification, the displacement stage further includes a power-harvesting unit, which includes a stator conductive member connected to the stator unit 1, a mover conductive member connected to the mover unit 2, and a power-harvesting mechanism. In some embodiments, the mover conductive member is configured to connect with the stator conductive member to achieve an electrical connection and / or communication connection between the mover unit 2 and the stator unit 1. In some applications, the electrical connection between the mover unit 2 and the stator unit 1 enables power supply to the piezoelectric drive module on the mover unit 2.

[0092] In some embodiments, the power-taking mechanism is configured to mechanically connect the stator unit 1 and the stator conductive member, and to enable the moving conductor member and the stator conductive member to be electrically connected and / or signal connected. In some embodiments, the power-taking mechanism is configured such that, while the moving conductor member maintains an electrical connection and / or signal connection with the stator conductive member, the moving unit 2 can move relative to the stator unit 1 along a first direction A and / or a second direction B. In some embodiments, the power-taking mechanism is configured such that, while the moving conductor member maintains an electrical connection and / or signal connection with the stator conductive member, the power-taking mechanism enables the moving unit 2 to be decoupled relative to the stator unit 1 in the first direction A and / or the second direction B. Wherein, the first direction A intersects the second direction B, and the first direction A and the second direction B are parallel to the surface of the stator unit 1. In some embodiments, the power-taking mechanism is configured to be flexible in the first direction A and flexible in the second direction B. In some embodiments, the first direction A can be one of the X-axis direction and the Y-axis direction, and the second direction B can be the other of the X-axis direction and the Y-axis direction.

[0093] It should be noted that the reference Figure 11 As shown in the diagram, for ease of illustration, the displacement stage can adopt an XYZ reference system, which has an X-axis direction, a Y-axis direction, and a Z-axis direction; the power extraction unit can adopt an ABZ reference system, which has a first direction A, a second direction B, and a third direction Z (or Z-axis direction). The Z-axis direction of the XYZ reference system is the same as that of the ABZ reference system. However, based on the orientation of the power extraction unit, the first direction A of the ABZ reference system can be parallel to the X-axis direction, perpendicular to the X-axis direction, or have an angle with the X-axis direction. The second direction B of the ABZ reference system is similarly determined.

[0094] In some embodiments, the moving unit 2 may be rectangular, and there may be multiple power-collecting units. The moving conductive members of the multiple power-collecting units are disposed at the edges or corners of the moving unit 2, and the positions of the stator conductive members of the multiple power-collecting units correspond to the positions of the moving conductive members. For example, there may be four power-collecting units, with the moving conductive members of the four power-collecting units disposed on the four sides of the moving unit 2, and the stator conductive members of the four power-collecting units disposed at the corresponding positions of the moving conductive members.

[0095] In some embodiments, the power-taking mechanism is configured to be flexible in both the first direction A and the second direction B (i.e., the power-taking mechanism is flexible in both the X-axis and Y-axis directions). When the stator conductive member and the mover conductive member are connected, the piezoelectric drive module is powered on and can drive the mover unit 2 to move relative to the stator unit 1 within the range of flexibility provided by the power-taking mechanism.

[0096] In one or more embodiments of this specification, see Figures 11 to 18 As shown, the power extraction unit can be a first power extraction unit 5, the stator conductive component includes a first stator lead plate 51, the mover conductive component includes a first mover lead plate 52, and the power extraction mechanism includes a clamping mechanism 53.

[0097] In some embodiments, one of the first mover lead plate 52 and the first stator lead plate 51 is provided with one or more positioning holes 521, and the other of the first mover lead plate 52 and the first stator lead plate 51 is provided with one or more positioning posts 511, wherein the positioning holes 521 mate with the positioning posts 511. For example, see [link to example]. Figure 14 As shown, the first stator lead plate 51 is provided with two positioning posts 511, and the first mover lead plate 52 is provided with two positioning holes 521. The two positioning posts 511 can be placed inside the two positioning holes 521 respectively, so as to realize the positioning and connection of the first stator lead plate 51 and the first mover lead plate 52.

[0098] In some embodiments, the first stator lead plate 51 has a first stator lead contact, and the first mover lead plate 52 has a first mover lead contact. The first stator lead contact and the first mover lead contact mate to achieve electrical and / or signal connection between the first stator lead plate 51 and the first mover lead plate 52. Exemplarily, the first mover lead contact is configured to abut against the first stator lead contact. Positioning posts 511 and positioning holes 521 facilitate alignment of the first stator lead contact with the first mover lead contact.

[0099] In some embodiments, the clamping mechanism 53 includes: a first plate-shaped structure 531 connected to the stator unit 1, a second plate-shaped structure 532 located above the first plate-shaped structure 531, and a third plate-shaped structure 533 located between the first plate-shaped structure 531 and the second plate-shaped structure 532. In some embodiments, the first plate-shaped structure 531 can serve as the base of the clamping mechanism 53 so that the clamping mechanism 53 can be integrally fixed to the stator unit 1. In some embodiments, the second plate-shaped structure 532 is flexibly connected to the first plate-shaped structure 531, the third plate-shaped structure 533 is flexibly connected to the second plate-shaped structure 532, and the first stator lead plate 51 is disposed on the third plate-shaped structure 533. In some embodiments, the second plate-shaped structure 532 is configured to carry other structures connected thereto (such as the third plate-shaped structure 533, etc.) closer to or further away from the first plate-shaped structure 531.

[0100] In some embodiments, the clamping mechanism 53 includes a first-direction flexible module 534 and a second-direction flexible module 535. In some embodiments, the first-direction flexible module 534 connects the second plate-like structure 532 and the first plate-like structure 531, and is configured to be flexible in a first direction A and capable of driving the second plate-like structure 532 toward or away from the first plate-like structure 531. For example, the first-direction flexible module 534 being flexible in the first direction A may include allowing the second plate-like structure 532 to move relative to the first plate-like structure 531 along the first direction A. In some embodiments, the second-direction flexible module 535 connects the third plate-like structure 533 and the second plate-like structure 532, and is configured to be flexible in a second direction B intersecting the first direction A. For example, the flexibility of the second-direction flexible module 535 in the second direction B may include: the second-direction flexible module 535 allowing the third plate structure 533 to move relative to the second plate structure 532 along the second direction B.

[0101] Since the second plate structure 532 can move relative to the first plate structure 531 along the first direction A, and the third plate structure 533 can move relative to the second plate structure 532 along the second direction B, the third plate structure 533 can move relative to the first plate structure 531 along the first direction A and / or the second direction B. That is, the first stator lead plate 51 located on the third plate structure 533 can move relative to the first plate structure 531 along the first direction A and / or the second direction B, thereby realizing the flexible connection between the stator conductive component (first stator lead plate 51) and the stator unit 1.

[0102] In one or more embodiments of this specification, the clamping mechanism 53 further includes a pressure plate 530. The clamping mechanism 53 is configured such that the pressure plate 530 can approach or move away from the first stator lead plate 51, so that the first mover lead plate 52 is clamped between the first stator lead plate 51 and the pressure plate 530, or the first mover lead plate 52 is disengaged from the first stator lead plate 51 and the pressure plate 530.

[0103] In some embodiments, the pressure plate 530 is flexibly connected to the second plate-like structure 532, and the pressure plate 530 is located between the second plate-like structure 532 and the third plate-like structure 533. In some embodiments, the clamping mechanism 53 includes a pressure plate flexible module 536 connecting the pressure plate 530 and the second plate-like structure 532, the pressure plate flexible module 536 being configured to drive a portion of the pressure plate 530 toward or away from the third plate-like structure 533.

[0104] In some embodiments, the pressure plate 530 has a first end and a second end, and is configured such that its central portion has a fulcrum, and the first and second ends of the pressure plate 530 are rotatable about the fulcrum. The pressure plate 530 can rotate about the fulcrum to bring the first moving lead plate 52 into contact with the first stator lead plate 51, thereby achieving electrical and / or signal connection between the two. In some embodiments, the pressure plate flexible module 536 is configured to drive the first end of the pressure plate 530 to rotate about the fulcrum, thereby allowing the second end of the pressure plate 530 to abut against the first moving lead plate 52 located on the first stator lead plate 51, thereby achieving electrical and / or signal connection between the first stator lead plate 51 and the first moving lead plate 52.

[0105] For example, see Figure 18 As shown, the flexible module 536 drives the first end (e.g., the left end) of the pressure plate 530 to move toward the second plate-like structure 532, causing the middle part of the pressure plate 530 to rotate around the fulcrum, thereby causing the second end (e.g., the right end) of the pressure plate 530 to abut against the first moving lead plate 52, thus completing the clamping action. See, for an example... Figure 18 As shown, the flexible module 536 drives the first end (e.g., the left end) of the pressure plate 530 to move toward the third plate structure 533 (or away from the second plate structure 532), causing the middle part of the pressure plate 530 to rotate around the fulcrum, thereby causing the second end (e.g., the right end) of the pressure plate 530 to disengage from the first moving lead plate 52, thus completing the release action.

[0106] In some applications, when the moving unit 2 is stationary relative to the stator unit 1 and the first stator lead plate 51 and the first moving lead plate 52 are in operation, the clamping mechanism 53 maintains its clamping action to keep the first stator lead plate 51 and the first moving lead plate 52 engaged, facilitating the supply of power and / or signals to the moving unit 2. In this case, the moving unit 2 can further fine-tune its position relative to the stator unit 1 (e.g., fine-tuning can be achieved through a piezoelectric drive module). In other applications, when the first stator lead plate 51 and the first moving lead plate 52 are not in operation, the clamping mechanism 53 performs a release action, allowing the first moving lead plate 52 to disengage from the first stator lead plate 51, facilitating large-stroke movement of the moving unit 2 relative to the stator unit 1 (e.g., large-stroke movement can be achieved through an electromagnetic drive module).

[0107] In some embodiments, the flexible pressure plate module 536 can cause displacement of the first end of the pressure plate 530, so that the first end of the pressure plate 530 moves closer to or further away from the second plate-like structure 532. In some embodiments, the first end of the pressure plate 530 can be displaced in a direction perpendicular to the second plate-like structure 532. In other embodiments, the first end of the pressure plate 530 can be displaced in a direction inclined relative to the second plate-like structure 532.

[0108] In some embodiments, the flexible pressure plate module 536 may include a linear actuator, such as a ball screw driver, a linear motor, a piezoelectric linear driver, an electric actuator, etc. In some embodiments, the flexible pressure plate module 536 may also include a bending actuator, such as a piezoelectric bending actuator, etc.

[0109] In some embodiments, the clamping mechanism 53 further includes a top block 537 disposed on the third plate-like structure 533, the middle portion of the pressure plate 530 abutting against the top block 537, the top block 537 providing the aforementioned fulcrum, and the pressure plate 530 configured to rotate about the top block 537. In some embodiments, the pressure plate flexible module 536 is configured to drive a portion of the pressure plate 530 located on one side of the top block 537 toward or away from the third plate-like structure 533, so that a portion of the pressure plate 530 located on the other side of the top block 537 moves away from or toward the first stator lead plate 51. In some embodiments, the top block 537 may be rectangular. In some embodiments, the upper surface of the top block 537 may be planar. For example, the height of the upper surface of the top block 537 may be configured to be flush with the height of the upper surface of the first mover lead plate 52.

[0110] In some embodiments, the distance from the fulcrum to the first end of the pressure plate 530 is greater than the distance from the fulcrum to the second end of the pressure plate 530. For example, the distance from the top block 537 to the first end of the pressure plate 530 is greater than the distance from the top block 537 to the second end of the pressure plate 530. In some embodiments, the pressure plate 530 performs a lever motion around the fulcrum. In some embodiments, the position of the fulcrum can amplify the travel of the second end of the pressure plate 530. Because the fulcrum is close to the first end of the pressure plate 530, the pressure plate flexible module 536 only needs to provide a small displacement at the first end of the pressure plate 530 to provide a large displacement at the second end of the pressure plate 530.

[0111] In some embodiments, the pressure plate flexible module 536 may include: a pressure plate flexible spring 5361 connecting the second plate-like structure 532 and the pressure plate 530, and a pressure plate piezoelectric diaphragm 5362 attached to the pressure plate flexible spring 5361. The pressure plate piezoelectric diaphragm 5362 is configured to adjust its curvature. The pressure plate flexible spring 5361 is arc-shaped and configured to provide elastic restoring force based on the electrically bent pressure plate piezoelectric diaphragm 5362.

[0112] For example, see Figure 18 As shown, when the piezoelectric diaphragm 5362 of the pressure plate is energized, the curvature of the piezoelectric diaphragm 5362 increases, thereby increasing the curvature of the flexible spring 5361 of the pressure plate. This causes the lower end of the flexible spring 5361 to move toward the second plate-like structure 532, driving the first end of the pressure plate 530 to move toward the second plate-like structure 532, so that the second end of the pressure plate 530 abuts against the first moving lead plate 52, completing the clamping action. See, for an example... Figure 18 As shown, when the pressure plate piezoelectric diaphragm 5362 is de-energized, the pressure plate piezoelectric diaphragm 5362 is in a free state. Based on the elastic restoring force provided by the pressure plate flexible spring 5361, the lower end of the pressure plate flexible spring 5361 moves toward the third plate structure 533 (or moves away from the second plate structure 532), thereby driving the first end of the pressure plate 530 to move toward the third plate structure 533 (or moves away from the second plate structure 532), thereby causing the second end of the pressure plate 530 to disengage from the first moving lead plate 52, completing the release action.

[0113] In some embodiments, see Figure 13 , Figure 15 , Figure 16 As shown, the number of pressure plate flexible modules 536 can be two or more, and each pressure plate flexible module 536 includes the aforementioned pressure plate flexible spring 5361 and pressure plate piezoelectric diaphragm 5362. The plurality of pressure plate flexible modules 536 can drive a wider pressure plate 530, so that both sides of the pressure plate 530 (e.g., Figure 18 The front and rear sides of the pressure plate 530 move synchronously to prevent the pressure plate 530 from pitching in non-movement directions. In some embodiments, the number of top blocks 537 may also be two, corresponding to the number of pressure plate flexible modules 536.

[0114] In some embodiments, the piezoelectric diaphragm 5362 of the pressure plate is fixedly connected to the flexible spring 5361 of the pressure plate. See also [other embodiments]. Figure 18 As shown, the piezoelectric diaphragm 5362 of the pressure plate can be attached to the outer side of the flexible spring sheet 5361 of the pressure plate, that is, to the convex arc surface of the flexible spring sheet 5361 of the pressure plate. In some other embodiments, the piezoelectric diaphragm 5362 of the pressure plate can be attached to the inner side of the flexible spring sheet 5361 of the pressure plate, that is, to the concave arc surface of the flexible spring sheet 5361 of the pressure plate.

[0115] In some embodiments, see Figure 16As shown, the pressure plate 530 may have a pressure plate extension 5301, and a pressure plate flexible spring 5361 is connected to the pressure plate extension 5301 of the pressure plate 530. In some embodiments, the pressure plate extension 5301 of the pressure plate 530 may rotate about a fulcrum. Exemplarily, the pressure plate extension 5301 of the pressure plate 530 may abut against a top block 537. In some embodiments, the pressure plate 530 may have two pressure plate extensions 5301, and the two pressure plate extensions 5301 may abut against two top blocks 537 respectively. In some embodiments, the pressure plate 530 may be C-shaped overall.

[0116] In some embodiments, the pressure plate extension 5301 of the pressure plate 530 forms the first end described above.

[0117] In some embodiments, see Figure 18 As shown, the second end of the pressure plate 530 has a bent portion 5302. For example, the second end of the pressure plate 530 is bent upward to form the bent portion 5302. The bent portion 5302 forms a convex arc surface or a convex bend surface on the lower surface of the pressure plate 530, so that the lower surface of the pressure plate 530 can abut against the upper surface of the first mover lead plate 52 even when it is not parallel to the first mover lead plate 52.

[0118] In one or more embodiments of this specification, the first-direction flexible module 534 includes: a first-direction flexible spring 5341 connecting a first plate-like structure 531 and a second plate-like structure 532, and a first-direction piezoelectric diaphragm 5342 attached to the first-direction flexible spring 5341. The first-direction piezoelectric diaphragm 5342 is configured to adjust its curvature. The first-direction flexible spring 5341 is arc-shaped and configured to provide elastic restoring force based on the electrically bent first-direction piezoelectric diaphragm 5342.

[0119] In some embodiments, in addition to providing flexibility, the first-direction flexible module 534 can further drive the second plate-like structure 532 to move relative to the first plate-like structure 531, for example, driving the second plate-like structure 532 to move closer to or further away from the first plate-like structure 531. In some embodiments, in addition to providing flexibility, the first-direction flexible module 534 can also drive the second plate-like structure 532 to move along the Z-axis direction based on the first plate-like structure 531.

[0120] For example, see Figure 17As shown, when the first-direction piezoelectric diaphragm 5342 is energized, the curvature of the first-direction piezoelectric diaphragm 5342 increases, thereby increasing the curvature of the first-direction flexible spring 5341. This causes the upper end of the first-direction flexible spring 5341 to move towards the first plate-like structure 531, driving the second plate-like structure 532 and the components attached to the second plate-like structure 532 to move towards the first plate-like structure 531. Consequently, the third plate-like structure 533, the pressure plate 530, the pressure plate flexible module 536, and the second plate-like structure 532 as a whole descend relative to the first plate-like structure 531. See, for an example... Figure 17 As shown, when the first direction piezoelectric diaphragm 5342 is de-energized, the first direction piezoelectric diaphragm 5342 is in a free state. Based on the elastic restoring force provided by the first direction flexible spring 5341, the upper end of the first direction flexible spring 5341 moves away from the first plate structure 531, thereby driving the second plate structure 532 and the components attached to the second plate structure 532 to move away from the first plate structure 531, so that the third plate structure 533, the pressure plate 530, the pressure plate flexible module 536 and the second plate structure 532 as a whole rise relative to the first plate structure 531.

[0121] In some embodiments, see Figure 15 , Figure 16 , combined Figure 17 As shown, the number of first-direction flexible modules 534 can be two or more, and each first-direction flexible module 534 includes the aforementioned first-direction flexible spring 5341 and first-direction piezoelectric diaphragm 5342. For example, the number of first-direction flexible modules 534 can be two, with the two first-direction flexible modules 534 located at both ends of the first plate-like structure 531. The plurality of first-direction flexible modules 534 can drive the second plate-like structure 532 to move synchronously as a whole, keeping the second plate-like structure 532 parallel to the first plate-like structure 531 and preventing the second plate-like structure 532 from pitching during movement.

[0122] In some embodiments, the first-direction piezoelectric diaphragm 5342 is fixedly connected to the first-direction flexible spring 5341. In some embodiments, the first-direction piezoelectric diaphragm 5342 may be attached to the outer side of the first-direction flexible spring 5341, i.e., at the convex arc surface of the first-direction flexible spring 5341. In other embodiments, see [reference needed]. Figure 17 As shown, the first-direction piezoelectric film 5342 can be attached to the inner side of the first-direction flexible spring 5341, that is, the concave arc surface of the first-direction flexible spring 5341.

[0123] In some embodiments, the first-direction flexible spring 5341 is flexible in the Z-axis direction, and the first-direction flexible spring 5341 is capable of... Figure 17It can be stretched or compressed in the vertical direction. For example, the upper and lower ends of the first-direction flexible spring 5341 can be extended or compressed in the vertical direction. Figure 17 In the vertical direction, they are either close to or far apart from each other.

[0124] In some embodiments, the first-direction flexible spring 5341 is flexible in the first direction A, and is configured to deform in the first direction A to allow the second plate-like structure 532 to move relative to the first plate-like structure 531 along the first direction A. Exemplarily, the upper and lower ends of the first-direction flexible spring 5341 are capable of... Figure 17 The two plate structures 532 move closer or further apart in the left-right direction to allow the second plate structure 532 to move relative to the first plate structure 531. Figure 17 Displace to the left or right.

[0125] In one or more embodiments of this specification, the second-direction flexible module 535 includes a second-direction flexible spring 5351 connecting the second plate structure 532 and the third plate structure 533.

[0126] In some embodiments, the second-direction flexible spring 5351 is flexible in the Z-axis direction, and the second-direction flexible spring 5351 is capable of... Figure 18 It can be stretched or compressed in the vertical direction. For example, the upper and lower ends of the second-direction flexible spring 5351 can... Figure 18 In the vertical direction, they are either close to or far apart from each other.

[0127] In some embodiments, the second-direction flexible spring 5351 is flexible in the second direction B. The second direction B may intersect with the first direction A. The second direction B may also be perpendicular to the first direction A; for example, the second direction B can be... Figure 17 The front and back directions (also known as) Figure 18 (in the left and right directions). The second-direction flexible spring 5351 can deform in the second direction B to allow the third plate-like structure 533 to move relative to the second plate-like structure 532 along the second direction. For example, the upper and lower ends of the second-direction flexible spring 5351 can be deformed in the second direction B to allow the third plate-like structure 533 to move relative to the second plate-like structure 532 along the second direction. Figure 18 The third plate structure 533 moves closer to or further away from the second plate structure 532 in the left-right direction to allow the third plate structure 533 to move relative to the second plate structure 532. Figure 18 Displace to the left or right.

[0128] In one or more embodiments of this specification, see Figure 19As shown, the power-taking unit can be a second power-taking unit 6, the stator conductive component includes a power-taking ball head 61, and the mover conductive component includes a second mover lead plate 62. In some embodiments, the second mover lead plate 62 has a second mover lead contact, which is configured to abut against the power-taking ball head 61 to achieve electrical connection and / or signal connection between the power-taking ball head 61 and the second mover lead plate 62.

[0129] In some embodiments, the power-taking mechanism includes: a power-taking bracket 611 disposed on the stator unit 1, and a power-taking elastic member 612 disposed on the power-taking bracket 611. In some embodiments, the power-taking ball head 61 is disposed on the power-taking elastic member 612. In some embodiments, the power-taking elastic member 612 can be a spring, such as a metal spring. Within a certain range, the power-taking ball head 61 can decouple the motion of the moving unit 2 relative to the stator unit 1 in various directions (including a first direction parallel to the X-axis and a second direction parallel to the Y-axis), and in conjunction with the power-taking elastic member 612, can maintain a certain preload between the power-taking ball head 61 and the second moving lead plate 62.

[0130] In one or more embodiments of this specification, see Figure 20 As shown, a conveying device is provided, which includes one or more of the above-mentioned displacement stages. The conveying device includes a conveying path 7, which includes a plurality of interconnected stator units 1, and one or more moving sub-units 2 capable of moving along the conveying path 7.

[0131] In one or more embodiments of this specification, see Figure 21 As shown, a conveying device is provided, which includes one or more of the above-described displacement stages. The conveying device includes a functional station 8, which includes a stator unit 1 and a one-dimensional motion device 81 for driving the stator unit 1 (e.g., ...). Figure 24 (as shown) or multi-dimensional motion device 82 (such as) Figure 22 , Figure 23 (As shown). In some embodiments, the moving subunit 2 is capable of moving on the stator unit 1.

[0132] In one or more embodiments of this specification, see Figure 21 As shown, a conveying device is provided, which includes one or more of the above-mentioned displacement stages, wherein the conveying device includes a conveying path 7 and a functional station 8, the functional station 8 being arranged adjacent to the conveying path 7.

[0133] In some embodiments, the transmission path 7 includes a plurality of interconnected stator units 1, and one or more moving units 2 are capable of moving on the stator units 1 of the transmission path 7. In some applications, the moving units 2 move on the transmission path 7 based on an electromagnetic drive module to achieve long-distance transmission with large stroke, high speed, and high acceleration on the transmission path 7.

[0134] In some embodiments, the functional station 8 includes a stator unit 1 and a one-dimensional motion device 81 or a multi-dimensional motion device 82 for driving the stator unit 1. In some embodiments, the stator unit 1 of the functional station 8 is configured to move to a junction position adjacent to the stator unit 1 of the conveying path 7. In some usage scenarios, the moving unit 2 moves to a position adjacent to the junction position via the conveying path 7, and further moves to the stator unit 1 of the functional station 8 (e.g., moving to the stator unit 1 of the functional station 8 based on an electromagnetic drive module), and the position of the moving unit 2 is adjusted and stably positioned with high precision based on the piezoelectric drive module on the stator unit 1 of the functional station 8.

[0135] In some embodiments, the moving unit 2 has a moving conductive member, and the stator unit 1 of the functional station 8 has a stator conductive member that matches the moving conductive member and a clamping mechanism 53 for clamping the moving conductive member based on the stator conductive member.

[0136] In some embodiments, the stator unit 1 of the transmission path 7 may not have a stator conductive component and a clamping mechanism 53.

[0137] In one or more embodiments of this specification, the stator unit 1 of the transmission path 7 and the stator unit 1 and moving unit 2 of the functional station 8 can be remotely transmitted via electromagnetic drive modules, and direct handover between the transmission path 7 and the functional station 8 can be achieved without relying on manual labor or a handover robot. Furthermore, the stator unit 1 and moving unit 2 of the functional station 8 can be further positioned with high precision and high stability via piezoelectric drive modules. The clamping mechanism 53 provided in one or more embodiments of this specification can achieve electrical and / or signal connection between the moving unit 2 and the stator unit 1 when the moving unit 2 moves to the stator unit 1 of the functional station 8.

[0138] It should be noted that the transmission device constructed using the displacement stage in this solution reduces the mechanical complexity of the transportation system and improves the efficiency of transportation handover compared to traditional robotic arms. Firstly, in general scenarios, when the electromagnetic drive module is working, only the conductor array in the stator unit on the current and next transmission path of the moving subunit needs to be energized during transportation; when the piezoelectric drive module is working, the conductor array in the electromagnetic drive module can be de-energized. This effectively avoids the common heat generation problem of electromagnetic drives and utilizes the piezoelectric drive module to achieve high-precision, high-stability, and non-magnetic positioning functions, suitable for high-end wafer manufacturing equipment, including in the electron beam field. Secondly, the power-taking unit enables the electrical / signal connection of the moving subunit, eliminating wiring concerns for the moving subunit, and the electrical / signal lines do not need to follow the movement of the moving subunit, further improving the adaptability to complex transmission paths.

[0139] The basic concepts have been described above. It is obvious that the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are taught in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A displacement stage, characterized in that, include: A stator unit, a moving part unit disposed above the stator unit, a piezoelectric drive module and an electromagnetic drive module capable of driving the moving part unit to move relative to the stator unit; The piezoelectric drive module includes: a piezoelectric drive mechanism connected to the moving part, the piezoelectric drive mechanism being configured to act on the upper surface of the stator unit; The electromagnetic drive module includes: a conductor array disposed on the stator unit and a magnet array disposed on the mover unit that matches the conductor array; The piezoelectric drive module and the electromagnetic drive module are configured to drive the same moving subunit to move relative to the stator unit independently, respectively; The electromagnetic drive module is configured to position the moving subunit in a first position or a second position. When the moving subunit is in the first position, at least a portion of the piezoelectric drive module abuts against the stator unit. When the moving subunit is in the second position, both the moving subunit and the piezoelectric drive module are suspended above the stator unit. The displacement stage further includes: a power-collecting unit, which includes a stator conductive component connected to the stator unit, a mover conductive component connected to the mover unit, and a power-collecting mechanism including a clamping mechanism; The clamping mechanism includes: a first plate-shaped structure connected to the stator unit, a second plate-shaped structure located above the first plate-shaped structure, a third plate-shaped structure located between the first plate-shaped structure and the second plate-shaped structure, a first-direction flexible module, and a second-direction flexible module. The first directional flexible module connects the second plate-shaped structure and the first plate-shaped structure. The first directional flexible module is configured to be flexible in the first direction and capable of driving the second plate-shaped structure to move closer to or away from the first plate-shaped structure. The second-direction flexible module connects the third plate structure and the second plate structure, and the second-direction flexible module is configured to be flexible in a second direction intersecting the first direction; The first direction and the second direction are parallel to the surface of the stator unit.

2. The displacement stage according to claim 1, characterized in that, The conductor array includes: a plurality of first conductor groups and a plurality of second conductor groups; The extension directions of the first conductor group and the extension directions of the second conductor group are intersecting. A plurality of the first conductor groups are arranged in a mirror-symmetric manner with respect to a vertical plane in the direction of the stator unit toward the mover unit, and a plurality of the second conductor groups are arranged in a mirror-symmetric manner with respect to the vertical plane.

3. The displacement stage according to claim 1, characterized in that, The piezoelectric drive module includes: a plurality of piezoelectric drive mechanism arrays connected to the moving subunit, each piezoelectric drive mechanism array including one or more of the piezoelectric drive mechanisms; Several of the piezoelectric drive mechanism arrays are located around the magnet array; Each of the piezoelectric drive mechanisms in the piezoelectric drive mechanism array is arranged in a one-dimensional linear array or a two-dimensional planar array.

4. The displacement stage according to claim 3, characterized in that, The stator unit includes: a stator base and a cover plate disposed on the stator base, a first accommodating space is formed between the stator base and the cover plate, and the conductor array is disposed inside the first accommodating space; The moving subunit includes: a second accommodating space formed on the lower surface of the moving subunit, and the magnet array disposed within the second accommodating space; The moving subunit also includes: a third accommodating space formed on the lower surface of the moving subunit, and the piezoelectric drive mechanism is disposed in the third accommodating space; The lower surface of the piezoelectric drive mechanism protrudes beyond the lower surface of the moving subunit, and the lower surface of the piezoelectric drive mechanism protrudes beyond the lower surface of the magnet array.

5. The displacement stage according to any one of claims 1 to 4, characterized in that, The displacement stage is configured to be in a first working state or a second working state; When the displacement stage is in the first working state, the piezoelectric drive mechanism acts on the upper surface of the stator unit; When the displacement stage is in the second working state, the moving subunit, carrying the piezoelectric drive mechanism and the magnet array, is suspended above the stator unit.

6. The displacement stage according to any one of claims 1 to 4, characterized in that, The power extraction mechanism is configured to mechanically connect the moving conductor and the stator conductor, and to enable the moving conductor and the stator conductor to be electrically connected and / or signal connected. The power extraction mechanism is configured such that, while the moving conductor maintains the electrical connection and / or signal connection with the stator conductor, the moving unit can move relative to the stator unit along a first direction and / or a second direction, the first direction intersecting the second direction.

7. The displacement stage according to claim 6, characterized in that, The stator conductive component includes a first stator lead plate, and the mover conductive component includes a first mover lead plate, wherein the first stator lead plate is disposed on the third plate-shaped structure.

8. The displacement stage according to claim 7, characterized in that, The clamping mechanism further includes a pressure plate, and the clamping mechanism is configured such that the pressure plate of the clamping mechanism can approach or move away from the first stator lead plate, so that the first mover lead plate is clamped between the first stator lead plate and the pressure plate, or so that the first mover lead plate is disengaged from the first stator lead plate and the pressure plate. The first mover lead plate has a first mover lead contact, the first stator lead plate has a first stator lead contact, and the first mover lead contact is configured to abut against the first stator lead contact.

9. The displacement stage according to claim 8, characterized in that, The pressure plate is flexibly connected to the second plate-shaped structure, and the pressure plate is located between the second plate-shaped structure and the third plate-shaped structure; The clamping mechanism includes a flexible pressure plate module connecting the pressure plate and the second plate-shaped structure, the flexible pressure plate module being configured to drive a portion of the pressure plate toward or away from the third plate-shaped structure.

10. The displacement stage according to claim 9, characterized in that, The clamping mechanism further includes a top block disposed on the third plate-shaped structure; The pressure plate is configured to rotate about the top block as a fulcrum; The pressure plate flexible module is configured to drive the portion of the pressure plate located on one side of the top block to move closer to or away from the third plate structure, so that the portion of the pressure plate located on the other side of the top block moves away from or closer to the first stator lead plate.

11. The displacement stage according to claim 1, characterized in that, The first-direction flexible module includes: a first-direction flexible spring and a first-direction piezoelectric film that is attached to the first-direction flexible spring; The second-direction flexible module includes: a second-direction flexible spring; The clamping mechanism includes a pressure plate flexible module, which includes a pressure plate flexible spring and a pressure plate piezoelectric film that is attached to the pressure plate flexible spring.

12. The displacement stage according to claim 7, characterized in that, One of the first mover lead plate and the first stator lead plate is provided with one or more positioning holes, and the other of the first mover lead plate and the first stator lead plate is provided with one or more positioning posts, wherein the positioning holes are matched with the positioning posts.

13. A conveying device, characterized in that, Includes one or more displacement stages as described in any one of claims 1 to 12; The conveying device includes a conveying path, which includes a plurality of interconnected stator units. One or more of the moving sub-units are capable of moving along the transport path.

14. A conveying device, characterized in that, Includes one or more displacement stages as described in any one of claims 1 to 12; The conveying device includes: a functional station, the functional station including the stator unit and a one-dimensional motion device or a multi-dimensional motion device for driving the stator unit to move; The moving subunit is capable of moving on the stator unit.

15. A conveying device, characterized in that, Includes one or more displacement stages as described in any one of claims 1 to 12; The conveying device includes a conveying path and functional workstations, with the functional workstations arranged adjacent to the conveying path. The transmission path includes a plurality of interconnected stator units, and one or more of the moving units are capable of moving on the stator units of the transmission path; The functional workstation includes a stator unit and a one-dimensional motion device or a multi-dimensional motion device for driving the stator unit to move. The stator unit of the functional workstation is configured to move to a handover position, which is adjacent to the stator unit of the conveying path. The moving part unit has a moving part conductive component, and the stator unit of the functional station has a stator conductive component that matches the moving part conductive component and a clamping mechanism for clamping the moving part conductive component based on the stator conductive component.

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