Substrate carrier, transport system, vacuum system, and method of operating substrate carrier

Abstract

The invention provides a substrate carrier, a conveying system, a vacuum system and an operation method of the substrate carrier, the substrate carrier comprises a bearing frame, substrate bearing surfaces, grooves and heat absorption sheets, the substrate bearing surfaces are used for placing substrates, the bottom side of each substrate bearing surface is provided with the grooves, the bottom surfaces of the grooves are provided with the heat absorption sheets, and the heat absorption sheets are arranged on the bottom surfaces of the grooves. The emissivity of the first surface, facing the substrate bearing surface, of the heat absorption sheet is larger than the emissivity of the bottom surface of the groove and / or the second surface of the heat absorption sheet, under the condition, the low-emissivity surface can restrain heat loss, and the high-emissivity surface can allow heat to efficiently pass through. Therefore, the first surface of the heat absorption sheet can absorb heat radiation of the substrate again and transmit the heat radiation to the second surface or the bottom surface of the groove, and a good heat dissipation effect is achieved. The technology is simple and low in cost, the coating speed does not need to be reduced, and the temperature rise problem of the substrate can be effectively solved while the treatment efficiency is not reduced.