Multi-section acoustic packaging structure of PMUT ultrasonic transducer and optimization method of multi-section acoustic packaging structure

By employing a multi-segment acoustic encapsulation structure, the front cavity segment, tapered transition segment, and conduit segment of the PMUT ultrasonic transducer are differentiated and optimized. Combined with a waterproof and acoustically permeable membrane, the acoustic problems of the PMUT ultrasonic transducer in air or gas medium environments are solved. This achieves synergistic optimization of high sound pressure, strong directivity, wide bandwidth, and large receiving angle, thereby improving signal quality and stability.

CN122294055APending Publication Date: 2026-06-26CHENGDU RUISHENG MICRO-SENSE TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202610386482.1
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-27
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

Existing PMUT ultrasonic transducers suffer from problems such as low sound pressure, unstable directionality, easy sound field dispersion, resonance tail, and easy adhesion of waterproof membranes in air or gas medium environments, making it difficult to simultaneously meet the requirements of high sound pressure and strong directionality at the transmitting end and wide bandwidth and large receiving angle at the receiving end.

Method used

A multi-segment acoustic encapsulation structure is adopted, including a base, a front cavity segment, a conical transition segment, and a conduit segment. Combined with a waterproof and acoustically permeable membrane, the geometric parameters and acoustic characteristics of each segment are optimized in a differentiated manner to construct at least three acoustic functional areas with different characteristics. Through joint simulation and iterative optimization, the performance of the transmitter and receiver is improved in a differentiated manner.

Benefits of technology

It significantly improves the transmitted sound pressure and directivity, expands the bandwidth and receiving angle of the receiver, enhances the adaptability and stability of signal reception, solves the performance bottleneck of traditional packaging structures, and improves the overall performance of PMUT ultrasonic transducers in gaseous media.

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Abstract

The invention belongs to the technical field of ultrasonic sensing and micro electro mechanical system packaging, and particularly relates to a multi-section acoustic packaging structure of a PMUT ultrasonic transducer and an optimization method thereof.The multi-section acoustic packaging structure of the PMUT ultrasonic transducer comprises a base, a PMUT chip and an acoustic cavity, and the acoustic cavity comprises a front cavity section, a conical transition section, a conduit section and a waterproof acoustic transmission film; a first minimum gap is formed between the radiation surface of the PMUT chip and the bottom surface of the front cavity section; a second minimum gap is formed between the waterproof sound transmission membrane and the outlet end of the conduit section; the acoustic cavity serves as a transmitting end or a receiving end, when the acoustic cavity serves as the transmitting end, the depth of the front cavity section is larger than the depth of the front cavity section of the acoustic cavity serving as the receiving end, and the inner diameter of the conduit section is smaller than the inner diameter of the conduit section of the acoustic cavity serving as the receiving end. The differential improvement of the performances of the transmitting end and the receiving end is realized, the transmitting sound pressure and directivity are improved, and the bandwidth and the receiving angle of the receiving end are expanded.
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