Infrared spectral polarization integration structure and imaging method of mimic mantis shrimp visual cell

Abstract

The application relates to the field of infrared detection technology and provides an infrared spectrum polarization integrated structure simulating mantis shrimp visual cells and an imaging method. The structure solves the technical problems of how to realize adjustable spectrum active selection and full Stokes vector polarization in a detection structure by in-situ superimposing a micro-nano polarizer serving as a polarization analysis layer and a dynamic filter serving as a spectrum analysis layer on an infrared focal plane detection chip, realizes on-chip synchronous acquisition of intensity, spectrum and polarization multidimensional information, simultaneously acquires contour information of an imaging target by using polarization information, avoids noise ranges by using spectrum information, improves a signal-to-background ratio by using both methods, and realizes high-definition imaging.

Description

Technical Field

[0001] This application relates to the field of infrared detection technology, and in particular to an infrared spectral polarization integrated structure and imaging method that mimics the visual cells of a mantis shrimp. Background Technology

[0002] Infrared detectors, acting as the "eagle eyes" of a detection system, possess unique advantages such as all-weather operation and strong anti-interference capabilities. Traditional detection methods rely on a single dimension of intensity information for target detection, which cannot provide clear detection and imaging of targets in interference scenarios such as water mist and smoke, thus failing to meet the requirements for high-quality imaging and recognition in complex environments.

[0003] Interdisciplinary bio-detection technologies are an effective way to improve detection and recognition rates. Developing infrared biomimetic spectral polarization imaging (SPI) detection technology can promote the advancement of traditional infrared detectors used for intensity information detection to a new generation of detection. This advanced imaging detection method is sparking a technological revolution in multiple fields such as agriculture, medicine, and space exploration. In industrial production and safety, it can be used for non-destructive testing of materials and investigation of safety hazards, helping to improve production efficiency and safety levels; it can also improve the resolution and accuracy of medical images, aiding in the early diagnosis and screening of cancer.

[0004] However, most current SPI detector structures employ a static filtering mode. This involves covering different regions (pixels or pixel groups) of the detector with static filters of varying filtering ranges and transmittances, ensuring that each region can only respond to spectral information in a specific band, thus encoding the spectral dimension. While this regional (focal plane) static filtering method can acquire spectral information, it leads to incident light energy loss (each region only allows specific bands to pass through) and a decrease in focal plane spatial resolution (different bands correspond to different pixels). Summary of the Invention

[0005] In view of this, embodiments of this application provide an infrared spectral polarization integrated structure and imaging method that mimics the visual cells of mantis shrimp, in order to solve the problem that infrared detectors in the prior art are difficult to achieve high-quality imaging and recognition in complex environments.

[0006] A first aspect of this application provides an infrared spectral polarization integrated structure that mimics the visual cells of a mantis shrimp, comprising:

[0007] This includes infrared focal plane array substrates, micro / nano polarizers, and dynamic filters;

[0008] Among them, the micro-nano polarizer and the dynamic filter are both integrated on top of the infrared focal plane substrate in a bracket manner;

[0009] The dynamic filter, micro-nano polarizer, and infrared focal plane substrate are arranged from top to bottom, and all three are parallel to each other.

[0010] A second aspect of this application provides an infrared spectral polarization imaging method for mantis shrimp-inspired visual cells. This method can be executed by the infrared spectral polarization integrated structure for mantis shrimp-inspired visual cells provided in the first aspect. The method includes:

[0011] An infrared focal plane chip in an infrared focal plane substrate is used to detect incident light to obtain a basic grayscale image.

[0012] Determine the target filtering parameters of the dynamic filter based on the imaging target, and configure the dynamic filter based on the target filtering parameters.

[0013] The incident light is filtered using the configured dynamic filter to obtain the target wavelength band;

[0014] Intensity images of the target band in four polarization directions (0°, 45°, 90°, and 135°) were obtained using micro / nano polarizers.

[0015] An infrared focal plane array chip is used to detect the intensity images in four polarization directions. Stokes vectors are calculated based on the detection results, and the polarization degree image and polarization angle image are determined by the Stokes vectors.

[0016] The base grayscale image, polarization degree image, and polarization angle image are fused together, and the imaging target is extracted from the fused image.

[0017] The beneficial effects of this application embodiment compared with the prior art are as follows: This application embodiment solves the problem of how to achieve tunable active spectral selection and full Stokes vector polarization technology in the detection structure by in-situ superimposing a micro-nano polarizer as a polarization resolution layer and a dynamic filter as a spectral resolution layer on the infrared focal plane detector chip. This enables simultaneous on-chip acquisition of multi-dimensional information such as intensity, spectrum, and polarization. Simultaneously, the contour information of the imaging target is obtained using polarization information, and the noise range is avoided using spectral information. This dual approach improves the signal-to-background ratio and achieves high-definition imaging. This structure promotes the development of next-generation infrared biomimetic detector chip technology. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of an infrared spectral polarization integrated structure for a mantis shrimp-like visual cell, provided in an embodiment of this application.

[0020] Figure 2 This is a cross-sectional view of the infrared spectral polarization integrated structure of the mantis shrimp visual cell provided in the embodiments of this application.

[0021] Figure 3 This is a schematic flowchart of an infrared spectral polarization imaging method for mimicking the visual cells of a mantis shrimp, provided in an embodiment of this application.

[0022] Figure 4 This is a flowchart illustrating the method for configuring a dynamic filter based on target filtering parameters provided in an embodiment of this application. Detailed Implementation

[0023] In the following description, specific details such as particular system architectures and techniques are set forth for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application may also be implemented in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, apparatuses, circuits, and methods have been omitted so as not to obscure the description of this application with unnecessary detail.

[0024] The following will describe in detail, with reference to the accompanying drawings, an infrared spectral polarization integrated structure and imaging method for mimicking the visual cells of a mantis shrimp according to an embodiment of this application.

[0025] As mentioned above, SPI detection technology has begun to be developed in related fields. For example, based on the infrared visual imaging mechanism of organisms such as mantis shrimp, a technology has been proposed to obtain spatial intensity, spectral and polarization information in the scene for multidimensional measurement.

[0026] Mantis shrimp possess an advanced visual system capable of achieving high polarization sensitivity and spectral imaging. Their spectral imaging is achieved by using a few types of opsins combined with a series of intracellular filters to generate up to 12 different spectral receptors. The key lies in a "tandem filtering" mechanism, the core principle of which is that the photoreceptor rods of photoreceptor cells (microretinal cells) are divided into two layers. Light first passes through the upper layer cells and its contained colored filtering pigments, where specific wavelengths are absorbed before reaching the lower layer cells. Polarization vision is achieved by relying on the orderly, parallel arrangement of opsin molecules on the microvilli membrane within the photoreceptor cells. Absorption efficiency is highest when the polarization direction of the incident light aligns with the direction of the microvilli. The characteristic of mantis shrimp visual cells exhibiting different sensitivities to different wavelengths and polarization directions in the spectrum provides innovative insights into novel detection architectures.

[0027] However, most current SPI detection structures use static filtering to fix the spectral band selection, which cannot actively tune the spectral range and results in limited detection accuracy. Furthermore, traditional detection structures use filters, polarizers, and other components to achieve multi-dimensional information acquisition, leading to large optical components and low integration.

[0028] In view of this, embodiments of this application provide an infrared spectral polarization integrated structure and imaging method that mimics the visual cells of a mantis shrimp. By in-situ superimposing a micro-nano polarizer as a polarization resolution layer and a dynamic filter as a spectral resolution layer on an infrared focal plane detector chip, the problem of how to achieve tunable active spectral selection and full Stokes vector polarization technology in the detector structure is solved. This enables the simultaneous acquisition of multi-dimensional information such as intensity, spectrum, and polarization on the chip. At the same time, the contour information of the imaging target is obtained by using polarization information, and the noise range is avoided by using spectral information. This dual approach improves the signal-to-background ratio and achieves high-definition imaging.

[0029] Figure 1 This is a schematic diagram of an infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp, provided in an embodiment of this application. Figure 1 As shown, the structure may include an infrared intensity detection layer, a pixel-level polarization Wiener structure layer, and a large-area dynamically tunable spectral resolution layer.

[0030] The infrared intensity detection layer may include an infrared focal plane substrate, the pixel-level polarization Wiener structure layer may include micro / nano polarizers, and the large-area dynamically tunable spectral resolution layer may include a dynamic filter.

[0031] Both the micro / nano polarizer and the dynamic filter are integrated on top of the infrared focal plane substrate using a support structure.

[0032] The dynamic filter, micro-nano polarizer, and infrared focal plane substrate are arranged from top to bottom, and all three are parallel to each other.

[0033] Figure 2 This is a cross-sectional view of the infrared spectral polarization integrated structure of the mantis shrimp-inspired visual cell provided in an embodiment of this application. (Reference) Figure 2 The green rectangles represent the support structures used to support the micro / nano polarizers and dynamic filters.

[0034] In some embodiments of this application, the infrared focal plane substrate may include an infrared focal plane chip. The infrared focal plane chip includes a readout circuit and N chip pixels. The readout circuit may include N indium pillar interconnect layers and a readout unit; N is a positive integer greater than 1. The N chip pixels are in… Figure 2 The N indium pillar interconnect layers are represented by red rectangles in the diagram. Figure 2 The readout unit is represented by an orange oval. Figure 2 The rectangle is represented by a light gray rectangle.

[0035] The infrared focal plane substrate can serve as the infrared intensity detection layer of the infrared spectral polarization integrated structure provided in the embodiments of this application.

[0036] The readout circuit can be mounted on the substrate, and the substrate is located on... Figure 2 It is represented by a black rectangle.

[0037] In this configuration, N indium pillar interconnect layers and N chip pixels are aligned vertically.

[0038] In some embodiments of this application, the micro / nano polarizer can be a metal polarizer, consisting of a period composed of four metal micro / nano structure gratings arranged in a rotating pattern at 0°, 45°, 90°, and 135°, each corresponding to one of the four pixels of the infrared focal plane chip, forming a set of basic Stokes polarization vectors. Here, 0°, 45°, 90°, and 135° refer to the rotation angles of the grating structure.

[0039] The micro / nano polarizer can include N sets of subwavelength micro / nano extinction structures. Each set of subwavelength grating micro / nano structures includes four polarization directions: 0°, 45°, 90°, and 135°, used to obtain the Stokes polarization vector. In other words, the Stokes polarization vector can be obtained using this subwavelength grating micro / nano structure containing four polarization directions. These N sets of subwavelength Wiener extinction structures are vertically aligned with N chip pixels. The N sets of subwavelength Wiener extinction structures... Figure 2 The rectangle in the center is represented by a yellow rectangle.

[0040] This micro / nano polarizer can serve as the polarization structure layer of the infrared spectral polarization integrated structure provided in the embodiments of this application.

[0041] In some embodiments of this application, the dynamic filter can employ a micro-electro-mechanical system (MEMS) cantilever beam structure based on the Fabry-Perot (FP) interference principle, hereinafter referred to as a MEMS-FP cantilever beam structure. This MEMS-FP cantilever beam structure can be driven by a static voltage method. By adjusting the driving voltage of the MEMS-FP cantilever beam, the FP spacing can be adjusted, thereby changing the transmission center wavelength of the dynamic filter and achieving dynamic spectral selection.

[0042] In some implementations, this MEMS-FP cantilever beam structure can dynamically tune the spectral transmission peaks in the 3-micron to 5-micron mid-wave infrared band. By applying different voltages to the filter, response images of different bands can be acquired sequentially between different frames, forming a spectral cube, thus achieving active selection and acquisition of spectral dimensions.

[0043] In some embodiments of this application, the effective filtering area of ​​the dynamic filter needs to cover all the pixels of the infrared focal plane array chip. (See reference...) Figure 2 The effective filtering area of ​​the dynamic filter is represented by the blue rectangle, which can cover all the chip pixels of the infrared focal plane chip, that is, the entire area where the red rectangle is located.

[0044] The dynamic filter can form a large-area spectrally tunable structure and serve as the dynamic spectral layer of the infrared spectral polarization integrated structure provided in the embodiments of this application.

[0045] In other words, this embodiment uses an infrared focal plane array chip as a substrate and employs a support structure to first integrate pixel-level micro / nano polarizers. Then, a secondary vertical integration is performed on this basis, integrating the dynamic filter in the same support structure. Micro / nano polarizers and dynamic filters are sequentially integrated in a direction perpendicular to the chip surface, forming a vertically integrated multidimensional information detection infrared structure consisting of a detector chip, polarization, and spectrum.

[0046] When integrating polarizers with the detector chip, the metasurface polarizers are arranged in a periodic configuration of four directions, with each group having polarization directions of 0°, 45°, 90°, and 135°, and the dimensions of each direction are consistent with the detector pixel size. Therefore, during integration, the size of the detector pixel grid must match the size of each grid of the polarizer, requiring high integration alignment accuracy.

[0047] When integrating the dynamic filter, it is necessary to ensure that the area of ​​the dynamic filter covers the detector chip, and it is also stacked using a bracket method. The dynamic filter is voltage driven, and electrode leads can be led out from the dynamic filter to the chip circuit PCB board.

[0048] In some implementations, the center-to-center distance between two adjacent pixels in the N chip pixels can be set to 30 micrometers, and the micro / nano structure size of the metal polarizer in each direction can be 30 micrometers. Alternatively, the diameter of the dynamic filter can be set to 6 millimeters or 7.5 millimeters.

[0049] For example, one implementation could be to set the pixel center distance to 30 micrometers, with the polarizer having four angles of 0°, 45°, 90°, and 135°, and the micro / nano structure size in each direction being 30 micrometers. The dynamic filter has a diameter of 6 millimeters.

[0050] Another implementation could be to set the pixel center distance to 30 micrometers, with the polarizer angled at 0°, 45°, 90°, and 135° in four directions, and the micro / nano structure size in each direction being 30 micrometers. The dynamic filter diameter is 7.5 millimeters.

[0051] According to the technical solution provided in this application, on the one hand, dynamic filtering is achieved using a tunable filter structure based on a cantilever beam, eliminating the need for a focal plane filtering method and enabling unified tuning of the response wavelengths of all pixels; on the other hand, a full Stokes polarization structure based on a metal micro-nano grating structure is adopted to achieve pixel-level integration of four polarization angles: 0°, 45°, 90°, and 135°, thereby improving target imaging accuracy. The dynamic filter and polarizer are integrated with the infrared focal plane chip in a three-dimensional stacked manner to form a spectral polarization integrated infrared detection structure, realizing the encoding and acquisition of spectral and polarization information of infrared incident light within the chip.

[0052] Figure 3 This is a schematic flowchart of an infrared spectral polarization imaging method for mimicking the visual cells of a mantis shrimp, provided in an embodiment of this application. Figure 3 As shown, the method includes the following steps:

[0053] In step S301, the incident light is detected using the infrared focal plane chip in the infrared focal plane substrate to obtain a basic grayscale image.

[0054] In step S302, the target filtering parameters of the dynamic filter are determined according to the imaging target, and the dynamic filter is configured according to the target filtering parameters.

[0055] In step S303, the incident light is filtered using the configured dynamic filter to obtain the target wavelength band.

[0056] In step S304, intensity images of the target band in four polarization directions (0°, 45°, 90°, and 135°) are obtained using micro-nano polarizers.

[0057] In step S305, an infrared focal plane array chip is used to detect the intensity images of the four polarization directions. Based on the detection results, the Stokes vector is calculated, and the polarization degree image and polarization angle image are determined by the Stokes vector.

[0058] In step S306, the base grayscale image, polarization degree image, and polarization angle image are fused, and the imaging target is extracted from the fused image.

[0059] In some embodiments of this application, the incident light can be detected first using an infrared focal plane chip in an infrared focal plane substrate to obtain a basic grayscale image. That is, instead of building the integrated structure provided in the embodiments of this application, a separate infrared focal plane chip can be used to detect the incident light and obtain a basic grayscale image.

[0060] Then, the integrated structure provided in this application embodiment is used for detection. At this point, the target filtering parameters of the dynamic filter can be determined based on the imaging target, and the dynamic filter can be configured according to these parameters. Then, the configured dynamic filter is used to filter the incident light to obtain the target wavelength band.

[0061] The dynamic filter employs a MEMS-FP cantilever beam structure based on the Fabry-Perot interferometry principle. The target filtering parameters include at least the adapted transmittance of the imaging target. This adapted transmittance can be the optimal transmittance of the imaging target, the transmittance when the imaging target differs significantly from the background, or the transmittance corresponding to other bands that enhance target noise suppression. Simultaneously, the target filtering parameters may also include the transmittance of the background where the imaging target is located.

[0062] Figure 4 This is a flowchart illustrating the method for configuring a dynamic filter based on target filtering parameters provided in an embodiment of this application. Figure 4 As shown, the method includes the following steps:

[0063] In step S401, the MEMS driving voltage is determined based on the target filtering parameters.

[0064] In step S402, the FP spacing of the dynamic filter is adjusted using a determined MEMS driving voltage so that the difference between the transmission center wavelength and the adaptive transmittance of the dynamic filter is less than a preset threshold.

[0065] In some embodiments of this application, the MEMS driving voltage can be determined first based on the target filtering parameters. Then, the FP spacing of the dynamic filter can be adjusted using the determined MEMS driving voltage to ensure that the difference between the transmission center wavelength and the adaptive transmittance of the dynamic filter is less than a preset threshold. That is, the transmission center wavelength and the adaptive transmittance of the configured dynamic filter are essentially the same.

[0066] In other words, to achieve adaptive detection of different targets, dynamic filters can be used to achieve dynamic spectral selection. For example, the driving voltage of the MEMS-FP can be dynamically adjusted according to the imaging characteristics of the target, thereby changing its transmission center wavelength. For instance, if the target has high reflectivity or high radiation characteristics in a certain band, and background noise (such as smoke or water mist) has low transmittance in a certain band, a spectral scanning mode can be executed to quickly acquire images of multiple bands, calculate the spectral contrast index, and automatically select the optimal band for focused imaging; real-time band switching can also be achieved to adapt to dynamically changing detection environments.

[0067] In other words, in complex environments such as water mist and smoke, the spectral transmission characteristics of different bands differ. Therefore, spectral information can be used to suppress noise. For example, image sequences of multiple bands can be acquired using MEMS dynamic filters to construct spectral response curves; the differences in spectral characteristics between the target and the background in different bands can be identified, such as: the target has strong radiation in a certain band, while the background is obscured by smoke in that band; the target and background have similar intensities in a certain band, but significant differences in another band; then, spectral difference or spectral ratio methods can be used to enhance target features, suppress background interference, and achieve high-definition imaging.

[0068] Using this method, the target filtering parameters of the dynamic filter can be determined, and the dynamic filter can be configured using these target filtering parameters so that the incident light retains only the optical signal of the target band after passing through the dynamic filter.

[0069] The filtered optical signal can be fed into a micro / nano polarizer, and after passing through the polarizer, intensity images of the target band in four polarization directions—0°, 45°, 90°, and 135°—are obtained. Then, an infrared focal plane array chip detects these intensity images in four polarization directions, calculates the Stokes vector based on the detection results, and uses the Stokes vector to determine the degree of polarization and polarization angle images.

[0070] The micro / nano polarizer can be a four-directional metal grating polarizer array, with each 2×2 pixel unit corresponding to four polarization directions: 0°, 45°, 90°, and 135°. The grating structure for each polarization direction only allows polarized light of that corresponding direction to pass through. The infrared focal plane chip receives the light signals from the four polarization directions and converts them into electrical signals. These electrical signals can be represented as intensity images (also called light intensity values) I0, I45, I90, and I135 in four directions. Based on this, the Stokes vectors can be calculated as S0 = I0 + I90, S1 = I0 - I90, and S2 = I45 - I135; where S0, S1, and S2 are Stokes vectors. Furthermore, the Stokes vectors can be used to determine the degree of polarization (DoP) and angle of polarization (AoP) images. These DoP and AoP images can be used for subsequent contour extraction and target enhancement of the imaging target.

[0071] When performing contour extraction, polarization information is highly sensitive to the edges, materials, and surface roughness of the target, especially showing significant differences between man-made targets and natural backgrounds. Therefore, the following method can be used to extract contours using polarization information: calculate DoP and AoP images from the intensity images of the four polarization directions; in the DoP image, man-made targets (such as metal, glass, and smooth surfaces) usually have a high degree of polarization, while natural backgrounds (such as vegetation and soil) have a low degree of polarization, forming a clear contrast; the AoP image can reflect the changes in the normal direction of the target surface, enhancing edge information; fusing the DoP and AoP images with the base grayscale image can significantly improve the contour extraction accuracy of the imaging target, especially in low-contrast or strong interference scenes.

[0072] This application addresses the technical problem of large optical component size and low integration density in the system optical path caused by traditional multi-dimensional information acquisition methods using filters and polarizers. By adopting a heterogeneous integration method on a chip, the size can be significantly reduced, and the functions can be integrated on the chip.

[0073] This application's embodiments address the limitation of traditional static filtering methods, which fix the selection of spectral bands and cannot actively tune the spectral range. Based on a dynamic filter structure, dynamic tuning of the spectral range can be achieved, enabling active tuning of the transmission spectrum within the 3~5μm mid-wave infrared range.

[0074] The embodiments of this application solve the problem of using a four-directional pixel integration method for the intermediate polarizer, thereby achieving in-situ acquisition of full linear polarization information.

[0075] All of the above-mentioned optional technical solutions can be combined in any way to form the optional embodiments of this application, and will not be described in detail here.

[0076] It should be understood that the sequence number of each step in the above embodiments does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0077] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. An infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp, characterized in that, This includes infrared focal plane array substrates, micro / nano polarizers, and dynamic filters; Among them, the micro-nano polarizer and the dynamic filter are both integrated on top of the infrared focal plane substrate in a bracket manner; The dynamic filter, micro-nano polarizer, and infrared focal plane substrate are arranged from top to bottom, and all three are parallel to each other.

2. The infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp according to claim 1, characterized in that, The infrared focal plane substrate includes an infrared focal plane chip; The infrared focal plane chip includes a readout circuit and N chip pixels, wherein the readout circuit includes N indium pillar interconnect layers and a readout unit; N is a positive integer greater than 1; N indium pillar interconnect layers and N chip pixels are aligned vertically, and all N indium pillar interconnect layers are connected to the readout unit.

3. The infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp according to claim 2, characterized in that, The micro / nano polarizer is a metal polarizer, consisting of four metal micro / nano structure gratings arranged in a rotating pattern at 0°, 45°, 90° and 135°, forming a cycle that corresponds to four pixels of the infrared focal plane chip, thus constituting a set of Stokes polarization vectors.

4. The infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp according to claim 3, characterized in that, The micro / nano polarizer includes N sets of subwavelength micro / nano extinction structures. Each set of subwavelength grating micro / nano structures includes the four polarization directions of 0°, 45°, 90° and 135°, which are used to obtain the Stokes polarization vector. The N sets of subwavelength Wiener extinction structures are aligned vertically with the N chip pixels.

5. The infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp according to claim 1, characterized in that, The effective filtering area of ​​the dynamic filter covers all pixels of the infrared focal plane array chip.

6. The infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp according to claim 1, characterized in that, The dynamic filter adopts a microelectromechanical system (MEMS-FP) cantilever beam structure based on the Fabry-Perot interference principle; The MEMS-FP cantilever beam is driven by static voltage.

7. The infrared spectral polarization integrated structure mimicking the visual cells of a mantis shrimp according to claim 3, characterized in that, The center-to-center distance between two adjacent pixels in N chip pixels is 30 micrometers, and the micro-nano structure size of the metal polarizer in each direction is 30 micrometers. The diameter of the dynamic filter is 6 mm or 7.5 mm.

8. A method for infrared spectral polarization imaging mimicking the visual cells of a mantis shrimp, characterized in that, The method is performed by the infrared spectral polarization integrated structure of the mantis shrimp visual cell as described in claim 1; The method includes: An infrared focal plane chip in an infrared focal plane substrate is used to detect incident light to obtain a basic grayscale image. Determine the target filtering parameters of the dynamic filter based on the imaging target, and configure the dynamic filter based on the target filtering parameters; The incident light is filtered using the configured dynamic filter to obtain the target wavelength band; Intensity images of the target band in four polarization directions (0°, 45°, 90°, and 135°) were obtained using micro / nano polarizers. The infrared focal plane chip is used to detect the intensity images of the four polarization directions. Based on the detection results, the Stokes vector is calculated, and the polarization degree image and polarization angle image are determined based on the Stokes vector. The base grayscale image, the polarization degree image, and the polarization angle image are fused together, and the imaging target is extracted from the fused image.

9. The infrared spectral polarization imaging method for mimicking the visual cells of mantis shrimp according to claim 8, characterized in that, The dynamic filter adopts a microelectromechanical system (MEMS-FP) cantilever beam structure based on the Fabry-Perot interference principle; The target filtering parameters include at least the adaptive transmittance of the imaging target; Configure the dynamic filter according to the target filtering parameters, including: Determine the MEMS driving voltage based on the target filtering parameters; The FP spacing of the dynamic filter is adjusted using a determined MEMS driving voltage so that the difference between the transmission center wavelength of the dynamic filter and the adaptive transmittance is less than a preset threshold.

10. The infrared spectral polarization imaging method for mantis shrimp visual cells according to claim 8, characterized in that, Stokes vectors are calculated as follows: S0=I0+I90, S1=I0-I90, S2=I45-I135; Where S0, S1, and S2 are Stokes vectors; I0 is the intensity image in the 0° polarization direction, I45 is the intensity image in the 45° polarization direction, I90 is the intensity image in the 90° polarization direction, and I135 is the intensity image in the 135° polarization direction.

Images