A double-acting grinding disc mechanism

Abstract

This invention relates to the field of microsphere grinding equipment technology, and provides a double-acting grinding disc mechanism. The grinding disc assembly is mounted on a grinding disc assembly mounting plate, which is mounted on a linear motor. One end of a flexible protective cover is fixed to the grinding disc assembly mounting plate, and the other end is fixed to the flexible protective cover mounting plate. The grinding disc assembly includes an inner grinding disc and an outer grinding disc. Through the movement of the linear motor, the inner and outer grinding discs rotate coaxially and in the same direction at a differential speed, achieving a certain angle of tumbling of the balls within the groove between the inner and outer grinding discs. The flexible protective cover protects the linear motor. This invention achieves a certain angle of tumbling of the balls between the inner and outer grinding discs through the movement of the linear motor in conjunction with the rotation of the grinding disc assembly.

Description

Technical Field

[0001] This invention relates to the field of microsphere grinding equipment technology, and in particular to a double-moving grinding disc mechanism. Background Technology

[0002] Currently, the double-rotating grinding disc mechanism mainly consists of two discs: one stationary and one rotating. It is difficult to achieve higher levels in terms of ball-forming efficiency and accuracy. A double-moving grinding disc mechanism is driven by a power source to realize the movement of two rotating discs. The requirements for the concentricity of the two rotating discs and the end face runout accuracy are very high. Summary of the Invention

[0003] The purpose of this invention is to provide a double-acting grinding disc mechanism to solve the problems of low ball-forming efficiency and low precision in existing ball-forming mechanisms.

[0004] The technical solution of the present invention is a double-acting grinding disc mechanism, characterized in that it includes: a grinding disc assembly, mounted on a grinding disc assembly mounting plate, the grinding disc assembly mounting plate being mounted on a linear motor, the linear motor being used to drive the grinding disc assembly mounting plate and the grinding disc assembly to move; The grinding disc assembly includes an inner grinding disc, an outer grinding disc, a liquid recovery tank, a protective cover, a dual-rotor air-bearing main shaft, a micro pressure sensor, an adjustment mechanism, and a vibration sensor; the dual-rotor air-bearing main shaft includes a base, an outer shaft frameless motor, an outer shaft frameless motor rotor, an outer thrust air-bearing bearing seat, an inner shaft frameless motor, an inner shaft frameless motor rotor, an inner thrust air-bearing bearing seat, an inner radial air-bearing bearing seat, an inner radial air-bearing bearing, an inner radial air-bearing bearing cover, an inner thrust air-bearing bearing, an outer radial air-bearing bearing seat, an outer radial air-bearing bearing, an outer thrust air-bearing bearing, and an outer radial air-bearing bearing cover; The outer shaft frameless motor rotor is installed inside the outer shaft frameless motor through its own magnetic field, and the inner shaft frameless motor rotor is installed inside the inner shaft frameless motor through its own magnetic field. The internal thrust air bearing seat is installed inside the inner shaft frameless motor rotor, and the internal thrust air bearing is installed on the internal thrust air bearing seat with a small clearance fit. The external thrust air bearing housing is installed inside the frameless motor rotor on the outer shaft, and the external thrust air bearing is installed on the external thrust air bearing housing with a small clearance fit. The inner radial air bearing is mounted on the inner radial air bearing seat, and the inner radial air bearing cover is mounted on the inner radial air bearing seat. The outer radial air bearing is mounted on the outer radial air bearing seat, and the outer radial air bearing cap is mounted on the outer radial air bearing seat; The outer grinding disc is mounted on an outer thrust air bearing, and the inner grinding disc is mounted on an inner thrust air bearing. Since the outer shaft frameless motor and the inner shaft frameless motor are controlled independently to achieve coaxial and differential rotation of the output ends of the outer shaft frameless motor rotor and the inner shaft frameless motor rotor, the outer thrust air bearing and the inner thrust air bearing are driven to rotate coaxially and differentially, which in turn drives the inner grinding disc and the outer grinding disc to rotate coaxially and differentially, so as to achieve a certain angle tumbling of the balls in the groove between the inner grinding disc and the outer grinding disc.

[0005] Furthermore, the frameless motor provides rotational power to the frameless motor rotor and the external thrust air bearing housing. The two forks on the external thrust air bearing housing provide power to the external thrust air bearing. An air mold support is formed between the external thrust air bearing housing and the external thrust air bearing through external air supply to eliminate axial runout when the external thrust air bearing rotates.

[0006] Furthermore, the frameless motor with inner shaft provides rotational power to the frameless motor rotor and the internal thrust air bearing housing. The two shift forks on the internal thrust air bearing housing provide power to the internal thrust air bearing. An air mold support is formed between the internal thrust air bearing housing and the internal thrust air bearing through external air supply to eliminate axial runout when the internal thrust air bearing rotates.

[0007] Furthermore, an air mold support is formed between the outer radial air bearing fixed on the outer radial air bearing housing and the outer thrust air bearing to eliminate radial runout when the outer thrust air bearing rotates.

[0008] Furthermore, an air mold support is formed between the inner radial air bearing fixed on the inner radial air bearing seat and the inner thrust air bearing to eliminate radial runout when the inner thrust air bearing rotates.

[0009] Furthermore, the inner radial air bearing cap seals the inner thrust air bearing to prevent the internal gas from leaking out rapidly, thus eliminating the air gap between the inner radial air bearing and the inner thrust air bearing.

[0010] Furthermore, the outer radial air bearing cap seals the outer thrust air bearing to prevent the internal gas from leaking out rapidly, thus eliminating the air gap between the outer thrust air bearing seat and the outer thrust air bearing.

[0011] Furthermore, the vibration sensor is installed on the outside of the liquid recovery tank to detect the smooth operation of the entire mechanism and to detect whether the ball in the channel is damaged.

[0012] Furthermore, the bottom of the grinding disc assembly is equipped with four miniature pressure sensors to detect the condition of the balls inside the grinding disc and their rotation status.

[0013] Furthermore, a displacement measuring sensor and an electron microscope are installed on the outside of the protective cover. The displacement measuring sensor is used to detect the wear of the ball and the wear of the grinding disc, and the electron microscope is used to observe the damage of the groove between the inner and outer grinding discs.

[0014] The present invention has the following beneficial effects: 1. This invention adopts a double-action grinding disc mechanism, driven by two frameless motors, which realizes the movement of two rotating discs. Compared with the single rotating disc mechanism, the double-action rotating disc has higher ball-forming efficiency and higher precision, and can achieve a production of 200-300 1mm balls per disc per week, with a roundness of ≤0.5µm and a surface roughness Ra≤5nm. 2. The double-acting grinding disc mechanism of this invention uses pressure detection and displacement measuring sensors to determine in real time whether the ball diameters have all reached the target value; 3. The double-acting grinding disc mechanism of the present invention uses a vibration sensor detection method to realize real-time online monitoring of whether the ball is intact, and the ball does not need to be repeatedly removed for testing throughout the process; 4. This invention uses a double-moving grinding disc to achieve coaxial, unidirectional, and differential rotation of the inner and outer grinding discs, providing more experimental verification basis for grinding balls. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the grinding disc assembly; Figure 3 This is a schematic diagram of the structure of a dual-rotating air-bearing main shaft; Reference numerals: Grinding disc assembly 1, Inner grinding disc 1-1, Outer grinding disc 1-2, Liquid recovery tank 1-3, Protective cover 1-4, Double rotating air-bearing main shaft 1-5, Base 1-5-1, Outer shaft frameless motor 1-5-2, Outer shaft frameless motor rotor 1-5-3, Outer thrust air-bearing bearing seat 1-5-4, Inner shaft frameless motor 1-5-5, Inner shaft frameless motor rotor 1-5-6, Inner thrust air-bearing bearing seat 1-5-7, Inner radial air-bearing bearing seat 1-5-8, Inner radial air-bearing bearing 1-5-9, Inner... Radial air bearing cap 1-5-10, internal thrust air bearing 1-5-11, external radial air bearing seat 1-5-12, external radial air bearing 1-5-13, external thrust air bearing 1-5-14, external radial air bearing cap 1-5-15, miniature pressure sensor 1-6, adjustment mechanism 1-7, vibration sensor 1-8, linear motor cover 2, displacement distance sensor 3, electron microscope 4, grinding disc assembly mounting plate 5, linear motor 6, flexible cover 7, flexible cover mounting plate 8. Detailed Implementation

[0016] The present invention provides a dual-action grinding disc mechanism, comprising: a grinding disc assembly 1, a linear motor cover 2, a displacement measuring sensor 3, an electron microscope 4, a grinding disc assembly mounting plate 5, a linear motor 6, a flexible cover 7, and a flexible cover mounting plate 8.

[0017] The grinding disc assembly 1 is mounted on the grinding disc assembly mounting plate 5, the grinding disc assembly mounting plate 5 is mounted on the linear motor 6, one end of the flexible cover 7 is fixed on the grinding disc assembly mounting plate 5, and the other end is fixed on the flexible cover mounting plate 8. The grinding disc assembly mounting plate 5 is mounted on the linear motor 6, and the linear motor 6 is used to drive the grinding disc assembly mounting plate 5 and the grinding disc assembly 1 to move.

[0018] The grinding disc assembly 1 includes an inner grinding disc 1-1, an outer grinding disc 1-2, a liquid recovery tank 1-3, a protective cover 1-4, a double rotating air-float main shaft 1-5, a micro pressure sensor 1-6, an adjustment mechanism 1-7, and a vibration sensor 1-8. The liquid recovery tank 1-3 is installed between the outer grinding disc 1-2 and the double rotating air-float main shaft 1-5 to recover the grinding liquid and prevent the grinding liquid from entering the double rotating air-float main shaft 1-5 and causing damage to it. The inner grinding disc 1-1 and the outer grinding disc 1-2 are respectively installed on the inner rotating shaft and the outer rotating shaft of the double rotating air-float main shaft 1-5.

[0019] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the double-rotating air-bearing main shaft 1-5 includes a base 1-5-1, an outer shaft frameless motor 1-5-2, an outer shaft frameless motor rotor 1-5-3, an outer thrust air-bearing bearing seat 1-5-4, an inner shaft frameless motor 1-5-5, an inner shaft frameless motor rotor 1-5-6, an inner thrust air-bearing bearing seat 1-5-7, an inner radial air-bearing bearing seat 1-5-8, an inner radial air-bearing bearing 1-5-9, an inner radial air-bearing bearing cap 1-5-10, an inner thrust air-bearing bearing 1-5-11, an outer radial air-bearing bearing seat 1-5-12, an outer radial air-bearing bearing 1-5-13, an outer thrust air-bearing bearing 1-5-14, and an outer radial air-bearing bearing cap 1-5-15.

[0020] The base 1-5-1 is the mounting base for the remaining components of the dual rotating air-bearing spindle 1-5, and also the connecting plate for the dual rotating air-bearing spindle 1-5 and other equipment.

[0021] The outer shaft frameless motor 1-5-2 and the inner radial air bearing seat 1-5-8, as well as the outer radial air bearing seat 1-5-12 and the inner shaft frameless motor 1-5-5, are all mounted on the base 1-5-1 with screws.

[0022] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the outer shaft frameless motor 1-5-2 provides rotational power to the outer shaft frameless motor rotor 1-5-3 and the outer thrust air bearing seat 1-5-4, the two forks on the outer thrust air bearing seat 1-5-4 provide power to the outer thrust air bearing 1-5-14, and the outer thrust air bearing seat 1-5-4 and the outer thrust air bearing 1-5-14 form an air mold support through external air supply to eliminate the axial runout between the outer thrust air bearing 1-5-14 and the inner thrust air bearing 1-5-11 when the outer thrust air bearing 1-5-14 rotates.

[0023] Furthermore, according to a double-acting grinding disc mechanism provided by the present invention, an air mold support is formed between the outer radial air bearing 1-5-13 fixed on the outer radial air bearing seat 1-5-12 and the outer thrust air bearing 1-5-14, which is used to eliminate radial runout when the outer thrust air bearing 1-5-14 rotates.

[0024] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the inner shaft frameless motor 1-5-5 and the inner shaft frameless motor rotor 1-5-6 provide rotational power for the inner thrust air bearing seat 1-5-7, and the two forks on the inner thrust air bearing seat 1-5-7 provide power for the inner thrust air bearing 1-5-11. The inner thrust air bearing seat 1-5-7 and the inner thrust air bearing 1-5-11 form an air mold support through external air supply to eliminate the axial runout of the inner thrust air bearing 1-5-11 during rotation.

[0025] Furthermore, according to a double-acting grinding disc mechanism provided by the present invention, an air mold support is formed between the inner radial air bearing 1-5-9 fixed on the inner radial air bearing seat 1-5-8 and the inner thrust air bearing 1-5-11, which is used to eliminate radial runout when the inner thrust air bearing 1-5-11 rotates.

[0026] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the outer grinding disc 1-2 is mounted on the outer thrust air bearing 1-5-14, and the inner grinding disc 1-1 is mounted on the inner thrust air bearing 1-5-11, thereby realizing the double rotation of the inner grinding disc 1-1 and the outer grinding disc 1-2.

[0027] Furthermore, according to the dual-action grinding disc mechanism provided by the present invention, the dual-rotation air-bearing main shaft 1-5 ultimately drives the inner grinding disc 1-1 and the outer grinding disc 1-2 through the outer shaft frameless motor 1-5-2 and the inner shaft frameless motor 1-5-5, thereby realizing the individual or synchronous controllable rotation of the inner grinding disc 1-1 and the outer grinding disc 1-2.

[0028] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the inner radial air bearing cap 1-5-10 is used to seal the inner thrust air bearing 1-5-7 to prevent the rapid loss of internal gas and the disappearance of the air mold between the inner radial air bearing 1-5-9 and the inner thrust air bearing 1-5-11.

[0029] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the outer radial air bearing cap 1-5-15 is used to seal the outer thrust air bearing 1-5-14 to prevent the internal gas from leaking out rapidly, so that the air gap between the outer thrust air bearing seat 1-5-4 and the outer thrust air bearing 1-5-14 disappears.

[0030] Furthermore, according to the dual-action grinding disc mechanism provided by the present invention, four miniature pressure sensors 1-6 are provided at the bottom of the grinding disc assembly 1 to monitor the force on the single-drive dual-rotation grinding disc mechanism.

[0031] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, flexible protective covers 7 are provided on the left and right sides of the linear motor 6, and linear motor protective covers 2 are provided on the front and rear sides. The flexible protective covers 7 are used to protect the linear motor 6 and prevent foreign objects and liquids from entering the linear motor 6 and damaging the equipment.

[0032] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, a displacement measuring sensor 3 and an electron microscope 4 are installed on the outside of the protective cover 1-4, wherein the displacement measuring sensor 3 is used to monitor the wear amount of the intermediate groove between the inner grinding disc 1-1 and the outer grinding disc 1-2, and the electron microscope 4 is used to monitor whether there is serious damage to the intermediate groove between the inner grinding disc 1-1 and the outer grinding disc 1-2.

[0033] Furthermore, according to the double-acting grinding disc mechanism provided by the present invention, the vibration sensors 1-8 are used to detect the smoothness of the operation of the entire mechanism and to detect whether the balls in the groove are damaged.

[0034] Furthermore, according to a dual-action grinding disc mechanism provided by the present invention, four adjustment mechanisms 1-7 are installed at the lower part of the dual rotating air-bearing main shaft 1-5, and the adjustment mechanisms 1-7 are used to adjust the levelness of the entire grinding disc assembly.

[0035] Specifically, refer to Figure 1 and Figure 2In this embodiment, the adjustment mechanism 1-7 is used to adjust the levelness of the entire grinding disc assembly. Since the outer shaft frameless motor 1-5-2 and the inner shaft frameless motor 1-5-5 are controlled separately to achieve coaxial and differential rotation of the output ends of the outer shaft frameless motor rotor 1-5-3 and the inner shaft frameless motor rotor 1-5-6, the outer thrust air bearing 1-5-14 and the inner thrust air bearing 1-5-11 are driven to rotate coaxially and differentially, which in turn drives the inner grinding disc 1-1 and the outer grinding disc 1-2 to rotate coaxially and differentially, thereby causing the balls in the groove between the inner grinding disc 1-1 and the outer grinding disc 1-2 to roll at a certain angle.

[0036] The linear motor 6 moves back and forth (lateral movement) while simultaneously applying external pressure from the inner grinding disc 1-1 and the outer grinding disc 1-2, thus providing a rolling motion for the ball in the groove between the inner and outer grinding discs 1-1 and 1-2. Four miniature pressure sensors 1-6 use pressure fluctuation values ​​to monitor whether the ball is damaged during the grinding process. The displacement distance sensor 3 is used to monitor the wear of the groove between the inner and outer grinding discs 1-1 and 1-2 during the grinding process. The electron microscope 4 is used to monitor whether there is serious damage to the groove between the inner and outer grinding discs 1-1 and 1-2. The vibration sensor 1-8 is used to detect the smoothness of the entire mechanism's operation and to detect whether the ball in the groove is damaged.

Claims

1. A double-acting grinding disc mechanism, characterized in that, include: A grinding wheel assembly (1) is mounted on a grinding wheel assembly mounting plate (5), which is mounted on a linear motor (6). The linear motor (6) is used to drive the grinding wheel assembly mounting plate (5) and the grinding wheel assembly (1) to move. The grinding disc assembly (1) includes an inner grinding disc (1-1), an outer grinding disc (1-2), a liquid recovery tank (1-3), a protective cover (1-4), a dual-rotation air-bearing main shaft (1-5), a miniature pressure sensor (1-6), an adjustment mechanism (1-7), and a vibration sensor (1-8); the dual-rotation air-bearing main shaft (1-5) includes a base (1-5-1), an outer shaft frameless motor (1-5-2), an outer shaft frameless motor rotor (1-5-3), an outer thrust air-bearing bearing seat (1-5-4), and an inner shaft frameless motor... The components include: a frameless motor rotor (1-5-5), an inner shaft frameless motor rotor (1-5-6), an inner thrust air bearing housing (1-5-7), an inner radial air bearing housing (1-5-8), an inner radial air bearing (1-5-9), an inner radial air bearing cap (1-5-10), an inner thrust air bearing (1-5-11), an outer radial air bearing housing (1-5-12), an outer radial air bearing (1-5-13), an outer thrust air bearing (1-5-14), and an outer radial air bearing cap (1-5-15). The outer shaft frameless motor rotor (1-5-3) is installed inside the outer shaft frameless motor (1-5-2) through its own magnetic field, and the inner shaft frameless motor rotor (1-5-6) is installed inside the inner shaft frameless motor (1-5-5) through its own magnetic field. The internal thrust air bearing seat (1-5-7) is installed inside the frameless motor rotor (1-5-6) on the inner shaft, and the internal thrust air bearing (1-5-11) is installed on the internal thrust air bearing seat (1-5-7) with a small clearance fit. The external thrust air bearing housing (1-5-4) is installed inside the frameless motor rotor (1-5-3) on the outer shaft, and the external thrust air bearing (1-5-14) is installed on the external thrust air bearing housing (1-5-4) with a small clearance fit. The inner radial air bearing (1-5-9) is installed on the inner radial air bearing seat (1-5-8), and the inner radial air bearing cap (1-5-10) is installed on the inner radial air bearing seat (1-5-8). The outer radial air bearing (1-5-13) is mounted on the outer radial air bearing seat (1-5-12), and the outer radial air bearing cap (1-5-15) is mounted on the outer radial air bearing seat (1-5-12). The outer grinding disc (1-2) is mounted on the outer thrust air bearing (1-5-14), and the inner grinding disc (1-1) is mounted on the inner thrust air bearing (1-5-11). Since the outer shaft frameless motor (1-5-2) and the inner shaft frameless motor (1-5-5) are controlled independently to achieve coaxial and differential rotation of the output ends of the outer shaft frameless motor rotor (1-5-3) and the inner shaft frameless motor rotor (1-5-6), thereby driving the outer thrust air bearing (1-5-14) and the inner thrust air bearing (1-5-11) to rotate coaxially and differentially, and further driving the inner grinding disc (1-1) and the outer grinding disc (1-2) to rotate coaxially and differentially, so as to achieve the rolling of the ball in the groove between the inner grinding disc (1-1) and the outer grinding disc (1-2) at a certain angle.

2. The double-acting grinding disc mechanism according to claim 1, characterized in that, The frameless motor (1-5-2) provides rotational power to the frameless motor rotor (1-5-3) and the external thrust air bearing housing (1-5-4). The two forks on the external thrust air bearing housing (1-5-4) provide power to the external thrust air bearing (1-5-14). The external thrust air bearing housing (1-5-4) and the external thrust air bearing (1-5-14) form an air mold support through external air supply to eliminate the axial runout of the external thrust air bearing (1-5-14) during rotation.

3. The double-acting grinding disc mechanism according to claim 1, characterized in that, The frameless motor (1-5-5) provides rotational power to the frameless motor rotor (1-5-6) and the internal thrust air bearing housing (1-5-7). The two forks on the internal thrust air bearing housing (1-5-7) provide power to the internal thrust air bearing (1-5-11). The internal thrust air bearing housing (1-5-7) and the internal thrust air bearing (1-5-11) are connected by an external air supply to form an air mold support, which is used to eliminate the axial runout of the internal thrust air bearing (1-5-11) during rotation.

4. The double-acting grinding disc mechanism according to claim 1, characterized in that, An air mold support is formed between the outer radial air bearing (1-5-13) fixed on the outer radial air bearing housing (1-5-12) and the outer thrust air bearing (1-5-14) to eliminate radial runout when the outer thrust air bearing (1-5-14) rotates.

5. The double-acting grinding disc mechanism according to claim 1, characterized in that, An air mold support is formed between the inner radial air bearing (1-5-9) fixed on the inner radial air bearing housing (1-5-8) and the inner thrust air bearing (1-5-11), which is used to eliminate the radial runout of the inner thrust air bearing (1-5-11) when it rotates.

6. The double-acting grinding disc mechanism according to claim 1, characterized in that, The inner radial air bearing cap (1-5-10) seals the inner thrust air bearing (1-5-11) to prevent the rapid loss of internal gas and the disappearance of the air mold between the inner radial air bearing (1-5-9) and the inner thrust air bearing (1-5-11).

7. The double-acting grinding disc mechanism according to claim 1, characterized in that, The outer radial air bearing cap (1-5-15) seals the outer thrust air bearing (1-5-14) to prevent the internal gas from leaking out quickly, thus eliminating the air gap between the outer thrust air bearing seat (1-5-4) and the outer thrust air bearing (1-5-14).

8. A double-acting grinding disc mechanism according to claim 1, characterized in that, The vibration sensor (1-8) is installed on the outside of the liquid recovery tank (1-3) to detect the smooth operation of the entire mechanism and to detect whether the ball in the channel is damaged.

9. A double-acting grinding disc mechanism according to claim 3, characterized in that, The bottom of the grinding disc assembly (1) is equipped with four miniature pressure sensors (1-6) to detect the condition of the balls inside the grinding disc and the running status of the balls.

10. A double-acting grinding disc mechanism according to claim 5, characterized in that, The protective cover (1-4) is equipped with a displacement measuring sensor (3) and an electron microscope (4). The displacement measuring sensor (3) is used to detect the wear of the ball and the wear of the grinding disc, and the electron microscope (4) is used to observe the damage of the groove between the inner grinding disc (1-1) and the outer grinding disc (1-2).

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